JP4959680B2 - 電子放出素子、電子放出素子を用いた表示装置及び電子放出素子の製造方法 - Google Patents
電子放出素子、電子放出素子を用いた表示装置及び電子放出素子の製造方法 Download PDFInfo
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- JP4959680B2 JP4959680B2 JP2008508533A JP2008508533A JP4959680B2 JP 4959680 B2 JP4959680 B2 JP 4959680B2 JP 2008508533 A JP2008508533 A JP 2008508533A JP 2008508533 A JP2008508533 A JP 2008508533A JP 4959680 B2 JP4959680 B2 JP 4959680B2
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/312—Cold cathodes, e.g. field-emissive cathode having an electric field perpendicular to the surface, e.g. tunnel-effect cathodes of metal-insulator-metal [MIM] type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/04—Cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/312—Cold cathodes having an electric field perpendicular to the surface thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/312—Cold cathodes having an electric field perpendicular to the surface thereof
- H01J2201/3125—Metal-insulator-Metal [MIM] emission type cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0481—Cold cathodes having an electric field perpendicular to the surface thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/02—Electrodes other than control electrodes
- H01J2329/04—Cathode electrodes
- H01J2329/0481—Cold cathodes having an electric field perpendicular to the surface thereof
- H01J2329/0484—Metal-Insulator-Metal [MIM] emission type cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Cold Cathode And The Manufacture (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Electrodes For Cathode-Ray Tubes (AREA)
Description
2 下部電極
3 バリア層
4 電子供給層
5 絶縁体層
6 上部電極
7 凹部
8 炭素層
9 前面基板
10 コレクタ電極
11 蛍光体
Claims (10)
- 非結晶質の電子供給層と、前記電子供給層上に形成された絶縁体層と、前記絶縁体層上に形成された電極とを有し、前記電子供給層と前記電極間に電界が印加されたときに電子を放出する電子放出素子であって、
前記電極と前記絶縁体層が切り欠かれ前記電子供給層が露出した凹部と、前記電極と前記凹部上を前記電子供給層の露出面の内側部分を除いて覆い前記電子供給層の露出面の縁部分に接触する炭素層とを有することを特徴とする電子放出素子。 - 前記炭素層と接触する領域の前記電子供給層が結晶相であることを特徴とする請求項1に記載された電子放出素子。
- 前記結晶相の断面形状は略半円であることを特徴とする請求項2に記載された電子放出素子。
- 前記結晶相の周囲が前記結晶相よりも結晶粒子が小さい小粒径の結晶相であることを特徴とする請求項2又は3に記載された電子放出素子。
- 前記小粒径の結晶相の断面形状は略半円であることを特徴とする請求項4に記載された電子放出素子。
- 電子放出素子と、前記電子放出素子から放出される電子が衝突することで発光する発光体とを有し、前記電子放出素子が請求項1から5のいずれか1項に記載された電子放出素子であることを特徴とする電子放出素子を用いた表示装置。
- 非結晶質の電子供給層と、前記電子供給層上に形成された絶縁体層と、前記絶縁体層上に形成された電極とを有し、前記電子供給層と前記電極間に電界が印加されたときに電子を放出する電子放出素子の製造方法であって、
前記電極と前記絶縁体層が切り欠かれ前記電子供給層が露出した凹部を形成する工程と、前記電極と前記凹部上に前記電子供給層の露出面の内側部分を除いて覆い前記電子供給層の露出面の縁部分に接触する炭素層を形成する工程とを有することを特徴とする電子放出素子の製造方法。 - 前記炭素層を形成する工程では、前記電極と前記凹部上に前記炭素層を形成し、前記電子供給層と前記電極間に通電を行い、前記炭素層から発生するジュール熱によって、前記電子供給層の露出面の内側部分上から前記炭素層を剥離することを特徴とする請求項7に記載された電子放出素子の製造方法。
- 前記炭素層を形成する前の面にエッチング処理、洗浄処理又は熱処理を行うことを特徴とする請求項7又は8に記載された電子放出素子の製造方法。
- 前記電子供給層と前記電極間に通電を行い、前記炭素層から発生するジュール熱によって、前記炭素層と接触する領域の前記電子供給層を結晶化する工程を有することを特徴とする請求項7から9のいずれか1項に記載された電子放出素子の製造方法。
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JP2008508533A JP4959680B2 (ja) | 2006-03-31 | 2007-03-26 | 電子放出素子、電子放出素子を用いた表示装置及び電子放出素子の製造方法 |
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PCT/JP2007/056214 WO2007114103A1 (ja) | 2006-03-31 | 2007-03-26 | 電子放出素子、電子放出素子を用いた表示装置及び電子放出素子の製造方法 |
JP2008508533A JP4959680B2 (ja) | 2006-03-31 | 2007-03-26 | 電子放出素子、電子放出素子を用いた表示装置及び電子放出素子の製造方法 |
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JP2010245113A (ja) * | 2009-04-01 | 2010-10-28 | Sanyo Electric Co Ltd | 固体電解コンデンサ |
US8436332B2 (en) | 2009-12-17 | 2013-05-07 | Pioneer Corporation | Electron emission element and imaging device having the same |
WO2011083512A1 (ja) * | 2010-01-07 | 2011-07-14 | パイオニア株式会社 | 電子放出素子およびこれを備えた撮像装置 |
JP5994271B2 (ja) * | 2012-02-10 | 2016-09-21 | 国立大学法人東北大学 | 電子ビーム発生装置、電子ビーム照射装置、電子ビーム露光装置、および製造方法 |
CN109285740B (zh) * | 2018-11-12 | 2024-02-09 | 北京大学 | 一种片上微型电子源及其制造方法 |
JP7152813B2 (ja) * | 2018-11-12 | 2022-10-13 | 北京大学 | オンチップミニチュア電子源及びその製造方法 |
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JP2005512280A (ja) * | 2001-12-06 | 2005-04-28 | パイオニア株式会社 | 電子放出素子及びその製造方法並びに電子放出素子を用いた表示装置 |
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JP2011151044A (ja) | 2011-08-04 |
WO2007114103A1 (ja) | 2007-10-11 |
EP2006875B1 (en) | 2011-09-28 |
US20090284129A1 (en) | 2009-11-19 |
EP2006875A9 (en) | 2009-07-22 |
US7994698B2 (en) | 2011-08-09 |
JPWO2007114103A1 (ja) | 2009-08-13 |
JP5171988B2 (ja) | 2013-03-27 |
EP2006875A4 (en) | 2010-06-09 |
EP2006875A2 (en) | 2008-12-24 |
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