JP5075099B2 - Surface-treated copper foil, surface treatment method thereof, and laminated circuit board - Google Patents

Surface-treated copper foil, surface treatment method thereof, and laminated circuit board Download PDF

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JP5075099B2
JP5075099B2 JP2008299671A JP2008299671A JP5075099B2 JP 5075099 B2 JP5075099 B2 JP 5075099B2 JP 2008299671 A JP2008299671 A JP 2008299671A JP 2008299671 A JP2008299671 A JP 2008299671A JP 5075099 B2 JP5075099 B2 JP 5075099B2
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copper foil
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peel strength
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JP2009149977A (en
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哲 藤澤
裕二 鈴木
岳夫 宇野
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THE FURUKAW ELECTRIC CO., LTD.
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/20Layered products comprising a layer of metal comprising aluminium or copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/04Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/12Copper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/20Zinc
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2311/00Metals, their alloys or their compounds
    • B32B2311/22Nickel or cobalt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/06Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the heating method

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)

Description

本発明は、表面処理銅箔に関するものであり、特に、ポリイミドと高温接着して使用する積層回路基板として正確な回路が形成できる表面処理銅箔と、その製造方法、並びに該銅箔を用いた積層回路基板に関するものである。   The present invention relates to a surface-treated copper foil, and in particular, a surface-treated copper foil capable of forming an accurate circuit as a laminated circuit board to be used by bonding with polyimide at a high temperature, a method for producing the same, and the copper foil. The present invention relates to a laminated circuit board.

プリント配線板用銅箔は、該銅箔を樹脂基板に接合させるにあたり、その接着強度を向上させ、プリント配線板としての所要の電気特性、エッチング特性、耐熱性、耐薬品性を満足させる必要がある。そのため、製箔後の銅箔(以後未処理銅箔と云うことがある)の樹脂基板との接合表面に粗化処理を施し、更には該粗化処理を施した表面上に亜鉛(Zn)めっきやニッケル(Ni)めっき等を施し、また更には該ZnめっきやNiめっき等を施された表面上にクロメート処理等を施す等、種々工夫を施している。   When copper foil for printed wiring boards is bonded to a resin substrate, it is necessary to improve the adhesive strength and satisfy the required electrical characteristics, etching characteristics, heat resistance, and chemical resistance as a printed wiring board. is there. Therefore, the surface of the copper foil after the foil production (hereinafter sometimes referred to as an untreated copper foil) is subjected to a roughening treatment on the surface of the resin substrate, and further the zinc (Zn) on the surface subjected to the roughening treatment. Various contrivances have been made such as plating, nickel (Ni) plating, etc., and further, chromate treatment or the like on the surface plated with Zn or Ni plating.

パソコン、携帯電話やPDAの表示部である液晶ディスプレイを駆動するIC実装基板においては近時高密度化が進み、その製造過程においては高温での処理と正確な回路構成とが要求されている。   An IC mounting substrate for driving a liquid crystal display as a display unit of a personal computer, a mobile phone or a PDA has recently been increased in density, and high temperature processing and an accurate circuit configuration are required in the manufacturing process.

プリント配線板を製造する積層回路基板において、高温での正確な処理と回路構成の要求に対し、導電回路を形成する電解銅箔と高温で使用可能な樹脂基板であるポリイミドとの接着は数百度の高温で熱接着され、例えば330℃、12MPaで熱接着処理される。
この高温での接着処理において、銅箔には高温でのポリイミドとの接着強度の向上が課題となっている。この課題を解決する手段として、銅箔表面をZn含有合金で粗化処理する技術が例えば特許文献1に開示されている。
In multilayer circuit boards for manufacturing printed wiring boards, the adhesion of electrolytic copper foil that forms conductive circuits and polyimide, which is a resin board that can be used at high temperatures, is several hundred degrees in response to requirements for accurate processing and circuit configuration at high temperatures. For example, at 330 ° C. and 12 MPa.
In this high-temperature bonding treatment, the copper foil has a problem of improving the bonding strength with polyimide at a high temperature. As a means for solving this problem, for example, Patent Document 1 discloses a technique of roughening a copper foil surface with a Zn-containing alloy.

また、銅箔をポリイミドと高温接着して使用する積層回路基板として、未処理銅箔のポリイミド基板との接着表面に、モリブデンと、鉄、コバルト、ニッケル、タングステンの内の少なくとも1種を含有する電解液で表面処理し、更にこのめっき層の上にNiめっき層又はZnめっき層若しくはNiめっき層+Znめっき層を設けた表面処理銅箔が提案されている(特許文献2参照)。   Moreover, as a laminated circuit board to be used by bonding copper foil with polyimide at high temperature, the adhesion surface of the untreated copper foil with polyimide substrate contains at least one of molybdenum, iron, cobalt, nickel, and tungsten. There has been proposed a surface-treated copper foil in which a surface treatment is performed with an electrolytic solution and a Ni plating layer, a Zn plating layer, or a Ni plating layer + Zn plating layer is further provided on the plating layer (see Patent Document 2).

