JP4919702B2 - Sensor device and sensor system - Google Patents

Description

  The present invention relates to a sensor device that detects various physical quantities, and more particularly to a sensor device that includes an output circuit.

  As sensors for detecting various physical quantities, photoelectric sensors, proximity sensors, pressure sensors, flow sensors, displacement sensors, temperature sensors, image sensors, and the like have been developed and used. The photoelectric sensor emits light such as visible light and infrared light from the light projecting part as signal light to the object to be detected and receives the reflected light by the light receiving part to detect or detect a change in the amount of light blocked By doing so, an output signal is obtained. Proximity sensors are non-contact sensors that detect the approach of an object to be detected, and include high-frequency oscillation types that use electromagnetic induction, magnetic types that use magnets, and electrostatic capacitance types that use changes in capacitance. . The pressure sensor detects a change in air pressure with a pressure sensitive element and converts it into an electrical signal. A flow sensor is a sensor that detects the flow rate of a fluid such as liquid or gas. An impeller type that applies a fluid to be detected to an impeller and converts the number of rotations into a flow value, or a pipe installed in a vertical direction. Float type that places a float inside and detects the flow rate by the degree of lift, and an electromagnetic type that can measure the flow rate without placing moving parts or obstacles in the flow path using Faraday's electromagnetic induction principle Etc. The displacement sensor can be used for measuring the amount of movement of the object to be detected or measuring the dimension of the object to be detected. The temperature sensor detects the temperature by a thermocouple using a voltage generated according to a temperature difference due to the Seebeck effect, a resistance temperature detector using platinum, or the like. The image sensor detects a feature amount by converting an image of a detection object imaged by an imaging element such as a CCD camera into a digital signal and performing arithmetic processing.

  Thus, the sensor device detects some physical quantity and performs calculation and output. Such a single-function sensor device can be used alone or in a type that can be used by connecting the sensor devices. For example, as shown in FIG. 1, a plurality of flow rate sensors 400 can be connected to enable data communication, and flow rate values measured by other flow rate sensors can be acquired and added and subtracted for display, or an average value can be calculated. It is possible to perform control such as turning on / off the control signal by comparing the calculated value with a predetermined threshold. By connecting such a plurality of connectable sensor devices and communicating with each other, it is possible to increase the number of sensor devices as necessary and perform control based on a plurality of detection targets.

  However, in conventional sensor devices, sensors that can detect and measure the same physical quantity can be connected, but sensors that can detect and measure different physical quantities can be connected to share each other's sensor measurement values. Calculations and processing could not be performed. For example, in the flow meter shown in FIG. 1 described above, the flow meters can be connected to each other, and other types of sensor devices, for example, a temperature sensor that detects temperature or a pressure sensor that detects pressure are connected as they are. In addition, it was impossible to control the detected flow rate in combination with temperature and temperature.

On the other hand, particularly in process control, there are many applications in which the state is determined by combining measured values such as pressure, flow rate, and temperature. In order to perform determination and control using such heterogeneous measurement values, it is necessary to connect each sensor device to a programmable controller such as a PLC to form a control system. However, in order to connect a plurality of different sensor devices to the PLC, a dedicated interface such as an I / O unit, an A / D conversion unit, or a communication unit for connecting the PLC and each sensor device is prepared for each sensor device. There is a need. In addition, the PLC itself is expensive, requires specialized knowledge such as programming, and has a problem that the system becomes complicated and large, and installation and operation become large.
JP-A-9-64712

  The present invention has been made to solve such conventional problems. An object of the present invention is to provide a sensor device capable of constructing a sensor system that performs determination based on different kinds of measurement values easily and inexpensively, a sensor system, and a method of connecting a sensor device capable of detecting different physical quantities.

