JP2008166146A - Deuterium lamp light source - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To handle a deuterium lamp easily, and irradiate light by making the deuterium lamp close enough to a sample to be grounded in a vacuum or a low pressure atmosphere. <P>SOLUTION: In the light source 1, the lamp 2 is housed in a hole 19 between a first end 3a and a second end 3b in a housing member 3, the lamp 2 is fixed to the hole 19 by an adhesive layer 21, and a tube 4 is coupled to the first end 3a side of the housing member 3 by screw parts 23, 30 attachably and detachably. By these, the lamp 2 can be exchanged by exchanging the housing member 3, and there will be no need to be directly connected to the lamp 2 when the lamp is exchanged. In addition, the hole 19 of the housing member 3 is airtightly demarcated into a first region R1 and a second region R2 with the adhesive layer 21, and since this is airtightly sealed between the first end 3a side of the housing member 3 and the tube 4 by sealing parts 24, 29, when it is cooled by a cooling air in the first region R1, it is suppressed that the cooling air leaks outside. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a deuterium lamp light source, and more particularly to a deuterium lamp light source used in a vacuum or low-pressure atmosphere.

  Conventionally, a deuterium lamp light source has been used as a light source for static elimination in a vacuum or low-pressure atmosphere or a light source for inspection in the semiconductor field. Examples of the deuterium lamp light source include those described in Patent Document 1 and Patent Document 2 below. In these deuterium lamp light sources, the light emission window of the deuterium lamp is arranged so that light can be emitted into the vacuum chamber (in a vacuum or low-pressure atmosphere), and the vacuum state in the vacuum chamber is maintained. A deuterium lamp is fixed to the outer wall of the vacuum chamber.

For example, in the deuterium lamp light source described in Patent Document 1, a discharge part that generates a discharge, and a protruding part that communicates in a direction orthogonal to the axial direction of the discharge part and extends in the optical axis direction of light, And a light exit window is provided at the front end of the protrusion. This protrusion has an O-ring mounted in an annular groove on the outer surface thereof, and is fitted to a light beam entrance in a vacuum chamber. In addition, the deuterium lamp light source described in Patent Document 2 includes a cylindrical sealed container that accommodates a discharge portion, and a light exit window is formed on one end side of the sealed container. This deuterium lamp light source has a base on one end side, and is fixed to the wall of the vacuum chamber by this base.
Japanese Utility Model Publication No. 54-156976 JP-A-6-215734

  However, the above-described deuterium lamp light source has the following problems. That is, generally, since a deuterium lamp contains a very fragile material such as glass, it is difficult to handle the deuterium lamp, for example, when the deuterium lamp is replaced. Further, since it is necessary to operate the deuterium lamp outside the vacuum chamber (atmosphere side), there is a possibility that the deuterium lamp cannot be irradiated near the sample grounded in the vacuum chamber. is there.

  Therefore, the present invention can easily handle a deuterium lamp and can irradiate light with the deuterium lamp sufficiently close to a sample grounded in a vacuum or low-pressure atmosphere. It is an object to provide a light source.

  In order to solve the above-mentioned problems, a deuterium lamp light source according to the present invention is a deuterium lamp light source used in a vacuum or low-pressure atmosphere, and includes a sealed container filled with gas. A deuterium lamp that emits emitted light from a light emitting window provided at a distal end portion of the projecting portion, and includes a projecting portion that generates discharge and a projecting portion that communicates with the discharge portion and projects in a light emitting direction by the discharge. , Having a through hole between the first end and the second end, a storage member for storing the deuterium lamp in the through hole, a holding member for holding the storage member, and holding on the first end side of the storage member Connecting means for detachably connecting the member, and the through hole of the storage member is disposed between the first region on the first end side and the second surface between the inner surface of the through hole of the storage member and the outer surface of the deuterium lamp. A deuterium lamp is provided in the through hole so as to be airtightly defined with the second region on the end side. And hermetically fixing part is provided with a constant, the connecting means, characterized in that the sealing means for hermetically sealing between the first end side and the holding member of the housing member.

  In this deuterium lamp light source, the deuterium lamp is housed in a through hole between the first end and the second end of the housing member, and the deuterium lamp is fixed to the through hole by an airtight fixing portion. The holding member is detachably connected to the first end side of the storage member by the connecting means. Accordingly, the deuterium lamp can be exchanged by exchanging the storage member. Therefore, when the deuterium lamp is exchanged, it is not necessary to directly touch the deuterium lamp. Therefore, the deuterium lamp can be easily handled. In addition, the through hole of the storage member is hermetically defined by the hermetic fixing portion in the first region on the first end side and the second region on the second end side, and the sealing member of the connection unit seals the storage member. A space between the first end side and the holding member is hermetically sealed. Therefore, when the deuterium lamp is cooled, for example, by cooling with the cooling air in the first region, the cooling air is prevented from leaking to the outside. Accordingly, the deuterium lamp can be fixed to the storage member so as to be kept vacuum-tight in a vacuum or low-pressure atmosphere, and the storage member can be held by the holding member. It is possible to irradiate with light sufficiently close to each other.

  Here, the storage member includes a first connector portion that is electrically connected to the discharge portion of the stored deuterium lamp, and the connecting means electrically connects the second connector portion of the holding member to the first connector portion. It is preferable to connect. In this case, the deuterium lamp is preferably electrically connected to the holding member by the connecting means.

  Further, the connecting means is preferably connected by screwing the holding member to the other end side of the storage member. In this case, the holding member can be preferably detachably connected to the first end side of the storage member by the connecting means.

  The sealing means may include an O-ring and may include a gasket. Moreover, the case where a holding member contains a bellows-type expansion-contraction tube specifically, is mentioned. In this case, the position of the storage member can be changed and held by the holding member. This holding member is the same as the holding member in the following invention.

  A deuterium lamp light source according to the present invention is a deuterium lamp light source used in a vacuum or low-pressure atmosphere, and includes a sealed container filled with a gas, and the sealed container is a discharge unit that generates discharge. And a deuterium lamp that communicates with the discharge portion and protrudes in a light emission direction by discharge, and emits emitted light from a light emission window provided at a distal end portion of the protrusion, and a first end and a first end A storage member having a through-hole between the two ends and storing the deuterium lamp in the through-hole, and a first holding side of the storage member is detachable from a holding member that holds the storage member A connecting portion is provided between the inner surface of the through hole of the storage member and the outer surface of the deuterium lamp. The through hole of the storage member is connected to the first region on the first end side and the second region on the second end side. Airtight fixing to fix the deuterium lamp in the through hole so that it is airtightly defined in two areas It is mounted on the connecting portion, wherein the sealing portion seals airtightly between the first end side and the holding member of the housing member.

  In this deuterium lamp light source, the deuterium lamp is stored in the storage member, and the deuterium lamp is fixed inside the storage member by an airtight fixing portion. Therefore, when using the deuterium lamp light source by detachably connecting the holding member to the connecting portion provided on the first end side of the storage member, the deuterium lamp can be replaced by replacing the storage member. It is not necessary to touch the deuterium lamp directly when replacing the deuterium lamp. Therefore, the deuterium lamp can be easily handled. In addition, the through hole of the storage member is hermetically defined in the first region on the first end side and the second region on the second end side by the hermetic fixing portion, and the sealing member of the connecting means seals the storage member. A space between the first end side and the holding member is hermetically sealed. Therefore, when the deuterium lamp is cooled, for example, by cooling with the cooling air in the first region, the cooling air is prevented from leaking to the outside. Therefore, the deuterium lamp can be fixed to the storage member so as to maintain vacuum hermeticity in a vacuum or low pressure atmosphere. Therefore, when the storage member is held and used by the holding member, it is possible to irradiate the light with the deuterium lamp sufficiently close to the sample grounded in a vacuum or low-pressure atmosphere.

  Here, the storage member includes a first connector portion that is electrically connected to the discharge portion of the stored deuterium lamp, and in the connection portion, the first connector portion is electrically connected to the second connector portion of the holding member. It is preferred that In this case, the deuterium lamp is preferably electrically connected to the holding member connected by the connecting portion by the connecting means.

  Moreover, it is preferable that a holding member is screwed and connected to the connecting portion. In this case, the holding member can be preferably detachably connected to the connecting portion.