特開2000−269637号公報JP 2000-269637 A 特開平11−256389号公報JP-A-11-256389

前記特許文献に記載のZn層を含む粗化処理層は、高温において銅箔と樹脂基板との間で接着強度を向上させる点では効果がある。しかし、銅箔を樹脂基板に接着後、酸溶液によるエッチング処理で回路を形成すると、亜鉛は酸に溶けやすいために銅箔と回路基板との間を接着しているZn層までが溶け出し、回路形成後の銅箔と樹脂基板との接着強度が極端に落ち、回路基板を使用中に銅箔が樹脂基板から剥がれる事故が発生する懸念がある。このような事故を防ぐために、エッチング時間を短くし、Zn層の溶解流出を最小限に留める必要性があり、エッチング処理に高度の技術と管理体制を必要とし、積層回路基板の生産性を落とすと共にコスト高を招く不利益があった。   The roughening treatment layer including the Zn layer described in the patent document is effective in improving the adhesive strength between the copper foil and the resin substrate at a high temperature. However, after bonding the copper foil to the resin substrate, forming a circuit by etching with an acid solution, zinc easily dissolves in the acid, so the Zn layer bonding between the copper foil and the circuit substrate is dissolved, There is a concern that the adhesive strength between the copper foil and the resin substrate after the circuit formation is extremely lowered, and an accident that the copper foil is peeled off from the resin substrate while the circuit substrate is used may occur. In order to prevent such an accident, it is necessary to shorten the etching time and minimize the dissolution and outflow of the Zn layer. The etching process requires advanced technology and a management system, and the productivity of the multilayer circuit board is lowered. At the same time, there was a disadvantage that caused high costs.

このように、前記特許文献に開示の粗化処理では、前記したように対ポリイミドとの接着強度、耐酸性、エッチング性を全て満足することができず、これら特性を満足する表面処理銅箔は提供されていなかった。   As described above, in the roughening treatment disclosed in the patent document, as described above, the adhesive strength with respect to polyimide, the acid resistance, and the etching resistance cannot be satisfied, and the surface-treated copper foil satisfying these characteristics is obtained. Was not provided.

本発明は、ポリイミドとの接着強度、耐酸性、エッチング性を全て満足する表面処理銅箔、該表面処理銅箔の製造方法、並びに該表面処理銅箔を用いた積層回路基板を提供することを目的とする。   The present invention provides a surface-treated copper foil that satisfies all adhesive strength, acid resistance, and etching properties with polyimide, a method for producing the surface-treated copper foil, and a laminated circuit board using the surface-treated copper foil. Objective.

本発明の表面処理銅箔は、未処理銅箔の少なくとも片面にNi−P−Zn合金からなる表面処理層が施されている表面処理銅箔であって、前記Ni−P−Zn合金のZn含有量が5wt%〜60wt%、Ni含有量が35wt%〜90wt%、P含有量が0.1wt%〜15wt%であることを特徴とする。 The surface-treated copper foil of the present invention is a surface-treated copper foil in which a surface-treated layer made of a Ni—P—Zn alloy is applied to at least one surface of an untreated copper foil, and the Zn—of the Ni—P—Zn alloy The content is 5 wt% to 60 wt%, the Ni content is 35 wt% to 90 wt%, and the P content is 0.1 wt% to 15 wt% .

本発明の銅箔の表面処理方法は、未処理銅箔の少なくとも片面に、Ni:1.0〜150g/L、P:0.01〜20g/L、Zn:0.01〜20g/Lを含有する電解浴で、Ni−P−Zn合金からなる表面処理層を形成する銅箔の表面処理方法である。   The surface treatment method of the copper foil of the present invention is as follows: Ni: 1.0 to 150 g / L, P: 0.01 to 20 g / L, Zn: 0.01 to 20 g / L on at least one surface of the untreated copper foil. This is a copper foil surface treatment method for forming a surface treatment layer made of a Ni—P—Zn alloy with an electrolytic bath contained.

