JP5060402B2 - Protective film peeling device - Google Patents

Description

  The present invention relates to a peeling apparatus for automatically peeling a protective film covering a surface of a glass substrate, a plastic sheet or the like constituting a liquid crystal display or a plasma display.

  This type of peeling apparatus is known from, for example, Japanese Patent Application Laid-Open No. H10-228707. There, the adhesive surface of the adhesive tape is pressed against the corner portion of the film surface, a part of the protective film is peeled off from the glass substrate, and the glass substrate is fed in a state where the peeling start end is held between the chuck bodies, and the protective film The whole is peeled from the glass substrate. In order to ensure the start of peeling of the protective film by the adhesive tape, a part of the protective film is protruded from the periphery of the glass substrate, and the adhesive surface of the adhesive tape is pressed in a state including the protruding part. . The front and back surfaces of the glass substrate are respectively covered with a protective film, and a pair of adhesive tapes and chuck bodies are provided on both the left and right sides of the front and back surfaces of the glass substrate in order to peel off the front and back protective films at the same time.

  A similar peeling apparatus is also disclosed in Patent Document 2. In this case, after pressing the pressure roller on which the adhesive tape is wound against the edge of the protective film, the edge of the protective film is wound around the pressure roller by feeding the adhesive tape, and the film edge peeled off from the glass substrate Is gripped with a clamper, and the entire protective film is peeled off from the glass substrate. Also in this peeling apparatus, the adhesive tape and the clamper are disposed on both the left and right sides of the glass substrate.

  Although the peeling apparatus of this invention peels a protective film along a diagonal line, this kind of peeling form is disclosed by patent document 3. FIG. There, an adhesive tape is attached along the diagonal line of the protective film, and the protective film is peeled from the glass substrate while the protective film and the adhesive tape are wound around a peeling roller and reversed.

Japanese Patent No. 4054359 (paragraph numbers 0031 to 0032, FIG. 3) Japanese Patent No. 2700083 (paragraph number 0102, FIG. 12) Japanese Patent No. 3465209 (paragraph number 0011, FIG. 2)

  Since the peeling apparatus of patent document 1 makes part of a protective film protrude from the periphery of a glass substrate, and adhere | attaches an adhesive tape on the corner part containing a protruding part, it can peel a protective film from a glass substrate reliably. However, when the outer edge of the protective film coincides with the peripheral edge of the glass substrate, the adhesive tape cannot be reliably bonded, and it may take time to peel off the protective film.

  In the peeling apparatus of patent document 1, 2, since the cassette part and film chuck apparatus of an adhesive tape are arrange | positioned at each of the right-and-left both sides of a glass substrate, the structure of a peeling apparatus becomes complicated and there exists a disadvantage that the whole cost becomes high. Further, the protective film may not be reliably peeled off unless the corners on both sides are gripped by the film chuck device, and the probability of failure of peeling increases accordingly. Furthermore, since the protective film is peeled off while feeding the glass substrate with a roller conveyor, for example, it is difficult to peel off an extremely thin glass substrate or a protective film attached to a plastic sheet, and the object to be peeled is heavy. Limited to glass substrates.

  In patent document 3, since the adhesive tape affixed along the diagonal line is peeled from a glass substrate with a protective film, a protective film can be peeled from a glass substrate more easily. However, since the adhesive tape is applied along the diagonal line of the protective film, the consumption of the adhesive tape is large. Therefore, it is necessary to replace the adhesive tape frequently, and it is inevitable that the operating rate of the production line will decrease. . There is also a disadvantage that the cost of the pressure-sensitive adhesive tape consumed in large quantities and the cost of separating and discarding the pressure-sensitive adhesive tape adhered to the protective film are increased.

  An object of the present invention is to provide a protective film peeling device that requires less consumption of an adhesive tape and that can simplify the structure of the peeling device and reduce the overall cost. The objective of this invention is providing the peeling apparatus of the protective film which can peel appropriately the protective film affixed on the extremely thin glass substrate or the plastic sheet.

  The peeling apparatus of the present invention includes a table 1 on which a peeling target G is placed and fixed, and an adhesive head 10 that presses the adhesive surface of an adhesive tape 64 against a protective film 7 that covers the surface of the peeling target G to form a peeling start end 7a. , A peeling head 11 that moves by peeling while holding the peeling start end 7a, and a head driving structure that drives and operates the adhesive head 10 and the peeling head 11. The adhesive head 10 is provided with a tape supply reel 65, a take-up reel 66, and an adhesive arm 67 that makes the adhesive surface of the adhesive tape 64 face the separation target G. The peeling head 11 is provided with a clamp body 19 that holds the peeling start end 7a. Thus, the adhesive surface supported by the adhesive arm 67 of the adhesive head 10 is adhered to the corner portion of the protective film 7 to separate the separation start end 7a from the separation target G, and the separation start end 7a is sandwiched by the clamp body 19. In the state, the protective film 7 is peeled off from the peeling object G while the peeling head 11 is peeled along the diagonal line.

  The head driving structure includes an X table 12 that reciprocates the peeling head 11 along the X axis, a Y table 13 that reciprocates the X table 12 along the Y axis, and a reciprocating drive of the adhesive head 10 along the Z axis. The Z table 14 is provided. The Z table 14 is supported by the X table 12 and is supported by a guide structure provided between the tables 12 and 14 so as to be capable of reciprocating along the X-axis direction. An actuator 56 that moves the Z table 14 away from the origin position in the X-axis direction is provided between the X table 12 and the Z table 14. Thus, the peeling head 11 positions the adhesive head 10 in the X-axis direction by pressing the Z table 14 against the peeling head 11.

  The table 1 that supports the separation target G is configured by an adsorption table that adsorbs and fixes the separation target G by vacuum pressure.

  The peeling head 11 is provided with a pair of clamp bodies 19 that sandwich the peeling start end 7 a and a drive body 18 that opens and closes both clamp bodies 19. A sensor 20 that detects whether or not the peeling start end 7 a is clamped is disposed on the clamping surfaces of both clamp bodies 19.

  A forward / reverse motor 76 that rotationally drives the take-up reel 66 is provided. The tape supply reel 65 is connected to the take-up reel 66 via a tensioner 80, a one-way clutch 79, and a transmission structure 78 so as to be interlocked with each other. Accordingly, the take-up reel 66 is rotationally driven in the forward / reverse direction by only one forward / reverse motor 76, and at the same time, the tape supply reel 65 is rotationally driven in the reverse direction.

  A mat 73 that can be elastically deformed is disposed on the surface of the adhesive arm 67 facing the separation target G. The back surface side of the adhesive tape 64 pressed against the corner portion of the protective film 7 is received by the mat 73.

  In the present invention, in the peeling apparatus including the adhesive head 10 and the peeling head 11, the peeling target G is placed and fixed on the table 1, and the protective film 7 is driven by driving the adhesive head 10 and the peeling head 11 with a head driving structure. It was made to peel. Specifically, the peeling start end 7 a is formed by adhering the adhesive surface supported by the adhesive arm 67 of the adhesive head 10 to the corner portion of the protective film 7, and the obtained peeling start end 7 a is sandwiched by the clamp body 19. The protective film 7 can be peeled from the peeling object G by causing the peeling head 11 to peel along the diagonal line.

  As described above, when the protective film 7 is peeled off along the diagonal line, it is only necessary to provide one adhesive head 10 and one peeling head 11 for each peeling device, and it is necessary to provide two sets of both heads. Compared with the conventional peeling apparatus, the structure of the peeling apparatus can be greatly simplified and the introduction cost can be reduced. In addition, compared to the conventional peeling method in which the adhesive tape is applied along the diagonal line of the protective film, the consumption of the adhesive tape can be reduced and the number of times the adhesive tape can be replenished can be greatly reduced, and the operating rate of the production line can be improved. . The consumption cost of the adhesive tape can also be reduced. As the number of devices constituting the peeling apparatus is small, the probability of failure of peeling can be reduced to improve reliability. Furthermore, since the peeling target G is placed and fixed on the table 1 and the protective film 7 is peeled by driving the adhesive head 10 and the peeling head 11 with the head drive structure, the peeling target G can be positioned and fixed accurately and peeled. The position and shape of the peeling start end 7a formed by the adhesive head 10 or the gripping position of the peeling head 11 by the clamp body 19 is always constant as compared to the conventional apparatus that peels the protective film while feeding the object with a conveyor. The protective film 7 can be accurately peeled off.

  In a peeling device that forms a head drive structure with an X table 12 and a Y table 13 that reciprocally drive the peeling head 11 and a Z table 14 that reciprocally drives the adhesive head 10, the peeling head 11 is accurate with the XY tables 12 and 13. It is possible to position the adhesive head 10 by using the positioning. Specifically, the Z table 14 is moved by the actuator 56 in the direction away from the origin position in the X axis direction, and the Z table 14 is pressed against the peeling head 11 to thereby position the adhesive head 10 in the X axis direction. This can be done with the peeling head 11. As described above, when the peeling head 11 is used to position the adhesive head 10 in the X-axis direction, there is no need to provide a dedicated drive structure for positioning and driving the adhesive head 10. The structure can be simplified to further reduce the overall cost. The adhesive head 10 is positioned in the Y-axis direction simultaneously with the peeling head 11 by the Y table 13.

  When the table 1 that supports the separation target G is composed of a suction table that sucks and fixes the separation target G by vacuum pressure, the separation target G can be removed even if the separation target G is an extremely thin glass substrate or plastic sheet. The mounting surface 4 can be firmly sucked and held. Accordingly, the peeling target G can be prevented from being lifted from the mounting surface 4 by the peeling resistance of the protective film 7 during the peeling, and the protective film 7 can be accurately peeled off. Is obtained. Moreover, since the peeling object G is sucked and held from the lower surface side, the clamp body 19 and the protective film 7 can be run in the peeling direction quickly and smoothly without being disturbed by anyone.

  According to the peeling device in which a pair of clamp bodies 19 and a drive body 18 that opens and closes both clamp bodies 19 are provided in the peeling head 11 and the sensor 20 is arranged on the clamping surface of both clamp bodies 19, the output from the sensor 20 is performed. It is possible to detect whether or not the peeling start end 7a is clamped by the detection signal. Therefore, the formation of the peeling start edge 7a and the capture of the peeling start edge 7a can be tried again by knowing that the formation of the peeling start edge 7a has failed or that the peeling start edge 7a has failed to be captured at the initial stage of peeling. It is possible to prevent time from being wasted by performing the peeling operation while the peeling start end 7a is not sandwiched between the clamp bodies 19.

  In the adhesive head 10 in which the take-up reel 66 is rotationally driven by the forward / reverse motor 76, when the tape supply reel 65 is connected to the take-up reel 66 via the tensioner 80, the one-way clutch 79, and the transmission structure 78, one piece is provided. Only the forward / reverse motor 76 can drive the take-up reel 66 to rotate in the forward / reverse direction, and simultaneously rotate the tape supply reel 65 in the reverse direction. Therefore, the structure of the pressure-sensitive adhesive head 10 that forcibly feeds the pressure-sensitive adhesive tape 64 with motor power can be simplified, and the cost required for manufacturing the pressure-sensitive adhesive head 10 can be reduced accordingly. In conjunction with the peeling operation of the protective film 7, the adhesive tape 64 is fed in the feeding direction or the rewinding direction to make it difficult for the protective film 7 and the adhesive portion of the adhesive tape 64 to be separated, or the adhesive portion is Separation is facilitated, and a series of peeling operations can be performed smoothly.

  When an elastically deformable mat 73 is disposed on the adhesive arm 67 and the back surface of the adhesive tape 64 pressed against the corner portion of the protective film 7 is received by the mat 73, the adhesive tape 64 is attached to the protective film 7 by the adhesive arm 67. In a state of pressing against the corner portion, the mat 73 can be compressed and deformed so that the adhesive surface of the adhesive tape 64 is evenly adhered to the surface of the protective film 7. Therefore, the adhesive tape 64 can be firmly adhered to the corner portion of the protective film 7 to turn the corner portion with certainty, and the peeling start end 7a can be formed in a stable state at all times.

(Example) FIG. 1 thru | or FIG. 12 shows the Example of the peeling apparatus which concerns on this invention. In FIG. 1, the peeling apparatus includes a table (suction table) 1 on which a peeling target G is placed, and a gantry 2 adjacent to the table 1. As shown in FIG. 9, a vacuum chamber 3 is provided inside the table 1, and a group of suction holes 5 are formed on the mounting surface 4 of the separation target G that covers the upper surface of the vacuum chamber 3. The vacuum chamber 3 communicates with the vacuum pump 6 through a passage, and the air in the vacuum chamber 3 is evacuated by the vacuum pump 6 so that the separation target G placed on the placement surface 4 is fixed and held non-movable. it can. The peeling target G is made of, for example, a glass substrate constituting a liquid crystal display, and the entire surface thereof is covered with the protective film 7.

