JP4969950B2 - Irradiation source with flange - Google Patents

Description

  The present invention relates to a flanged radiation source.

Conventionally, a structure in which a discharge tube as an irradiation source that generates a vacuum ultraviolet spectrum light such as a deuterium lamp is connected to a housing of a vacuum apparatus in which a spectroscope is housed in a vacuum chamber, for example, is disclosed in Patent Document 1 below. Are listed. In this Patent Document 1, a cylindrical hermetic wall is formed in a part of the discharge tube in which the emitted light of the discharge tube travels parallel to the axis and is emitted to the outside through a window provided at one end thereof, and There is described a configuration in which an annular concave groove is provided on the outer surface of the cylindrical airtight wall, an O-ring is fitted into the concave groove, and the O-ring is mounted on a vacuum device housing having the vacuum chamber.
Japanese Utility Model Publication No. 60-35958

  Here, the technique of mounting the discharge tube on the housing of the vacuum apparatus via a flange is attracting attention, but the flange and the discharge tube may be displaced in the optical axis direction, and the irradiation conditions are not constant and stable. There is a problem that it cannot be irradiated.

  The present invention has been made to solve such problems, and an object of the present invention is to provide a flanged irradiation source in which irradiation conditions are uniform and stable irradiation is possible.

The irradiation source with a flange according to the first invention includes a flange positioning member that fixes the flange and positions the casing having the irradiation source and the flange, and the casing includes a main body portion that accommodates the irradiation source, and a cylindrical shape. And a discharge part that protrudes in one direction from the main body part and through which the irradiation line from the irradiation source passes and enables emission from the emission window at the end part, and the discharge part has an annular flange and flange The positioning member is inserted, an O-ring is crimped between the inner peripheral surface of the flange and the outer peripheral surface of the discharge portion, and the flange positioning member is fixed to the end surface of the flange .

According to such an irradiation source with a flange, since the casing having the irradiation source and the flange are positioned by the flange positioning member for fixing the flange, the irradiation condition is made uniform and stable irradiation is possible. . In addition, since the flange is attached to the discharge portion via the O-ring, the main body portion and the flange can be rotated relative to each other. When the flange is fixed to the apparatus housing to which the flange is attached, for example, the main body portion It is possible to fix the bolt while rotating the main body so as not to get in the way. Further, at the time of rotation, the flange positioning member serves as a guide with respect to the discharge portion, and an axial deviation due to the collapse of the O-ring is prevented. In addition, the flange positioning member and the flange can cool only the discharge part that has little effect on the temperature of the main body housing the irradiation source, and the temperature of the discharge part alone is lowered while maintaining the main body at a temperature effective for irradiation. Is possible.

The flange positioning member is preferably configured to be sandwiched between the end face of the flange and the end face of the main body.

  When such a configuration is adopted, the main body portion and the flange are easily and accurately positioned by the flange positioning member.

The irradiation source with a flange according to the second invention includes a flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange, the irradiation source being a filament, and the casing being a filament inside And an X-ray tube container having an exit window for receiving the target and emitting X-rays from the target at the end, and the housing is inserted through an annular flange and a flange positioning member, and the flange inner peripheral surface and the housing An O-ring is crimped between the flange positioning member, the flange positioning member is fixed to the end face of the flange, and is positioned to cover the filament .

According to such an irradiation source with a flange, since the casing having the irradiation source and the flange are positioned by the flange positioning member for fixing the flange, the irradiation condition is made uniform and stable irradiation is possible. . Further , the filament can be cooled by the flange positioning member.

Further, flange is preferably Ru is connected via a conductive member to the target.

  Moreover, it is preferable that the exit window protrudes outward from the end surface on the opposite side of the flange.

  When such a configuration is adopted, the position of the irradiation object in the apparatus housing to which the flange is attached can be brought closer, and the irradiation density can be increased.

  The O-ring is preferably arranged in two stages along the axial direction.

  When such a configuration is employed, airtightness is ensured because the shaft shake is reduced when the casing and the flange that accommodates the irradiation source are rotated as compared with the case where the O-ring is provided in a single stage. .

According to a third aspect of the present invention, a flange irradiation source includes a flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange, and the casing is inserted through the annular flange and the flange positioning member. The flange positioning member is sealed to the housing, and the housing is formed in a cylindrical shape and protrudes in one direction from the main body to pass the irradiation line from the irradiation source. A discharge portion that enables emission from the emission window at the end, the discharge portion is inserted through the flange and the flange positioning member, and the flange positioning member is sealed to the discharge portion .

According to such an irradiation source with a flange, since the casing having the irradiation source and the flange are positioned by the flange positioning member for fixing the flange, the irradiation condition is made uniform and stable irradiation is possible. . In addition, since the flange positioning member is sealed to the housing, airtightness is reliably ensured. Then, the flange positioning member and the flange can cool only the discharge part that has little influence on the temperature of the main body part that accommodates the irradiation source, and the temperature of only the discharge part is lowered while maintaining the main body part at a temperature effective for irradiation. Is possible .

  In addition, the flange positioning member is preferably sealed with a bonding material at the discharge portion, and considering the expansion coefficient, processing temperature, softness to absorb distortion, etc., as the bonding agent, for example, glass, It is preferable to use ceramic, brazing material or solder.