本発明の積層回路基板は、未処理銅箔の少なくとも片面にZn含有量が5wt%〜60wt%、Ni含有量が35wt%〜90wt%、P含有量が0.1wt%〜15wt%のNi−P−Zn合金からなる表面処理層が設けられ、該表面処理層の面を樹脂基板と接着してなる積層回路基板である。
また、本発明の積層回路基板は、前記銅箔と前記樹脂基板との接着面の初期のピール強度が0.6kN/m以上であり、かつ熱処理後のピール強度が0.48kN/m以上であり、かつ酸処理後のピール強度が0.6kN/m以上である積層回路基板である。
The laminated circuit board according to the present invention has a Ni content of 5 wt% to 60 wt%, an Ni content of 35 wt% to 90 wt%, and a P content of 0.1 wt% to 15 wt% on at least one surface of the untreated copper foil. It is a laminated circuit board in which a surface treatment layer made of a P—Zn alloy is provided and the surface of the surface treatment layer is bonded to a resin substrate.
In the multilayer circuit board of the present invention, the initial peel strength of the bonding surface between the copper foil and the resin substrate is 0.6 kN / m or more, and the peel strength after heat treatment is 0.48 kN / m or more. There is a laminated circuit board having a peel strength after acid treatment of 0.6 kN / m or more.

本発明の表面処理銅箔によれば、ポリイミドとの接着強度、耐酸性、エッチング性を満足する表面処理銅箔を提供することができる。
また、本発明の銅箔の表面処理方法によれば、ポリイミドとの接着強度、耐酸性、エッチング性を満足する銅箔の表面処理方法を提供することができる。
更に本発明の積層回路基板によれば、樹脂基板、特にポリイミドと銅箔との接着強度が強く、回路形成にあたっては耐酸性を有し、エッチング性を満足する積層回路基板を提供することができる。
According to the surface-treated copper foil of the present invention, it is possible to provide a surface-treated copper foil that satisfies adhesive strength with polyimide, acid resistance, and etching properties.
Moreover, according to the surface treatment method of the copper foil of this invention, the surface treatment method of the copper foil which satisfies the adhesive strength with a polyimide, acid resistance, and etching property can be provided.
Furthermore, according to the multilayer circuit board of the present invention, it is possible to provide a multilayer circuit board that has a strong adhesive strength between a resin substrate, particularly polyimide and copper foil, has acid resistance when forming a circuit, and satisfies etching properties. .

本発明において表面処理を施す銅箔(未処理銅箔)は電解銅箔、圧延銅箔何れでもよい。なお、特にこれらを区別する必要がないときは、単に銅箔または未処理銅箔と表現することがある。未処理銅箔の厚みは5μm〜12μmが好適である。銅箔の厚みが5μmより薄いと製造時に例えばシワなどが入り、薄い銅箔の製造にコストがかかり現実的ではないためである。
また、箔厚が12μmより厚い場合は、パソコン、携帯電話やPDAの表示部である液晶ディスプレイを駆動するIC実装基板等薄型・小型化の仕様からは外れるため好ましくないが、これらの用途以外で要求があれば上記厚さに関係なく厚い銅箔を採用することは可能である。
In the present invention, the surface-treated copper foil (untreated copper foil) may be either an electrolytic copper foil or a rolled copper foil. In addition, when it is not necessary to distinguish these in particular, it may be expressed simply as copper foil or untreated copper foil. The thickness of the untreated copper foil is preferably 5 μm to 12 μm. This is because if the thickness of the copper foil is less than 5 μm, for example, wrinkles or the like enter during the production, and the production of the thin copper foil is costly and impractical.
In addition, when the foil thickness is thicker than 12 μm, it is not preferable because it falls outside the specifications of thin and miniaturization such as an IC mounting substrate for driving a liquid crystal display which is a display unit of a personal computer, a mobile phone or a PDA. If required, it is possible to adopt a thick copper foil regardless of the above thickness.

本発明は、銅箔の表面にニッケル(Ni)-リン(P)−亜鉛(Zn)の3元合金層を設ける表面処理を施す。
銅箔表面に設ける表面処理層として、Niを含有させるのは表面処理層に銅箔からの銅の拡散を防止するためで、その含有量は35wt%〜90wt%、好ましく60wt%〜80wt%である。含有量が35wt%より低いと耐酸性が悪く、90wt%より高いとエッチング性が悪くなるためである。Niの含有量の好ましい範囲の下限を60wt%とするのは銅箔からの銅の拡散を確実に防止し、かつ耐酸性を向上させ、より信頼性を高め、実用化するためであり、上限を80wt%とするのはエッチングをし易くし、回路形成をより容易にするためである。
In the present invention, a surface treatment is performed by providing a ternary alloy layer of nickel (Ni) -phosphorus (P) -zinc (Zn) on the surface of the copper foil.
The surface treatment layer provided on the surface of the copper foil contains Ni in order to prevent copper from diffusing from the copper foil into the surface treatment layer, and its content is 35 wt% to 90 wt%, preferably 60 wt% to 80 wt%. is there. This is because the acid resistance is poor when the content is lower than 35 wt%, and the etching property is worse when the content is higher than 90 wt%. The lower limit of the Ni content is preferably 60 wt% in order to reliably prevent copper diffusion from the copper foil, improve acid resistance, increase reliability, and put it into practical use. Is 80 wt% in order to facilitate etching and facilitate circuit formation.

銅箔表面に設ける表面処理層にPを含有させるのは、Ni−P−Zn合金層の均一化及びNiの過剰析出抑制のためであり、その含有量は0.1wt%〜15wt%、好ましくは3wt%〜10wt%である。Pの含有量が0.1wt%より低いとPを添加した効果がなく、15wt%より高いと初期のピール強度が低下するためである。Pの含有量の好ましい範囲の下限を3wt%とするのはNi−P−Zn合金層がより均一化してエッチング性が良好となるためであり、上限を10wt%とするのはピール強度の低下を抑制しつつ、Niの過剰析出を確実に抑制するためである。   The reason why P is contained in the surface treatment layer provided on the surface of the copper foil is to make the Ni—P—Zn alloy layer uniform and to suppress excessive precipitation of Ni, and its content is preferably 0.1 wt% to 15 wt%. Is 3 wt% to 10 wt%. This is because if the P content is lower than 0.1 wt%, there is no effect of adding P, and if it is higher than 15 wt%, the initial peel strength decreases. The reason why the lower limit of the preferable P content is 3 wt% is that the Ni—P—Zn alloy layer becomes more uniform and the etching property is better, and the upper limit is 10 wt% because the peel strength is lowered. This is because the excessive precipitation of Ni is reliably suppressed while suppressing.

銅箔表面に設ける処理層にZnを含有させるのは、樹脂基板(特にポリイミド)との接着強度を向上させるとともに、接着の際の熱による接着強度の劣化を防止するためで、その含有量は5wt%〜60wt%、好ましくは10wt%〜40wt%である。含有量が5wt%より低いとZnを入れた効果が出ず、60wt%より高いと耐酸性が悪いためである。   The reason why Zn is contained in the treatment layer provided on the surface of the copper foil is to improve the adhesive strength with the resin substrate (particularly polyimide) and to prevent deterioration of the adhesive strength due to heat at the time of adhesion. 5 wt% to 60 wt%, preferably 10 wt% to 40 wt%. If the content is lower than 5 wt%, the effect of adding Zn does not appear, and if it is higher than 60 wt%, the acid resistance is poor.

図1はNi−P−Zn合金層におけるZnの含有量とピール強度(kN/m)との関係を示したもので、図1(イ)はポリイミドに表面処理銅箔を張り合わせた直後の初期ピール強度とZn含有量との関係、図1(ロ)はポリイミドに表面処理銅箔を張り合わせ、その後、熱処理したもののピール強度とZn含有量との関係、図1(ハ)はポリイミドに表面処理銅箔を張り合わせた後、酸処理エッチングにより回路を構成した後のピール強度とZn含有量との関係を測定したグラフである。   FIG. 1 shows the relationship between the Zn content and the peel strength (kN / m) in the Ni—P—Zn alloy layer. FIG. 1 (a) shows the initial state immediately after the surface-treated copper foil is bonded to polyimide. Fig. 1 (b) shows the relationship between peel strength and Zn content, Fig. 1 (b) shows the relationship between the peel strength and Zn content of a surface treated copper foil laminated to a polyimide, and Fig. 1 (c) shows the surface treatment of polyimide. It is the graph which measured the relationship between the peel strength after constructing a circuit by acid treatment etching, and Zn content after pasting together copper foil.

銅箔とポリイミドとの積層板における初期ピール強度および酸処理後のピール強度は0.6kN/m以上あれば信頼性上問題なく実用化でき、熱処理後のピール強度は0.48kN/m以上あれば信頼性上問題なく実用化できる。このため、ピール強度についての判断基準として、初期ピール強度および酸処理後のピール強度については0.6kN/m以上とし、熱処理後のピール強度については0.48kN/m以上と定めた。図1(イ)からZn含有量は初期ピール強度に影響を与えず、図1(ロ)からZn含有量が少ないと熱処理後のピール強度が落ちるが、5wt%以上の含有量があれば実用性には影響がなく、特に10wt%以上であれば加熱処理後のピール強度は満足するものとなる。
また、酸処理後のピール強度は図1(ハ)からZn含有量が40wt%を超えるとピール強度は低下傾向になり、60wt%を超えると極端に低下する。これらの結果からZnの含有量は5wt%〜60wt%、好ましくは10wt%〜40wt%である。
If the initial peel strength and the peel strength after acid treatment in the laminated sheet of copper foil and polyimide are 0.6 kN / m or more, it can be put into practical use without problems in reliability, and the peel strength after heat treatment should be 0.48 kN / m or more. Can be put to practical use without any problem in reliability. For this reason, as a criterion for peel strength, the initial peel strength and the peel strength after acid treatment were set to 0.6 kN / m or more, and the peel strength after heat treatment was set to 0.48 kN / m or more. From FIG. 1 (a), the Zn content does not affect the initial peel strength. From FIG. 1 (b), if the Zn content is low, the peel strength after heat treatment is lowered, but if there is a content of 5 wt% or more, it is practical. The peel strength after the heat treatment is satisfactory if it is 10 wt% or more.
Moreover, the peel strength after acid treatment tends to decrease when the Zn content exceeds 40 wt% from FIG. 1 (c), and extremely decreases when the content exceeds 60 wt%. From these results, the Zn content is 5 wt% to 60 wt%, preferably 10 wt% to 40 wt%.

