JP4922233B2 - 石英ガラスルツボ - Google Patents
石英ガラスルツボ Download PDFInfo
- Publication number
- JP4922233B2 JP4922233B2 JP2008118195A JP2008118195A JP4922233B2 JP 4922233 B2 JP4922233 B2 JP 4922233B2 JP 2008118195 A JP2008118195 A JP 2008118195A JP 2008118195 A JP2008118195 A JP 2008118195A JP 4922233 B2 JP4922233 B2 JP 4922233B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- center
- layer
- quartz glass
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 63
- 239000013078 crystal Substances 0.000 claims description 45
- 229910052710 silicon Inorganic materials 0.000 claims description 44
- 239000010703 silicon Substances 0.000 claims description 44
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 42
- 239000010410 layer Substances 0.000 claims description 37
- 238000004090 dissolution Methods 0.000 claims description 28
- 239000010453 quartz Substances 0.000 claims description 26
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 21
- 239000002344 surface layer Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
Description
〔1〕シリコン単結晶の引上げに用いる石英ガラスルツボであって、シリコン単結晶の投影面を含むルツボ底面中央部の高温溶解速度が、該中央部の周囲よりも高いことを特徴とする石英ガラスルツボ。
〔2〕シリコン単結晶の投影面を含むルツボ底面中央部の高温溶解速度が該中央部周囲の高温溶解速度の2〜3倍である上記[1]に記載する石英ガラスルツボ。
〔3〕シリコン単結晶の投影面を含む中央部の内表面層にアルミニウムを含有させた合成石英層を設けることによって、該中央部の高温溶解速度をその周囲よりも高くした上記[1]または上記[2]に記載する石英ガラスルツボ。
〔4〕ルツボ底面中央部の合成石英内表面層に含まれるアルミニウム含有量が2〜20ppmである上記[3]に記載する石英ガラスルツボ。
〔5〕ルツボの外層が天然石英層であり、ルツボの内層が合成石英層であって、該合成石英層の底面中央部に、アルミニウムを含む合成石英層が積層され、該中央部の外側範囲と段差なく平坦な内表面層を形成している上記[1]〜上記[4]の何れかに記載する石英ガラスルツボ。
〔6〕底面中央部のアルミニウム含有合成層の中心層厚が30μm〜200μmである上記[3]〜上記[5]の何れかに記載する石英ガラスルツボ。
本発明の石英ガラスルツボは、シリコン単結晶の引上げに用いる石英ガラスルツボであって、シリコン単結晶の投影面を含むルツボ底面中央部の高温溶解速度が、該中央部の周囲よりも高いことを特徴とする石英ガラスルツボである。
Claims (5)
- シリコン単結晶の引上げに用いる石英ガラスルツボであって、シリコン単結晶の投影面を含むルツボ底面中央部の内表面層にアルミニウムを含有させた合成石英層を設けることによって、該中央部の高温溶解速度をその周囲よりも高くしたことを特徴とする石英ガラスルツボ。
- シリコン単結晶の投影面を含むルツボ底面中央部の高温溶解速度が該中央部周囲の高温溶解速度の2〜3倍である請求項1に記載する石英ガラスルツボ。
- ルツボ底面中央部の合成石英内表面層に含まれるアルミニウム含有量が2〜20ppmである請求項1又は2に記載する石英ガラスルツボ。
- ルツボの外層が天然石英層であり、ルツボの内層が合成石英層であって、該合成石英層の底面中央部に、アルミニウムを含む合成石英層が積層され、該中央部の外側範囲と段差なく平坦な内表面層を形成している請求項1〜請求項3の何れかに記載する石英ガラスルツボ。
- 底面中央部のアルミニウム含有合成層の中心層厚が30μm〜200μmである請求項1〜請求項4の何れかに記載する石英ガラスルツボ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008118195A JP4922233B2 (ja) | 2008-04-30 | 2008-04-30 | 石英ガラスルツボ |
US12/430,311 US8449676B2 (en) | 2008-04-30 | 2009-04-27 | Silica glass crucible |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008118195A JP4922233B2 (ja) | 2008-04-30 | 2008-04-30 | 石英ガラスルツボ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009263193A JP2009263193A (ja) | 2009-11-12 |
JP4922233B2 true JP4922233B2 (ja) | 2012-04-25 |
Family
ID=41256288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008118195A Active JP4922233B2 (ja) | 2008-04-30 | 2008-04-30 | 石英ガラスルツボ |
Country Status (2)
Country | Link |
---|---|
US (1) | US8449676B2 (ja) |
JP (1) | JP4922233B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7547908B2 (en) | 2006-12-22 | 2009-06-16 | Philips Lumilieds Lighting Co, Llc | III-nitride light emitting devices grown on templates to reduce strain |
JP4995068B2 (ja) * | 2007-12-28 | 2012-08-08 | ジャパンスーパークォーツ株式会社 | シリコン単結晶引上げ用石英ガラスルツボ |
JP5058138B2 (ja) * | 2008-12-09 | 2012-10-24 | ジャパンスーパークォーツ株式会社 | シリコン単結晶引き上げ用石英ガラスルツボ |
JP5453677B2 (ja) * | 2010-06-25 | 2014-03-26 | 株式会社Sumco | シリカガラスルツボ、シリコンインゴットの製造方法 |
JP5610570B2 (ja) * | 2010-07-20 | 2014-10-22 | 株式会社Sumco | シリカガラスルツボ、シリコンインゴットの製造方法 |
KR20150065939A (ko) | 2011-05-25 | 2015-06-15 | 세인트-고바인 리서치 (상하이) 코포레이션 리미티드 | 실리카 도가니 및 이것을 제조하는 방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0346545A (ja) | 1989-07-14 | 1991-02-27 | Toray Ind Inc | 欠陥険出装置 |
US5976247A (en) | 1995-06-14 | 1999-11-02 | Memc Electronic Materials, Inc. | Surface-treated crucibles for improved zero dislocation performance |
US5913975A (en) | 1998-02-03 | 1999-06-22 | Memc Electronic Materials, Inc. | Crucible and method of preparation thereof |
JP4086283B2 (ja) * | 2002-07-31 | 2008-05-14 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボおよびその製造方法 |
JP4678667B2 (ja) * | 2004-06-07 | 2011-04-27 | 信越石英株式会社 | シリコン単結晶引上げ用石英ガラスルツボ及びその製造方法 |
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2008
- 2008-04-30 JP JP2008118195A patent/JP4922233B2/ja active Active
-
2009
- 2009-04-27 US US12/430,311 patent/US8449676B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2009263193A (ja) | 2009-11-12 |
US8449676B2 (en) | 2013-05-28 |
US20090272315A1 (en) | 2009-11-05 |
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