JP5032747B2 - Semiconductor device - Google Patents

Semiconductor device Download PDF

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JP5032747B2
JP5032747B2 JP2005036483A JP2005036483A JP5032747B2 JP 5032747 B2 JP5032747 B2 JP 5032747B2 JP 2005036483 A JP2005036483 A JP 2005036483A JP 2005036483 A JP2005036483 A JP 2005036483A JP 5032747 B2 JP5032747 B2 JP 5032747B2
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semiconductor device
light emitting
package member
emitting element
lead electrode
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JP2006222382A (en
JP2006222382A5 (en
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英夫 朝川
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Nichia Corp
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Nichia Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

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Description

本発明は、半導体装置に関するものである。   The present invention relates to a semiconductor device.

今日、高輝度、高出力な発光素子や、小型且つ好感度な半導体装置が開発され種々の分野に利用されている。このような半導体装置は、小型、低消費電力や軽量等の特徴を生かして、例えば、光プリンターヘッド光源、液晶バックライト光源、各種メータの光源、及び各種読みとりセンサー等に利用されている。   Today, light emitting elements with high luminance and high output and small and favorable semiconductor devices have been developed and used in various fields. Such a semiconductor device is used for, for example, an optical printer head light source, a liquid crystal backlight light source, various meter light sources, various reading sensors, and the like by taking advantage of features such as small size, low power consumption, and light weight.

半導体装置(以下、LEDとも呼ぶ)は、小型で効率が良く鮮やかな色の発光が可能である。また、発光素子であるため球切れがなく、初期駆動特性及び耐震性に優れ、さらにON/OFF点灯の繰り返しに強いという特徴を有する。携帯電話用液晶バックライト光源やPDA用液晶バックライト光源は薄型化が進み、薄型化に伴う問題点が発生してきている。 A semiconductor device (hereinafter also referred to as an LED) is small, efficient, and capable of emitting bright colors. In addition, since it is a light emitting element, it has the characteristics that it has no ball breakage, excellent initial drive characteristics and earthquake resistance, and is strong against repeated ON / OFF lighting. The liquid crystal backlight light source for mobile phones and the liquid crystal backlight light source for PDA are becoming thinner, and problems associated with the reduction in thickness are occurring.

特開2003−57622号公報JP 2003-57622 A

パッケージ部材は樹脂からなり、リード電極は金属からなるため密着性・接着性が悪い。そのためパッケージ部材とリード電極からなる界面は隙間が出来る場合がある。その隙間からモールド部材が漏れ出す結果となる。パッケージ部材に被覆される第二の部位の距離が短ければ、パッケージ部材の外壁面から突出される第三の部位へのモールド部材の漏れ出す確率が高くなる。漏れ出したモールド部材はカット・フォーミング時のバリの発生、パッケージ部材の外壁面から突出される第三の部位へ付着によりはんだの実装性不良等の種々の問題を発生させる原因になる。 Since the package member is made of resin and the lead electrode is made of metal, adhesion and adhesion are poor. Therefore, there may be a gap at the interface formed by the package member and the lead electrode . As a result, the mold member leaks from the gap. If the distance of the 2nd site | part covered with a package member is short, the probability that the mold member will leak to the 3rd site | part projected from the outer wall surface of a package member will become high. The leaked mold member causes various problems such as generation of burrs at the time of cutting and forming and adhesion to a third portion protruding from the outer wall surface of the package member, such as poor solder mountability.

半導体装置の中でも、発光面が実装面に垂直であるタイプ(以下、サイドビュータイプとも言う)は薄型が求められ、パッケージ部材に被覆される第二の部位の距離が短くなる傾向にあり、上記問題が起こりやすい。中でも発光素子が複数有するようなタイプの場合、リード電極の数も増加するためパッケージ部材に被覆される第二の部位の距離を大きく取る自由度が少なくなる。 Among the semiconductor devices, the type in which the light emitting surface is perpendicular to the mounting surface (hereinafter also referred to as a side view type) is required to be thin, and the distance of the second part covered by the package member tends to be short. Problems are likely to occur. In particular, in the case of a type having a plurality of light emitting elements, the number of lead electrodes also increases, so the degree of freedom for increasing the distance of the second part covered by the package member is reduced.

さらにモールド部材に発光素子からの光を波長変換する蛍光物質が含有されている場合はモールド部材と共に蛍光物質も漏れ出すことになり、目的の色度からズレルことになる。   Further, when the mold member contains a fluorescent material that converts the wavelength of light from the light emitting element, the fluorescent material also leaks together with the mold member, resulting in a shift from the target chromaticity.

そこで本発明は、パッケージ部材からモールド部材が漏れ出すことを防止できる半導体装置を提供することを目的とする。 Therefore, an object of the present invention is to provide a semiconductor device that can prevent a mold member from leaking from a package member .

