JP5055828B2 - Electro-optical device substrate, electro-optical device, and electronic apparatus - Google Patents

Description

The present invention relates to an electro-optical device substrate used in an electro-optical device such as a liquid crystal device, an electro-optical device including the electro-optical device substrate, and a liquid crystal projector including the electro-optical device. The present invention relates to the technical field of electronic equipment.

A liquid crystal device which is an example of this type of electro-optical device is frequently used not only as a direct-view display but also as a light modulation means (light valve) of, for example, a projection display device. In particular, in the case of a projection display device, strong light from a light source is incident on the liquid crystal light valve. This light blocks the incident light so that the TFT in the liquid crystal light valve does not cause an increase in leakage current or malfunction. The light shielding film is built in the liquid crystal light valve.

Such a light shielding film is used in an active matrix liquid crystal light valve in a TFT.
In general, it is formed in a lattice shape on the light incident side as viewed from a semiconductor element such as a TFT so as to shield the portion. In addition, a metal material having a light shielding property may be shared as a wiring on a TFT array substrate on which a semiconductor element such as a TFT is formed (see, for example, Patent Document 1).

In this type of electro-optical device, the pixel electrode is temporarily held in an area where a light shielding film is formed on the substrate, that is, an area where light is not transmitted on the substrate. Is provided with a storage capacitor for holding the potential of a predetermined period.

Japanese Patent Laid-Open No. 2005-49939

In this type of electro-optical device, as an example of a means for blocking light incident on a semiconductor layer constituting a part of the TFT and reducing light leakage current flowing through the semiconductor layer, the most of the TFT on the TFT. There is a case where a metal film disposed nearby is shared as a light shielding film.

However, according to the technique disclosed in Patent Document 1, it is formed directly above the semiconductor layer among the plurality of metal films formed on the semiconductor layer constituting a part of the TFT, that is, at a position closest to the semiconductor layer. The width of the metal film is smaller than the width of other metal films. Therefore,
Light having a large incident angle with respect to the semiconductor layer (that is, the angle of incident light with respect to the normal direction of the semiconductor layer) reaches the semiconductor layer, and a light leakage current is generated in the semiconductor layer. When such a light leakage current flows, there is a problem that flicker occurs when image display is performed and the display quality of the electro-optical device is deteriorated. In particular, the LDD (Lightly Doped Drai) is formed in the semiconductor layer for the purpose of suppressing a decrease in on-current when performing liquid crystal inversion control in the pixel portion and reducing off-current.
n) In a liquid crystal device including a thin film transistor (hereinafter referred to as a TFT) in which a region is formed, light leakage current is more likely to occur relative to other regions of the semiconductor layer due to the presence of a potential gradient.
There is a problem in that light reaches the DD region and the display quality of the liquid crystal device is significantly deteriorated.

The occurrence of such a light leakage current is not a problem limited to the semiconductor layer that constitutes a part of the TFT, but is a problem common to a semiconductor layer that should be originally shielded as an electrode of a wiring or various elements.

On the other hand, in order to improve the display quality of an image, it is necessary to increase the capacitance value of a storage capacitor provided in a region where light in a pixel is not transmitted. It is structurally difficult to achieve both a large storage capacitor including a metal film that does not transmit light as an electrode and an increase in the aperture ratio of the pixel.

Therefore, the present invention has been made in view of the above-described problems and the like. For example, the present invention is an electro-optical device such as a liquid crystal device driven by an active matrix method, which reduces generation of light leakage current in a TFT, and Electro-optical device substrate used in an electro-optical device capable of increasing the capacitance value of the storage capacitor, and an electro-optical device provided with such an electro-optical device substrate,
An object is to provide an electronic device.

In order to solve the above-described problem, an electro-optical device substrate according to the present invention corresponds to a data line extending along a first direction, a switching element electrically connected to the data line, and the switching element. A pixel electrode, a storage capacitor electrically connected to the pixel electrode, a first portion extending in a second direction intersecting the first direction, and the first portion to the first portion. A capacitor line formed of a metal film extending along one direction, covering at least a part of the switching element, and having a second part wider than the data line , the switching element and the pixel electrode, Is connected to the first portion of the capacitor line and has a protruding portion that protrudes toward the opening of the pixel provided with the pixel electrode, and extends along the first direction. Relay layer made of metal film Characterized by and a first contact portion for electrically connecting the pixel electrode and the protrusion.
One aspect of the electro-optical device substrate according to the present invention includes a scanning line extending along the second direction, and the width of the second portion is wider than the scanning line in the second direction. There may be.
In one aspect of the electro-optical device substrate according to the present invention, the storage capacitor includes an upper capacitor electrode electrically connected to the pixel electrode, a lower capacitor electrode electrically connected to the capacitor line, The lower capacitor electrode is a part of the capacitor line, and a portion of the lower capacitor electrode extending along the first direction extends along the first direction of the upper capacitor electrode The width of the lower capacitor electrode extending along the second direction may be narrower than the width of the upper capacitor electrode extending along the second direction.

In order to solve the above problems, an electro-optical device according to the present invention includes any one of the above-described electro-optical device substrates (including various aspects thereof) according to the first and second aspects of the present invention. ing.

In the electro-optical device according to the present invention, since the electro-optical device substrate of the present invention described above is provided,
In each pixel portion, light leakage current generated in the first semiconductor layer formed as a wiring or an electrode can be reduced, and the capacitance value of the storage capacitor can be increased. Therefore, according to the electro-optical device according to the present invention, display problems such as flicker can be reduced, and high-quality image display can be performed.

In order to solve the above problems, an electronic apparatus according to the present invention includes the above-described electro-optical device according to the present invention.

According to the electronic apparatus of the present invention, since the electro-optical device according to the present invention described above is provided,
Projection-type display device capable of displaying high-quality images, televisions, mobile phones, electronic notebooks,
Various electronic devices such as a word processor, a viewfinder type or a monitor direct-view type video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized. Further, as the electronic apparatus of the present invention, for example, an electrophoretic device such as electronic paper, a display device using an electron emission device (Field Emission Display and Conduction Electron-Emitter Display), or the like can be realized.

  Such an operation and other advantages of the present invention will become apparent from the embodiments described below.

Embodiments of an electro-optical device substrate, an electro-optical device, and an electronic apparatus according to first and second aspects of the present invention will be described below with reference to the drawings.

(First embodiment)
<1-1: Overall Configuration of Electro-Optical Device>
First, embodiments of an electro-optical device substrate and an electro-optical device including the same according to a first invention of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 is a plan view of the electro-optical device when the TFT array substrate is viewed from the side of the counter substrate together with each component formed thereon.
These are HH 'sectional drawing of FIG. In this embodiment, as an example of an electro-optical device, a TFT active matrix driving type liquid crystal device with a built-in driving circuit is taken as an example.

1 and 2, in the liquid crystal device 1, a TFT array substrate 10 and a counter substrate 20 are disposed to face each other. A liquid crystal layer 50 is sealed between the TFT array substrate 10 and the counter substrate 20, and the TFT array substrate 10 and the counter substrate 20 are positioned around an image display region 10a that is a pixel region in which a plurality of pixel portions are provided. They are bonded to each other by a sealing material 52 provided in the sealing area.

The sealing material 52 is made of, for example, an ultraviolet curable resin, a thermosetting resin, or the like for bonding the two substrates, and after being applied on the TFT array substrate 10 in the manufacturing process,
It is cured by heating or the like. In the sealing material 52, a gap material such as glass fiber or glass beads for dispersing the distance (inter-substrate gap) between the TFT array substrate 10 and the counter substrate 20 to a predetermined value is dispersed. The liquid crystal device 1 of this embodiment is small and suitable for performing enlarged display for a light valve of a projector.

A light-shielding frame light-shielding film 53 that defines the frame area of the image display area 10a is provided on the counter substrate 20 side in parallel with the inside of the seal area where the sealing material 52 is disposed. However, part or all of the frame light shielding film 53 may be provided as a built-in light shielding film on the TFT array substrate 10 side. There is a peripheral area located around the image display area 10a. In other words, particularly in the present embodiment, when viewed from the center of the TFT array substrate 10, the distance from the frame light shielding film 53 is defined as the peripheral region.

A data line driving circuit 101 and an external circuit connection terminal 102 are provided along one side of the TFT array substrate 10 in a region located outside the sealing region in which the sealing material 52 is disposed in the peripheral region. The scanning line driving circuit 104 is provided along two sides adjacent to the one side so as to be covered with the frame light shielding film 53. Further, the image display area 10 is thus obtained.
In order to connect the two scanning line driving circuits 104 provided on both sides of a, the TFT array substrate 1
A plurality of wirings 105 are provided along one remaining side of 0 and so as to be covered with the frame light shielding film 53.

Vertical conductive members 106 functioning as vertical conductive terminals between the two substrates are disposed at the four corners of the counter substrate 20. On the other hand, the TFT array substrate 10 is provided with vertical conduction terminals in a region facing these corner portions. As a result, the TFT array substrate 1
Electrical conduction can be established between 0 and the counter substrate 20.

In FIG. 2, on the TFT array substrate 10, TFTs for pixel switching, scanning lines,
An alignment film is formed on the pixel electrode 9a after the wiring such as the data line is formed. On the other hand
On the counter substrate 20, in addition to the counter electrode 21, a lattice-shaped or striped light-shielding film 23 and an alignment film are formed in the uppermost layer portion. The liquid crystal layer 50 is made of, for example, a liquid crystal in which one or several types of nematic liquid crystals are mixed, and takes a predetermined alignment state between the pair of alignment films.

The TFT array substrate 10 is a transparent substrate such as a quartz substrate, a glass substrate, or a silicon substrate. The counter substrate 20 is also a transparent substrate like the TFT array substrate 10.

The TFT array substrate 10 is provided with a pixel electrode 9a, and an alignment film on which a predetermined alignment process such as a rubbing process has been performed is provided above the pixel electrode 9a. For example, the pixel electrode 9a is I
It consists of a transparent conductive film such as a TO (Indium Tin Oxide) film, and the alignment film consists of an organic film such as a polyimide film.

The counter substrate 20 is provided with a counter electrode 21 over its entire surface, and below it,
An alignment film 22 subjected to a predetermined alignment process such as a rubbing process is provided. Counter electrode 21
Is made of a transparent conductive film such as an ITO film. The alignment film 22 is made of an organic film such as a polyimide film.

The counter substrate 20 may be provided with a lattice-shaped or striped light-shielding film. By adopting such a configuration, the TF is combined with the upper light shielding film provided as the upper capacitor electrode 300.
It is possible to more reliably prevent the incident light from the T array substrate 10 side from entering the channel region 1a ′ or its periphery.

