JP5012374B2 - X線検査装置 - Google Patents
X線検査装置 Download PDFInfo
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- JP5012374B2 JP5012374B2 JP2007253355A JP2007253355A JP5012374B2 JP 5012374 B2 JP5012374 B2 JP 5012374B2 JP 2007253355 A JP2007253355 A JP 2007253355A JP 2007253355 A JP2007253355 A JP 2007253355A JP 5012374 B2 JP5012374 B2 JP 5012374B2
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Claims (2)
- 試料にX線を照射し試料を透過したX線を検出して試料の検査を行うX線検査装置において、X線を放射するX線放射窓を有するX線管と、前記X線管と対向して配置されX線を検出するX線検出器と、前記X線管と前記X線検出器の間に配置されX線放射方向に移動可能であるとともにX線放射方向と交差する面内で移動可能な試料ステージとを備え、前記X線放射窓の周辺には前記試料ステージが前記X線放射窓に接触することを防ぐための保護部材を備えるとともに、前記保護部材の材質は少なくとも表面がフッ素樹脂であることを特徴とするX線検査装置。
- 前記保護部材は前記X線管の先端部であって前記X線放射窓の周囲に設けられているとともに、前記保護部材の先端は前記X線放射窓の先端より0.1〜0.5mmだけX線放射方向に突出していることを特徴とする請求項1に記載のX線検査装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007253355A JP5012374B2 (ja) | 2007-09-28 | 2007-09-28 | X線検査装置 |
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JP2007253355A JP5012374B2 (ja) | 2007-09-28 | 2007-09-28 | X線検査装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009085667A JP2009085667A (ja) | 2009-04-23 |
JP5012374B2 true JP5012374B2 (ja) | 2012-08-29 |
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ID=40659297
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JP2007253355A Expired - Fee Related JP5012374B2 (ja) | 2007-09-28 | 2007-09-28 | X線検査装置 |
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JP (1) | JP5012374B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9001811B2 (en) | 2009-05-19 | 2015-04-07 | Adc Telecommunications, Inc. | Method of inserting CDMA beacon pilots in output of distributed remote antenna nodes |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6100141B2 (ja) * | 2013-11-01 | 2017-03-22 | アンリツインフィビス株式会社 | X線検査装置 |
US10571412B2 (en) | 2014-08-07 | 2020-02-25 | Nikon Corporation | X-ray apparatus and structure production method |
WO2016021031A1 (ja) * | 2014-08-07 | 2016-02-11 | 株式会社ニコン | X線装置および構造物の製造方法 |
CN104237237B (zh) * | 2014-09-29 | 2016-08-24 | 中国科学院上海应用物理研究所 | 一种同步辐射x射线显微ct成像样品台 |
JP6473316B2 (ja) * | 2014-10-23 | 2019-02-20 | 浜松ホトニクス株式会社 | X線像撮像用ユニット及びx線顕微鏡 |
JP6794274B2 (ja) * | 2017-01-17 | 2020-12-02 | 東芝Itコントロールシステム株式会社 | X線検査装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03205037A (ja) * | 1989-10-30 | 1991-09-06 | Toshiba Corp | X線撮影装置 |
JP2004045331A (ja) * | 2002-07-15 | 2004-02-12 | Hitachi Kokusai Electric Inc | X線検査装置 |
JP5003235B2 (ja) * | 2007-03-26 | 2012-08-15 | 株式会社島津製作所 | X線発生装置 |
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2007
- 2007-09-28 JP JP2007253355A patent/JP5012374B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9001811B2 (en) | 2009-05-19 | 2015-04-07 | Adc Telecommunications, Inc. | Method of inserting CDMA beacon pilots in output of distributed remote antenna nodes |
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JP2009085667A (ja) | 2009-04-23 |
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