JP5093488B2 - Thermally conductive silicone composition, adhesive structure, and semiconductor device - Google Patents

Description

  The present invention is formed by adopting a thermally conductive silicone composition used as an adhesive for a solid adherend having at least a surface formed of a noble metal such as gold, an adhesive structure using the same, and the structure. The present invention relates to a semiconductor device.

  Conventionally, as a method for adhering a silicone resin to a substrate, a material that imparts adhesiveness to the silicone resin is mixed, or a primer containing silicone or a silane coupling agent is applied to the substrate surface in advance. A method of applying and curing a silicone resin is common.

  However, there is a problem that adhesion of the silicone composition to the surface of a noble metal such as gold is difficult. This is because the components contained in the silicone composition or the reactive groups in the primer react with the substituents on the surface of the substrate and chemically bond to produce an adhesive force, but there are very few substituents on the gold surface. This is considered to be because such an action is difficult to occur. Furthermore, especially on the gold surface, the silicone resin frequently causes inhibition of curing, so that the curing does not proceed, and therefore, there is a problem that it is difficult to develop an adhesive force.

In addition, as a well-known document relevant to this invention, there exist the following.
Japanese Patent Publication No. 3-12114 JP-A-9-208923

  The present invention has been made in view of the above circumstances, and a thermally conductive silicone composition used as an adhesive for a solid adherend, particularly a solid adherend having a noble metal surface such as gold, and a cured product of the composition. It is an object of the present invention to provide a thermally conductive silicone adhesive structure bonded to the solid adherend and a semiconductor device formed by employing the structure.

As a result of diligent investigations to achieve the above object, the present inventors have found that silicon atoms are used as an adhesive for a solid adherend, particularly a solid adherend having a surface formed of a noble metal such as gold. By using a thermally conductive silicone composition containing an organohydrogenpolysiloxane having 5 to 30 bonded hydrogen atoms in one molecule, the adhesiveness of the cured product of the thermally conductive silicone composition is improved. I found it.
That is, when the heat-conductive silicone composition containing the above specific organohydrogenpolysiloxane was applied to the surface of a noble metal such as gold and heat-cured to measure the adhesive strength, the adhesive strength was clearly improved. As a result, the present invention has been made.

Accordingly, the present invention provides the following thermally conductive silicone composition, adhesive structure, and semiconductor device.
[Claim 1]
An adhesive for a solid adherend having at least a surface formed of a noble metal,
(A) component: organopolysiloxane having at least one alkenyl group bonded to a silicon atom in one molecule; 100 parts by mass;
Component (B): organohydrogenpolysiloxane having 5 to 30 hydrogen atoms bonded to silicon atoms in one molecule; {(B) number of hydrogen atoms bonded to silicon atoms derived from component} / {(A) The number of alkenyl groups derived from the component} is 0.3 to 3.0,
(C) Component: Thermally conductive filler having a thermal conductivity of 10 W / m ° C or higher; 100 to 2,000 parts by mass;
Component (D): a catalyst selected from the group consisting of platinum and platinum compounds; containing an amount of 0.1 to 500 ppm as a platinum atom with respect to the total mass of components (A) and (B), 25 A thermally conductive silicone composition having a viscosity at 10 ° C. of 10 to 1,000 Pa · s.
[Claim 2]
The heat conductive silicone adhesion structure formed by adhere | attaching the hardened | cured material of the heat conductive silicone composition of Claim 1 to the surface of the solid to-be-adhered body in which the surface is at least formed with the noble metal.
[Claim 3]
The thermally conductive silicone adhesive structure according to claim 2, wherein the cured product of the thermally conductive silicone composition has a thickness of 5 to 500 µm.
[Claim 4]
The solid adherend having at least a surface formed of a noble metal is a semiconductor chip, and heat generated from the semiconductor chip is transmitted to the heat radiating body through a cured product of the thermally conductive silicone composition. A semiconductor device having a structure of an adhesive structure.

  According to the present invention, a thermally conductive silicone composition capable of adhering to a noble metal such as gold is obtained, and the thermally conductive silicone composition is at least applied to a solid adherend having a surface formed of a noble metal such as gold. It is possible to obtain a thermally conductive silicone adhesive structure obtained by adhering a cured product of the above with high adhesive strength.