  Moreover, it is preferable that the flange positioning member has a region for setting the bonding material, and the bonding material set in the region flows between the flange positioning member and the discharge portion and is sealed.

  When such a configuration is adopted, sealing is facilitated, the sealing volume is increased by the area, and the sealing strength is increased.

  Further, the flange positioning member may be directly sealed without using a bonding material at the discharge portion.

  According to this, the sealing strength can be increased and the sealing can be performed at the time of forming the discharge portion, which is efficient.

  Here, the flange positioning member may be configured to be sealed perpendicular to the discharge portion.

  Here, if the flange is directly welded to the discharge part, the heat capacity becomes large, and there is a risk that cracking or the like may occur during cooling. It is preferably welded to the flange positioning member.

  Further, it is preferable that a heat dissipating filler is disposed between the flange positioning member and the discharge portion.

  When such a configuration is adopted, the discharge portion is radiated by the heat radiating filler.

  Further, it is preferable that a radiator is provided on the outer surface of the flange positioning member.

  When such a configuration is adopted, the housing is dissipated by the heat dissipation of the radiator.

  Moreover, it is preferable that the flange positioning member can be connected in the axial direction, and the axial position of the flange can be adjusted.

  When such a configuration is adopted, it is possible to adjust the axial position of the flange by connecting the flange positioning member in the axial direction, and the position of the exit window at the end of the discharge section with respect to the apparatus housing to which the flange is attached is Adjusted.

  Further, between the flange positioning member and the flange, there is provided an adjusting means for surrounding the discharge portion so as to be expandable and contractable in the axial direction from the outside and adjusting the distance between the flange positioning member and the flange. Is preferred.

  When such a configuration is adopted, the position of the exit window at the end of the discharge section relative to the apparatus housing to which the flange is attached is freely adjusted by the adjusting means, and in addition, the exit window is mounted after the flange is attached to the apparatus housing. The position of can be freely adjusted.

According to a fourth aspect of the present invention, a flange irradiation source includes a flange positioning member that fixes the flange and positions the casing having the irradiation source and the flange, and the casing is inserted through the annular flange and the flange positioning member. The flange positioning member is sealed to the casing, the irradiation source is a filament, the casing contains the filament and the target, and has an exit window for emitting X-rays from the target at the end. It is a container and the flange positioning member is located at a position covering the filament and is sealed to the housing .

According to such an irradiation source with a flange, since the casing having the irradiation source and the flange are positioned by the flange positioning member for fixing the flange, the irradiation condition is made uniform and stable irradiation is possible. . In addition, since the flange positioning member is sealed to the housing, airtightness is reliably ensured. The filament can be cooled by the flange positioning member.

  The flange is preferably connected to the target via a conductive member.

  When such a configuration is adopted, the target can be cooled by the flange via the conductive member.

  Here, the flange is preferably a knife-edge type conflat flange.

  When such a configuration is adopted, airtightness can be further ensured.

  According to the irradiation source with a flange of the present invention, the irradiation conditions are uniform, and stable irradiation can be performed.

  Hereinafter, a preferred embodiment of a flanged radiation source according to the present invention will be described with reference to FIGS. In the description of the drawings, the same or equivalent elements will be denoted by the same reference numerals, and redundant description will be omitted.

  FIG. 1 is a view showing a flanged radiation source according to a first embodiment of the present invention, in which FIG. 1 (a) is a longitudinal sectional view, and FIG. 1 (b) is a left side view. In the embodiment, a D2 (deuterium) lamp whose irradiation source is a UV light source is targeted.

  As shown in FIG. 1, the irradiation source 101 with a flange is provided with the housing | casing 1, the flange 2, and the flange positioning member 3, and the housing | casing 1 has the main-body part 1a and the discharge | release part 1b. It is configured.

  The main body 1a constituting the housing 1 is formed in a substantially cylindrical shape having a space inside, and accommodates a light source including a metal electrode portion in the main body 1a.

The discharge part 1b which comprises the housing | casing 1 comprises cylindrical shape, protrudes from one end surface (illustration right end surface) of the main-body part 1a to one direction (illustration right direction), and the inside of the cylinder is connected with the internal space of the main-body part 1a. In this case, it is configured as a glass bulb, and the light from the light source in the main body 1a passes through the glass bulb 1b. Then, the end portion of the glass bulb 1b, for example, the exit window 1c made of MgF ₂ is installed, and emits the light from the light source through the emission window 1c to the outside.