TF configured as described above and arranged so that the pixel electrode 9a and the counter electrode 21 face each other.
A liquid crystal layer 50 is formed between the T array substrate 10 and the counter substrate 20. The liquid crystal layer 50 is
A predetermined alignment state is obtained by the alignment film in a state where an electric field from the pixel electrode 9a is not applied.

The data line driving circuit 1 is provided on the TFT array substrate 10 shown in FIGS.
01, a sampling circuit that samples the image signal on the image signal line and supplies it to the data line in addition to the driving circuit such as the scanning line driving circuit 104, and a precharge signal having a predetermined voltage level precedes the image signal to a plurality of data lines In addition, a precharge circuit to be supplied, an inspection circuit for inspecting quality, defects, and the like of the electro-optical device during manufacture or shipment may be formed.

<1-2: Electrical Connection Configuration of Pixel Unit>
Next, the electrical connection configuration of the pixel portion of the liquid crystal device 1 will be described in detail with reference to FIG. FIG. 3 is an equivalent circuit of various elements, wirings, and the like in a plurality of pixels formed in a matrix that forms the image display area of the liquid crystal device 1.

In FIG. 3, a pixel electrode 9 a and a TFT 30 are formed in each of a plurality of pixels formed in a matrix that forms the image display region 10 a of the liquid crystal device 1. The TFT 30 is electrically connected to the pixel electrode 9a, and performs switching control of the pixel electrode 9a when the liquid crystal device 1 operates. The data line 6a to which the image signal is supplied is electrically connected to the source of the TFT 30. The image signals S1, S2,..., Sn to be written to the data lines 6a may be supplied line-sequentially in this order, or may be supplied for each group to a plurality of adjacent data lines 6a. May be.

The scanning line 3a is electrically connected to the gate of the TFT 30, and the liquid crystal device 1 sequentially applies the scanning signals G1, G2,..., Gm to the scanning line 3a in a pulse sequence in this order at a predetermined timing. It is comprised so that it may apply. The pixel electrode 9a is electrically connected to the drain of the TFT 30, and the image signal S1, S2,... Supplied from the data line 6a is closed by closing the switch of the TFT 30 serving as a switching element for a certain period. Sn is written at a predetermined timing. A predetermined level of image signals S1, S2,..., Sn written in the liquid crystal as an example of the electro-optical material via the pixel electrode 9a is held for a certain period with the counter electrode formed on the counter substrate. The

The liquid crystal constituting the liquid crystal layer 50 modulates light and enables gradation display by changing the orientation and order of the molecular assembly depending on the applied voltage level. In the normally white mode, the transmittance for incident light is reduced according to the voltage applied in units of each pixel, and in the normally black mode, the light is incident according to the voltage applied in units of each pixel. The transmittance with respect to light is increased, and light having a contrast corresponding to an image signal is emitted from the liquid crystal device 1 as a whole. In order to prevent the image signal held here from leaking, an example of the “holding capacitor” according to the first aspect of the present invention in parallel with the liquid crystal capacitor formed between the pixel electrode 9a and the counter electrode. A certain storage capacitor 70a is electrically connected. When the storage capacitor 70a temporarily holds the potential of each pixel electrode 9a in response to the supply of the image signal, the potential holding characteristic of the pixel electrode 9a is improved, and display characteristics such as contrast and flicker can be improved.

<1-3: Specific Configuration of Pixel Unit>
Next, a specific configuration of the pixel portion will be described with reference to FIGS. FIG. 4 is a plan view of a plurality of pixel groups adjacent to each other on a TFT array substrate on which data lines, scanning lines, pixel electrodes and the like are formed. 5 is a cross-sectional view taken along the line VV ′ of FIG. 6 is a cross-sectional view taken along the line VI-VI ′ of FIG. 4 to 6, the scale of each layer / member is different for each layer / member so that each layer / member can be recognized on the drawing. In FIGS. 5 and 6, for convenience of explanation, illustration of a portion located above the pixel electrode 9 a is omitted. In FIG. 5, TFT
The portion from the array substrate 10 to the pixel electrode 9a is an example of the “electro-optical device substrate” according to the first aspect of the present invention.

4 and 5, on the TFT array substrate 10 of the liquid crystal device 1, the X direction and Y
A plurality of transparent pixel electrodes 9a are provided in a matrix with respect to the direction, and the pixel electrodes 9a
A plurality of data lines 6a and a plurality of scanning lines 3a are provided along the vertical and horizontal boundaries.

In the semiconductor layer 1a, the scanning line 3a is arranged so as to face the channel region 1a 'indicated by the hatched region rising to the right in FIG. A pixel switching TFT 30 is provided at each of the locations where the scanning line 3a and the data line 6a intersect each other.

The data line 6a is formed using the second interlayer insulating film 42 shown in FIG. 5 whose upper surface is flattened as a base, and is connected to the high concentration source region 1d of the TFT 30 included in the semiconductor layer 1a through the contact hole 81a. Electrically connected. Data line 6a and contact hole 8
The interior of 1a is made of, for example, an Al (aluminum) -containing material such as Al-Si-Cu or Al-Cu, Al alone, or a multilayer film including an Al layer and a TiN layer. The data line 6a is T
It also has a function of shielding the FT 30 from light.

The storage capacitor 70a includes a lower capacitor electrode 71m which is an example of the “first electrode” according to the first invention of the present invention and an upper capacitor electrode which is an example of the “second electrode” according to the first invention of the present invention. 300 is disposed so as to be opposed to each other through the dielectric film 75a.

The upper capacitor electrode 300 is a pixel potential side capacitor electrode electrically connected to the high concentration drain region 1e of the TFT 30 and the pixel electrode 9a. More specifically, the upper capacitor electrode 300 is electrically connected to the relay layer 93 via the contact hole 84a, and the electrical connection between the high concentration drain region 1e and the pixel electrode 9a is made together with the relay layer 93. Relay. In addition, the relay layer 93 is electrically connected to the pixel electrode 9a through a convex portion 93a that is a part of the relay layer 93 and a contact hole 85a that is electrically connected to the convex portion 93a. Therefore, the pixel electrode 9a and the upper capacitor electrode 300 are electrically connected.

The upper capacitor electrode 300 is a non-transparent metal film that includes, for example, a metal or an alloy and is provided on the upper side of the TFT 30. The upper capacitor electrode 300 also functions as an upper light shielding film (built-in light shielding film) that shields the TFT 30. The upper capacitor electrode 300 is formed including a metal such as Al (aluminum) or Ag (silver). The upper capacitor electrode 300 is made of, for example, Ti (titanium), Cr
(Chromium), W (tungsten), Ta (tantalum), Mo (molybdenum), Pd (palladium), and other metals including at least one of refractory metals, alloys, alloys, metal silicides, polysilicides, You may comprise from what was laminated | stacked.

The lower capacitor electrode 71m extends from the image display area 10a where the pixel electrode 9a is disposed to the periphery thereof. The lower capacitor electrode 71m is a fixed potential side capacitor electrode that is electrically connected to a constant potential source and maintained at a fixed potential.

The lower capacitive electrode 71m is also a non-transparent metal film like the upper capacitive electrode 300. Therefore, the storage capacitor 70a is configured as a so-called MIM (Metal-Insulator-Metal) structure having a three-layer structure of metal film-dielectric film (insulating film) -metal film. Here, the lower capacitor electrode 71m extends over a plurality of pixels and is shared by the plurality of pixels. In the present embodiment, by forming the lower capacitor electrode 71m as a metal film, the entire liquid crystal device 1 is consumed when the liquid crystal device 1 is driven as compared with the case where the lower capacitor electrode 71m is configured using a semiconductor. Power consumption can be reduced, and high-speed operation of elements in each pixel portion can be achieved.

The dielectric film 75a is, for example, an HTO (High Temperature Oxide) film or an LTO (Low Temperer).
feature oxide) film or the like, or a silicon nitride film or the like.

The lower light-shielding film 11a provided in a lattice shape below the TFT 30 with the base insulating film 12 interposed therebetween,
The channel region 1a of the TFT 30 from the return light entering the device from the TFT array substrate 10 side
′ And the surrounding area are shielded from light. Similarly to the upper capacitor electrode 300 and the lower capacitor electrode 71m, the lower light-shielding film 11a is, for example, a single metal containing at least one of refractory metals such as Ti, Cr, W, Ta, Mo, and Pd. It consists of an alloy, metal silicide, polysilicide, or a laminate of these.

The base insulating layer 12 has a function of insulating the TFT 30 from the lower light-shielding film 11a as an interlayer, and a TFT
By being formed on the entire surface of the array substrate 10, it has a function of preventing deterioration of the characteristics of the pixel switching TFT 30 due to roughness during polishing of the surface of the TFT array substrate 10, dirt remaining after cleaning, and the like.

The pixel electrode 9a includes an upper capacitor electrode 300, contact holes 83a, 84a and 85a,
In addition, the semiconductor layer 1 a is electrically connected to the high concentration drain region 1 e through the relay layer 93. The contact hole 85a is formed by depositing a conductive material constituting the pixel electrode 9a such as ITO on the inner wall of a hole formed so as to penetrate the third interlayer insulating layer 43.

In FIG. 5, a TFT 30 has a channel formed in a semiconductor layer 1a, which is an example of a “first semiconductor layer” according to the first invention of the present invention, in which a channel is formed by an electric field from a scanning line 3a shared as a gate electrode. The gate insulating film 2 includes a region 1a ′ and two layers of insulating films 2a and 2b that insulate the scanning line 3a made of a conductive material such as polysilicon and the semiconductor layer 1a. The semiconductor layer 1a has an LDD (Lightly Doped Drain) structure including a low concentration source region 1b, a low concentration drain region 1c, a high concentration source region 1d, and a high concentration drain region 1e. Each of the low concentration source region 1b and the low concentration drain region 1c is an example of the “LDD region” according to the first aspect of the present invention. Low concentration source region 1b, low concentration drain region 1c
The high-concentration source region 1d and the high-concentration drain region 1e constitute an impurity region of the semiconductor layer 1a and are formed in mirror symmetry on both sides of the channel region 1a ′.

Since the storage capacitor 70a is disposed immediately above the TFT 30 with the first interlayer insulating film 41 interposed therebetween, the storage capacitor 70a extends from the normal direction of the semiconductor layer 1a of the TFT 30 to the normal direction along the direction in which the semiconductor layer 1a extends. Therefore, it is possible to block incident light incident on the semiconductor layer 1a at a large angle, and to reduce light leakage current generated in the semiconductor layer 1a. Therefore, TFT30
The off-current flowing through the low-concentration source region 1b and the low-concentration drain region 1c during the non-operation can be reduced, and the decrease in the on-current flowing during the operation of the TFT 30 can be suppressed. Therefore, the liquid crystal device 1 can display an image with high quality during its operation.