  Moreover, the sealing part may include an O-ring and may include a gasket.

  Moreover, it is preferable that an airtight fixing | fixed part consists of an adhesive agent or an O-ring. When the hermetic fixing portion is made of an adhesive, the position of the optical axis of the emitted light can be accurately matched between before and after the storage member is replaced and the deuterium lamp is replaced. Further, when the hermetic fixing portion is formed of an O-ring, the deuterium lamp stored in the storage member can be easily replaced. For example, even if the replaced storage member is used, the deuterium lamp is replaced. Can be used repeatedly.

  According to the present invention, a deuterium lamp can be easily handled, and light can be irradiated with the deuterium lamp sufficiently close to a sample grounded in a vacuum or low-pressure atmosphere.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted.

[First Embodiment]
FIG. 1 is a partial cross-sectional view showing a deuterium lamp light source according to the first embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a main part of the deuterium lamp light source of FIG. As shown in FIG. 1, the deuterium lamp light source 1 is used in a vacuum or low-pressure atmosphere, and is used, for example, as a light source for static elimination or an inspection light source in the semiconductor field. The deuterium lamp light source 1 includes a deuterium lamp 2, a storage member 3 that stores the deuterium lamp 2, and a flexible tube (holding member) 4 that is detachably connected to the storage member 3.

  The deuterium lamp 2 is a so-called head-on type deuterium lamp (D2 lamp), and emits ultraviolet light having a predetermined wavelength from the head. The deuterium lamp 2 includes a glass sealed container 5 in which deuterium gas is sealed in about several hundred Pa.

  The sealed container 5 includes a cylindrical discharge unit 7 that houses the discharge unit assembly 6. One end of the discharge part 7 in the axial direction is sealed with a stem 8, and a protruding part 9 is connected to the other end. The protruding portion 9 has a cylindrical shape that communicates with the discharge portion 7 and protrudes in the light emission direction (the optical axis direction of the deuterium lamp 2; the left side in the drawing). A plurality of openings are formed in the stem 8 along a predetermined circumference, and conductive stem pins 20 are respectively passed through and fixed to the openings.

  As shown in FIG. 2, the discharge part assembly 6 generates ultraviolet light by arc discharge. The discharge unit assembly 6 includes a cathode unit 10 that generates thermoelectrons that contribute to discharge, an anode unit 11 that receives thermoelectrons from the cathode unit 10, and a discharge path between the cathode unit 10 and the anode unit 11. A discharge path limiting portion 12 for limiting, a discharge path limiting portion supporting member 13 for supporting the discharge path limiting portion 12, and a front cover 15 that covers these protruding portions 9 and has a light passage opening through which ultraviolet light passes are formed. I have.

  The discharge path limiting portion support member 13 is formed of an electrically insulating ceramic or the like, is supported by the stem pin 20, and supports the discharge path limiting portion 12 in the central opening. The discharge path limiting portion 12 is made of, for example, a high melting point metal such as molybdenum, tungsten, or an alloy made of these, has conductivity, and is electrically connected to the stem pin 20. An anode portion 11 is disposed on the stem 8 side of the discharge path limiting portion 12, and this anode portion 11 is supported by and electrically connected to the stem pin 20.

  The cathode portion 10 is made of a tungsten coil, and the surface thereof is coated with an electron emitting material so as to generate thermoelectrons. The cathode portion 10 is electrically connected to the stem pin 20. The cathode portion 10 is covered with a front cover 15 on the protruding portion 9 side. A connector (first connector portion) 16 is attached to the stem pin 20. That is, the connector 16 is electrically connected to the anode part 11 and the cathode part 10 via the stem pin 20.

  The protrusion 9 has a front half 9a made of magnesium fluoride, and a rear half 9b connected to the discharge part made of, for example, borosilicate glass. These magnesium fluoride and borosilicate glass have greatly different coefficients of thermal expansion, and if magnesium fluoride and borosilicate glass are fused directly, there is a risk that cracks and cracks may occur in this fused part. A step seal portion 17 is provided in an intermediate portion between the front half portion 9a and the rear half portion 9b. The step seal portion 17 is configured to seal using a plurality of types of intermediate glass so that the coefficient of thermal expansion gradually changes. And the front end side of the protrusion part 9 is sealed with the light emission window 18 which radiate | emits an ultraviolet light, and this light emission window 18 is comprised, for example from magnesium fluoride (MgF2).

  The storage member 3 is made of a stainless steel tube (having a cylindrical shape), and has a through hole 19 between a first end 3a which is one end in the longitudinal direction and a second end 3b which is the other end. . The storage member 3 stores the deuterium lamp 2 in the through hole 19 by being inserted substantially coaxially. Specifically, the storage member 3 penetrates the discharge part 7 of the deuterium lamp 2 and the rear half part 9b of the projecting part 9 so that the light exit window 18 of the deuterium lamp 2 is positioned on the second end 3b side. It is stored in the hole 19. An adhesive layer (airtight fixing portion) 21 is formed between the inner surface 19a of the through hole 19 and the outer peripheral surface 9c of the protrusion 9 (the outer surface of the deuterium lamp 2). The adhesive layer 21 penetrates the deuterium lamp 2 so that the through hole 19 of the storage member 3 is defined by a first region R1 on the first end 3a side and a second region R2 on the second end 3b side. Airtightly fixed to the hole 19.

  On the first end 3 a side of the storage member 3, a storage member connecting portion (connecting portion) 22 that is detachably connected to the flexible tube 4 is provided. The storage member connecting portion 22 is a sealing portion that hermetically seals between the screw portion 23 in which a female screw is formed on the inner surface 19 a of the through hole 19, and the first end 3 a side of the storage member 3 and the flexible tube 4. (Sealing means) 24 and these are provided in this order from the first end 3a. On the other hand, on the second end 3b side of the storage member 3, as shown in FIG. 1, a cover 25 is attached by, for example, a screw, and the protruding portion 9 of the stored deuterium lamp 2 is protected. The cover 25 has a cup shape and includes a bottom wall 25a and a side wall 25b. The bottom wall 25a is formed with an opening 26 through which light emitted from the deuterium lamp 2 passes.

  The flexible tube 4 holds the storage member 3 and absorbs displacement such as an axial direction or bending by expansion and contraction and bending of a bellows (bellows). That is, the flexible tube 4 holds the storage member 3 by changing the position of the storage member 3. A flange 27 is provided at one end of the flexible tube 4 in the longitudinal direction. The flange 27 is fixed to, for example, a vacuum chamber (not shown) in a vacuum or low-pressure atmosphere. On the other hand, at the other end of the flexible tube 4, a holding member connecting portion 28 that connects to the first end 3 a side of the storage member 3 is provided. The holding member connecting portion 28 is in contact with an insertion portion 29 to be inserted into the storage member 3, a screw portion 30 in which a male screw is formed on the outer peripheral surface, and an end surface 31 on the first end 3 a side of the storage member 3. There are portions 32, which are provided in this order from the other end of the flexible tube 4.

  The flexible tube 4 accommodates therein a wiring 33 for supplying electric power to the deuterium lamp 2 and supplies cooling air for cooling the deuterium lamp 2 to the first region R1 of the housing member 3. . Specifically, at one end of the flexible tube 4, for example, a connection portion 34 for connecting to a power supply device or a cooling air supply device is provided. On the other hand, the other end of the flexible tube 4 communicates with the first region R1, and a connector (second connector portion) 35 connected to the connector 16 is attached to the other end side of the wiring 33. That is, when the flexible tube 4 is connected to the first end 3a side of the storage member 3, the deuterium lamp 2 and the flexible tube 4 are electrically connected to each other by electrically connecting the connectors 16 and 35 to each other. The

  Here, as described above, the deuterium lamp light source 1 has the storage member connecting portion 22 having the screw portion 23 and the sealing portion 24, and the holding portion 29 having the insertion portion 29, the screw portion 30, and the contact portion 32. A member connecting portion 28 is provided. The screw portions 23 and 30 are configured to be screwed together, and the connecting portions 22 and 28 are detachably fixed to each other so that the first end 3a side of the storage member 3 and the flexible tube 4 are detachable. Fix it. As shown in FIG. 2, the sealing portion 24 is disposed so as to abut on the convex portion 36 protruding radially inward, and the surface 36 a on the first end 3 a side and the inner surface 19 a of the through hole 19 in the convex portion 36. And an O-ring 37.

  The convex part 36 forms the insertion hole 38 by the surface 36b of the radial inside, and the insertion part 29 of the holding member connection part 28 is loosely inserted or inserted in this insertion hole 38 (refer FIG. 1). ). The O-ring 37 hermetically seals between the connecting portions 22 and 28 in a state where the flexible tube 4 is connected to the first end 3a side of the storage member 3 (hereinafter simply referred to as “connected state”). As shown in FIG. 1, the abutting portion 32 has a ring-like plate shape, and abuts against the end surface 31 on the first end 3 a side of the storage member 3 in the connected state, thereby connecting the connecting portions 22 and 28. Is more hermetically sealed. The storage member connecting portion 22 and the holding member connecting portion 28 correspond to the connecting means in the present invention.

Further, as described above, the adhesive layer 21 is formed between the inner surface 19a of the through hole 19 and the outer peripheral surface 9c of the protruding portion 9 as shown in FIG. The deuterium lamp 2 is hermetically fixed to the through-hole 19 so as to be defined in the first region R1 and the second region R2. The adhesive layer 21 is made of a sealing adhesive having high airtightness, and for example, an epoxy-based vacuum adhesive that is less degassed in vacuum is used. Here, as preferable,
A tall seal (trade name, manufactured by Varian) that is used as a leak sealant for a vacuum system and has sufficient reliability for long-term use is used. The adhesive layer 21 is formed over the entire circumference in the circumferential direction on the discharge portion 7 side in the rear half portion 9b of the protruding portion 9. That is, the adhesive layer 21 is located behind the step seal portion 17, and the step seal portion 17 is not covered with the adhesive layer 21. Alternatively, as shown in FIG. 3, the adhesive layer may be an adhesive layer 41 formed on the side of the step seal portion 17 in the rear half portion 9 b of the protruding portion 9.

  In the deuterium lamp light source 1 configured in this way, electric power is supplied to the deuterium lamp 2, discharge is generated between the anode part 11 and the cathode part 10, and the discharge is converged by the discharge path limiting part 12, Ultraviolet light is emitted from the light exit window 18.

  As described above, in the deuterium lamp light source 1, the deuterium lamp 2 is stored in the through hole 19 of the storage member 3, and the deuterium lamp 2 is fixed to the through hole 19 with the adhesive layer 21. The flexible tube 4 is detachably connected to the first end 3 a side of the storage member 3 by the screw portions 23 and 30. Accordingly, the deuterium lamp 2 can be replaced by replacing the storage member 3, and it is not necessary to directly touch the deuterium lamp 2 when replacing the deuterium lamp 2. Therefore, since the glass portion of the deuterium lamp has been extremely fragile in the past, it must be handled with great care. Therefore, the replacement of the deuterium lamp in the deuterium lamp light source is an operation that only an expert can perform. However, according to the deuterium lamp light source 1 of the present embodiment, the deuterium lamp 2 can be replaced easily and safely, and the deuterium lamp 2 can be handled easily.

  In addition, as described above, the through hole 19 of the storage member 3 is hermetically defined in the first region R1 and the second region R2 by the adhesive layer 21, and the first end of the storage member 3 is defined by the O-ring 37. The space between the 3a side and the flexible tube 4 is hermetically sealed. Therefore, when the deuterium lamp 2 is cooled, for example, by cooling with the cooling air in the first region R1, the cooling air is prevented from leaking to the outside. Accordingly, the deuterium lamp 2 can be fixed to the storage member 3 so as to be kept vacuum-tight in a vacuum or low-pressure atmosphere, and the storage member 3 can be held by the flexible tube 4, and the sample grounded in the vacuum or low-pressure atmosphere. It is possible to irradiate light with the deuterium lamp 2 sufficiently close to the (irradiation object). That is, it can be said that the deuterium lamp light source 1 of the present embodiment is a light source that enables the deuterium lamp 2 to be installed and used in a vacuum or low-pressure atmosphere, and to be able to irradiate the sample with vacuum ultraviolet light.

