CN1329711C - 基于双光纤耦合的微小内腔体尺寸测量装置与方法 - Google Patents

基于双光纤耦合的微小内腔体尺寸测量装置与方法 Download PDF

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Publication number
CN1329711C
CN1329711C CNB2005101024786A CN200510102478A CN1329711C CN 1329711 C CN1329711 C CN 1329711C CN B2005101024786 A CNB2005101024786 A CN B2005101024786A CN 200510102478 A CN200510102478 A CN 200510102478A CN 1329711 C CN1329711 C CN 1329711C
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dual
optical fiber
measured
measurement
measuring
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Chinese (zh)
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CN1731084A (zh
Inventor
谭久彬
崔继文
邹丽敏
敖磊
赵熙萍
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Priority to CNB2005101024786A priority Critical patent/CN1329711C/zh
Publication of CN1731084A publication Critical patent/CN1731084A/zh
Priority to PCT/CN2006/001770 priority patent/WO2007030993A1/en
Priority to US11/916,861 priority patent/US7733477B2/en
Priority to GB0718827A priority patent/GB2440851B/en
Priority to JP2008530300A priority patent/JP4975034B2/ja
Priority to DE112006001788.8T priority patent/DE112006001788B4/de
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CNB2005101024786A 2005-09-14 2005-09-14 基于双光纤耦合的微小内腔体尺寸测量装置与方法 Expired - Fee Related CN1329711C (zh)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CNB2005101024786A CN1329711C (zh) 2005-09-14 2005-09-14 基于双光纤耦合的微小内腔体尺寸测量装置与方法
PCT/CN2006/001770 WO2007030993A1 (en) 2005-09-14 2006-07-19 Micro-cavity measuring equipment and method based on double optical fiber coupling
US11/916,861 US7733477B2 (en) 2005-09-14 2006-07-19 Micro-cavity measuring equipment and method based on double optical fiber coupling
GB0718827A GB2440851B (en) 2005-09-14 2006-07-19 Micro-cavity measuring equipment and method based on double optical fibre coupling
JP2008530300A JP4975034B2 (ja) 2005-09-14 2006-07-19 ダブル光ファイバ接続を利用した微小空洞測定装置および方法
DE112006001788.8T DE112006001788B4 (de) 2005-09-14 2006-07-19 Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNB2005101024786A CN1329711C (zh) 2005-09-14 2005-09-14 基于双光纤耦合的微小内腔体尺寸测量装置与方法

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CN1731084A CN1731084A (zh) 2006-02-08
CN1329711C true CN1329711C (zh) 2007-08-01

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US (1) US7733477B2 (enExample)
JP (1) JP4975034B2 (enExample)
CN (1) CN1329711C (enExample)
DE (1) DE112006001788B4 (enExample)
GB (1) GB2440851B (enExample)
WO (1) WO2007030993A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1882579A1 (de) * 2006-07-27 2008-01-30 Soudronic AG Verfahren und Vorrichtung zur Herstellung von mit einer Siegelnaht versehenen Gegenständen
US7603785B2 (en) * 2007-02-20 2009-10-20 Electro Scientific Industries, Inc. Air bearing assembly for guiding motion of optical components of a laser processing system
US7886449B2 (en) * 2007-02-20 2011-02-15 Electro Scientific Industries, Inc. Flexure guide bearing for short stroke stage
US7889322B2 (en) * 2007-02-20 2011-02-15 Electro Scientific Industries, Inc. Specimen inspection stage implemented with processing stage coupling mechanism
WO2010108365A1 (en) * 2009-03-24 2010-09-30 Harbin Institute Of Technology Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof
CN101586942B (zh) * 2009-06-19 2011-02-02 北京工业大学 接触式光纤测头测量方法及其装置
CN101963491B (zh) * 2010-09-10 2012-10-31 珠海华伦造纸科技有限公司 造纸纤维图像测量方法
CN102410836B (zh) * 2011-07-26 2014-01-29 清华大学 基于二维位置敏感传感器的空间六自由度物体定位系统
CN102589439B (zh) * 2011-12-16 2015-04-22 哈尔滨工业大学 基于光纤布拉格光栅的接触式温度无感三维探测传感器
CN102589422B (zh) * 2011-12-16 2014-10-15 哈尔滨工业大学 正交光路二维微焦准直与三维坐标传感器
CN102564309B (zh) * 2011-12-16 2014-08-20 哈尔滨工业大学 基于光纤布拉格光栅的微孔尺寸测量装置
CN103900466B (zh) * 2014-03-20 2017-05-17 哈尔滨工业大学 基于偏振态检测的温度自补偿双光纤耦合球微尺度传感器
CN103900468A (zh) * 2014-03-20 2014-07-02 哈尔滨工业大学 带有端面微结构的双光纤共球耦合微测量力瞄准传感器
CN103900470B (zh) * 2014-03-20 2017-01-11 哈尔滨工业大学 基于三光纤共球耦合的微测量力瞄准传感器
CN103900471A (zh) * 2014-03-20 2014-07-02 哈尔滨工业大学 基于双入射光纤共球耦合的微测量力瞄准传感器
CN103900481B (zh) * 2014-03-20 2016-08-24 哈尔滨工业大学 基于偏振态检测的保偏平光纤耦合球微尺度传感器
CN103900472B (zh) * 2014-03-20 2017-01-25 哈尔滨工业大学 基于偏振态检测的双入射保偏平光纤耦合球微尺度传感器
CN104907889B (zh) * 2015-07-06 2017-03-22 哈尔滨工业大学 一种基于psd原理的二维测力主轴夹具
CN105750928B (zh) * 2016-04-01 2017-11-21 哈尔滨工程大学 一种实现光纤沿轴心旋转的机械结构
KR101817132B1 (ko) * 2016-05-17 2018-01-10 주식회사 엑스엘 간섭계와 영상을 이용한 정밀 측정 시스템
JP6797639B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
JP6797638B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
CN111649651B (zh) * 2020-07-28 2021-11-19 怀化学院 一种产品设计用测量装置
CN112050755B (zh) * 2020-08-07 2021-11-12 深圳烯湾科技有限公司 测量超细纤维横截面积的方法
CN112904336A (zh) * 2021-02-10 2021-06-04 深圳市云视机器人有限公司 探测装置及自移动机器人
CN118565291B (zh) * 2024-07-08 2025-07-11 苏州丰泰精密机械有限公司 一种三坐标测量仪及其测量机械零部件尺寸公差的方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1079047A (zh) * 1992-05-21 1993-12-01 清华大学 激光高精度测量大型工件内外径装置及方法
CN2578823Y (zh) * 2002-11-01 2003-10-08 秦书乐 一种光纤探头
CN1598480A (zh) * 2004-09-22 2005-03-23 哈尔滨工业大学 采用布里渊光纤环形激光器测量超窄激光线宽的装置和测量方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943302A (ja) * 1982-09-06 1984-03-10 Mitsutoyo Mfg Co Ltd タツチプロ−ブ装置
JPS61103762A (ja) * 1984-10-29 1986-05-22 Osaka Kiko Co Ltd ワ−ク自動計測装置
US4806016A (en) * 1987-05-15 1989-02-21 Rosemount Inc. Optical displacement sensor
JP2817975B2 (ja) * 1989-12-20 1998-10-30 株式会社ソキア 三次元測定装置
US5434669A (en) * 1990-10-23 1995-07-18 Olympus Optical Co., Ltd. Measuring interferometric endoscope having a laser radiation source
JPH0792381B2 (ja) * 1991-11-07 1995-10-09 株式会社ミツトヨ 三次元測定機用プローブ
CN1093163A (zh) * 1993-04-01 1994-10-05 浙江大学 光纤位移传感器
CN1104765A (zh) * 1993-12-30 1995-07-05 天津大学 测量盲小孔与狭槽的三维测头和测量方法
JP3464835B2 (ja) * 1994-10-31 2003-11-10 東京航空計器株式会社 微小円筒形部品の穴径・同心度測定装置
EP0988505B1 (de) * 1997-06-12 2002-01-09 Werth Messtechnik GmbH Koordinatenmessgerät mit biegeelastischer Tasterverlängerung und optischem Sensor
DE19805892A1 (de) * 1997-06-12 1998-12-24 Werth Messtechnik Gmbh Verfahren und Anordnung zur Messung von Strukturen eines Objekts
JPH11108640A (ja) * 1997-09-30 1999-04-23 Mitsubishi Cable Ind Ltd 光学式触覚センサ
DE29808683U1 (de) * 1998-05-13 1998-08-20 Kunzmann, Horst, 38116 Braunschweig Anordnung zur Sensierung der dritten Raumrichtung bei einem mikromechanischen Tastsystem
JP2003004433A (ja) * 2001-06-21 2003-01-08 Sankyo Seiki Mfg Co Ltd 微小内径測定方法及び装置
US7016052B2 (en) * 2001-09-28 2006-03-21 The Boeing Company Apparatus for measuring characteristics of a hole and associated method
CN1346965A (zh) * 2001-10-15 2002-05-01 天津大学 一种光纤干涉测量距离的方法及测量设备
DE10258283B4 (de) * 2002-12-13 2011-02-17 Carl Mahr Holding Gmbh Tasteinrichtung zur Werkstückvermessung
US7023557B2 (en) * 2003-08-05 2006-04-04 Agilent Technologies, Inc. Parallel interferometric measurements using an expanded local oscillator signal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1079047A (zh) * 1992-05-21 1993-12-01 清华大学 激光高精度测量大型工件内外径装置及方法
CN2578823Y (zh) * 2002-11-01 2003-10-08 秦书乐 一种光纤探头
CN1598480A (zh) * 2004-09-22 2005-03-23 哈尔滨工业大学 采用布里渊光纤环形激光器测量超窄激光线宽的装置和测量方法

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Publication number Publication date
GB0718827D0 (en) 2007-11-07
JP4975034B2 (ja) 2012-07-11
DE112006001788T5 (de) 2008-06-26
GB2440851B (en) 2010-11-10
US7733477B2 (en) 2010-06-08
CN1731084A (zh) 2006-02-08
GB2440851A (en) 2008-02-13
GB2440851B8 (en) 2010-01-05
JP2009508114A (ja) 2009-02-26
US20080209746A1 (en) 2008-09-04
DE112006001788B4 (de) 2015-10-15
WO2007030993A1 (en) 2007-03-22
WO2007030993A8 (en) 2007-09-27

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