JP5103632B2 - 水晶ユニットの製造方法 - Google Patents
水晶ユニットの製造方法 Download PDFInfo
- Publication number
- JP5103632B2 JP5103632B2 JP2007131043A JP2007131043A JP5103632B2 JP 5103632 B2 JP5103632 B2 JP 5103632B2 JP 2007131043 A JP2007131043 A JP 2007131043A JP 2007131043 A JP2007131043 A JP 2007131043A JP 5103632 B2 JP5103632 B2 JP 5103632B2
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- crystal
- fork arm
- step portion
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 title claims description 248
- 238000004519 manufacturing process Methods 0.000 title claims description 28
- 239000010453 quartz Substances 0.000 claims description 95
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 95
- 238000005452 bending Methods 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 238000007789 sealing Methods 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000000034 method Methods 0.000 description 29
- 230000005684 electric field Effects 0.000 description 21
- 230000007935 neutral effect Effects 0.000 description 13
- 229910000679 solder Inorganic materials 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007131043A JP5103632B2 (ja) | 2001-10-31 | 2007-04-16 | 水晶ユニットの製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001334978 | 2001-10-31 | ||
JP2001334978 | 2001-10-31 | ||
JP2007131043A JP5103632B2 (ja) | 2001-10-31 | 2007-04-16 | 水晶ユニットの製造方法 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004360576A Division JP4412662B2 (ja) | 2001-10-31 | 2004-11-15 | 水晶ユニットの製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007209039A JP2007209039A (ja) | 2007-08-16 |
JP2007209039A5 JP2007209039A5 (enrdf_load_stackoverflow) | 2010-04-08 |
JP5103632B2 true JP5103632B2 (ja) | 2012-12-19 |
Family
ID=38488001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007131043A Expired - Lifetime JP5103632B2 (ja) | 2001-10-31 | 2007-04-16 | 水晶ユニットの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5103632B2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013251672A (ja) * | 2012-05-31 | 2013-12-12 | Seiko Epson Corp | 振動片、電子デバイス、電子機器および振動片の製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252597A (en) * | 1975-10-27 | 1977-04-27 | Citizen Watch Co Ltd | Bend type piezoelectric vibrator |
JPS5320845A (en) * | 1976-08-11 | 1978-02-25 | Seiko Instr & Electronics Ltd | Quartz crystal watch |
JPS5335462A (en) * | 1976-09-14 | 1978-04-01 | Seiko Instr & Electronics Ltd | Crystal watch |
JPS5393792A (en) * | 1977-01-26 | 1978-08-17 | Seiko Instr & Electronics Ltd | Crystal vibrator |
JPS5416996A (en) * | 1977-07-07 | 1979-02-07 | Kinsekisha Lab Ltd | Tuning fork piezooelectric vibrator |
FR2467487A1 (fr) * | 1979-10-15 | 1981-04-17 | Ebauches Sa | Resonateur piezoelectrique |
JPS577614A (en) * | 1980-06-17 | 1982-01-14 | Nippon Dempa Kogyo Co Ltd | Tuning-fork quartz oscillator |
JPS577613A (en) * | 1980-06-17 | 1982-01-14 | Nippon Dempa Kogyo Co Ltd | Tuning-fork type quartz oscillator |
JPS61187411A (ja) * | 1985-02-14 | 1986-08-21 | Seiko Instr & Electronics Ltd | 音叉型水晶振動子 |
JP3322153B2 (ja) * | 1997-03-07 | 2002-09-09 | セイコーエプソン株式会社 | 音叉型水晶振動片 |
JP3926000B2 (ja) * | 1997-09-26 | 2007-06-06 | シチズン電子株式会社 | 圧電振動子とその製造方法 |
WO2000044092A1 (fr) * | 1999-01-20 | 2000-07-27 | Seiko Epson Corporation | Vibreur et dispositif electronique comportant un vibreur |
JP2000278066A (ja) * | 1999-03-24 | 2000-10-06 | Daishinku Corp | 屈曲振動子の特性調整方法 |
JP2000307368A (ja) * | 1999-04-26 | 2000-11-02 | Seiko Epson Corp | 圧電振動子の製造方法 |
JP3736224B2 (ja) * | 1999-09-13 | 2006-01-18 | セイコーエプソン株式会社 | 圧電振動片の加工方法及び加工装置 |
-
2007
- 2007-04-16 JP JP2007131043A patent/JP5103632B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP2007209039A (ja) | 2007-08-16 |
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