JP4978245B2 - Needle-shaped body, needle-shaped body manufacturing method, and drug transport device - Google Patents
Needle-shaped body, needle-shaped body manufacturing method, and drug transport device Download PDFInfo
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- JP4978245B2 JP4978245B2 JP2007058173A JP2007058173A JP4978245B2 JP 4978245 B2 JP4978245 B2 JP 4978245B2 JP 2007058173 A JP2007058173 A JP 2007058173A JP 2007058173 A JP2007058173 A JP 2007058173A JP 4978245 B2 JP4978245 B2 JP 4978245B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 239000003814 drug Substances 0.000 title claims description 16
- 229940079593 drug Drugs 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 8
- 238000012546 transfer Methods 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 description 25
- 210000003491 skin Anatomy 0.000 description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000001647 drug administration Methods 0.000 description 9
- 229910052759 nickel Inorganic materials 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 229920000747 poly(lactic acid) Polymers 0.000 description 7
- 239000004626 polylactic acid Substances 0.000 description 7
- 210000000434 stratum corneum Anatomy 0.000 description 7
- 238000009616 inductively coupled plasma Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 210000002615 epidermis Anatomy 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- OWEGMIWEEQEYGQ-UHFFFAOYSA-N 100676-05-9 Natural products OC1C(O)C(O)C(CO)OC1OCC1C(O)C(O)C(O)C(OC2C(OC(O)C(O)C2O)CO)O1 OWEGMIWEEQEYGQ-UHFFFAOYSA-N 0.000 description 3
- 229920002307 Dextran Polymers 0.000 description 3
- GUBGYTABKSRVRQ-PICCSMPSSA-N Maltose Natural products O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@@H]1O[C@@H]1[C@@H](CO)OC(O)[C@H](O)[C@H]1O GUBGYTABKSRVRQ-PICCSMPSSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000010076 replication Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000000560 biocompatible material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- -1 for example Polymers 0.000 description 2
- 229920002529 medical grade silicone Polymers 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000037365 barrier function of the epidermis Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 235000014633 carbohydrates Nutrition 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000002537 cosmetic Substances 0.000 description 1
- 210000004207 dermis Anatomy 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 238000007876 drug discovery Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 210000005036 nerve Anatomy 0.000 description 1
- KERTUBUCQCSNJU-UHFFFAOYSA-L nickel(2+);disulfamate Chemical compound [Ni+2].NS([O-])(=O)=O.NS([O-])(=O)=O KERTUBUCQCSNJU-UHFFFAOYSA-L 0.000 description 1
- 230000000144 pharmacologic effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M37/00—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin
- A61M37/0015—Other apparatus for introducing media into the body; Percutany, i.e. introducing medicines into the body by diffusion through the skin by using microneedles
- A61M2037/0023—Drug applicators using microneedles
Description
本発明は、針状体、および該針状体の製造方法、並びに、該針状体を用いた薬物輸送デバイスに関するものである。 The present invention relates to an acicular body, a method for producing the acicular body, and a drug transport device using the acicular body.
皮膚上から薬剤を浸透させ体内に薬剤を投与する方法である経皮吸収法は、人体に痛みを与えることなく簡便に薬剤を投与することが出来る方法として用いられているが、薬剤の種類によっては経皮吸収法で投与が困難な薬剤が存在する。これらの薬剤を効率よく体内に吸収させる方法として、μmオーダーの微細な針状体(以下、単に針状体と呼称する)を用いて皮膚を穿孔し、皮膚内に直接薬剤を投与する方法が注目されている。 The percutaneous absorption method, which is a method of infiltrating a drug from the skin and administering the drug into the body, is used as a method that can be easily administered without causing pain to the human body. There are drugs that are difficult to administer by transdermal absorption. As a method of efficiently absorbing these drugs into the body, there is a method of perforating the skin using a fine needle-like body (hereinafter simply referred to as a needle-like body) on the order of μm and directly administering the drug into the skin. Attention has been paid.
針状体はバリア機能を有する表皮(より具体的には表皮の最外層に形成されている角質層)に穿孔を形成し、その穿孔から通常の経皮吸収では表皮のバリア機能に阻害されて投与不可能な薬剤をも体内に吸収させることが可能となる。この方法によれば、投薬用の特別な機器を用いることなく、簡便に薬剤を皮下投薬することが可能となる(特許文献1参照)。 The acicular body forms a perforation in the epidermis having a barrier function (more specifically, the stratum corneum formed in the outermost layer of the epidermis), and normal percutaneous absorption from the perforation is inhibited by the barrier function of the epidermis. Drugs that cannot be administered can be absorbed into the body. According to this method, it is possible to easily administer a drug subcutaneously without using a special medication device (see Patent Document 1).