The heat conductive silicone composition of the present invention comprises the following components (A) to (D) as essential components.
(A) component: organopolysiloxane having at least one alkenyl group bonded to a silicon atom in one molecule; 100 parts by mass;
Component (B): organohydrogenpolysiloxane having 5 to 30 hydrogen atoms bonded to silicon atoms in one molecule; {(B) number of hydrogen atoms bonded to silicon atoms derived from component} / {(A) The number of alkenyl groups derived from the component} is 0.3 to 3.0,
(C) Component: Thermally conductive filler having a thermal conductivity of 10 W / m ° C. or higher; 100 to 2,000 parts by mass;
Component (D): a catalyst selected from the group consisting of platinum and platinum compounds; an amount of 0.1 to 500 ppm relative to the total mass of components (A) and (B) as platinum atoms.

  Component (A) is an organopolysiloxane having at least one alkenyl group bonded to a silicon atom in one molecule, and the molecular structure may be linear, branched or networked, It is preferable from an economic viewpoint.

In addition, the component (A) has a high volatility when the viscosity at 25 ° C. is less than 10 mm ² / s, and the composition may not be stable. When the viscosity is greater than 100,000 mm ² / s, the viscosity of the composition increases. , there are cases in which handling is difficult, is preferably in the range of 10~100,000mm ² / s, more preferably 1,000~50,000mm ² / s. This viscosity is a kinematic viscosity and is a value measured at 25 ° C. by an Ostwald viscometer (the same applies hereinafter).

  (A) As an alkenyl group couple | bonded with the silicon atom of a component, a C2-C8 thing is preferable, A vinyl group, an allyl group, a butenyl group, a hexenyl group etc. are mentioned, Preferably it is a vinyl group. The alkenyl group bonded to the silicon atom may be present at any position in the molecule, but is preferably present at least at the molecular end.

  As the organic group other than the alkenyl group bonded to the silicon atom of the component (A), one having 1 to 10 carbon atoms, for example, an alkyl group such as methyl group, ethyl group, propyl group, butyl group, cyclopentyl group, cyclohexyl group, etc. Aryl groups such as cycloalkyl groups, phenyl groups and xylyl groups, aralkyl groups such as phenylethyl groups and phenylpropyl groups, alkyl halide groups such as γ-chloropropyl groups and 3,3,3-trifluoropropyl groups, etc. Is exemplified.

  Examples of the molecular chain terminal group of the component (A) include triorganosiloxy groups such as trimethylsiloxy group, dimethylvinylsiloxy group, dimethylphenylsiloxy group, and methylvinylphenylsiloxy group, hydroxyl groups, and alkoxy groups.

  (A) The kind of organic group in a component, the kind of molecular chain terminal blocking group, a viscosity, etc. can be suitably selected according to the intended purpose of the heat conductive silicone composition obtained. Moreover, you may use several types of (A) component from which a viscosity and a structure differ.

  The (B) component organohydrogenpolysiloxane is a crosslinking agent that undergoes a hydrosilylation reaction with the (A) component, and is an organohydrogenpolysiloxane having 5 to 30 hydrogen atoms bonded to silicon atoms in one molecule. . When the number is less than 5, the hydrosilylation reaction does not proceed sufficiently, and curing inhibition occurs. On the other hand, if it is more than 30, it will become too hard over time after heating and the heat dissipation characteristics will deteriorate. Preferably 8-20.

The molecular structure of the organohydrogenpolysiloxane of component (B) may be linear, branched or network, and preferably has a viscosity at 25 ° C. of 1 to 10,000 mm ² / s, more preferably. 1 to 1,000 mm ² / s. Moreover, you may use several types of (B) component from which a viscosity differs.

  As the organic group other than the hydrogen atom bonded to the silicon atom of the component (B), those having 1 to 10 carbon atoms excluding the alkenyl group, for example, an alkyl group such as a methyl group, an ethyl group, a propyl group, and a butyl group, a phenyl group And aryl groups such as tolyl group, aralkyl groups such as phenylethyl group and phenylpropyl group, and halogenated alkyl groups such as γ-chloropropyl group and 3,3,3-trifluoropropyl group.

  The amount of component (B) is such that {number of hydrogen atoms bonded to silicon atom derived from component (B) / {number of alkenyl groups derived from component (A)} is 0.3 to 3.0. It is. When this is less than 0.3, the hydrosilylation reaction does not proceed sufficiently, and when it is more than 3.0, after curing, it becomes too hard under heating and deteriorates heat dissipation characteristics. Preferably it is 0.5-2.0.

  The thermally conductive filler of component (C) is for imparting thermal conductivity. This thermally conductive filler has a thermal conductivity of 10 W / m ° C. or higher. When the thermal conductivity is less than 10 W / m ° C., the thermal conductivity of the obtained thermal conductive silicone composition becomes poor.

