JP4926264B2 - Pattern forming apparatus and positioning apparatus - Google Patents

Description

  The present invention relates to a pattern forming apparatus that forms a pattern on a substrate by printing, laser processing, or the like, and a positioning apparatus used in the pattern forming apparatus.

  As an apparatus for performing pattern formation on a substrate, for example, a configuration disclosed in Patent Document 1 is known. As shown in FIG. 8, this apparatus includes a support base 100 having two mounting portions 101 and 102 to which a substrate w is attached, and a position correcting device 103 that corrects the positions of the substrates w attached to the mounting portions 101 and 102. 104, position detecting devices 105 and 106 for detecting the position of the substrate w attached to the mounting portions 101 and 102, and a printing device 107 for printing a conductive pattern on the substrate w. The printing device 107 and the support base 100 are configured to be relatively movable so that the printing device 107 can print the conductive pattern on the substrate w attached to the other while correcting the position of the substrate w attached to either one. Yes. The relative movement between the printing apparatus 107 and the support base 100 is performed by rotationally driving a ball screw 110 screwed to a base body 108 including the support base 100 by a motor 111.

  Since the movement of the base body 108 is repeatedly performed at high speed, the ball screw 110 may be thermally expanded due to friction, and the support base 100 may not be accurately moved to a predetermined position. In order to correct such a thermal displacement of the ball screw, a temperature sensor for measuring the temperature of the ball screw and a displacement sensor for detecting the expansion / contraction amount of the ball screw are provided, and the feed amount of the ball screw can be adjusted based on these detections. Traditionally done. Further, in Patent Document 2, in a machine tool including a table screwed to a ball screw, a contact sensor that moves together with the table is provided, and the current position is determined by contacting the contact sensor with a contact disposed at a predetermined position. It is disclosed that the amount of thermal expansion is detected and corrected in comparison with the amount of table movement calculated from the motor rotational speed and the like obtained by the position detector.

JP 2007-196521 A JP 2000-218469 A

  However, the correction based on the detection of the temperature and displacement of the ball screw is likely to cause an error, and accurate positioning is difficult particularly during high-speed conveyance. In addition, the method disclosed in Patent Document 2 includes a timing at which the contact sensor of the moving body detects contact with the contact and a timing at which the position detector acquires the rotation speed of the motor when the moving body moves at high speed. Misalignment is likely to occur. As described above, the conventional thermal displacement correction method has a problem that it cannot cope with shortening of the tact time of pattern formation because the positioning accuracy is deteriorated as the conveyance speed is increased.

  Therefore, an object of the present invention is to provide a pattern forming apparatus and a positioning apparatus that can perform pattern formation on a substrate quickly and accurately.

The object of the present invention is a pattern forming apparatus for forming a pattern on a substrate, the movable table having a first mounting portion and a second mounting portion on which the substrate is mounted, respectively, and the first mounting portion or the first mounting portion. 2. A processing means for forming a pattern on the substrate attached to the mounting portion, and a position of the substrate attached to the first mounting portion or the second mounting portion, which are respectively disposed on both sides of the processing means. Substrate position detecting means, substrate position correcting means for correcting the detected position of the substrate, the first mounting portion is positioned on one of the substrate position detecting means, and the second mounting portion is positioned on the processing means. The movement along the drive coordinate axis between the first area and the second area in which the first mounting portion is located on the processing means and the second mounting portion is located on the other substrate position detection means. Transport the table back and forth A drive means, a coordinate position detecting means for detecting the moving platform coordinate position on said drive axis, wherein said movable carriage which is transported to the first area and the second area, the first area and the And a control means for controlling the operation of the drive means, the control means based on the detection of the coordinate position detection means. The driving means is operated so that the moving table reciprocates between the first target coordinate and the second target coordinate on the driving coordinate axis, and is detected in the first area after the moving table stops. The correction of the first target coordinate based on the position deviation amount of the moving table and the second target coordinate based on the position deviation amount of the moving table detected in the second area after the moving table stops. In parallel with the correction, The pattern is formed on the substrate by the processing means while the moving table is stopped, and the correction of the first target coordinate and the second target coordinate is reflected at the next movement of the moving table. It is achieved by a pattern forming apparatus characterized by the following.

In addition, the object of the present invention is to form a pattern on a movable base having a first mounting portion and a second mounting portion on which a substrate is mounted, respectively, and a substrate attached to the first mounting portion or the second mounting portion. A substrate position detecting unit for detecting the position of the substrate mounted on the first mounting part or the second mounting part, and a detected position of the substrate. A first position where the first mounting portion is positioned on one of the substrate position detecting means, the second mounting portion is positioned on the processing means, and the first mounting portion is the first mounting portion. Driving means for reciprocating and transporting the movable table along the driving coordinate axis between the second area where the second mounting portion is located on the processing means and the second mounting position is located on the other substrate position detecting means; and on the driving coordinate axis Coordinate position of the moving platform A positioning apparatus for use in the pattern forming apparatus and a coordinate position detecting means for detecting said been said movable carriage transported to the first area and the second area, the first area and the second A moving table detecting means for detecting a deviation amount from a reference position fixed in the area; and a control means for controlling the operation of the driving means, wherein the control means is based on the detection by the coordinate position detecting means. The driving means is operated so that the moving table reciprocates between a first target coordinate and a second target coordinate on a coordinate axis, and the detected in the first area after the moving table stops. Correction of the first target coordinates based on the position deviation amount of the moving table and correction of the second target coordinates based on the position deviation amount of the moving table detected in the second area after the moving table stops In parallel The processing unit forms a pattern on the substrate while the moving table is stopped, and the correction of the first target coordinate and the second target coordinate is reflected at the next movement of the moving table. This is achieved by a positioning device characterized in that.

  ADVANTAGE OF THE INVENTION According to this invention, the pattern formation apparatus and positioning device which can perform the pattern formation with respect to a board | substrate rapidly and correctly can be provided.

It is a front view of the pattern formation apparatus which concerns on one Embodiment of this invention. It is AA sectional drawing of FIG. It is a side view of the pattern formation apparatus seen from the arrow B direction of FIG. It is a front view for demonstrating the action | operation of the pattern formation apparatus shown in FIG. It is a flowchart for demonstrating the action | operation of the pattern formation apparatus shown in FIG. It is a principal part front view of the pattern formation apparatus which concerns on other embodiment of this invention. It is a principal part front view of the pattern formation apparatus which concerns on further another embodiment of this invention. It is a front view of the conventional pattern formation apparatus.

  Hereinafter, a pattern forming apparatus for printing a conductive pattern on a substrate according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a front view of a pattern forming apparatus according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA of FIG. FIG. 3 is a side view in the direction of arrow B in FIG. In each of the drawings, in order to facilitate understanding of the configuration, enlargement or reduction is partially performed instead of the actual size ratio. In FIG. 3, the processing device 21 shown in FIG. 1 is omitted.

  As shown in FIGS. 1 to 3, the pattern forming apparatus 1 includes a conveyor 10, a first transfer arm 11, a second transfer arm 12, and a pattern forming apparatus main body 20. The conveyor 10 is a device for transferring the substrate w, and various types such as a belt conveyor, a roller conveyor, and a chain conveyor can be adopted.

  The first transfer arm 11 is an apparatus for exchanging the substrate w between the conveyor 10 and a first mounting portion 35a of the first support base 35 described later. As shown in FIG. Arranged above the device 25. The first transfer arm 11 includes a support arm 11a extending in the horizontal direction, and a rotating shaft 11b extending in the vertical direction is provided at the center of the support arm 11a. A motor 11c is connected to the upper end of the rotating shaft 11b, so that the support arm 11a can rotate on a horizontal plane. The rotating shaft 11b is connected to a moving shaft 11d that moves in the vertical direction via a motor 11c, whereby the support arm 11a is configured to move in the vertical direction. A plurality of suction pads 11e for sucking and holding the upper surface of the substrate w are provided on the lower surfaces of both end portions of the support arm 11a.

  The 2nd conveyance arm 12 is an apparatus which replaces | exchanges the board | substrate w between the conveyor 10 and the 2nd mounting part 37a of the 2nd support stand 37 mentioned later. Since the configuration of the second transfer arm 12 is the same as that of the first transfer arm 11 described above, detailed description thereof is omitted. In addition, the 1st conveyance arm 11 and the 2nd conveyance arm 12 are arrange | positioned on both sides of the processing apparatus 21 mentioned later.

  The pattern forming apparatus main body 20 includes a processing device 21, a substrate support device 25, a first substrate position detection device 51, and a second substrate position detection device 52. The processing device 21 is a device that forms a pattern by applying a conductive paste or the like on the substrate w. For example, a screen printing machine can be exemplified. The processing device 21 only needs to be able to form various patterns such as a print pattern and a groove pattern on the substrate w based on a preset pattern shape. For example, a wiring pattern or marking on the substrate w by laser processing. It may be a laser processing apparatus capable of performing the above-described process or an ink jet printing apparatus.

