DE112007003242B4 - Interferometer mit Beibehaltung einer optischen Beziehung zwischen Elementen - Google Patents
Interferometer mit Beibehaltung einer optischen Beziehung zwischen Elementen Download PDFInfo
- Publication number
- DE112007003242B4 DE112007003242B4 DE112007003242.1T DE112007003242T DE112007003242B4 DE 112007003242 B4 DE112007003242 B4 DE 112007003242B4 DE 112007003242 T DE112007003242 T DE 112007003242T DE 112007003242 B4 DE112007003242 B4 DE 112007003242B4
- Authority
- DE
- Germany
- Prior art keywords
- mirror
- leaf spring
- movable assembly
- movable
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 46
- 230000014759 maintenance of location Effects 0.000 title 1
- 230000005855 radiation Effects 0.000 claims abstract description 45
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims abstract description 12
- 230000033001 locomotion Effects 0.000 claims abstract description 10
- 238000004611 spectroscopical analysis Methods 0.000 claims abstract 4
- 238000004566 IR spectroscopy Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 230000000712 assembly Effects 0.000 claims description 5
- 238000000429 assembly Methods 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 230000001934 delay Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 239000011104 metalized film Substances 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 claims description 2
- 230000000717 retained effect Effects 0.000 claims 1
- 230000009466 transformation Effects 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 abstract 1
- 230000003455 independent Effects 0.000 abstract 1
- 230000008859 change Effects 0.000 description 14
- 239000007787 solid Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
- G01J3/453—Interferometric spectrometry by correlation of the amplitudes
- G01J3/4535—Devices with moving mirror
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Spectrometry And Color Measurement (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/622,815 US7630081B2 (en) | 2007-01-12 | 2007-01-12 | Interferometer maintaining optical relationship between elements |
| US11/622,815 | 2007-01-12 | ||
| PCT/US2007/086713 WO2008088620A1 (en) | 2007-01-12 | 2007-12-07 | Interferometer maintaining optical relationship between elements |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE112007003242T5 DE112007003242T5 (de) | 2009-11-26 |
| DE112007003242B4 true DE112007003242B4 (de) | 2016-07-07 |
Family
ID=39295494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112007003242.1T Active DE112007003242B4 (de) | 2007-01-12 | 2007-12-07 | Interferometer mit Beibehaltung einer optischen Beziehung zwischen Elementen |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7630081B2 (https=) |
| JP (1) | JP5111520B2 (https=) |
| CN (1) | CN101583857B (https=) |
| CA (1) | CA2674571C (https=) |
| DE (1) | DE112007003242B4 (https=) |
| GB (1) | GB2458412B (https=) |
| WO (1) | WO2008088620A1 (https=) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8092030B2 (en) | 2006-04-12 | 2012-01-10 | Plx, Inc. | Mount for an optical structure and method of mounting an optical structure using such mount |
| US7995208B2 (en) * | 2008-08-06 | 2011-08-09 | Ftrx Llc | Monolithic interferometer with optics of different material |
| US9001334B2 (en) * | 2010-11-11 | 2015-04-07 | Thermo Electron Scientific Instruments Llc | Interferometer velocity control of beamsplitter and moving mirrors |