  In order to achieve the above object, the sensor device according to the first invention is a sensor device capable of detecting any physical quantity, the detection means for detecting the first physical quantity, and the detection detected by the detection means. An arithmetic unit that performs a predetermined process based on the quantity, and another sensor device that can detect a second physical quantity that is different from the physical quantity detected by the detecting means can be electrically connected, and data communication with the other sensor device That can determine the type of the second physical quantity detected by the other sensor device connected via the communication interface, the presence / absence of the other sensor device connected to the communication interface, and the communication interface Determination means, and the calculation means includes a detection amount related to the first physical quantity detected by the detection means and a detection quantity related to the second physical quantity detected by another sensor device. Zui and thereby enabling operation.

  The sensor device according to the second invention further includes a threshold setting unit for setting a predetermined threshold for the detection amount detected by the detection unit, a detection amount detected by the detection unit, and a threshold setting unit. And an output unit capable of outputting a predetermined output based on the comparison result.

  Further, the sensor device according to the third aspect of the invention is a flow rate detecting means for detecting the flow rate by the detecting means, a magnetic field applying means for applying an alternating magnetic field to the detected fluid, and a measuring tube so as to be in non-contact with the detected fluid. An electrode to be coupled and a calculation means for calculating the flow rate of the fluid to be detected passing through the measurement tube.

  Furthermore, in the sensor device according to the fourth aspect of the present invention, the type determination means can generate a determination signal for determining the type of the second physical quantity detected by the other sensor device, and the determination signal is used to activate the sensor device. The number of other sensor devices connected to the sensor device and each sensor device based on a response signal from the other sensor device that is sometimes transmitted from the communication interface to the other sensor device. The type can be discriminated.

  In addition, the sensor device according to the fifth aspect of the present invention further includes a main body case containing the calculation means and a head case containing the detection means, and the head case is configured to be separable from the main body case.

  In addition, the sensor device according to the sixth aspect of the invention is configured such that the main body case is connectable with a plurality of head cases each including detection means capable of detecting different physical quantities. The predetermined calculation can be executed based on the different detection amounts detected by the respective detection means of the head case.

  Furthermore, the sensor device according to the seventh aspect of the present invention further includes a display unit capable of displaying the detection amount detected by the detection means, and the display unit is configured to be separable from the main body case.

  On the other hand, the sensor system according to the eighth invention is a sensor system in which a plurality of sensor devices capable of detecting different physical quantities are connected to each other, and a detection means for detecting the first physical quantity and a physical quantity detected by the detection means. A plurality of sensor devices that can be electrically connected to another sensor device capable of detecting a second physical quantity different from the above, and includes a communication interface for performing data communication with the other sensor devices; A calculation side communication interface for connecting to the calculation side, a calculation side communication interface for performing data communication via the calculation side communication interface, the presence or absence of other sensor devices connected to the calculation side communication interface, and a communication interface Via the calculation side type determination unit capable of determining the type of the second physical quantity detected by another connected sensor device When provided on the basis of the detected amount of transmitted respectively from a plurality of sensor devices connected to the computing side communication interface, an arithmetic unit and a computing side operation means for performing predetermined processing.

  In the sensor system according to the ninth aspect of the present invention, the calculation side type determination means can generate a determination signal for determining the type of the second physical quantity detected by the other sensor device. Based on the response signal from each sensor device to the determination signal transmitted from the arithmetic unit to the sensor unit at the time of activation, the arithmetic unit determines the number of sensor devices connected to the arithmetic unit and the type of each sensor device. It is configured to be discriminable by the calculation side calculation means.

  Furthermore, in the sensor system according to the tenth aspect, the plurality of sensor devices include at least one of a flow rate sensor capable of detecting a flow rate, a pressure sensor capable of detecting pressure, and a temperature sensor capable of detecting temperature.

  In addition, according to the eleventh aspect of the invention, there is provided a sensor device connection method capable of detecting a different physical quantity, wherein a sensor apparatus capable of detecting any physical quantity is connected to a second sensor apparatus capable of detecting a first physical quantity different from the sensor apparatus. In the sensor system, a method of connecting the sensor devices capable of detecting these different physical quantities, the step of electrically connecting the sensor devices via a communication interface included in each sensor device, When the type determination unit includes a process of generating a determination signal and transmitting the determination signal from the communication interface to the second sensor device, waiting for a response signal to be returned from the second sensor device, and a response signal. The presence or absence of the second sensor device connected to the communication interface based on the response signal, and the second sensor device detecting the second sensor device The physical quantity type and a determining step.

  In the sensor device connection method capable of detecting different physical quantities according to the twelfth aspect of the invention, the determination is executed when the sensor system is activated.

  According to the first invention, the eighth invention, and the eleventh invention, the sensor devices can be connected to each other and the data of the different measurement values can be shared without performing the PLC etc. It is possible to construct a sensor system that makes a determination based on different measurement values at low cost.

  According to the second aspect of the invention, the output can be controlled by the calculation result using the different measurement values, and the control system can be constructed only by the sensor device without using a PLC or the like. According to the fourth and ninth inventions, even if a plurality of sensor devices are connected, the number and types of sensor devices being connected can be automatically determined by the determination signal, so that the connection work is facilitated. According to the twelfth aspect, since automatic recognition of the connected device is executed when the sensor system is activated, it is possible to easily cope with a change in system construction.

  According to the third aspect of the invention, particularly in a capacitive electromagnetic flow meter, measurement and calculation can be performed based on information other than the flow rate. According to the tenth aspect, advanced control based on the flow rate, pressure, temperature, or a combination thereof is realized.

  According to the fifth aspect, since the main body case of the sensor device does not have the detection means, it is easy to arrange the head case including the detection means at a desired position, and the degree of freedom in layout increases. According to the sixth invention, by allowing a plurality of head cases capable of detecting different physical quantities to be connected to one main body case, calculation can be performed based on different detection amounts detected by each detection means, and a PLC or the like is used. Advanced control can be realized with a simple configuration without the need to do so.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below exemplifies a sensor device, a sensor system, and a sensor device connection method capable of detecting a different physical quantity for embodying the technical idea of the present invention. The connection method of the device, sensor system, and sensor device capable of detecting different physical quantities is not specified as follows. Further, the present specification by no means specifies the members shown in the claims to the members of the embodiments. In particular, the dimensions, materials, shapes, relative arrangements, and the like of the component parts described in the embodiments are not intended to limit the scope of the present invention unless otherwise specified, and are merely explanations. It is just an example. Note that the size, positional relationship, and the like of the members shown in each drawing may be exaggerated for clarity of explanation. Furthermore, in the following description, the same name and symbol indicate the same or the same members, and detailed description thereof will be omitted as appropriate. Furthermore, each element constituting the present invention may be configured such that a plurality of elements are constituted by the same member and the plurality of elements are shared by one member, and conversely, the function of one member is constituted by a plurality of members. It can also be realized by sharing.

In this specification, connection between a sensor device, a sensor system, its control device, and a computer, printer, external storage device and other peripheral devices for operation, control, input / output, display, and other processing connected thereto , For example, IEEE1394, RS-232x, RS-422, RS-423, RS-485, serial connection such as USB, parallel connection, or electrically via a network such as 10BASE-T, 100BASE-TX, 1000BASE-T Connect and communicate. The connection is not limited to a physical connection using a wire, but may be a wireless connection using radio waves such as IEEE802.1x, OFDM, etc., Bluetooth (registered trademark), infrared rays, optical communication, or the like. Furthermore, a memory card, a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, or the like can be used as a recording medium for storing data of the sensor device, storing settings, and the like.
(Embodiment 1 sensor device with communication function)

FIG. 2 shows a block diagram of the sensor device 300 according to Embodiment 1 of the present invention. The sensor device 300 includes a detection unit, a calculation unit, a type determination unit, a communication interface 3, and a display unit 251. Specifically, it comprises a detection block 1 including detection means and a calculation block 2 including calculation means. The detection block 1 and the calculation block 2 are connected via a connection unit 4. The detection block 1 includes a sensor unit 202 that detects a predetermined physical quantity as a detection unit, a sensor drive circuit 204 that drives the sensor unit 202, and a detection circuit 234 that detects a detection signal detected by the sensor unit 202. . If necessary, an amplifier circuit 206 for amplifying the detected detection signal as necessary and a power supply circuit 208 for supplying power to each member are added.
(Detection block 1)