上記目的を達成するために、本発明の請求項1に係る半導体装置は、発光素子と、該発光素子が配される凹部を有し、その発光素子と電気的に接続されるアウターリード電極が挿入された樹脂からなるパッケージ部材と、前記凹部内にて前記発光素子を被覆するモールド樹脂とを有する半導体装置において、前記アウターリード電極は、その延伸方向に、前記凹部内にて一部が露出される第一の部位と、前記パッケージ部材に被覆される第二の部位と、前記パッケージ部材の外壁面から突出される第三の部位とを順に有し、前記アウターリード電極の第二の部位は、そのアウターリード電極と前記パッケージ部材との界面から前記パッケージ部材の外壁面方向へ漏出するモールド部材の障壁となる溝部をし、前記モールド部材が溝部に蓄えられてなることを特徴とする。この構成によって、パッケージ部材とアウターリード電極界面から漏れ出したモールド部材がアウターリード電極の延伸方向に対して垂直な少なくとも1以上の溝部によって堰き止められパッケージ外部に漏れ出すことを防止することが可能となる。
In order to achieve the above object, a semiconductor device according to claim 1 of the present invention includes a light emitting element and a recess in which the light emitting element is disposed, and an outer lead electrode electrically connected to the light emitting element. In a semiconductor device having a package member made of an inserted resin and a mold resin covering the light emitting element in the recess, the outer lead electrode is partially exposed in the extension in the extending direction. A second portion of the outer lead electrode, and a second portion covered by the package member, and a third portion protruding from the outer wall surface of the package member. It may have a groove portion serving as a barrier mold member leaking from the interface between the package member and the outer lead electrodes to the outer wall surface direction of the package member, wherein the mold member is stored in the groove It is characterized by comprising. This configuration, the mold member leaking from the package member and the outer lead electrode interface is prevented from leaking to the thus damming is outside of the package to at least one or more grooves perpendicular to the extending direction of the outer lead electrodes Is possible.

溝部とは、筋状の凹部をいう。また突起部とは、筋状の凸部をいう。   A groove part means a streak-like recessed part. Further, the protruding portion refers to a line-like convex portion.

また、本発明の半導体装置は、発光面が実装面に垂直であるタイプ、すなわちサイドビュータイプであることが好ましい。半導体装置は大別するとトップビュータイプとサイドビュータイプがあるが、両者を比較するとサイドビュータイプは本来薄型化のために開発されたものであり、更なる薄型化の要望があり、本発明の効果が大きい。すなわち、薄型化に伴い、パッケージ部材の凹部を形成する壁が薄くなり、モールド部材の漏出経路であるリード電極の第二の部位が短くなるため、本質的にサイドビュータイプの方がモールド部材の漏出の問題が顕著であることによる。 In addition, the semiconductor device of the present invention is preferably a type in which the light emitting surface is perpendicular to the mounting surface, that is, a side view type. Semiconductor devices can be broadly divided into a top view type and a side view type. However, comparing the two, the side view type was originally developed for thinning, and there is a demand for further thinning. Great effect. That is, as the thickness is reduced, the wall forming the recess of the package member becomes thinner and the second part of the lead electrode, which is the leakage path of the mold member, becomes shorter. This is due to the prominent leakage problem.

さらに、発光色が白色光である場合に関しては、発光色を白色化するには原則的に発光素子1つのみの構成では足りず、付加的構成が必要になる。構成が複雑であるほど、問題がクローズアップされ本発明の効果が大きい。   Further, in the case where the emission color is white light, in principle, the configuration of only one light emitting element is not sufficient to make the emission color white, and an additional configuration is required. The more complicated the configuration, the closer the problem and the greater the effect of the present invention.

さらにまた、前記モールド部材に発光素子からの光を波長変換する蛍光物質が含有されている。任意の発光色を得るため蛍光物質の量を調整して含有させているのに対して、モールド部材が漏れ出すと、モールド部材と共に蛍光物質も漏れ出すため色度ズレが生じるのであるが、本発明を用いることにより色度ズレの防止が可能になる。   Furthermore, the mold member contains a fluorescent material that converts the wavelength of light from the light emitting element. In order to obtain an arbitrary emission color, the amount of the fluorescent material is adjusted and contained, but when the mold member leaks, the fluorescent material also leaks together with the mold member. By using the invention, it is possible to prevent chromaticity deviation.

さらにまた、本発明の半導体装置は、モールド部材はシリコーン樹脂エポキシ樹脂であることが好ましいFurthermore, in the semiconductor device of the present invention , the mold member is preferably a silicone resin or an epoxy resin .

