DE112006001788B4 - Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung - Google Patents

Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung Download PDF

Info

Publication number
DE112006001788B4
DE112006001788B4 DE112006001788.8T DE112006001788T DE112006001788B4 DE 112006001788 B4 DE112006001788 B4 DE 112006001788B4 DE 112006001788 T DE112006001788 T DE 112006001788T DE 112006001788 B4 DE112006001788 B4 DE 112006001788B4
Authority
DE
Germany
Prior art keywords
probe
measuring device
micro
receiver
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE112006001788.8T
Other languages
German (de)
English (en)
Other versions
DE112006001788T5 (de
Inventor
Jiubin Tan
Jiwen Cui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Harbin Institute of Technology Shenzhen
Original Assignee
Harbin Institute of Technology
Harbin Institute of Technology Shenzhen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology, Harbin Institute of Technology Shenzhen filed Critical Harbin Institute of Technology
Publication of DE112006001788T5 publication Critical patent/DE112006001788T5/de
Application granted granted Critical
Publication of DE112006001788B4 publication Critical patent/DE112006001788B4/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G01B5/201—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring roundness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/08—Measuring arrangements characterised by the use of optical techniques for measuring diameters
    • G01B11/12—Measuring arrangements characterised by the use of optical techniques for measuring diameters internal diameters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2408—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring roundness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE112006001788.8T 2005-09-14 2006-07-19 Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung Expired - Fee Related DE112006001788B4 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CNB2005101024786A CN1329711C (zh) 2005-09-14 2005-09-14 基于双光纤耦合的微小内腔体尺寸测量装置与方法
CN200510102478.6 2005-09-14
PCT/CN2006/001770 WO2007030993A1 (en) 2005-09-14 2006-07-19 Micro-cavity measuring equipment and method based on double optical fiber coupling

Publications (2)

Publication Number Publication Date
DE112006001788T5 DE112006001788T5 (de) 2008-06-26
DE112006001788B4 true DE112006001788B4 (de) 2015-10-15

Family

ID=35963481

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112006001788.8T Expired - Fee Related DE112006001788B4 (de) 2005-09-14 2006-07-19 Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung

Country Status (6)

