JP4949520B2 - 波長選択的吸収層の堆積を含む多重接合光電子デバイス、製造方法、及び、集積回路、 - Google Patents
波長選択的吸収層の堆積を含む多重接合光電子デバイス、製造方法、及び、集積回路、 Download PDFInfo
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Description
2 3d金属の相互接続部、
3 3a、3b金属コンタクト、
4 第一レイヤ、
5 格子、
6 反射防止膜、
7 第二活性レイヤ、
8 空乏域、
9 電気的に不活性な第三レイヤ、
10 電気的に不活性な充填材料、
11 電気的に不活性な距離層、
12 11の単一レイヤ、
13 第一領域8の間にある、強くドープされた第二領域、
14 薄いレイヤ、
15 ポリストライプ。
Claims (11)
- 波長選択的吸収層の堆積を含む多重接合光電子デバイスであって、前記吸収層の各々は第一レイヤを包含し、前記第一レイヤは、その下に配置された、電気的に不活性な第三レイヤ上の電気的に活性な第二レイヤ自体に吸収される入射光の波長を決める特定ピッチの格子を有し、前記各異なる吸収層の前記電気的に活性な第二レイヤは、前記吸収される入射光によって前記活性層内に生成される電荷キャリアを取り出すため側面のコンタクトと電気的に接続されており、前記第一レイヤ内の前記格子は、前記それぞれの吸収層によって吸収される前記波長に応じた特定の幅の周期的なストライプで区画されており、前記周期は前記ピッチによって定まり、前記吸収層内の前記活性レイヤは異なった濃度でドープされた領域に区画され、前記ストライプの下の前記領域が第一領域に対応し、前記第一領域は、前記第一領域群の間にある第二領域群の前記濃度よりも、少なくとも一桁低い濃度でドープされ、前記第一レイヤの前記ストライプは、前記電気的に活性な第二レイヤの前記第一領域から電気的に絶縁されている、前記多重接合光電子デバイス。
- 前記第一領域に対するドーパントは、p−型もしくはn−型とすることができるが、活性レイヤ全体に対して同様であり、前記第二領域に対する前記ドーパントは、交互にp−型とn−型とになるよう選定される、請求項1に記載の多重接合光電子デバイス。
- 前記各異なる吸収層の前記第一レイヤ内の前記格子が反射防止膜でカバーされており、
前記第一レイヤは、前記格子の上方に配置された相互接続部と、前記反射防止膜を突き出し前記相互接続部と前記格子とを電気的に接続している接地コンタクトとを有しており、
前記第一レイヤ内の前記格子は台形様の断面を有する前記ストライプを含み、前記ストライプの最上部は前記第二レイヤに近接する前記ストライプの底部よりも小さい、
請求項1又は2に記載の多重接合光電子デバイス。 - 前記吸収層は、入射光波の重畳により発生し前記吸収層を含む面に対し垂直方向に生成される定常波に適した特定幅の、電気的に不活性な距離層によってカバーされる、請求項1〜3のいずれか1項に記載の多重接合光電子デバイス。
- 前記第一レイヤ内に電気的に不活性な充填材料を堆積して前記第一レイヤを均一にする、請求項1〜4のいずれか1項に記載の多重接合光電子デバイス。
- 前記電気的に不活性な層はガラス様材料で作られ、前記ストライプは多結晶シリコンで作られ、前記電気的に活性な第二レイヤは適宜にドープされたシリコンで作られる、請求項1〜5のいずれか1項に記載の多重接合光電子デバイス。
- 前記吸収層の前記第一レイヤ内の前記格子は、前記格子に隣接する前記電気的に活性な第二レイヤに引っ張り歪みを生じさせる材料を使って作られる、請求項1〜6のいずれか1項に記載の多重接合光電子デバイス。
- 前記格子は、前記格子の前記ピッチに等しい周期aの周期的ポリストライプ、および前記格子の長手方向に沿って周期bで周期的に変化する幅により区画され、両方の周期のパラメータaおよびbは、前記入射光の偏光SおよびP双方の吸収を最大化するため最適化される、請求項1〜7のいずれか1項に記載の多重接合光電子デバイス。
- 前記第一レイヤ内の前記格子は、前記第二レイヤ中に吸収される前記入射光のエバネセント結合が得られるように最適化されている、請求項1〜7のいずれか1項に記載の多重接合光電子デバイス。
- 請求項1〜9のいずれか1項に記載された多重接合光電子デバイスを一つ以上含む集積回路。
- 波長選択的吸収層を製造するステップを含む、多重接合光電子デバイスの製造方法であって、前記吸収層は第一レイヤを包含し、前記第一レイヤは、その下に配置された、電気的に不活性な第三レイヤ上の電気的に活性な第二レイヤ自体に吸収される入射光の波長を決める特定ピッチの格子を有し、前記各異なる吸収層の前記電気的に活性な第二レイヤは、前記吸収された入射光によって前記活性層内に生成される電荷キャリアを取り出すため側面のコンタクトと電気的に接続されており、前記第一レイヤ内の前記格子は、前記それぞれの吸収層によって吸収される前記波長に応じた特定の幅の周期的なストライプで区画されており、前記周期は前記ピッチによって定められ、前記吸収層内の前記活性レイヤは異なった濃度でドープされた領域に区画され、前記ストライプの下の前記領域が第一領域に対応し、前記第一領域は、前記第一領域群の間にある第二領域群の前記濃度よりも、少なくとも一桁低い濃度でドープされ、前記第一レイヤの前記ストライプは、前記電気的に活性な第二レイヤの前記第一領域から電気的に絶縁され、前記製造方法は、前記入射光の相異なる波長に相応して吸収するための異なるピッチを有する前記波長選択的吸収層のいくつかを堆積するステップをさらに含む、前記製造方法。
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EP08100427.7 | 2008-01-14 | ||
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PCT/EP2009/050094 WO2009090123A2 (en) | 2008-01-14 | 2009-01-07 | Using 3d integrated diffractive gratings in solar cells |
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US8829329B2 (en) * | 2010-08-18 | 2014-09-09 | International Business Machines Corporation | Solar cell and battery 3D integration |
CN101924159A (zh) * | 2010-08-23 | 2010-12-22 | 江苏绿洲新能源有限公司 | 集成衍射光栅的太阳能电池及其制造方法 |
US8859357B2 (en) * | 2010-11-03 | 2014-10-14 | Texas Instruments Incorporated | Method for improving device performance using dual stress liner boundary |
CN102074591A (zh) * | 2010-12-02 | 2011-05-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | 用于太阳电池吸收增强的复合微纳光子结构及其制法 |
CN103258909B (zh) * | 2013-04-28 | 2016-09-07 | 中国科学院苏州纳米技术与纳米仿生研究所 | 薄膜电池的制作方法以及薄膜电池 |
CN103400555B (zh) | 2013-07-23 | 2015-07-01 | 合肥京东方光电科技有限公司 | 一种消除关机残影的电路及显示器 |
CN103456243B (zh) | 2013-08-23 | 2016-05-11 | 京东方科技集团股份有限公司 | 一种幕墙 |
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JPS61163592A (ja) | 1985-01-14 | 1986-07-24 | 株式会社小糸製作所 | 半導体光学装置 |
DE69104573T2 (de) * | 1990-08-03 | 1995-04-20 | Philips Nv | Optischer Verstärker. |
JP2962069B2 (ja) | 1992-09-07 | 1999-10-12 | 日本電気株式会社 | 導波路構造半導体受光素子 |
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JP4130815B2 (ja) * | 2004-07-16 | 2008-08-06 | 松下電器産業株式会社 | 半導体受光素子及びその製造方法 |
US20070041679A1 (en) * | 2005-07-01 | 2007-02-22 | Zhaoran Huang | Integrated thin film MSM photodetector/grating for WDM |
US7830946B2 (en) * | 2006-03-29 | 2010-11-09 | Lawrence Livermore National Security, Llc | Grating enhanced solid-state laser amplifiers |
-
2009
- 2009-01-05 TW TW098100106A patent/TW200947724A/zh unknown
- 2009-01-07 WO PCT/EP2009/050094 patent/WO2009090123A2/en active Application Filing
- 2009-01-07 CN CN2009801020476A patent/CN101919054B/zh active Active
- 2009-01-07 JP JP2010541773A patent/JP4949520B2/ja not_active Expired - Fee Related
- 2009-01-07 EP EP09701853A patent/EP2229697A2/en not_active Withdrawn
- 2009-12-07 US US12/632,129 patent/US8299556B2/en active Active
Also Published As
Publication number | Publication date |
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CN101919054A (zh) | 2010-12-15 |
WO2009090123A2 (en) | 2009-07-23 |
EP2229697A2 (en) | 2010-09-22 |
US20100101638A1 (en) | 2010-04-29 |
JP2011510486A (ja) | 2011-03-31 |
WO2009090123A3 (en) | 2010-01-14 |
TW200947724A (en) | 2009-11-16 |
US8299556B2 (en) | 2012-10-30 |
CN101919054B (zh) | 2012-06-27 |
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