  Further, as described above, since the deuterium lamp 2 is fixed to the through hole 19 with the adhesive layer 21, the deuterium lamp 2 is discharged before and after the storage member 3 is replaced and the deuterium lamp 2 is replaced. The position of the optical axis of the incident light can be matched with high accuracy. As a result, for example, even after the deuterium lamp 2 is replaced, it is possible to accurately irradiate the sample with light at a pinpoint.

  The conventional deuterium lamp light source generally has a combination of a number of components to maintain vacuum airtightness. However, as described above, the deuterium lamp light source 1 uses the adhesive layer 21 and the O-ring 37 to achieve vacuum airtightness. Is possible. That is, the deuterium lamp light source 1 enables vacuum airtightness more easily with fewer parts.

  Incidentally, as described above, since the storage member 3 storing the deuterium lamp 2 is configured to be detachable from the flexible tube 4, the holding member is not limited to the flexible tube 4 and can be various. Is possible.

[Second Embodiment]
FIG. 4 is a cross-sectional view showing a main part of a deuterium lamp light source according to the second embodiment of the present invention. As shown in FIG. 4, the deuterium lamp light source 50 of the second embodiment differs from the deuterium lamp light source 1 of the first embodiment in that a deuterium lamp 2 (see FIG. 2) is used instead of the deuterium lamp 2. 54, a storage member 51 is provided instead of the storage member 3 (see FIG. 2), and an adhesive layer 52 is provided instead of the adhesive layer 21 (see FIG. 2).

  In the deuterium lamp 54, the step seal portion 55 is located closer to the discharge portion 7 than the step seal portion 17. The storage member 51 has a length in the longitudinal direction longer than that of the storage member 3, and the entire deuterium lamp 54 is inserted into the through hole 53 substantially coaxially and stored. Specifically, the discharge part 7 and the protruding part 9 of the deuterium lamp 54 are accommodated in the through hole 53. The adhesive layer 52 is formed on the front half 9a of the protrusion 9 over the entire circumference in the circumferential direction.

  Also in such a deuterium lamp light source 50, the same effect as the above embodiment, that is, the deuterium lamp 2 can be easily handled, and the deuterium lamp 2 is attached to a sample grounded in a vacuum or low-pressure atmosphere. There is an effect that light can be irradiated in a sufficiently close proximity.

[Third Embodiment]
FIG. 5 is a partial cross-sectional view showing a deuterium lamp light source according to the third embodiment of the present invention. As shown in FIG. 5, the deuterium lamp light source 60 of the third embodiment is different from the deuterium lamp light source 1 of the first embodiment in that the storage member 3 has a storage member connecting portion 22 (see FIG. 1). It is the point provided with the flexible tube 64 which replaced with the storage member 62 which has the storage member connection part 61, and was replaced with the flexible tube 4 (refer FIG. 1) which has the holding member connection part 28 (refer FIG. 1). .

  The connecting portions 61 and 63 are detachably fixed to each other by a bolt 65, and the connecting portions 61 and 63 are provided with openings 66 and 67 that communicate with each other. And in the connection state, the metal gasket 68 which seals between these between the connection parts 61 and 63 airtightly is provided.

  Also in such a deuterium lamp light source 60, the flexible tube 64 can be detachably connected to the first end 62a side of the storage member 62 by the bolt 65, and the first end 62a of the storage member 62 by the metal gasket 68. The space between the side and the flexible tube 64 can be hermetically sealed. Therefore, the same effect as the above embodiment, that is, the deuterium lamp 2 can be easily handled, and the sample is grounded in a vacuum or low-pressure atmosphere, and the light is irradiated with the deuterium lamp 2 sufficiently close to the sample. There is an effect that can be.

[Fourth Embodiment]
6A and 6B are views showing a deuterium lamp light source according to the fourth embodiment of the present invention. As shown in the figure, the deuterium lamp light source 70 of the fourth embodiment is different from the deuterium lamp light source 60 of the third embodiment in that a storage member 62 having a storage member connecting portion 61 (see FIG. 5). Instead of the above, a storage member 72 having a storage member connection portion 71 is provided, and a flexible tube 74 having a holding member connection portion 73 is provided instead of the flexible tube 64 having the holding member connection portion 63 (see FIG. 5). is there.

  The connecting portions 71 and 73 are detachably fixed to each other by a clamp 75 (see FIG. 6B), and an O-ring 76 that hermetically seals between the connecting portions 71 and 73 in the connected state. (See FIG. 6A).

  Also in such a deuterium lamp light source 70, the flexible tube 74 is detachably connected to the first end 72 a side of the storage member 72 by the clamp 75, and flexible with the first end 72 a side of the storage member 72 by the O-ring 76. The space between the tubes 74 can be hermetically sealed. Therefore, the same effect as the above embodiment, that is, the deuterium lamp 2 can be easily handled, and the sample is grounded in a vacuum or low-pressure atmosphere, and the light is irradiated with the deuterium lamp 2 sufficiently close to the sample. There is an effect that can be.

[Fifth Embodiment]
FIG. 7 is a view showing a deuterium lamp light source according to the fifth embodiment of the present invention. As shown in FIG. 7, the deuterium lamp light source 80 of the fifth embodiment is different from the deuterium lamp light source 1 of the first embodiment in that the storage member 3 has a storage member connecting portion 22 (see FIG. 1). It is the point provided with the flexible tube 84 which replaced with the storage member 82 which has the storage member connection part 81, and was replaced with the flexible tube 4 (refer FIG. 1) which has the holding member connection part 28 (refer FIG. 1). .

  The connecting portions 81 and 83 are detachably connected to each other by a so-called one-touch lock. Specifically, the holding member connecting portion 83 is provided with a lock pin 89 protruding radially outward, and the storage member connecting portion 81 is a lock hole that is detachably engaged with the lock pin 89. 85 is provided. The lock hole 85 includes an insertion portion 86 for inserting the lock pin 89 and an engagement portion 87 for engaging with the lock pin 89. The insertion portion 86 opens on the end surface 88 of the storage member 82 on the first end 82a side, and extends in the longitudinal direction. The engaging portion 87 is continuous with the insertion portion 86 and extends so as to bend in the circumferential direction.

  Also in such a deuterium lamp light source 80, the lock pin 89 is inserted into the lock hole 85 and the storage member 82 is rotated in the circumferential direction relative to the flexible tube 84. The flexible tube 84 is detachably connected to the first end 82 a side of the storage member 82. Therefore, the same effect as the above embodiment, that is, the deuterium lamp 2 can be easily handled, and the sample is grounded in a vacuum or low-pressure atmosphere, and the light is irradiated with the deuterium lamp 2 sufficiently close to the sample. There is an effect that can be.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment.

  For example, in the above embodiment, the deuterium lamp is airtightly fixed to the through hole by the adhesive layer, but the deuterium lamp may be airtightly fixed to the through hole by the O-ring. In this case, the deuterium lamp stored in the storage member can be easily replaced. For example, even a used storage member that has been replaced can be used repeatedly by replacing the deuterium lamp.

  Moreover, in the said embodiment, although the cylindrical storage member is provided, the external shape of the longitudinal direction cross section of the storage member may exhibit polygonal shapes, such as a rectangle.

  Moreover, in the said embodiment, although the flexible pipe was connected with the 1st end side of the storage member with the screw part, the volt | bolt, or the clamp, you may employ | adopt various connection structures.

  In the first, second, and fourth and fifth embodiments, an O-ring is provided between the connecting portions. In the third embodiment, a metal gasket is provided between the connecting portions. Both the O-ring and the metal gasket are provided. May be provided between the connecting portions.

  In the above embodiment, the deuterium lamp is a head-on type deuterium lamp, but a side-on type deuterium lamp may be used.

It is a partial cross section figure which shows the deuterium lamp light source which concerns on 1st Embodiment of this invention. It is sectional drawing which shows the principal part of the deuterium lamp light source of FIG. It is sectional drawing corresponding to FIG. 2 which shows the modification of the contact bonding layer of the deuterium lamp light source of FIG. It is sectional drawing which shows the principal part of the deuterium lamp light source which concerns on 2nd Embodiment of this invention. It is a partial cross section figure which shows the deuterium lamp light source which concerns on 3rd Embodiment of this invention. It is a figure which shows the deuterium lamp light source which concerns on 4th Embodiment of this invention. It is a figure which shows the deuterium lamp light source which concerns on 5th Embodiment of this invention.

Explanation of symbols

  1, 50, 60, 70, 80 ... deuterium lamp light source, 2, 54 ... deuterium lamp, 3, 51, 61, 71, 81 ... storage member, 3a, 61a, 71a, 81a ... first end, 3b ... Second end, 4, 64, 74, 84 ... flexible tube (holding member), 5 ... sealed container, 7 ... discharge part, 9 ... projecting part, 9c ... outer peripheral surface (outer surface of deuterium lamp), 16 ... connector ( First connector portion), 18 ... light exit window, 18, 53 ... through hole, 19a ... inner surface of the through hole, 21,41,52 ... adhesive layer (airtight fixing portion), 22,61,71,81 ... housing member Connection part (connection part), 23, 30 ... screw part, 24 ... sealing part (sealing means), 28, 63, 73, 83 ... holding member connection part, 35 ... connector (second connector part), 37, 76 ... O-ring, 68 ... Metal gasket, R1 ... First region, R2 ... Second region.

Claims (11)

A deuterium lamp light source used in a vacuum or low-pressure atmosphere,
A sealed container filled with gas, the sealed container including a discharge part that generates a discharge, and a protruding part that communicates with the discharge part and protrudes in a light emitting direction by discharge; A deuterium lamp that emits outgoing light from a light exit window provided in
A storage member having a through hole between the first end and the second end, and storing the deuterium lamp in the through hole;
A holding member for holding the storage member;
Connecting means for detachably connecting the holding member to the first end side of the storage member,
Between the inner surface of the through hole of the storage member and the outer surface of the deuterium lamp, the through hole of the storage member is provided with a first region on the first end side and a second region on the second end side. An airtight fixing portion for fixing the deuterium lamp to the through hole is provided so as to be airtightly defined,
A deuterium lamp light source, wherein the connecting means is provided with sealing means for hermetically sealing a space between the first end side of the storage member and the holding member. The storage member includes a first connector portion that is electrically connected to the discharge portion of the stored deuterium lamp,
2. The deuterium lamp light source according to claim 1, wherein the connecting means electrically connects the second connector portion of the holding member to the first connector portion.   3. The deuterium lamp light source according to claim 1, wherein the connecting means is connected by screwing the holding member to the first end side of the storage member.   The deuterium lamp light source according to any one of claims 1 to 3, wherein the sealing means includes at least one of an O-ring and a gasket.   The deuterium lamp light source according to any one of claims 1 to 4, wherein the holding member includes a bellows-type telescopic tube. A deuterium lamp light source used in a vacuum or low-pressure atmosphere,
A sealed container filled with gas, the sealed container including a discharge part that generates a discharge, and a protruding part that communicates with the discharge part and protrudes in a light emitting direction by discharge; A deuterium lamp that emits outgoing light from a light exit window provided in
A storage member that has a through hole between the first end and the second end, and stores the deuterium lamp in the through hole;
The first end side of the storage member is provided with a connecting portion that is detachably connected to a holding member that holds the storage member.
Between the inner surface of the through hole of the storage member and the outer surface of the deuterium lamp, the through hole of the storage member is provided with a first region on the first end side and a second region on the second end side. An airtight fixing portion for fixing the deuterium lamp to the through-hole so as to be airtightly defined,
A deuterium lamp light source, wherein the connecting portion is provided with a sealing portion that hermetically seals between the first end side of the storage member and the holding member. The storage member includes a first connector portion that is electrically connected to the discharge portion of the stored deuterium lamp,
The deuterium lamp light source according to claim 6, wherein the first connector portion is electrically connected to the second connector portion of the holding member.   The deuterium lamp light source according to claim 6 or 7, wherein the holding member is screwed into and connected to the connecting portion.   The deuterium lamp light source according to any one of claims 6 to 8, wherein the sealing portion includes at least one of an O-ring and a gasket.   The deuterium lamp light source according to any one of claims 6 to 9, wherein the holding member includes a bellows-type telescopic tube. 11. The deuterium lamp light source according to claim 1, wherein the hermetic fixing portion is made of an adhesive or an O-ring.

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