JP5025444B2 - 三次元形状測定装置 - Google Patents

三次元形状測定装置 Download PDF

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Publication number
JP5025444B2
JP5025444B2 JP2007320466A JP2007320466A JP5025444B2 JP 5025444 B2 JP5025444 B2 JP 5025444B2 JP 2007320466 A JP2007320466 A JP 2007320466A JP 2007320466 A JP2007320466 A JP 2007320466A JP 5025444 B2 JP5025444 B2 JP 5025444B2
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Japan
Prior art keywords
probe
axis
laser
measured
mirror
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Expired - Fee Related
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JP2007320466A
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English (en)
Japanese (ja)
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JP2009145095A5 (enrdf_load_stackoverflow
JP2009145095A (ja
Inventor
光太郎 保坂
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Canon Inc
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Canon Inc
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Priority to JP2007320466A priority Critical patent/JP5025444B2/ja
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Publication of JP2009145095A5 publication Critical patent/JP2009145095A5/ja
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2007320466A 2007-12-12 2007-12-12 三次元形状測定装置 Expired - Fee Related JP5025444B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007320466A JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007320466A JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

Publications (3)

Publication Number Publication Date
JP2009145095A JP2009145095A (ja) 2009-07-02
JP2009145095A5 JP2009145095A5 (enrdf_load_stackoverflow) 2010-05-27
JP5025444B2 true JP5025444B2 (ja) 2012-09-12

Family

ID=40915866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007320466A Expired - Fee Related JP5025444B2 (ja) 2007-12-12 2007-12-12 三次元形状測定装置

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JP (1) JP5025444B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012237686A (ja) * 2011-05-12 2012-12-06 Canon Inc 測定装置
JP2013213802A (ja) * 2012-03-09 2013-10-17 Canon Inc 計測装置
JP6185701B2 (ja) * 2012-10-15 2017-08-23 株式会社ミツトヨ 形状測定装置
JP2016099221A (ja) * 2014-11-21 2016-05-30 株式会社小野測器 プローブ装置、レーザ計測装置及びレーザ計測システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347606A (ja) * 1986-08-13 1988-02-29 Asahi Optical Co Ltd 非球面形状測定装置
JPH0746050B2 (ja) * 1987-09-17 1995-05-17 株式会社日立製作所 三次元計測装置
JP4663378B2 (ja) * 2005-04-01 2011-04-06 パナソニック株式会社 形状測定装置及び方法
JP4500736B2 (ja) * 2005-06-10 2010-07-14 キヤノン株式会社 形状測定装置
JP2006349547A (ja) * 2005-06-17 2006-12-28 Kanto Auto Works Ltd 非接触式三次元形状計測方法及び計測機

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JP2009145095A (ja) 2009-07-02

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