JP5006653B2 - Vibrator, vibration wave drive device, and method of manufacturing vibrator - Google Patents

Description

The present invention, mechanical weight electric quantity (voltage) electric converted to (vibration) - vibrator having a mechanical quantity conversion element, vibration Doha drive, and a method for manufacturing a vibrator.

  Conventionally, many techniques related to a vibrator or a vibration wave driving apparatus using the vibrator have been proposed. As a conventional vibration wave driving device, one shown in FIG. 9 has been proposed (for example, see Patent Document 1).

  FIG. 9 is a cross-sectional view showing an internal structure of a vibration wave driving device according to a conventional example (Patent Document 1).

  In FIG. 9, the vibration wave driving device includes a vibrator 900 and a moving body 901 and is connected to an external power source 902. The vibrator 900 and the moving body 901 are in contact with a state in which the vibrator 900 is pressed by the coil spring 910. The vibrator 900 includes five piezoelectric elements (electro-mechanical quantity conversion elements) 903, six conductive plates 909, a support body 905 that supports the vibrator, and a fixing member that fixes the vibration wave driving device to other components. 906. The external power supply 902 includes a ground electrode 902g that generates a ground potential, a sine wave electrode 902a that generates a sine wave potential, and a cosine wave electrode 902b that generates a cosine wave potential.

  In the vibrator 900, the piezoelectric elements 903 are each formed in an annular shape having a hollow structure. The conductive plates 909 are each formed in a disc shape. The piezoelectric elements 903 are sandwiched between conductive plates 909 and stacked in the axial direction. The support 905 is made of a conductive material and is disposed on the inner diameter side of the hollow structure of the piezoelectric element 903. Three of the six conductive plates 909 are ground conductive plates 909g that become a ground potential when the vibration wave driving device is connected to the external power source 902.

  The three ground conductive plates 909g have a portion protruding from the piezoelectric element 903 on the inner diameter side, and these protruding portions are in contact with the conductive support 905. Thus, the three ground conductive plates 909g are electrically connected. One of the three ground conductive plates 909g has a portion protruding from the piezoelectric element 903 on the outer diameter side, and this protruded portion is electrically connected to the ground electrode 902g of the external power source 902, and three ground conductive The plate 909g is set to the ground potential.

As described above, in the conventional vibration wave driving device, the three ground conductive plates 909g are protruded from the piezoelectric element 903 to the inner diameter side, and the one ground conductive plate 909g is protruded from the piezoelectric element 903 to the outer diameter side. It has become.
Japanese Patent Laid-Open No. 05-207761

  However, the conventional vibrator or the vibration wave driving device using the vibrator has the following problems. Since the ground conductive plate 909g is configured to protrude from the outer diameter side of the piezoelectric element 903, there is a problem that the volume occupied by the vibrator increases. When the protruding portion on the outer diameter side of the ground conductive plate 909 is provided on the inner diameter side in order to reduce the volume occupied by the vibrator, the protruding portion is not exposed to the outside, so that the protruding portion and the external power source 902 There is a problem that electrical connection to the ground electrode 902g becomes difficult.

  In addition, the support 905 and the ground electrode 902g of the external power source 902 can be electrically connected through the support 905 in contact with the ground conductive plate 909g. However, the contact structure between the ground conductive plate 909g and the support 905 is a structure in which the ground conductive plate 909g protrudes from the inner diameter side of the piezoelectric element 903 and is in contact with the support 905. For this reason, the configuration of the inner peripheral portion of the vibrator is complicated, and there is a problem that a complicated manufacturing process is required when manufacturing the vibrator and the vibration wave driving device.

An object of the present invention is to provide enable and the vibrator to manufacture by simple manufacturing process with a achieve a simple configuration, vibration Doha drive, and a method for manufacturing a vibrator.

In order to achieve the above-described object, the vibrator of the present invention includes an electro-mechanical quantity conversion element that has a hollow structure and converts an electrical quantity into a mechanical quantity, and an interior of the hollow structure of the electro-mechanical quantity conversion element. And a support body that supports at least a part of the electro-mechanical quantity conversion element, and at least a region including the inner surface of the hollow structure of the electro-mechanical quantity conversion element and the surface of the support body , A conductive coating is formed so that the inner surface of the hollow structure and the surface of the support are electrically connected, and the conductive coating formed on the inner surface is used as an inner peripheral electrode. It is characterized by.

According to the present invention, the conductive structure is electrically connected so that the inner surface of the hollow structure and the surface of the support are electrically connected to a region including at least the inner surface of the hollow structure of the electromechanical conversion element and the surface of the support . coating is formed, since the inner circumferential electrode formed conductive coating on the inner surface, the electrical - able to perform electrical connection to the mechanical quantity conversion element and an external power supply with a simple structure and Become. Thereby, it is possible to provide a vibrator having a simple configuration and a vibration wave driving device using the vibrator. In addition, a simple manufacturing process when manufacturing the vibrator and the vibration wave driving device is possible.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a perspective view showing an appearance of a vibration wave driving device according to the first embodiment of the present invention. FIG. 2 is a perspective view showing an appearance of a vibrator of the vibration wave driving device of FIG. FIG. 3 is a cross-sectional view showing the internal structure of the vibrator of the vibration wave driving device of FIG.

  1 to 3, the vibration wave driving device includes a vibrator 100 and a moving body 101, and is connected to an external power source 102 that supplies electric energy to the vibrator 100. The moving body 101 is formed in a cylindrical shape, and is in contact with the vibrator 100 being pressed by a coil spring (not shown). The vibrator 100 moves the moving body 101 or transmits force to the moving body 101 by vibration.

  The external power supply 102 includes a ground electrode 102g that generates a ground potential, a sine wave electrode 102a that generates a sine wave potential, and a cosine wave electrode 102b that generates a cosine wave potential. The vibrator 100 and the ground electrode 102g, the sine wave electrode 102a, and the cosine wave electrode 102b of the external power source 102 are electrically connected by a lead wire 103.

  First, a detailed configuration of the vibrator 100 of the vibration wave driving device will be described together with a manufacturing process of the vibrator 100.

  The vibrator 100 includes a piezoelectric element 1, a support 5, and a fixing member 6. The piezoelectric element 1 is formed in a cylindrical shape, and is configured as a piezoelectric ceramic that is an electro-mechanical quantity conversion element that converts an electrical quantity (voltage) into a mechanical quantity (vibration). The electro-mechanical quantity conversion element referred to in the present invention may be other than the piezoelectric element, and is not limited to the piezoelectric element. The support 5 is made of an insulating material, and includes a disc portion 5a and a shaft bar 5b extending in the axial direction from the center of the end surface of the disc portion 5a. The fixing member 6 is formed in a disk shape and is formed of a conductive material.

  In the piezoelectric element 1 and the support 5, one end face of the piezoelectric element 1 and the surface on the shaft bar side of the disk portion 5 a of the support 5 are joined by adhesion. After bonding the piezoelectric element 1 and the support 5, the conductive coating of plating (electroless nickel plating in the present embodiment) is applied to the entire exposed surface of the combined body including the piezoelectric element 1 and the support 5. 3 is formed.

  By using plating as the coating forming means for the piezoelectric element 1 and the support 5, the manufacturing apparatus does not touch the vibrator 100 during the manufacture of the vibrator 100, and the conductive surface is not exposed to the outside of the vibrator 100. The coating 3 can be applied. This enables a simpler and cheaper manufacturing process. Furthermore, by using electroless nickel plating as the type of plating, it is possible to form the conductive coating 3 on the nonconductive piezoelectric element 1 without providing a special process.

  After the conductive coating 3 is formed on the piezoelectric element 1 and the support 5, the surface of the coating is irradiated with a laser. That is, the electrode dividing portion 4 is provided by melting and removing the conductive coating 3 with the heat of the laser so that the conductive coating 3 on the outer peripheral surface of the piezoelectric element 1 is divided into four in the circumferential direction. As a result, four outer peripheral electrodes 3 b are formed on the outer peripheral surface of the piezoelectric element 1. Further, the inner peripheral electrode 3 a is formed on the inner peripheral surface of the piezoelectric element 1. The inner peripheral electrode 3 a and the outer peripheral electrode 3 b are electrodes for applying a voltage to the piezoelectric element 1. Furthermore, the insulating portion 7 is provided by melting and removing the conductive coating 3 at the boundary portion between the outer peripheral electrode 3b and the outer peripheral surface of the support 5 with the heat of the laser.

  Furthermore, the insulating coating 7 is provided by melting and removing the conductive coating 3 at the boundary between the end face of the piezoelectric element 1 that is not coupled to the support 5 and the inner peripheral electrode 3a and the outer peripheral electrode 3b with the heat of the laser. . Thus, the friction material coating 3c of electroless nickel plating having high wear resistance is formed on the end face of the piezoelectric element 1. In this state, the four outer peripheral electrodes 3b and the inner peripheral electrode 3a are each electrically insulated by the insulating portion 7.

  Since the insulating portion 7 is provided by removing the conductive coating 3, a complicated process such as masking a portion where the conductive coating 3 is not applied is performed before the conductive coating 3 is applied. Is no longer necessary. Further, since laser processing is used as a method for removing the conductive coating 3, the manufacturing apparatus does not touch the vibrator 100 in the step of removing the conductive coating 3, and a portion where the vibrator 100 does not protrude is touched. In addition, the insulating portion 7 can be easily provided. In addition, since laser processing is performed instantaneously, it is possible to suppress the influence of heat on the piezoelectric element 1.

  In addition, since the conductive coating 3 serves as both the inner peripheral electrode 3a and the outer peripheral electrode 3b that are electrodes for applying a voltage (electric field) to the piezoelectric element 1, the conductive coating 3 and the inner peripheral electrode 3a are separately provided. This eliminates the need to provide a simpler manufacturing process. Further, the insulating portion 7 that electrically insulates makes it easy to independently apply a ground potential to the inner peripheral electrode 3a and a sine wave potential or a cosine wave potential to the outer peripheral electrode 3b, thereby enabling a simpler manufacturing process. It becomes.

  Applying a DC voltage (electric field) between the inner peripheral electrode 3a and the outer peripheral electrode 3b after forming the inner peripheral electrode 3a and the outer peripheral electrode 3b by performing laser processing on the conductive coating 3 as described above. Then, the polarization process of the piezoelectric element 1 is performed. Further, the movable body 101, a coil spring (not shown), and the fixing member 6 are sequentially passed through the shaft bar 5b of the support body 5 so that the movable body 101 is pressed and brought into contact with the friction material coating 3c. The fixing member 6 is fixed by adhesion.

  Next, a connection between the vibrator 100 including the piezoelectric element 1, the support 5, and the fixing member 6 and an external power source 102 for applying a voltage to the piezoelectric element 1 will be described.

  As described above, the inner peripheral electrode 3 a formed on the inner peripheral surface of the piezoelectric element 1, the conductive coating 3 on the surface of the support 5, and the conductive fixing member 6 are electrically connected. Yes. The lead wire 103 electrically connects the fixing member 6 and the ground electrode 102 g of the external power source 102. As a result, the inner peripheral electrode 3 a is electrically connected to the ground electrode 102 g of the external power source 102.

  As described above, the electrical connection between the inner peripheral electrode 3a of the piezoelectric element 1 having the hollow structure and the external power source 102 can be performed with a simple configuration using the inside of the hollow structure of the piezoelectric element 1. Accordingly, it is possible to realize a vibrator having a simple configuration and a vibration wave driving device having a simple configuration using the vibrator, and a simple manufacturing process is possible.

  Further, two opposing outer peripheral electrodes 3b of the four outer peripheral electrodes 3b are electrically connected to a sine wave electrode 102g that generates a sine wave potential of the external power source 102 via a lead wire 103. The other two outer peripheral electrodes 3 b are electrically connected to the cosine wave electrode 102 b that generates the potential of the cosine wave of the external power source 102 via the lead wire 103.

  Next, a driving method of the vibration wave driving device will be described.

  A voltage is applied to the vibrator 100 of the vibration wave driving device from the external power supply 102 via the sine wave electrode 102a and the cosine wave electrode 102b. By applying a voltage, the frequency of the potential of the sine wave and cosine wave generated by the external power supply 102 is made to substantially match the natural frequency of the vibrator 100, and the vibrator 100 is resonated, so that the surface of the friction material coating 3c is applied. Generate elliptical motion.

  Accordingly, the moving body 101 that is in contact with the friction material coating 3c in a pressurized state performs a rotational motion. As described above, since the friction material coating 3c is formed by removing a part of the conductive coating 3 on the end surface of the piezoelectric element 1 that is not coupled to the support 5, the friction material is separately provided on the vibrator 100. The process of providing is eliminated. This makes it possible to realize a simple manufacturing process when manufacturing the vibration wave driving device.

  As described above, according to the present embodiment, after the conductive coating 3 is formed on the entire surface of the piezoelectric element 1 and the support 5, a predetermined portion of the conductive coating 3 is removed, and the piezoelectric element 1 is removed. The outer peripheral electrode 3b and the inner peripheral electrode 3a are formed. Along with this, the inner peripheral electrode 3a and the surface of the support 5 are electrically connected, and the electrical connection between the piezoelectric element 1 and the external power source 102 is simplified through the exposed portion of the support and the support. This can be done with a configuration. Thereby, it is possible to provide a vibrator having a simple configuration and a vibration wave driving device using the vibrator. In addition, a simple manufacturing process when manufacturing the vibrator and the vibration wave driving device is possible.

  Further, since the conductive coating 3 also serves as an electrode for applying a voltage to the piezoelectric element 1, it is not necessary to separately provide the conductive coating 3 and an electrode for applying a voltage to the piezoelectric element 1. It becomes possible to realize the vibrator having the configuration. Furthermore, the conductive coating 3 and the electrode for applying a voltage to the piezoelectric element 1 can be manufactured in the same process, and a simpler manufacturing process is possible.

  In addition, since the conductive coating 3 is formed by plating, the manufacturing apparatus does not touch the vibrator 100 and is not exposed to the outside of the vibrator 100 in the step of applying the conductive coating 3 to the vibrator 100. The conductive coating 3 can be applied to the surface. Furthermore, since electroless nickel plating is used, it is possible to easily apply the conductive coating 3 to the non-conductive piezoelectric element 1, and a simpler manufacturing process becomes possible.

  In addition, since the inner peripheral electrode 3a is electrically connected to the external power source 102 via the conductive coating 3 on the surface of the support 5, a vibration wave vibration device that can easily connect the vibrator 100 and the external power source 102 is realized. Thus, a simpler manufacturing process is possible.

  In addition, since the insulating portion 7 that electrically insulates the inner peripheral electrode 3a and the outer peripheral electrode 3b is provided, it becomes easy to apply independent voltages to the inner peripheral electrode 3a and the outer peripheral electrode 3b, and it is simpler. A simple manufacturing process becomes possible. Further, since the insulating portion 7 is provided by removing the conductive coating 3, it is necessary to perform a complicated process such as masking on the portion where the conductive coating 3 is not applied before the conductive coating 3 is applied. Therefore, a simpler manufacturing process becomes possible.

  In addition, since the conductive coating 3 is removed by laser processing, the manufacturing apparatus does not touch the vibrator 100 in the step of removing the conductive coating 3, and an insulating portion can be easily formed on a portion where the vibrator 100 does not protrude. 7 can be provided, and a simpler manufacturing process becomes possible.

  In addition, since the friction material coating 3c of electroless nickel plating having high wear resistance is formed on the end surface of the piezoelectric element 1 on the moving body 101 side, the conductive coating 3 is vibrated in contact with the moving body 101. The friction material of the child 100 can be obtained. Thereby, the process of providing the friction material on the vibrator 100 becomes unnecessary, and a simpler manufacturing process becomes possible.

[Second Embodiment]
FIG. 4 is a perspective view showing an appearance of a vibration wave driving device according to the second embodiment of the present invention. FIG. 5 is a perspective view showing an appearance of a vibrator of the vibration wave driving device of FIG. FIG. 6 is a cross-sectional view showing the internal structure of the vibrator of the vibration wave driving device of FIG.

  4 to 6, the vibration wave driving device includes a vibrator 400 and a moving body 401. The vibrator 400 includes a piezoelectric element 41, a support body 45, and a fixing member 46. The vibrator 400 and the ground electrode 102g, the sine wave electrode 102a, and the cosine wave electrode 102b of the external power source 102 are electrically connected by a lead wire 103. Further, a conductive coating 43 is formed on the piezoelectric element 41 and the support body 45. Further, the piezoelectric element 41 is formed with an inner peripheral electrode 43 a and an outer peripheral electrode 43 b through an electrode dividing portion 44. The support body 45 is made of a conductive material, and includes a disc portion 45a and a shaft rod 45b.

  The present embodiment is different from the above-described first embodiment in the following points. Since the other elements of the present embodiment are the same as the corresponding ones of the first embodiment (FIGS. 1 and 2) described above, the description will be simplified or omitted.

  This embodiment is different from the first embodiment in that the surface where the piezoelectric element 41 and the support 45 are coupled is the inner peripheral surface of the piezoelectric element 41 and the outer peripheral surface of the disc portion 45a of the support 5. This is the point. In such a configuration, a gap is likely to occur due to the difference between the inner peripheral dimension of the piezoelectric element 41 and the outer peripheral dimension of the disk portion 45a of the support body 45, and the electrical connection between the inner peripheral electrode 43a of the piezoelectric element 41 and the support body 45 is facilitated. Is usually difficult. However, in the method of applying the conductive coating 43, the conductive coating 43 enters the gap between the inner peripheral surface of the piezoelectric element 41 and the outer peripheral surface of the disk portion 45 a of the support body 45, and the piezoelectric element 41. And a more reliable electrical connection of the support 45 is possible. Here, the conductive coating 43 is solder plated.

  In the present embodiment, the insulating portion 47 that insulates the outer peripheral electrode 43b and the inner peripheral electrode 43a is located on the end surface of the piezoelectric element 41 that is coupled to the support 45. The insulation at the other end face of the piezoelectric element 41 is performed by removing the conductive coating 43 on the entire end face by machining (polishing). By using machining, it is possible to simultaneously remove the covering of a large area, to achieve more reliable insulation, and to easily obtain high shape accuracy of the vibrator 400. Thereby, a simpler manufacturing process is possible.

  As described above, the conductive covering 43 is formed on the piezoelectric element 41 and the support body 45, the inner peripheral electrode 43a, the outer peripheral electrode 43b, and the insulating portion 47 are formed. Then, the other end face of the piezoelectric element 41 is not electrically conductive. The friction material coating 42 having high wear resistance is formed.

  Next, electrical connection between the inner peripheral electrode 43a of the piezoelectric element 41 and the ground electrode 102g of the external power source 102 will be described.

  The inner peripheral electrode 43a of the piezoelectric element 41, the solder plating of the conductive coating 43 formed in the gap between the inner peripheral surface of the piezoelectric element 41 and the outer peripheral surface of the disk portion 45a of the support 5, and the support 45 is electrically connected. In addition, the conductive coating 43 on the bottom surface of the disk portion 45 a of the support 45 and the ground electrode 102 g of the external power source 102 are electrically connected by the lead wire 103. Thereby, the inner peripheral electrode 43a and the ground electrode 102g are electrically connected.

  As described above, according to the present embodiment, the electrical connection between the inner peripheral electrode 43a of the piezoelectric element 41 having the hollow structure and the external power source 102 can be simplified using the inside of the hollow structure of the piezoelectric element 41. This can be done with a configuration. Thereby, it is possible to provide a vibrator having a simple configuration and a vibration wave driving device using the vibrator. In addition, a simple manufacturing process when manufacturing the vibrator and the vibration wave driving device is possible.

  Further, since the conductive coating 43 is formed by solder plating and the conductive coating 43 and the lead wire 103 of the external power source 102 are connected by soldering, the soldering operation becomes very easy and simpler. A simple manufacturing process becomes possible.

  Further, since the conductive coating 43 is removed by machining, a large area can be removed at the same time, more reliable insulation can be achieved and high shape accuracy can be easily obtained, and a simpler manufacturing process can be achieved. Is possible.

[Third Embodiment]
FIG. 7 is a perspective view showing an appearance of a vibrator of a vibration wave driving device according to the third embodiment of the present invention. FIG. 8 is a cross-sectional view showing the internal structure of the vibrator of the vibration wave driving device of FIG.

  7 and 8, the vibration wave driving device includes a vibrator 700 and a moving body (not shown). The vibrator 700 includes a piezoelectric element 71, a support body 75, and a fixing member 76. The vibrator 700 and the ground electrode 102 g, sine wave electrode 102 a, and cosine wave electrode 102 b of the external power supply 102 are electrically connected by a lead wire 103. In addition, a conductive coating 73 is formed on the piezoelectric element 71 and the support body 75. Further, the piezoelectric element 71 is formed with an inner surface electrode 73 a and an outer surface electrode 73 b via an electrode dividing portion 74. The support body 75 is made of a conductive material, and includes a quadrangular plate portion 75a and a quadrangular column portion 75b.

  The present embodiment is different from the above-described first embodiment in the following points. Since the other elements of the present embodiment are the same as the corresponding ones of the first embodiment (FIGS. 1 and 2) described above, the description will be simplified or omitted.

  This embodiment is different from the first embodiment in that the shape of the inner surface and the outer surface of the piezoelectric element 71 is a square shape, the shape of the support body 75 is a shape in which a square column is extended to a square plate, and the fixing member 76. Is formed in a rectangular parallelepiped shape. Further, the present embodiment is different from the first embodiment in that the coupling position of the piezoelectric element 71 and the support 75 is in the vicinity of the position 78 of the vibration deformation node that excites the vibrator 700. Is a point.

  In the present embodiment, the vibrator 700 is first coated with copper by vapor deposition, and further coated with gold to form a conductive coating 73. Since the conductive coating 73 is formed by metal deposition, the conductive coating 73 can be formed on the surface not exposed to the outside of the vibrator 700 without the manufacturing apparatus touching the vibrator 700. It becomes possible. At the same time, it becomes easy to uniformly form the conductive coating 73.

  In addition, the conductive coating 73 is formed by vapor deposition of copper and gold. As a result, it is possible to obtain a conductive coating 73 having both high conductivity and high corrosion resistance due to the high conductivity of copper adhering to the piezoelectric element 71 and the high conductivity and high corrosion resistance of gold exposed on the surface. Become.

  The material for forming the conductive coating 73 is not limited to copper and gold, and nickel having high conductivity and high corrosion resistance can also be used. Further, when the conductive coating 73 is formed, desired conductivity and corrosion resistance can be obtained by combining one or several of copper, gold, and nickel. Further, a similar effect can be obtained by combining a copper alloy, a gold alloy, and a nickel alloy.

  In this way, when the conductive coating 73 is formed, high conductivity and high corrosion resistance can be obtained, so that the conductive coating 73 and the surface with high corrosion resistance can be applied to the surface using a process different from the coating forming process. It becomes unnecessary to apply. Further, by using a vapor deposition method as a method for forming the conductive coating 73, it is possible to perform a coating process on a plurality of vibrators 700 simultaneously.

  After forming the conductive coating 73 on the vibrator 700, the electrode coating 74 is provided by removing the conductive coating 73 by laser processing. Through the above series of manufacturing steps, the inner surface electrode 73a is formed on the inner surface of the piezoelectric element 71 and the outer surface electrode 73b is formed on the outer surface. Thereafter, the conductive coating 73 is removed by machining (cutting) on the entire surface of both end faces of the piezoelectric element 71 to provide an insulating portion 77 that insulates the inner surface electrode 73a from the outer surface electrode 73b.

  As described above, the conductive covering 73 is formed on the piezoelectric element 71 and the support body 75, the inner peripheral electrode 73a, the outer peripheral electrode 73b, and the insulating portion 77 are formed. Then, the other end face of the piezoelectric element 71 is not electrically conductive. A friction material coating 72 having high wear resistance is formed.

  Next, electrical connection between the inner peripheral electrode 73a of the piezoelectric element 71 and the ground electrode 102g of the external power source 102 will be described.

  The inner surface electrode 73a of the piezoelectric element 71 is electrically connected to the ground electrode 102g of the external power source 102 through the following connection path. That is, the inner surface electrode 73 a is connected to the external power source 102 via the conductive coating 73, the conductive support 75, the conductive fixing member 76, and the lead wire 103 attached to the fixing member 76. Is electrically connected to the ground electrode 102g.

  As described above, according to the present embodiment, the electrical connection between the inner peripheral electrode 73a of the piezoelectric element 71 having a hollow structure and the external power source 102 can be simplified using the inside of the hollow structure of the piezoelectric element 71. This can be done with a configuration. Thereby, it is possible to provide a vibrator having a simple configuration and a vibration wave driving device using the vibrator. In addition, a simple manufacturing process when manufacturing the vibrator and the vibration wave driving device is possible.

  In addition, since the conductive coating 73 is formed by vapor deposition of metal, the manufacturing apparatus is exposed to the outside of the vibrator 700 without touching the vibrator 700 in the step of applying the conductive coating to the vibrator 700. It becomes possible to apply the conductive coating 73 to the surface which is not present. At the same time, it becomes easy to uniformly apply the thickness of the conductive coating 73. Thereby, a simpler manufacturing process is possible.

  Further, since the conductive coating 73 is formed by vapor deposition of copper and gold, or any combination of copper, gold, and nickel, or vapor deposition by a combination of copper alloy, gold alloy, and nickel alloy, high conductivity is achieved. In addition, the conductive coating 73 having corrosion resistance can be realized. Thereby, a simpler manufacturing process is possible.

[Other embodiments]
In the first embodiment, in the configuration in which the surface that couples the piezoelectric element 1 and the support 5 is the one end face of the piezoelectric element 1 and the surface on the shaft rod side of the disk portion 5a of the support 5, The conductive coating 3 is formed by electroless nickel plating, but is not limited thereto. In the above configuration, the conductive coating 3 may be formed by other plating such as solder plating.

  In the second embodiment, in the configuration in which the surface that couples the piezoelectric element 41 and the support 45 is the inner peripheral surface of the piezoelectric element 41 and the outer peripheral surface of the disk portion 45a of the support 5, The coating 43 is formed by solder plating, but is not limited to this. In the above configuration, the conductive coating 43 may be formed by other plating such as electroless nickel plating.

  In the third embodiment, the case where the shape of the inner surface and the outer surface of the piezoelectric element is a quadrangle is described as an example. However, the present invention is not limited to this. Even when the shape of the inner and outer surfaces of the piezoelectric element is other than the quadrangle, the same effects as the various effects described above can be obtained.

1 is a perspective view showing an appearance of a vibration wave driving device according to a first embodiment of the present invention. It is a perspective view which shows the external appearance of the vibrator | oscillator of the vibration wave drive device of FIG. FIG. 2 is a cross-sectional view illustrating an internal structure of a vibrator of the vibration wave driving device in FIG. 1. It is a perspective view which shows the external appearance of the vibration wave drive device which concerns on the 2nd Embodiment of this invention. FIG. 5 is a perspective view illustrating an appearance of a vibrator of the vibration wave driving device in FIG. 4. FIG. 5 is a cross-sectional view showing an internal structure of a vibrator of the vibration wave driving device in FIG. 4. It is a perspective view which shows the external appearance of the vibrator | oscillator of the vibration wave drive device which concerns on the 3rd Embodiment of this invention. It is sectional drawing which shows the internal structure of the vibrator | oscillator of the vibration wave drive device of FIG. It is sectional drawing which shows the internal structure of the vibration wave drive device which concerns on a prior art example.

Explanation of symbols

1, 41, 71 Piezoelectric element (electro-mechanical quantity conversion element)
2, 42, 72 Friction material coating 3, 43, 73 Conductive coating 3a, 43a Inner peripheral electrode (electrode exposed on the inner surface)
3b, 43b Peripheral electrode (electrode exposed on the outer surface)
3c Friction material coating 4, 44, 74 Electrode division part 5, 45, 75 Support body 5a, 45a Disk part 5b, 45b Axle rod 6, 46, 76 Fixing member 73a Inner surface electrode (electrode exposed on inner surface)
73b External electrode (electrode exposed on the external surface)
75a Square plate part 75b Square column part 100 Vibrator 101 Moving object (member)
102 External power supply 102a Sine wave electrode 102b Cosine wave electrode 102g Ground electrode

Claims (14)

An electromechanical conversion element that has a hollow structure and converts an electrical quantity into a mechanical quantity;
A support body that is disposed at least partially inside the hollow structure of the electro-mechanical quantity conversion element and supports the electro-mechanical quantity conversion element;
Conductive so that the inner surface of the hollow structure and the surface of the support are electrically connected to at least a region including the inner surface of the hollow structure and the surface of the support of the electromechanical converter . coating is formed, the transducer, characterized in that the inner circumferential electrode a coating of the conductive formed on the inner surface.   2. The vibrator according to claim 1, wherein the vibrator vibrates by applying a voltage between an outer peripheral electrode provided on an outer surface of the hollow structure of the electromechanical conversion element and the inner peripheral electrode. . Covering the conductive forming the inner electrode Claim 1, characterized in that it is an external power source electrically connected through the conductive coating formed on the surface of the support or 2. The vibrator according to 2 . Forming a conductive coating on the outer surface of the hollow structure of the electromechanical conversion element, and removing the predetermined portion of the conductive coating formed on the outer surface, thereby remaining on the outer surface; Conductive coating as outer electrode,
Vibrator according to any one of claims 1 to 3, characterized in that an insulating unit for electrically insulating the outer circumferential electrode and the inner electrode. The vibrator according to claim 4 , wherein the insulating portion is provided by removing the conductive coating. 6. The vibrator according to claim 5, wherein the method for removing the conductive coating is selected from the group including a removal method by laser processing and a removal method by machining. The conductive coating vibrator according to any one of claims 1 to 6, characterized in that it is formed by plating. The vibrator according to claim 7 , wherein the plating is selected from a group including electroless nickel plating and solder plating. The conductive coating vibrator according to any one of claims 1 to 6, characterized in that it is formed by vapor deposition of metal. The vibrator according to claim 9, wherein the metal used for the vapor deposition is selected from the group including copper, gold, nickel, a copper alloy, a gold alloy, and a nickel alloy. A vibration wave driven apparatus having a transducer as claimed in any one of claims 1 to 10,
A vibration wave driving device that performs movement of a member in contact with the vibrator or transmission of a force to the member by vibration of the vibrator. The vibration wave driving device according to claim 11, wherein a conductive coating is formed on a portion of the vibrator that contacts the member.   An electro-mechanical quantity conversion element having a hollow structure for converting an electric quantity into a mechanical quantity, and at least a part of the electro-mechanical quantity conversion element disposed in the hollow structure of the electro-mechanical quantity conversion element. And a support for supporting the vibrator, comprising:
  Conductive so that the inner surface of the hollow structure and the surface of the support are electrically connected to at least a region including the inner surface of the hollow structure and the surface of the support of the electromechanical converter. A method of manufacturing a vibrator comprising a step of forming a coating as an inner peripheral electrode.   Forming a conductive coating on the outer surface of the hollow structure of the electromechanical conversion element;
  Forming the conductive coating remaining on the external surface as an outer peripheral electrode by removing a predetermined portion of the conductive coating formed on the external surface;
The method of manufacturing a vibrator according to claim 13, further comprising:

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