JP4975034B2 - ダブル光ファイバ接続を利用した微小空洞測定装置および方法 - Google Patents

ダブル光ファイバ接続を利用した微小空洞測定装置および方法 Download PDF

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Publication number
JP4975034B2
JP4975034B2 JP2008530300A JP2008530300A JP4975034B2 JP 4975034 B2 JP4975034 B2 JP 4975034B2 JP 2008530300 A JP2008530300 A JP 2008530300A JP 2008530300 A JP2008530300 A JP 2008530300A JP 4975034 B2 JP4975034 B2 JP 4975034B2
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Prior art keywords
microcavity
coupler
optical fiber
measurement
measuring device
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JP2009508114A (ja
JP2009508114A5 (enExample
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タン、ジュービン
チュイ、ジウェン
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ハルビン インスティチュート オブ テクノロジー
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2008530300A 2005-09-14 2006-07-19 ダブル光ファイバ接続を利用した微小空洞測定装置および方法 Expired - Fee Related JP4975034B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CNB2005101024786A CN1329711C (zh) 2005-09-14 2005-09-14 基于双光纤耦合的微小内腔体尺寸测量装置与方法
CN200510102478.6 2005-09-14
PCT/CN2006/001770 WO2007030993A1 (en) 2005-09-14 2006-07-19 Micro-cavity measuring equipment and method based on double optical fiber coupling

Publications (3)

Publication Number Publication Date
JP2009508114A JP2009508114A (ja) 2009-02-26
JP2009508114A5 JP2009508114A5 (enExample) 2011-04-21
JP4975034B2 true JP4975034B2 (ja) 2012-07-11

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JP2008530300A Expired - Fee Related JP4975034B2 (ja) 2005-09-14 2006-07-19 ダブル光ファイバ接続を利用した微小空洞測定装置および方法

Country Status (6)

Country Link
US (1) US7733477B2 (enExample)
JP (1) JP4975034B2 (enExample)
CN (1) CN1329711C (enExample)
DE (1) DE112006001788B4 (enExample)
GB (1) GB2440851B (enExample)
WO (1) WO2007030993A1 (enExample)

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WO2010108365A1 (en) * 2009-03-24 2010-09-30 Harbin Institute Of Technology Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof
CN101586942B (zh) * 2009-06-19 2011-02-02 北京工业大学 接触式光纤测头测量方法及其装置
CN101963491B (zh) * 2010-09-10 2012-10-31 珠海华伦造纸科技有限公司 造纸纤维图像测量方法
CN102410836B (zh) * 2011-07-26 2014-01-29 清华大学 基于二维位置敏感传感器的空间六自由度物体定位系统
CN102589439B (zh) * 2011-12-16 2015-04-22 哈尔滨工业大学 基于光纤布拉格光栅的接触式温度无感三维探测传感器
CN102589422B (zh) * 2011-12-16 2014-10-15 哈尔滨工业大学 正交光路二维微焦准直与三维坐标传感器
CN102564309B (zh) * 2011-12-16 2014-08-20 哈尔滨工业大学 基于光纤布拉格光栅的微孔尺寸测量装置
CN103900466B (zh) * 2014-03-20 2017-05-17 哈尔滨工业大学 基于偏振态检测的温度自补偿双光纤耦合球微尺度传感器
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CN103900470B (zh) * 2014-03-20 2017-01-11 哈尔滨工业大学 基于三光纤共球耦合的微测量力瞄准传感器
CN103900471A (zh) * 2014-03-20 2014-07-02 哈尔滨工业大学 基于双入射光纤共球耦合的微测量力瞄准传感器
CN103900481B (zh) * 2014-03-20 2016-08-24 哈尔滨工业大学 基于偏振态检测的保偏平光纤耦合球微尺度传感器
CN103900472B (zh) * 2014-03-20 2017-01-25 哈尔滨工业大学 基于偏振态检测的双入射保偏平光纤耦合球微尺度传感器
CN104907889B (zh) * 2015-07-06 2017-03-22 哈尔滨工业大学 一种基于psd原理的二维测力主轴夹具
CN105750928B (zh) * 2016-04-01 2017-11-21 哈尔滨工程大学 一种实现光纤沿轴心旋转的机械结构
KR101817132B1 (ko) * 2016-05-17 2018-01-10 주식회사 엑스엘 간섭계와 영상을 이용한 정밀 측정 시스템
JP6797639B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
JP6797638B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
CN111649651B (zh) * 2020-07-28 2021-11-19 怀化学院 一种产品设计用测量装置
CN112050755B (zh) * 2020-08-07 2021-11-12 深圳烯湾科技有限公司 测量超细纤维横截面积的方法
CN112904336A (zh) * 2021-02-10 2021-06-04 深圳市云视机器人有限公司 探测装置及自移动机器人
CN118565291B (zh) * 2024-07-08 2025-07-11 苏州丰泰精密机械有限公司 一种三坐标测量仪及其测量机械零部件尺寸公差的方法

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Also Published As

Publication number Publication date
GB0718827D0 (en) 2007-11-07
DE112006001788T5 (de) 2008-06-26
GB2440851B (en) 2010-11-10
US7733477B2 (en) 2010-06-08
CN1731084A (zh) 2006-02-08
GB2440851A (en) 2008-02-13
GB2440851B8 (en) 2010-01-05
JP2009508114A (ja) 2009-02-26
US20080209746A1 (en) 2008-09-04
CN1329711C (zh) 2007-08-01
DE112006001788B4 (de) 2015-10-15
WO2007030993A1 (en) 2007-03-22
WO2007030993A8 (en) 2007-09-27

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