Country Link
US (1) US7733477B2 (enExample)
JP (1) JP4975034B2 (enExample)
CN (1) CN1329711C (enExample)
DE (1) DE112006001788B4 (enExample)
GB (1) GB2440851B (enExample)
WO (1) WO2007030993A1 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1882579A1 (de) * 2006-07-27 2008-01-30 Soudronic AG Verfahren und Vorrichtung zur Herstellung von mit einer Siegelnaht versehenen Gegenständen
US7603785B2 (en) * 2007-02-20 2009-10-20 Electro Scientific Industries, Inc. Air bearing assembly for guiding motion of optical components of a laser processing system
US7886449B2 (en) * 2007-02-20 2011-02-15 Electro Scientific Industries, Inc. Flexure guide bearing for short stroke stage
US7889322B2 (en) * 2007-02-20 2011-02-15 Electro Scientific Industries, Inc. Specimen inspection stage implemented with processing stage coupling mechanism
GB2480202B (en) * 2009-03-24 2017-04-05 Harbin Institute Technology Micro focal-length collimation based micro-cavity measuring method and detecting equipment thereof
CN101586942B (zh) * 2009-06-19 2011-02-02 北京工业大学 接触式光纤测头测量方法及其装置
CN101963491B (zh) * 2010-09-10 2012-10-31 珠海华伦造纸科技有限公司 造纸纤维图像测量方法
CN102410836B (zh) * 2011-07-26 2014-01-29 清华大学 基于二维位置敏感传感器的空间六自由度物体定位系统
CN102564309B (zh) * 2011-12-16 2014-08-20 哈尔滨工业大学 基于光纤布拉格光栅的微孔尺寸测量装置
CN102589439B (zh) * 2011-12-16 2015-04-22 哈尔滨工业大学 基于光纤布拉格光栅的接触式温度无感三维探测传感器
CN102589422B (zh) * 2011-12-16 2014-10-15 哈尔滨工业大学 正交光路二维微焦准直与三维坐标传感器
CN103900472B (zh) * 2014-03-20 2017-01-25 哈尔滨工业大学 基于偏振态检测的双入射保偏平光纤耦合球微尺度传感器
CN103900481B (zh) * 2014-03-20 2016-08-24 哈尔滨工业大学 基于偏振态检测的保偏平光纤耦合球微尺度传感器
CN103900468A (zh) * 2014-03-20 2014-07-02 哈尔滨工业大学 带有端面微结构的双光纤共球耦合微测量力瞄准传感器
CN103900471A (zh) * 2014-03-20 2014-07-02 哈尔滨工业大学 基于双入射光纤共球耦合的微测量力瞄准传感器
CN103900470B (zh) * 2014-03-20 2017-01-11 哈尔滨工业大学 基于三光纤共球耦合的微测量力瞄准传感器
CN103900466B (zh) * 2014-03-20 2017-05-17 哈尔滨工业大学 基于偏振态检测的温度自补偿双光纤耦合球微尺度传感器
CN104907889B (zh) * 2015-07-06 2017-03-22 哈尔滨工业大学 一种基于psd原理的二维测力主轴夹具
CN105750928B (zh) * 2016-04-01 2017-11-21 哈尔滨工程大学 一种实现光纤沿轴心旋转的机械结构
KR101817132B1 (ko) * 2016-05-17 2018-01-10 주식회사 엑스엘 간섭계와 영상을 이용한 정밀 측정 시스템
JP6797639B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
JP6797638B2 (ja) * 2016-11-02 2020-12-09 株式会社キーエンス 画像測定装置
CN111649651B (zh) * 2020-07-28 2021-11-19 怀化学院 一种产品设计用测量装置
CN112050755B (zh) * 2020-08-07 2021-11-12 深圳烯湾科技有限公司 测量超细纤维横截面积的方法
CN112904336A (zh) * 2021-02-10 2021-06-04 深圳市云视机器人有限公司 探测装置及自移动机器人
CN118565291B (zh) * 2024-07-08 2025-07-11 苏州丰泰精密机械有限公司 一种三坐标测量仪及其测量机械零部件尺寸公差的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806016A (en) * 1987-05-15 1989-02-21 Rosemount Inc. Optical displacement sensor
US5434669A (en) * 1990-10-23 1995-07-18 Olympus Optical Co., Ltd. Measuring interferometric endoscope having a laser radiation source
DE29808683U1 (de) * 1998-05-13 1998-08-20 Kunzmann, Horst, 38116 Braunschweig Anordnung zur Sensierung der dritten Raumrichtung bei einem mikromechanischen Tastsystem
DE19805892A1 (de) * 1997-06-12 1998-12-24 Werth Messtechnik Gmbh Verfahren und Anordnung zur Messung von Strukturen eines Objekts
DE10258283A1 (de) * 2002-12-13 2004-07-22 Carl Mahr Holding Gmbh Tasteinrichtung zur Werkstückvermessung

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5943302A (ja) * 1982-09-06 1984-03-10 Mitsutoyo Mfg Co Ltd タツチプロ−ブ装置
JPS61103762A (ja) * 1984-10-29 1986-05-22 Osaka Kiko Co Ltd ワ−ク自動計測装置
JP2817975B2 (ja) * 1989-12-20 1998-10-30 株式会社ソキア 三次元測定装置
JPH0792381B2 (ja) * 1991-11-07 1995-10-09 株式会社ミツトヨ 三次元測定機用プローブ
CN1028383C (zh) * 1992-05-21 1995-05-10 清华大学 激光高精度测量大型工件内外径装置及方法
CN1093163A (zh) * 1993-04-01 1994-10-05 浙江大学 光纤位移传感器
CN1104765A (zh) * 1993-12-30 1995-07-05 天津大学 测量盲小孔与狭槽的三维测头和测量方法
JP3464835B2 (ja) * 1994-10-31 2003-11-10 東京航空計器株式会社 微小円筒形部品の穴径・同心度測定装置
US6651351B1 (en) * 1997-06-12 2003-11-25 Werth Messtechnik Gmbh Coordinate measuring instrument with feeler element and optic sensor for measuring the position of the feeler
JPH11108640A (ja) * 1997-09-30 1999-04-23 Mitsubishi Cable Ind Ltd 光学式触覚センサ
JP2003004433A (ja) * 2001-06-21 2003-01-08 Sankyo Seiki Mfg Co Ltd 微小内径測定方法及び装置
US7016052B2 (en) * 2001-09-28 2006-03-21 The Boeing Company Apparatus for measuring characteristics of a hole and associated method
CN1346965A (zh) * 2001-10-15 2002-05-01 天津大学 一种光纤干涉测量距离的方法及测量设备
CN2578823Y (zh) * 2002-11-01 2003-10-08 秦书乐 一种光纤探头
US7023557B2 (en) * 2003-08-05 2006-04-04 Agilent Technologies, Inc. Parallel interferometric measurements using an expanded local oscillator signal
CN1267696C (zh) * 2004-09-22 2006-08-02 哈尔滨工业大学 采用布里渊环形激光器测量超窄激光线宽的装置和方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4806016A (en) * 1987-05-15 1989-02-21 Rosemount Inc. Optical displacement sensor
US5434669A (en) * 1990-10-23 1995-07-18 Olympus Optical Co., Ltd. Measuring interferometric endoscope having a laser radiation source
DE19805892A1 (de) * 1997-06-12 1998-12-24 Werth Messtechnik Gmbh Verfahren und Anordnung zur Messung von Strukturen eines Objekts
DE29808683U1 (de) * 1998-05-13 1998-08-20 Kunzmann, Horst, 38116 Braunschweig Anordnung zur Sensierung der dritten Raumrichtung bei einem mikromechanischen Tastsystem
DE10258283A1 (de) * 2002-12-13 2004-07-22 Carl Mahr Holding Gmbh Tasteinrichtung zur Werkstückvermessung

Also Published As

Publication number Publication date
GB0718827D0 (en) 2007-11-07
CN1731084A (zh) 2006-02-08
US7733477B2 (en) 2010-06-08
GB2440851B (en) 2010-11-10
JP2009508114A (ja) 2009-02-26
WO2007030993A8 (en) 2007-09-27
DE112006001788T5 (de) 2008-06-26
GB2440851B8 (en) 2010-01-05
WO2007030993A1 (en) 2007-03-22
CN1329711C (zh) 2007-08-01
JP4975034B2 (ja) 2012-07-11
GB2440851A (en) 2008-02-13
US20080209746A1 (en) 2008-09-04

Similar Documents

Publication Publication Date Title
DE112006001788B4 (de) Mikrovertiefungsmessvorrichtung und -verfahren basierend auf der Doppeloptofaserkopplung
EP1754018B1 (de) Vorrichtung und verfahren zum prüfen von oberflächen im inneren von löchern
DE102011011065B4 (de) Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
EP2093537A1 (de) Verfahren und Vorrichtung zur Ermittlung einer Ausrichtung von zwei drehbar gelagerten Maschinenteilen, einer Ausrichtung von zwei hohlzylinderförmigen Maschinenteilen oder zur Prüfung einer Komponente auf Geradheit entlang einer Längsseite
DE3334460A1 (de) Mehrkoordinaten-messmaschine
EP3608625B1 (de) Oct vermessung
DE102011012611B4 (de) Verfahren und Vorrichtung zur berührungslosen Messung eines Winkels
DE3315702A1 (de) Optische einrichtung und messverfahren zur benutzung mit einer laser-messeinrichtung
DE69610200T2 (de) Opto-elektronischer messapparat für die verifikation von lineardimensionen
WO1999063301A1 (de) Anordnung zur messung von strukturen eines objektes
DE102011083421A1 (de) Verfahren und Vorrichtung zum Vermessen homogen reflektierender Oberflächen
EP2875310B1 (de) OPTISCHE MESSSONDE UND VERFAHREN ZUR OPTISCHEN MESSUNG VON INNEN- UND AUßENDURCHMESSERN
EP3435032B1 (de) Optischer rauheitssensor für eine koordinatenmessmaschine
EP2847543B1 (de) Messeinrichtung und verfahren zum vermessen eines messobjekts
DE19548158C2 (de) Vorrichtung zur berührungslosen Messung von Oberflächenschwingungen
EP1658470B1 (de) Optisches messsystem zum erfassen von geometriedaten von oberflächen
DE2164347A1 (de) Verfahren und Vorrichtung zur Steigungsmessung einer Leitspindel
DE19816271C1 (de) Verfahren und Vorrichtung zur Profilbestimmung einer Materialoberfläche
DE69126918T2 (de) Messverfahren des Einfallwinkels eines Lichtstrahls, Vorrichtung zur Durchführung des Verfahrens sowie deren Verwendung zur Entfernungsmessung
DE10131779B4 (de) Interferometrische Messvorrichtung
EP1963781A1 (de) Abtastsystem zum abtasten einer objektoberfläche, insbesondere für eine koordinaten-messmaschine
EP1210564B1 (de) Interferometrische messvorrichtung
EP1610089A2 (de) Verfahren und Vorrichtung zur Messung von Winkeln optischer Oberflächen
DE2539577A1 (de) Verfahren und vorrichtung zum feststellen von winkelversetzungen
DE3841742A1 (de) Koordinatenmesstaster mit absolutinterferometrischem beruehrungslosem messprinzip

Legal Events

Date Code Title Description
OP8 Request for examination as to paragraph 44 patent law
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R016 Response to examination communication
R018 Grant decision by examination section/examining division
R020 Patent grant now final
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee