JP4940975B2 - Manufacturing method of needle-shaped body - Google Patents

Manufacturing method of needle-shaped body Download PDF

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JP4940975B2
JP4940975B2 JP2007026612A JP2007026612A JP4940975B2 JP 4940975 B2 JP4940975 B2 JP 4940975B2 JP 2007026612 A JP2007026612 A JP 2007026612A JP 2007026612 A JP2007026612 A JP 2007026612A JP 4940975 B2 JP4940975 B2 JP 4940975B2
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needle
resist
tip
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etching
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敏明 黒須
孝夫 友野
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Toppan Inc
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Description

本発明は、微細な針状体に関するものである。   The present invention relates to a fine needle-like body.

皮膚上から薬剤を浸透させ体内に薬剤を投与する方法である経皮吸収法は、人体に痛みを与えることなく簡便に薬剤を投与することが出来る方法として用いられているが、薬剤の種類によっては経皮吸収法で投与が困難な薬剤が存在する。これらの薬剤を効率よく体内に吸収させる方法として、μmオーダーの微細な針状体(マイクロニードル)を用いて皮膚を穿孔し、皮膚内に直接薬剤を投与する方法が注目されている。この方法によれば、投薬用の特別な機器を用いることなく、簡便に薬剤を皮下投薬することが可能となる(特許文献1参照)。   The percutaneous absorption method, which is a method of infiltrating a drug from the skin and administering the drug into the body, is used as a method that can be easily administered without causing pain to the human body. There are drugs that are difficult to administer by transdermal absorption. As a method for efficiently absorbing these drugs into the body, a method of perforating the skin using a fine needle (microneedle) on the order of μm and directly administering the drug into the skin has attracted attention. According to this method, it is possible to easily administer a drug subcutaneously without using a special medication device (see Patent Document 1).

この際に用いる微細な針状体の形状は、皮膚を穿孔するための十分な細さと先端角、および皮下に薬液を浸透させるための十分な長さを有していることが必要とされ、針の直径は数μmから数百μm、針の長さは皮膚の最外層である角質層を貫通し、かつ神経層へ到達しない長さ、具体的には数十μmから数百μm程度、針の先端角度は鋭角なもの、具体的には30°以下、であることが望ましいとされている。   The shape of the fine needle-like body used at this time is required to have a sufficient fineness and tip angle for piercing the skin and a sufficient length for allowing the drug solution to penetrate subcutaneously, The diameter of the needle is several μm to several hundred μm, and the length of the needle penetrates the stratum corneum, which is the outermost layer of the skin, and does not reach the nerve layer, specifically several tens μm to several hundred μm, The tip angle of the needle is preferably an acute angle, specifically, 30 ° or less.

より具体的には、最外皮層である角質層を貫通することが求められる。角質層の厚さは人体の部位によっても若干異なるが、平均して20μm程度である。また、角質層の下にはおよそ200μmから350μm程度の厚さの表皮が存在し、さらにその下層には毛細血管が張りめぐる真皮層が存在する。このため、角質層を貫通させ薬液を浸透させるためには少なくとも20μm以上の針が必要となる。また、採血を目的とする針状体を製造する場合には、上記の皮膚の構成から少なくとも350μm以上の高さの針状体が必要となる。   More specifically, it is required to penetrate the stratum corneum that is the outermost skin layer. The thickness of the stratum corneum varies slightly depending on the part of the human body, but is about 20 μm on average. In addition, an epidermis having a thickness of about 200 μm to 350 μm exists under the stratum corneum, and further, a dermis layer in which capillaries are stretched exists under the epidermis. For this reason, in order to penetrate the stratum corneum and allow the chemical solution to penetrate, a needle of at least 20 μm or more is required. Further, when producing a needle-like body for the purpose of blood collection, a needle-like body having a height of at least 350 μm or more is required due to the above-described skin structure.

また、針状体を構成する材料としては、仮に破損した針状体先端部が体内に残留した場合でも、人体に悪影響を及ぼさない材料であることが必要であり、この材料としては医療用シリコン樹脂や、マルトース、ポリ乳酸、デキストラン等の生体適合性樹脂が有望視されている(特許文献2参照)。   In addition, the material constituting the needle-shaped body must be a material that does not adversely affect the human body even if the damaged needle-shaped body tip remains in the body. Biocompatible resins such as resins and maltose, polylactic acid, dextran, etc. are considered promising (see Patent Document 2).

角質層を確実に貫通するためには、針の穿刺能力が高いことが望まれる。しかし、針の穿刺能力向上のために、針の先端角度を鋭利にすると、針状体先端部の機械的強度が低下し、皮膚に押圧した段階で針状体先端部に破損や変形が発生しやすくなる。このため、マイクロニードルの皮膚貫通度合いにばらつきが生じ、結果として安定した薬剤投与または薬理効果を得ることが困難となる問題があった。   In order to surely penetrate the stratum corneum, it is desired that the needle has a high puncture ability. However, if the needle tip angle is sharpened in order to improve the needle puncturing capability, the mechanical strength of the needle tip decreases and the needle tip breaks or deforms when it is pressed against the skin. It becomes easy to do. For this reason, there is a variation in the degree of penetration of the microneedles into the skin, and as a result, there is a problem that it is difficult to obtain stable drug administration or pharmacological effects.

このような針状体先端部の破損を抑制する方法として、針状体先端部の形状を平坦部とし、機械的強度を増強する方法が知られている(特許文献3参照)。   As a method for suppressing such breakage of the tip of the needle-like body, a method of increasing the mechanical strength by making the shape of the tip of the needle-like body flat is known (see Patent Document 3).

一方、自然界に存在する形状、実験により得られた形状などをコンピュータ上に再現した曲面、建築物や工業製品における曲面などの設計として、自由曲面の設計が行われている。自由曲面とは、関数で表記できる曲線を組み合わせて定義された曲面であり、3次元CAD描画装置などを用いてその形状を設計出来ることが知られている(特許文献4参照)。
米国特許第6,183,434号明細書 特開2005−21677号公報 特表2005−533625号公報 特開平06−139315号公報
On the other hand, a free-form surface is designed as a design of a curved surface in which a shape existing in nature, a shape obtained by experiments, etc. is reproduced on a computer, or a curved surface in a building or industrial product. A free-form surface is a curved surface defined by combining curves that can be expressed by a function, and it is known that the shape can be designed using a three-dimensional CAD drawing device or the like (see Patent Document 4).
US Pat. No. 6,183,434 Japanese Patent Laid-Open No. 2005-21677 JP 2005-533625 A Japanese Patent Laid-Open No. 06-139315

しかしながら、針状体先端部の形状を平坦部とすると、皮膚へ押圧した際に発生する荷重が分散するため、著しく穿刺能力は低下する。また、穿刺能力が低下することにより、押圧時に皮膚を貫通できずに皮膚を変形させる程度にとどまり、押し戻された皮膚より物理的な反発を受けて、針状体先端部ではなく、針状体側面部から破損したり、変形したりする恐れがある。   However, when the shape of the tip of the needle-like body is a flat part, the load generated when the needle is pressed against the skin is dispersed, so that the puncture ability is significantly reduced. In addition, the puncture ability is reduced, so that the skin is deformed without being able to penetrate the skin at the time of pressing, and it receives physical repulsion from the pushed-back skin, so that the needle-like body is not the tip of the needle-like body. There is a risk of damage or deformation from the side.

特に、針を複数本規則的に配列(例えば、アレイ状に針を配列)させた場合、圧力分散による穿刺能力の低下は顕著となり、薬剤投与効果や再現性の低下につながる恐れがある。   In particular, when a plurality of needles are regularly arranged (for example, the needles are arranged in an array), the puncture ability is significantly reduced due to pressure dispersion, which may lead to a decrease in drug administration effect and reproducibility.

そこで、本発明は、上述の問題を解決するためになされたものであり、充分な穿刺能力を有し、かつ、穿刺に際して、針状体の破損を抑制することが出来る針状体を提供することを目的とする。   Accordingly, the present invention has been made to solve the above-described problems, and provides a needle-like body that has sufficient puncture ability and can suppress breakage of the needle-like body during puncture. For the purpose.

請求項1に記載の本発明は、微細な針状体の製造方法において、基板にレジストを塗布する工程と、前記レジストをパターニングし、レジストパターンを形成する工程と、前記基板にレジストを塗布した方向からエッチングを行い、エッチングされた基板と該エッチングされた基板上に曲面形状でありレジストからなる先端部を備える針状体とする工程とを備えることを特徴とする針状体の製造方法である。
なお、本明細書において、「針状体」とは、一本の針のみならず、針が複数本規則的に配列(例えば、アレイ状に配列)された構造体をも含むものとして定義する。
The present invention according to claim 1 is a method of manufacturing a fine needle-like body, wherein a step of applying a resist to a substrate, a step of patterning the resist to form a resist pattern, and a step of applying a resist to the substrate Etching from a direction, and comprising a step of forming an etched substrate and a needle-like body having a curved shape on the etched substrate and having a tip made of a resist. is there.
In this specification, the term “needle” is defined to include not only a single needle but also a structure in which a plurality of needles are regularly arranged (for example, arranged in an array). .

請求項2に記載の本発明は、記針状体先端部の曲面は、双3次曲面、クーンズ曲面、ベジエ曲面、B−スプライン曲面、ナーブス曲面、グレゴリー曲面からなる群から選ばれた自由曲面であることを特徴とする請求項1記載の針状体の製造方法である。
なお、本明細書において、「自由曲面」とは、関数で表記できる曲線を組み合わせて定義された曲面と定義する。
The present invention is defined in claim 2, the curved surface of the front Kiharijotai tip bicubic curved, Coons curved surface, Bezier surface, B- spline surface, free selected from NURBS curved surface, the group consisting of Gregory curved surfaces It is a curved surface, The method for producing a needle-like body according to claim 1 .
In this specification, “free-form surface” is defined as a curved surface defined by combining curves that can be expressed by functions.

請求項3に記載の本発明は、前記基板にレジストを塗布した方向からエッチングを行い、エッチングされた基板と該エッチングされた基板上に曲面形状でありレジストからなる先端部を備える針状体とする工程の際、針状体の基部を原点とし、基部から針状体先端部への軸方向をZ軸とし、前記Z軸と直交する任意の軸方向をX軸とし、前記Z軸および前記X軸の両者と直交する軸方向をY軸とした3次元座標系の中で、針状体側面部がテーパー形状であり、針状体側面部のテーパー角度が30°以下の領域について、針状体先端部の曲面上の座標が、下記数式を満たす範囲で、エッチングを停止することを特徴とする請求項1または請求項2記載の針状体の製造方法である。
なお、本明細書において、「針状体の基部」とは、基板表面と平行な面と、針状体先端部の曲面と、が一点で接する接点を基板方向に垂直に移動させた基板表面上の一点と定義する。
The present invention as set forth in claim 3, wherein etching is performed from the direction in which a resist is applied to the substrate, and the etched substrate and a needle-like body having a curved surface on the etched substrate and having a tip portion made of resist, In the process, the base of the needle-like body is the origin, the axial direction from the base to the tip of the needle-like body is the Z-axis, an arbitrary axial direction perpendicular to the Z-axis is the X-axis, In a three-dimensional coordinate system in which the axis direction perpendicular to both the X axis is the Y axis, the needle side surface portion has a tapered shape and the needle side surface portion has a taper angle of 30 ° or less. 3. The method for manufacturing a needle-shaped body according to claim 1 , wherein the etching is stopped within a range where the coordinates on the curved surface of the distal end of the body satisfy the following mathematical formula .
In the present specification, the “base of the needle-like body” means the surface of the substrate obtained by moving the contact point where the surface parallel to the substrate surface and the curved surface of the tip of the needle-like body contact at one point perpendicularly to the substrate direction. Defined as one point above.

請求項4に記載の本発明は、前記レジストをパターニングする工程において形成されるレジストパターンが円柱型のレジストパターンであって、前記エッチング工程の前に、該円柱型のレジストパターンを側面からの断面投影像が半円形状となるように変形させる工程を備えることを特徴とする請求項1から3のいずれかに記載の針状体の製造方法である。 According to the present invention of claim 4, the resist pattern formed in the step of patterning the resist is a cylindrical resist pattern, and the cylindrical resist pattern is cross-sectionally viewed from the side before the etching step. The method for manufacturing a needle-like body according to any one of claims 1 to 3, further comprising a step of deforming the projected image into a semicircular shape .

請求項5に記載の本発明は、該円柱型のレジストパターンを側面からの断面投影像が半円形状となるように変形させる工程が、熱によりおこなわれることを特徴とする請求項4記載の針状体の製造方法である。 The present invention according to claim 5 is characterized in that the step of deforming the cylindrical resist pattern so that a cross-sectional projection image from the side surface has a semicircular shape is performed by heat. It is a manufacturing method of an acicular body .

請求項6に記載の本発明は、請求項1から5のいずれかに記載の針状体の製造方法で製造された針状体を母型とし、複製版を形成し、転写加工成形を行うこと
を特徴とする針状体の製造方法である。
According to a sixth aspect of the present invention, the needle-shaped body manufactured by the method for manufacturing a needle-shaped body according to any one of the first to fifth aspects is used as a matrix, a duplicate plate is formed, and transfer processing is performed. This is a method for producing a needle-like body.

