JP4968909B2 - 表面処理剤 - Google Patents
表面処理剤 Download PDFInfo
- Publication number
- JP4968909B2 JP4968909B2 JP2007047642A JP2007047642A JP4968909B2 JP 4968909 B2 JP4968909 B2 JP 4968909B2 JP 2007047642 A JP2007047642 A JP 2007047642A JP 2007047642 A JP2007047642 A JP 2007047642A JP 4968909 B2 JP4968909 B2 JP 4968909B2
- Authority
- JP
- Japan
- Prior art keywords
- surface treatment
- treatment agent
- acid
- mass
- copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/14—Nitrogen-containing compounds
- C23F11/149—Heterocyclic compounds containing nitrogen as hetero atom
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C22/00—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C22/05—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions
- C23C22/06—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6
- C23C22/48—Chemical surface treatment of metallic material by reaction of the surface with a reactive liquid, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using aqueous solutions using aqueous acidic solutions with pH less than 6 not containing phosphates, hexavalent chromium compounds, fluorides or complex fluorides, molybdates, tungstates, vanadates or oxalates
- C23C22/52—Treatment of copper or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/12—Oxygen-containing compounds
- C23F11/122—Alcohols; Aldehydes; Ketones
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F11/00—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent
- C23F11/08—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids
- C23F11/10—Inhibiting corrosion of metallic material by applying inhibitors to the surface in danger of corrosion or adding them to the corrosive agent in other liquids using organic inhibitors
- C23F11/173—Macromolecular compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/282—Applying non-metallic protective coatings for inhibiting the corrosion of the circuit, e.g. for preserving the solderability
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Description
まず、イオン交換水に0.1質量%の2−(1−ナフチルメチル)ベンゾイミダゾールと、5.25質量%のギ酸と、表1に示す濃度のキシリトールを加えて実施例1〜12の表面処理剤を調製した。また、比較例1として、キシリトールを加えないこと以外は実施例1〜12と同様に調製した表面処理剤を準備した。
まず、イオン交換水に0.3質量%の2−メチルベンゾイミダゾールと、4.5質量%の酢酸と、0.5質量%のD−ソルビトールとを添加し、更に表2に示す銅イオン濃度となるように酢酸銅を添加して実施例13〜20の表面処理剤を調製した。また、比較例として、D−ソルビトールを添加しないこと以外は、それぞれ実施例13〜20と同様に調製した比較例2〜9の表面処理剤を準備した。そして、実施例13〜20及び比較例2〜9のそれぞれについて、上記実験1と同様に被処理材を処理し、上記実験1と同様の方法で金上の皮膜量を評価した。結果を表2に示す。
まず、イオン交換水に0.3質量%の2−(5’−フェニル)ペンチルベンゾイミダゾールと、4.5質量%の酢酸と、表5に示す糖アルコールとを添加して実施例35〜44の表面処理剤を調製した。また、比較例11として、糖アルコールを添加しないこと以外は実施例35〜44と同様に調製した表面処理剤を準備した。
まず、イオン交換水に0.3質量%の2−(5’−フェニル)ペンチルベンゾイミダゾールと、4.5質量%の酢酸と、表6に示す糖アルコールとを添加して実施例45〜54の表面処理剤を調製した。また、比較例12として、糖アルコールを添加しないこと以外は実施例45〜54と同様に調製した表面処理剤を準備した。
Claims (6)
- 銅又は銅合金の表面処理剤であって、
有機酸及び無機酸から選ばれる1種類以上の酸とイミダゾール化合物と糖アルコールとを含むことを特徴とする表面処理剤。 - 前記糖アルコールが0.01〜7質量%の範囲で含まれている請求項1に記載の表面処理剤。
- 前記糖アルコールは、マンニトール、ソルビトール及びキシリトールから選ばれる少なくとも1つである請求項1又は2に記載の表面処理剤。
- 前記有機酸が、ギ酸及び酢酸から選択される少なくとも1つである請求項1〜3のいずれか1項に記載の表面処理剤。
- 前記表面処理剤中の前記酸の濃度は、1〜80質量%である請求項1〜4のいずれか1項に記載の表面処理剤。
- 前記表面処理剤中の前記イミダゾール化合物の濃度が、0.01〜5質量%である請求項1〜5のいずれか1項に記載の表面処理剤。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007047642A JP4968909B2 (ja) | 2006-03-03 | 2007-02-27 | 表面処理剤 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006058108 | 2006-03-03 | ||
JP2006058108 | 2006-03-03 | ||
JP2007047642A JP4968909B2 (ja) | 2006-03-03 | 2007-02-27 | 表面処理剤 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007262394A JP2007262394A (ja) | 2007-10-11 |
JP4968909B2 true JP4968909B2 (ja) | 2012-07-04 |
Family
ID=38635675
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007047642A Expired - Fee Related JP4968909B2 (ja) | 2006-03-03 | 2007-02-27 | 表面処理剤 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4968909B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0681161A (ja) * | 1992-08-31 | 1994-03-22 | Hitachi Ltd | 銅及び銅合金の表面処理剤 |
JP3547028B2 (ja) * | 1996-02-26 | 2004-07-28 | 四国化成工業株式会社 | 銅及び銅合金の表面処理剤 |
JPH09316649A (ja) * | 1996-05-27 | 1997-12-09 | Matsushita Electric Ind Co Ltd | 無電解めっき液 |
JP4369255B2 (ja) * | 2004-01-22 | 2009-11-18 | 株式会社パーカーコーポレーション | レジスト現像液および当該レジスト現像液を用いた半導体装置の製造方法 |
JP4456424B2 (ja) * | 2004-06-29 | 2010-04-28 | 関東化学株式会社 | フォトレジスト残渣及びポリマー残渣除去組成物 |
-
2007
- 2007-02-27 JP JP2007047642A patent/JP4968909B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007262394A (ja) | 2007-10-11 |
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