JP5111520B2 - 光学素子間の光学的関係を維持する干渉計 - Google Patents

光学素子間の光学的関係を維持する干渉計 Download PDF

Info

Publication number
JP5111520B2
JP5111520B2 JP2009545547A JP2009545547A JP5111520B2 JP 5111520 B2 JP5111520 B2 JP 5111520B2 JP 2009545547 A JP2009545547 A JP 2009545547A JP 2009545547 A JP2009545547 A JP 2009545547A JP 5111520 B2 JP5111520 B2 JP 5111520B2
Authority
JP
Japan
Prior art keywords
assembly
mirror
movable
fixed
flat spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009545547A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010515918A5 (https=
JP2010515918A (ja
Inventor
グレッグ レスラー
ドナルド ダブリュー スティング
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of JP2010515918A publication Critical patent/JP2010515918A/ja
Publication of JP2010515918A5 publication Critical patent/JP2010515918A5/ja
Application granted granted Critical
Publication of JP5111520B2 publication Critical patent/JP5111520B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP2009545547A 2007-01-12 2007-12-07 光学素子間の光学的関係を維持する干渉計 Active JP5111520B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/622,815 US7630081B2 (en) 2007-01-12 2007-01-12 Interferometer maintaining optical relationship between elements
US11/622,815 2007-01-12
PCT/US2007/086713 WO2008088620A1 (en) 2007-01-12 2007-12-07 Interferometer maintaining optical relationship between elements

Publications (3)

Publication Number Publication Date
JP2010515918A JP2010515918A (ja) 2010-05-13
JP2010515918A5 JP2010515918A5 (https=) 2011-02-03
JP5111520B2 true JP5111520B2 (ja) 2013-01-09

Family

ID=39295494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009545547A Active JP5111520B2 (ja) 2007-01-12 2007-12-07 光学素子間の光学的関係を維持する干渉計

Country Status (7)

Country Link
US (1) US7630081B2 (https=)
JP (1) JP5111520B2 (https=)
CN (1) CN101583857B (https=)
CA (1) CA2674571C (https=)
DE (1) DE112007003242B4 (https=)
GB (1) GB2458412B (https=)
WO (1) WO2008088620A1 (https=)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8092030B2 (en) 2006-04-12 2012-01-10 Plx, Inc. Mount for an optical structure and method of mounting an optical structure using such mount
US7995208B2 (en) * 2008-08-06 2011-08-09 Ftrx Llc Monolithic interferometer with optics of different material
US9001334B2 (en) * 2010-11-11 2015-04-07 Thermo Electron Scientific Instruments Llc Interferometer velocity control of beamsplitter and moving mirrors
US9798051B2 (en) 2011-02-28 2017-10-24 Plx, Inc. Mount for an optical structure having a grooved protruding member and method of mounting an optical structure using such mount
WO2013078281A2 (en) 2011-11-23 2013-05-30 Ftrx Llc Quasi- translator, fourier modulator, fourier spectrometer, motion control system and methods for controlling same, and signal processor circuit
US9013814B2 (en) 2012-07-27 2015-04-21 Plx, Inc. Interferometer and optical assembly having beamsplitter securing apparatus and method of mounting same
US8933406B2 (en) 2012-12-21 2015-01-13 Agilent Technologies, Inc. Interferometer having multiple scan carriages
US20150008303A1 (en) 2013-02-21 2015-01-08 Plx, Inc. Mounts for an optical structure having a grooved protruding member with a damping ring disposed in or on the groove and methods of mounting an optical structure using such mounts
WO2014179213A2 (en) * 2013-05-01 2014-11-06 R Jackson Mechanism for movement of a mirror in an interferometer, an interferometer incorporating the same and a fourier transform spectrometer incorporating the same
US10677722B2 (en) 2016-04-05 2020-06-09 University Of Notre Dame Du Lac Photothermal imaging device and system
EP3867629A1 (en) 2016-09-27 2021-08-25 Purdue Research Foundation Depth-resolved mid-infrared photothermal imaging of living cells and organisms with sub-mciron spatial resolution
CN115096853B (zh) 2016-11-29 2026-04-24 光热光谱股份有限公司 用于化学成像原子力显微镜红外光谱法的方法和装置
KR101860347B1 (ko) * 2016-11-29 2018-05-23 국방과학연구소 마이켈슨 간섭계의 하우징 시스템
CN110809728B (zh) 2017-07-06 2022-06-07 浜松光子学株式会社 反射镜单元
US10942116B2 (en) 2017-10-09 2021-03-09 Photothermal Spectroscopy Corp. Method and apparatus for enhanced photo-thermal imaging and spectroscopy
KR102082769B1 (ko) * 2017-10-31 2020-02-28 국방과학연구소 이동반사경 고정구조를 갖는 마이켈슨 간섭계
US11486761B2 (en) 2018-06-01 2022-11-01 Photothermal Spectroscopy Corp. Photothermal infrared spectroscopy utilizing spatial light manipulation
DE102019103814B3 (de) * 2019-02-14 2020-07-02 Hochschule Trier - Trier University of Applied Sciences Vorrichtung zum optischen Messen einer Oberfläche
JP7422413B2 (ja) * 2019-02-28 2024-01-26 国立大学法人 香川大学 分光測定装置
US11480518B2 (en) 2019-12-03 2022-10-25 Photothermal Spectroscopy Corp. Asymmetric interferometric optical photothermal infrared spectroscopy
EP4097452A4 (en) 2020-01-31 2024-05-29 Photothermal Spectroscopy Corp. METHOD AND APPARATUS FOR HIGH-PERFORMANCE WIDE-FIELD PHOTOTHERMAL INFRARED SPECTROSCOPY AND IMAGING
US12369778B2 (en) 2020-06-26 2025-07-29 Photothermal Spectroscopy Corp. Method and apparatus for fiber optic photothermal imaging and spectroscopy
EP4182749A4 (en) 2020-07-20 2024-04-24 Photothermal Spectroscopy Corp. Fluorescence enhanced photothermal infrared spectroscopy and confocal fluorescence imaging
CN112394529B (zh) * 2020-11-27 2022-12-30 南京大学 一种单元件分束合束干涉仪
JP7666138B2 (ja) * 2021-05-31 2025-04-22 株式会社島津製作所 赤外光源装置およびフーリエ変換赤外分光光度計
US12277731B2 (en) * 2022-07-21 2025-04-15 Canon U.S.A., Inc. Methods and systems for system self-diagnosis

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4710001A (en) * 1986-11-21 1987-12-01 Hewlett-Packard Company Support for a moving mirror in an interferometer
US4801366A (en) * 1987-03-18 1989-01-31 Godfrey Jamie E Apparatuses and methods for analyzing macro-ions at electrophoretic steady state
US4773757A (en) * 1987-08-19 1988-09-27 Laser Precision Corporation High resolution spectrometer interferometer having an integrated alignment unit
JPH0641145Y2 (ja) * 1988-02-29 1994-10-26 株式会社島津製作所 平行運動装置
US5133598A (en) * 1990-03-02 1992-07-28 Nicolet Instrument Corporation Command servo for moving mirror of Michelson interferometer
US5173744A (en) * 1991-03-21 1992-12-22 Dybwad Jens R Refractively scanned interferometer
US5309217A (en) * 1991-04-27 1994-05-03 Bruker Analytische Messtechnik Fourier spectrometer
US5486917A (en) * 1991-10-09 1996-01-23 On-Line Technologies Inc Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same
JPH07209085A (ja) * 1994-01-19 1995-08-11 Yokogawa Electric Corp フーリエ分光器
NZ300915A (en) * 1995-02-09 1998-12-23 Foss Electric As Method for standardizing a spectrometer generating an optical spectrum from a sample
US5883712A (en) * 1997-05-21 1999-03-16 Nicolet Instrument Corporation Interferometer of an infrared spectrometer with dynamic moving mirror alignment
WO1999002939A1 (en) * 1997-07-14 1999-01-21 Spectral Dimensions, Inc. Methods and devices for very rapid scan interferometry
US6322037B1 (en) * 1999-10-26 2001-11-27 Yokogawa Electric Corporation Moving mirror support device for photo-interferometer
US20020149777A1 (en) * 2001-04-12 2002-10-17 Schreiber Kenneth C. Support for a movable mirror in an interferometer
US6943892B2 (en) * 2003-01-29 2005-09-13 Sarnoff Corporation Instrument having a multi-mode optical element and method
US7312859B2 (en) * 2004-01-30 2007-12-25 Promet International, Inc. Optical fiber inspection device

Also Published As

Publication number Publication date
DE112007003242T5 (de) 2009-11-26
HK1136345A1 (en) 2010-06-25
GB2458412A (en) 2009-09-23
CA2674571A1 (en) 2008-07-24
WO2008088620A1 (en) 2008-07-24
CN101583857A (zh) 2009-11-18
US20080170231A1 (en) 2008-07-17
US7630081B2 (en) 2009-12-08
CN101583857B (zh) 2012-02-01
JP2010515918A (ja) 2010-05-13
DE112007003242B4 (de) 2016-07-07
CA2674571C (en) 2015-04-21
GB0912325D0 (en) 2009-08-26
GB2458412B (en) 2011-05-18

Similar Documents

Publication Publication Date Title
JP5111520B2 (ja) 光学素子間の光学的関係を維持する干渉計
JP6204798B2 (ja) 複数の走査台を有する干渉計およびそれを含むフーリエ変換赤外分光システム
US5402407A (en) Optical pickup apparatus and method for adjusting optical axis thereof
US8120853B2 (en) Optical assembly, method for assembling an optical assembly, system for securing optical elements of an optical assembly and a spring for securing optical elements of an optical assembly
Sweeney et al. Design considerations for fast-steering mirrors (FSMs)
US7340128B2 (en) Wavelength selection device
US6967722B2 (en) Tilt-compensated interferometers
JP4965466B2 (ja) レーザ発振器
US8542423B2 (en) Stiffness compensation in opto-mechanical mechanisms
US9297639B2 (en) Mechanism for movement of a mirror in an interferometer, an interferometer incorporating the same and a fourier transform spectrometer incorporating the same
US20170115468A1 (en) Folding optics for folding an optical path in a laser pulse arrangement
CN103823275A (zh) 基于柔性铰链的自适应光纤准直器
US20110317170A1 (en) Wedge pair for phase shifting
US20080068612A1 (en) Fourier-transform spectrometers
US4480895A (en) Adjustable reflector apparatus
CN110319934B (zh) 干涉调制器及红外光谱仪
HK1136345B (en) Interferometer maintaining optical relationship between elements
US5721616A (en) Tilt free micromotion translator
RU2065650C1 (ru) Выходное окно
JPH11317557A (ja) 固体レーザー発振器チャンバーの固定方法
Kentischer et al. A fast tracking mirror for adaptive optics
JPH06118330A (ja) ミラー駆動機構
JP2007298651A (ja) 光走査装置
JPS6396625A (ja) アクチユエ−タ
JPH06223381A (ja) 光軸制御装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101207

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101207

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20111004

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20111101

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20111125

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120531

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120614

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20120629

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120904

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120927

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121009

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151019

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5111520

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250