JP4936003B2 - オートチューニング機能を備えた多軸制御装置 - Google Patents

オートチューニング機能を備えた多軸制御装置 Download PDF

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JP4936003B2
JP4936003B2 JP2007291185A JP2007291185A JP4936003B2 JP 4936003 B2 JP4936003 B2 JP 4936003B2 JP 2007291185 A JP2007291185 A JP 2007291185A JP 2007291185 A JP2007291185 A JP 2007291185A JP 4936003 B2 JP4936003 B2 JP 4936003B2
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gravity
center
inertia
moment
control
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JP2009118690A (ja
JP2009118690A5 (enExample
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崇 萬羽
裕司 中村
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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  • Control Of Electric Motors In General (AREA)
JP2007291185A 2007-11-08 2007-11-08 オートチューニング機能を備えた多軸制御装置 Expired - Fee Related JP4936003B2 (ja)

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JP2007291185A JP4936003B2 (ja) 2007-11-08 2007-11-08 オートチューニング機能を備えた多軸制御装置

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JP2007291185A JP4936003B2 (ja) 2007-11-08 2007-11-08 オートチューニング機能を備えた多軸制御装置

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JP2009118690A JP2009118690A (ja) 2009-05-28
JP2009118690A5 JP2009118690A5 (enExample) 2011-06-16
JP4936003B2 true JP4936003B2 (ja) 2012-05-23

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102768468B (zh) * 2011-05-03 2015-07-22 上海微电子装备有限公司 用于光刻设备的粗动台的质心测校的方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3127688B2 (ja) * 1993-12-03 2001-01-29 トヨタ自動車株式会社 フィードバックゲイン決定方法
JP3452305B2 (ja) * 1998-05-20 2003-09-29 兵庫県 磁気浮上体の位置決め装置
JP3540239B2 (ja) * 2000-03-01 2004-07-07 シャープ株式会社 ステージ装置
JP3931271B2 (ja) * 2001-11-28 2007-06-13 株式会社安川電機 位置決め制御方法および位置決め制御装置
JP2004015904A (ja) * 2002-06-06 2004-01-15 Canon Inc リニアステージ、リニアポジショナおよびリニアスピンスタンド
US7437201B2 (en) * 2003-01-14 2008-10-14 Cullen Christopher P Electric motor controller
JP2006217729A (ja) * 2005-02-03 2006-08-17 Yaskawa Electric Corp モータ制御装置とその制御方法
JP2006260708A (ja) * 2005-03-18 2006-09-28 Canon Inc 光ピックアップ装置及びその重心位置の調整方法

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