  Thermally conductive fillers include aluminum powder, zinc oxide powder, alumina powder, boron nitride powder, aluminum nitride powder, silicon nitride powder, copper powder, silver powder, diamond powder, nickel powder, zinc powder, stainless steel powder, carbon powder However, it is not limited to these. These may be either spherical or irregular shapes, and two or more of these may be mixed.

  Moreover, when the average particle diameter of (C) component is smaller than 0.1 micrometer, the viscosity of the composition obtained may become high too much, and it may become a thing with poor progress, and the composition obtained when larger than 100 micrometers may be obtained. Since it may become non-uniform | heterogenous, Preferably it is the range of 0.1-100 micrometers, More preferably, it is good in the range of 1-20 micrometers. This average particle size is a volume-based average particle size that can be determined by a laser diffraction / scattering method.

  When the blending amount of the component (C) is less than 100 parts by weight with respect to 100 parts by weight of the component (A), the resulting composition has poor thermal conductivity and poor storage stability, and 2,000. Since it will become a thing with a poor extensibility when it exceeds more than a mass part, it is the range of 100-2,000 mass parts, Preferably it is the range of 200-1,500 mass parts.

  Component (D) is a platinum-based catalyst selected from the group consisting of platinum and platinum compounds that promote the hydrosilylation reaction of components (A) and (B). Examples of the platinum-based catalyst include one or more selected from the group consisting of simple platinum particles, platinum-supported particles, chloroplatinic acid, a platinum complex, and a platinum coordination compound. As platinum carrying | support particle | grains, what carried | supported platinum particle | grains to silica, an alumina, carbon black etc. can be used. Examples of platinum complexes include platinum-olefin complexes, platinum-alcohol complexes, platinum-vinylsiloxane complexes, platinum-phosphine complexes, platinum-phosphite complexes, and the like.

  (D) As a compounding quantity of a component, it is necessary to mix | blend the required quantity only to fully react (A) component and (B) component, Usually, as a platinum metal, the sum total of (A) and (B) component The amount is 0.1 to 500 ppm based on the mass.

  In the composition of the present invention, for the purpose of suppressing the catalytic activity of the component (D), as the component (E), a control agent selected from an acetylene compound, a nitrogen compound, an organic phosphorus compound, an oxime compound, and an organic chloro compound is included. Can be blended. Examples of the component (E) include acetylene compounds such as 1-ethynylcyclohexanol, amine compounds, and phosphites.

  (E) The compounding quantity of a component is the range of 0-1 mass part with respect to 100 mass parts of (A) component. (E) When mix | blending a component, Preferably it is the range of 0.01-1 mass part with respect to 100 mass parts of (A) component, More preferably, it is the range of 0.05-0.5 mass part. When the amount is less than 0.01 parts by mass, a sufficient control effect may not be obtained. When the amount is more than 1 part by mass, the hydrosilylation reaction does not proceed sufficiently.

  Further, the composition of the present invention may further contain a component having an epoxy group or an alkoxy group as an adhesive component, if necessary, or as a wettability improver for the component (A) of the component (C). An organopolysiloxane represented by the following formula (1) or an organosilane represented by the following formula (2) may be blended.

（式中、Ｒ¹は独立に非置換又は置換の一価炭化水素基であり、Ｒ²は独立にアルキル基又はアシル基であり、ａは５〜１００の整数であり、ｂは１〜３の整数である。）

(Wherein R ¹ is independently an unsubstituted or substituted monovalent hydrocarbon group, R ² is independently an alkyl group or an acyl group, a is an integer of 5 to 100, and b is 1 to 3) Is an integer.)

R ¹ is independently an unsubstituted or substituted monovalent hydrocarbon group. Examples thereof include a linear alkyl group, a branched alkyl group, a cyclic alkyl group, an aryl group, an aralkyl group, and a halogenated group. An alkyl group is mentioned. Examples of the linear alkyl group include a methyl group, an ethyl group, a propyl group, a hexyl group, and an octyl group. Examples of the branched alkyl group include isopropyl group, isobutyl group, tert-butyl group, 2-ethylhexyl group and the like. Examples of the cyclic alkyl group include a cyclopentyl group and a cyclohexyl group. Examples of the aryl group include a phenyl group and a tolyl group. Examples of the aralkyl group include a 2-phenylethyl group and a 2-methyl-2-phenylethyl group. Examples of the halogenated alkyl group include 3,3,3-trifluoropropyl group, 2- (nonafluorobutyl) ethyl group, 2- (heptadecafluorooctyl) ethyl group, and the like. R ¹ is preferably a methyl group or a phenyl group.

R ² is independently an alkyl group or an acyl group. Examples of the alkyl group include linear alkyl groups, branched alkyl groups, and cyclic alkyl groups similar to those exemplified for R ¹ . Examples of the acyl group include an acetyl group and an octanoyl group. R ² is preferably an alkyl group, particularly preferably a methyl group or an ethyl group.
a is an integer of 5 to 100. b is an integer of 1 to 3, preferably 3.

Specific examples of the organopolysiloxane represented by the above formula (1) include the following.

  The amount of the organopolysiloxane used is preferably 0 to 50 parts by mass, particularly 0.01 to 30 parts by mass with respect to 100 parts by mass of the component (A).

^{_{R 3 c R 4 d Si (}} OR 5) 4-cd (2)
Wherein R ³ is independently an alkyl group having 9 to 15 carbon atoms, R ⁴ is independently an unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and R ⁵ is independently carbon. (C1 is an integer of 1 to 3, d is an integer of 0 to 2, and c + d is an integer of 1 to 3.)

R ³ is independently an alkyl group having 9 to 15 carbon atoms, and specific examples thereof include a nonyl group, a decyl group, a dodecyl group, a tetradecyl group, and a pentadecyl group.

R ⁴ is independently an unsubstituted or substituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, a hexyl group, and an octyl group. Alkyl group such as a group; cycloalkyl group such as cyclopentyl group and cyclohexyl group; alkenyl group such as vinyl group and allyl group; aryl group such as phenyl group and tolyl group; 2-phenylethyl group and 2-methyl-2-phenyl Aralkyl groups such as ethyl groups; halogenated hydrocarbon groups such as 3,3,3-trifluoropropyl groups, 2- (nonafluorobutyl) ethyl groups, 2- (heptadecafluorooctyl) ethyl groups, p-chlorophenyl groups In particular, a methyl group and an ethyl group are preferable.

R ⁵ is independently an alkyl group having 1 to 6 carbon atoms, and specific examples thereof include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, and a hexyl group. An ethyl group is preferred.

  The above c is usually an integer of 1 to 3, but is particularly preferably 1. Said d is an integer of 0-2. However, c + d is an integer of 1-3.

As a specific example of the organosilane represented by the above formula (2),
C ₁₀ H ₂₁ Si (OCH ₃ ) ₃ ,
C ₁₂ H ₂₅ Si (OCH ₃ ) ₃ ,
C ₁₂ H ₂₅ Si (OC ₂ H ₅ ) ₃ ,
C ₁₀ H ₂₁ Si (CH ₃ ) (OCH ₃ ) ₂ ,
C ₁₀ H ₂₁ Si (C ₆ H ₅ ) (OCH ₃ ) ₂ ,
C ₁₀ H ₂₁ Si (CH ₃ ) (OC ₂ H ₅ ) ₂ ,
C ₁₀ H ₂₁ Si (CH═CH ₂ ) (OCH ₃ ) ₂ ,
C ₁₀ H ₂₁ Si (CH ₂ CH ₂ CF ₃ ) (OCH ₃ ) ₂
Etc.

  When this organosilane is used, the blending amount is preferably 0 to 20 parts by mass, particularly 0.01 to 10 parts by mass with respect to 100 parts by mass of the component (A).

The thermally conductive silicone composition of the present invention can be prepared by mixing the above components (A) to (D) and, if necessary, the component (E), other additives and the like according to a conventional method.
When the viscosity at 25 ° C. measured by a rotational viscometer before curing of the thermally conductive silicone composition of the present invention is lower than 10 Pa · s, the thermally conductive filler of component (C) tends to settle. If it is higher than 1,000 Pa · s, it is too hard and the filling property into a container or the like is deteriorated, so the range is from 10 to 1,000 Pa · s, preferably from 50 to 500 Pa · s.

  The thermally conductive silicone adhesive structure of the present invention is obtained by applying a cured product (thermally conductive silicone) of the above-mentioned thermally conductive silicone composition to a solid adherend, particularly at least a surface formed of a noble metal such as gold. In this case, it is obtained by placing a heat conductive silicone composition on the surface of the solid adherend and heating.