さらに、本発明の請求項4に係る半導体装置は、請求項1乃至3いずれか一項に記載の特徴に加えて、前記アウターリード電極はそれぞれ幅が異なり、該幅の大きいものにのみ溝部を有する。放熱性や発光素子の実装性の観点より、アウターリード電極の幅を異ならせる場合がある。アウターリード電極の幅が広くなるほど当然にパッケージ部材とアウターリード電極との界面に出来る隙間は大きくなり、モールド部材が漏れやすくなる。よって幅が広いアウターリード電極にのみ溝部を設けることにより、モールド部材の漏れ防止を実現可能となる。
Furthermore, in the semiconductor device according to a fourth aspect of the present invention, in addition to the feature according to any one of the first to third aspects, the outer lead electrodes have different widths, and the groove portion is formed only in the larger width. having. In some cases, the width of the outer lead electrode is varied from the viewpoint of heat dissipation and mountability of the light emitting element. Naturally, as the width of the outer lead electrode is increased, the gap formed at the interface between the package member and the outer lead electrode is increased, and the mold member is likely to leak. Therefore, by providing the groove only on the wide outer lead electrode, it is possible to prevent leakage of the mold member.

また、本発明の半導体装置の形成方法は、発光素子と、該発光素子が実装される凹部を有し、その発光素子と電気的に接続されるリード電極が挿入されたパッケージ部材と、前記凹部内にて前記発光素子を被覆するモールド部材とを有する半導体装置の形成方法において、金属平板に打ち抜き加工を施すリードフレームの一部に、溝部又は突起部を形成する第一の工程と、樹脂材料にて、少なくとも前記溝部あるいは突起部を被覆するように、前記リードフレームに凹部を有するパッケージ部材を成形する第二の工程と、前記凹部内に発光素子を配して、該発光素子と前記リードフレームとを電気的に接続させる第三の工程と、前記凹部にモールド材料を注入し、硬化させてモールド部材を形成する第四の工程とを有することを特徴とする。 Further, the method for forming a semiconductor device of the present invention includes a light emitting element, a package member having a recess in which the light emitting element is mounted, and a lead electrode electrically connected to the light emitting element, and the recess. In a method for forming a semiconductor device having a mold member for covering the light emitting element therein, a first step of forming a groove or a protrusion on a part of a lead frame for punching a metal flat plate, and a resin material A second step of forming a package member having a recess in the lead frame so as to cover at least the groove or protrusion, and a light emitting element is disposed in the recess, and the light emitting element and the lead The method includes a third step of electrically connecting the frame and a fourth step of injecting a mold material into the recess and curing it to form a mold member.

また、本発明の半導体装置は、発光色の異なる複数の発光素子であることが好ましい。発光色の異なる発光素子は必然的に動作電圧も異なるため、1チップの場合よりも余分にリード電極が必要になる。そうなるとパッケージ部材に被覆される第二の部位の距離を長くするような構成が難しくなり、本発明の効果がより期待できる。 The semiconductor device of the present invention is preferably a plurality of light emitting elements having different emission colors. Since light emitting elements having different emission colors necessarily have different operating voltages, an extra lead electrode is required as compared with the case of one chip. If it becomes so, the structure which lengthens the distance of the 2nd site | part coat | covered with a package member will become difficult, and the effect of this invention can be anticipated more.

さらに、本発明の半導体装置は、前記リード電極はそれぞれ幅が異なり、該幅の大きいものにのみ溝部又は突起部を有することが好ましい。放熱性や発光素子の実装性の観点より、リード電極の幅を異ならせる場合がある。リード電極の幅が広くなるほど当然にパッケージ部材とリード電極との界面に出来る隙間は大きくなり、モールド部材が漏れやすくなる。よって幅が広いリード電極にのみ溝部又は突起部を設けることにより、モールド部材の漏れ防止を実現可能となる。 Furthermore, the semiconductor device of the present invention, the lead electrodes have different respective widths, it is preferable to have a groove or protrusion only those larger the width. In some cases, the widths of the lead electrodes are made different from the viewpoint of heat dissipation and mountability of the light emitting element. Naturally, as the width of the lead electrode becomes wider, the gap formed at the interface between the package member and the lead electrode becomes larger, and the mold member is more likely to leak. Therefore, by providing the groove or protrusion only on the wide lead electrode, it is possible to prevent the mold member from leaking.

さらにまた、本発明の半導体装置は、パッケージ部材がポリアミド系合成高分子であることが好ましい。ポリアミド系合成高分子は成形性、耐久性等の観点からパッケージ部材として好適に用いられる一方、リード電極との接着性・密着性が好ましくないため、リード電極との界面に隙間が生じやすい。よって本発明を適用することにより大きな効果を期待できる。 Furthermore, in the semiconductor device of the present invention , the package member is preferably a polyamide-based synthetic polymer. Polyamide-based synthetic polymer moldability, while suitably used as a package member in view of durability, because unfavorable adhesion, adhesion between the lead electrodes, gaps are likely to occur at the interface between the lead electrode. Therefore, a great effect can be expected by applying the present invention.

本発明を実施するための最良の形態を、以下に図面を参照しながら説明する。ただし、以下に示す形態は、本発明の技術思想を具体化するための半導体装置を例示するものであって、本発明は半導体装置を以下に限定するものではない。また、各図面に示す部材の大きさや位置関係などは説明を明確にするために誇張しているところがある。   The best mode for carrying out the present invention will be described below with reference to the drawings. However, the modes shown below exemplify a semiconductor device for embodying the technical idea of the present invention, and the present invention does not limit the semiconductor device to the following. Further, the size and positional relationship of the members shown in the drawings are exaggerated for clarity of explanation.

