JP5038065B2 - 液体吐出ヘッド及びその製造方法 - Google Patents

液体吐出ヘッド及びその製造方法 Download PDF

Info

Publication number
JP5038065B2
JP5038065B2 JP2007220885A JP2007220885A JP5038065B2 JP 5038065 B2 JP5038065 B2 JP 5038065B2 JP 2007220885 A JP2007220885 A JP 2007220885A JP 2007220885 A JP2007220885 A JP 2007220885A JP 5038065 B2 JP5038065 B2 JP 5038065B2
Authority
JP
Japan
Prior art keywords
film
thin film
etching
piezoelectric
piezoelectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007220885A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008087469A (ja
JP2008087469A5 (https=
Inventor
智史 野津
達雄 古田
武人 西田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007220885A priority Critical patent/JP5038065B2/ja
Publication of JP2008087469A publication Critical patent/JP2008087469A/ja
Publication of JP2008087469A5 publication Critical patent/JP2008087469A5/ja
Application granted granted Critical
Publication of JP5038065B2 publication Critical patent/JP5038065B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2007220885A 2006-09-08 2007-08-28 液体吐出ヘッド及びその製造方法 Expired - Fee Related JP5038065B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007220885A JP5038065B2 (ja) 2006-09-08 2007-08-28 液体吐出ヘッド及びその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006243986 2006-09-08
JP2006243986 2006-09-08
JP2007220885A JP5038065B2 (ja) 2006-09-08 2007-08-28 液体吐出ヘッド及びその製造方法

Publications (3)

Publication Number Publication Date
JP2008087469A JP2008087469A (ja) 2008-04-17
JP2008087469A5 JP2008087469A5 (https=) 2010-10-07
JP5038065B2 true JP5038065B2 (ja) 2012-10-03

Family

ID=39372092

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007220885A Expired - Fee Related JP5038065B2 (ja) 2006-09-08 2007-08-28 液体吐出ヘッド及びその製造方法

Country Status (1)

Country Link
JP (1) JP5038065B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5585209B2 (ja) * 2009-05-28 2014-09-10 株式会社リコー 電気機械変換素子の製造方法、該製造方法により製造した電気機械変換素子、液滴吐出ヘッド及び液滴吐出装置
JP2022052115A (ja) 2020-09-23 2022-04-04 セイコーエプソン株式会社 圧電アクチュエーターの製造方法、圧電アクチュエーターおよびロボット

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05177831A (ja) * 1991-12-27 1993-07-20 Rohm Co Ltd インクジェットプリントヘッド及びそれを備える電子機器
JPH09327911A (ja) * 1996-06-10 1997-12-22 Seiko Epson Corp インクジェットプリンタヘッド
JP3442299B2 (ja) * 1997-11-25 2003-09-02 セイコーエプソン株式会社 インクジェット式記録ヘッド及びその製造方法
KR100540644B1 (ko) * 1998-02-19 2006-02-28 삼성전자주식회사 마이크로 엑츄에이터 제조방법
JP2004186574A (ja) * 2002-12-05 2004-07-02 Matsushita Electric Ind Co Ltd 圧電体薄膜素子およびインクジェット記録装置ならびにその製造方法

Also Published As

Publication number Publication date
JP2008087469A (ja) 2008-04-17

Similar Documents

Publication Publication Date Title
JP4823714B2 (ja) 圧電方式のインクジェットプリントヘッド及びその製造方法
US7364275B2 (en) Piezoelectric actuator of an ink-jet printhead and method for forming the same
JPH10286953A (ja) インクジェット記録装置とその製造方法
US7935264B2 (en) Liquid discharge head and method of manufacturing the same
KR20070078201A (ko) 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
JP6582803B2 (ja) 電子デバイス、液体吐出ヘッド、および、電子デバイスの製造方法
JP4731270B2 (ja) 圧電方式のインクジェットプリントヘッド及びその製造方法
US7963640B2 (en) Liquid discharge head and method for manufacturing the liquid discharge head
JP5058717B2 (ja) 液体吐出ヘッドおよびその製造方法
US8485639B2 (en) Inkjet print head and method for manufacturing the same
KR100682917B1 (ko) 압전 방식의 잉크젯 프린트헤드 및 그 제조방법
JP5038065B2 (ja) 液体吐出ヘッド及びその製造方法
US7578943B2 (en) Liquid discharge head and producing method therefor
JP2008055871A (ja) 圧電体素子
US7789496B2 (en) Piezoelectric inkjet printhead and method of manufacturing the same
JPH11227190A (ja) インクジェット式記録ヘッドおよびそれらの製造方法
JP2008205048A (ja) 圧電素子の製造方法及び液体噴射ヘッドの製造方法
JP3666506B2 (ja) インクジェット記録装置の製造方法
JP4435112B2 (ja) 液体吐出ヘッドの製造方法
JP7559016B2 (ja) 基板接合体の製造方法、液体吐出基板の製造方法、基板接合体、及び液体吐出基板
US7955509B2 (en) Manufacturing method of liquid discharge head and orifice plate
JP2008087371A (ja) 液体吐出ヘッドの製造方法および液体吐出ヘッド
JP2004237676A (ja) インクジェットヘッド
JP5733510B2 (ja) 液体噴射ヘッド、液体噴射装置、及び圧電素子、並びに液体噴射ヘッドの製造方法
JP2008094029A (ja) 液滴吐出ヘッドとその製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100824

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100824

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120308

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120321

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120518

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120605

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120705

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150713

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150713

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees