JP5115803B2 - Glass substrate for flat panel display and manufacturing method thereof - Google Patents

Description

  The present invention relates to a glass substrate for flat panel display and a method for manufacturing the same, and more specifically, the shape of the glass substrate for improving the transfer state when the glass substrate for flat panel display is placed on a work table. The present invention relates to an improvement and a method for producing the glass substrate suitable for the improvement.

  As is well known, flat panel displays (hereinafter also referred to as FPDs) such as plasma displays, field emission displays (including surface emission displays), liquid crystal displays, and electroluminescence displays are manufactured using an FPD glass substrate as an original plate. It is manufactured with two panel glasses facing each other. In that case, elements such as fine electrodes and partition walls are formed on the surface of an FPD glass substrate (hereinafter also simply referred to as a glass substrate) as an original plate. It is customary to apply heat treatment.

  This heat treatment is generally carried out by a method of transporting into a heating furnace in a state where the glass substrate is placed on a flat placement surface of a work table called a setter. On the other hand, in order to perform an appropriate heat treatment, it is necessary to maintain a state where the glass substrate is accurately positioned in an appropriate posture with respect to the mounting surface of the setter. Such a request is that the glass substrate moves on the placement surface when the shape of the glass substrate when the glass substrate is placed (transferred) on the placement surface of the setter is inappropriate. The place to rely on is great.

  In order to deal with this type of problem, for example, according to Patent Document 1, in the state where the glass substrate is placed on the placement surface of the setter, a shape in which the central portion of the glass substrate becomes a mountain (convex), or the center It is disclosed that the shape of the portion is a valley (concave), and the amount of warpage is set to be 0.003% or more and 0.050% or less. More specifically, in FIGS. 1 and 2 of the same document, the glass substrate has a shape curved in an arc shape only in one direction and the central part is convex or concave, and FIGS. 3 and 4 of the same document. The glass substrate is shaped like a bowl and has a convex or concave central part. In FIGS. 5 and 6 of the same document, the glass substrate is basically bowl-like and curved in an S-shaped cross section. It is disclosed that it has the shape and the central portion is basically convex or concave.

JP 2008-7364 A

  By the way, since the shape of the glass substrate in the mounting state disclosed by FIGS. 1-6 of the said patent document 1 is not all suitable, those glass substrates are mounted on the mounting surface of a setter. At times, as will be described in detail below, there arises a problem of incurring misalignment and posture, and this type of problem becomes conspicuous particularly in the current situation where an increase in the size of a glass substrate is promoted. Here, the misalignment of the glass substrate means that the glass substrate is placed on the placement surface of the setter, and the four sides of the glass substrate are essentially parallel to the four sides of the placement surface. It means that it is tilted despite the fact (hereinafter the same).

  The cause of this type of problem originates in the formation of an air layer between the glass substrate and the mounting surface when the glass substrate is mounted on the mounting surface of the setter. In that case, when the glass substrate under the mounting state has a shape as shown in FIG. 1 of the same document, the contact state between the mounting surface of the setter and the glass substrate is at both ends in the width direction of the glass substrate. Only two line contacts are made, and if the shape is as shown in FIG. 2 of the same document, only one line contact is made in the central portion in the width direction of the glass substrate. In such a contact state, the degree of deformation of the glass substrate approaching a flat shape due to its own weight increases immediately after placement, and the pressing force acting on the air layer from the glass substrate at the time of deformation increases. It is considered that the pressure of the air layer rises momentarily, and a force to lift the glass substrate works. Then, the force to float the glass substrate overcomes the force to maintain the glass substrate in the position or posture immediately after placement, thereby causing slippage in the glass substrate and causing misalignment or misalignment. It is thought to come. In particular, when the glass substrate is thin and light in weight, the force to maintain the orientation of the glass substrate decreases, and the larger the size of the glass substrate, the more time it takes for air in the air layer to escape. The problem of the above-mentioned positional deviation and the deviation of the posture becomes remarkable.

  Further, when the shape is as shown in FIG. 3 of the same document, the peripheral portion of the glass substrate is in contact with the mounting surface over the entire circumference, but the air layer stored in the convex portion in the central portion is confined. Since there is no path for air to escape, the internal pressure of the air layer increases with a large deformation due to the weight of the glass substrate immediately after placement. For this reason, it is considered that the force to float the glass substrate increases, resulting in slippage of the glass substrate, resulting in misalignment or misalignment. On the other hand, in the case of the shape as shown in FIG. 4 of the same document, only the central portion of the glass substrate is in point contact at the time of mounting, and the pressure of the air layer increases due to a large deformation due to its own weight immediately after that. In addition, it is considered that the force to float the glass substrate is increased, and the glass substrate is misaligned and the posture is changed. In particular, in this case, since the central portion of the glass substrate is in point contact at the beginning of placement, it can be easily turned horizontally using the point contact portion as a fulcrum, and the posture may become noticeable.

  Furthermore, even if the shape is as shown in FIG. 5 of the same document, the air layer stored in the convex portion near the center of the glass substrate is confined, so the air layer is greatly deformed by its own weight. Even if the internal pressure of the glass plate rises and a force to lift the glass substrate is applied, and the force to lift the glass substrate is applied to a part of the glass substrate, the positional deviation or posture of the glass substrate is incorrect. It is thought that can be invited. Moreover, if it is a shape as shown in FIG. 6 of the same literature, the vicinity of the center part of a glass substrate will be in point contact at the beginning of mounting, and it will be in a state where it can be easily turned horizontally. However, in any case, since large deformation occurs due to its own weight immediately after placement, it is considered that the pressure of the air layer rises and the positional deviation of the glass substrate and the deviation of the posture occur.

  Considering the above matters, the shape of the glass substrate under the mounting state on the setter shown in FIGS. 1 to 6 of the same document is that the glass substrate is greatly deformed by its own weight immediately after mounting, and the pressure of the air layer is reduced. Whether the shape is unreasonably raised, or the air layer is confined by the glass substrate immediately after placement, or the glass substrate is in a state where it can be easily turned horizontally by point contact at the beginning of placement. It can be said that either. And if it is such a shape, a glass substrate will have a position shift or an attitude | position deviation on the mounting surface of a setter.

  On the other hand, the present inventor, as a method for producing an FPD glass substrate (FPD glass substrate before element formation or the like), a molding step of molding molten glass into a strip-shaped glass substrate base material in a float bath, The float method which has a slow cooling process which anneals the glass substrate base material after shaping | molding while conveying in a slow cooling furnace is employ | adopted. And in said slow cooling process, the conveyance process which conveys the glass substrate base material with the roller which supports from the downward direction over the width direction full length is performed.

  If the glass substrate obtained by such a manufacturing method is placed on the setting surface of the setter as described above, in order to prevent misalignment or misalignment, the manufacturing Although it is necessary to make improvements to the method, no measures have been taken regarding what kind of improvements are appropriate.

  In view of the above circumstances, the present invention provides a glass substrate for FPD that does not cause misalignment or misalignment in the state of being placed on a placement surface of a workbench such as a setter, and manufacturing suitable for the same. It is a technical problem to provide a method.

In order to solve the above technical problems, the present invention has an average plate thickness of 0.5 to 3.0 mm, and the dimensions of two perpendicular sides are 400 to 5000 mm and 800 to 5000 mm, respectively. A glass substrate for a panel glass of a flat panel display that is placed on a flat placement surface of a table and subjected to predetermined processing,
A curved surface portion having a waveform in which peaks and valleys alternately exist in a direction along one side of a partial region or the entire region of the glass surface facing the placement surface in a state of being placed on the placement surface. And the crests and troughs of the curved surface portion are respectively continuous in the direction along the other side orthogonal to the one side, and Two or more alternately exist, and in the adjacent peaks and valleys of the curved surface portion, the distance from the placement surface to the highest point of the mountain and the distance from the placement surface to the lowest point of the valley The difference from the dimension is 0.01 to 0.15 mm, and the maximum separation dimension from the placement surface to the highest point of all the peaks of the curved surface is 0.15 mm or less .

According to such a configuration, among the front and back glass surfaces of the glass substrate in a state of being placed on the placement surface of the work table such as a setter, a partial region or the entire region of the glass surface facing the placement surface Has a curved surface, and the shape of the curved surface has a waveform in which peaks (convex) and valleys (concave) are alternately present in a direction along one side. Each of them continues in a direction along another side orthogonal to the side. Therefore, immediately after placement, the glass substrate and the placement surface are in line contact at a plurality of locations, and the positions where the line contact is made always exist at positions other than both ends in the direction along one side of the glass substrate. In such a contact state, the glass substrate can come into contact with the mounting surface at a location other than both ends and at least one location separated from it in the direction along the one side. In the direction along the other side, all contact points can come into contact over the entire length. As a result, the distance between the contact points is reduced in the direction along the one side, and the length of each contact point is maximized in the direction along the other side. It is possible to reduce the deformation due to. As a result, even if the glass substrate is deformed by its own weight immediately after placement, the pressure increase in the air layer between the glass substrate and the placement surface is reduced, and the force required to float the glass substrate is less likely to occur. Therefore, the probability of occurrence of slippage of the glass substrate and misalignment and posture deviation due to this will be extremely small. Moreover, since the peaks and valleys of the glass substrate are continuous in the direction along the other side, the air layer is not confined, and air can escape freely. The force that causes the glass substrate to float is further less likely to be generated, and coupled with the reduction in deformation, the occurrence of positional displacement and misalignment of the glass substrate is reliably suppressed. In addition, since the glass substrate is in line contact at a plurality of places from the beginning of placement, horizontal rotation of the glass substrate due to point contact and deviation of the posture due to this cannot occur .

In this case, in the present invention, as described above, the curved surface portion has two or more peaks and valleys alternately .

  In this way, since the number of contact points in the direction along the one side of the glass substrate can be three or more, the deformation immediately after placement of the glass substrate is further reduced, and the pressure of the air layer is increased. Can be accurately suppressed.

  Furthermore, it is preferable that the curved surface portion exists in any arbitrary 400 mm section extending over the entire length in the direction along the one side of the glass surface facing the mounting surface.

  If it does in this way, the contact location of the direction along the said one side of a glass substrate will be made into an appropriate number, and said deformation | transformation suppression effect and the pressure rise suppression effect of an air layer will be equal over the whole region of the said glass substrate. Can be obtained.

In the present invention, as described above, in the adjacent peaks and valleys of the curved surface portion, the separation dimension from the placement surface to the highest point of the mountain and the lowest point of the valley from the placement surface. The difference from the separation dimension is 0.01 to 0.15 mm, and the maximum separation dimension from the placement surface to the highest point of all the peaks of the curved surface portion is 0.15 mm or less .

In this way, by ensuring that the crest height and trough depth of the glass substrate fall within appropriate ranges, the deformation suppression effect and the air layer pressure increase suppression effect over the entire area of the glass substrate are ensured. In addition to being able to do so, the corrugated shape of the curved surface portion can be made into a good shape, so that there is no possibility of degrading the quality of the glass substrate itself as a panel glass application of a flat panel display.

  Furthermore, it is preferable that h / L is less than 0.003%, where L is the length of the one side and h is the maximum distance dimension from the placement surface to the glass surface.

  In this way, by optimizing the maximum height of the crest of the curved surface portion, it is possible to reliably prevent the glass substrate from degrading while ensuring the effect of suppressing the displacement of the glass substrate and the deviation of the posture. be able to.

  A typical example of the work table is a setter that is transported into a heating furnace. In this case, the setter is preferably a rectangular parallelepiped article made of crystallized glass whose mounting surface is a rectangle having a larger area than the glass substrate.

  In this way, it is possible to smoothly perform element formation on the glass substrate without any trouble and to improve production efficiency.

On the other hand, the method according to the present invention, which was created to solve the above technical problem, has an average thickness of 0.5 to 3.0 mm, and the dimensions of two sides forming a right angle are 400 to 5000 mm and 800 to 5000 mm, respectively. der is, is placed on a workbench of a flat mounting on surface with a predetermined processing is performed, the glass surface facing the the placing surface in the mounted state on the mounting surface one The partial region or the whole region has a form having a corrugated curved surface in which peaks and valleys are alternately present in a direction along one side, and the peaks and valleys of the curved surface portion are the one side and Each of the curved surfaces has two or more peaks and valleys alternately, and the curved surface portion has two or more peaks and valleys adjacent to each other. The distance from the surface to the highest point of the mountain and the lowest point of the valley from the mounting surface The difference between the separation distance at is the 0.01～0.15Mm, flat panel displays maximum separation distance from the mounting surface to the uppermost point of all the mountains of the curved portion is 0.15mm or less In order to manufacture a glass substrate for panel glass, a molding process in which molten glass is formed into a plate-shaped glass substrate base material in a float bath, and a glass substrate base material after molding is gradually cooled while being transported in a slow cooling furnace. A cooling process, and in the slow cooling process, the glass substrate base material is transported by a roller that supports the entire length in the width direction from below. The glass substrate base material is transported by the roller in a state in which convex portions are arranged at a plurality of axial positions on the outer peripheral surface of the roller and the convex portion is in contact with only the lower surface of the glass substrate base material. Door is characterized in.

  According to such a method, the convex part formed in the several axial direction of the roller contact | abutted to the lower surface of the glass substrate base material (band-shaped glass substrate base material) in the state softened moderately in a slow cooling furnace. In this state, the glass substrate base material is transported by the roller. Therefore, the lower surface of the glass substrate base material has a crest (convex) at the surface portion in contact with the convex portion of the roller, and the other surface portion at the bottom. (Concave) or a flat part that continues to the bottom of the valley, and the peaks and valleys are formed in a continuous form in the transport direction. By sequentially cutting the glass substrate base material having such a shape at a predetermined length position in the transport direction, a glass substrate having the above-described curved surface portion can be finally obtained.

In this case, it is preferable that the convex portion (one convex portion in the axial direction) is formed in any arbitrary 400 mm section extending over the entire axial length of the support portion of the glass substrate base material in the roller.

In this way, finally, a mountain can be formed in any arbitrary 400 mm section extending over the entire length in the direction along one side of the lower surface of the glass substrate. In this case, the lower surface of the glass substrate is the glass surface facing the mounting surface described above.

  Moreover, it is preferable that the protrusion dimension from the said outer peripheral surface of the said convex part (all the convex parts of several axial direction places) is 0.5-30 mm.

  If it does in this way, the several peak of suitable height can be formed in the lower surface of the glass substrate finally obtained.

  In this case, the convex portion (one convex portion in the axial direction) may be a plurality of projections scattered over the entire circumference of the roller, or an annular projection continuous over the entire circumference of the roller. It may be.

  That is, the convex portion may be any one that can be continuously formed in one direction with peaks and valleys on the lower surface of the finally obtained glass substrate. From the viewpoint of manufacturing, it is advantageous to use the plurality of protrusions or annular protrusions described above.

  Moreover, it is preferable that the said roller is arrange | positioned in the upstream site | part in a slow cooling furnace.

  That is, the upstream portion in the slow cooling furnace has an internal temperature that is suitable for forming peaks and valleys on the lower surface of the glass substrate base material, that is, a temperature at which the softened state of the glass substrate base material is convenient. If a roller is disposed at that portion, the bottom surface of the finally obtained glass substrate has a good curved surface.

  Furthermore, it is preferable that the roller is disposed at a plurality of locations in the transport direction.

  In this way, peaks and valleys are formed on the lower surface of the glass substrate base material by the plurality of rollers having convex portions arranged at the same axial position, so that the peaks and valleys are properly formed. It becomes the form which continued in the conveyance direction.