以下、図面を参照しながら本発明に係る実施の形態について説明する。   Embodiments according to the present invention will be described below with reference to the drawings.

図1は、表面実装型(SMD型)半導体装置の概略図を示す。(a)は本発明と従来技術共通の正面図、(b)は本発明に係る断面図、(c)は(b)のリード電極のみを抜き出した図、(d)は本発明の他の実施形態に係る断面図、(e)は(d)のリード電極のみを抜き出した図、(f)は従来技術に係る断面図、(g)は(f)のリード電極のみを抜き出した図である。 FIG. 1 is a schematic view of a surface mount type (SMD type) semiconductor device . (A) is a front view common to the present invention and the prior art, (b) is a sectional view according to the present invention, (c) is a view of only the lead electrode of (b), and (d) is another view of the present invention. Sectional drawing which concerns on embodiment, (e) is the figure which extracted only the lead electrode of (d), (f) is sectional drawing which concerns on a prior art, (g) is the figure which extracted only the lead electrode of (f). is there.

本発明の特徴部分はパッケージ部材に覆われるため、パッケージ部材が不透明な材料である場合は外見上、従来技術と同一である。   Since the characteristic part of the present invention is covered with the package member, when the package member is made of an opaque material, it is apparently the same as the prior art.

半導体装置は少なくとも以下の構成を必要とする。少なくとも1つの発光素子、パッケージ部材、複数のリード電極、モールド部材である。場合によっては、蛍光物質やインナーリード電極が必要になる。 The semiconductor device requires at least the following configuration. At least one light emitting element, a package member, a plurality of lead electrodes , and a mold member. In some cases, a fluorescent material or an inner lead electrode is required.

以下に構成部材を簡単に説明する。   The constituent members will be briefly described below.

リード電極
リード電極1は、パッケージ部材の凹部内にて一部が露出されている第一の部位1'、パッケージ部材に被覆される第二の部位1''、パッケージ部材の外壁面から突出される第三の部位1'''の3部より構成されている。
( Lead electrode )
The lead electrode 1 includes a first part 1 ′ partially exposed in the recess of the package member, a second part 1 ″ covered by the package member, and a first part protruding from the outer wall surface of the package member. It consists of three parts of three parts 1 ′ ″.

パッケージ部材の凹部内にて一部が露出されている第一の部位とは、パッケージ部材が形成する凹部内に位置するリード電極部を言う。 The first part partially exposed in the recess of the package member refers to a lead electrode portion located in the recess formed by the package member.

パッケージ部材に被覆される第二の部位とは、パッケージ部材に覆われているリード電極部を言う。 The 2nd site | part coat | covered with a package member means the lead electrode part covered with the package member.

パッケージ部材の外壁面から突出される第三の部位とは、パッケージ部材に覆われていないリード電極部を言う。 The third portion protruding from the outer wall surface of the package member refers to a lead electrode portion that is not covered by the package member.

パッケージ部材に被覆される第二の部位には本発明の特徴部分である溝部や突起部が形成されている。溝部及び突起部の形成方向は図1(b)、(c)、(d)、(e)からも分かるようにリード電極の延伸方向に対して垂直方向に伸びている。 Grooves and protrusions, which are characteristic portions of the present invention, are formed in the second portion covered by the package member. The direction of forming the groove and the protrusion extends in the direction perpendicular to the extending direction of the lead electrode as can be seen from FIGS. 1B, 1C, 1D, and 1E.

溝部を設ける場合は、凹部からリード電極とパッケージ部材の界面から漏れ出したモールド部材を溝部に蓄えることが出来るために、パッケージ部材の外部にモールド部材が漏れ出すことを防止することが出来る。 When the groove is provided, the mold member leaking from the interface between the lead electrode and the package member from the recess can be stored in the groove, so that the mold member can be prevented from leaking outside the package member.

突起部を設ける場合は、凹部からリード電極とパッケージ部材の界面から漏れ出したモールド部材を突起部で堰き止めることが出来るために、パッケージ部材の外部にモールド部材が漏れ出すことを防止することが出来る。 When the protrusion is provided, the mold member leaking from the interface between the lead electrode and the package member from the recess can be blocked by the protrusion, so that the mold member can be prevented from leaking outside the package member. I can do it.

更にどちらの構造を採用してもリード電極とパッケージ部材の接着面積が増加するため、接着強度が向上し、界面の隙間が減少する。界面の隙間が減少するとモールド部材の漏れ出しが起こりにくくなる。 Further, regardless of which structure is adopted, the bonding area between the lead electrode and the package member increases, so that the bonding strength is improved and the gap at the interface is reduced. When the gap at the interface is reduced, the mold member is less likely to leak out.

これらの相乗効果でモールド部材の漏れ出しと言う問題を解決している。   These synergistic effects solve the problem of mold member leakage.