  On the side of the gantry 2, the adhesive head 10 that forms the peeling start end 7 a across the corner portion of the protective film 7, the peeling head 11 that moves by peeling while holding the peeling start end 7 a, and these two heads 10, 11 are driven. Head driving structures such as an X table 12, a Y table 13, and a Z table 14 are provided.

  1, 3, and 4, the peeling head 11 includes a vertically long peeling table 16 disposed on the front surface side of the X table 12, a support arm 17 that protrudes obliquely forward from the lower end of the peeling table 16, and a support. A solenoid (driving body) 18 fixed to the lower surface of the arm 17 and a pair of clamp bodies 19 and 19 that are simultaneously opened and closed by the solenoid 18 are configured. Contact terminals (sensors) 20 for detecting whether or not the peeling start end 7a is clamped are disposed on the clamping surfaces of the clamp bodies 19 and 19. An X table 12 is provided to reciprocate the peeling head 11 along the X axis (left and right direction).

  In FIG. 3, the X table 12 is formed in a horizontally long rectangular shape, and guide rails 23 and 24 are provided on the upper end and the front surface of the X table 12 for guiding and supporting the peeling table 16 so as to reciprocate in the X-axis direction. Furthermore, a drive structure for reciprocating the peeling table 16 along the guide rails 23 and 24 is provided. The drive structure includes a step motor 25, a pair of timing pulleys 26 and 27 driven by the rotational power of the motor 25, a timing belt 28 wound around both pulleys 26 and 27, and the like.

  Slide blocks 29 and 30 slidably guided by the guide rails 23 and 24 are fixed to the peeling table 16 (see FIG. 1). As shown in FIG. 4, the peeling table 16 is fixed to a linear belt portion on the upper side of the timing belt 28 so as to be able to move along with the coupling body 31. Accordingly, when the timing pulleys 26 and 27 are rotationally driven by the step motor 25, the peeling table 16 can be displaced right or left along the X axis. A Y table 13 is provided to reciprocate the X table 12 having the above configuration along the Y axis (front-rear direction).

  As shown in FIG. 2, the Y table 13 is formed in a square frame shape, and a pair of left and right guide rails 34 and 34 for guiding and supporting the X table 12 so as to reciprocate in the Y-axis direction are provided on the upper surface thereof. A drive structure for reciprocating the table 12 is provided along the guide rails 34. The drive structure includes a step motor 35, four timing pulleys 36, 36, 37, and 37 driven by the rotational power of the motor 25, and a timing belt 38 wound around a pair of front and rear pulleys 36 and 37. Constitute.

  The timing pulleys 36 and 37 are disposed adjacent to the front and rear ends of the guide rails 34 and 34, respectively, and the front timing pulleys 37 and 37 are supported by a common pulley shaft 39. Of the rear timing pulleys 36, 36, the left timing pulley 36 as viewed in FIG. 2 is rotationally driven by the step motor 35. Support frames 40 are fixed to both ends of the X table 12, and slide blocks 41 fixed to the rear ends of the support frames 40 are guided and supported by the guide rails 34 and 34. Both the slide blocks 41 are fixed to the linear belt portion on the upper side of the timing belt 38 so as to be able to move along with the connecting body 42. Accordingly, when the timing pulleys 36 and 37 are rotationally driven by the step motor 35, the X table 12 can be displaced back and forth along the Y axis.

  A Z table 14 is provided to reciprocate the adhesive head 10 along the Z axis (vertical direction). As shown in FIG. 5, the Z table 14 is formed in a vertically long rectangular shape, and a guide shaft 46 for guiding and supporting the adhesive table 45 so as to be reciprocally movable in the Z-axis direction is provided on the front surface thereof. A driving structure is provided along the guide shaft 46. The drive structure includes a step motor 47, a feed screw shaft 48 driven by the rotational power of the motor 47, a female screw body 49 that meshes with the feed screw shaft 48, a bearing block 50 that supports the feed screw shaft 48 in the vertical direction, and the like. Consists of. A slide block 51 guided by the previous guide shaft 46 is fixed above and below the rear surface of the adhesive table 45. As shown in FIG. 6, the female screw body 49 is fixed to the adhesive base 45. Therefore, when the feed screw shaft 48 is rotationally driven by the step motor 47, the adhesive head 10 can be displaced up and down in the Z-axis direction.

  The Z table 14 is supported by the X table 12 similarly to the peeling head 11. Specifically, as shown in FIG. 1, the L-shaped table frame 54 is guided and supported by the guide rails 23 and 24 described above and the dedicated guide rail 55 so as to be slidable back and forth through the slide block 53. A Z table 14 is fixed to the front end of 54. The support arm 17 of the peeling table 16 described above is located below the lower surface of the table frame 54 (see FIG. 4).

  In order to move the Z table 14 along the X axis (left-right direction), a double-acting air cylinder (actuator) 56 is fixed to the middle of the table frame 54, and the protruding end of the piston rod 57 is supported by the support frame. It fixes to the front end inner surface of 40 (refer FIG. 4). Further, the contact piece 59 is fixed to the table frame 54 so that the contact piece 59 can be received by the stopper 61 provided at the shaft end of the stopper shaft 60 provided on the peeling table 16. The stopper shaft 60 is formed by a screw shaft, and the timing at which the contact piece 59 contacts the stopper 61 can be finely adjusted by changing the screwing position. The reason for providing the air cylinder 56, the contact piece 59, and the stopper shaft 60 will be described later.

  In FIG. 5, the adhesive head 10 is arranged above and below the front surface of the adhesive table 45, a tape supply reel 65 for feeding and supplying the adhesive tape 64, a take-up reel 66 for winding the adhesive tape 64, and the front surface of the adhesive table 45. An adhesive arm 67 fixed to the lower portion and a reel driving structure for rotating both reels 65 and 66 are configured. The adhesive tape 64 fed out from the tape supply reel 65 is guided to change direction by the two guide rollers 68, and then wound around the adhesive arm 67 from the lower surface side to the upper surface side to be reversed and taken up by the take-up reel 66. . A lever 69 for detecting the presence or absence of the adhesive tape 64 is provided between the guide rollers 68. The entire adhesive head 10 is housed in a housing 70 indicated by an imaginary line, so that it cannot be visually observed unless the housing 70 is removed.

  The adhesive arm 67 is inclined downward toward the tip, and a guide surface 72 that reversely guides the adhesive tape 64 is formed at the tip of the adhesive arm 67, and a mat 73 is formed on the lower surface side of the tip, that is, the surface facing the separation target G. Is fixed. The mat 73 is formed of an elastically deformable material such as foam rubber or foam plastic, and the adhesive tape 64 is wound around the mat 73 and the outer surface of the guide surface 72.

  As shown in FIG. 7, the reel driving structure includes a step motor (forward / reverse rotation motor) 76, a first winding transmission mechanism 77 that transmits the rotational power of the motor 76 to the take-up reel 66, and a first winding transmission mechanism. 77, a second winding transmission mechanism (transmission structure) 78 branched from 77, a one-way clutch 79 provided between the output shaft of the second winding transmission mechanism 78 and the tape supply reel 65, a tensioner 80, and the like. . The first and second both-wound transmission mechanisms 77 and 78 each have a pair of timing pulleys and a timing belt wound around both timing pulleys as transmission elements.

  Usually, by rotating the step motor 76 in the forward direction, the take-up reel 66 can be rotated by a predetermined angle, and the adhesive surface located on the outer surface of the mat 73 can be updated. The tape supply reel 65 at this time is not driven to rotate by the power of the step motor 76 because the power transmission is interrupted by the one-way clutch 79, and the winding force of the winding reel 66 is applied by the tensioner 80. The tape rotates in the tape feeding direction only when the tension exceeds the specified tension. When the step motor 76 is driven in reverse, the take-up reel 66 is rotated in the direction in which the adhesive tape 64 is fed out. At the same time, the rotational power of the second winding transmission mechanism 78 is transmitted to the tape supply reel 65 via the one-way clutch 79 and the tensioner 80, so that the tape supply reel 65 is driven to rotate in the direction of winding the adhesive tape 64. . The meaning of driving the tape supply reel 65 in the tape winding direction will be described later.

