JP5025334B2 - マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 - Google Patents
マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 Download PDFInfo
- Publication number
- JP5025334B2 JP5025334B2 JP2007140080A JP2007140080A JP5025334B2 JP 5025334 B2 JP5025334 B2 JP 5025334B2 JP 2007140080 A JP2007140080 A JP 2007140080A JP 2007140080 A JP2007140080 A JP 2007140080A JP 5025334 B2 JP5025334 B2 JP 5025334B2
- Authority
- JP
- Japan
- Prior art keywords
- target
- magnet
- sputtering
- peripheral
- central magnet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004544 sputter deposition Methods 0.000 title claims description 52
- 238000001755 magnetron sputter deposition Methods 0.000 title claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 42
- 239000000758 substrate Substances 0.000 claims description 34
- 230000004907 flux Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 13
- 239000010409 thin film Substances 0.000 description 11
- 230000003628 erosive effect Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 238000005478 sputtering type Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Physical Vapour Deposition (AREA)
Description
(比較例1)
41 ターゲット
5 磁石組立体
52 中心磁石
53 周辺磁石
54a、54b 補助磁石
C マグネトロンスパッタ電極
R 侵食領域
S 処理基板
Claims (4)
- 処理基板に対向して設けたターゲットの後方に、このターゲットの前方にトンネル状の磁束を形成すべく、線状に配置した中央磁石とこの中央磁石の周囲を囲うように設けた周辺磁石とから構成される磁石組立体を備えたマグネトロンスパッタ電極において、
前記中央磁石の延長線上のみに位置させて中央磁石と周辺磁石との間に、中央磁石及び周辺磁石を含むターゲット側の極性を交互にかえて少なくとも一対の補助磁石を設けたことを特徴とするマグネトロンスパッタ電極。 - 前記補助磁石は、その形状が周辺磁石の折り返し部の形状と相似であり、中央磁石から周辺磁石方向に向かうに従い大きな体積を有するものであることを特徴とする請求項1記載のマグネトロンスパッタ電極。
- 前記磁石組立体を、ターゲットの裏面に沿って平行に往復動させる駆動手段を備えたことを特徴とする請求項1又は2記載のマグネトロンスパッタ電極。
- 請求項1〜3のいずれか1項に記載のマグネトロンスパッタ電極を真空排気可能なスパッタ室内に配置し、スパッタ室内に所定のガスを導入するガス導入手段と、ターゲットへの電力投入を可能とするスパッタ電源とを設けたことを特徴とするスパッタリング装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007140080A JP5025334B2 (ja) | 2007-05-28 | 2007-05-28 | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007140080A JP5025334B2 (ja) | 2007-05-28 | 2007-05-28 | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008291337A JP2008291337A (ja) | 2008-12-04 |
JP5025334B2 true JP5025334B2 (ja) | 2012-09-12 |
Family
ID=40166371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007140080A Active JP5025334B2 (ja) | 2007-05-28 | 2007-05-28 | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5025334B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102420329B1 (ko) * | 2018-02-13 | 2022-07-14 | 한국알박(주) | 마그네트론 스퍼터링 장치의 자석 집합체 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0234780A (ja) * | 1988-07-25 | 1990-02-05 | Matsushita Electric Ind Co Ltd | マグネトロンスパッタ用磁気回路 |
JP3204527B2 (ja) * | 1992-03-09 | 2001-09-04 | 日本真空技術株式会社 | Ito薄膜形成用プレーナマグネトロンスパッタ装置 |
JPH05320897A (ja) * | 1992-05-20 | 1993-12-07 | Ulvac Japan Ltd | マグネトロンスパッタカソード |
JP3798039B2 (ja) * | 1994-11-12 | 2006-07-19 | キヤノンアネルバ株式会社 | スパッタ装置のマグネトロンカソード電極 |
-
2007
- 2007-05-28 JP JP2007140080A patent/JP5025334B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2008291337A (ja) | 2008-12-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4580781B2 (ja) | スパッタリング方法及びその装置 | |
KR101108894B1 (ko) | 스퍼터링용 타겟 및 이 타겟을 이용한 스퍼터링 방법 | |
JP4707693B2 (ja) | スパッタリング装置及びスパッタリング方法 | |
JP5322234B2 (ja) | スパッタリング方法及びスパッタリング装置 | |
TWI383061B (zh) | Magnetron sputtering electrode and sputtering device using magnetron sputtering electrode | |
TWI470102B (zh) | Magnetron sputtering electrode and sputtering device with magnetron sputtering electrode | |
JP5903217B2 (ja) | マグネトロンスパッタ電極及びスパッタリング装置 | |
WO2011024411A1 (ja) | マグネトロンスパッタ電極及びスパッタリング装置 | |
KR20170064527A (ko) | 마그네트론 스퍼터 전극용의 자석 유닛 및 스퍼터링 장치 | |
JP2009293089A (ja) | スパッタリング装置 | |
JP5049561B2 (ja) | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 | |
TWI393797B (zh) | Sputtering electrodes and sputtering devices with sputtering electrodes | |
JP5025334B2 (ja) | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 | |
JP5322235B2 (ja) | スパッタリング方法 | |
JP4959175B2 (ja) | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 | |
JP4713853B2 (ja) | マグネトロンカソード電極及びマグネトロンカソード電極を用いたスパッタリング方法 | |
JP2013001943A (ja) | スパッタリング装置 | |
JP5089962B2 (ja) | マグネトロンスパッタ電極及びマグネトロンスパッタ電極を備えたスパッタリング装置 | |
JPH11350130A (ja) | 薄膜形成装置 | |
JP2002256431A (ja) | マグネトロンスパッタ装置 | |
KR20070021919A (ko) | 스퍼터 전극 및 스퍼터 전극을 구비한 스퍼터링 장치 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100415 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110822 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110830 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111027 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120306 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120403 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120605 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120619 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150629 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5025334 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |