JP4983953B2 - Display device and manufacturing method of display device - Google Patents

Display device and manufacturing method of display device Download PDF

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JP4983953B2
JP4983953B2 JP2010086374A JP2010086374A JP4983953B2 JP 4983953 B2 JP4983953 B2 JP 4983953B2 JP 2010086374 A JP2010086374 A JP 2010086374A JP 2010086374 A JP2010086374 A JP 2010086374A JP 4983953 B2 JP4983953 B2 JP 4983953B2
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light
insulating film
display device
pixel
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JP2010192450A (en
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剛 尾崎
忠久 当山
智美 澤野
友之 白嵜
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カシオ計算機株式会社
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  The present invention relates to a display device using an organic EL (electroluminescence) element and a method for manufacturing the display device.

  In recent years, as a next-generation display device following a liquid crystal display (LCD), a light-emitting element type display panel in which self-light-emitting elements such as organic electroluminescence elements (hereinafter abbreviated as “organic EL elements”) are two-dimensionally arranged. Research and development for full-scale practical application and dissemination of display devices are actively underway.

  The organic EL element includes an anode electrode, a cathode electrode, an electron injection layer, a light emitting layer, a hole injection layer, and the like formed between these electrodes. In the organic EL element, light is emitted by energy generated by recombination of holes supplied from the hole injection layer and electrons supplied from the electron injection layer in the light emitting layer. Such an organic EL element is used as a display device as disclosed in Patent Document 1, and is driven by, for example, a TFT (Thin Film Transistor).

JP 2001-195012 A

  Incidentally, it has been confirmed that the threshold voltage Vth of the gate shifts to the positive potential side as the drive time elapses in the TFT, particularly in the amorphous silicon TFT. Since the light emission amount of the organic EL element is determined by the amount of current flowing through the organic EL element, when the light emission amount is controlled by the voltage applied to the driving element, the change in the threshold voltage causes a deviation in the control of the light emission amount. There's a problem.

  Therefore, a display device capable of suppressing a change in threshold voltage of the drive element due to a secular change and a manufacturing method thereof are demanded.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to provide a display device and a display device manufacturing method capable of suppressing a change in threshold voltage due to aged driving of a drive element.

In order to achieve the above object, a display device according to the first aspect of the present invention provides:
A light emitting device formed on a substrate;
A driving element that is formed on the substrate and controls a current flowing through the light emitting element;
A switching element for switching the drive element;
An insulating film will covering the drive element and the switching element,
Equipped with a,
Wherein the upper surface of the insulating film, and wherein Rukoto have the concave portion is formed only region facing the switching element.

The insulating film has a protective insulating film and a partition,
You may further provide the counter electrode formed so that the said partition may be covered and formed from the electrically conductive material provided with reflectivity.
The recess may have at least one triangular shape in cross-sectional shape in the thickness direction of the insulating film in the recess.

In order to achieve the above object, a method for manufacturing a display device according to the second aspect of the present invention includes:
Forming a driving element for controlling a current flowing through the light emitting element and a switching element for switching the driving element on the substrate;
Forming an insulating film on the driving element and the switching element;
Forming a recess only in a region corresponding to the switching element on the upper surface of the insulating film ;
It is characterized by providing.

  The insulating film may include a protective insulating film and a partition, and the partition may be formed of a photosensitive material.

The partition is formed by exposing and developing the photosensitive material,
The amount of light incident on the photosensitive resin in the region corresponding to the recess may be different from the amount of light incident on the photosensitive resin in the region other than the recess.
In the step of forming the concave portion, the concave portion may be formed so that a cross-sectional shape in the thickness direction of the insulating film in the concave portion has at least one triangular shape.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the display apparatus which can suppress the change of the threshold voltage by the aging drive of a drive element, and a display apparatus can be provided.

It is a top view which shows the structural example of the display apparatus which concerns on embodiment of this invention. It is an equivalent circuit diagram showing a pixel drive circuit. It is a top view of a pixel. It is the IV-IV sectional view taken on the line shown in FIG. It is a figure which shows the manufacturing method of the display apparatus which concerns on embodiment of this invention. It is a figure which shows the manufacturing method of the display apparatus which concerns on embodiment of this invention. It is a figure which shows incidence | injection of the light to a pixel. It is a figure which shows the change of the threshold voltage at the time of driving an amorphous silicon TFT for a long time. It is a figure which shows the change of the threshold voltage at the time of irradiating an amorphous silicon TFT for a long time. It is sectional drawing which shows the structural example of the display apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows incidence | injection of the light to a pixel. It is a figure which shows the manufacturing method of the display apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows the manufacturing method of the display apparatus which concerns on 2nd Embodiment of this invention. It is an equivalent circuit diagram which shows the drive circuit of the pixel of the display apparatus which concerns on 3rd Embodiment of this invention. It is a top view of a pixel. It is XVI-XVI sectional view taken on the line shown in FIG. It is sectional drawing which shows the structural example of the display apparatus which concerns on 4th Embodiment of this invention. 2 is an equivalent circuit diagram illustrating a circuit configuration and a driving principle of a pixel, in which (a) a diagram shows a current flow during a selection period, and (b) a diagram shows a current flow during a non-selection period. Has been. It is a timing chart figure in which operation was shown.

  A display device and a method for manufacturing the display device according to each embodiment of the present invention will be described with reference to the drawings. In this embodiment, an active drive type display device using a bottom emission type organic EL (electroluminescence) element will be mainly described.

(First embodiment)
A display device and a method for manufacturing the display device according to the first embodiment of the present invention will be described with reference to the drawings.

  FIG. 1 is a diagram illustrating a configuration example of a display device according to an embodiment of the present invention. FIG. 2 is an equivalent circuit diagram of a pixel driving circuit. 3 is a plan view of the pixel 30, and FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG.

  In the display device 10, a set of three pixels 30 that emit three colors of red (R), green (G), and blue (B) on the pixel substrate 31, respectively, is set in the row direction (the horizontal direction in FIG. 1). ) Repeatedly and a plurality of pixels of the same color are arranged in the column direction (vertical direction in FIG. 1). Pixels that emit RGB colors are arranged in a matrix. Each pixel 30 includes an organic EL element 21 that emits RGB light and a pixel circuit DS that actively operates the organic EL element.

  The pixel circuit DS includes a first selection transistor Tr11, a second selection transistor Tr12, a light emission drive transistor Tr13, a capacitor Cs, and an organic EL element 21. The first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13 are inverted staggered n-channel TFTs (Thin Film Transistors) each including a semiconductor layer having amorphous silicon.

  A plurality of anode lines La connected to a plurality of pixel circuits DS arranged in a predetermined row, and a cathode formed by a single electrode layer for all pixels, for example, a voltage Vss such as a ground potential is applied. A counter electrode 40, data lines Ld connected to a plurality of pixel circuits arranged in a predetermined column, and a plurality of scanning lines Ls for selecting transistors Tr11 of the pixel circuits arranged in a predetermined row, respectively. , Is formed.

  As shown in FIGS. 2 and 3, the gate electrode 11g of the first selection transistor Tr11 is connected to the scanning line Ls, and the drain electrode 11d of the first selection transistor Tr11 is connected to the anode line La. In the contact portion 44, the capacitor electrode Cs1 and the gate electrode 13g of the light emission drive transistor Tr13 are connected to each other. The source electrode 11s of the first selection transistor Tr11 is connected to the capacitor electrode Cs1 through the contact portion 43, and is further connected to the gate electrode 13g of the light emission drive transistor Tr13 through the capacitor electrode Cs1. Note that the contact portions 41 to 43 electrically connect electrodes, wirings, and the like formed in different layers in the vertical direction. For example, the contact portions 41 to 43 are openings formed in the insulating film 32 in the thickness direction. A lower connection portion formed by patterning a gate conductive layer forming a gate electrode of the first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13, and the first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor An upper connection portion formed by patterning the source-drain conductive layer forming the source-drain electrode of Tr13 is connected.

  The drain electrode 12d of the second selection transistor Tr12 is connected to the source electrode 13s of the light emission drive transistor Tr13 via the pixel electrode 34, and the source electrode 12s is connected to the data line Ld via the contact portion 41. The Further, the gate electrode 12g of the second selection transistor Tr12 is connected to the scanning line Ls via the contact portion.

The drain electrode 13d of the light emission drive transistor Tr13 is connected to the anode line La, and the gate electrode 13g of the light emission drive transistor Tr13 is connected to the source electrode 11s of the first selection transistor Tr11 via the capacitor electrode Cs1. Further, the source electrode 13 s of the light emission drive transistor Tr 13 is connected to the pixel electrode 34.
The capacitor Cs includes a capacitor electrode Cs1, a pixel electrode 34, and an insulating film 32 interposed between the capacitor electrode Cs1 and the pixel electrode 34.

  In the writing operation of each pixel 30 during the selection period, a scanning signal is sequentially output to each scanning line Ls by a scanning driver (not shown), and each scanning line line is sequentially selected. An on-level (high level) Von voltage (which is sufficiently higher than the ground potential) is supplied to the scanning line Ls to be selected, and a low-level Voff voltage (lower than the ground potential) is supplied to the scanning line Ls which is not selected. As a result, the first selection transistor Tr11 and the second selection transistor Tr12 connected to the selected scanning line Ls are turned on.

  During the selection period, a power supply driver (not shown) sequentially outputs a voltage to each anode line (power supply line) La in accordance with a control signal output from a controller (not shown). During the selection period in which each selection transistor is selected, a low-level first power supply voltage, for example, a voltage equal to or lower than the cathode potential Vss is applied. Further, in the non-selection period (light emission period) after the selection period, the power supply driver applies a high-level second power supply voltage having a higher potential than the first power supply voltage to the anode line La.

  During the selection period, a data driver (not shown) supplies a gradation signal corresponding to the gradation of light emission of the organic EL element 21 to the data line Ld. The write voltage between the gate electrode 13g and the source electrode 13s of the light emission drive transistor Tr13 set in accordance with this gradation signal is held by the capacitor Cs, and the level corresponding to the voltage value of the write voltage in the non-selection period. A regulated current flows through the organic EL element 21 and emits light at a desired gradation.

  At this time, when the gradation signal for setting the light emission gradation of the organic EL element 21 is a voltage gradation signal controlled by a voltage value as in the present embodiment, the gate electrode 13g and the source electrode of the Tr 13 that is a drive driver. The voltage between 13s is set by the voltage of the voltage gradation signal. That is, if the gate threshold voltage of the drive driver Tr13 changes to the high potential side due to deterioration over time, the drain electrode 13d-source of the drive driver Tr13 when the data driver applies a voltage to the data line Ld. The current flowing through the electrode 13s changes in a decreasing direction, making it difficult to cause the organic EL element 21 to emit light at a desired gradation. Therefore, it is desirable that the threshold voltage of the light emission drive transistor Tr13 is not significantly different from the initial value.

  Next, the organic EL element 21 includes a pixel electrode 34, a hole injection layer 36, an interlayer 37, a light emitting layer 38, and a counter electrode 40. The hole injection layer 36, the interlayer 37, and the light emitting layer 38 serve as a carrier transport layer in which electrons and holes are transported as carriers. The carrier transport layer is disposed between the interlayer insulating film 35 and the partition 39 arranged in the column direction. The interlayer insulating film 35 is formed of a member that is transparent to the light emitted from the organic EL element 21, such as silicon nitride or silicon oxide.

  A light shielding film 33 for preventing light from the light emitting layer 38 and the like from entering the semiconductor layer of the first selection transistor Tr11 and the semiconductor layer 121 of the second selection transistor Tr12, respectively, It is provided above the second selection transistor Tr12. Since the light-emitting drive transistor Tr13 is not provided with a light-shielding film, light from the light-emitting layer 38 or the like is easily incident on the semiconductor layer 131 of the light-emitting drive transistor Tr13.

  On the pixel substrate 31 of each pixel, gate electrodes 11g, 12g, and 13g of a first selection transistor Tr11, a second selection transistor Tr12, and a light emission driving transistor Tr13 formed by patterning a gate conductive layer are formed. Further, one electrode Cs1 of the capacitor Cs is formed on the pixel substrate 31 of each pixel, and a gate conductive layer is patterned on the pixel substrate 31 adjacent to each pixel and extends along the column direction. A data line Ld is formed, and an insulating film 32 that functions as a gate insulating film and a dielectric of the capacitor is further formed so as to cover them.

  When the organic EL element 21 is a bottom emission type that emits display light from the pixel substrate 31 side, the capacitor electrode Cs1 and the pixel electrode 34 are transparent electrodes such as ITO, and the gate electrode 13g of the light emission driving transistor Tr13 is formed in the contact portion 44. It is formed so as to overlap with the capacitor electrode Cs1. When the organic EL element 21 is a top emission type that emits display light from the counter electrode 40 side, the counter electrode 40 is a transparent electrode such as ITO, but the capacitor electrode Cs1 does not need to be transparent. Cs1 can be formed together and integrally with the gate electrode 13g of the light emission drive transistor Tr13 by patterning the gate conductive layer. Since the gate conductive layer can be patterned at once by photolithography, if it is a top emission type, the manufacturing process of these members can be simplified.

  The insulating film 32 is formed of an insulating material such as a silicon oxide film or a silicon nitride film, and is formed on the pixel substrate 31 so as to cover the data line Ld, the gate electrodes 12g and 13g, and the capacitor electrode Cs1. The

  The first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13 are each an n-channel thin film transistor (TFT). Each transistor is formed on the pixel substrate 31 as shown in FIG. As shown in FIG. 4, the second selection transistor Tr12 includes a semiconductor layer 121, a protective insulating film 122, a drain electrode 12d, a source electrode 12s, ohmic contact layers 124 and 125, and a gate electrode 12g. . The light emission drive transistor Tr13 includes a semiconductor layer 131, a protective insulating film 132, a drain electrode 13d, a source electrode 13s, ohmic contact layers 134 and 135, and a gate electrode 13g. Although not shown, the first selection transistor Tr11 has the same configuration as the second selection transistor Tr12. As shown in FIGS. 3 and 4, an opaque light shielding film 33 is formed in a region on the interlayer insulating film 35 facing the first selection transistor Tr11 and the second selection transistor Tr12. The protective insulating films 122 and 132 and the protective insulating film of the first selection transistor Tr11 are formed of a member that is transparent to the light emitted from the organic EL element 21, such as silicon nitride or silicon oxide.

  In each of the transistors Tr11, Tr12, Tr13, the gate electrode is an opaque gate conductive made of, for example, a Mo film, Cr film, Al film, Cr / Al laminated film, AlTi alloy film or AlNdTi alloy film, MoNb alloy film, etc. Formed from layers. Since the first selection transistor Tr11, the second selection transistor Tr12, and the gate electrodes 11g, 12g, and 13g of the light emission drive transistor Tr13 formed by the gate conductive layer are opaque to the light emitted from the organic EL element 21, Light entering from the lower side of the selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13 toward each semiconductor layer can be shielded. The drain electrode and the source electrode are each formed of a source-drain conductive layer such as aluminum-titanium (AlTi) / Cr, AlNdTi / Cr, or Cr. The source electrodes 11s, 12s, 13s and the drain electrodes 11d, 12d, 13d of the first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13 formed by the source-drain conductive layer are emitted from the organic EL element 21. Since it is opaque to light, it can be prevented that light entering from above is incident directly below, but between the source electrode 11s and the drain electrode 11d, between the source electrode 12s and the drain electrode 12d, and between the source electrode 13s and Since only a transparent protective insulating film and an interlayer insulating film 35 are formed between the drain electrodes 13d, the semiconductor layers of the semiconductor layers of the first selection transistor Tr11, the second selection transistor Tr12, and the light emission drive transistor Tr13 from above. In the region where the channel is formed It has become Isa is to become structure. In addition, an ohmic contact layer is formed between the drain electrode and the source electrode and the semiconductor layer for low resistance contact.

  The pixel electrode (anode electrode) 34 is made of a conductive material having translucency, such as ITO (Indium Tin Oxide), ZnO, or the like. Each pixel electrode 34 is insulated from the pixel electrode 34 of another adjacent pixel 30 by an interlayer insulating film 35.

  The interlayer insulating film 35 is formed between the pixel electrodes 34 and insulates between adjacent pixel electrodes 34. The interlayer insulating film 35 is formed so as to cover the transistors Tr11, Tr12, Tr13, the scanning line Ls, the anode line La, and the like. The interlayer insulating film 35 and the insulating film 42 have an opening 35a having a substantially square planar shape, and the light emitting region of the pixel 30 is defined by the opening 35a. Further, a groove-like opening 39 b extending in the column direction (vertical direction in FIG. 7) is formed in the partition wall 39 across the plurality of pixels 30. The light shielding film 33 is formed between the interlayer insulating film 35 and the partition wall 39.

  The light shielding film 33 is formed on the interlayer insulating film 35, and light emitted from the organic EL element 21 and external light incident from the outside of the display device 10 are used as the first selection transistor Tr11 and the second selection transistor Tr12. Each of the semiconductor layers is prevented from entering a region where a channel is formed. For this reason, the light shielding film 33 is made of a material having a predetermined light shielding performance, and is made of, for example, at least one of chromium (III) oxide, cobalt-iron-chromium oxide, amorphous silicon, and the like.

  In this embodiment, as shown in FIG. 3, the light shielding film 33 is formed only on the first selection transistor Tr11 and the second selection transistor Tr12 that perform the switching operation, and the light shielding film is formed on the drive transistor Tr13. Absent. In particular, a TFT using amorphous silicon has an effect that the gate threshold voltage shifts to the plus side as the driving time increases, as will be described in detail later. However, when the amorphous silicon TFT is continuously driven in the light irradiation state, the threshold voltage is shifted to the minus side. By utilizing this phenomenon, light enters the light emitting drive transistor Tr13 that is greatly affected by the change in the threshold voltage, and the shift in the positive direction of the threshold voltage due to the aging drive is canceled by the shift in the negative direction by the light. By doing so, it is possible to maintain the threshold voltage close to the initial state. In addition, in the transistors Tr11 and Tr12 that perform the switching operation, a leakage current is generated by light irradiation, which makes light emission control unstable, so that it is preferable that light does not enter. Further, since the size of the transistor is smaller than that of Tr13, the influence of the change in threshold voltage due to aging is smaller than that of Tr13. For this reason, in this embodiment, the light shielding film is formed only on Tr11 and Tr12 that perform the switching operation.

  The partition wall 39 is formed by curing an insulating material, for example, a photosensitive resin such as polyimide, and is formed on the light shielding film 33 and the interlayer insulating film 35. The partition 39 is formed in a stripe shape as shown in FIG. 3, and includes an opening 39b. The partition wall 39 contains a material that becomes the light emitting layer 38 of the R (red) pixel 30 formed on the pixel electrode 34 and a material that becomes the light emitting layer 38 of the G (green) pixel 30 during the manufacturing process. The liquid, the material containing the material for the light emitting layer 38 of the B (blue) pixel 30 is partitioned so that the liquid does not flow out to the pixels 30 emitting different colors adjacent to each other in the row direction, thereby preventing color mixing of the light emitting layer 38. . The planar shape of the partition wall 39 is not limited to this and may be a lattice shape.

  The hole injection layer 36 is formed on the pixel electrode 34 and has a function of supplying holes to the light emitting layer 38. The hole injection layer 36 is made of an organic polymer material that can inject and transport holes. As an organic compound-containing liquid containing an organic polymer hole injection / transport material, for example, polyethylenedioxythiophene (PEDOT) which is a conductive polymer and polystyrene sulfonic acid (PSS) which is a dopant are dispersed in an aqueous solvent. A PEDOT / PSS aqueous solution that is a dispersion is used.

  The interlayer 37 is formed on the hole injection layer 36. The interlayer 37 has a function of suppressing the hole injection property of the hole injection layer 36 to facilitate recombination of electrons and holes in the light emitting layer 38, in order to increase the light emission efficiency of the light emitting layer 38. Is provided.

  The light emitting layer 38 is formed on the interlayer 37. The light emitting layer 38 has a function of generating light by applying a voltage between the anode electrode and the cathode electrode. The light emitting layer 38 is a known polymer light emitting material capable of emitting fluorescence or phosphorescence, for example, red (R) or green (G) containing a conjugated double bond polymer such as polyparaphenylene vinylene or polyfluorene. And a blue (B) light emitting material. In addition, these luminescent materials are appropriately coated with a solution (dispersion) dissolved (or dispersed) in an aqueous solvent or an organic solvent such as tetralin, tetramethylbenzene, mesitylene, and xylene by a nozzle coating method, an inkjet method, or the like. It is formed by volatilizing.

  Further, in the case of the bottom emission type, the counter electrode (cathode electrode) 40 is provided on the light emitting layer 38 side, a layer made of a conductive material, for example, a material having a low work function such as Li, Mg, Ca, Ba, Al, etc. In the case of a top emission type, a material having a low work function, such as Li, Mg, Ca, Ba, etc. And a transparent laminated structure having a light-reflective conductive layer made of ITO or the like having a thickness of about 100 nm to 200 nm. In the present embodiment, the counter electrode 40 is composed of a single electrode layer formed across a plurality of pixels 30, and for example, a common voltage Vss that is a ground potential is applied.

FIGS. 18A and 18B are equivalent circuit diagrams illustrating driving of the pixels 30. FIG.
Next, the operation of the pixel 30 in the i-th row configured as described above and the operation of the display device 10 will be described with reference to the timing chart of FIG. 19, a period of T SE is the selection period, a period of T NSE is a non-selection period, a period of T SC is one scanning period. Note that T SC = T SE + T NSE .

  In accordance with the control signal group output from the control circuit, the scanning driver sequentially applies high level (on level ON) pulses from the first scanning line Ls to the mth scanning line Ls (m is a natural number of 2 or more). Output. Further, the power supply driver sequentially outputs low level L pulses from the first row of anode lines La to the mth row of anode lines La in accordance with a control signal group output from the control circuit.

Here, as shown in FIG. 19, in each row, the timing at which the ON level ON pulse of the scanning line Ls is output is synchronized with the output timing of the low level L pulse of the anode line La, and the scanning line Ls. The time lengths of the ON level ON pulse and the low level L pulse of the anode line La are substantially the same. The period during which the ON level ON pulse of the scanning line Ls and the low level L pulse of the anode line La are output is the selection period TSE of the row. Further, each row of the selection period T SE data driver during the in accordance with the control signal group which is outputted from the control circuit all the columns of the data line Ld to the sink current (i.e., current toward the data driver) generates. Here, the data driver causes a sink current to flow through the data line Ld of the j-th column of each column with a current value according to the image data received by the control circuit.

The current flow and voltage application of each pixel 30 will be described in detail. At the start time t 1 of the i-th selection period T SE , a high level (on level ON) pulse is output from the scan driver to the i-th scan line Ls, and the time t 1 to time t 2 are selected. the scan line Ls between the i-th row of the period T SE is applied to the first selection level scanning signal voltage at which the transistor Tr11 and the second selection transistor Tr12 is turned on is the i-th row of scan lines Ls. Furthermore, at the start time t 1 of the selection period T SE of the i-th row, a low level L pulse signal is output from the power supply driver to the anode line La of the i-th row, and then to the anode line La during the selection period T SE. A power supply signal voltage equal to or lower than the reference potential Vss is applied. Further, during the selection period TSE , the data driver passes a sink current having a predetermined current value in accordance with the image data received by the control circuit.

Therefore, in the selection period T SE, the first selection transistor Tr11 is turned on, a current flows from the drain to the source, light emission driving voltage to one end of the gate and the capacitor 13 of the transistor Tr13 is applied, the light emission drive transistor Tr13 Turn on. Further, in the selection period T SE , the second selection transistor Tr12 is turned on, and the sink current for current control by the data driver whose voltage value is lower than the power supply signal voltage V and lower than the reference voltage Vss is the data line Ld of each column. Therefore, the potential of the source electrode 13s of the light emission drive transistor Tr13 becomes lower than the potential of the drain electrode 13d.

Since the potential of the gate electrode 13g of the light emission drive transistor Tr13 is equal to the potential of the drain electrode 13d, a potential difference is generated between the gate and the source of the light emission drive transistor Tr13, and the data line Ld follows the voltage specified by the data driver. The sink current I having the current value (that is, the current value according to the image data) flows in the direction indicated by the arrow K. Note that, during the selection period T SE , the power supply signal voltage of the anode line La is equal to or lower than the reference voltage H. Therefore, the anode potential of the organic EL element 21 is lower than the cathode potential, and the organic EL element 21 has a reverse bias voltage. It will be applied. Therefore, the current from the anode line La does not flow through the organic EL element 21.

  At this time, both ends of the capacitor 13 of each pixel 30 become a voltage according to the current value of the current flowing through the drain 13d-source electrode 13s of the light emission driving transistor Tr13 based on the gradation signal controlled by the data driver. That is, the charge that causes a potential difference between the gate and the source of each light emission drive transistor Tr13 that causes the current I according to the gradation signal to flow through the light emission drive transistor Tr13 of each pixel 30 to the capacitor 13 of each pixel 30. Is charged.

  Here, the potential at an arbitrary point such as the wiring from the light emission driving transistor Tr13 to the data line Ld in the j-th column varies depending on the internal resistance of the second selection transistor Tr12 to the light emission driving transistor Tr13 that changes over time. However, when the grayscale signal of the data driver is a current signal having a current value corresponding to the grayscale, the resistance of the second selection transistor Tr12 to the light emission drive transistor Tr13 is increased so that the gate-source region of the light emission drive transistor Tr13 is increased. The current value of a predetermined gradation of the current flowing in the direction indicated by the arrow K does not change even if the potential of the current changes.

The end time t 2 of the selection period T SE, the low level pulse is output to the scan line Ls of the i-th row from the scan driver is switched to the off-level OFF from ON level ON, output from the power supply driver anode line La Switch from L to high level H. Accordingly, during the non-selection period T NSE from the end time t 1 to the start time t 1 of the next selection period T SE , the gate of the first selection transistor Tr 11 and the second selection transistor Tr 12 are included in the i-th scanning line Ls. a gate to the scan signal voltage V Xi off level oFF (low level) is applied, than the power supply signal voltage reference potential Vss and the selection period T potential low level L output to the SE applied to the anode line La The power supply voltage H is at a sufficiently high level.