この際に用いる微細な針状体の形状は、皮膚を穿孔するための十分な細さ、および先端角、皮膚の最外層である角質層を貫通し、かつ神経層へ到達しない長さ、を有していることが望ましく、具体的には、針状体の直径は数μmから100μm程度、針状体の先端角度は30°以下、針状体の長さは数十μmから数百μm程度、であることが望ましいとされている。 The shape of the fine needle-like body used here is sufficiently thin to perforate the skin, and the tip angle, the length that penetrates the stratum corneum that is the outermost layer of the skin and does not reach the nerve layer, Specifically, the diameter of the needle-shaped body is about several μm to 100 μm, the tip angle of the needle-shaped body is 30 ° or less, and the length of the needle-shaped body is several tens μm to several hundred μm. It is considered desirable to be a degree.
より具体的には、最外皮層である角質層を貫通することが求められる。角質層の厚さは人体の部位によっても若干異なるが、平均して20μm程度である。また、角質層の下にはおよそ200μmから350μm程度の厚さの表皮が存在し、さらにその下層には毛細血管が張りめぐる真皮層が存在する。このため、角質層を貫通させ薬液を浸透させるためには少なくとも20μm以上の針が必要となる。また、採血を目的とする針状体を製造する場合には、上記の皮膚の構成から少なくとも350μm以上の高さの針状体が必要となる。 More specifically, it is required to penetrate the stratum corneum that is the outermost skin layer. The thickness of the stratum corneum varies slightly depending on the part of the human body, but is about 20 μm on average. In addition, an epidermis having a thickness of about 200 μm to 350 μm exists under the stratum corneum, and further, a dermis layer in which capillaries are stretched exists under the epidermis. For this reason, in order to penetrate the stratum corneum and allow the chemical solution to penetrate, a needle of at least 20 μm or more is required. Further, when producing a needle-like body for the purpose of blood collection, a needle-like body having a height of at least 350 μm or more is required due to the above-described skin structure.
また、針状体を構成する材料としては、仮に破損した針状体先端部が体内に残留した場合でも、人体に悪影響を及ぼさない材料であることが必要であり、この材料としては医療用シリコン樹脂や、マルトース、ポリ乳酸、デキストラン等の生体適合性樹脂が有望視されている(特許文献2参照)。 In addition, the material constituting the needle-shaped body must be a material that does not adversely affect the human body even if the damaged needle-shaped body tip remains in the body. Biocompatible resins such as resins and maltose, polylactic acid, dextran, etc. are considered promising (see Patent Document 2).
また、針状体を製造する方法として、フォトリソグラフィー法を活用する方法が知られている(特許文献3参照)。
しかしながら、皮膚への穿刺に際して、針状体が破損、または変形する恐れがある。針状体の破損/変形は、針状体の機械強度の低下により発生し、薬剤投与量の低下を引き起こす。 However, when puncturing the skin, the needle-shaped body may be damaged or deformed. The breakage / deformation of the needle-shaped body occurs due to a decrease in the mechanical strength of the needle-shaped body, and causes a decrease in drug dosage.
また、特に、角質層を貫通するために、針状体を高アスペクト比(針の幅に対する高さの比)、先端角度を先鋭化などした場合、針状体の機械強度の低下の問題は顕著となる。 In particular, in order to penetrate the stratum corneum, when the needle-shaped body has a high aspect ratio (the ratio of the height to the width of the needle) and the tip angle is sharpened, the problem of the decrease in the mechanical strength of the needle-shaped body is Become prominent.
また、特に、人体への影響を低減するために針状体に生体適合性樹脂を用いる場合、選択できる材料には制限があり、材料の強度のみで破損/変形を抑制することは困難である。 In particular, when a biocompatible resin is used for the needle-like body in order to reduce the influence on the human body, there are limitations on the materials that can be selected, and it is difficult to suppress breakage / deformation only by the strength of the material. .