  Here, examples of the solid adherend include a semiconductor chip of a semiconductor device and a heat radiator that conducts heat from the semiconductor chip. In this case, the solid adherend may be a metal or a nonmetal. In particular, at least the surface of the solid adherend is formed of a noble metal such as gold is effective in the present invention, but is not limited thereto. As a method for forming a noble metal such as gold on the surface of the solid adherend, it can be formed by, for example, a vapor phase plating method such as vapor deposition or sputtering, electroplating or electroless plating.

  The cured product of the thermally conductive silicone composition can be adhered to the solid adherend by applying the above-mentioned thermally conductive silicone composition to the surface of the solid adherend and curing it by heating. Although the heating method of a heat conductive silicone composition is not specifically limited, It is preferable to use oven etc. The heating temperature is preferably about 100 to 180 ° C., and the heating time is preferably 5 minutes to 2 hours, but is not limited thereto. In addition, although the thickness of the hardened | cured material (thermally conductive silicone) of a heat conductive silicone composition is selected suitably, it is preferable that it is usually 5-500 micrometers, especially 10-100 micrometers.

  FIG. 2 is a longitudinal sectional view of an embodiment of a semiconductor device using the thermally conductive silicone adhesive structure according to the present invention, in which 21 denotes an electronic component such as a CPU. A gold thin film 22 is formed on the surface of the electronic component 21, and a heat conductive silicone composition 23 is formed on the thin film 22. This thermally conductive silicone composition 23 is pressed by a heat spreader (heat radiator) 24. Further, an adhesive 26 is applied between the heat spreader 24 and the substrate 25 such as an organic substrate, and the heat conductive silicone composition 23 and the adhesive 26 are cured by heating under the above heating conditions. Thereby, the semiconductor device is completed. In the figure, reference numeral 27 denotes a solder ball.

  EXAMPLES Hereinafter, although an Example and a comparative example are shown and this invention is demonstrated concretely, this invention is not restrict | limited to the following Example. Further, “parts” and “%” shown in the examples indicate parts by mass and mass% unless otherwise specified.

[Examples 1-6, Comparative Examples 1-6]
[Production of adherend]
To-be-adhered body: VPS-020 type sputtering apparatus manufactured by Vacuum Kiko Co., Ltd. was used, and gold was vapor-deposited on one side of a 10 mm square silicon wafer under the following conditions. Moreover, it was 0.15 micrometer when the gold | metal film thickness vapor-deposited with the stylus type surface shape measuring device made from ULVAC was measured.
(Sputtering conditions)
Target: Gold gas type: Air current value: 5-10 mA
Degree of vacuum: 1-2 × 10 ⁻¹ Pa
Deposition time: 10 minutes

[Preparation of thermally conductive silicone composition]
The heat conductive silicone compositions of Examples and Comparative Examples were produced with the formulations shown in Tables 1 and 2. As a specific production method, components (A) and (C), and a wettability improver were added if necessary, and the mixture was heated and stirred with a 5-liter planetary mixer at 70 ° C. for 1 hour. To the mixture after cooling, component (E) was added and stirred and mixed for 15 minutes. Subsequently, component (D) was added and stirred and mixed again for 15 minutes. Finally, the component (B) was added and stirred and mixed under vacuum for 30 minutes to obtain a heat conductive silicone composition.

[Production of test piece and measurement of adhesive strength]
As shown in FIG. 1, a nickel plate 14 (manufactured by Test Piece Co., Ltd.) having a 25 mm × 100 mm iron surface coated with nickel is prepared, and between the nickel plate 14 and the adherend 10 on which a gold thin film is formed. The gold thin film side was sandwiched so as to be in contact with the heat conductive silicone composition 12. The thickness of the heat conductive silicone composition was 30 μm. The laminates 10, 12, and 14 were placed in an oven at 125 ° C. for 90 minutes to heat and cure the heat conductive silicone composition 12 to prepare a test piece. A load was applied with the probe 20 from the lateral direction of the adherend 10 to measure a breaking load, and this value was defined as an adhesive force. The adhesive force measuring machine employs an average value of the results obtained by performing the measurement three times using a Resca Bonding Tester PTR-1000.

[Thermal resistance measurement]
A 125 ° C. oven is formed by sandwiching a thermally conductive silicone composition between a silicon wafer with gold deposited on one side and a 10 mm square silicon wafer with no surface deposited on it. The heat conductive silicone composition was heated and cured for 90 minutes to prepare a test piece for measuring heat resistance, and the heat resistance was measured. Further, this test piece was left at 125 ° C. for 1,000 hours, and the thermal resistance was again measured in the same manner. This thermal resistance measurement was performed with a nano flash model number: LFA447 manufactured by Niche.

[Measurement of cured product thickness of thermally conductive silicone composition]
The thickness of the adherend and silicon wafer used in the measurement of the thermal resistance was measured in advance with a micro gauge, the thermal conductive silicone composition was sandwiched, and the thermal conductive silicone composition was placed in an oven at 125 ° C. for 90 minutes. After the product was cured by heating, the thickness of the total amount was similarly measured to calculate the cured product thickness of the thermally conductive silicone composition.

[Measurement of viscosity of thermally conductive silicone composition]
Using a Malcolm viscometer (model number: PL-1TL) manufactured by Malcolm as a rotational viscometer, the viscosity of the thermally conductive silicone composition was measured at 25 ° C. and 10 rpm.

[Measurement of thermal conductivity]
Each thermally conductive silicone composition was poured into a 3 cm thick mold, covered with a kitchen wrap, and measured with Model QTM-500 manufactured by Kyoto Electronics Industry Co., Ltd.

Ingredient (A)
A-1: Dimethylpolysiloxane having both ends blocked with dimethylvinylsilyl groups and a viscosity at 25 ° C. of 600 mm ² / s

２５℃における粘度：２７ｍｍ²／ｓ Ingredient (B)
B-1: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 27 mm ² / s

２５℃における粘度：２８ｍｍ²／ｓ B-2: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 28 mm ² / s

２５℃における粘度：１７ｍｍ²／ｓ B-3: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 17 mm ² / s

２５℃における粘度：３３ｍｍ²／ｓ B-4: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 33 mm ² / s

２５℃における粘度：２７ｍｍ²／ｓ B-5: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 27 mm ² / s

２５℃における粘度：８３ｍｍ²／ｓ B-6: Organohydrogenpolysiloxane represented by the following formula

Viscosity at 25 ° C .: 83 mm ² / s

Ingredient (C)
C-1: Aluminum powder having an average particle size of 4.9 μm (thermal conductivity 236 W / m ° C.)
C-2: Aluminum powder having an average particle size of 15.0 μm (thermal conductivity 236 W / m ° C.)
C-3: Zinc oxide powder having an average particle size of 1.0 μm (thermal conductivity 54 W / m ° C.)

Ingredient (D)
D-1: A-1 solution of platinum-divinyltetramethyldisiloxane complex, containing 1% as a platinum atom

Ingredient (E)
E-1: 50% toluene solution of 1-ethynyl-1-cyclohexanol

Wetting improver wettability improving agent _{-1: C 10 H 21 Si (} OCH 3) 3

It is a figure which shows the preparation methods of a test piece, and the measuring method of adhesive force. It is a longitudinal cross-sectional view of one Example of the semiconductor device concerning this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 To-be-adhered body 12 Thermal conductive silicone composition 14 Nickel plate 20 Probe 21 Electronic component 22 Gold thin film 23 Thermal conductive silicone composition 24 Heat spreader (heat radiator)
25 Organic substrate 26 Adhesive 27 Solder ball

Claims (4)

An adhesive for a solid adherend having at least a surface formed of a noble metal,
(A) component: organopolysiloxane having at least one alkenyl group bonded to a silicon atom in one molecule; 100 parts by mass;
Component (B): organohydrogenpolysiloxane having 5 to 30 hydrogen atoms bonded to silicon atoms in one molecule; {(B) number of hydrogen atoms bonded to silicon atoms derived from component} / {(A) The number of alkenyl groups derived from the component} is 0.3 to 3.0,
(C) Component: Thermally conductive filler having a thermal conductivity of 10 W / m ° C. or higher; 100 to 2,000 parts by mass;
Component (D): a catalyst selected from the group consisting of platinum and platinum compounds; containing an amount of 0.1 to 500 ppm as a platinum atom with respect to the total mass of components (A) and (B), 25 A thermally conductive silicone composition having a viscosity at 10 ° C. of 10 to 1,000 Pa · s.   The heat conductive silicone adhesion structure formed by adhere | attaching the hardened | cured material of the heat conductive silicone composition of Claim 1 to the surface of the solid to-be-adhered body in which the surface is at least formed with the noble metal.   The thermally conductive silicone adhesive structure according to claim 2, wherein the cured product of the thermally conductive silicone composition has a thickness of 5 to 500 µm.   The solid adherend having at least a surface formed of a noble metal is a semiconductor chip, and heat generated from the semiconductor chip is transmitted to the heat radiating body through a cured product of the thermally conductive silicone composition. A semiconductor device having a structure of an adhesive structure.

Images