| US9798051B2 (en) | 2011-02-28 | 2017-10-24 | Plx, Inc. | Mount for an optical structure having a grooved protruding member and method of mounting an optical structure using such mount |
| WO2013078281A2 (en) | 2011-11-23 | 2013-05-30 | Ftrx Llc | Quasi- translator, fourier modulator, fourier spectrometer, motion control system and methods for controlling same, and signal processor circuit |
| US9013814B2 (en) | 2012-07-27 | 2015-04-21 | Plx, Inc. | Interferometer and optical assembly having beamsplitter securing apparatus and method of mounting same |
| US8933406B2 (en) | 2012-12-21 | 2015-01-13 | Agilent Technologies, Inc. | Interferometer having multiple scan carriages |
| US20150008303A1 (en) | 2013-02-21 | 2015-01-08 | Plx, Inc. | Mounts for an optical structure having a grooved protruding member with a damping ring disposed in or on the groove and methods of mounting an optical structure using such mounts |
| WO2014179213A2 (en) * | 2013-05-01 | 2014-11-06 | R Jackson | Mechanism for movement of a mirror in an interferometer, an interferometer incorporating the same and a fourier transform spectrometer incorporating the same |
| US10677722B2 (en) | 2016-04-05 | 2020-06-09 | University Of Notre Dame Du Lac | Photothermal imaging device and system |
| EP3867629A1 (en) | 2016-09-27 | 2021-08-25 | Purdue Research Foundation | Depth-resolved mid-infrared photothermal imaging of living cells and organisms with sub-mciron spatial resolution |
| CN115096853B (zh) | 2016-11-29 | 2026-04-24 | 光热光谱股份有限公司 | 用于化学成像原子力显微镜红外光谱法的方法和装置 |
| KR101860347B1 (ko) * | 2016-11-29 | 2018-05-23 | 국방과학연구소 | 마이켈슨 간섭계의 하우징 시스템 |
| CN110809728B (zh) | 2017-07-06 | 2022-06-07 | 浜松光子学株式会社 | 反射镜单元 |
| US10942116B2 (en) | 2017-10-09 | 2021-03-09 | Photothermal Spectroscopy Corp. | Method and apparatus for enhanced photo-thermal imaging and spectroscopy |
| KR102082769B1 (ko) * | 2017-10-31 | 2020-02-28 | 국방과학연구소 | 이동반사경 고정구조를 갖는 마이켈슨 간섭계 |
| US11486761B2 (en) | 2018-06-01 | 2022-11-01 | Photothermal Spectroscopy Corp. | Photothermal infrared spectroscopy utilizing spatial light manipulation |
| DE102019103814B3 (de) * | 2019-02-14 | 2020-07-02 | Hochschule Trier - Trier University of Applied Sciences | Vorrichtung zum optischen Messen einer Oberfläche |
| JP7422413B2 (ja) * | 2019-02-28 | 2024-01-26 | 国立大学法人 香川大学 | 分光測定装置 |
| US11480518B2 (en) | 2019-12-03 | 2022-10-25 | Photothermal Spectroscopy Corp. | Asymmetric interferometric optical photothermal infrared spectroscopy |
| EP4097452A4 (en) | 2020-01-31 | 2024-05-29 | Photothermal Spectroscopy Corp. | METHOD AND APPARATUS FOR HIGH-PERFORMANCE WIDE-FIELD PHOTOTHERMAL INFRARED SPECTROSCOPY AND IMAGING |
| US12369778B2 (en) | 2020-06-26 | 2025-07-29 | Photothermal Spectroscopy Corp. | Method and apparatus for fiber optic photothermal imaging and spectroscopy |
| EP4182749A4 (en) | 2020-07-20 | 2024-04-24 | Photothermal Spectroscopy Corp. | Fluorescence enhanced photothermal infrared spectroscopy and confocal fluorescence imaging |
| CN112394529B (zh) * | 2020-11-27 | 2022-12-30 | 南京大学 | 一种单元件分束合束干涉仪 |
| JP7666138B2 (ja) * | 2021-05-31 | 2025-04-22 | 株式会社島津製作所 | 赤外光源装置およびフーリエ変換赤外分光光度計 |
| US12277731B2 (en) * | 2022-07-21 | 2025-04-15 | Canon U.S.A., Inc. | Methods and systems for system self-diagnosis |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5486917A (en) * | 1991-10-09 | 1996-01-23 | On-Line Technologies Inc | Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4710001A (en) * | 1986-11-21 | 1987-12-01 | Hewlett-Packard Company | Support for a moving mirror in an interferometer |