  As the flange 2, a knife edge type conflat flange is used here. The flange 2 has a disc shape and has a through hole 2a in the center. The glass bulb 1b is inserted into the through hole 2a, and the exit window 1c is unidirectional from one end surface (the right end surface in the drawing) of the flange 2. It is the structure which protrudes and is located in the (right direction of illustration). On the main body 1a side of the inner peripheral surface of the flange 2, there is provided a recess that is recessed from the other end surface (the left end surface in the figure) of the flange 2 and has an inner diameter larger than that of the exit window 1c. Between the outer peripheral surface and the inner peripheral surface of the concave portion of the flange 2, O-rings 4 are arranged in two stages along the axial direction, and between the O-rings 4, 4, the O-rings 4, 4 are arranged. A presser ring X, which is a tubular member having a trapezoidal cross section, which is crimped to the inner peripheral surface of the concave portion of the flange 2 is disposed. Further, the flange 2 is provided with a plurality of through holes 2b for inserting bolts along the circumferential direction at a position on the outer peripheral surface side thereof. This through-hole 2b is for fixing the flange 2 to the apparatus housing to which the flange 2 is attached by bolts. Here, the device casing is a vacuum device including a vacuum chamber. A plurality of screw holes 2c are provided along the circumferential direction inside the through hole 2b on the other end surface of the flange 2. The screw hole 2c is for fixing the flange 2 and the flange positioning member 3 with bolts.

  The flange positioning member 3 is configured to have an annular flange 3b having a smaller diameter than the flange 2 on one end side of the cylindrical tube portion 3a, and is here configured as a metal ring. The flange positioning member 3 is disposed between the main body 1a and the flange 2 with the glass bulb 1b inserted through the cylindrical hole. The flange positioning member 3 is provided with a plurality of bolt insertion through holes 3c along the circumferential direction at a position on the outer peripheral surface side, and bolts 5 are inserted into the through holes 3c so that the screw holes of the flange 2 are inserted. The flange 2 and the flange positioning member 3 are fixed by screwing to 2c. In this state, the flange positioning member 3 is sandwiched between the main body 1a and the flange 2, the O-ring 4 is pressed in the axial direction by the flange positioning member 3, and one end surface of the flange positioning member 3 and the flange 2 are pressed. The other end surface of the flange positioning member 3 and the one end surface of the main body 1a are in close contact with each other.

  In the flanged radiation source 101 having such a configuration, first, the flange positioning member 3 is extrapolated to the glass bulb 1b of the housing 1, and the other end surface of the flange positioning member 3 is abutted against one end surface of the main body 1a. Thereafter, O-rings 4 and 4 having a presser ring X sandwiched between them are arranged on the outer peripheral surface of the glass bulb 1b, and then the flange 2 is extrapolated to the glass bulb 1b. The flange positioning member 3 and the flange 2 are fixed by abutting the other end surface of the bolt and tightening the bolt 5. The main body 1a and the flange 2 are positioned easily and accurately by the flange positioning member 3, and the O-ring 4 is crushed and pressed between the outer peripheral surface of the glass bulb 1b and the inner peripheral surface of the concave portion of the flange 2. Pressurized to give vacuum tightness. In addition, since vacuum tightness should just crimp | crimp at least between the level | step-difference part in the recessed part of the flange 2, and the outer peripheral surface of the glass bulb 1b with the O-ring 4, when the flange 2 is extrapolated to the glass bulb 1b, Considering workability and the like, the outermost diameter of the O-ring 4 is smaller than the inner diameter of the portion of the flange 2 where the inner diameter is larger than the exit window 1c side and larger than the exit window 1c side. Also good.

  Thus, according to 1st Embodiment, since the housing | casing 1 and the flange 2 which have an irradiation source are positioned by the flange positioning member 3 which fixes the flange 2, irradiation conditions can be made uniform and stable irradiation. It can be performed.

  Further, since the flange positioning member 3 is sandwiched between the end face of the flange 2 and the end face of the main body 1a, the main body 1a and the flange 2 can be positioned easily and accurately.

  In addition, since the flange 2 is attached to the glass bulb 1b via the O-ring 4, the main body 1a and the flange 2 can be rotated relative to each other, and when the flange 2 is bolted to the counterpart apparatus housing In addition, the main body 1a can be bolted while rotating so that the main body 1a does not get in the way. Further, at the time of rotation, the flange positioning member 3 serves as a guide with respect to the glass bulb 1b, and an axial shift due to the collapse of the O-ring 4 can be prevented. Further, the flange positioning member 3 and the flange 2 can cool only the glass bulb 1b that has little influence on the temperature of the main body 1a that accommodates the irradiation source, and the glass bulb 1b is maintained while maintaining the main body 1a at a temperature effective for irradiation. Only the temperature can be lowered. Thereby, impurities generated by the discharge of the electrodes and the like in the main body 1a are trapped by the glass bulb 1b, and deposition on the emission window 1c can be suppressed. As a result, it is possible to suppress deterioration of the transmittance of the exit window 1c and to extend the life of the irradiation source.

  In addition, since the O-ring 4 is accommodated in the flange 2, the size can be reduced, whereby the exit window 1 c can be protruded outward from one end face of the flange 2. For this reason, the position with the irradiated object in the apparatus housing | casing of the other party can be brought close, and an irradiation density can be raised.

  Further, since the O-ring 4 is arranged in two stages along the axial direction, the shaft accompanying the impact on the main body 1a when the casing 1 and the flange 2 accommodating the irradiation source are rotated or used. Since blurring can be reduced, airtightness can be ensured as compared with a case where the O-ring is made one stage.

  Moreover, since the knife edge type | mold conflat flange is used as the flange 2, securing of airtightness can further be improved.

  Here, as a particularly preferable example, the cylindrical portion 3a and the flange portion 3b of the flange positioning member 3 are integrated, but may be separate.

FIG. 2 is a longitudinal sectional view showing a flanged radiation source according to the second embodiment of the present invention. In the flanged irradiation source 102 of the second embodiment, the D2 lamp has a body of BC material and has a different expansion coefficient from the exit window 1c formed from MgF ₂ , so that the glass bulb 1b expands in the middle. It is formed by a step connection that changes the coefficient stepwise along the axial direction.

  Here, since the flange 12 does not use an O-ring, the inner peripheral surface has a shape without a step. Further, the flange 12 has a boss portion 12 a that protrudes in the axial direction on the other end surface side, and a concave portion provided on one end surface of the flange positioning member 13 with the tip of the boss portion 12 a having a small diameter via a stepped portion. The glass bulb 1b is inserted through the flange 12 having the boss portion 12a.

  The flange positioning member 13 is formed in an annular shape, and is formed in a metal ring in consideration of the expansion coefficient for the glass bulb 1b with the above expansion coefficient. The flange positioning member 13 is abutted against the other end surface of the flange 12, and the tip of the boss portion 12a of the flange 12 enters the concave portion of the flange positioning member 13. The flange positioning member 13 and the flange 12 are The joint portion between the outer peripheral surface of the member 13 and the outer peripheral surface of the boss portion 12a of the flange 12 is fixed by a laser welded portion 80 obtained by laser welding from the outside.

  The flange positioning member 13 is sealed with respect to the glass bulb 1b through the bonding material 6 in a state where the flange positioning member 13 is positioned with respect to the glass bulb 1b. It is sealed (between the main body 1a and the flange 12). Therefore, the flange positioning member 13 is made of KOV (Kovar) metal so as to match the expansion coefficient of the BC material.

  As the bonding material 6, for example, frit glass, an inorganic adhesive, high-temperature solder, or the like is used, and the flange positioning member 13 is hermetically sealed to the glass bulb 1b. It is preferable to select the bonding material 6 in consideration of an expansion coefficient, a processing temperature, a softness to absorb distortion, and the like.

For example, when frit glass or an inorganic adhesive is used as the bonding material 6, the glass bulb 1 b and the flange positioning member 13 are directly sealed. In this case, for example, a composite material obtained by mixing a PbO—B ₂ O ₃ glass powder and ceramic, Na ₂ O.BaO.SiO ₂ , Na ₂ O.Al ₂ O ₃ .BaO.SiO ₂ , etc. It is preferable to use a new material.

  For example, when high temperature solder is used, it is preferable to deposit Cr and Ni on the glass bulb 1b in order to improve the familiarity with the solder and improve the airtightness. In particular, it is preferable that Cr is first reacted with vitreous to provide a diffusion layer. For example, it is preferable to use airtight solder such as Sn / Ag, Sn / Cu, Sn / Ag / Cu, Sn / Sb, or Sn / Sb / Pb.

  Here, since the bonding material 6 is heated and melted, a predetermined annular gap is provided between the inner peripheral surface of the flange positioning member 13 and the glass bulb 1b, and the other end side of the gap. (Left end side in the figure) is a pocket portion (bonding material setting region) 7 that expands in a tapered shape as the gap goes to the other end surface of the flange positioning member 13. The gap between the inner peripheral surface of the flange positioning member 13 including the pocket portion 7 and the glass bulb 1b is filled with the bonding material 6, and the flange positioning member 13 is hermetically sealed to the glass bulb 1b. Yes.

  This hermetic sealing is performed as follows. That is, first, the bonding material 6 is set in the pocket portion 7. Here, since the pocket part 7 is made into the clearance gap which expands as it goes to the other end surface of the flange positioning member 13, the volume is large and a comparatively large amount of the bonding material 6 can be set. Then, the bonding material 6 is heated and melted to flow into the gap, thereby achieving hermetic sealing. In addition, the shape of the pocket part 7 is not limited to the shape expanded to a taper shape.

  Thus, according to 2nd Embodiment, since the housing | casing 1 which has an irradiation source, and the flange 12 are positioned by the flange positioning member 13 which fixes the flange 12, irradiation conditions can be made uniform and stable irradiation. It can be performed.

  Further, since the flange positioning member 13 includes the pocket portion 7 and the bonding material 6 set in the pocket portion 7 flows between the flange positioning member 13 and the glass bulb 1b and is sealed, sealing is easy. In addition, the sealing volume can be increased by the pocket portion 7 and the sealing strength can be increased.

  Moreover, since the flange 12 is welded to the flange positioning member 13, the problem in the case of welding the flange 12 directly to the glass bulb 1b is avoided. That is, when the flange 12 is directly welded to the glass bulb 1b, there is a problem that the heat capacity becomes large and cracking or the like may occur at the time of cooling. It has been avoided. In particular, in laser welding, since the fusion part is small and the heat capacity is small, distortion is hardly generated.

  Further, the tip of the boss portion 12a of the flange 12 is configured to have a small diameter through the step portion and enter the concave portion of the flange positioning member 13, and the laser welded portion 80 is connected to the outer peripheral surface of the flange positioning member 13 and the flange 12. Since the end of the boss portion 12a and the outer peripheral surface of the boss portion 12a is provided from the outside, the tip of the boss portion 12a of the flange 12 serves as a shielding portion for the laser light to the glass bulb 1b, and the glass bulb 1b is irradiated with the laser light And the occurrence of distortion is prevented.

  Moreover, since the exit window 1c protrudes outward from one end face of the flange 12, the position of the irradiation object in the apparatus casing on the other side can be brought closer, and the irradiation density can be increased.

  In addition, the flange positioning member 13 and the flange 12 can cool only the glass bulb 1b that has little influence on the temperature of the main body 1a that accommodates the irradiation source, and the glass bulb 1b is maintained while maintaining the main body 1a at a temperature effective for irradiation. Only the temperature can be lowered. Thereby, impurities generated by the discharge of the electrodes and the like in the main body 1a are trapped by the glass bulb 1b, and deposition on the emission window 1c can be suppressed. As a result, it is possible to suppress deterioration of the transmittance of the exit window 1c and to extend the life of the irradiation source.

  Further, since a knife edge type conflat flange is used as the flange 12, it is possible to further enhance the airtightness.

  In addition, it has the pocket part 7, It is also possible to comprise so that the glass bulb | bulb 1b may not be formed in a step connection.

  FIG. 3 is a longitudinal sectional view showing a flanged radiation source according to the third embodiment of the present invention. Here, instead of the flange 12, a flange 22 which is an ICF 70 is used.

  The flanged radiation source 103 of the third embodiment is different from the flanged radiation source 102 of the second embodiment in that the flange positioning member 13 is sealed to the exit window 1c side of the glass bulb 1b. . Therefore, in order to match the expansion coefficient, the flange positioning member 13 is here made of SUS material. Accordingly, low melting point solder is used as the bonding material 6 here. Note that the glass bulb 1b and the flange positioning member 13 may be directly sealed using, for example, frit glass or an inorganic adhesive.

  The flange positioning member 13 is inserted into the inner peripheral surface of the flange 22, and the bottom surface of the recess around the central through hole provided on the other end surface side of the flange 22 and the other end surface of the flange positioning member 13 are surfaces. In a single state, the flange positioning member 13 and the flange 22 are welded at the mating portion between the outer peripheral surface of the flange positioning member 13 and the concave portion around the central through hole provided on one end surface side of the flange 22. It is fixed by a weld 80.

  The flange positioning member 13 is sealed to the glass bulb 1b via the bonding material 6 in a state where the flange positioning member 13 is positioned with respect to the glass bulb 1b.

  According to the flanged irradiation source 103 of the third embodiment configured as described above, substantially the same effect as that of the second embodiment can be obtained. Incidentally, here, the flange positioning member 13 serves as a shielding portion for the laser light to the glass bulb 1b.

  FIG. 4 is a longitudinal sectional view showing a flanged radiation source according to the fourth embodiment of the present invention. Here, instead of the flange 22, a flange 32 that is an ICF 34 is used.

  In this embodiment, the flange positioning member 13 is inserted with respect to the inner peripheral surface of the flange 32, and the flange positioning is performed in a state where the other end surface of the flange 32 and the other end surface of the flange positioning member 13 are flush with each other. The member 13 and the flange 32 are fixed by a laser welded portion 80 where a joint portion between the outer peripheral surface of the flange positioning member 13 and the concave portion around the central through hole provided on one end surface side of the flange 32 is welded.

  According to the flanged irradiation source 104 of the fourth embodiment configured as described above, substantially the same effect as that of the third embodiment can be obtained. In addition, the structure which arrange | positions the flange positioning member 13 in the emission window 1c side of the glass bulb | ball 1b like 3rd, 4th embodiment is applicable also to other embodiment.

  FIG. 5 is a longitudinal sectional view showing a flanged radiation source according to the fifth embodiment of the present invention. In FIG. 5 and subsequent FIGS. 6 and 7, the flange is omitted and not drawn.

  The flanged radiation source 105 of the fifth embodiment is different from the flanged radiation source 102 of the second embodiment in that a flange positioning member 23 made of KOV metal is used in place of the flange positioning member 13 and this flange is used. The positioning member 23 is directly sealed to the glass bulb 1b without using a bonding material.

  Here, the inner peripheral surface of the flange positioning member 23 and the outer peripheral surface of the glass bulb 1b are directly sealed.

  The flange positioning member 23 is sealed with respect to the glass bulb 1b in a state where the flange positioning member 23 is positioned with respect to the glass bulb 1b.

  According to the flanged irradiation source 105 of the fifth embodiment configured as described above, similarly to the second embodiment, the irradiation conditions can be made uniform by the flange positioning member 23, and stable irradiation can be performed. In addition, since the flange positioning member 13 is directly sealed to the glass bulb 1b without using a bonding material, the sealing strength can be increased and the sealing can be performed when the glass bulb 1b is formed. Has the advantage of being good.

  FIG. 6 is a longitudinal sectional view showing a flanged radiation source according to the sixth embodiment of the present invention. The difference between the flanged irradiation source 106 of the sixth embodiment and the flanged irradiation source 105 of the fifth embodiment is that the glass bulb 1b has a glass reservoir 1d protruding annularly in the radial direction at a predetermined position in the axial direction. And the glass pool 1d seals the other end face of the flange positioning member 23. This glass pool 1d is provided in advance.

  The flange positioning member 23 is positioned relative to the glass bulb 1b by sealing the flange positioning member 23 to the glass reservoir 1d.

  According to the flanged irradiation source 106 of the sixth embodiment configured as described above, substantially the same effect as that of the fifth embodiment can be obtained.

  FIG. 7 is a longitudinal sectional view showing a flanged radiation source according to the seventh embodiment of the present invention. The flanged radiation source 107 of the seventh embodiment is different from the flanged radiation source 106 of the sixth embodiment in that the flange positioning member 23 is positioned at a predetermined position in the axial direction of the glass bulb 1b. A glass winding part 1e is provided by winding glass around the other end side of the glass bulb 23 and the outer peripheral surface of the glass bulb 1b, and the other end face of the flange positioning member 23 is sealed by the glass winding part 1e. is there.

  According to the flanged irradiation source 107 of the seventh embodiment configured as described above, substantially the same effect as that of the sixth embodiment can be obtained.

  FIG. 8 is a longitudinal sectional view showing a flanged radiation source according to the eighth embodiment of the present invention. The flanged radiation source 108 of the eighth embodiment is different from the flanged radiation source 102 of the second embodiment in that a circle is formed instead of the flange positioning member 13 and protrudes toward the flange 12 on the outer periphery. Using a flange positioning member 33 configured in a metal ring having an annular protrusion 33a, the protrusion 33a of the flange positioning member 33 is fitted to the stepped portion of the boss 12a of the flange 12, and the outer periphery of the protrusion 33a The joint portion of the surface and the outer peripheral surface of the boss portion 12a is fixed via the laser welding portion 80, and the inner peripheral side of the flange positioning member 33 is entered into the wall surface at a predetermined position in the axial direction of the glass bulb 1b. This is the point where both end faces of the flange positioning member 33 are sealed to the glass bulb 1b.

  Here, the glass bulb 1b is divided into both sides with the flange positioning member 33 as a boundary, and after the flange positioning member 33 enters between the glass bulbs 1b and 1b, the divided glass bulbs 1b and 1b are inserted into the flange positioning member 33. Is preferably butt-sealed. The flange positioning member 33 preferably does not protrude into the glass bulb 1b or, if it protrudes, is coated with a vitreous material.

  According to the flanged irradiation source 108 of the eighth embodiment configured as described above, substantially the same effects as those of the fifth to seventh embodiments can be obtained.

  FIG. 9 is a longitudinal sectional view showing an irradiation source with a flange according to the ninth embodiment of the present invention. Here, as a representative example of the second to eighth embodiments, the flange 12 and the flange positioning member 13 of the second embodiment are used.

  The difference between the flanged irradiation source 109 of the ninth embodiment and the second to eighth embodiments is that a heat radiation filler 8 is disposed between the flange positioning member 13 and the glass bulb 1b. Here, as the heat dissipating filler 8, it is preferable to use, for example, micro beads such as aluminum, copper and diamond.

  According to the flanged radiation source 109 of the ninth embodiment configured as described above, the glass bulb 1b can be radiated by the heat radiation filler 8. For this reason, impurities generated by the discharge of the electrodes and the like in the main body 1a are trapped by the glass bulb 1b, and deposition on the emission window 1c can be suppressed. As a result, it is possible to suppress deterioration of the transmittance of the exit window 1c and to extend the life of the irradiation source.

  FIG. 10: is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 10th Embodiment of this invention. Here, as a representative example of the second to eighth embodiments, the flange 12 and the flange positioning member 13 of the second embodiment are used.

  The difference between the flanged radiation source 110 of the tenth embodiment and the second to eighth embodiments is that the radiator 9 is provided on the outer surface of the flange positioning member 13.

  According to the flanged irradiation source 110 of the tenth embodiment configured in this way, the glass bulb 1b can be dissipated by the radiator 9, and substantially the same effect as that of the ninth embodiment can be obtained.

  FIG. 11: is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 11th Embodiment of this invention. Here, as a representative example of the second to tenth embodiments, the flange 32 of the fourth embodiment is used.

  The difference between the flanged radiation source 111 of the eleventh embodiment and the second to tenth embodiments is that the flange positioning member 43 is connectable in the axial direction and the axial position of the flange 32 can be adjusted. It was a point. Here, the flange positioning member 43 is formed by connecting three flange positioning members 43a, 43b, and 43c, but it is of course possible to connect two or four or more.

  According to the flanged irradiation source 111 of the eleventh embodiment configured as described above, the axial position of the flange 32 can be adjusted by the flange positioning member 43 that can be connected in the axial direction, and the apparatus housing to which the flange 32 is attached is attached. The position of the exit window 1c can be changed.

  FIG. 12: is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 12th Embodiment of this invention. Here, the flange 32 of 4th Embodiment and the flange positioning member 13 of 2nd Embodiment are used as a representative example of the said 2nd-10th Embodiment.

  The flanged radiation source 112 of the twelfth embodiment differs from the second to tenth embodiments in that a flange 53a is provided on one end surface of the flange positioning member 13 to form a flange positioning member 53. Between the one end surface of 53a and the other end surface of the flange 32, an bellows 90 (adjusting means) that is extendable in the axial direction and can withstand vacuum is provided so as to surround the glass bulb 1b from the outside. 90, after adjusting the distance between the flange positioning member 53 and the flange 32, the flange positioning member 53 and the flange 32 are fixed by, for example, a bolt 53c.

  Note that, within the range allowed by the bellows 90 and the gap between the glass bulb 1b and the central through-hole of the flange 32, the axis of the glass bulb 1b is up and down while being parallel to the axis of the glass bulb 1b in FIG. You may fix in the state moved to right and left (refer arrow Y), and in the state (refer to arrow Z) which gave an angle so that the axis of glass bulb 1b may intersect with the axis of glass bulb 1b in Drawing 12 It may be fixed.

  According to the flanged irradiation source 112 of the twelfth embodiment configured as described above, the position of the emission window 1c relative to the apparatus housing to which the flange 32 is attached can be freely adjusted by the bellows 90, and in addition, the flange 32 is connected to the apparatus. The position of the exit window 1c can be freely adjusted after being mounted on the housing.

  FIG. 13: is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 13th Embodiment of this invention. The flanged radiation source 113 of the thirteenth embodiment is different from the flanged radiation source 101 of the first embodiment in that an X-ray tube 60 is used as the flanged radiation source instead of the D2 lamp.

  The X-ray tube 60 includes a vacuum vessel 60a, a filament 60b, a target 60c, and an exit window 60d.

  The vacuum vessel 60a is formed in a bottomed cylindrical shape, and is configured to be in a vacuum state by closing one end portion by an emission window 60d, and accommodates the filament 60b and the target 60c. The target 60c receives electrons from the filament 60b, generates X-rays, and exits through the exit window 60d.

  The container 60a of the X-ray tube 60 is inserted through the flange positioning member 3 and the flange 2 and the O-ring 4 is crimped. The flange positioning member 3 is positioned with respect to the container 60 and covers the filament 60b. It is set as the structure located in a position.

  According to the flanged radiation source 113 of the thirteenth embodiment configured as described above, substantially the same effect as that of the first embodiment can be obtained, and in addition, the flange positioning member 3 positioned so as to cover the filament 60b. Thus, the filament 60b can be cooled.

  The potential of the target 60c can be set arbitrarily, and the potential is supplied by attaching a current introduction terminal, but it may be attached to the flange 2 or connected from another system. However, even if the exit window 60d is protruded, the electrode of the target 60c may be connected to the flange 2 with a cable or the like and used on the ground.

  FIG. 14: is a longitudinal cross-sectional view which shows the irradiation source with a flange concerning 14th Embodiment of this invention. The flanged irradiation source 114 of the fourteenth embodiment is different from the flanged irradiation source 113 of the thirteenth embodiment in that the flange 2 is located at a position covering the target 60c of the X-ray tube 60 and the X-ray tube 60 The conductive member 60e made of, for example, metal that is continuous with the target 60c is fixed to the bottom surface of the concave portion provided on the one end surface side of the flange 2. In addition, you may provide the electroconductive member which covers the peripheral part of the electroconductive member 60e and the output window 60d, and is fixed to the flange 2 separately.

  According to the flanged irradiation source 114 of the fourteenth embodiment configured as described above, the target 60c can be cooled by the flange 2 via the conductive member 60e.

  FIG. 15: is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 15th Embodiment of this invention. Here, the flange 32 of the fourth embodiment is used as a representative example of the second to twelfth embodiments.

  The flanged irradiation source 115 of the fifteenth embodiment differs from the second to twelfth embodiments in that an X-ray tube 60 is used instead of the D2 lamp as the flanged irradiation source, and the container 60a of the X-ray tube 60 is used. And the flange positioning member 63 are sealed.

  Here, the flange positioning member 63 includes a small-diameter portion 63a on the other end surface side, and a large-diameter portion 63b on one end surface side whose inner periphery and outer periphery are larger in diameter than the small-diameter portion 63a. 63a is positioned so as to cover the filament 60b and sealed to the container 60a, and the target 60c and the emission window 60d of the X-ray tube 60 are covered with a metal case 70 made of a conductive member such as aluminum or copper, and The target 60c and the metal case 70 are electrically connected, and the metal case 70 is coupled to the flange positioning member 32.

  According to the flanged radiation source 115 of the fifteenth embodiment configured as described above, substantially the same effect as that of the second to twelfth embodiments can be obtained, and in addition, the flange positioned so as to cover the filament 60b. The filament 60 b can be cooled by the positioning member 63, and the target 60 c can be cooled by the flange 32 through the metal case 70. The metal case 70 serves as both heat dissipation and potential.

  As described above, the present invention has been specifically described based on the embodiment. However, the present invention is not limited to the embodiment described above. For example, the embodiment has a UV light source as being particularly suitable. Although the application to an X-ray tube having a filament that is a D2 lamp or an X-ray source is described, the present invention is also applicable to an X-ray tube having an irradiation source such as a VUV light source or various ionization sources for MS. .

It is a figure which shows the irradiation source with a flange which concerns on 1st Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 2nd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 3rd Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 4th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 5th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 6th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 7th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 8th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 9th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 10th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 11th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 12th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 13th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 14th Embodiment of this invention. It is a longitudinal cross-sectional view which shows the irradiation source with a flange which concerns on 15th Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Housing | casing, 1a ... Main-body part (casing | casing), 1b ... Glass bulb (discharge | emission part; Housing | casing), 1c, 60d ... Outgoing window, 2, 12, 32 ... Flange, 3, 13, 23, 33, 43 , 43a, 43b, 43c, 53, 63 ... flange positioning member, 4 ... O-ring, 6 ... bonding material, 7 ... bonding material set region, 8 ... heat radiation filler, 9 ... heat radiator, 60 ... X-ray tube, 60a ... Container (housing), 60b ... Filament (irradiation source), 60c ... Target, 60e, 70 ... Conductive member, 80 ... Laser weld, 90 ... Adjustment means, 101, 102-114, 115 ... Irradiation with flange source.

Claims (19)

A flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange ,
The housing has a main body portion that accommodates the irradiation source, and is formed in a cylindrical shape so as to protrude from the main body portion in one direction, and an irradiation line from the irradiation source passes through the inside and can be emitted from an emission window at an end portion. And a discharge part,
The discharge part is inserted through the flange and the flange positioning member that form a ring,
An O-ring is crimped between the inner peripheral surface of the flange and the outer peripheral surface of the discharge part,
The flanged irradiation source , wherein the flange positioning member is fixed to an end face of the flange. The flange positioning member, an illumination source with flange according to claim 1, wherein the sandwiched between the end face of the body portion and the end face of the flange. A flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange ,
The irradiation source is a filament, and the housing is an X-ray tube container that contains the filament and the target inside and has an exit window that emits X-rays from the target at an end thereof.
The housing is inserted through the annular flange and the flange positioning member,
An O-ring is pressure-bonded between the flange inner peripheral surface and the housing,
The flanged irradiation source , wherein the flange positioning member is fixed to an end face of the flange and is located at a position covering the filament . The irradiation source with a flange according to claim 3 , wherein the flange is connected to the target through a conductive member. The said radiation | emission window protrudes outward from the end surface on the opposite side of the said flange, The irradiation source with a flange as described in any one of Claims 1-4 characterized by the above-mentioned. The said O-ring is arrange | positioned in two steps along an axial direction, The irradiation source with a flange as described in any one of Claims 1-5 characterized by the above-mentioned. A flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange ,
The housing is inserted through the annular flange and the flange positioning member,
The flange positioning member is sealed to the housing;
The housing has a main body portion that accommodates the irradiation source, and is formed in a cylindrical shape so as to protrude from the main body portion in one direction, and an irradiation line from the irradiation source passes through the inside and can be emitted from an emission window at an end portion. And a discharge part,
The discharge part is inserted through the flange and the flange positioning member,
The flanged irradiation source , wherein the flange positioning member is sealed to the discharge portion . The flanged irradiation source according to claim 7 , wherein the flange positioning member is sealed to the discharge portion using a bonding material. The flange positioning member includes a region for setting the bonding material,
9. The irradiation source with a flange according to claim 8 , wherein the bonding material set in the region flows into and seals between the flange positioning member and the discharge portion. 8. The flanged radiation source according to claim 7 , wherein the flange positioning member is directly sealed without using a bonding material at the discharge portion. The flanged irradiation source according to claim 10 , wherein the flange positioning member is sealed perpendicularly to the discharge portion. The said flange is welded to the said flange positioning member, The irradiation source with a flange as described in any one of Claims 7-11 characterized by the above-mentioned. The irradiation source with a flange according to any one of claims 7 to 12 , wherein a heat radiation filler is disposed between the flange positioning member and the discharge portion. The radiation source with a flange according to any one of claims 7 to 13 , wherein a radiator is provided on an outer surface of the flange positioning member. The irradiation source with a flange according to any one of claims 7 to 14 , wherein the flange positioning member is connectable in an axial direction, and an axial position of the flange is adjustable. An adjusting means is provided between the flange positioning member and the flange so as to surround the discharge portion so as to be extendable in the axial direction from the outside, and to adjust the distance between the flange positioning member and the flange. The irradiation source with a flange according to any one of claims 7 to 14 , wherein the irradiation source is a flange. A flange positioning member for fixing the flange and positioning the casing having the irradiation source and the flange ,
The housing is inserted through the annular flange and the flange positioning member,
The flange positioning member is sealed to the housing;
The irradiation source is a filament, and the housing is an X-ray tube container that contains the filament and the target inside and has an exit window that emits X-rays from the target at an end thereof.
The flanged irradiation source , wherein the flange positioning member is positioned at a position covering the filament and sealed to the housing . The flanged radiation source according to claim 17 , wherein the flange is connected to the target via a conductive member. The said flange is a knife-edge type conflat flange, The irradiation source with a flange as described in any one of Claims 1-18 characterized by the above-mentioned.

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