As described above, according to the glass substrate according to the present invention, when the glass substrate is placed on the placement surface of the work table such as a setter, each contact location is in the direction along one side of the glass substrate. In the direction along the other side perpendicular to the distance, the length of each contact portion is maximized, so that the deformation due to the weight of the glass substrate can be reduced. Therefore, even if the glass substrate is deformed by its own weight immediately after mounting, the pressure increase of the air layer between the glass substrate and the mounting surface is reduced, and it becomes difficult to generate the force necessary to float the glass substrate. The probability of occurrence of slippage of the glass substrate and positional deviation and posture deviation caused by this will be extremely small. In addition, since there is no point contact at the beginning when the glass substrate is placed on the placement surface, the posture of the glass substrate cannot be distorted due to horizontal turning. Moreover, since the peaks and valleys of the glass substrate are continuous in the direction along the other side, the air layer is not confined, and air can escape freely. The force that causes the glass substrate to float is further less likely to be generated, and coupled with the reduction in deformation, the occurrence of positional displacement and misalignment of the glass substrate is reliably suppressed. Moreover, the glass substrate in the state of being placed on the placement surface has a maximum separation dimension of 0.15 mm or less from the placement surface to the highest point of all the peaks of the curved surface portion. It is suitable as a glass substrate for glass.

  Hereinafter, a glass substrate for a flat panel display according to an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic perspective view exaggeratingly showing a glass substrate 1 according to an embodiment of the present invention. The glass substrate 1 shown in the figure has an average plate thickness of 1.0 to 3.0 mm, a dimension of one side (long side) 1A of 1000 to 3000 mm, and a dimension of another side (short side) 1B perpendicular to this. Is a glass substrate for plasma display ( glass substrate for panel glass of plasma display) . The glass substrate 1 is placed on a flat placement surface 2a of a setter 2 as a work table, and the entire area of the glass surface (lower surface) facing the placement surface 2a is on the long side 1A. In the direction along which the peaks 1x and the valleys 1y alternately exist, the peaks 1x and the valleys 1y continue along the entire length in the direction along the short side 1B. Specifically, the lower surface of the glass substrate 1 has 2 or 3 or more (preferably 5 or 6 or more) continuous peaks 1x and valleys 1y in the direction along the long side 1A, and 4 or 6 (preferably). 10 or 12 or more) and smoothly curved (see FIG. 2). In this case, the bottom end portions of the plurality of valleys 1y as all or a part of the valleys 1y are in contact with the mounting surface 2a, and therefore the glass substrate 1 has two or three or more locations (preferably Are in line contact with the mounting surface 2a at 5 or 6 or more locations. In addition, it is preferable that those line contact locations are made into the pitch of 50-200 mm, for example.

  In this case, as shown in FIG. 3, the lower surface of the glass substrate 1 has a peak 1x and a valley 1y each in any arbitrary 400 mm section A1, A2, A3... Over the entire length in the direction along the long side 1A. There are two or more. In other words, in any length region in the direction along the long side 1A of the lower surface of the glass substrate 1, any one of the 400 mm sections has one or more peaks 1x and valleys 1y in the section. Yes. In addition, in any adjacent mountain 1x and valley 1y, with respect to the separation dimension B1, B3 from the mounting surface 2a to the highest point of the mountain 1x, and the separation dimension B2 from the mounting surface 2a to the lowest point of the valley 1y. The difference between them is 0.01 to 0.15 mm, and the maximum separation dimension from the placement surface 2a to the highest point of all the peaks 1x is 0.15 mm or less. Furthermore, h / L is less than 0.003% for the dimension L of the long side of the glass substrate 1 and the maximum value h of the separation dimension from the mounting surface 2a to the lower surface of the glass substrate 1.

  If the bottom surface of the glass substrate 1 is placed on the placement surface 2a of the setter 2 and has the form as described above, each location where the valley 1y exists in the direction along the long side 1A. That is, the distance between the contact portions between the glass substrate 1 and the mounting surface 2a is shortened, and the length of each contact portion is maximized in the direction along the short side 1B perpendicular to the glass substrate 1; It is possible to reduce deformation due to the weight of the substrate 1. Therefore, even if the glass substrate 1 is deformed by its own weight immediately after being placed on the setter 2, the air layer interposed between the glass substrate 1 and the placing surface 2 a is excessive because the deformation of the glass substrate 1 is small. It is never compressed. Therefore, it is difficult for the air layer to generate a force necessary to float the glass substrate 1, and there is a probability of occurrence of slippage on the mounting surface 2 a of the glass substrate 1 and positional deviation or posture deviation due to this. Extremely small.

  In addition, the crest 1x and the trough 1y on the lower surface of the glass substrate 1 are continuous over the entire length in the direction along the short side 1B. Since the glass substrate 1 can escape freely, a force to lift the glass substrate 1 is further less likely to be generated, and the mounting surface of the glass substrate 1 is coupled with the suppression of deformation due to the weight of the glass substrate 1 described above. Occurrence of misalignment and posture misalignment on 2a is reliably suppressed. Further, if the glass substrate 1 has such a configuration, it is impossible to make point contact at the beginning when the glass substrate 1 is placed on the placement surface 2a. There is no room for this to occur.

  In addition, although the form of the glass substrate 1 shown in FIG. 3 can be divided into a mountain 1x and a valley 1y with each inflection point as a boundary, even if the inflection point cannot be clearly recognized, If the peak 1x and the valley 1y can be grasped and the valley 1y is in line contact with the placement surface 2a, the same effect can be obtained.

  And the glass substrate 1 mounted on the mounting surface 2a of the setter 2 in the form as described above is transported to a heating furnace for element formation or the like and subjected to a heat treatment. Since it is possible to maintain the state of being placed at an accurate position on the setter 2 in an accurate posture, an appropriate heat treatment can be performed. The work table on which the glass substrate 1 is placed may be other than the setter 2 described above, and the work table may be applied to the glass substrate 1 regardless of whether it is movable or non-movable. The processing to be performed includes various processing such as cooling processing and exposure processing in addition to the heat processing.

FIG. 4 illustrates the implementation status of a manufacturing method suitable for manufacturing the glass substrate 1 described above. That is, the method for manufacturing the glass substrate 1 uses a so-called float method, in which a molten glass is molded into a strip-shaped glass substrate base material 10 in a float bath, and a glass substrate after molding And a slow cooling step in which the original material is gradually cooled while being conveyed in a slow cooling furnace. And in the slow cooling process, the roller 11 which supports the strip | belt-shaped glass substrate base material 10 only from the downward direction over the full length in the width direction is predetermined in the conveyance direction in the slow cooling process as shown in the figure. A plurality are arranged at intervals.

  On the outer peripheral surface 11a of each roller 11 described above, convex portions 12 are formed at a plurality of axial positions (preferably two or three or more locations: seven in the illustrated example) at a pitch of, for example, 50 to 200 mm. . In addition, it is preferable that at least one convex portion 12 is formed in any arbitrary 400 mm section over the entire axial length of the support portion of the glass substrate base material 10 in the roller 11. And these convex parts 12 consist of many protrusions 12x scattered over the perimeter of roller 11, and the protrusion dimensions from peripheral face 11a of these protrusions 12x are 0.5-30 mm, More preferably, the lower limit is 3 mm and the upper limit is 10 mm. Therefore, each roller 11 conveys the glass substrate base material 10 to the downstream side while the convex portion 12 is brought into contact with the lower surface of the glass substrate base material 10. In that case, on the lower surface of the glass substrate base material 10, a crest 10x is formed at a position corresponding to the convex portion 12, and a trough 10y is formed at other portions. And the glass substrate 1 as shown in FIG. 1 is finally obtained by sequentially cutting the glass substrate base material 10 of this form at a predetermined length position in the transport direction.