| US4801366A (en) * | 1987-03-18 | 1989-01-31 | Godfrey Jamie E | Apparatuses and methods for analyzing macro-ions at electrophoretic steady state |
| US4773757A (en) * | 1987-08-19 | 1988-09-27 | Laser Precision Corporation | High resolution spectrometer interferometer having an integrated alignment unit |
| JPH0641145Y2 (ja) * | 1988-02-29 | 1994-10-26 | 株式会社島津製作所 | 平行運動装置 |
| US5133598A (en) * | 1990-03-02 | 1992-07-28 | Nicolet Instrument Corporation | Command servo for moving mirror of Michelson interferometer |
| US5173744A (en) * | 1991-03-21 | 1992-12-22 | Dybwad Jens R | Refractively scanned interferometer |
| US5309217A (en) * | 1991-04-27 | 1994-05-03 | Bruker Analytische Messtechnik | Fourier spectrometer |
| JPH07209085A (ja) * | 1994-01-19 | 1995-08-11 | Yokogawa Electric Corp | フーリエ分光器 |
| NZ300915A (en) * | 1995-02-09 | 1998-12-23 | Foss Electric As | Method for standardizing a spectrometer generating an optical spectrum from a sample |
| US5883712A (en) * | 1997-05-21 | 1999-03-16 | Nicolet Instrument Corporation | Interferometer of an infrared spectrometer with dynamic moving mirror alignment |
| WO1999002939A1 (en) * | 1997-07-14 | 1999-01-21 | Spectral Dimensions, Inc. | Methods and devices for very rapid scan interferometry |
| US6322037B1 (en) * | 1999-10-26 | 2001-11-27 | Yokogawa Electric Corporation | Moving mirror support device for photo-interferometer |
| US20020149777A1 (en) * | 2001-04-12 | 2002-10-17 | Schreiber Kenneth C. | Support for a movable mirror in an interferometer |
| US6943892B2 (en) * | 2003-01-29 | 2005-09-13 | Sarnoff Corporation | Instrument having a multi-mode optical element and method |
| US7312859B2 (en) * | 2004-01-30 | 2007-12-25 | Promet International, Inc. | Optical fiber inspection device |
-
2007
- 2007-01-12 US US11/622,815 patent/US7630081B2/en active Active
- 2007-12-07 JP JP2009545547A patent/JP5111520B2/ja active Active
- 2007-12-07 WO PCT/US2007/086713 patent/WO2008088620A1/en not_active Ceased
- 2007-12-07 GB GB0912325A patent/GB2458412B/en active Active
- 2007-12-07 DE DE112007003242.1T patent/DE112007003242B4/de active Active
- 2007-12-07 CA CA2674571A patent/CA2674571C/en active Active
- 2007-12-07 CN CN2007800497366A patent/CN101583857B/zh active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5486917A (en) * | 1991-10-09 | 1996-01-23 | On-Line Technologies Inc | Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same |
Also Published As
| Publication number | Publication date |
|---|---|
| DE112007003242T5 (de) | 2009-11-26 |
| HK1136345A1 (en) | 2010-06-25 |
| GB2458412A (en) | 2009-09-23 |
| CA2674571A1 (en) | 2008-07-24 |
| WO2008088620A1 (en) | 2008-07-24 |
| CN101583857A (zh) | 2009-11-18 |
| US20080170231A1 (en) | 2008-07-17 |
| US7630081B2 (en) | 2009-12-08 |
| CN101583857B (zh) | 2012-02-01 |
| JP2010515918A (ja) | 2010-05-13 |
| JP5111520B2 (ja) | 2013-01-09 |
| CA2674571C (en) | 2015-04-21 |
| GB0912325D0 (en) | 2009-08-26 |
| GB2458412B (en) | 2011-05-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE112007003242B4 (de) | Interferometer mit Beibehaltung einer optischen Beziehung zwischen Elementen | |
| DE102013223388B4 (de) | Interferometer mit mehreren Abtastwagen | |
| DE69901021T2 (de) | Vorrichtung zur montage und lagekorrektur eines elementes, wie eines spiegels von einem weltraumteleskop | |