また、特に、薬剤投与効果を高めるために針状体を複数本の規則的に配列された形(例えば、アレイ状に針を配列)とした場合、針毎に押し込み時の荷重が異なり、この偏りを補正することが出来ないため、針状体の一部または全体が破損し、皮膚の穿刺状況にばらつきが生じ、結果として安定した薬剤投与または薬理効果を得ることが困難である。よって、薬剤投与効果や再現性を向上させることが困難であるという問題が生じる。 In particular, when the needle-like body is formed into a plurality of regularly arranged shapes (for example, the needles are arranged in an array) in order to enhance the drug administration effect, the load when pushing is different for each needle. Since the bias cannot be corrected, a part or the whole of the needle-like body is damaged, and the puncture state of the skin varies, and as a result, it is difficult to obtain a stable drug administration or pharmacological effect. Therefore, there arises a problem that it is difficult to improve the drug administration effect and reproducibility.
また、特に、針状体を専用の装置や器具を用いずに皮膚への押し込みを行う場合、皮膚の穿刺状況にばらつきは多く発生する。手押しにより皮膚へ針状体を押し込む場合、針状体にかかる荷重に偏りが発生し、一部の針状体に荷重が集中する。このため、荷重が集中した箇所の針状体が破損、または変形し、薬剤投与量の低下を招く。また、押し込みを行う皮膚の場所や状態、押し込む力のかけ具合によっても荷重の偏りは大きく異なるため、針状体の破損や変形の度合いも押し込むたびに変わり、結果として薬剤投与効果の再現性の低下につながる。 In particular, when the needle-like body is pushed into the skin without using a dedicated device or instrument, there are many variations in the skin puncture situation. When the needle-like body is pushed into the skin by hand, the load applied to the needle-like body is biased, and the load is concentrated on some needle-like bodies. For this reason, the needle-like body at the place where the load is concentrated is broken or deformed, resulting in a decrease in drug dosage. In addition, the load bias varies greatly depending on the location and state of the skin to be pushed in, and the degree of force applied, so the degree of breakage and deformation of the needles changes each time it is pushed in, resulting in the reproducibility of the drug administration effect. Leading to a decline.
そこで、本発明は、上述の問題を解決するためになされたものであり、穿刺に際して発生する針状体への荷重の偏りを補正することが可能となり、針状体の破損や変形を抑制し、安定した薬剤投与効果が得られる針状体を提供することを目的とする。 Therefore, the present invention has been made to solve the above-described problem, and it is possible to correct a load imbalance on the needle-like body that occurs during puncturing, thereby suppressing breakage and deformation of the needle-like body. An object of the present invention is to provide a needle-like body that can provide a stable drug administration effect.
請求項1に記載の本発明は、微細な針状体において、基板と、皮膚を穿刺する微細な針と、前記微細な針の近傍に補助パターンと、を備え、前記基板の同一面上に前記微細な針と前記補助パターンが形成されており、前記補助パターンの高さは、針の高さ以上の高さを有していることを特徴とする針状体である。 The present invention according to claim 1 is a fine needle-like body, comprising a substrate, a fine needle that punctures the skin, and an auxiliary pattern in the vicinity of the fine needle, on the same surface of the substrate. The fine needle and the auxiliary pattern are formed, and the height of the auxiliary pattern is higher than the height of the needle.
請求項2に記載の本発明は、請求項1に記載の針状体であって、補助パターンは、針の周囲を包囲した補助パターンであることを特徴とする針状体である。 The present invention described in claim 2 is the needle-shaped body according to claim 1, wherein the auxiliary pattern is an auxiliary pattern surrounding the periphery of the needle.
請求項3に記載の本発明は、請求項1または2のいずれかに記載の針状体であって、微細な針が、複数本規則的に配列されていることを特徴とする針状体である。 The present invention according to claim 3 is the needle-like body according to claim 1 or 2, wherein a plurality of fine needles are regularly arranged. It is.
請求項4に記載の本発明は、請求項1から3のいずれかに記載の針状体を用いた薬物輸送デバイスである。 A fourth aspect of the present invention is a drug delivery device using the needle-shaped member according to any one of the first to third aspects.
請求項5に記載の本発明は、微細な針状体の製造方法において、基板にレジストを塗布する工程と、前記レジストを針および補助パターンに併せてパターニングする工程と、前記レジストを塗布した方向から、基板にエッチングを行う工程とを備え、前記基板の同一面上に前記微細な針と前記補助パターンが形成され、かつ、前記補助パターンの高さは、針の高さ以上の高さを有する針状体を製造することを特徴とする針状体製造方法である。 According to a fifth aspect of the present invention, in the method for manufacturing a fine needle-shaped body, a step of applying a resist to a substrate, a step of patterning the resist together with a needle and an auxiliary pattern, and a direction of applying the resist And etching the substrate, the fine needle and the auxiliary pattern are formed on the same surface of the substrate, and the height of the auxiliary pattern is higher than the height of the needle. It is a needle- shaped object manufacturing method characterized by manufacturing the needle-shaped object which has .