本発明において、表面処理する側の銅箔の表面粗さは、JIS B 0601で規定するRzで0.2μm〜1.0μmとすることが好適である。   In the present invention, it is preferable that the surface roughness of the copper foil on the surface treatment side is 0.2 μm to 1.0 μm in Rz defined by JIS B 0601.

銅箔表面へのNi−P−Zn合金層の形成は電解処理により行う。
電解処理浴としてNi、P、Znの組成は次の通りである。
Ni:Ni成分として、1.0g/L〜150g/L、好ましくは25g/L〜55g/L含有させる。
P:P成分として、0.01g/L〜20g/L、好ましくは0.2g/L〜1.0g/L含有させる。
Zn:Zn成分として、0.01g/L〜20g/L、好ましくは0.5g/L〜1.0g/L含有させる。
電解浴の温度は30℃〜70℃、好ましくは40℃〜60℃とする。
Formation of the Ni—P—Zn alloy layer on the copper foil surface is performed by electrolytic treatment.
The composition of Ni, P, and Zn as the electrolytic treatment bath is as follows.
Ni: As a Ni component, 1.0 g / L to 150 g / L, preferably 25 g / L to 55 g / L is contained.
P: As a P component, 0.01 g / L to 20 g / L, preferably 0.2 g / L to 1.0 g / L is contained.
Zn: 0.01 g / L to 20 g / L, preferably 0.5 g / L to 1.0 g / L, as a Zn component.
The temperature of the electrolytic bath is 30 ° C to 70 ° C, preferably 40 ° C to 60 ° C.

なお、銅箔表面へのNi−P−Zn合金層を形成後、該合金層表面にクロメート処理層、カップリング処理層を設けることが好ましい。   In addition, after forming the Ni-P-Zn alloy layer on the copper foil surface, it is preferable to provide a chromate treatment layer and a coupling treatment layer on the alloy layer surface.

本発明を実施例により更に具体的に説明する。   The present invention will be described more specifically with reference to examples.

<実施例1>
銅箔(未処理銅箔)には、古河サーキットフォイル(株)のWZ銅箔(Rz:1.0μm)を用いた。
電解浴の調製に用いる薬品としては、Ni金属成分としてNiSO・6HOを、P成分としてNaHPO・HOを、Zn金属成分としてZnSO・7HOを、その他の成分としてはHBOを用いて、表1に示す量を添加して電解浴を調整した。また、電解条件として、浴温度、pH、電流密度、処理時間についても表1に示す。
上記未処理銅箔に上記組成の電解浴とその条件で表面処理を実施した。表面処理した銅箔につき下記の測定を行い、測定結果を表2に示す。
<Example 1>
As the copper foil (untreated copper foil), WZ copper foil (Rz: 1.0 μm) of Furukawa Circuit Foil Co., Ltd. was used.
The chemicals used for the preparation of the electrolytic bath include NiSO 4 · 6H 2 O as the Ni metal component, NaH 2 PO 2 · H 2 O as the P component, ZnSO 4 · 7H 2 O as the Zn metal component, and other components As H 3 BO 3 , the amount shown in Table 1 was added to adjust the electrolytic bath. Table 1 also shows the bath temperature, pH, current density, and treatment time as electrolysis conditions.
The untreated copper foil was subjected to a surface treatment with an electrolytic bath having the above composition and its conditions. The following measurements were performed on the surface-treated copper foil, and the measurement results are shown in Table 2.

(1)銅箔の表面に析出した表面処理層の合金組成:蛍光X線にて分析した。
(2)初期ピール強度:表面処理した銅箔をポリイミド樹脂(宇部興産株式会社製;ユーピレックス25VT)と熱プレスにより接着して、接着後ピール強度を測定した。初期ピール強度は0.6kN/m以上を要求されるため、0.6kN/m以上を合格とした。なお、その判定基準は表2に示す。
(1) Alloy composition of the surface treatment layer deposited on the surface of the copper foil: analyzed by fluorescent X-ray.
(2) Initial peel strength: The surface-treated copper foil was bonded to a polyimide resin (Ube Industries, Ltd .; Upilex 25VT) by hot pressing, and the peel strength after bonding was measured. Since the initial peel strength is required to be 0.6 kN / m or more, 0.6 kN / m or more was considered acceptable. The determination criteria are shown in Table 2.

(3)熱処理後のピール強度:ポリイミドと接着後、150℃で168時間熱処理した後のピール強度を測定した。熱処理後のピール強度は0.48kN/m以上を要求されるため、0.48kN/m以上を合格とした。なお、判定基準は表2に示す。
(4)酸処理後のピール強度:表面処理銅箔をポリイミドと接着後、希塩酸溶液(水:塩酸=1:1)に常温で1時間浸漬し、その後のピール強度を測定した。初期ピール強度は0.6kN/m以上を要求されるため、0.6kN/m以上を合格とした。なお、その判定基準は表2に示す。
(3) Peel strength after heat treatment: After bonding with polyimide, the peel strength after heat treatment at 150 ° C. for 168 hours was measured. Since the peel strength after the heat treatment is required to be 0.48 kN / m or more, 0.48 kN / m or more was regarded as acceptable. The determination criteria are shown in Table 2.
(4) Peel strength after acid treatment: After bonding the surface-treated copper foil to polyimide, it was immersed in a dilute hydrochloric acid solution (water: hydrochloric acid = 1: 1) at room temperature for 1 hour, and then the peel strength was measured. Since the initial peel strength is required to be 0.6 kN / m or more, 0.6 kN / m or more was considered acceptable. The determination criteria are shown in Table 2.

(5)エッチング性:表面処理銅箔をポリイミドと接着後、塩化第二銅溶液により1mm幅の回路を切ったものについてSEM観察を行い、ボトム幅とトップ幅とを測定し、その差を求めた。ボトム幅とトップ幅との差が小さいことが要求されるため、差が6μm以内を合格とした。なお、判定基準は表2に示す。 (5) Etching property: After bonding the surface-treated copper foil to polyimide, SEM observation was performed on a 1 mm wide circuit cut with a cupric chloride solution, the bottom width and top width were measured, and the difference was obtained. It was. Since the difference between the bottom width and the top width is required to be small, the difference is determined to be within 6 μm. The determination criteria are shown in Table 2.

Figure 0005075099
Figure 0005075099

Figure 0005075099
Figure 0005075099

<実施例2〜7>
実施例1と同じ未処理銅箔を用いて、表1の実施例2〜7に示す条件で表面処理を実施し、作製した表面処理銅箔について、実施例1と同様の測定を行った。測定結果を実施例2〜7として表2に示す。
<Examples 2 to 7>
Using the same untreated copper foil as in Example 1, surface treatment was performed under the conditions shown in Examples 2 to 7 in Table 1, and the same measurements as in Example 1 were performed on the produced surface-treated copper foil. The measurement results are shown in Table 2 as Examples 2 to 7.

<比較例1〜6>
実施例1と同じ未処理銅箔を用いて、表1の比較例1〜6に示す条件で表面処理を実施し、作製した表面処理銅箔について、実施例1と同様の測定を行った。測定結果を比較例1〜6として表2に示す。
<Comparative Examples 1-6>
Using the same untreated copper foil as in Example 1, surface treatment was performed under the conditions shown in Comparative Examples 1 to 6 in Table 1, and the same measurements as in Example 1 were performed on the produced surface-treated copper foil. The measurement results are shown in Table 2 as Comparative Examples 1-6.

表2に示すように、実施例1はNi含有量が80wt%より高く、Zn含有量が10wt%より低く、どちらも好ましい範囲を外れており、各特性がやや劣っているが、全体として実用性に問題はなく、満足できるものである(総合評価○)。   As shown in Table 2, in Example 1, the Ni content is higher than 80 wt% and the Zn content is lower than 10 wt%, both of which are out of the preferred range, and each characteristic is slightly inferior, but as a whole, practical There is no problem with the property and it is satisfactory (overall evaluation ○).

実施例2はNi含有量が80wt%より高いため、回路形成時のエッチング性にやや難点が生じたが、その他の特性は良好であり、全体として実用性に問題はなく、満足できるものである(総合評価○)。   In Example 2, since the Ni content was higher than 80 wt%, the etching property at the time of circuit formation was somewhat difficult, but the other characteristics were good, and there was no problem in practicality as a whole, which was satisfactory. (Comprehensive evaluation ○).

実施例3、4はNi含有量が60〜80wt%、P含有量が3〜10wt%、Zn含有量が10〜40wt%であり、各特性の満足値をクリアしている(総合評価◎)。 In Examples 3 and 4, the Ni content is 60 to 80 wt%, the P content is 3 to 10 wt%, and the Zn content is 10 to 40 wt%, which satisfies the satisfactory values of each characteristic (overall evaluation ◎). .