  The substrate support device 25 includes a moving base 26, a first substrate positioning device 27, a second substrate positioning device 28, a driving device 32, and a coordinate position detecting device 32c. The moving table 26 reciprocates horizontally along the conveying direction of the conveyor 10 below the processing device 21. The moving table 26 is configured by mounting a first substrate positioning device 27 and a second substrate positioning device 28 on the upper surface of the table main body 30.

  As shown in FIG. 1, the driving device 32 includes a ball screw 32a arranged so as to extend along a driving coordinate axis parallel to the conveyor 10, and a ball screw nut 32d fixed to the base body 30 and screwed into the ball screw 32a. And a drive motor 32b having an output shaft coupled to the ball screw 32a via a coupling (not shown). The coordinate position detection device 32c is composed of a rotation detector such as a rotary encoder that detects the number of rotations of the ball screw 32a by the rotational drive of the drive motor 32b. The ball screw 32a has a thread groove portion 32e formed in the middle portion, and non-thread groove portions on both ends of the screw groove portion 32e are rotatably supported by bearings 39a and 39b. The bearings 39a and 39b are fixed to the upper surface of the gantry 31 so as to support the ball screw 32a without restraining the axial extension during thermal expansion of the ball screw 32a. Stoppers (not shown) for restricting the amount of reciprocation of the base body 30 are provided at both ends of the gantry 31 so that the base body 30 and the like can be prevented from being damaged when the mobile base 26 is abnormally transported. It is configured. The gantry 31 may be configured to support and guide the gantry body 30 by appropriately including guide rails extending along the transport direction. The first substrate positioning device 27 and the second substrate positioning device 28 are respectively arranged along the reciprocating movement direction (the left-right direction in FIG. 1) of the moving table 26.

  The first substrate positioning device 27 is a device that supports the substrate w loaded from the conveyor 10 by the first transfer arm 11 and aligns the substrate w. The first support base 35 that supports the substrate w, A first position correcting device 36 is provided that corrects the position of the substrate w supported by the first support base 35 to a predetermined position and aligns the substrate w. The first support base 35 is placed on top of the first position correction device 36. On the upper surface of the first support base 35, a first mounting portion 35a for attaching the substrate w is provided. As a configuration for attaching the substrate w to the first mounting portion 35a, for example, a configuration in which the substrate w is sucked through a suction hole (not shown) provided in the first support base 35 can be exemplified.

  The first position correcting device 36 is a deviation amount between the position of the substrate w attached to the first mounting portion 35a detected by the first substrate position detecting device 51 described later and a predetermined position of the substrate w set in advance. Is calculated, and the first support base 35 is moved by a predetermined amount based on the deviation amount, so that the substrate w supported by the first support base 35 can be arranged at a predetermined position of the preset substrate. It is configured. As a configuration for moving the first support base 35 by a predetermined amount, the first support base 35 is moved with respect to the base body 30 of the mobile base 26 in the left-right direction (arrow X direction in FIG. 2) and in the front-back direction (indicated by arrows in FIG. 2). A three-axis motor mechanism that moves in the horizontal rotation direction (the arrow θ direction in FIG. 2) can be exemplified.

  With such a configuration, the first position correcting device 36 can adjust the position of the substrate w supported by the first support base 35 to a predetermined position set in advance, and efficiently pattern the predetermined position on the substrate w. It becomes possible to form.

  The second substrate positioning device 28 is a device that supports the substrate w loaded from the conveyor 10 by the second transport arm 12 and aligns the substrate w. The second support base 37 that supports the substrate w, A second position correcting device 38 that corrects the position of the substrate w supported by the second support 37 to a preset predetermined position is provided, but has the same configuration as the first substrate positioning device 27 described above. Therefore, detailed description is omitted.

  The first substrate position detection device 51 and the second substrate position detection device 52 are a part of the substrate w attached to the first mounting portion 35a of the first support base 35 and the second mounting portion 37a of the second support base 37, respectively. The apparatus is configured to be able to detect the position of the substrate w by reading the position of the registration mark printed in advance on the substrate w, and is provided on both sides of the processing apparatus 21. Examples of the first substrate position detection device 51 and the second substrate position detection device 52 include imaging means such as a CCD camera and a microscope. In FIG. 1, as the first substrate position detection device 51 and the second substrate position detection device 52, a configuration including two imaging units 51a and 51b (52a and 52b) is illustrated. The configuration is not particularly limited, and a configuration including three or more imaging units may be employed.

  Further, the positional relationship among the first substrate positioning device 27 and the second substrate positioning device 28, the processing device 21, the first substrate position detecting device 51, and the second substrate position detecting device 52 that are placed on the movable table 26. Is configured as follows. That is, when the movable base 26 is operated and the base body 30 is arranged as shown in FIG. 4A, the position of the substrate w is set to the first substrate position in the first mounting portion 35a of the first support base 35. Based on the detected position of the substrate w detected by the detection device 51, the first position correction device 36 is in a position correctable state in which the position correction of the substrate w can be performed, and the second mounting of the second support base 37 is performed. In the part 37a, the processing apparatus 21 is configured to be in a printable state in which the conductive pattern can be printed on the substrate w whose position has been corrected by the second position correcting apparatus 38. Further, when the base body 30 is arranged as shown in FIG. 4B, the second mounting portion 37a of the second support base 37 is based on the position of the substrate w detected by the second substrate position detection device 52. The second position correcting device 38 can correct the position of the substrate w, and the processing device 21 prints the conductive pattern on the substrate w in the first mounting portion 35a of the first support base 35. It is configured to be ready for printing. As described above, the moving base 26 has a first area in which the first mounting portion 35a is located at a position where the first substrate position detection device 51 can detect, and the second mounting portion 37a is located at a position where the processing device 21 can process. (The position shown in FIG. 4A), the second mounting portion 35a is positioned at a position where the processing apparatus 21 can process the second mounting portion 37a, and the second mounting position 37a is positioned at a position where the second substrate position detecting apparatus 52 can detect the second mounting position. And the area (position of FIG. 4B) are reciprocated by the driving device 32.

  Further, the pattern forming apparatus main body 20 includes a first position detection sensor 61 a and a second position detection sensor 61 b arranged adjacent to the moving table 26 so as to face each other along the transport direction of the moving table 26. . The first position detection sensor 61a and the second position detection sensor 61b are supported by a frame 60 attached to the gantry 31 and move when the moving table 26 moves to the first area and the second area, respectively. It arrange | positions so that the deviation from the reference | standard position of the base 26 may be detected. These position detection sensors 61a and 61b are, for example, displacement sensors, and various detection systems such as eddy current type, optical type, ultrasonic type, laser type, contact type, magnetostrictive type, and magnetic type can be used. However, an eddy current sensor or a laser displacement sensor can be preferably used in terms of cost, durability, detection accuracy, and the like. In the present embodiment, eddy current sensors are used as the position detection sensors 61a and 61b, and a gap G (see FIG. 1) generated between the plate-shaped dog 26a fixed to the side surface of the movable table 26 is detected. To do. By comparing this gap G with a reference value when the moving base 26 is accurately conveyed to the first area or the second area, a deviation from the reference position can be obtained.

  The operations of the conveyor 10, the processing device 21, the first position correction device 36, the second position correction device 38, the driving device 32, and the like described above are controlled by the control device 40 provided in the pattern forming apparatus main body 20. The control device 40 includes a storage unit 41 that stores information necessary for operating each component described above, and a control unit 42 that controls the operation of each component based on the information stored in the storage unit 41. I have.

  The information stored in the storage unit 41 includes first target coordinates and second coordinates that are coordinate values on the drive coordinate axis for reciprocating the moving base 26 between the first area and the second area. The target coordinates and the rotation speed of the ball screw 32a that increases or decreases in real time by the detection of the rotation detector 32c during forward and reverse rotation of the ball screw 32a are included. The coordinate interval of the drive coordinate axis corresponds to the pitch of the ball screw, and even if the ball screw 32a expands and contracts, the correspondence between the rotation speed of the ball screw 32a and the coordinate value on the drive coordinate axis is maintained. Therefore, since the coordinate value on the drive coordinate axis of the moving base 26 can be grasped based on the detection of the rotation speed of the ball screw 32a by the rotation detector 32c, the first target coordinate and the second target coordinate are set as the ball screw. By setting in advance corresponding to the rotational speed of 32a, the control unit 42 operates the driving means 32 so that the moving base 26 moves between the first target coordinates and the second target coordinates. be able to. For example, when the drive coordinate axis is set so that the coordinate value increases when the ball screw 32a rotates forward, the rotation of the ball screw 32a is performed by matching the position where the rotation number of the ball screw 32a is 0 with the origin of the drive coordinate axis. The number and the coordinates on the drive coordinate axis can be easily associated with each other.

  Next, a method for forming a pattern on the substrate w using the pattern forming apparatus 1 will be described with reference to the flowchart shown in FIG. First, in a state where the substrate w is mounted on the first mounting portion 35a and the second mounting portion 37a of the moving base 26, a position correction possible state is possible in which the position of the substrate w of the first mounting portion 35a can be corrected. The moving table 26 is moved to the first area shown in FIG. At this time, the first support base 35 is disposed below the first substrate position detection device 51 and the first transfer arm 11.

  When the moving base 26 is at the reference position of the first area, the gap G generated between the first position detection sensor 61a and the dog 26a is set to a preset reference value (for example, 1000 μm). Therefore, the positional deviation from the reference position, which is the amount of positional deviation of the movable table 26, can be grasped by the difference between the gap G and the reference value. Similarly, when the moving base 26 is at the reference position of the second area, the gap G generated between the second position detection sensor 61b and the dog 26a becomes a preset reference value (for example, 1000 μm). The position deviation from the reference position can be grasped by the difference between the gap G and the reference value.

  The control device 40 moves the moving base 26 from the first area to the second area based on the second target coordinates stored in the storage unit 41 (step S1). That is, the output shaft of the drive motor 32b is rotated in the forward direction so that the rotation speed of the ball screw 32a increases to the rotation speed corresponding to the second target coordinate. As a result, the moving table 26 moves to the second area corresponding to the second target coordinates, as shown in FIG.

  When the ball screw 32a undergoes thermal deformation due to a change in ambient temperature, high-speed sliding of the ball screw nut 32d, or the like, the position after movement of the moving base 26 based on the second target coordinates is the reference position in the second area. May not match exactly. The control device 40 corrects the second target coordinate based on the position deviation of the moving base 26 grasped by the detection of the gap G of the second position detection sensor 61b, and updates the storage unit 41 (step S2). That is, when the gap G shown in FIG. 4B is smaller than the reference value (when the moving platform 26 goes too far beyond the reference position), a corresponding amount of the overshoot amount is calculated from the rotation speed corresponding to the second target coordinate. When correction is performed to reduce the value of the second target coordinate so as to correspond to the reduced number of rotations, while the gap G is larger than the reference value (when the moving base 26 does not reach the reference position), the amount of movement shortage Correction for increasing the value of the second target coordinate is performed so as to correspond to the number of rotations corresponding to the number of rotations. Thereby, the shift | offset | difference with the reference position of the 2nd target coordinate and 2nd area which arises by the thermal deformation of the ball screw 32a can be suppressed.

  Further, in parallel with the above-described step S2, the control device 40 performs pattern formation and substrate position correction on the substrate w in a state where the movable table 26 is in the second area (step S3). That is, a pattern is formed by the processing device 21 on the substrate w attached to the first mounting portion 35a, and the substrate w is loaded into the second mounting portion 37a from the conveyor 10 during the pattern formation. Alignment is performed in advance. The alignment of the substrate w is performed according to the following procedure.

  First, the conveyor 10 is operated, and when the substrate w on which the pattern is not formed on the conveyor 10 reaches below the second transfer arm 12, the operation of the conveyor 10 is stopped. Then, the second transfer arm 12 is moved downward, and the substrate w mounted on the conveyor 10 and the second mounting portion 37a is sucked by the suction pads 12e and 12e attached to the tip of the support arm 12a. Hold. Then, while moving the second transfer arm 12 upward, the support arm 12a is rotated 180 ° to replace the substrate w, and the second transfer arm 12 is moved downward again to move the second mounting arm 37a and the conveyor 10 over. The substrate w is placed on the substrate. The substrate w set in the second mounting portion 37a is fixed by being sucked through a suction hole (not shown).

  Next, the position of the substrate w on the second mounting portion 37a is detected by the second substrate position detection device 52. Then, a deviation amount between the detected position of the substrate w and a predetermined position of the substrate set in advance is calculated. Thereafter, based on the calculated shift amount, the second position correction device 38 is operated to move the second support 37 in a direction to absorb the shift of the substrate w. Thereby, the position of the board | substrate w on the 2nd mounting part 37a can be correct | amended to the position set beforehand.

  In this way, after the pattern formation and the substrate position correction are finished, it is determined whether or not the pattern formation on the next substrate w is finished (step S4). If not finished, the control device 40 is stored in the storage unit 41. Based on the first target coordinates, the moving platform 26 is moved from the second area to the first area (step S5). That is, the output shaft of the drive motor 32b is rotated in the reverse direction so that the rotational speed of the ball screw 32a is reduced to the rotational speed corresponding to the first target coordinate. Thereby, the moving base 26 moves to the first area corresponding to the first target coordinates, as shown in FIG.

  Next, the control device 40 corrects the first target coordinate based on the position deviation of the moving base 26 grasped by the detection of the gap G of the first position detection sensor 61a, similarly to step S2, and stores the storage unit 41. Update (step S6). That is, when the gap G shown in FIG. 4 (a) is smaller than the reference value (when the moving base 26 returns too much beyond the reference position), the amount corresponding to the excessive return to the rotation speed corresponding to the first target coordinates is equivalent. When correction is performed to increase the value of the first target coordinate so as to correspond to the number of rotations to which the minute is added, while the gap G is larger than the reference value (when the movable table 26 cannot return to the reference position), A correction for reducing the value of the first target coordinate is performed by subtracting a corresponding amount of the shortage of movement from the rotation speed corresponding to the first target coordinate. Thereby, the shift | offset | difference with the reference position of the 1st target coordinate and 1st area which arises by the thermal deformation of the ball screw 32a can be suppressed.

  In parallel with step S6, the control device 40 performs pattern formation and substrate position correction on the substrate w while the movable table 26 is in the first area (step S7). Since the position of the substrate w attached to the second mounting portion 37a has been corrected in step S3, the processing apparatus 21 can perform pattern formation with high accuracy. Further, the substrate w is loaded from the conveyor 10 into the first mounting portion 35a during the pattern formation, and the substrate w is aligned in advance.

  The alignment of the substrate w is the same as in step S3 above, and the first transfer arm 11 is moved downward while the substrate w on which the pattern is not formed on the conveyor 10 is positioned below the first transfer arm 11. The substrate w mounted on the conveyor 10 and the first mounting portion 35a is sucked and held by the suction pads 11e and 11e attached to the tip of the support arm 11a. Then, while moving the first transfer arm 11 upward, the support arm 11a is rotated 180 ° to replace the substrate w, and again the first transfer arm 11 is moved downward to move the first mounting portion 35a and the conveyor 10 over. The substrate w is placed on the substrate. The substrate w set on the first mounting portion 35a is fixed by being sucked through a suction hole (not shown).

  Next, the position of the substrate w on the first mounting portion 35a is detected by the first substrate position detection device 51. Then, a deviation amount between the detected position of the substrate w and a predetermined position of the substrate set in advance is calculated. Thereafter, based on the calculated shift amount, the first position correction device 36 is operated to move the first support base 35 in a direction to absorb the shift of the substrate w. Thereby, the position of the board | substrate w on the 1st mounting part 35a can be correct | amended to the position set beforehand.

  Next, it is determined whether or not the pattern formation on the substrate w is to be ended (step S8). If the pattern formation is not to be ended, the process returns to step S1 to move the movable table 26. Thereafter, in steps S3 and S7, pattern formation is performed on the substrate w on which the position of the substrate w has been corrected, and the substrate w after pattern formation is sequentially exchanged with the substrate w on the conveyor 10 to form a substrate. Since the position correction of w is performed, pattern formation on the substrate w can be performed with high accuracy and efficiency.

  According to the pattern forming apparatus of the present embodiment, when the movable table 26 is reciprocated between the first area and the second area, the first target coordinate and the second coordinate on the drive coordinate axis that is the movement end point are obtained. Target coordinates are set in advance, and these target coordinates can be corrected based on the positional deviation of the moving base 26 in the first area and the second area. Regardless, the position after movement can always be maintained accurately. Therefore, even when thermal deformation occurs in the ball screw 32a, there is no possibility that a displacement amount is accumulated due to the reciprocating movement of the moving table 26, and the moving table 26 is adjusted by adjusting the feed amount of the moving table 26 or correcting the drive coordinate axis. It is possible to maintain high positioning accuracy as compared with the method of performing the position correction, and it is possible to continuously perform accurate pattern formation on the substrate.

  In addition, the correction of the first target coordinate or the second target coordinate based on the position deviation of the moving table 26 is reflected when the moving table 26 is moved next time. Pattern formation can begin. Therefore, pattern formation on the substrate can be performed efficiently, and the tact time can be shortened.

  In the present embodiment, the position of the dog 26a on the moving table 26 is set to be approximately the center in the transport direction of the moving table 26, but is not particularly limited, and can be set to an arbitrary position. For example, as shown in FIG. 6, a dog 26a is arranged immediately below the first mounting portion 35a (or the second mounting portion 37a), and the substrate mounted on the first mounting portion 35a (or the second mounting portion 37a) is placed. It is also preferable to match the center position with the center position of the dog 26a in the transport direction. Thus, in addition to the thermal expansion of the ball screw 32a, the position of the dog 26a along the conveyance direction of the movable table 26 is configured to coincide with either the first mounting portion 35a or the second mounting portion 37a. Therefore, even if the base body 30 of the moving base 26 is stretched in the transport direction, one of the substrates positioned immediately above the dog 26a is not affected by the stretch of the base body 30. It can be easily realized.

  In the present embodiment, the position correction of the substrate w detected by the first substrate position detection device 51 and the second substrate position detection device 52 is performed using the first position correction device 36 and the second position provided on the moving table 26. Although each is performed by the correcting device 38, the substrate position correcting means is not necessarily provided on the movable table 26. Further, the detected position correction means for the substrate w is not limited to the configuration in which the substrate w is physically moved, and the position correction function may be incorporated in the processing apparatus 21 that performs pattern formation. Good.

  For example, when the processing apparatus 21 is a laser processing apparatus that can perform pattern formation on the substrate by scanning a laser spot on the XY plane based on the set processing target coordinates, the first substrate position detection is performed. The movable table 26 is set to be horizontally movable so that the detection reference plane of the apparatus 51 and the second substrate position detection apparatus 52 and the processing reference plane of the laser processing apparatus are on the same plane, and the first substrate position detection apparatus 51 or By inputting the position of the substrate detected by the second substrate position detection device 52 to the laser processing device, the processing target coordinates in the laser processing device can be corrected based on the detection result. That is, the processing target coordinates in the reference coordinate system in the laser processing apparatus are calculated in the x, y, and θ directions calculated based on the detection by the first substrate position detecting device 51 or the second substrate position detecting device 52 (see FIG. 2). ) On the basis of the deviation amount, the substrate attached to the first mounting portion 35a or the second mounting portion 37a by converting the processing target coordinates in the virtual coordinate system and performing drive control of the laser spot in the virtual coordinate system. Accurate pattern formation can be performed without moving itself. According to this configuration, the first position correction device 36 and the second position correction device 38 are not required, so that not only the configuration can be simplified, but also work is performed because alignment by movement of the substrate is unnecessary. It becomes possible to carry out more quickly. The configuration in which the processing means incorporates the substrate position correcting means is not limited to the above, and for example, when the processing means is a screen printer, by adjusting the screen position based on the substrate detection position, The displacement of the substrate can be compensated without moving the substrate itself.

  In the present embodiment, a ball screw mechanism is employed as the drive device 32, and the coordinate position of the moving base 26 on the drive coordinate axis is grasped by the number of rotations of the ball screw 32a detected by the rotation detector 32c. However, a configuration is provided that includes a driving device that reciprocates the moving table 26 along the driving coordinate axis between the first area and the second area, and a device that detects the coordinate position of the moving table 26 on the driving coordinate axis. If it is, it is not limited to the thing of this embodiment.

  FIG. 7 is a main part front view showing an example in which a linear motor mechanism is employed as a driving device for reciprocatingly transporting the movable table 26. In FIG. 7, the same components as those of FIG.

  The driving device 132 is composed of a shaft type linear motor capable of driving a slider on a driving coordinate axis. Support frames 132b and 132c to be supported, and a slider 132d supported by the stator 132a are provided. The stator 132a is a cylinder made of a non-magnetic material, and a large number of columnar permanent magnets 132e (only part of which are shown by broken lines in FIG. 1) are arranged in parallel along the axis so that the same poles face each other. Both ends are sealed. The slider 132d includes a coil 132f that surrounds the stator 132a, and is fixed to the lower surface of the movable table 26. Energization of the coil 132f can be performed via wiring (not shown).

  The gantry 31 is provided with a linear scale (linear encoder) 133 extending along the drive coordinate axis, and the slider 132 d is provided with a detection unit 134 so as to face the linear scale 133. As the linear scale 133, a known one such as an optical type or a magnetic type can be used. By adopting an absolute type that measures an absolute position, the coordinate position of the moving base 26 on the drive coordinate axis can be acquired.

  In the configuration of the present embodiment, the first target coordinate and the second target coordinate can be made to correspond to position information on the linear scale 133, and the energization to the coil 132f is controlled based on the detection of the detection unit 134. Thus, the movable table 26 can be reciprocally conveyed between the first target coordinates and the second target coordinates. Therefore, even when the linear scale 133 expands and contracts due to thermal deformation due to a change in ambient temperature or the like and the coordinate interval changes, the first position detection sensor 61a detects the first area in the same manner as the configuration shown in FIG. The first target coordinates are corrected based on the position deviation of the movable table 26, and the second target coordinates are calculated based on the position deviation of the movable table 26 detected by the second position detection sensor 61b in the second area. By correcting, an accurate pattern can be continuously formed on the substrate.

DESCRIPTION OF SYMBOLS 1 Pattern formation apparatus 10 Conveyor 21 Processing apparatus 26 Moving stand 26a Dog 32 Drive apparatus 32a Ball screw 32b Drive motor 32c Rotation detector 35a 1st mounting part 36 1st position correction apparatus 37a 2nd mounting part 38 2nd position correction apparatus 51 First substrate position detection device 52 Second substrate position detection device 61a First position detection sensor 61b Second position detection sensor

Claims (6)

A pattern forming apparatus for forming a pattern on a substrate,
A movable table having a first mounting portion and a second mounting portion on which the substrates are respectively mounted;
Processing means for forming a pattern on the substrate attached to the first mounting portion or the second mounting portion;
Substrate position detection means for detecting the position of the substrate mounted on the first mounting portion or the second mounting portion, respectively, on both sides of the processing means;
Board position correcting means for correcting the position of the detected board;
A first area where the first mounting portion is positioned on one of the substrate position detecting means and the second mounting portion is positioned on the processing means; and the first mounting portion is positioned on the processing means and the second mounting Driving means for reciprocating and transporting the movable table along the drive coordinate axis between the second area located on the other substrate position detecting means,
Coordinate position detecting means for detecting the coordinate position of the moving table on the drive coordinate axis;
Moving table detecting means for detecting a deviation amount of the moving table conveyed to the first area and the second area from a reference position fixed to the first area and the second area ;
Control means for controlling the operation of the drive means,
The control means operates the drive means so that the moving table reciprocates between the first target coordinate and the second target coordinate on the drive coordinate axis based on the detection of the coordinate position detection means, Correction of the first target coordinates based on the positional deviation amount of the moving table detected in the first area after the stop of the moving table and the movement detected in the second area after the moving table stops. In parallel with the correction of the second target coordinate based on the position deviation amount of the table, the processing unit forms a pattern on the substrate while the moving table is stopped, and the first target coordinate and the second target coordinate are formed. A pattern forming apparatus configured to reflect the correction of coordinates when the moving table is moved next time. The drive means includes a ball screw arranged to extend along the drive coordinate axis, a ball screw nut fixed to the moving base and screwed into the ball screw, and a drive motor that rotationally drives the ball screw. Prepared,
The coordinate position detection means includes rotation speed detection means for detecting the rotation speed of the ball screw,
The pattern forming apparatus according to claim 1, wherein the first target coordinates and the second target coordinates correspond to the number of rotations of the ball screw. The drive means includes a stator having a plurality of magnets arranged side by side along the drive coordinate axis, and a slider having a coil surrounding the stator and fixed to the moving table,
The coordinate position detection means includes a linear scale arranged along the drive coordinate axis, and a detection unit provided on the slider so as to face the linear scale,
The pattern forming apparatus according to claim 1, wherein the first target coordinates and the second target coordinates correspond to position information on the linear scale detected by the detection unit. The moving table detecting means includes a displacement sensor that detects a distance to a dog provided on the moving table, and the displacement sensor is disposed to face the moving table in the conveying direction.
The said dog is fixed to the said moving stand so that the position along the conveyance direction of the said moving stand may correspond to either the said 1st mounting part or the 2nd mounting part. The pattern forming apparatus as described. The processing means is a laser processing apparatus capable of forming a pattern on a substrate by scanning a laser spot on a plane based on set processing target coordinates,
The pattern forming apparatus according to claim 1, wherein the substrate position correcting unit corrects the processing target coordinates based on detection by the substrate position detecting unit. A movable table having a first mounting portion and a second mounting portion on which the substrates are respectively mounted;
Processing means for forming a pattern on the substrate attached to the first mounting portion or the second mounting portion;
Substrate position detection means for detecting the position of the substrate mounted on the first mounting portion or the second mounting portion, respectively, on both sides of the processing means;
Board position correcting means for correcting the position of the detected board;
A first area where the first mounting portion is positioned on one of the substrate position detecting means and the second mounting portion is positioned on the processing means; and the first mounting portion is positioned on the processing means and the second mounting Driving means for reciprocating and transporting the movable table along the drive coordinate axis between the second area located on the other substrate position detecting means,
A positioning device used in a pattern forming apparatus comprising coordinate position detection means for detecting a coordinate position of the moving table on the drive coordinate axis,
Moving table detecting means for detecting a deviation amount of the moving table conveyed to the first area and the second area from a reference position fixed to the first area and the second area ;
Control means for controlling the operation of the drive means,
The control means operates the drive means so that the moving table reciprocates between the first target coordinate and the second target coordinate on the drive coordinate axis based on the detection of the coordinate position detection means, Correction of the first target coordinates based on the positional deviation amount of the moving table detected in the first area after the stop of the moving table and the movement detected in the second area after the moving table stops. In parallel with the correction of the second target coordinate based on the position deviation amount of the table, the processing unit forms a pattern on the substrate while the moving table is stopped, and the first target coordinate and the second target coordinate are formed. A positioning apparatus configured to reflect the correction of coordinates when the moving table is moved next time.

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