Therefore, as shown in FIG. 18B, in the non-selection period T NSE , the second selection transistor Tr12 in the non-selected state is turned off, and no current flows through the second selection transistor Tr12. Further, in the non-selection period T NSE , the first selection transistor Tr11 is turned off, the capacitor 13 continues to hold the charge charged by one end and the other end thereof, and the light emission drive transistor Tr13 maintains the on state. to continue. That is, in the previous selection period T SE of the non-selection period T NSE of the non-selection period T NSE Toko, a gate of the light emission drive transistor Tr 13 - source voltage value V GS is equal. Therefore, even during the non-selection period T NSE , the light emission drive transistor Tr13 continues to flow a current value according to the image data, and the current value of the non-selection period T NSE is equal to the selection period T SE before this non-selection period T NSE. Is equal to the current value of During the non-selection period T NSE, the current flowing through the light emission drive transistor Tr13 flows into the organic EL element 21, and emits light with luminance according to the current value of the current flowing through the organic EL element 21. In this way, the organic EL element 21 emits light at a luminance gradation according to the gradation signal.

When the selection period T SE of the scan line Ls of the i-th row is finished, subsequently (i + 1) selection period T SE of th scanning line Ls is started, the i-th row of scan lines Ls as well as the scan driver, the power driver The data driver and the control circuit operate. Thus, after the selection period for all the scanning lines Ls is sequentially ended, the selection period T SE of the scan line Ls is started again. As described above, the light emission period TEM in which each pixel emits light during one scanning period T SC substantially corresponds to the non-selection period T NSE .

  Next, a method for manufacturing a bottom emission type display device according to the present embodiment will be described with reference to FIGS. Note that the first selection transistor Tr11 has substantially the same structure as the second selection transistor Tr12, and is formed in the same process as the second selection transistor Tr12.

  First, a pixel substrate 31 made of a glass substrate or the like is prepared. A transparent conductive film such as ITO is deposited on the pixel substrate 31 by sputtering, vacuum evaporation, or the like, and then a capacitor electrode Cs1 is patterned by photolithography. Next, on the pixel substrate 31, for example, a gate conductive film made of a Mo film, a Cr film, an Al film, a Cr / Al laminated film, an AlTi alloy film or an AlNdTi alloy film, a MoNb alloy film, or the like by sputtering, vacuum deposition, or the like. A film is formed and patterned into the shapes of the gate electrodes 12g and 13g of the transistors Tr12 and Tr13 and the data line Ld as shown in FIG. At this time, the gate electrode 13g of the light emission drive transistor Tr13 and the source electrode 11s of the first selection transistor Tr11 are formed in the contact portions 44 and 43 so as to overlap a part of the capacitor electrode Cs1, respectively, but become the capacitor electrode Cs1. Since a transparent metal oxide such as ITO has a high contact resistance with Al, the gate conductive film is preferably a Mo film or a MoNb alloy film having a relatively low contact resistance with a transparent metal oxide such as ITO. In the case of the top emission type, the capacitor electrode Cs1 is formed integrally with the gate electrode 13g of the light emission drive transistor Tr13 and the source electrode 11s of the first selection transistor Tr11 by patterning the gate conductive film. There are no material restrictions.

  Subsequently, as shown in FIG. 5B, an insulating film 32 is formed on the gate electrodes 12g and 13g, the capacitor electrode Cs1, and the data line Ld by a CVD (Chemical Vapor Deposition) method or the like.

  Next, semiconductor layers 121 and 131 of the transistors Tr12 and Tr13 are formed on the insulating film 32 by a CVD method or the like. Further, protective insulating films 122 and 132 are formed on the upper surfaces of the semiconductor layers 121 and 131 of the transistors Tr12 and Tr13, and ohmic contact layers 124, 125, 134, and 135 in which n-type impurities are contained in amorphous silicon are shown in FIG. To form.

  Next, a transparent conductive film such as ITO or a light-reflective conductive film and a transparent conductive film such as ITO are coated on the insulating film 32 by sputtering, vacuum deposition, or the like, and then patterned by photolithography to form the pixel electrode 34. Form. Subsequently, contact portions 41 to 43 which are through holes are formed in the insulating film 32, and then a source-drain conductive film is coated by a sputtering method, a vacuum deposition method, or the like, and is patterned by photolithography. As shown in FIG. 5B, drain electrodes 12d and 13d, source electrodes 12s and 13s, a scanning line Ls, and an anode line La are formed. At this time, the source electrode 13s of the light emission drive transistor Tr13 and the drain electrode 12d of the second selection transistor Tr12 are formed so as to overlap with part of the pixel electrode 34, respectively. In addition to the contact portions 41 to 43, contact holes that expose the connection terminal portions of the scanning lines Ls and the connection terminal portions of the data lines Ld may be formed in the insulating film 32. Further, if a conductive film to be the pixel electrode 34 is deposited after forming the contact holes and the contact portions 41 to 43 and then patterned by photolithography, the pixel electrode 34 is formed and the contact holes and the contact portions 41 are formed. -43, the connection part of the three-layer structure which interposes the electrically conductive film used as the pixel electrode 34 between a gate electrically conductive film and a source-drain electrically conductive film can be formed.

  Subsequently, as shown in FIG. 5C, an interlayer insulating film 35 made of a silicon nitride film is formed by CVD or the like so as to cover the transistors Tr12, Tr13 and the like. A light-shielding film is deposited on the entire pixel substrate 31 including a region covering the first selection transistor Tr11 and a region covering the second selection transistor Tr12 on the interlayer insulating film 35 by a sputtering method, a vacuum evaporation method, or the like. The light shielding film 33 is selectively formed in these regions by patterning. Further, the light shielding film 33 is not formed in the region covering the light emission drive transistor Tr13. Then, an opening 35a is formed in the interlayer insulating film 35 by photolithography.

  Next, photosensitive polyimide is applied so as to cover the interlayer insulating film 35 and the light shielding film 33, and is patterned by exposure and development through a mask corresponding to the shape of the partition wall 39, as shown in FIG. A partition wall 39 is formed. In addition, when the light shielding film 33 is conductive, capacitive coupling and a back gate effect occur between the first selection transistor Tr11 and the second selection transistor Tr12, so that the light shielding film 33 is not directly above the interlayer insulating film 35 but directly above the partition wall 39. Preferably it is formed.

  Subsequently, an organic compound-containing liquid containing a hole injection material is selected on the pixel electrode 34 surrounded by the opening 35a by a nozzle printing apparatus that continuously flows or an inkjet apparatus that discharges the liquid as a plurality of individual droplets. Apply it. Subsequently, the pixel substrate 31 is heated in an air atmosphere to volatilize the solvent of the organic compound-containing liquid, thereby forming the hole injection layer 36. The organic compound-containing liquid may be applied in a heated atmosphere.

  Subsequently, an organic compound-containing liquid containing a material that becomes the interlayer 37 is applied onto the hole injection layer 36 using a nozzle printing apparatus or an inkjet apparatus. The interlayer 37 is formed by performing heat drying in a nitrogen atmosphere or heat drying in a vacuum to remove the residual solvent. The organic compound-containing liquid may be applied in a heated atmosphere.

  Next, an organic compound-containing liquid containing a light emitting polymer material (R, G, B) is similarly applied by a nozzle printing device or an ink jet device and heated in a nitrogen atmosphere to remove the residual solvent, and the light emitting layer 38 is formed. The organic compound-containing liquid may be applied in a heated atmosphere.

  The pixel substrate 31 formed up to the light emitting layer 38 is opposed to a two-layer structure composed of a material having a low work function such as Li, Mg, Ca, Ba and a light-reflective conductive layer such as Al by vacuum deposition or sputtering. The electrode 40 is formed. In the case of the top emission type, the counter electrode 40 is formed on a light transmissive low work function layer made of a material having a low work function such as Li, Mg, Ca, Ba such as an extremely thin film having a thickness of about 10 nm. In addition, a transparent laminated structure having a light-reflective conductive layer such as ITO having a thickness of about 100 nm to 200 nm is obtained.

Next, a sealing resin made of an ultraviolet curable resin or a thermosetting resin is applied on the pixel substrate 31 outside the display region where the plurality of pixels 30 are formed, and the pixel substrate 31 and the sealing substrate are bonded together. . Next, the sealing resin is cured by ultraviolet rays or heat to bond the pixel substrate 31 and the sealing substrate.
Through the above steps, the display device 10 is manufactured as shown in FIG.

  In the present embodiment, the light shielding film 33 is formed on the first selection transistor Tr11 and the second selection transistor Tr12 that perform the switching operation, and the light shielding film is not formed on the drive transistor Tr13 that performs the driving operation. As described above, it is possible to make light emitted from the organic EL element 21 and external light incident only on the driving transistor Tr13, and make it difficult for these lights to enter the first selection transistor Tr11 and the second selection transistor Tr12. is there.

  FIG. 8 shows the drain-source current Id with respect to the gate voltage Vg when a voltage of 10 V is applied between the drain and source in an environment where no light is incident in the amorphous silicon TFT in the initial state, and no light is incident 70. In an amorphous silicon TFT after continuous driving in which a voltage of 5 V is applied between the drain and the source at a duty of 100% and the drain-source current Id continues to flow at 2.5 μA for 50 hours at 50 ° C. It is the graph which showed the drain-source electric current Id with respect to the gate voltage Vg when the voltage of 10V is applied between source | sauce. Compared to the amorphous silicon TFT in the initial state, the gate threshold voltage is shifted in the positive direction in the amorphous silicon TFT after continuous driving. In other words, it means that the amorphous silicon TFT gate threshold voltage in which an electric current continues to flow in an environment where no light is irradiated shifts in the positive direction.

  Next, FIG. 9 shows a change in threshold voltage when an n-channel transistor using amorphous silicon is continuously driven in a state irradiated with light. FIG. 9 shows that the drain-source current Id with respect to the gate voltage Vg when a voltage of 10 V is applied between the drain and the source in an environment where no light is incident in the amorphous silicon TFT in the initial state, and light of 2500 lx is incident. In an amorphous silicon TFT after continuous driving in which a drain-source voltage is 0 V and a gate voltage of ± 15 V is continuously applied with a duty ratio of 1/240 in an environment where the temperature is 70 ° C. for 72 hours, light is not incident. It is the graph which showed the drain-source electric current Id with respect to the gate voltage Vg when the voltage of 10V is applied between drain-source below. Compared with the amorphous silicon TFT in the initial state, in the amorphous silicon TFT after continuous driving, the gate threshold voltage is shifted in the negative direction. In other words, when light is continuously irradiated with the gate voltage Vg applied to the gate, it means that the amorphous silicon TFT gate threshold voltage shifts in the negative direction.

  The light emission drive transistor Tr13 of the present embodiment is a transistor that controls the light emission of the organic EL element 21, and the change in the threshold voltage of this transistor particularly affects the light emission amount of the display device. In particular, this influence is significant when the light emission amount of the organic EL element is controlled by the voltage gradation signal. In the present embodiment, the phenomenon shown in FIG. 8 and FIG. 9 is used so that light enters the light-emitting drive transistor Tr13 that is greatly affected by the change in threshold voltage, and the shift amount of the threshold voltage in the positive direction due to aging drive is increased. Is shifted in the negative direction by the incidence of light to cancel, the threshold voltage can be maintained in a state close to or equivalent to the initial state. Thus, in this embodiment, if the change in the threshold voltage can be suppressed, the change in the light emission amount control due to the aging drive can also be suppressed.

  On the other hand, the first selection transistor Tr11 and the second selection transistor Tr12 that perform switching have a problem that leakage current increases when light is irradiated. For example, if the first selection transistor Tr1 is not sufficiently turned off, charges are accumulated in the capacitor Cs, the voltage of the capacitor Cs increases, and the current flowing through the light emission drive transistor Tr13 differs from the current in the initial state, and the organic EL element 21 There is a possibility that the emission luminance of the light is modulated. In particular, the gate electrode 13g of the light emission drive transistor Tr13 rises even though the black display (non-light emission) gradation signal is supplied, and the organic EL element 21 may emit light. Make it smaller.

The non if during the selection period T NSE is the second selection transistor Tr12 not sufficiently turned off, the non-selection period T portion of the current to be passed through the organic EL element 21 in NSE data line Ld via the second selection transistor Tr12 The organic EL element 21 does not emit light with normal luminance, and the charge accumulated in the capacitor Cs of the pixel 30 connected to the data line Ld that was in the selection period TSE at that time is a desired value. It will not become.
For this reason, it is preferable to suppress the incidence of light for the transistors that perform these switching operations. Also, these transistors are smaller in size than the light emission drive transistor Tr13, and there is no problem because the influence of the change in threshold voltage due to aging is smaller than that in Tr13.

  As described above, according to the display device and the manufacturing method of the display device of the present embodiment, the light-shielding film is formed only on the transistor that performs the switching operation, and the light enters the light-emitting drive transistor. It is possible to provide a display device and a display device manufacturing method capable of suppressing a change in threshold voltage due to the aging drive.

(Second Embodiment)
A display device and a method for manufacturing the display device according to a second embodiment of the present invention will be described with reference to the drawings. The difference between the display device of this embodiment and the first embodiment described above is that, in this embodiment, no light shielding film is formed on the organic EL element, and a recess is formed on the upper surface of the partition wall. Portions common to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  FIG. 10 shows a cross-sectional view of the display device of this embodiment. FIG. 10 corresponds to a cross-sectional view taken along line IV-IV in FIG. 3 of the first embodiment.

  As in the first embodiment, the display device 10 according to the present embodiment includes three pixels 50 of red (R), green (G), and blue (B) on the pixel substrate 31 as a set. A plurality of pixels are repeatedly arranged in the direction (left and right direction in FIG. 1), and a plurality of pixels of the same color are arranged in the column direction (up and down direction in FIG. 1). Each pixel 50 includes an organic EL element 22 that emits RGB light and a pixel circuit DS that actively operates the organic EL element.

  Similar to the first embodiment, the pixel circuit DS includes a first selection transistor Tr11, a second selection transistor Tr12, a light emission drive transistor Tr13, a capacitor Cs, and an organic EL element 22.

  As in the first embodiment, the organic EL element 22 includes a pixel electrode 34, a partition wall 51, an interlayer insulating film 35, a hole injection layer 36, an interlayer 37, a light emitting layer 38, a counter electrode 40, Is provided.

  In the present embodiment, the partition wall 51 is formed of an insulating material such as photosensitive polyimide. The partition wall 51 is formed in a stripe shape as in the first embodiment, and includes an opening 51b. Further, in the partition wall 51, a recess 51a is formed in a region facing the first selection transistor Tr11 and the second selection transistor Tr12, and no recess 51a is formed in a region facing the light emission drive transistor Tr13. The recess 51a has a cross-sectional shape of, for example, a substantially triangular shape, and is hollowed out so as to be a quadrangular pyramid-shaped cavity, such as a square shape when viewed from above. Further, on the upper surface of the partition wall 51, a counter electrode 40 composed of two layers of a metal layer made of Li, Mg, Ba, Ca or the like having a low work function and a highly reflective metal layer made of aluminum or the like is formed. By forming the recess 51a, the light and external light emitted from the organic EL element are diffusely reflected and diffused on the surface of the recess 51a as shown schematically in FIG. 11, so that the recess 51a is formed. It is possible to suppress the amount of light incident on the region immediately below. It is preferable that the inclination angle of the recess 51a is 45 ° ± 15 ° so that the incident light is easily reflected. The shape of the recess 51a is not limited to a quadrangular pyramid, and may be a cone.

  Next, a method for manufacturing the display device 10 according to the present embodiment will be described with reference to FIGS.

  First, the transistors Tr11 to Tr13, the pixel electrode 34, the interlayer insulating film 35, and the like are formed on the pixel substrate 31 in the same manner as the manufacturing method of the display device 10 of the first embodiment described above.

  Next, as shown in FIG. 12A, an uncured resin 81 such as a photosensitive material, for example, positive photosensitive polyimide is applied on the pixel substrate 31. Subsequently, exposure is performed through a mask 80 as shown in FIG. At this time, a mesh-like slit 80b formed corresponding to the region where the recess 51a is formed is further formed in the mask 80 having the opening 80a corresponding to the region where the organic EL element 22 is formed. Thus, by providing the slit 80b in the mask and further adjusting the opening width of the slit 80b as appropriate, the exposure amount of the polyimide can be adjusted, and the depth of the recess 51a can be adjusted as appropriate. When a negative photosensitive material is used, the opening and slit of the mask are reversed from the negative type. Thereafter, development and baking are performed to form partition walls 51 as shown in FIG.

Next, the hole injection layer 36, the interlayer 37, the light emitting layer 38, and the counter electrode 40 are formed on the partition wall 51 as in the first embodiment. Subsequently, a sealing resin made of an ultraviolet curable resin or a thermosetting resin is applied, and the pixel substrate 31 and the sealing substrate are bonded together. Next, the sealing resin is cured by ultraviolet rays or heat to bond the pixel substrate 31 and the sealing substrate.
Through the above steps, the display device 10 is manufactured as shown in FIG.

  As described above, in the present embodiment, by forming the recess 51a on the upper surface of the partition wall 51, light emitted from the organic EL element 22, external light, or the like is incident on the light emission drive transistor Tr13, and the first selection is performed. It can be made difficult to enter the transistor Tr11 and the second selection transistor Tr12. As a result, light enters the light emitting drive transistor Tr13 that is greatly affected by the change in the threshold voltage, and the shift in the positive direction of the threshold voltage due to the aging drive is shifted in the negative direction by the light to cancel each other. It is possible to maintain the threshold voltage close to the initial state.

  In particular, in the present embodiment, when forming the partition wall 51, a photosensitive material is used, and the recess 51a is simultaneously formed by providing a slit or the like in the mask. For this reason, the recessed part 51a which suppresses the light which injects into transistor Tr11, Tr12 can be formed without increasing a process especially, and does not increase manufacturing cost.

  As described above, according to the display device and the display device manufacturing method of the present embodiment, it is possible to provide a display device and a display device manufacturing method capable of suppressing a change in threshold voltage due to aged driving of a drive element. .

(Third embodiment)
A display device according to a third embodiment of the present invention will be described with reference to the drawings.
The display device of this embodiment is different from the above-described first embodiment. In the first embodiment, the pixel driving circuit includes three transistors. However, in this embodiment, the pixel circuit DS2 of the pixel is It is in the point provided with two transistors. Features common to the first embodiment are assigned the same reference numerals, and detailed descriptions thereof are omitted.

  A pixel circuit DS2 of this embodiment is shown in FIG. Further, a plan view of the pixel 60 of the present embodiment is shown in FIG. 15, and a cross-sectional view taken along the line XVI-XVI shown in FIG. 15 is shown in FIG. In FIG. 16, in order to clarify the position of the light shielding film 33, a cross-sectional view of the region where the gate electrode 21 g of the selection transistor Tr 21 is formed is shown. Therefore, in FIG. 16, only the semiconductor layer 211 and the gate electrode 21g of the selection transistor Tr21 are shown, but the structures of the selection transistor Tr21 and the light emission drive transistor Tr22 are the same as those in the first embodiment described above.

  As shown in FIG. 14, the pixel circuit DS2 of the present embodiment includes a selection transistor Tr21, a light emission drive transistor Tr22, a capacitor Cs, and an organic EL element 23. The transistor Tr21 has a gate terminal connected to the scanning line Ls, a drain terminal connected to the data line Ld, and a source terminal connected to the contact N11. The gate terminal of the transistor Tr22 is connected to the contact N11, the drain terminal is connected to the anode line La, and the source terminal is connected to the contact N12. The capacitor Cs is connected to the gate terminal and the source terminal of the transistor Tr12. Note that the capacitor Cs is an auxiliary capacitance additionally provided between the gate and the source of the transistor Tr12 or a capacitance component composed of these parasitic capacitance and auxiliary capacitance. The organic EL element 23 has an anode terminal (anode electrode) connected to the contact N12 and a cathode terminal (cathode electrode) connected to the cathode line (common voltage line).

  The organic EL element 23 includes a pixel electrode 34, a light shielding film 33, an interlayer insulating film 35, a hole injection layer 36, an interlayer 37, a light emitting layer 38, a partition wall 39, a counter electrode 40, Is provided.

  In the present embodiment, as shown in the pixel circuit DS2, the selection transistor Tr21 performs a switching operation. For this reason, as shown in FIGS. 15 and 16, the light shielding film 33 is formed on the selection transistor Tr21, and the light shielding film 33 is not formed on the drive transistor Tr22. As a result, the light shielding film 33 is formed only on the transistor Tr21 that performs the switching operation as in the first embodiment, and the light enters the light emitting drive transistor Tr21. It is possible to provide a display device capable of suppressing changes and a method for manufacturing the display device.

(Fourth embodiment)
This embodiment is different from the above-described embodiments. In this embodiment, a circuit for driving a pixel includes two transistors, one selection transistor and one light emission driving transistor, as in the third embodiment. In addition, the light shielding film is not formed on the interlayer insulating film, and the concave portion is formed on the upper surface of the partition wall. Parts common to the above-described embodiment are given the same reference numerals, and detailed description thereof is omitted.

  A pixel 70 of this embodiment is shown in FIG. The pixel 70 of the present embodiment and the pixel 60 of the third embodiment have substantially the same planar shape except that a light shielding film or a recess is formed, and FIG. 17 is a diagram of the above-described third embodiment. It corresponds to 15 XVI-XVI line sectional view. FIG. 17 also shows a cross-sectional view of a region where the gate electrode 21g of the selection transistor Tr21 is formed in order to clarify the position of the recess. Therefore, in FIG. 17, only the semiconductor layer 211 and the gate electrode 21g of the selection transistor Tr21 are illustrated, but the structures of the selection transistor Tr21 and the light emission drive transistor Tr22 are the same as those in the first embodiment described above.

  Similar to the third embodiment described above, the organic EL element 24 and the pixel circuit DS2 of the pixel are provided. The organic EL element 24 includes a pixel electrode 34, an interlayer insulating film 35, a hole injection layer 36, an interlayer 37, a light emitting layer 38, a partition wall 51, and a counter electrode 40.

  In the organic EL element 24 of the present embodiment, as shown in FIG. 17, a recess 52 a is formed in a region facing the selection transistor Tr 21 on the upper surface of the partition wall 52. As shown in FIG. 11 of the second embodiment, light and external light emitted from the organic EL element 24 are reflected by the concave portion 51a by the concave portion 52a, and are transmitted to the selection transistor Tr21 formed immediately below the concave portion 51a. The incidence of light can be suppressed. On the other hand, since the recess 51a is not formed on the light emission drive transistor Tr22, these lights are incident. As a result, it is possible to suppress changes in the threshold voltage as described above.

The present invention is not limited to the above-described embodiments, and various modifications and applications are possible.
For example, in each of the above-described embodiments, the configuration in which the pixel is driven by the voltage gradation signal has been described as an example. However, the present invention is not limited thereto, and the write signal that controls the light emission amount of the organic EL element by adjusting the current amount is used. There may be. Even if the current write signal can suppress an increase in the threshold voltage, it is possible to suppress the threshold voltage shift and to operate normally, and from the point that the amount of current flowing to the organic EL element can be reduced. Useful.

  In the above-described embodiments, the bottom emission type organic EL element has been described as an example. However, the present invention is not limited to this, and can be used for a top emission type organic EL element.

  In each of the above-described embodiments, for example, as illustrated in FIG. 3, an example in which a light-shielding film or a recess is formed in a region facing a transistor that performs a switching operation and having substantially the same area as these transistors has been described. Not limited to this. As long as light can be incident on the light emitting drive transistor satisfactorily and light incident on the transistor performing the switching operation can be suppressed, the light emitting driving transistor may be formed larger or smaller than the area of the transistor performing the switching operation. Further, the planar shape of the light shielding film is not limited to a square, and may be a circle or a polygon, and can be arbitrarily formed.

  DESCRIPTION OF SYMBOLS 10 ... Display apparatus, 30, 50, 60, 70 ... Pixel, 21, 22, 23, 24 ... Organic EL element, 31 ... Pixel substrate, 32 ... Insulating film, 33 ... -Light shielding film, 34 ... Pixel electrode, 35 ... Interlayer insulating film, 36 ... Hole injection layer, 37 ... Interlayer, 38 ... Light emitting layer, 39, 51 ... Partition, 40 ... Counter electrode, 51a ... Concave, Cs ... Capacitor, La ... Anode line, Lc ... Connection wiring, Ld ... Data line, Ls ... Scan line, Tr11 ... First selection transistor, Tr12 ... second selection transistor, Tr13 ... light emission drive transistor

Claims (7)

  1. A light emitting device formed on a substrate;
    A driving element that is formed on the substrate and controls a current flowing through the light emitting element;
    A switching element for switching the drive element;
    An insulating film will covering the drive element and the switching element,
    Equipped with a,
    Wherein the upper surface of the insulating film, a display device which is characterized that you have been recesses formed only in a region facing the switching element.
  2. The insulating film has a protective insulating film and a partition,
    The display device according to claim 1, further comprising a counter electrode formed so as to cover the partition wall and formed of a conductive material having reflectivity.
  3. Forming a driving element for controlling a current flowing through the light emitting element and a switching element for switching the driving element on the substrate;
    Forming an insulating film on the driving element and the switching element;
    Forming a recess only in a region facing the switching element on the upper surface of the insulating film ;
    A method for manufacturing a display device, comprising:
  4.   The method for manufacturing a display device according to claim 3, wherein the insulating film includes a protective insulating film and a partition, and the partition is formed of a photosensitive material.
  5. The partition is formed by exposing and developing the photosensitive material,
    The amount of light incident on the photosensitive resin in the region corresponding to the recess is different from the amount of light incident on the photosensitive resin in the region other than the recess. Method of manufacturing the display device.
  6. The display device according to claim 1, wherein a cross-sectional shape of the insulating film in the thickness direction in the concave portion has at least one triangular shape.
  7. The display device according to claim 3, wherein in the step of forming the concave portion, the concave portion is formed so that a cross-sectional shape in the thickness direction of the insulating film in the concave portion has at least one triangular shape. Manufacturing method.
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