実施例5、6はZn含有量が40wt%より高いため、初期および熱処理後のピール強度は満足値をクリアしているものの、酸処理後のピール強度はやや満足値を下回っている。しかし、全体として実用性に問題はなく、満足できるものである(総合評価○)。   In Examples 5 and 6, since the Zn content is higher than 40 wt%, the peel strength after the initial treatment and after the heat treatment clears the satisfactory value, but the peel strength after the acid treatment is slightly below the satisfactory value. However, there is no problem in practicality as a whole, and it is satisfactory (overall evaluation ○).

実施例7はP含有量が0.1wt%以上であるが3wt%より低く、P含有量がやや少ないためにエッチング性に少し難点が見られる。また実施例8はP含有量が10wt%より高く、P含有量が多いために初期のピール強度はやや満足値を下回っている。しかし、実施例7、8ともに全体として実用性に問題はなく、満足できるものである(総合評価○)。   In Example 7, the P content is 0.1 wt% or more, but is lower than 3 wt%, and since the P content is slightly less, there are some difficulties in etching properties. In Example 8, the P content was higher than 10 wt%, and the initial Peel strength was slightly below the satisfactory value because of the high P content. However, both Examples 7 and 8 are satisfactory as a whole, and are satisfactory (overall evaluation ○).

比較例1、2はNi含有量が35wt%より低く、Zn含有量が60wt%より高い。特にZn含有量が多いため初期および熱処理後のピール強度は満足値をクリアするものの、酸処理後のピール強度、エッチング性については満足値をクリアできていない(総合評価×)。   In Comparative Examples 1 and 2, the Ni content is lower than 35 wt% and the Zn content is higher than 60 wt%. In particular, since the Zn content is high, the peel strength after the initial treatment and after the heat treatment clears the satisfactory value, but the peel strength after the acid treatment and the etching property cannot be satisfied (overall evaluation ×).

比較例3はZnを含まないために熱処理後のピール強度が劣り、比較例4はZnのみで表面処理をしているために酸処理後のピール強度およびエッチング性が劣り、回路基板としての適性に欠けるものとなっている(総合評価×)。   Since Comparative Example 3 does not contain Zn, the peel strength after heat treatment is inferior, and Comparative Example 4 is surface-treated only with Zn, so that the peel strength after acid treatment and the etching property are inferior, making it suitable as a circuit board. (Comprehensive evaluation x).

比較例5はP含有量が0.1wt%より低く、P含有量が少ないためにエッチング性が劣り、比較例6はP含有量が15wt%より高く、P含有量が多いために初期ピール強度が低く、回路基板としての適性に欠けるものとなっている(総合評価×)。   In Comparative Example 5, the P content is lower than 0.1 wt%, and the P content is low, so the etching property is inferior. In Comparative Example 6, the P content is higher than 15 wt%, and the initial P peel strength is high because the P content is large. Is low and lacks suitability as a circuit board (overall evaluation ×).

表2の結果より、Ni−P−Zn合金中に占めるNi、P、Zn含有量の適性値については、以下の範囲が適正な範囲である。 From the results shown in Table 2, the following ranges are appropriate ranges for the appropriate values of Ni, P, and Zn content in the Ni-P-Zn alloy.

Ni含有量の適正値
酸処理後のピール強度は、Ni含有量が少ないと低下するが、35wt%以上であれば実用性には影響がなく、60wt%以上であれば良好となる。また、エッチング性は、Ni含有量が高いと低下するが、90wt%以下であれば実用性には影響がなく、80wt%以下であれば良好となる。以上の結果から、Ni含有量の適正値は、35wt%〜90wt%、好ましくは60wt%〜80wt%である。
Appropriate value of Ni content The peel strength after acid treatment decreases when the Ni content is small, but if it is 35 wt% or more, there is no effect on practicality, and if it is 60 wt% or more, it is good. Moreover, although etching property falls, when Ni content is high, if it is 90 wt% or less, there will be no influence on practicality, and if it is 80 wt% or less, it will become favorable. From the above results, the appropriate value for the Ni content is 35 wt% to 90 wt%, preferably 60 wt% to 80 wt%.

P含有量の適正値
エッチング性は、P含有量が少ないと低下するが、0.1wt%以上であれば実用性には影響がなく、3wt%以上であれば良好となる。また、初期のピール強度(密着性)は、P含有量が高いと低下するが、15wt%以下であれば実用性には影響がなく、10wt%以下であれば良好となる。以上の結果から、P含有量の適正値は、0.1wt%〜15wt%、好ましくは3wt%〜10wt%である。
Appropriate value of P content Etching properties decrease when the P content is small, but if it is 0.1 wt% or more, there is no effect on practicality, and if it is 3 wt% or more, it is good. Further, the initial peel strength (adhesion) decreases when the P content is high, but if it is 15 wt% or less, there is no effect on practicality, and if it is 10 wt% or less, it is good. From the above results, the appropriate value of the P content is 0.1 wt% to 15 wt%, preferably 3 wt% to 10 wt%.

Zn含有量の適正値
熱処理後のピール強度は、Zn含有量が少ないと低下するが、5wt%以上であれば実用性には影響がなく、10wt%以上であれば良好となる。また、酸処理後のピール強度は、Zn含有量が高いと低下するが、60wt%以下であれば実用性には影響がなく、40wt%以下であれば良好となる。以上の結果から、Zn含有量の適正値は、5wt%〜60wt%、好ましくは10wt%〜40wt%である。
Appropriate value of Zn content The peel strength after heat treatment decreases when the Zn content is low, but if it is 5 wt% or more, there is no effect on practicality, and if it is 10 wt% or more, it is good. Further, the peel strength after acid treatment decreases when the Zn content is high, but if it is 60 wt% or less, there is no effect on practicality, and if it is 40 wt% or less, it becomes good. From the above results, the appropriate value of Zn content is 5 wt% to 60 wt%, preferably 10 wt% to 40 wt%.

上述したように、本発明の表面処理銅箔はポリイミドとの接着強度、耐酸性、エッチング性を満足し、工業的に優れた表面処理銅箔である。
また、本発明の銅箔の表面処理方法によれば、ポリイミドとの接着強度、耐酸性、エッチング性を工業的に満足する銅箔の表面処理方法を提供することができる。
更に本発明の積層回路基板によれば、樹脂基板、特にポリイミドと銅箔との接着強度が強く、回路形成にあたっては耐酸性を有し、エッチング性を満足する積層回路基板を提供することができる、優れた効果を有するものである。
As described above, the surface-treated copper foil of the present invention is an industrially superior surface-treated copper foil that satisfies the adhesive strength with polyimide, acid resistance, and etching properties.
Moreover, according to the surface treatment method of the copper foil of this invention, the surface treatment method of the copper foil which industrially satisfies the adhesive strength with a polyimide, acid resistance, and etching property can be provided.
Furthermore, according to the multilayer circuit board of the present invention, it is possible to provide a multilayer circuit board that has a strong adhesive strength between a resin substrate, particularly polyimide and copper foil, has acid resistance when forming a circuit, and satisfies etching properties. Have excellent effects.

銅箔表面処理層におけるNi−P−Zn合金層中のZnの含有量とピール強度との関係を示すグラフである。It is a graph which shows the relationship between content of Zn in a Ni-P-Zn alloy layer in a copper foil surface treatment layer, and peel strength.

Claims (3)

未処理銅箔の少なくとも片面にNi−P−Zn合金からなる表面処理層が施されている表面処理銅箔であって、前記Ni−P−Zn合金の
Zn含有量が5wt%〜60wt%
Ni含有量が35wt%〜90wt%
P含有量が0.1wt%〜15wt%
である表面処理銅箔。
A surface-treated copper foil in which a surface treatment layer made of a Ni—P—Zn alloy is applied to at least one surface of an untreated copper foil, wherein the Zn content of the Ni—P—Zn alloy is 5 wt% to 60 wt%
Ni content is 35wt% ~ 90wt%
P content is 0.1wt% ~ 15wt%
Is a surface-treated copper foil.
未処理銅箔の少なくとも片面に、Ni:1.0〜150g/L、P:0.01〜20g/L、Zn:0.01〜20g/Lを含有する電解浴で、Ni−P−Zn合金からなる表面処理層を形成する銅箔の表面処理方法。   In an electrolytic bath containing Ni: 1.0 to 150 g / L, P: 0.01 to 20 g / L, Zn: 0.01 to 20 g / L on at least one surface of the untreated copper foil, Ni—P—Zn A copper foil surface treatment method for forming a surface treatment layer made of an alloy. 未処理銅箔の少なくとも片面に
Zn含有量が5wt%〜60wt%
Ni含有量が35wt%〜90wt%
P含有量が0.1wt%〜15wt%
のNi−P−Zn合金からなる表面処理層が設けられ、該表面処理層の面を樹脂基板と接着してなる積層回路基板。
Zn content of 5 wt% to 60 wt% on at least one side of the untreated copper foil
Ni content is 35wt% ~ 90wt%
P content is 0.1wt% ~ 15wt%
A laminated circuit board comprising a surface treatment layer made of a Ni—P—Zn alloy and bonding the surface of the surface treatment layer to a resin substrate.
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