  The peeling operation of the protective film 7 in the peeling device configured as described above includes the preparation process of placing the peeling object G on the placement surface 4, and the adhesive surface of the adhesive tape 64 by the adhesive head 10. A process of pressing against the corner portion to form the peeling start end 7a, a process of holding the peeling start end 7a with the clamp body 19 of the peeling head 11 and running, and a process of discharging the peeled protective film 7 to a predetermined position; The process includes returning the adhesive head 10 and the peeling head 11 to the standby position. In a series of processes, the adhesive head 10 is positioned in the X-axis direction by using the peeling head 11. Therefore, the structure of the peeling device is simplified to the extent that the drive structure dedicated to the adhesive head 10 can be omitted. The overall manufacturing cost can be reduced. Hereinafter, detailed operations of the pressure-sensitive adhesive head 10 and the peeling head 11 for each process will be described.

[Preparation Process] The adhesive head 10 and the peeling head 11 in the preparation process are positioned in front of the upper surface of the Y table 13, and in this state, the peeling target G is placed on the placement surface 4 by the transport robot and positioned. To do. Further, a vacuum pressure is applied to the vacuum chamber 3 to attract and fix the positioned separation object G.

[Process of forming peeling start end] When the preparatory work is completed, the peeling head 11 is moved forward 45 degrees by the X table 12 and the Y table 13, and the adhesive head 10 is accompanied and displaced. Next, when the piston rod 57 of the air cylinder 56 is advanced from the cylinder barrel, the adhesive head 10 moves in the direction away from the origin position along the X axis, and the contact piece 59 is received by the stopper 61 and positioned. The This positioned position becomes the start position of the adhesive head 10, and in this state, the mat 73 is positioned immediately above the corner portion of the protective film 7 as shown in FIG. 8.

  In the above state, by driving the step motor 47 provided on the Z table 14, the entire adhesive head 10 is moved downward and, as shown in FIG. 10A, with a mat 73 provided on the bonding arm 67. The adhesive surface of the backed-up adhesive tape 64 is pressed against the corner portion of the protective film 7 and adhered. At this time, the mat 73 is compressed and deformed so that the adhesive surface of the adhesive tape 64 is evenly adhered to the surface of the protective film 7.

  Next, as shown in FIG. 10 (b), the step motor 47 of the Z table 14 is driven in reverse to slowly raise the entire adhesive head 10, and the corner portion of the protective film 7 is removed from the peeling target G. Turn up. Further, the step motor 76 of the adhesive base 45 is driven to feed and supply the adhesive tape 64, and the adhesive tape 64 and the protective film 7 are bonded to the adhesive guide surface 72 side as shown in FIG. However, the peeling head 11 is moved in the diagonal direction to grow the peeling start end 7a. At the same time, by rotating the step motor 47 in the reverse direction, the entire adhesive head 10 is further raised as shown in FIG. 11A, and the peeling length of the peeling start end 7a is made sufficient. At this point, the movement of the peeling head 11 in the diagonal direction is stopped.

  As described above, by separating the adhesive tape 64 and the protective film 7 from the adhesive guide surface 72, the separation strength between the two 7 and 64 is improved, and the peeling resistance acting on the protective film 7 is further improved. The upper surface side of the guide surface 72 can be burdened. Therefore, it is possible to well prevent the protective film 7 from being separated from the adhesive tape 64 in the process of forming the peeling start end 7a.

[Peeling Process] As described above, in the process of forming the peeling start end 7a with the adhesive head 10, the pair of clamp bodies 19 provided on the peeling head 11 are fully opened (see FIG. 8). Moreover, the peeling start end 7a separated from the surface of the peeling target G is located in the vicinity of the center of both clamp bodies 19 as shown in FIG. Accordingly, when the solenoid 18 is driven and the clamp bodies 19 are clamped, the upper and lower intermediate portions of the peeling start end 7a can be clamped and fixed by the clamp bodies 19 as shown in FIG. At this time, if the pair of contact terminals 20 are not electrically connected, the peeling start end 7 a can be properly held between the clamp bodies 19. On the other hand, when the pair of contact terminals 20 are electrically connected, the peeling start end 7a cannot be properly sandwiched between the clamp bodies 19. In that case, the adhesive head 10 is returned to the start position, and the formation of the peeling start end 7a and the clamping of the peeling start end 7a by the clamp body 19 are repeated.