On the scanning line 3a, a first interlayer insulating film 41 in which a contact hole 81a leading to the high concentration source region 1d and a contact hole 83a leading to the high concentration drain region 1e are respectively opened.
Is formed. On the first interlayer insulating film 41, a lower capacitor electrode 71m and an upper capacitor electrode 30 are provided.
The second interlayer insulating film 42 having the contact holes 81a formed thereon is formed thereon. A third interlayer insulating film 43 in which contact holes 85a are formed is formed so as to cover the entire surface of the second interlayer insulating film 42 and the relay layer 93 from above the data line 6a. The pixel electrode 9 a and an alignment film (not shown) are provided on the upper surface of the third interlayer insulating film 43.

The relay layer 93 is formed on the second interlayer insulating film 42 in the same layer as the data line 6a.
For the data line 6a and the relay layer 93, a thin film made of a conductive material such as a metal film is formed on the second interlayer insulating film 42 by using a thin film forming method, and the thin film is partially removed. It forms in the state mutually spaced apart by patterning. Therefore, the data line 6a
And since the relay layer 93 can be formed in the same process, the manufacturing process of the liquid crystal device 1 can be simplified.

In FIG. 4, a scanning line 3a, a data line 6a, a storage capacitor 70a, a lower light shielding film 11a, a relay layer 93, and a TFT 30 are seen on the TFT array substrate 10 in plan view, and each pixel corresponding to the pixel electrode 9a. It is arranged in a non-opening region surrounding the opening region (that is, a region where light actually contributing to display is transmitted or reflected in each pixel). That is, the scanning lines 3a, the storage capacitors 70a, the data lines 9a, the lower light shielding film 11a, and the TFTs 30 are arranged not in the opening area of each pixel but in the non-opening area so as not to disturb the display. Yes.

  Next, a specific configuration of the storage capacitor 70a will be described in detail with reference to FIG.

In FIG. 6, the scanning line 6a, the upper capacitor electrode 300, and the lower capacitor electrode 71s constitute an example of “a plurality of metal films” according to the first invention of the present invention.

The storage capacitor 70a has a scanning line 6a, an upper capacitor electrode 300, and a lower capacitor electrode 71 formed on the semiconductor layer 1a shown in FIG. 4 in a non-opening region defined by the edge of the lower capacitor electrode 71m.
The lower capacitive electrode 71m disposed on the lowermost layer side of s and the upper capacitive electrode 300 disposed on the lower capacitive electrode 71m are provided.

In the non-opening region, the lower capacitor electrode 71m is interposed between the lower capacitor electrode 71m and the semiconductor layer 1a.
Metal films formed as wirings or electrodes other than m are not disposed. Therefore, the lower capacitor electrode 71m is a metal film disposed at a position closest to the semiconductor layer 1a among a plurality of metal films formed as wirings or electrodes in the non-opening region.

Here, each of the width W2 of the upper capacitor electrode 300 and the width W1 of the lower capacitor electrode 71s along the X direction in the drawing is an example of “another metal film” according to the first invention of the present invention. It is larger than the width W0 of a certain data line 6a. In particular, since the lower capacitor electrode 71m is the widest of these three metal films, the edge of the lower capacitor electrode 71m defines the boundary between the non-opening region and the opening region in the cross-sectional view shown in FIG. Yes.

Therefore, the capacity value of the storage capacitor 70a that can be formed in the non-opening region by making the maximum use of the width of the non-opening region is compared with the case where the metal film other than the upper capacitor electrode 300 and the lower capacitor electrode 71m is used as an electrode. It is possible to take large. Therefore, the potential holding characteristic of the storage capacitor 70a is enhanced, and the display performance of the liquid crystal device 1 can be enhanced.

In addition, the lower capacitor electrode 71m is a metal film formed on the lowermost layer among the data lines 6a, the upper capacitor electrode 300, and the lower capacitor electrode 71m, which are a plurality of metal films formed in the non-opening region. Therefore, light reaching the semiconductor layer 1a out of light emitted from a light source or the like can be reduced as compared with a case where the semiconductor layer 1a is shielded from light by a metal film disposed on the storage capacitor 70a such as the data line 6a. In the present embodiment, the width W1 of the lower capacitive electrode 71m and the upper capacitive electrode 3
The width W2 of 00 is not only larger than the width W0 of the data line 6a formed in the non-opening region, but the width W1 of the lower capacitor electrode 71m is the largest of these metal films, It is possible to effectively block incident light incident at a large angle from the light source or the like toward the semiconductor layer 1a with respect to the normal direction of the semiconductor layer 1a.

In particular, in the present embodiment, the low concentration drain region 1c is a region where impurities are implanted into the semiconductor layer 1a serving as a substrate by impurity implantation, and in the low concentration drain region 1c as compared with other regions of the semiconductor layer 1a. The potential gradient is large and light leakage current is likely to occur. Since the lower capacitance electrode 71m can block light incident obliquely on the low concentration drain region 1c (that is, light incident at a large angle with respect to the normal direction of the semiconductor layer 1a), the low concentration drain region The optical leakage current generated in 1c can be reduced.