本発明の針状体は、針状体先端部が曲面形状であることにより、針状体先端部の機械的強度を向上させると共に、押圧した際に発生する荷重を針状体先端部に集中させることが出来る。このため、穿刺能力を低下することなく、針状体の破損を抑制することが可能となる。   The needle-like body of the present invention improves the mechanical strength of the tip of the needle-like body by concentrating the tip of the needle-like body and concentrates the load generated when the needle is pressed on the tip of the needle-like body. It can be made. For this reason, it becomes possible to suppress the breakage of the needle-like body without lowering the puncture ability.

以下、本発明の針状体について説明を行う。
本発明の針状体は、
基板上に設けられた針状体であって、
針状体先端部が曲面形状であること
を特徴とする。
Hereinafter, the acicular body of the present invention will be described.
The needle-shaped body of the present invention is
A needle-like body provided on a substrate,
The tip of the needle-like body is a curved surface.

本発明の針状体は、針状体先端部が曲面形状であることにより、針状体先端部の機械的強度を向上させると共に、押圧した際に発生する荷重を針状体先端部に集中させることが出来る。このため、穿刺能力を低下することなく、針状体の破損を抑制することが可能となる。   The needle-like body of the present invention improves the mechanical strength of the tip of the needle-like body by concentrating the tip of the needle-like body and concentrates the load generated when the needle is pressed on the tip of the needle-like body. It can be made. For this reason, it becomes possible to suppress the breakage of the needle-like body without lowering the puncture ability.

また、針状体先端部の曲面形状は自由曲面(例えば、双3次曲面、クーンズ曲面、ベジエ曲面、B−スプライン曲面、ナーブス曲面、グレゴリー曲面など)であることが好ましい。自由曲面とすることにより、公知の3次元CAD描画装置を用いて所望する針状体の設計を、製造に先立って好適に行うことが出来る。このとき、設計した針状体の形状、針状体材料の特性から針状体の物理モデルを形成し、生体の皮膚を考慮した物理モデルとの間でコンピュータを用いて物理演算を行い、物理シミュレーションを行うことで、皮膚の穿刺に好適な針状体の形状について、針状体の製造前に評価を行うことが出来る。   The curved surface shape of the tip of the needle-like body is preferably a free curved surface (for example, a bicubic curved surface, a Coons curved surface, a Bezier curved surface, a B-spline curved surface, a Nervous curved surface, a Gregory curved surface). By using a free-form surface, a desired needle-like body can be suitably designed using a known three-dimensional CAD drawing apparatus prior to manufacturing. At this time, a physical model of the needle-shaped body is formed from the shape of the designed needle-shaped body and the characteristics of the needle-shaped body material, and a physical calculation is performed using a computer with the physical model considering the skin of the living body. By performing the simulation, it is possible to evaluate the shape of the needle-like body suitable for skin puncture before manufacturing the needle-like body.

また、針状体側面部の形状、針状体の配列は、針状体の用途、材料、製造方法などに応じて適宜設計を行って良い。例えば、針状体側面部が角柱であり、先端部のみ曲面形状の針状体であっても良い。   In addition, the shape of the side surfaces of the needle-like body and the arrangement of the needle-like bodies may be appropriately designed according to the use, material, manufacturing method and the like of the needle-like body. For example, the needle-like body side surface portion may be a prism and the tip portion may be a curved needle-like body.

針状体材料は特に制限されないが、生体適合性材料である医療用シリコン樹脂や、マルトース、ポリ乳酸、デキストラン、糖質等を用いることで、生体に適用可能な針状体を形成出来る。生体適合性材料を用いれば、微細な針状体が折れて、体内に取り残された場合も、無害であるという効果を奏する。   The needle-shaped material is not particularly limited, but a needle-shaped material applicable to a living body can be formed by using a medical silicone resin which is a biocompatible material, maltose, polylactic acid, dextran, carbohydrate, or the like. If a biocompatible material is used, even if a fine needle is broken and left in the body, there is an effect that it is harmless.

針状体の製造方法としては、本発明の特徴構成である先端部分の形状を成形することの出来る製造方法であれば良く、例えば、基板にレジストを塗布し、前記レジストをパターニングし、前記パターニングを施したレジストの形状を変形し、前記基板にレジストを塗布した方向からエッチングを行う製造方法や、3次元CADデータからレーザ光などを用いて直接成形する製造方法などであっても良い。   The method for manufacturing the needle-shaped body may be any manufacturing method that can form the shape of the tip portion that is a characteristic configuration of the present invention. For example, a resist is applied to a substrate, the resist is patterned, and the patterning is performed. A manufacturing method in which the shape of the resist subjected to the above process is deformed and etching is performed from the direction in which the resist is applied to the substrate may be used, or a manufacturing method in which direct shaping is performed using laser light or the like from three-dimensional CAD data.

エッチングを用いて針状体を製造する場合、エッチングマスクとして用いるレジストパターンの形状や、基板のエッチング条件の調整により先端部の形状を制御することが出来る。   When manufacturing an acicular body using etching, the shape of the tip can be controlled by adjusting the shape of a resist pattern used as an etching mask and the etching conditions of the substrate.

また、レジストパターンの形状において、レジストの膜厚を制御することにより、エッチング後の針状体先端部の曲率半径を制御することが出来る。このとき、レジストの膜厚が大きいほど、針状体先端部の曲率半径は大きくなり、レジスト膜厚の膜厚が小さいほど、針状体先端部の曲率半径を小さくすることが出来る。   In addition, by controlling the resist film thickness in the resist pattern shape, the radius of curvature of the needle-like tip after etching can be controlled. At this time, the larger the resist film thickness, the larger the radius of curvature of the needle-like body tip portion, and the smaller the resist film thickness, the smaller the radius of curvature of the needle-like body tip portion.

また、レジストの形状を変形する方法として、レジストのフォトリソグラフィーに用いるフォトマスクに、レジストの解像限界以下のメッシュパターンを用いる、いわゆるグレーマスクを用いてレジストを露光し、現像し、レジストパターンを形成する方法を用いても良い。グレーマスクを用いることで、レジストの露光強度を制御することが出来、グレーマスクに応じたレジストの形状にすることが出来る。   In addition, as a method of deforming the resist shape, the resist is exposed and developed using a so-called gray mask using a mesh pattern that is below the resolution limit of the resist for a photomask used for resist photolithography, and the resist pattern is developed. A forming method may be used. By using the gray mask, the exposure intensity of the resist can be controlled, and the resist can be shaped according to the gray mask.

エッチング条件の調整としては、エッチングガスの種類、エッチング装置の出力、チャンバー内の圧力や基板冷却温度等のエッチングパラメーターなど条件を調整することにより、針状体先端部の形状を変化させることが出来る。   The etching conditions can be adjusted by adjusting the etching parameters such as the type of etching gas, the output of the etching apparatus, the pressure in the chamber and the substrate cooling temperature, and other etching parameters. .

針状体の製造方法としては、本発明の特徴構成である先端部分の形状を成形した針状体を母型とし、複製版を形成し、転写加工成形を行うことが好ましい。転写加工成形を行うことで、母型を成形するための加工特性に頓着することなく、材料を選択し針状体を製造することが出来る。このため、例えば、生体適合性材料である医療用シリコン樹脂や、マルトース、ポリ乳酸、デキストラン、糖質等を用いることで、生体に適用可能な針状体を形成出来る。生体適合性材料を用いれば、微細な針状体が折れて、体内に取り残された場合も、無害であるという効果を奏する。   As a method for producing the needle-shaped body, it is preferable that the needle-shaped body having the shape of the tip portion, which is a characteristic configuration of the present invention, is used as a mother mold, a replica plate is formed, and transfer processing molding is performed. By performing transfer processing molding, it is possible to select a material and manufacture a needle-like body without being stuck to the processing characteristics for molding the mother die. Therefore, for example, by using a medical silicone resin that is a biocompatible material, maltose, polylactic acid, dextran, carbohydrate, or the like, a needle-like body applicable to a living body can be formed. If a biocompatible material is used, even if a fine needle is broken and left in the body, there is an effect that it is harmless.

転写加工成形としては、公知の転写加工成形法を適宜選択して用いて良い。例えば、Ni電鋳法などにより、複製版を作り、複製版を用いたインプリント法、ホットエンボス法、射出成形法、押し出し成形法およびキャスティング法などを行っても良い。
機械的強度が高く、多面付けされた複製版を作ることにより、同一の複製版で多量かつ大画面に、針状体を製造することが出来るため、生産コストを低くし、生産性を高めることが可能となる。
As transfer processing molding, a known transfer processing molding method may be appropriately selected and used. For example, a duplicate plate may be made by Ni electroforming or the like, and an imprint method using the duplicate plate, a hot embossing method, an injection molding method, an extrusion molding method, or a casting method may be performed.
By making a duplicated plate with high mechanical strength and multiple impositions, needles can be produced in large quantities and on a large screen with the same duplicated plate, thus reducing production costs and increasing productivity. Is possible.

以下、本発明の針状体の製造方法について、具体的に一例を挙げながら説明を行う。当然のことながら、本発明の針状体の製造方法は下記実施例に限定されず、各工程において公知の資料から類推できる他の製造方法をも含むものとする。
また、本発明の針状体は、下記の実施例にて作成された針状体に限定されず、特徴構成である先端部分の形状を成形することの出来る他の方法によって製造されても良い(例えば、3次元CADデータからレーザ光などを用いて直接母型を成形し、該母型を用いて転写加工成形行う製造方法などであっても良い)。
Hereinafter, the method for producing the needle-shaped body of the present invention will be described with specific examples. Naturally, the manufacturing method of the acicular body of the present invention is not limited to the following examples, and includes other manufacturing methods that can be inferred from known materials in each step.
Further, the needle-like body of the present invention is not limited to the needle-like body created in the following embodiment, and may be manufactured by other methods capable of forming the shape of the tip portion which is a characteristic configuration. (For example, a manufacturing method in which a mother die is directly formed from three-dimensional CAD data using a laser beam or the like, and transfer processing is formed using the mother die) may be used.

<実施例1>
まず、針状体の形状について設計を行った。
本実施例の針状体の形状としては、
針状体の基部を原点とし、
基部から針状体先端部への軸方向をZ軸とし、
前記Z軸と直行する任意の軸方向をX軸とし、
前記Z軸および前記X軸の両者と直行する軸方向をY軸とした3次元直交座標系の中で、
針状体側面部がテーパー形状であり、
針状体側面部のテーパー角度が30°以下の領域について、
針状体先端部の曲面上の座標が、下記数式を満たす形状であるものとした(図1)。
<Example 1>
First, the shape of the needle-like body was designed.
As the shape of the needle-like body of the present embodiment,
With the base of the needle-shaped body as the origin,
The axial direction from the base to the tip of the needle is the Z axis,
An arbitrary axial direction perpendicular to the Z axis is defined as an X axis,
In a three-dimensional orthogonal coordinate system in which the axial direction perpendicular to both the Z axis and the X axis is the Y axis,
The side surface of the needle-like body is tapered,
For the region where the taper angle of the side surface of the needle-like body is 30 ° or less,
The coordinates on the curved surface of the tip of the needle-like body are assumed to have a shape that satisfies the following mathematical formula (FIG. 1).

以下、本発明の針状体の製造方法の一実施例として、図2を用いながら説明を行う。   Hereinafter, an example of the method for producing a needle-shaped body of the present invention will be described with reference to FIG.

まず、直径4inch、厚み525μmのシリコンウェハを用意し、該シリコンウェハ上にポジ型フォトレジスト(商品名:LA−900)を20μmの膜厚でコートした(図2(a))。   First, a silicon wafer having a diameter of 4 inches and a thickness of 525 μm was prepared, and a positive photoresist (trade name: LA-900) was coated on the silicon wafer to a thickness of 20 μm (FIG. 2A).

次に、フォトリソグラフィーにより直径5μm、高さ20μmの円柱型のレジストパターンを形成した(図2(b))。   Next, a cylindrical resist pattern having a diameter of 5 μm and a height of 20 μm was formed by photolithography (FIG. 2B).

次に、レジストパターンをオーブンで180℃、1時間でハードベーク処理を行った。ハードベーク処理によりレジストパターンが熱変形した。走査型電子顕微鏡(Scanning Electron Microscope:以下、SEMと記述)によりレジストパターンの断面観察を行ったところ、熱変形後のレジスト形状は側面からの断面投影像が半円形状となった(図2(c))。   Next, the resist pattern was hard baked in an oven at 180 ° C. for 1 hour. The resist pattern was thermally deformed by the hard baking process. When a cross section of the resist pattern was observed with a scanning electron microscope (hereinafter referred to as SEM), the cross-sectional projection image from the side of the resist shape after thermal deformation became a semicircular shape (FIG. 2 ( c)).

次に、熱変形後のレジストパターンをエッチングマスクとし、フルオロカーボン系ガスをエッチングガスとして用い、誘導結合プラズマ(Inductively Coupled Plasma:以下、ICPと記述)を用いて、レジストパターンの形状が上述した「数1」を用いた設計形状を満たす範囲までエッチングした(図2(d))。
このとき、エッチングマスクとしたレジストパターンはシリコンの加工により縮小し、レジストパターンの直径は15μmとなった。また、レジストパターンの縮小に伴い、露出したシリコンも順次エッチングされ、最終的に形成されたシリコンはテーパー形状を有する円錐型の形状となった。また、シリコンウェハは250μmまでエッチングが進行した。
Next, using the resist pattern after thermal deformation as an etching mask, using a fluorocarbon-based gas as an etching gas, and using an inductively coupled plasma (hereinafter referred to as ICP), the shape of the resist pattern is the number Etching was performed to the extent that the design shape using “1” was satisfied (FIG. 2D).
At this time, the resist pattern used as an etching mask was reduced by silicon processing, and the diameter of the resist pattern became 15 μm. Further, as the resist pattern is reduced, the exposed silicon is also sequentially etched, and finally formed silicon has a conical shape having a tapered shape. In addition, the silicon wafer was etched up to 250 μm.

以上より、本発明の針状体を製造することが出来た。   From the above, the needle-shaped body of the present invention could be manufactured.

<実施例2>
実施例1で製造された針状体を母型とし、転写加工成形を行った。
まず、実施例1で製造された針状体を母型とし、電解メッキ法によりニッケル複製版を作製した。このとき、シード層としては蒸着により作製したニッケル層30nmを用い、電解メッキ時のメッキ液にはスルファミン酸ニッケル溶液を用いた。また、メッキ浴のpHは4.7、メッキ浴槽温度50℃とし、膜厚400μmまでニッケルを成膜した(図3(e))。
<Example 2>
The needle-shaped body manufactured in Example 1 was used as a mother mold, and transfer processing molding was performed.
First, the acicular body manufactured in Example 1 was used as a mother mold, and a nickel replica was produced by electrolytic plating. At this time, a nickel layer 30 nm formed by vapor deposition was used as a seed layer, and a nickel sulfamate solution was used as a plating solution at the time of electrolytic plating. Further, the pH of the plating bath was 4.7, the plating bath temperature was 50 ° C., and nickel was formed to a thickness of 400 μm (FIG. 3E).

次に、ニッケルの成膜後、母型として使用したシリコン及びレジストを90℃、25wt%濃度の水酸化カリウム水溶液により溶解除去し、シリコン原版の凹凸反転パターンを有するニッケル複製版を完成させた(図3(f))。   Next, after the nickel film was formed, the silicon and resist used as the mother mold were dissolved and removed with a potassium hydroxide aqueous solution at 90 ° C. and a 25 wt% concentration to complete a nickel replica having a concave / convex pattern of the silicon original plate ( FIG. 3 (f)).

次に、170℃の加熱により軟化させたPLAに上記のニッケル複製版を用いて熱プレス成型した。このとき、ニッケル複製版のPLAへの押し込み圧力は15MPa、保持時間は1分とし、保持時間経過後にPLA及びニッケル複製版を室温まで冷却したのちに、ニッケル複製版を剥離した(図3(g))。   Next, hot press molding was performed on the PLA softened by heating at 170 ° C. using the above nickel replica. At this time, the indentation pressure of the nickel replica plate to PLA was 15 MPa, the holding time was 1 minute, and after the holding time had elapsed, the PLA and nickel replica plate were cooled to room temperature, and then the nickel replica plate was peeled off (FIG. 3 (g )).

以上より、生体適合性樹脂で構成された本発明の針状体を製造することが出来た。   From the above, the needle-like body of the present invention composed of a biocompatible resin could be manufactured.

本発明の針状体は、医薬、創薬、化粧品などの薬物を輸送するデバイスに用いる微細な針として、利用することが期待できる。   The needle-shaped body of the present invention can be expected to be used as a fine needle used in a device for transporting drugs such as medicines, drug discovery, and cosmetics.

本発明の針状体の一例を示す概略図である。It is the schematic which shows an example of the acicular body of this invention. 本発明の針状体を製造する方法の一例を示す工程図である。It is process drawing which shows an example of the method of manufacturing the acicular body of this invention. 本発明の針状体を製造する方法の一例を示す工程図である。It is process drawing which shows an example of the method of manufacturing the acicular body of this invention.

