JP4982068B2 - 位置測定システム - Google Patents
位置測定システム Download PDFInfo
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- JP4982068B2 JP4982068B2 JP2005302494A JP2005302494A JP4982068B2 JP 4982068 B2 JP4982068 B2 JP 4982068B2 JP 2005302494 A JP2005302494 A JP 2005302494A JP 2005302494 A JP2005302494 A JP 2005302494A JP 4982068 B2 JP4982068 B2 JP 4982068B2
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- 238000005259 measurement Methods 0.000 title claims abstract description 55
- 230000002452 interceptive effect Effects 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims description 18
- 239000013307 optical fiber Substances 0.000 claims description 17
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 230000001419 dependent effect Effects 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 description 7
- 238000011156 evaluation Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000012958 reprocessing Methods 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Optical Transform (AREA)
- Vehicle Body Suspensions (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Radar Systems Or Details Thereof (AREA)
Description
2 HF変調器
3 シングルモード・レーザーダイオード
4.1,4.2,4.3,4.4 集束レンズ
5.1,5.2,5.3,5.4 光ファイバー
6 ファイバーカップラー
7 コリメータレンズ
8 基準尺
9 走査格子
10.1,10.2 1/4波長板
11 分割格子
12.1,12.2,12.3 偏光フィルター
13.1,13.2,13.3 光検出器
14 後続の電子機器(評価電子機器)
15 増幅器
16 光学フィルター
17 評価回路
A 振幅
I 動作電流
P 位置の値(信号)
T 温度
λ 波長
Claims (9)
- 二つの物体の相対位置を測定する位置測定システムであって、電流供給ユニット(1,2)からレーザー光源(3)に可変動作電流が供給され、レーザー光源(3)からの光が、反射型基準尺(8)上で反射されて、そこで+1次と−1次の二つの光ビーム(+1,−1)に分割され、それらの光ビーム(+1,−1)が、二つの対称的な分岐測定光路を進んで向きを反転して、改めて基準尺(8)に達し、そこで一つの光線に統合された後、分割格子(11)により別々の光線に分けられ、それらの別々の光線が、異なる方向を向いた偏光フィルター(12.1,12.2,12.3)を通過して、光検出器(13.1,13.2,13.3)に達し、光検出器(13.1,13.2,13.3)が、それらの別々の光線から、二つの物体の相対位置に依存する位相のずれた信号(−120°,0°,+120°)を発生させて後続の電子機器(14)に供給し、後続の電子機器(14)が、それらの位相のずれた信号から、二つの物体の相対位置に関する位置信号(P)を出力する位置測定システムにおいて、
測定動作では、交流電流成分を重畳された直流電流が、電流供給ユニット(1,2)からレーザー光源(3)に供給されることと、
後続の電子機器(14)が、位相のずれた信号(−120°,0°,+120°)から、交流電流成分の周波数を有する位相変調成分の振幅(A)も出力することができることと、
その振幅(A)が消滅するか、或いは所定の限界値を下回るように、分岐測定光路内の光学部品を機械的に調整することによって、これらの干渉する光ビーム(+1,−1)の経路長の相違を調整することができることと、
を特徴とする位置測定システム。 - レーザー光源(3)が、シングルモード・レーザーダイオードであることを特徴とする請求項1に記載の位置測定システム。
- 当該の電流供給ユニットが、レーザーダイオード・ドライバー(1)とHF変調器(2)から構成されることを特徴とする請求項1に記載の位置測定システム。
- 当該の交流電流成分の周波数が、1MHz〜1000MHzの間に有ることを特徴とする請求項1に記載の位置測定システム。
- 当該の交流電流成分の振幅が、この交流電流成分を重畳された直流電流の10%以上であることを特徴とする請求項1に記載の位置測定システム。
- シングルモード・レーザーダイオード(3)が、このシングルモード・レーザーダイオード(3)を強制的にマルチモード動作させるフィードバック手段(5.1)と接続されていることを特徴とする請求項2に記載の位置測定システム。
- フィードバック手段(5.1)が光ファイバーであり、この光ファイバーが、シングルモード・レーザーダイオード(3)において複数のレーザーモードを励起するための外部共振器を構成するように、その長さが選定されていることを特徴とする請求項6に記載の位置測定システム。
- HF変調器(2)と後続の電子機器(4)を、互いに同期させていることを特徴とする請求項3に記載の位置測定システム。
- 二つの物体の相対位置を測定する位置測定システムで、干渉する光ビーム(+1,−1)の経路長の相違を調整する方法であって、電流供給ユニット(1,2)からレーザー光源(3)に可変動作電流が供給され、レーザー光源(3)からの光が、反射型基準尺(8)上で反射されて、そこで+1次と−1次の二つの光ビーム(+1,−1)に分割され、それらの光ビーム(+1,−1)が、二つの対称的な分岐測定光路を進んで向きを反転して、改めて基準尺(8)に達し、そこで一つの光線に統合された後、分割格子(11)により別々の光線に分けられ、それらの別々の光線が、異なる方向を向いた偏光フィルター(12.1,12.2,12.3)を通過して、光検出器(13.1,13.2,13.3)に達し、光検出器(13.1,13.2,13.3)が、それらの別々の光線から、二つの物体の相対位置に依存する位相のずれた信号(−120°,0°,+120°)を発生させて後続の電子機器(14)に供給し、後続の電子機器(14)が、それらの位相のずれた信号から、二つの物体の相対位置に関する位置信号(P)を出力する方法において、
測定動作では、交流電流成分を重畳された直流電流を電流供給ユニット(1,2)からレーザー光源(3)に供給することと、
後続の電子機器(14)が、位相のずれた信号(−120°,0°,+120°)から、交流電流成分の周波数を有する位相変調成分の振幅(A)も出力することと、
その振幅(A)が消滅するか、或いは所定の限界値を下回るように、分岐測定光路内の光学部品を機械的に調整することによって、これらの干渉する光ビーム(+1,−1)の経路長の相違を調整することと、
を特徴とする方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004053082A DE102004053082A1 (de) | 2004-11-03 | 2004-11-03 | Positionsmesssystem |
DE102004053082.3 | 2004-11-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006133222A JP2006133222A (ja) | 2006-05-25 |
JP4982068B2 true JP4982068B2 (ja) | 2012-07-25 |
Family
ID=35966011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005302494A Active JP4982068B2 (ja) | 2004-11-03 | 2005-10-18 | 位置測定システム |
Country Status (6)
Country | Link |
---|---|
US (1) | US20060092428A1 (ja) |
EP (1) | EP1655582B1 (ja) |
JP (1) | JP4982068B2 (ja) |
CN (1) | CN1769835B (ja) |
AT (1) | ATE441090T1 (ja) |
DE (2) | DE102004053082A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006041357A1 (de) * | 2005-11-09 | 2007-05-10 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung und Verfahren zum Betrieb einer Positionsmesseinrichtung |
US7389595B2 (en) * | 2005-11-09 | 2008-06-24 | Dr. Johannes Heidenhain Gmbh | Position-measuring device and method for operating a position-measuring device |
DE102009054592A1 (de) * | 2009-12-14 | 2011-06-16 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
DE102010041330A1 (de) * | 2010-09-24 | 2012-03-29 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmessvorrichtung |
DE102011082156A1 (de) | 2010-12-16 | 2012-06-21 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
EP2589982A1 (de) * | 2011-11-03 | 2013-05-08 | Leica Geosystems AG | Laserdiode als Interferometer-Laserstrahlquelle in einem Lasertracker |
EP2776790B1 (en) | 2011-11-09 | 2016-09-14 | Zygo Corporation | Compact encoder head for interferometric encoder system |
US9025161B2 (en) * | 2011-11-09 | 2015-05-05 | Zygo Corporation | Double pass interferometric encoder system |
CN102607429A (zh) * | 2012-03-30 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | 光栅线位移测量方法及测量装置 |
JP6111852B2 (ja) * | 2013-05-20 | 2017-04-12 | 株式会社ニコン | エンコーダ装置 |
DE102015209117A1 (de) * | 2014-06-05 | 2015-12-10 | Dr. Johannes Heidenhain Gmbh | Interferentielle Positionsmesseinrichtung und Verfahren zum Betrieb einer interferentiellen Positionsmesseinrichtung |
CN109855530B (zh) * | 2017-11-30 | 2021-03-09 | 上海微电子装备(集团)股份有限公司 | 干涉仪系统及其使用方法 |
CN110631484B (zh) * | 2019-11-04 | 2021-04-06 | 南京师范大学 | 基于激光自混合光栅干涉的三维位移测量系统及测量方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0146244B2 (en) | 1983-11-04 | 2002-07-03 | Sony Precision Technology Inc. | Optical instrument for measuring displacement |
JPH0718714B2 (ja) | 1988-05-10 | 1995-03-06 | キヤノン株式会社 | エンコーダー |
JP2808136B2 (ja) * | 1989-06-07 | 1998-10-08 | キヤノン株式会社 | 測長方法及び装置 |
GB9003221D0 (en) * | 1990-02-13 | 1990-04-11 | Optical Measuring Systems Limi | Electronic distance measurement |
GB2336050B (en) * | 1998-03-31 | 2003-03-26 | Marconi Gec Ltd | Improvements in or relating to remote air detection |
DE19941318A1 (de) * | 1999-08-31 | 2001-03-15 | Heidenhain Gmbh Dr Johannes | Optische Positionsmeßeinrichtung |
TWI282909B (en) * | 1999-12-23 | 2007-06-21 | Asml Netherlands Bv | Lithographic apparatus and a method for manufacturing a device |
JP3874160B2 (ja) | 2000-07-25 | 2007-01-31 | 横河電機株式会社 | 位置検出装置 |
JP3668129B2 (ja) * | 2000-12-25 | 2005-07-06 | 株式会社ミツトヨ | 光学式寸法測定方法及び装置 |
DE10235669B4 (de) | 2002-08-03 | 2016-11-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
JP4046323B2 (ja) * | 2002-08-08 | 2008-02-13 | フジノン株式会社 | 平行度測定方法 |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
US7122791B2 (en) * | 2004-09-03 | 2006-10-17 | Agilent Technologies, Inc. | Capillaries for mass spectrometry |
-
2004
- 2004-11-03 DE DE102004053082A patent/DE102004053082A1/de not_active Withdrawn
-
2005
- 2005-10-11 EP EP05022085A patent/EP1655582B1/de active Active
- 2005-10-11 DE DE502005007980T patent/DE502005007980D1/de active Active
- 2005-10-11 AT AT05022085T patent/ATE441090T1/de not_active IP Right Cessation
- 2005-10-18 JP JP2005302494A patent/JP4982068B2/ja active Active
- 2005-11-02 US US11/265,967 patent/US20060092428A1/en not_active Abandoned
- 2005-11-03 CN CN2005101200400A patent/CN1769835B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
DE502005007980D1 (de) | 2009-10-08 |
JP2006133222A (ja) | 2006-05-25 |
US20060092428A1 (en) | 2006-05-04 |
DE102004053082A1 (de) | 2006-05-04 |
CN1769835A (zh) | 2006-05-10 |
ATE441090T1 (de) | 2009-09-15 |
EP1655582A3 (de) | 2007-04-18 |
EP1655582B1 (de) | 2009-08-26 |
CN1769835B (zh) | 2011-06-08 |
EP1655582A2 (de) | 2006-05-10 |
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