溝部や突起部の形成方法は打ち抜き加工(プレス加工)やエッチングにより形成される。   The method of forming the groove and the protrusion is formed by punching (pressing) or etching.

リード電極の材質としては、導電性を有するものであればよく、金属一般が使用可能であるが、導電性・放熱性・機械的強度・光の反射等の観点よりCuをベースとした合金で、表面をAgで処理したものが好適である。 The material of the lead electrode may be any material as long as it has conductivity, and any metal can be used, but it is an alloy based on Cu from the viewpoint of conductivity, heat dissipation, mechanical strength, light reflection, etc. A surface treated with Ag is preferred.

(パッケージ部材)
射出成形で構成されるため、射出成形に使用される全ての樹脂が使用可能であるが、耐熱性・成形性等の観点より好適にはポリアミド系合成高分子が用いられる。パッケージ部材は発光素子を実装する凹部を形成する。
凹部とは、発光素子が実装され、且つ、モールド部材が封止される凹部形状の部位を言う。
(Package material)
Since it is constituted by injection molding, all resins used for injection molding can be used, but a polyamide-based synthetic polymer is preferably used from the viewpoint of heat resistance and moldability. The package member forms a recess for mounting the light emitting element.
The concave portion refers to a concave portion where the light emitting element is mounted and the mold member is sealed.

(モールド部材)
モールド部材に必要な性質は透光性であることである。光の取り出し効率を上げるためには発光素子よりも屈折率が小さい材料が好ましい。半導体装置からの発光が単一色でなく、混合色を発光させる場合は、混色性を高めるため光拡散剤を混入させる場合もある。光拡散剤はモールド部材と屈折率差を有して、かつ透光性であることが必要である。光拡散部材の素材としては、特に限定されないが、チタン酸バリウム、硫酸バリウム、酸化チタン、酸化アルミニウム、酸化珪素、軽質炭酸カルシウム、重質炭酸カルシウム等、種々のものを用いることができる。モールド部材の素材としては、エポキシ樹脂、アクリル樹脂、ウレタン樹脂、ジフリルフタレート樹脂、シリコーン樹脂、低融点ガラス等が好適に用いられる。
(Mold member)
The property required for the mold member is to be translucent. In order to increase the light extraction efficiency, a material having a refractive index smaller than that of the light emitting element is preferable. When light emitted from the semiconductor device emits a mixed color instead of a single color, a light diffusing agent may be mixed to improve color mixing. The light diffusing agent needs to have a refractive index difference from the mold member and be translucent. The material of the light diffusing member is not particularly limited, and various materials such as barium titanate, barium sulfate, titanium oxide, aluminum oxide, silicon oxide, light calcium carbonate, and heavy calcium carbonate can be used. As a material of the mold member, an epoxy resin, an acrylic resin, a urethane resin, a difuryl phthalate resin, a silicone resin, a low melting point glass, or the like is preferably used.

(発光素子)
発光素子は、MOCVD法などにより基板上にGaAs、InP、GaAlAs、AlInGaP、InN、AlN、GaN、InGaN、AlInGaN等の半導体を発光層として形成させる。半導体の構造としては、MIS接合、PIN接合やPN接合などを有するホモ構造、ヘテロ構造あるいはダブルへテロ構造のものが挙げられる。半導体層の材料やその結晶度によって発光波長を種々選択することができる。
(Light emitting element)
In the light emitting element, a semiconductor such as GaAs, InP, GaAlAs, AlInGaP, InN, AlN, GaN, InGaN, or AlInGaN is formed as a light emitting layer on a substrate by MOCVD or the like. Examples of the semiconductor structure include a homostructure having a MIS junction, a PIN junction, and a PN junction, a heterostructure, and a double heterostructure. Various emission wavelengths can be selected depending on the material of the semiconductor layer and its crystallinity.

窒化ガリウム系化合物半導体を使用した場合、半導体基板にはサファイア、スピネル、SiC、Si、ZnO、GaN等の材料が好適に用いられる。窒化ガリウム系化合物半導体は、不純物をドープしない状態ではn型導電性を示す。よりn型化させるためには、Si、Ge、Se、Te、C等のn型ドーパントを適宜導入する。一方、p型窒化ガリウム半導体を形成する場合は、p型ドーパントであるZn、Mg、Be、Ca、Sr、Ba等をドープさせる。   When a gallium nitride compound semiconductor is used, a material such as sapphire, spinel, SiC, Si, ZnO, or GaN is preferably used for the semiconductor substrate. The gallium nitride compound semiconductor exhibits n-type conductivity when not doped with impurities. In order to make it more n-type, n-type dopants such as Si, Ge, Se, Te, and C are appropriately introduced. On the other hand, when a p-type gallium nitride semiconductor is formed, a p-type dopant such as Zn, Mg, Be, Ca, Sr, Ba, or the like is doped.

窒化ガリウム系化合物半導体は、p型ドーパントをドープしただけではp型化しにくいため、アニール処理することでよりP型化する。   Since a gallium nitride compound semiconductor is difficult to become p-type only by doping with a p-type dopant, it is made more p-type by annealing.

サファイア基板等の絶縁性基板を使用した場合は、エッチング処理等により同一面側にn型、p型の異なる極性の層を露出され、電極を形成する。SiC基板のような導電性基板を使用する場合は基板側と窒化ガリウム層成長面側にそれぞれ電極を形成することが可能である。   When an insulating substrate such as a sapphire substrate is used, n-type and p-type layers with different polarities are exposed on the same surface side by an etching process or the like to form electrodes. When a conductive substrate such as a SiC substrate is used, electrodes can be formed on the substrate side and the gallium nitride layer growth surface side, respectively.

上記のようにして得られた半導体ウエハを機械的にチップ化することにより、発光素子が得られる。   A light emitting element can be obtained by mechanically chipping the semiconductor wafer obtained as described above.

(インナーリード電極)
発光素子をリード電極に電気的に接続するために、インナーリード電極としてワイヤーボンド電極を用いる。ワイヤーの径はφ25μm〜35μmが好ましい。材質としては、Au、Cu、Pt、Au等が好適に用いられる。
(Inner lead electrode)
In order to electrically connect the light emitting element to the lead electrode, a wire bond electrode is used as the inner lead electrode. The diameter of the wire is preferably 25 μm to 35 μm. As a material, Au, Cu, Pt, Au or the like is preferably used.

(蛍光物質)
蛍光物質は発光素子からの光をより長波長に変換させるものが発光効率として良い。発光素子と蛍光物質により波長変換された混色光は白色であることが好ましい。
(Fluorescent substance)
A fluorescent material that converts light from the light emitting element into a longer wavelength is good in luminous efficiency. The mixed color light whose wavelength is converted by the light emitting element and the fluorescent material is preferably white.

上記蛍光物質の粒径は、中心粒径が6μm〜50μmの範囲が好ましく、より好ましくは15μm〜30μmであり、このような粒径を有する蛍光物質は光の吸収率及び変換効率が高く、且つ、励起波長幅が広い。6μmより小さい蛍光物質は、比較的凝集体を形成しやすく、液状樹脂中において密になって沈降されるため、光の透過率を減少させてしまう他、光の吸収率を及び変換効率が悪く励起波長の幅も狭い。   The fluorescent material preferably has a center particle size in the range of 6 μm to 50 μm, more preferably 15 μm to 30 μm, and the fluorescent material having such a particle size has high light absorption and conversion efficiency, and Wide excitation wavelength range. Fluorescent materials smaller than 6 μm are relatively easy to form aggregates and are densely settled in the liquid resin, reducing the light transmittance and reducing the light absorptivity and conversion efficiency. The excitation wavelength is also narrow.

(イットリウム・アルミニウム酸化物系蛍光物質)
本実施の形態で用いられる蛍光物質は、窒化物系半導体を発光層とする発光素子から発光された光により励起されて発光し、セリウム(Ce)あるいはプラセオジウム(Pr)で付活されたイットリウム・アルミニウム酸化物系蛍光物質をベースとした蛍光体(YAG系蛍光体)とすることができる。具体的なイットリウム・アルミニウム酸化物系蛍光物質としては、YAlO:Ce、YAl12:Ce(YAG:Ce)やYAl:Ce、更にはこれらの混合物等が挙げられる。イットリウム・アルミニウム酸化物系蛍光物質にBa、Sr、Mg、Ca、Znの少なくとも一種類が含有されていても良い。また、Siを含有させることによって、結晶の成長の反応を抑制し蛍光物質の粒子を揃えることができる。更に詳しくは、一般式(YGd1−zAl12:Ce(但し、0<Z≦1)で示されるフォトルミネッセンス蛍光体や一般式(Re1−aSmRe'12:Ce(但し、0≦a<1、0≦b≦1、Reは、Y、Gd、La、Scから選択される少なくとも一種類、Re'は、Al、Ga、Inから選択される少なくとも一種類である。)で示されるフォトルミネッセンス蛍光体である。また所望に応じてCeに加えTb,Cu、Ag,Au,Fe,Cr,Nd、Dy,Co,Ni,Ti,Euらを含有させることもできる。
(Yttrium / aluminum oxide phosphor)
The fluorescent material used in this embodiment is excited by light emitted from a light emitting element having a nitride semiconductor as a light emitting layer, emits light, and is activated by cerium (Ce) or praseodymium (Pr). A phosphor based on an aluminum oxide phosphor (YAG phosphor) can be obtained. Specific examples of the yttrium / aluminum oxide fluorescent material include YAlO 3 : Ce, Y 3 Al 5 O 12 : Ce (YAG: Ce), Y 4 Al 2 O 9 : Ce, and mixtures thereof. It is done. The yttrium / aluminum oxide fluorescent material may contain at least one of Ba, Sr, Mg, Ca, and Zn. Further, by containing Si, the crystal growth reaction can be suppressed and the fluorescent substance particles can be aligned. More specifically, the general formula (Y z Gd 1-z) 3 Al 5 O 12: Ce ( where, 0 <Z ≦ 1) photoluminescence phosphor and the general formula represented by (Re 1-a Sm a) 3 Re ' 5 O 12 : Ce (where 0 ≦ a <1, 0 ≦ b ≦ 1, Re is at least one selected from Y, Gd, La, and Sc, and Re ′ is selected from Al, Ga, and In At least one kind of photoluminescent phosphor. Further, in addition to Ce, Tb, Cu, Ag, Au, Fe, Cr, Nd, Dy, Co, Ni, Ti, Eu and the like can be contained as desired.

本発明におけるパッケージ部材において、このようなフォトルミネッセンス蛍光体は、2種類以上のセリウムで付活されたイットリウム・アルミニウム・ガーネット系蛍光体や他の蛍光物質を混合させてもよい。YからGdへの置換量が異なる2種類のイットリウム・アルミニウム・ガーネット系蛍光体を混合することにより、容易に所望とする色調の光を容易に実現することができる。 In the package member of the present invention, such a photoluminescent phosphor may be a mixture of yttrium / aluminum / garnet phosphors activated with two or more kinds of cerium and other phosphors. By mixing two types of yttrium / aluminum / garnet phosphors with different amounts of substitution from Y to Gd, light having a desired color tone can be easily realized.

(実施例1)
本発明の実施例1における半導体装置の外形寸法は、x方向:4.7mm、y方向:1.2mm、z方向1.5mmのサイズであり、形状としては図1に図示するサイドビュータイプのものである。実装されている発光素子は3つで発光色もそれぞれ異なり、光の3原色であるBlue、Red、Greenを使用した。BlueとGreenに関しては窒化ガリウム系化合物半導体を用い、Redに関してはAlInGaP系化合物半導体を用いた。明るさはBlueが200mcd、Greenが900mcd、Redが290mcdとして全てを同時点としたときに白色光になるように調整した。
Example 1
The external dimensions of the semiconductor device in Example 1 of the present invention are the x-direction: 4.7 mm, the y-direction: 1.2 mm, and the z-direction 1.5 mm, and the shape is the side view type shown in FIG. Is. Three light emitting elements are mounted, and the light emission colors are different from each other. Blue, Red, and Green, which are the three primary colors of light, are used. Gallium nitride compound semiconductors were used for Blue and Green, and AlInGaP compound semiconductors were used for Red. The brightness was adjusted to be white light when Blue was set to 200 mcd, Green was set to 900 mcd, and Red was set to 290 mcd.

リード電極には、Cu合金で表面をAgで処理したものを使用し、厚さ0.125mmに対して0.025mmの溝を形成した。 As the lead electrode , a Cu alloy whose surface was treated with Ag was used, and a groove having a thickness of 0.025 mm was formed with respect to a thickness of 0.125 mm.

パッケージ部材としてはポリアミド系合成高分子を用い、モールド部材としてはシリコーン樹脂を用い、インナーリード電極のワイヤーボンド電極材としてはAuを使用した。上記構成によって得られた半導体装置はモールド部材がパッケージ部材の外部に漏れ出すことがなかった。 A polyamide-based synthetic polymer was used as the package member, a silicone resin was used as the mold member , and Au was used as the wire bond electrode material of the inner lead electrode. In the semiconductor device obtained by the above configuration, the mold member did not leak out of the package member.

(実施例2)
図1に図示する発光素子を全てBlueの窒化ガリウム系化合物半導体を用い、蛍光物質としてYAGを用い混色光として白色を得た。リード電極には0.025mmの突起部を形成する以外は全て実施例1と同様の構成にした。上記構成によって得られた半導体装置はモールド部材がパッケージ部材の外部に漏れ出すことがなかった
(Example 2)
All the light-emitting elements shown in FIG. 1 are made of blue gallium nitride compound semiconductor, YAG is used as a fluorescent material, and white is obtained as mixed color light. Except for forming a 0.025 mm protrusion on the lead electrode , the structure was the same as in Example 1. In the semiconductor device obtained by the above configuration, the mold member did not leak out of the package member .

本発明は、薄型・軽量化の要請が著しい液晶用バックライトに利用することができる。   INDUSTRIAL APPLICABILITY The present invention can be used for a liquid crystal backlight that is remarkably required to be thin and light.

図1(a)は本発明及び従来技術に係る実施形態の半導体装置の正面図である。図1(b)は本発明に係る実施形態の半導体装置のA−A線断面図である。図1(c)は図1(b)のリード電極のみ抜き出した図である。図1(d)は本発明に係る他の実施形態における半導体装置のA−A線断面図である。図1(e)は図1(d)のリード電極のみ抜き出した図である。図1(f)は従来技術に係る実施形態の半導体装置のA−A線断面図である。図1(g)は図1(f)のリード電極のみ抜き出した図である。FIG. 1A is a front view of a semiconductor device according to an embodiment of the present invention and the related art. FIG. 1B is a cross-sectional view taken along line AA of the semiconductor device according to the embodiment of the present invention. FIG. 1C shows only the lead electrode shown in FIG. FIG. 1D is a cross-sectional view taken along line AA of the semiconductor device according to another embodiment of the present invention. FIG. 1E shows only the lead electrode shown in FIG. FIG. 1F is a cross-sectional view taken along line AA of the semiconductor device according to the embodiment of the prior art. FIG. 1G shows only the lead electrode shown in FIG. 本発明及び従来技術に係る実施形態の半導体装置の斜視図である。It is a perspective view of a semiconductor device of an embodiment concerning the present invention and a prior art. 本発明及び従来技術に係る実施形態の半導体装置の図2とは異なる角度からの斜視図である。FIG. 3 is a perspective view of the semiconductor device according to the embodiment of the present invention and the prior art from an angle different from that in FIG. 2.

符号の説明Explanation of symbols

1・・・リード電極
1'・・・凹部内にて一部が露出されている第一の部位
1''・・・パッケージ部材に被覆される第二の部位
1'''・・・パッケージ部材の外壁面から突出される第三の部位
3・・・発光素子
5・・・凹部
7・・・パッケージ部材
9・・・モールド部材
11・・・溝部
13・・・突起部
17・・・インナーリード電極
100・・・半導体装置
DESCRIPTION OF SYMBOLS 1 ... Lead electrode 1 '... 1st site | part 1''partially exposed in a recessed part ... 2nd site | part 1''' ... package covered with a package member 3rd part 3 projected from the outer wall surface of a member ... Light emitting element 5 ... Recessed part 7 ... Package member 9 ... Mold member 11 ... Groove part 13 ... Projection part 17 ... Inner lead electrode 100... Semiconductor device

Claims (8)

発光素子と、該発光素子が配される凹部を有し、その発光素子と電気的に接続されるアウターリード電極が挿入された樹脂からなるパッケージ部材と、前記凹部内にて前記発光素子を被覆するモールド樹脂とを有する半導体装置において、
前記アウターリード電極は、その延伸方向に、前記凹部内にて一部が露出される第一の部位と、前記パッケージ部材に被覆される第二の部位と、前記パッケージ部材の外壁面から突出される第三の部位とを順に有し、
前記アウターリード電極の第二の部位は、そのアウターリード電極と前記パッケージ部材との界面から前記パッケージ部材の外壁面方向へ漏出するモールド部材の障壁となる溝部をし、前記モールド部材が溝部に蓄えられてなることを特徴とする半導体装置。
A light emitting element, a package member made of a resin having a recess in which the light emitting element is arranged, and an outer lead electrode electrically connected to the light emitting element, and the light emitting element covered in the recess In a semiconductor device having a mold resin to be
The outer lead electrode protrudes from the outer wall surface of the package member, a first portion that is partially exposed in the recess, a second portion that is covered by the package member, and an outer wall surface of the package member. A third part in order,
Second part of the outer lead electrodes may have a groove portion serving as a barrier mold member leaking from the interface between the package member and the outer lead electrodes to the outer wall surface direction of the package member, the mold member groove A semiconductor device that is stored in a semiconductor device.
前記半導体装置は、発光面が実装面に垂直であるタイプである請求項1記載の半導体装置。 The semiconductor device according to claim 1, wherein the semiconductor device is a type in which a light emitting surface is perpendicular to a mounting surface. 前記発光素子が発光色の異なる複数の発光素子である請求項1又は2記載の半導体装置。 The semiconductor device according to claim 1, wherein the light emitting elements are a plurality of light emitting elements having different emission colors. 前記アウターリード電極はそれぞれ幅が異なり、該幅の大きいものにのみ溝部を有する請求項1乃至3記載の半導体装置。 The outer lead electrodes are different each width, the semiconductor device of claims 1 to 3, wherein a groove portion only in larger of said width. 前記パッケージ部材がポリアミド系合成高分子である請求項1乃至4いずれか一項に記載の半導体装置。 The semiconductor device according to claim 1, wherein the package member is a polyamide-based synthetic polymer. 前記アウターリード部材がCu合金であり、表面がAgメッキされてなる請求項1乃至5いずれか一項に記載の半導体装置。 The semiconductor device according to claim 1, wherein the outer lead member is a Cu alloy and the surface thereof is Ag-plated. 前記モールド部材はシリコーンである請求項1乃至6いずれか一項に記載の半導体装置。 The semiconductor device according to claim 1, wherein the mold member is silicone. 前記発光素子が同一面側からインナーリード電極であるワイヤーボンド電極を有した場合、ワイヤーの高さがp電極側とn電極側が異なる請求項1乃至7いずれか一項に記載の半導体装置。 The semiconductor device according to claim 1, wherein when the light emitting element has a wire bond electrode that is an inner lead electrode from the same surface side, the height of the wire is different between the p electrode side and the n electrode side.
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