In this case, SO ₂ gas is sprayed on the lower surface of the glass substrate base material 10 in order to form a sulfate film, and the spray nozzle is arranged around the roller 11 and the shaft of the roller 11. They are arranged at a plurality of axial positions extending in parallel. If the arrangement pitch of these spray nozzles is made to correspond to the formation location of the crest 10x of the glass substrate base material 10, sulfate deposits on the site corresponding to the arrangement location of the spray nozzle in the axial direction of the roller 11 and the above. A large number of projections 12x scattered all around the circumference. Therefore, in this embodiment, the peak 10x and the valley 10y are formed in the glass substrate base material 10 by effectively using such a phenomenon.

  Here, the shape of the convex portion 12 of the roller 11 is not limited to that formed of a large number of protrusions 12x scattered over the entire circumference as described above, but, for example, as shown in FIG. The annular projection 13x may be integrally formed or fixed as a separate body. Also in this case, the protruding dimension of the annular protrusion 13x from the outer peripheral surface 11a is the same as described above.

  In addition, the glass substrate 1 which concerns on this invention is not restricted to the form illustrated in FIGS. 1-3, A various variation is possible. That is, the lower surface of the glass substrate 1 shown in FIG. 6 has one crest 1x and one trough 1y, and exemplifies the case where there are two line contact portions with the placement surface 2a. Moreover, the lower surface of the glass substrate 1 shown in FIG. 7 has two crests 1x and two troughs 1y, and illustrates the case where there are three line contact points with the mounting surface 2a.

  In addition, the lower surface of the glass substrate 1 shown in FIG. 8 illustrates a case where the valley 1y of the peaks 1x and the valleys 1y has a flat surface portion 1z, and the glass substrate 1 shown in FIG. The lower surface exemplifies a case where the crest 1x of the crest 1x and the trough 1y has a flat surface portion 1z. Furthermore, as shown in FIG. 10, even if there is a region 1 w that cannot be grasped as a valley or a mountain at the center of the lower surface of the glass substrate 1, a partial region of the glass substrate 1 (in the illustrated example, both ends) It suffices if there are portions where peaks 1x and valleys 1y are alternately present as two curved surface portions in the region. In addition, as shown in FIG. 11, even when one peak 1x and one valley 1y each have a plurality of inflection points R (points where the sign of the differential value changes), these are one peak 1x. And one valley 1y.

It is a schematic perspective view which shows the state by which the glass substrate for flat panel displays which concerns on one Embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic longitudinal front view which shows the principal part of the state by which the glass substrate for flat panel displays which concerns on one Embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic longitudinal front view which shows the principal part of the state by which the glass substrate for flat panel displays which concerns on one Embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic perspective view which shows the implementation condition of the manufacturing method of the glass substrate for flat panel displays which concerns on one Embodiment of this invention. It is a single-piece | unit perspective view which shows the modification of the roller used with the said manufacturing method. It is a schematic perspective view which shows the state by which the glass substrate for flat panel displays which concerns on 2nd embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic perspective view which shows the state by which the glass substrate for flat panel displays which concerns on 3rd embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic front view which shows the state by which the glass substrate for flat panel displays which concerns on 4th embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic front view which shows the state by which the glass substrate for flat panel displays which concerns on 5th embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic front view which shows the state by which the glass substrate for flat panel displays which concerns on 6th embodiment of this invention was mounted on the mounting surface of a work bench. It is a schematic front view which shows the principal part of the state by which the glass substrate for flat panel displays which concerns on 7th embodiment of this invention was mounted on the mounting surface of a work bench.

Explanation of symbols

1 Glass substrate 1A One side (long side)
1B Other side (short side)
1x Mountain (convex)
1y valley (concave)
2 Worktable (setter)
2a Placement surface 10 Glass substrate base material 11 Roller 11a Outer peripheral surface 12 Roller convex portion 12x Plural projections 13x Annular projection

Claims (11)

The average plate thickness is 0.5 to 3.0 mm, and the dimensions of two sides forming a right angle are 400 to 5000 mm and 800 to 5000 mm, respectively, and are placed on a flat placement surface of a work table and subjected to predetermined processing. Is a glass substrate for a panel glass of a flat panel display,
A curved surface portion having a waveform in which peaks and valleys alternately exist in a direction along one side of a partial region or the entire region of the glass surface facing the placement surface in a state of being placed on the placement surface. And the crests and troughs of the curved surface portion are respectively continuous in the direction along the other side orthogonal to the one side, and Two or more alternately exist, and in the adjacent peaks and valleys of the curved surface portion, the distance from the placement surface to the highest point of the mountain and the distance from the placement surface to the lowest point of the valley The flat panel is characterized in that a difference from the dimension is 0.01 to 0.15 mm, and a maximum separation dimension from the placement surface to the highest point of all the peaks of the curved surface portion is 0.15 mm or less. Glass substrate for display. In any arbitrary 400mm intervals over the entire length of the direction along the one side of the glass surface, a flat panel glass substrate for a display according to claim 1, wherein the curved portion is present. The length of the one side is L, and h / L is less than 0.003%, where h is the maximum distance dimension from the placement surface to the glass surface. Item 3. The glass substrate for flat panel display according to Item 1 or 2 . The glass substrate for a flat panel display according to any one of claims 1 to 3 , wherein the work table is a setter conveyed in a heating furnace. Averaged plate thickness 0.5 to 3.0 mm, Ri dimension of two sides forming a right angle 400~5000mm and 800~5000mm der respectively, is placed on a workbench of a flat mounting on surface with a predetermined In addition, a partial area or the entire area of the glass surface facing the placement surface in a state of being placed on the placement surface is alternately a mountain and a valley in a direction along one side. It has a form having an existing corrugated curved surface part, and a crest and a valley of the curved surface part are each continuous in a direction along another side orthogonal to the one side, and the curved surface part is Two or more peaks and valleys exist alternately, and in the adjacent peaks and valleys of the curved surface portion, the separation dimension from the placement surface to the highest point of the mountain and the maximum height of the valley from the placement surface. The difference from the separation distance to the lower point is 0.01 to 0.15 mm. In order to manufacture a glass substrate for the panel glass of a flat panel display maximum separation distance to the uppermost point of 0.15mm or less of all the mountains of the curved surface portion, a plate-shaped glass substrate source molten glass in the float bath A forming step of forming into a material and a slow cooling step of gradually cooling the glass substrate base material after forming in a slow cooling furnace, and the glass substrate base material is stretched over the entire length in the width direction in the slow cooling step. A method for producing a glass substrate for a flat panel display in which a carrying process is carried by a roller supported from below,
Protruding portions are arranged at a plurality of axial positions on the outer peripheral surface of the roller, and the glass substrate base material is conveyed by the roller in a state where the convex portions are in contact with only the lower surface of the glass substrate original material. A method for producing a glass substrate for a flat panel display. The said convex part is formed in the arbitrary arbitrary 400 mm area over the axial direction full length of the support part of the glass substrate base material in the said roller, The manufacture of the glass substrate for flat panel displays of Claim 5 characterized by the above-mentioned. Method. The method for producing a glass substrate for a flat panel display according to claim 5 or 6 , wherein a protruding dimension of the convex portion from the outer peripheral surface is 0.5 to 30 mm. The method for producing a glass substrate for a flat panel display according to any one of claims 5 to 7 , wherein the convex portions are a plurality of protrusions scattered over the entire circumference of the roller. The method for producing a glass substrate for a flat panel display according to any one of claims 5 to 7 , wherein the convex portion is an annular projection that is continuous over the entire circumference of the roller. The roller method of manufacturing a glass substrate for a flat panel display according to any one of claims 5-9, characterized in that disposed on the upstream portion of the lehr. The roller method of manufacturing a glass substrate for a flat panel display according to any one of claims 5-10, characterized in that it is arranged at a plurality of locations in the transport direction.

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