JP4940004B2 - ガス不純物除去装置 - Google Patents
ガス不純物除去装置 Download PDFInfo
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- JP4940004B2 JP4940004B2 JP2007108928A JP2007108928A JP4940004B2 JP 4940004 B2 JP4940004 B2 JP 4940004B2 JP 2007108928 A JP2007108928 A JP 2007108928A JP 2007108928 A JP2007108928 A JP 2007108928A JP 4940004 B2 JP4940004 B2 JP 4940004B2
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- gas
- pure water
- liquid contact
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- air
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- 239000012535 impurity Substances 0.000 title claims description 75
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 149
- 239000007788 liquid Substances 0.000 claims description 114
- 238000011144 upstream manufacturing Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 239000008213 purified water Substances 0.000 claims description 2
- 238000011109 contamination Methods 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000004887 air purification Methods 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013505 freshwater Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- Gas Separation By Absorption (AREA)
Description
11 空気流路
12 気液接触ユニット
13 エレメント
14 保持容器
15 純水
16 純水供給排出手段(吸収液供給排出手段)
17a 分岐管
17b 配管
17c 循環ポンプ
18 純水補給系(吸収液補給系)
18a 供給配管
18b 供給配管の一端
19 排水系
19a 排水管
19b 排水
Claims (2)
- 可溶性ガス不純物を含む空気が空気流路を通過する際に前記空気中の前記ガス不純物を除去して浄化するガス不純物除去装置において、
少なくとも1つの気液接触用のエレメントをそれぞれに備え、前記空気流路の空気流れ方向に配置された複数の気液接触ユニットと、前記気液接触ユニットの上部から該気液接触ユニット内に前記可溶性ガス不純物を吸収する純水を供給して前記エレメントを形成する純水湿潤素材に滴下させると共に、前記エレメントの通気路に前記純水の水膜を形成する純水供給排出手段と、前記気液接触ユニット内を滴下する間に前記ガス不純物を含む前記空気と気液接触しながら落下した前記純水を受けて収容する保持容器とを含み、
前記純水供給排出手段が、前記保持容器に収容されている前記純水を繰り返し前記気液接触ユニットに供給する純水循環系と、前記保持容器に収容されている前記純水の一部を排水する排水系と、前記気液接触ユニットを循環する前記純水に新しい前記純水を補充する補給系とを備え、
前記純水循環系が、前記保持容器に収容されている前記純水を複数の前記気液接触ユニットにそれぞれ同時に送水する配管と、該配管に設置された循環ポンプとからなり、前記補給系が、純水供給源から延びる補給管を備え、該補給管を介して前記空気流路内において最上流側に配置されている前記気液接触ユニットを除く他の前記気液接触ユニットのいずれかの上部からその内部に新たな前記純水を補給することを特徴とするガス不純物除去装置。 - 前記給水供給源から延びる前記補給管の出口端が、最下流側に配置されている前記気液接触ユニットの上部に位置し、最下流側の前記気液接触ユニットの内部に新たな前記純水を補給する請求項1に記載のガス不純物除去装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007108928A JP4940004B2 (ja) | 2007-04-18 | 2007-04-18 | ガス不純物除去装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007108928A JP4940004B2 (ja) | 2007-04-18 | 2007-04-18 | ガス不純物除去装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008264643A JP2008264643A (ja) | 2008-11-06 |
JP4940004B2 true JP4940004B2 (ja) | 2012-05-30 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2007108928A Expired - Fee Related JP4940004B2 (ja) | 2007-04-18 | 2007-04-18 | ガス不純物除去装置 |
Country Status (1)
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JP (1) | JP4940004B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102908850A (zh) * | 2012-09-26 | 2013-02-06 | 张美玲 | 一种工业废气净化装置 |
KR102191369B1 (ko) * | 2017-10-27 | 2020-12-15 | 한국과학기술원 | 용해성 유해 가스 분리 장치 |
JP6746739B1 (ja) * | 2019-02-27 | 2020-08-26 | 新菱冷熱工業株式会社 | 空気中汚染物質の除去システム |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000317248A (ja) * | 1999-05-14 | 2000-11-21 | Yamaha Corp | ガス不純物の除去システム |
JP2002219325A (ja) * | 2001-01-23 | 2002-08-06 | Ohbayashi Corp | 熱回収式ケミカルワッシャ装置 |
JP4435607B2 (ja) * | 2004-03-15 | 2010-03-24 | 東洋熱工業株式会社 | エアワッシャー |
JP5165194B2 (ja) * | 2005-09-12 | 2013-03-21 | 株式会社テクノ菱和 | 水膜式スクラバー |
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- 2007-04-18 JP JP2007108928A patent/JP4940004B2/ja not_active Expired - Fee Related
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