請求項6に記載の本発明は、請求項5に記載の針状体製造方法で作製した針状体を原型とし、転写加工成形を行うことを特徴とする針状体製造方法である。 The present invention described in claim 6 is a method for manufacturing a needle-like body, wherein the needle-like body produced by the method for manufacturing a needle-like body according to claim 5 is used as a prototype, and transfer processing is performed.
本発明の針状体は、補助パターンを備え、該補助パターンの高さは針の高さより高いことを特徴とする。本発明の構成によれば、皮膚に穿刺するとき、針に先立って補助パターンが皮膚に接触するため、補助パターンにより、皮膚に対する針の進入方向を補正することが出来る。よって、皮膚への穿刺の際に、針にかかる荷重の偏りを防止することができ、針状体の破損や変形を抑制し、安定した薬剤投与効果を得ることが出来る。 The acicular body of the present invention includes an auxiliary pattern, and the height of the auxiliary pattern is higher than the height of the needle. According to the configuration of the present invention, when the skin is punctured, the auxiliary pattern comes into contact with the skin prior to the needle. Therefore, the direction in which the needle enters the skin can be corrected by the auxiliary pattern. Therefore, when the skin is punctured, the load applied to the needle can be prevented from being biased, and the needle-like body can be prevented from being damaged or deformed, and a stable drug administration effect can be obtained.
以下、本発明の針状体について説明を行う。
本発明の針状体は、
皮膚を穿刺する微細な針と、
前記微細な針の近傍に補助パターンと、を備え、
前記補助パターンの高さは、針の高さよりも高いこと
を特徴とする。
Hereinafter, the acicular body of the present invention will be described.
The needle-shaped body of the present invention is
A fine needle that punctures the skin,
An auxiliary pattern in the vicinity of the fine needle,
The height of the auxiliary pattern is higher than the height of the needle.
本発明の針状体は、薬剤投与用の針(図1・101)の周辺に、押し込み時の針状体にかかる荷重の偏りを防止するための補助パターン(図1・102)を形成することにより、押し込み時の針状体にかかる荷重を均一に分散させることが可能となる。これにより、穿刺時にかかる荷重の偏りを補正することが可能となり、針状体の破損を抑制し、安定した薬剤投与効果を得ることが可能となる。 The needle-shaped body of the present invention forms an auxiliary pattern (FIGS. 1 and 102) around the needle for drug administration (FIGS. 1 and 101) to prevent the load applied to the needle-shaped body during pressing. As a result, it is possible to uniformly disperse the load applied to the needle-like body during pushing. As a result, it is possible to correct a load bias applied during puncturing, suppress damage to the needle-like body, and obtain a stable drug administration effect.
このとき、補助パターンの形状は、皮膚への押し込みの際に針状体にかかる荷重の偏りを防止することが必要であるため、針状体が皮膚へ接触する前に皮膚に対する針状体の進入方向を補正する必要があり、具体的には針状体以上の高さを有していることが必要となる。 At this time, since the shape of the auxiliary pattern needs to prevent a load from being applied to the needle-like body when it is pushed into the skin, the shape of the needle-like body against the skin before the needle-like body contacts the skin. It is necessary to correct the approach direction, and specifically, it is necessary to have a height higher than the needle-like body.
また、補助パターンは、針の周囲を包囲した補助パターンであることが好ましい。このとき、補助パターンは薬液をせき止める囲いとして作用し、塗布した薬液が針状体の外へ流出することを抑制することが出来る。このため、補助パターンを薬剤定量用の容器として利用することが出来る。 The auxiliary pattern is preferably an auxiliary pattern surrounding the needle. At this time, the auxiliary pattern acts as an enclosure for stopping the chemical solution, and can prevent the applied chemical solution from flowing out of the needle-like body. For this reason, an auxiliary pattern can be utilized as a container for medicine quantification.
また、補助パターンの配置は、針状体のパターン部の周囲の周辺部の一部、または最外周部の針状体の形状をより強度の高い形状であっても良い。
例えば、柱状構造(図2・104)(図2・105)や球面構造(図2・106)としても良い。この場合、針の周囲を包囲する場合に比べ、穿刺時に皮膚へ接触する補助パターンの面積を減少させることが可能であり、押し込み圧力の分散を低減でき、針状体の穿刺能力を低減することなく、押し込み圧力の偏りを補正することが可能となる。
Further, the auxiliary pattern may be arranged such that a part of the peripheral part around the pattern part of the needle-like body or the shape of the needle-like body at the outermost peripheral part has a higher strength.
For example, a columnar structure (FIGS. 2 and 104) (FIGS. 2 and 105) or a spherical structure (FIGS. 2 and 106) may be used. In this case, it is possible to reduce the area of the auxiliary pattern that contacts the skin at the time of puncturing, as compared to the case surrounding the needle, to reduce the dispersion of the pushing pressure, and to reduce the puncturing ability of the needle-shaped body Therefore, it becomes possible to correct the bias of the pushing pressure.
針状体を構成する材料は特に制限されないが、生体適合性材料である医療用シリコン樹脂や、マルトース、ポリ乳酸、デキストラン、糖質等を用いることで、生体に適用可能な針状体を形成出来る。生体適合性材料を用いれば、微細な針状体が折れて、体内に取り残された場合も、無害であるという効果を奏する。 The material constituting the needle-like body is not particularly limited, but a needle-like body applicable to the living body is formed by using biocompatible material such as medical silicone resin, maltose, polylactic acid, dextran, carbohydrates, etc. I can do it. If a biocompatible material is used, even if a fine needle is broken and left in the body, there is an effect that it is harmless.
補助パターンの構成材料についても、針状体と同様、材料に制限されるものではなく、また、作製方法によっては針状体と異なる材料を用いることも可能である。 The constituent material of the auxiliary pattern is not limited to the material like the needle-like body, and a material different from the needle-like body can be used depending on the manufacturing method.
針状体の製造方法としては、薬剤投与用針状体と荷重均一化のための補助パターンを形成可能な製造方法であれば良い。
例えば、レーザーを用いて基板に針状体パターン及び補助パターンを形成するための加工孔を形成した後に、転写成型により凹凸反転させた針状体パターンと補助パターンを一括成型する方法や、
シリコンウェハ上にレジストを塗布し、レジスト解像限界以下のパターン密度を調整することにより露光量を制御するフォトマスク(例えば、グレーマスク)を用いて、針状体形状形成用レジストパターンと補助パターン形成用のレジストパターンを形成し、そのレジストパターンをもとにドライエッチングを用いてシリコンウェハを加工することにより形成する方法等が挙げられる。
As a method for manufacturing the needle-shaped body, any method may be used as long as it can form a needle-shaped body for drug administration and an auxiliary pattern for load equalization.
For example, after forming a processing hole for forming a needle-shaped body pattern and an auxiliary pattern on a substrate using a laser, a method of collectively molding the needle-shaped body pattern and the auxiliary pattern that are reversed by transfer molding,
Using a photomask (for example, a gray mask) that controls the exposure by applying a resist on a silicon wafer and adjusting the pattern density below the resist resolution limit, the resist pattern and auxiliary pattern for forming needle-like bodies Examples include a method of forming a resist pattern for formation and processing the silicon wafer by dry etching based on the resist pattern.
特に、レジストパターンを形成し、エッチングを行う製造方法が、本発明の針状体の製造方法として好ましい。レジストパターンを形成する工程において、針および補助パターンの配置を一括して決定することが出来るため、精度良く針、および補助パターンを配置し、針状体を製造することが出来る。 In particular, a manufacturing method in which a resist pattern is formed and etched is preferable as the method for manufacturing the needle-shaped body of the present invention. In the step of forming the resist pattern, the arrangement of the needle and the auxiliary pattern can be determined at a time, so that the needle and the auxiliary pattern can be arranged with high accuracy to manufacture the needle-like body.
また、作製した針状体を原型とし、転写加工成形を行っても良い。 Further, the produced needle-like body may be used as a prototype, and transfer processing molding may be performed.
このとき、転写加工成形としては、公知の転写加工成形法を適宜選択して用いて良い。例えば、Ni電鋳法、型取り用樹脂等を用いる方法などにより、複製版を作り、複製版を用いたインプリント法、ホットエンボス法、射出成形法、押し出し成形法およびキャスティング法などを行っても良い。 At this time, as transfer processing molding, a known transfer processing molding method may be appropriately selected and used. For example, by using a Ni electroforming method, a method using a molding resin, etc., a duplicate plate is produced, and an imprint method using the duplicate plate, a hot embossing method, an injection molding method, an extrusion molding method, a casting method, etc. are performed. Also good.
機械的強度が高く、多面付けされた複製版を作ることにより、同一の複製版で多量かつ大画面に、針状体を製造することが出来るため、生産コストを低くし、生産性を高めることが出来る。
また、材料の加工特性によらず、形状を転写することが出来るため、一般的な樹脂を構成材料とした針状体を製造することが出来る。また、特に、生体適合樹脂で構成された針状体を形成することが出来る。生体適合性樹脂としては、例えば、医療用シリコン樹脂、マルトース、ポリ乳酸、デキストランなどを用いても良い。
By making a duplicated plate with high mechanical strength and multiple impositions, needles can be produced in large quantities and on a large screen with the same duplicated plate, thus reducing production costs and increasing productivity. I can do it.
In addition, since the shape can be transferred regardless of the processing characteristics of the material, a needle-like body made of a general resin can be manufactured. In particular, a needle-like body made of a biocompatible resin can be formed. As the biocompatible resin, for example, medical silicone resin, maltose, polylactic acid, dextran, or the like may be used.
以下、本発明の針状体の製造方法について、具体的に一例を挙げながら説明を行う。当然のことながら、本発明の針状体の製造方法は下記実施例に限定されず、各工程において公知の資料から類推できる他の製造方法をも含むものとする。 Hereinafter, the method for producing the needle-shaped body of the present invention will be described with specific examples. Naturally, the manufacturing method of the needle-shaped body of the present invention is not limited to the following examples, and includes other manufacturing methods that can be inferred from known materials in each step.
<実施例1>
まず、シリコンウェハ(図3・201)を用意した。このとき、シリコンウェハの厚みは525μmで直径は4インチであり、半導体製造プロセスで一般的に用いられるものである。
<Example 1>
First, a silicon wafer (FIG. 3.201) was prepared. At this time, the silicon wafer has a thickness of 525 μm and a diameter of 4 inches, and is generally used in a semiconductor manufacturing process.
次に、シリコンウェハ上にポジ型フォトレジスト(商品名:LA−900)を塗布した。(図3・202)このとき、レジストの膜厚を測定したところ20μmであった。 Next, a positive photoresist (trade name: LA-900) was applied on the silicon wafer. (FIG. 3 202) At this time, the film thickness of the resist was measured and found to be 20 μm.
次に、このレジストをフォトリソグラフィー法により針状体及び保護パターン作製用のレジストパターンを形成した。
このとき、用いたフォトマスクはLA−900の解像限界よりも小さいパターン、具体的には直径0.5μmの正方形を任意の密度に配列させたフォトマスクマスク(グレーマスク)を用いて露光量の調整を行った。
Next, a resist pattern for forming a needle-like body and a protective pattern was formed from this resist by a photolithography method.
At this time, the photomask used is a pattern smaller than the resolution limit of LA-900, specifically, a photomask mask (gray mask) in which squares having a diameter of 0.5 μm are arranged at an arbitrary density, and the exposure amount. Was adjusted.
また、このときの針状体作製用レジストパターンの形状は直径100μm、高さ20μmの半球形状(図3・203)であった。針状体形成用レジストパターンの配置はピッチ(隣り合うレジストの中心間の距離)が200μmで縦横共に5本ずつとした。 In addition, the shape of the resist pattern for needle-like body formation at this time was a hemispherical shape having a diameter of 100 μm and a height of 20 μm (FIG. 3, 203). The resist patterns for forming the needle-like bodies were arranged with a pitch (distance between the centers of adjacent resists) of 200 μm and five in each of the vertical and horizontal directions.
また、このときの保護パターン形成用レジストパターンの形状は一辺の長さが150μm、高さ20μmの四角柱形状(図3・204)であり、針状体形成用レジストパターンエリアの対角線上4箇所に配置した。補助パターンの中心が近接する針状体形成用パターン中心から300μmの距離に位置するように配置した。 Further, the shape of the protective pattern forming resist pattern at this time is a quadrangular prism shape (FIGS. 3 and 204) having a side length of 150 μm and a height of 20 μm, and four locations on the diagonal line of the resist pattern area for forming a needle-like body Arranged. The auxiliary pattern was arranged so that the center of the auxiliary pattern was located at a distance of 300 μm from the center of the needle-like body forming pattern.
次に、保護パターン形成用レジストパターンおよび針状体作製用レジストパターンをエッチングマスクとして、誘導結合プラズマ(Inductively Coupled Plasma:以下、ICPと記述)を用いたプラズマエッチングにより、シリコンウェハを加工した。エッチングガスにはフルォロカーボン系ガスと酸素ガスの混合ガスを用いた。 Next, the silicon wafer was processed by plasma etching using inductively coupled plasma (hereinafter referred to as ICP) using the protective pattern forming resist pattern and the needle-shaped body forming resist pattern as an etching mask. As the etching gas, a mixed gas of fluorocarbon gas and oxygen gas was used.
このとき、エッチングにより、針状体パターンを形成するための半球状のレジストパターンの直径はエッチングの進行とともに縮小し(図3・205)、シリコンウェハが250μm加工された段階で、完全に消滅した。これにより根本幅100μm、高さ250μmの針状体(図3・207)が形成された。一方、補助パターン作製用のレジストパターンについても、ICPエッチングにより縮小し(図3・206)、シリコンの加工が終了した段階でレジストパターンは完全に消滅したが、レジスト形状が四角柱であるため、ICPエッチングにより形成された補助パターンの形状も、一辺が150μm、高さ250μmの四角柱(図3・208)となっていた。 At this time, the diameter of the hemispherical resist pattern for forming the needle-like body pattern is reduced by etching as the etching progresses (FIG. 3, 205), and disappears completely when the silicon wafer is processed to 250 μm. . As a result, a needle-like body (FIG. 3, 207) having a root width of 100 μm and a height of 250 μm was formed. On the other hand, the resist pattern for forming the auxiliary pattern was also reduced by ICP etching (FIGS. 3 and 206), and the resist pattern disappeared completely when the silicon processing was completed, but the resist shape is a square pillar, The shape of the auxiliary pattern formed by ICP etching was also a quadrangular column (FIG. 3, 208) having a side of 150 μm and a height of 250 μm.
以上の作製工程を経て本発明にかかる針状体を完成させた。 The acicular body according to the present invention was completed through the above production steps.
本実施例の利点として、シリコンのICPエッチングの条件、例えばフルォロカーボン系ガス及び酸素ガスの混合比や、ICP出力、エッチングバイアス、基板冷却温度等を変えることにより針状体形状、例えば、高さや針状体の側壁角度を調整することができ、また、針状体と補助パターンを一括で形成することが可能である。 As an advantage of this embodiment, by changing the ICP etching conditions of silicon, such as the mixture ratio of fluorocarbon gas and oxygen gas, ICP output, etching bias, substrate cooling temperature, etc. The side wall angle of the shaped body can be adjusted, and the needle-like body and the auxiliary pattern can be formed in a lump.
<実施例2>
実施例1で製造された針状体を母型とし、転写加工成形を行った。
<Example 2>
The needle-shaped body manufactured in Example 1 was used as a mother mold, and transfer processing molding was performed.
まず、実施例1で製造された針状体を母型とし、電解メッキ法によりニッケル複製版を作製した。このとき、シード層としては蒸着により作製したニッケル層30nmを用い、電解メッキ時のメッキ液にはスルファミン酸ニッケル溶液を用いた。また、メッキ浴のpHは4.7、メッキ浴槽温度50℃とし、膜厚400μmまでニッケルを成膜した。 First, the acicular body manufactured in Example 1 was used as a mother mold, and a nickel replica was produced by electrolytic plating. At this time, a nickel layer 30 nm formed by vapor deposition was used as a seed layer, and a nickel sulfamate solution was used as a plating solution at the time of electrolytic plating. Moreover, the pH of the plating bath was 4.7, the temperature of the plating bath was 50 ° C., and nickel was deposited to a film thickness of 400 μm.
次に、ニッケルの成膜後、母型として使用したシリコン及びレジストを90℃、25wt%濃度の水酸化カリウム水溶液により溶解除去し、シリコン原版の凹凸反転パターンを有するニッケル複製版(図3・209)を完成させた。 Next, after the nickel film is formed, the silicon and resist used as the mother mold are dissolved and removed with a potassium hydroxide aqueous solution at 90 ° C. and a concentration of 25 wt%, and a nickel replica plate having a concave / convex pattern of the silicon original plate (FIGS. 3 and 209). ) Was completed.
次に、170℃の加熱により軟化させたポリ乳酸に上記のニッケル複製版を用いて熱プレス成型した。このとき、ニッケル複製版のポリ乳酸への押し込み圧力は15MPa、保持時間は1分とし、保持時間経過後にポリ乳酸及びニッケル複製版を室温まで冷却したのちに、ニッケル複製版を剥離し、生体適合性樹脂であるポリ乳酸で構成された本発明の針状体(図3・210)を製造することが出来た。 Next, hot press molding was performed on the polylactic acid softened by heating at 170 ° C., using the above nickel replica. At this time, the indentation pressure of the nickel replication plate into the polylactic acid is 15 MPa, the holding time is 1 minute, and after the holding time has elapsed, after the polylactic acid and the nickel replication plate are cooled to room temperature, the nickel replication plate is peeled off and biocompatible. The acicular body of the present invention (FIGS. 3 and 210) composed of polylactic acid, which is an adhesive resin, could be produced.
本発明の針状体は、医薬、創薬、化粧品などの薬物を輸送するデバイスに用いる微細な針として、利用することが期待できる。 The needle-shaped body of the present invention can be expected to be used as a fine needle used in a device for transporting drugs such as medicines, drug discovery, and cosmetics.
101……針状体
102……本発明にかかる補助パターン
103……基板
104、105、106……本発明にかかる補助パターン形状及び配置の一例
201……シリコンウェハ
202……レジスト層
203……針状体形成用レジストパターン
204……補助パターン形成用レジストパターン
205……エッチングにより縮小した針状体形成用レジストパターン
206……エッチングにより縮小した補助パターン形成用レジストパターン
207……針状体
208……補助パターン
209……シリコン原版より作製したNi複製版
210……Ni複製版をもとに一括成型した本発明にかかる針状体
DESCRIPTION OF SYMBOLS 101 ... Acicular body 102 ... Auxiliary pattern 103 concerning this invention ... Substrate 104, 105, 106 ... Example of auxiliary pattern shape and arrangement concerning this invention 201 ... Silicon wafer 202 ... Resist layer 203 ... Needle-form forming resist pattern 204... Auxiliary pattern-forming resist pattern 205... Needle-form forming resist pattern 206 reduced by etching... …… Auxiliary pattern 209 …… Ni replica plate 210 made from silicon original plate …… Acicular body according to the present invention formed in a batch based on the Ni replica plate
Claims (6)
基板と、
皮膚を穿刺する微細な針と、
前記微細な針の近傍に補助パターンと、を備え、
前記基板の同一面上に前記微細な針と前記補助パターンが形成されており、
前記補助パターンの高さは、針の高さ以上の高さを有していること
を特徴とする針状体。 In fine needles,
A substrate,
A fine needle that punctures the skin,
An auxiliary pattern in the vicinity of the fine needle,
The fine needle and the auxiliary pattern are formed on the same surface of the substrate,
The needle-like body, wherein the auxiliary pattern has a height equal to or higher than a needle height.
補助パターンは、針の周囲を包囲した補助パターンであること
を特徴とする針状体。 The acicular body according to claim 1,
The auxiliary pattern is an auxiliary pattern surrounding the needle.
微細な針が、複数本規則的に配列されていること
を特徴とする針状体。 The needle-shaped body according to claim 1 or 2,
A needle-like body in which a plurality of fine needles are regularly arranged.
基板にレジストを塗布する工程と、
前記レジストを針および補助パターンに併せてパターニングする工程と、
前記レジストを塗布した方向から、基板にエッチングを行う工程と
を備え、
前記基板の同一面上に前記微細な針と前記補助パターンが形成され、かつ、前記補助パターンの高さは、針の高さ以上の高さを有する針状体を製造する
ことを特徴とする針状体製造方法。 In the method for producing fine needles,
Applying a resist to the substrate;
Patterning the resist together with a needle and an auxiliary pattern;
And a step of etching the substrate from the direction in which the resist is applied ,
The fine needle and the auxiliary pattern are formed on the same surface of the substrate, and a height of the auxiliary pattern is higher than the height of the needle to produce a needle-like body. A method for producing a needle-like body.
を特徴とする針状体製造方法。 A needle-shaped body manufacturing method, wherein the needle-shaped body manufactured by the needle-shaped body manufacturing method according to claim 5 is used as a prototype, and transfer processing molding is performed.
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