| DE69928486T2 (de) | Gerät und Verfahren zur präzisen Justierung der Winkelposition eines optischen Gegenstands | |
| DE69811696T2 (de) | Verfahren und system zur befestigung optischer komponenten | |
| DE102014104430B4 (de) | Objektiv mit axialem Verstellglied zur aktiven Verstellung von Objektivelementen | |
| EP2363685A1 (de) | Vorrichtung zur Positionserfassung mit konfokalem Fabry-Perot Interferometer | |
| EP2619618B1 (de) | Geodätisches instrument mit einem stabilisationselement zur montage und justierung einer optischen baugruppe in eine halterung und montageverfahren für das stabilisationselement | |
| DE69220261T2 (de) | Drei-dimensionale Interferometerstruktur mit Abtastung durch Brechungselemente | |
| WO2008113341A1 (de) | Optikfassung und optisches bauelement mit einer derartigen optikfassung | |
| US4426055A (en) | Precision translator | |
| DE102014109681B4 (de) | Faltungsoptik für einen Laserpulskompressor sowie Laserpulsanordnung mit einer Faltungsoptik | |
| DE102009043161A1 (de) | Vorrichtung zur temperaturabhängigen axialen Verschiebung optischer Komponenten | |
| EP1574808B1 (de) | Zielfernrohr | |
| DE69018387T2 (de) | Optische Einheit für einen Laserdrucker. | |
| EP0597209B1 (de) | Optisches System mit einem Linsensystem und einer Lichtquelle | |
| DE102019202868A1 (de) | Aktuatoreinrichtung und Verfahren zur Ausrichtung eines optischen Elements, optische Baugruppe sowie Projektionsbelichtungsanlage | |
| DE3918698C1 (https=) | ||
| EP2956762B1 (de) | Vorrichtung zur räumlichen ausrichtung einer röntgenoptik und apparatur mit einer solchen | |
| EP4168841B1 (de) | Justierbare optische anordnung | |
| DE3732566A1 (de) | Feinpositioniermodul | |
| US4786143A (en) | Device for orienting an optical component | |
| DE102014104974B4 (de) | Optische Vorrichtung mit einer Kompensation eines thermooptischen Effekts einer optischen Komponente | |
| Shu et al. | Design and test of precision vertical and horizontal linear nanopositioning flexure stages with centimeter-level travel range for x-ray instrumentation | |
| DE102017213183A1 (de) | Vorgespanntes Festkörpergelenk und Projektionsbelichtungsanlage für die Halbleiterlithographie mit vorgespanntem Festkörpergelenk |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8127 | New person/name/address of the applicant |
Owner name: A2 TECHNOLOGIES, LLC, DANBURY, CONN., US |
|
| R081 | Change of applicant/patentee |
Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: A2 TECHNOLOGIES, LLC, DANBURY, CONN., US Effective date: 20110608 Owner name: AGILENT TECHNOLOGIES, INC. (N.D.GES.D. STAATES, US Free format text: FORMER OWNER: SAS PHOTONICS, LLC, DANBURY, CONN., US Effective date: 20110411 |
|
| R082 | Change of representative |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE Effective date: 20110608 Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER, SCHE, DE Effective date: 20110608 |
|
| R082 | Change of representative |
Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER & PAR, DE Representative=s name: SCHOPPE, ZIMMERMANN, STOECKELER, ZINKLER, SCHE, DE |
|
| R012 | Request for examination validly filed | ||
| R012 | Request for examination validly filed |
Effective date: 20141203 |
|
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R018 | Grant decision by examination section/examining division | ||
| R020 | Patent grant now final |