  With the clamp body 19 holding the peeling start end 7a, the stepping motor 76 is driven in reverse to rewind the adhesive tape 64 to the tape supply reel 65 side, as shown in FIG. 11 (c). The bonding point between the tape 64 and the protective film 7 is shifted to the lower surface side of the mat 73. Thereby, the protective film 7 can be easily separated from the adhesive tape 64. Thereafter, as shown in FIG. 12, the peeling head 11 is forcibly separated in the diagonal direction by the X / X tables 12 and 13 to forcibly separate the peeling start end 7a from the previous bonding point, and FIG. The entire protective film 7 can be completely peeled off from the peeling target G while passing through the peeling intermediate state shown in FIG. Since the adhesive head 10 at this time is left behind by the peeling head 11, it does not displace in the X-axis direction and accompanies the peeling head 11 only in the Y-axis direction.

[Process of Discharging Protective Film] The protective film 7 peeled off from the peeling object G is transported to the inner surface of the square frame-shaped Y table 13 by the peeling head 11 and protected in cooperation with an auxiliary device (not shown). The film 7 is discharged to a predetermined position. When the discharge operation is completed, it is possible to confirm whether or not the protective film 7 has been properly discharged by opening and closing the clamp body 19 and confirming the conductive state of the contact terminal 20. At this time, on the table 1 side, the supply of the vacuum pressure to the vacuum chamber 3 is stopped, and the separation target G is released.

[Returning process to standby position] After the discharge of the protective film 7 is completed, the peeling head 11 is returned to the origin position of the peeling head 11 by the X table 12 and the Y table 13. At the same time, by retracting the piston rod 57 of the air cylinder 56 toward the cylinder barrel, the adhesive head 10 is returned to its original position. In the meantime, the take-up reel 66 is driven to the take-up side to place the new adhesive surface on the outer surface of the mat 73. The tape width of the adhesive tape 64 used in the present invention is 15 to 20 mm, and the tape length consumed every time the protective film 7 is peeled is only 10 mm. One of the new tape supply reels 65 is used. Thus, about 4000 protective films 7 to be peeled G can be peeled. Therefore, it is possible to provide a peeling apparatus that requires less consumption of the pressure-sensitive adhesive tape 64 accompanying the peeling process.

  In the peeling apparatus configured as described above, the peeling target G placed on the placement surface 4 of the table 1 is suction-fixed by vacuum pressure, and the adhesive head 10 and the peeling head 11 are driven by the head driving structure. Since the protective film 7 is peeled off in the diagonal direction, it is sufficient that one adhesive head 10 and one peeling head 11 are provided, and the structure of the peeling device can be simplified as a whole. Further, since the adhesive head 10 is positioned in the X-axis direction by using the peeling head 11 that is accurately positioned by the X table 12 and the Y table 13, the structure of the peeling device is simplified in this respect as well, thereby reducing the overall cost. Can be reduced.

  Compared to the case where the protective film is peeled off while feeding the peeling object on the conveyor, the peeling object G can be accurately positioned and firmly adsorbed and fixed, so the position and shape of the peeling start end 7a formed by the adhesive head 10 Alternatively, the gripping position of the peeling head 11 by the clamp body 19 can be kept constant, and the protective film 7 can be peeled accurately. Moreover, even if the peeling target G is an extremely thin glass substrate or plastic sheet, the protective film 7 can be peeled in a state in which the peeling target G is firmly adsorbed and held on the mounting surface 4. No peeling device is obtained.

  In addition to the above embodiment, the table 1 is preferably a suction table provided with a vacuum chamber 3, but may be a table in which the surface of the separation target G is pressed and held by a pressing roller. In that case, it is preferable to peel the protective film 7 while following the pressing roller while moving the pressing roller in the diagonal direction. As the actuator 56 for moving the Z table 14, an electric cylinder, a hydraulic cylinder, or a solenoid can be applied in addition to the air cylinder. Similarly, as the driving body 18 for opening and closing the clamp body 19, an air cylinder, an electric cylinder, or the like can be applied in addition to the solenoid.

  The first winding transmission mechanism 77 can be omitted by directly driving the take-up reel 66 by the step motor 76. The take-up reel 66 can be rotationally driven by a forward / reverse motor. The sensor 20 can be configured by a microswitch, a pressure sensor, or the like, in addition to being formed by a pair of contact terminals. In the above embodiment, the peeling start end 7a is formed at the left front corner portion as viewed in FIG. 1, but this is not necessary, and the peeling start end 7a can be formed at the right front corner portion as viewed in FIG. In that case, the adhesive head 10 and the peeling head 11 are preferably arranged at positions that are line-symmetric with the state shown in FIG.

It is a top view of the peeling apparatus in the middle of peeling. It is a top view of the peeling apparatus at the time of peeling start. It is a front view of X table. It is a cross-sectional top view of an adhesion head and a peeling head. It is a principal part front view of the state which faces a Z table and an adhesion head. It is a top view which shows the relationship structure of Z table and an adhesion head. It is explanatory drawing which shows a reel drive structure notionally. It is a top view in the state where an adhesion head is in a start position. It is a partially broken front view which shows the relationship between a suction table and each head. It is explanatory drawing which shows the process in which a peeling start end is formed with an adhesion head. It is explanatory drawing which shows the process of clamping a peeling start end with a clamp body. It is a top view which shows the peeling head of the state in the middle of peeling.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Table 2 Base 7 Protective film 7a Peeling start end 10 Adhesive head 11 Peeling head 12 X table 13 Y table 14 Z table 19 Clamp body 56 Actuator 64 Adhesive tape 65 Tape supply reel 66 Take-up reel 67 Adhesive arm G

Claims (5)

Form the peeling start end (7a) by pressing the adhesive surface of the adhesive tape (64) against the table (1) on which the peeling target (G) is placed and fixed, and the protective film (7) covering the surface of the peeling target (G). An adhesive head (10) to be peeled off, a peeling head (11) which moves by peeling while sandwiching the peeling start end (7a), and a head drive structure for driving the adhesive head (10) and the peeling head (11). The adhesive head (10) is provided with a tape supply reel (65), a take-up reel (66), and an adhesive arm (67) that makes the adhesive surface of the adhesive tape (64) face the object to be peeled (G). And
The peeling head (11) is provided with a clamp body (19) that holds the peeling start end (7a).
The head drive structure includes an X table (12) that reciprocates the peeling head (11) along the X axis, a Y table (13) that reciprocates the X table (12) along the Y axis, and an adhesive head ( 10) and a Z table (14) that reciprocates along the Z axis,
The Z table (14) is supported by the X table (12), and is supported by the guide structure provided between the two tables (12, 14) so as to be capable of reciprocating along the X-axis direction.
An actuator (56) for moving the Z table (14) away from the origin position in the X-axis direction is provided between the X table (12) and the Z table (14).
By pressing the Z table (14) against the peeling head (11), the adhesive head (10) is positioned in the X-axis direction by the peeling head (11).
The adhesive face supported by the adhesive arm (67) of the adhesive head (10) is adhered to the corner portion of the protective film (7) to separate the peeling start end (7a) from the peeling target (G), and the peeling starting end ( Peeling of the protective film, wherein the protective film (7) is peeled off from the peeling target (G) while the peeling head (11) is peeled along the diagonal line while the clamp body (19) is sandwiched between 7a) apparatus. The peeling apparatus of the protective film of Claim 1 with which the table (1) which supports peeling object (G) is comprised with the adsorption | suction table which adsorbs and fixes peeling object (G) with a vacuum pressure . The peeling head (11) is provided with a pair of clamp bodies (19) that sandwich the peeling start end (7a), and a drive body (18) that opens and closes both clamp bodies (19).
The protective film peeling apparatus according to claim 1 or 2, wherein a sensor (20) for detecting whether or not the peeling start end (7a) is clamped is disposed on the clamping surfaces of both clamp bodies (19) . A forward / reverse motor (76) for rotationally driving the take-up reel (66);
The tape supply reel (65) is connected to the take-up reel (66) via a tensioner (80), a one-way clutch (79), and a transmission structure (78).
Only one positive reversible motor (76), and rotates the take-up reel (66) to the forward-reverse direction, at the same time according to claim 1, 2 or 3 for rotating the tape supply reel (65) in the reverse direction Protective film peeling device. A mat (73) that can be elastically deformed is disposed on the surface of the adhesive arm (67) facing the separation target (G),
The peeling apparatus of the protective film in any one of Claim 1 to 4 with which the back surface side of the adhesive tape (64) pressed against the corner part of a protective film (7) is received with the mat | matte (73) .

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