符号の説明Explanation of symbols

1……レジスト
2……基板
3……レジストパターン
4……変形後のレジストパターン
5……針状体
6……複製版
7……針状体
DESCRIPTION OF SYMBOLS 1 ... Resist 2 ... Board | substrate 3 ... Resist pattern 4 ... Deformed resist pattern 5 ... Needle-like body 6 ... Duplicated plate 7 ... Needle-like body

Claims (6)

微細な針状体の製造方法において、In the method for producing fine needles,
基板にレジストを塗布する工程と、Applying a resist to the substrate;
前記レジストをパターニングし、レジストパターンを形成する工程と、Patterning the resist and forming a resist pattern;
前記基板にレジストを塗布した方向からエッチングを行い、エッチングされた基板と該エッチングされた基板上に曲面形状でありレジストからなる先端部を備える針状体とする工程とEtching from the direction in which a resist is applied to the substrate, and a step of forming a needle-like body having an etched substrate and a tip formed of a curved surface and resist on the etched substrate.
を備えることを特徴とする針状体の製造方法。A method for producing a needle-like body comprising:
記針状体先端部の曲面は、双3次曲面、クーンズ曲面、ベジエ曲面、B−スプライン曲面、ナーブス曲面、グレゴリー曲面からなる群から選ばれた自由曲面であること
を特徴とする請求項1記載の針状体の製造方法。
The curved surface of the front Kiharijotai tip bicubic curved, Coons curved surface, Bezier surface, B- spline surface, claims, characterized in that NURBS curved surface, a free curved surface selected from the group consisting of Gregory curved surfaces A method for producing the acicular body according to 1 .
前記基板にレジストを塗布した方向からエッチングを行い、エッチングされた基板と該エッチングされた基板上に曲面形状でありレジストからなる先端部を備える針状体とする工程の際、
針状体の基部を原点とし、
基部から針状体先端部への軸方向をZ軸とし、
前記Z軸と直交する任意の軸方向をX軸とし、
前記Z軸および前記X軸の両者と直交する軸方向をY軸とした3次元座標系の中で、
針状体側面部がテーパー形状であり、
針状体側面部のテーパー角度が30°以下の領域について、
針状体先端部の曲面上の座標が、下記数式を満たす範囲で、
エッチングを停止すること
を特徴とする請求項1または請求項2記載の針状体の製造方法
Etching from the direction in which a resist is applied to the substrate, and in the step of forming a needle-like body having a tip portion made of a resist and a curved shape on the etched substrate and the etched substrate,
With the base of the needle-shaped body as the origin,
The axial direction from the base to the tip of the needle is the Z axis,
An arbitrary axis direction orthogonal to the Z axis is defined as an X axis,
In a three-dimensional coordinate system in which the axis direction perpendicular to both the Z axis and the X axis is the Y axis,
The side surface of the needle-like body is tapered,
For the region where the taper angle of the side surface of the needle-like body is 30 ° or less,
In the range where the coordinates on the curved surface of the tip of the acicular body satisfy the following mathematical formula,
Etching is stopped. The method for manufacturing a needle-shaped body according to claim 1 or 2, wherein etching is stopped.
前記レジストをパターニングする工程において形成されるレジストパターンが円柱型のレジストパターンであって、前記エッチング工程の前に、該円柱型のレジストパターンを側面からの断面投影像が半円形状となるように変形させる工程を備えることを特徴とする請求項1から3のいずれかに記載の針状体の製造方法。The resist pattern formed in the step of patterning the resist is a cylindrical resist pattern, and the cross-sectional projection image from the side surface of the cylindrical resist pattern is formed in a semicircular shape before the etching step. The method for producing a needlelike object according to any one of claims 1 to 3, further comprising a step of deforming. 該円柱型のレジストパターンを側面からの断面投影像が半円形状となるように変形させる工程が、熱によりおこなわれることを特徴とする請求項4記載の針状体の製造方法。5. The method of manufacturing a needle-shaped body according to claim 4, wherein the step of deforming the cylindrical resist pattern so that a cross-sectional projection image from the side surface has a semicircular shape is performed by heat. 請求項1から5のいずれかに記載の針状体の製造方法で製造された針状体を母型とし、複製版を形成し、転写加工成形を行うこと
を特徴とする針状体の製造方法。
A needle-shaped body manufactured by the method for manufacturing a needle-shaped body according to any one of claims 1 to 5 is used as a matrix, a replica plate is formed, and transfer processing is performed. Method.
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