As described above, according to the substrate for the electro-optical device according to the present embodiment, the potential holding characteristic of the storage capacitor 70a can be improved and the light leakage current generated in the TFT 30 can be reduced, so that liquid crystal with reduced display defects such as flicker is reduced. The apparatus 1 can be provided.

(Modification 1)
Next, an example of a modification of the electro-optical device substrate according to the present embodiment will be described with reference to FIG. FIG. 7 is a cross-sectional view corresponding to FIG. 6 in the electro-optical device substrate according to the present example. In the following description, common reference numerals are assigned to parts common to the liquid crystal device 1 described above, and detailed description thereof is omitted.

In FIG. 7, the width W2 of the upper capacitor electrode 300 and the width W1 of the lower capacitor electrode 71m are equal to each other and larger than the width W0 of the data line 6a. In other words, the width W2 of the upper capacitor electrode 300 and the width W1 of the lower capacitor electrode 71m among the plurality of metal films formed in the non-opening region are larger than the widths of the other metal films.

According to the upper capacitor electrode 300 and the lower capacitor electrode 71m, the overlapping region between the upper capacitor electrode 300 and the lower capacitor electrode 71m can be widened as compared with the case where the width W2 is smaller than the width W1. The capacitance value of the storage capacitor 70a can be increased. Therefore, according to the substrate for the electro-optical device provided with the storage capacitor 70a having the increased capacitance value as described above, an electro-optical device capable of displaying an image with higher quality than the liquid crystal device 1 can be provided.

(Modification 2)
Next, another example of a modification of the electro-optical device substrate according to the present embodiment will be described with reference to FIG. FIG. 8 is a cross-sectional view of the electro-optical device substrate according to this example corresponding to FIG.

In FIG. 8, the upper capacitor electrode 300 is formed in a layer different from the lower capacitor electrode 71m, and a part of the upper capacitor electrode 300 extends in the same layer as the lower capacitor electrode 71m. Accordingly, the width W2 of the upper capacitor electrode 300 is larger than the width W1 of the lower capacitor electrode 71m by the width of the portion extending in the same layer as the lower capacitor electrode 71m.

According to the upper capacitor electrode 300 and the lower capacitor electrode 71m, the upper capacitor electrode 300 and the lower capacitor electrode 71m overlap each other as compared with the case where the width W2 is smaller than or equal to the width W1. Since the size of the region can be increased, the capacitance value of the storage capacitor 70a can be increased. In addition, since the upper capacitor electrode 300 can block light incident obliquely on the semiconductor layer 1a, light leakage current generated in the semiconductor layer 1a can be reduced. According to the electro-optical device substrate provided with such a storage capacitor 70a, an electro-optical device capable of displaying an image with higher quality than the liquid crystal device 1 can be provided.

(Second Embodiment)
Next, embodiments of the electro-optical device substrate and the electro-optical device including the same according to the second invention of the present invention will be described with reference to FIGS. 9 to 11. FIG. 9 is a plan view of a plurality of adjacent pixel groups on the TFT array substrate 10 on which the data lines 6a, the scanning lines 3a, the pixel electrodes 9a, and the like are formed. 10 is a cross-sectional view taken along the line XX ′ of FIG. FIG. 11 shows the XI-XI ′ in FIG.
It is sectional drawing.

9 to 11, as in FIGS. 4 to 6, in order to make each layer and each member recognizable on the drawing, the scale is different for each layer and each member. Also,
In FIGS. 10 and 11, for convenience of explanation, illustration of a portion located above the pixel electrode 9 a is omitted, and portions common to the liquid crystal device 1 according to the first embodiment are denoted by common reference numerals. FIG.
0, the portion from the TFT array substrate 10 to the pixel electrode 9a is an example of the “substrate for the electro-optical device” according to the second aspect of the present invention.

9 and 10, the liquid crystal device of this embodiment includes a relay layer 93, a storage capacitor 70b, which is an example of the “holding capacitor” according to the second invention of the present invention, a contact hole 85b, and a contact hole 84b. Yes.

The storage capacitor 70b is sandwiched between the lower capacitor electrode 71s extending from the non-open region to the open region, the upper capacitor electrode 300 as an example of the “first metal film” according to the second invention of the present invention, and these electrodes. And a dielectric film 75b. The upper capacitor electrode 300 is a fixed potential side capacitor electrode, and the lower capacitor electrode 71s is a pixel potential side capacitor electrode electrically connected to the high concentration drain region 1e of the TFT 30 through the contact hole 83b. The lower capacitor electrode 71s is an example of the “second semiconductor layer” according to the second invention of the present invention, and is formed of a semiconductor layer such as polysilicon. Therefore, the storage capacitor 70b has a so-called MIS (Metal-Insulator-Se
miconductor) structure. The lower capacitor electrode 71 s has a function as a light absorption layer or a light shielding film disposed between the upper capacitor electrode 300 as the upper light shielding film and the TFT 30 in addition to the function as the pixel potential side capacitive electrode. The data line 6a includes a first interlayer insulating film 41,
It is electrically connected to the high-concentration source region 1d through a contact hole 81b that penetrates the insulating film 61 and the second interlayer insulating film. An insulating film 61 is partially interposed between the first interlayer insulating film 41 and the second interlayer insulating film 42.

As shown in FIG. 9, the lower capacitor electrodes 71s are separated from each other for each pixel. Therefore, the image signal supplied via the data line 6 a is supplied for each pixel in accordance with the switching operation of the TFT 30. The upper capacitor electrode 300 extends to a plurality of pixels along the X direction in FIG. Therefore, the upper capacitor electrode 300 is shared by a plurality of pixels, so that the electrode area is larger than that of the lower capacitor electrode 71s.

However, since the upper capacitor electrode 300 is made of a metal film such as Al, an increase in electrical resistance due to an increase in electrode area can be suppressed as compared with the case where the upper capacitor electrode 300 is formed of a semiconductor. Therefore, power consumption during operation of the liquid crystal device can be reduced, and various elements in each pixel can be driven at high speed, and there is an advantage that deterioration in responsiveness when an image is displayed by the liquid crystal device can be suppressed. Such an advantage is that the upper capacitor electrode 3 as in the present embodiment.
00 is formed so as to extend over pixels adjacent to each other along the Y direction in the drawing, and a plurality of upper capacitive electrodes 300 may be formed so as to occupy a larger area in the image display region 10a. It appears more prominently when it is formed across pixels.

Since the contact hole 85b electrically connects the relay layer 93 and the pixel electrode 9a in the non-opening region, the opening region is not narrowed.

The convex portion 93a protrudes from the non-opening region to the opening region, and the lower capacitor electrode 71s also extends from the non-opening region to the opening region. Therefore, the lower capacitor electrode 71s is connected to the contact hole 8
Only the portion connected to 4b needs to be extended to the opening region, and the lowering of the opening ratio can be reduced by extending the entire lower capacitor electrode 71s to the opening region. In addition, as in the first embodiment, the non-opening region extending on both sides of the contact hole 84b along the X direction in the non-opening region can be narrowed, so that the aperture ratio can be increased.

  Next, a specific configuration of the storage capacitor 70b will be described in detail with reference to FIG.

In FIG. 11, the storage capacitor 70 b includes a scanning line 6 a and an upper capacitor electrode 300 that constitute an example of “a plurality of metal films” according to the second invention of the present invention, and a lower capacitor electrode 71 s.

The upper capacitive electrode 300 is arranged on the lowest layer side of the scanning line 6a and the upper capacitive electrode 300 formed on the semiconductor layer 1a shown in FIG. 9 in the non-opening region defined by the edge of the upper capacitive electrode 300. Yes. Therefore, in the non-opening region, the upper capacitor electrode 300 among the plurality of metal films is disposed at a position closest to the semiconductor layer 1a.

Here, each of the width W2 of the upper capacitor electrode 300 and the width W1 of the lower capacitor electrode 71s along the X direction in the drawing is an example of “another metal film” according to the second invention of the present invention. It is larger than the width W0 of a certain data line 6a. In particular, the upper capacitor electrode 300 is connected to the data line 6.
Since the width a is larger than the width W0, the edge of the upper capacitor electrode 300 defines the boundary between the non-opening region and the opening region in the cross-sectional view shown in FIG.

Therefore, the capacity value of the storage capacitor 70b that can be formed in the non-opening region by making the maximum use of the width of the non-opening region is compared with the case where a metal film other than the upper capacitor electrode 300 and the lower capacitor electrode 71m is used as the electrode. It is possible to take large. Thereby, the potential holding characteristic of the storage capacitor 70b is enhanced, and the display performance of the liquid crystal device 1 can be enhanced.

In addition, the upper capacitor electrode 300 is a metal film formed on the lowermost layer among the data lines 6a and the upper capacitor electrode 300 which are a plurality of metal films formed in the non-opening region. Therefore,
Compared with the case where the semiconductor layer 1a is shielded from light by the metal film disposed on the storage capacitor 70a such as the data line 6a, the light incident on the semiconductor layer 1a out of the light emitted from the light source or the like can be reduced.
In the present embodiment, since the width W2 of the upper capacitor electrode 300 is larger than the width W0 of the data line 6a formed in the non-opening region, the method of the semiconductor layer 1a from the light source or the like toward the semiconductor layer 1a. It is possible to effectively block incident light incident at a large angle with respect to the line direction.

In particular, in the present embodiment, the low concentration drain region 1c is a region where impurities are implanted into the semiconductor layer 1a serving as a substrate by impurity implantation, and in the low concentration drain region 1c as compared with other regions of the semiconductor layer 1a. The potential gradient is large and light leakage current is likely to occur. According to the upper capacitor electrode 300, light incident obliquely on the lightly doped drain region 1c (that is, light incident at a large angle with respect to the normal direction of the semiconductor layer 1a) can be blocked. The optical leakage current generated in 1c can be reduced.

As described above, according to the substrate for the electro-optical device according to the present embodiment, the potential holding characteristic of the storage capacitor 70b can be improved and the light leakage current generated in the TFT 30 can be reduced, so that the liquid crystal with reduced display defects such as flicker is reduced. The apparatus 1 can be provided.

(Modification 1)
Next, a modified example of the electro-optical device substrate according to the present embodiment will be described with reference to FIG. FIG. 12 is a cross-sectional view corresponding to FIG. 11 in the electro-optical device substrate according to the present example. In the following description, common reference numerals are assigned to parts common to the above-described liquid crystal device, and detailed description thereof is omitted.

In FIG. 12, the width W2 of the upper capacitor electrode 300 and the width W1 of the lower capacitor electrode 71m are equal and larger than the width W0 of the data line 6a.

According to the upper capacitor electrode 300 and the lower capacitor electrode 71s, the width W2 of the upper capacitor electrode 300 is obliquely incident on the semiconductor layer 1a as in the case where the width W2 is larger than the width W1. It is possible to block light, and light leakage current generated in the semiconductor layer 1a can be reduced. Therefore, according to the electro-optical device substrate including the storage capacitor 70b, it is possible to provide an electro-optical device that can display an image with high quality as in the above-described liquid crystal device.

(Electronics)
Next, the case where the liquid crystal device described above is applied to various electronic devices will be described with reference to FIG. The electronic apparatus according to the present embodiment is a projector that uses the liquid crystal device described above as a light valve. FIG. 13 is a plan view illustrating a configuration example of a projector that is an example of an electronic apparatus including the above-described liquid crystal device. As shown in FIG. 13, a projector 1100 includes a lamp unit 1102 made up of a white light source such as a halogen lamp. The projection light emitted from the lamp unit 1102 is converted into RGB 3 by four mirrors 1106 and two dichroic mirrors 1108 arranged in the light guide 1104.
Liquid crystal panels 1110R and 111 as light valves that are separated into primary colors and correspond to the primary colors.
Incident to 0B and 1110G.

The configurations of the liquid crystal panels 1110R, 1110B, and 1110G are the same as those of the liquid crystal device described above, and are driven by R, G, and B primary color signals supplied from the image signal processing circuit. The light modulated by these liquid crystal panels is dichroic prism 11.
12 is incident from three directions. In this dichroic prism 1112, R and B light is refracted at 90 degrees, while G light travels straight. Accordingly, as a result of the synthesis of the images of the respective colors, a color image is projected onto the screen or the like via the projection lens 1114.

Here, paying attention to the display images by the liquid crystal panels 1110R, 1110B, and 1110G, the display images by the liquid crystal panel 1110G are the liquid crystal panels 1110R and 1110B.
The display image is horizontally reversed. Liquid crystal panels 1110R, 1110B and 1
Since light corresponding to the primary colors of R, G, and B is incident on 110G by the dichroic mirror 1108, it is not necessary to provide a color filter.

In addition, according to the electronic apparatus according to the present embodiment, since the liquid crystal device described above is included, a projection display device, a mobile phone, an electronic notebook, which is capable of high-quality display and has a small size,
Various electronic devices such as a word processor, a viewfinder type or a monitor direct-view type video tape recorder, a workstation, a videophone, a POS terminal, and a touch panel can be realized.

FIG. 3 is a plan view of the electro-optical device according to the first embodiment of the present invention viewed from the counter substrate side together with each component formed on the TFT array substrate. It is HH 'sectional drawing of FIG. 3 is an equivalent circuit of various elements and wirings in a plurality of pixels of the electro-optical device according to the first embodiment of the invention. 2 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, and the like are formed in the electro-optical device according to the first embodiment of the invention. FIG. It is VV 'sectional drawing of FIG. It is VI-VI 'sectional drawing of FIG. It is sectional drawing which shows the modification (the 1) of the storage capacity in 1st Embodiment of this invention. It is sectional drawing which shows the modification (the 2) of the storage capacity in 1st Embodiment of this invention. FIG. 10 is a plan view of a plurality of adjacent pixel groups on a TFT array substrate on which data lines, scanning lines, pixel electrodes, and the like are formed in an electro-optical device according to a second embodiment of the invention. It is XX 'sectional drawing of FIG. It is XI-XI 'sectional drawing of FIG. It is sectional drawing which shows the modification of the storage capacity in 2nd Embodiment of this invention. FIG. 6 is a plan view illustrating an example of an electronic apparatus including the electro-optical device according to the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Liquid crystal device, 1a ... Semiconductor layer, 2 ... Gate insulating film, 3a ... Scan line,
6a ... data lines, 10 ... TFT array substrate, 11a ... lower light-shielding film, 70a,
70b: Storage capacitor, 71m, 71s: Lower capacitor electrode, 75a, 75b ... Dielectric film, 93 ... Relay layer, 300 ... Upper capacitor electrode

Claims (5)

A data line extending along the first direction;
A switching element electrically connected to the data line;
A pixel electrode provided to correspond to the switching element;
A storage capacitor electrically connected to the pixel electrode;
A first portion extending in a second direction intersecting the first direction, and extending from the first portion along the first direction, covering at least a portion of the switching element, and from the data line A capacitor line formed of a metal film having a wide second portion ;
The switching element and the pixel electrode are electrically connected to each other, and has a protruding portion that protrudes from a region overlapping the first portion of the capacitor line toward the opening of the pixel in which the pixel electrode is provided. A relay layer formed of a metal film extending along one direction;
A first contact portion that electrically connects the protruding portion and the pixel electrode;
A substrate for an electro-optical device, comprising: A scanning line extending along the second direction,
2. The electro-optical device substrate according to claim 1, wherein a width of the first portion is wider than the scanning line in the second direction. The holding capacity is
An upper capacitor electrode electrically connected to the pixel electrode;
A lower capacitor electrode electrically connected to the capacitor line;
Including
The lower capacitor electrode is a part of the capacitor line;
The portion of the lower capacitor electrode extending along the first direction is wider than the portion of the upper capacitor electrode extending along the first direction,
The portion of the lower capacitor electrode extending along the second direction is narrower than the portion of the upper capacitor electrode extending along the second direction. Electro-optical device substrate. An electro-optical device comprising the electro-optical device substrate according to claim 1. An electronic apparatus comprising the electro-optical device according to claim 4.

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