  As the sensor unit 202, various sensors that are currently available or developed in the future can be used as appropriate. Examples of physical quantities that can be detected by the sensor unit 202 include flow rate, temperature, pressure, humidity, illuminance, and distance. The sensor drive circuit 204 and the detection circuit 234 are selected according to the physical quantity to be detected. Further, an amplifier unit for signal amplification, a shield, or the like may be provided in accordance with the intensity or noise of the detection signal. Furthermore, a configuration in which the sensor drive circuit or the like is not provided on the detection block side but is provided on the calculation block side can be employed. The sensor unit constitutes a single-function sensor that can detect only one physical quantity.

In addition to the configuration in which the power supply circuit is provided on the detection block side, the power supply circuit is not provided on the detection block side. Instead, the power supply circuit is provided on the calculation block side to supply necessary power from the calculation block side via the power supply line. Also good. In this case, a power supply line for power supply is separately prepared and the calculation block and the detection block are wired. Or it is good also as a form which supplies a power supply together with the cable for signal lines.
(Calculation block 2)

  On the other hand, the calculation block 2 includes a control unit 240, a memory unit 242, a display unit 251, a communication interface 3, an output unit 260, an input unit 270, and a power supply circuit 209. The control unit 240 is electrically connected to the sensor drive circuit 204B on the calculation block 2 side, controls the drive of the sensor unit 202, acquires the detection amount detected by the sensor unit 202, and performs a predetermined calculation process. The sensor drive circuit can be arranged not only on the detection block side but also on the control block side as described above. On the other hand, the detection circuit 234 of the detection block 1 is connected to the control unit 240 via the sensor measurement circuit 234B. The sensor measurement circuit 234B can perform preprocessing for the detection signal. Further, the sensor measurement circuit 234B can be omitted, and the control unit 240 can perform necessary calculations.

The control unit 240 drives the sensor unit 202 with the sensor drive circuit 204B, and further receives a detection signal detected by the sensor unit 202 via the sensor measurement circuit 234B. The control unit 240 is constituted by a microprocessor such as a CPU, and realizes functions of a calculation unit and a type determination unit. The control unit 240 is connected to a memory unit 242 such as an EEPROM for holding necessary information such as setting values and a reset circuit 237.
(Display unit 251)

  The display unit 251 includes a display screen for displaying a detection amount, a threshold value, and the like detected by the sensor unit 202, performing necessary settings, and monitoring an input / output state. The display unit 251 in FIG. 2 includes a 7-segment display 251a. Moreover, you may comprise a display screen with a liquid crystal, organic EL, etc.

The display unit 251 also includes a setting unit 280 for performing various settings. The setting unit 280 includes a key for input, a console, a switch, and the like. Moreover, an input part and a display part can also be integrated using a touch panel. The setting unit 280 also functions as a threshold setting unit for setting a threshold for performing some control on the detection amount of the sensor unit 202.
(Input unit 270)

Further, the calculation block 2 includes an input unit 270 and an output unit 260 for performing input and output required for the sensor device 300, both of which are connected to the control unit 240 to control input / output. The input unit 270 is an input terminal block for inputting a trigger input from an external device, and includes a plurality of input circuits. In the example of FIG. 2, three systems of input circuits 1 to 3 are provided.
(Output unit 260)

  The output unit 260 is an output terminal block for performing analog signal output and control output, and includes three systems of output circuits 1 to 3 in the example of FIG. Further, an overcurrent detection circuit 260A is provided to protect the output current from becoming an overcurrent.

The power supply circuit 209 is a circuit for supplying electric power of each member constituting the calculation block 2, inputs an external power supply, converts it into necessary electric power, and supplies it to each member.
(Communication interface 3)

The sensor device 300 further includes a communication interface 3 that can be connected to another sensor device that measures different kinds of measurement values. The communication interface 3 is a communication circuit for performing data communication with other sensor devices, and uses a common communication specification so that data communication can be performed with sensor devices that handle different physical quantities. As the communication method adopted by the communication interface 3, a field network that can be used in common by many users and manufacturers is preferable. DeviceNet, CC-Link, PROFIBUS ( Field buses such as Profibus, Modbus, LonWorks, Ethernet (Ethernet), Modbus-TCP Ethernet, and HART can be used. The communication interface 3 is controlled by the control unit 240 and communicates in synchronization at a predetermined timing.
(Sensor system)

  By connecting this sensor device to the sensor device via the communication interface 3, a sensor system capable of arithmetic control based on a plurality of physical quantities can be constructed. In particular, in the conventional sensor device, only sensor devices that detect the same physical quantity can be added, and advanced control based on different physical quantities cannot be performed only by the sensor. To achieve this, each sensor device must be connected to the PLC via a dedicated interface such as an I / O unit to construct a dedicated system, which is complicated and expensive. In the first place, there is no sensor device that can be directly connected to the PLC, and it is not possible to connect the sensor devices to each other and perform computations and calculations only by connecting each sensor device to the PLC via a dedicated interface. It was.

On the other hand, since the sensor device shown in FIG. 2 includes the common communication interface 3 that can be connected to different sensor devices that handle other physical quantities, it can be connected not only to the same type of sensor device but also to different types of sensor devices. In addition, since the calculation using the detection amount from the other externally connected sensor device is also possible, the sensor system can be constructed only by the sensor device.
(Embodiment 2 Head separation type sensor device)

In the example of FIG. 2 described above, the sensor device in which the detection block and the control block are integrated in the same main body case has been described. However, the detection block does not need to be integrated with the control block, and can be configured separately and separated from the control block. This example will be described with reference to FIG. In FIG. 3, members of the same kind as in FIG. In the sensor device shown in FIG. 3, the calculation block 2 is incorporated into the main body case 210B, while the head case 211 that houses the detection block 1 is configured separately from the main body case 210B, and these are electrically connected by cables, connectors, or the like. It is in the form to do. The main body case 210 </ b> B is provided with a head connection interface 5 for connecting to the head case 211. By connecting a cable to the head connection interface 5, it is electrically connected to the head case 211 incorporating the sensor unit 202, and the detected amount is sent to the calculation block. Thereby, for example, the head case 211 can be arranged at a distant position, a cable connected to the main body case 210B can be extended, the main body case 210B can be installed at another position, and the detection result can be monitored on the display unit.
(Embodiment 3 Sensor device capable of connecting multiple heads)

Further, the main body case may include a plurality of head connection interfaces. The sensor device shown in FIG. 4 is provided with three head connection interfaces 5B in the main body case 210C. In particular, in addition to the head connection interface 5B being a simple I / O, by providing a communication function, not only the head case 211C for detecting the same kind of physical quantity, but also the head case 211C for detecting a different physical quantity is used as one main body case 210C. It is also possible to connect them together. Thus, a plurality of head cases 211C are connected and detected by each head case 211C using the main body case 210C of one sensor device without using a PLC and without preparing a plurality of main body cases. Since different physical quantities can be used in combination with the physical quantities, the system configuration can be greatly simplified, and advanced control based on different kinds of measurement values can be easily realized at low cost.
(Embodiment 4 Connection unit type sensor device)

  Further, the head connection interface can be shared with the communication interface. That is, as shown in FIG. 5, it is possible to connect the main body case of another sensor device to the communication interface 3D provided in the main body case 210D, or connect a head case having a different detectable physical quantity. Can also be possible. Thereby, the freedom degree of a structure can further be increased and a sensor system can be constructed | assembled still more flexibly. As a connection method, a multi-drop type as shown in FIG. 5 can be adopted. However, it may be a star type or daisy chain type in which a communication interface is provided for each connection destination.

  Furthermore, according to this configuration, a sensor device without an existing communication function is used as a head case, and a main body case without a sensor function is provided as a connection unit, thereby adding a communication function to the existing sensor device. Can do. That is, it becomes possible to communicate between different types of sensor devices via a connection unit externally attached to the sensor device, and different types of physical quantities can be mixed without using a PLC or the like using an existing sensor device. A sensor system can be constructed, and advanced control using different measurement values is also possible.

Furthermore, what is connected to the main body case is not limited to a sensor that detects a physical quantity, and a controller that can control the physical quantity can also be connected. Accordingly, it is possible to construct a sensor system that performs feedback control so that a desired value is obtained based on the detection amount detected by the sensor.
(Master unit setting)

  When constructing a sensor system that connects a plurality of sensor devices and performs control that integrates these data, it is necessary to determine a master device (master controller) that performs control in advance. The master unit needs to know how many slave units, that is, each sensor device connected, and what physical quantity is detected and sent out. Hereinafter, a procedure for setting such a master unit and a procedure for recognizing a connected external device will be described.

  First, as a method for determining the parent device, a method in which the user designates an arbitrary sensor device from among the connected sensor devices can be cited. For the setting of the master unit, for example, a method such as a dip switch, a dedicated button, or a specific key operation can be used.

  On the other hand, in a system where there is no problem even if any sensor device in the sensor system becomes the parent device, the parent device can be automatically determined according to the connection order, the activation order, or the like. Further, such an operation may be omitted in a sensor system that can be operated without setting a base unit.

Moreover, when constructing a sensor system in which a plurality of sensor devices are connected, all the sensor devices can be operated as a parent device. In this case, since any sensor device can be used as a master unit, it is easy to use. For example, the sensor device located at the end of the connection is operated as the master unit.
(Main unit operation mode)

  The sensor device that functions as a master unit is a slave device or a single sensor in addition to the same type of operation mode in which the same type of sensor device is connected to perform arithmetic processing, and the different type of operation mode in which different types of sensor devices are mixed to perform arithmetic processing. These operation modes are automatically switched according to other connected sensor devices. The control unit 240 of the master unit functions as an operation mode switching unit that switches the operation mode.

Alternatively, a sensor system can be constructed by limiting the sensor devices that can operate as the master unit. Furthermore, the sensor unit may be omitted from the master unit. For example, a main body case including a calculation block is operated as a master unit, and a unit such as a head case or a sensor device connected to the main body case is controlled as a slave unit. You can also
(Automatic connection destination recognition)

  In addition, in order for the parent device to know the type and number of sensor devices (slave devices) connected to the parent device, the user can manually input information to the parent device. A configuration in which the automatic detection is performed by communicating with the connected device on the machine side is desirable because it is simple and reliable. A procedure for automatically detecting the type and the number of sensor devices at the connection destination on the base unit side will be described based on the timing chart of FIG. 6 and the flowchart of FIG. FIG. 6 shows communication for recognizing the number of slave units (number of units) and detection (sensor type) detected by the slave units in an example in which three slave units are connected to the master unit. A sequence is shown. In this example, inquiries are made from the parent device to each child device in the order of connection. When a reply from the slave unit is received, an inquiry is further made to the slave unit in the next stage, and communication is sequentially established for all the slave units. Each sensor device receives an inquiry and issues a communication permission with another sensor device. When communication with the slave unit at the final stage is completed and no response is received, the inquiry is terminated, the number of slave units and the sensor type of each slave unit are determined, and the master unit is set according to the determined sensor type. Confirm the operation mode. The flowchart of FIG. 7 shows the above procedure. In steps S1 to S6, the master unit confirms the number of connected slave units connected to the master unit and the sensor type, and further connects in steps S7 to S12. The operation mode of the master unit is determined according to the state.

  Specifically, first, in step S1, the parent device initializes n related to the number of connected devices to n = 0 as preparation for data communication with the connected sensor device. In step S2, n is incremented by one. Further, in step S3, communication permission is given to the nth device, and an inquiry is made to the nth sensor device in step S4.

  This inquiry is made by the control unit 240 of the parent device functioning as a type determination means for determining the sensor type indicating the presence or absence of a sensor device as a child device and the physical quantity detected by the sensor unit 202 of the parent device. A signal is generated and sent to an external slave unit via the communication interface 3. As the determination signal, for example, a flag indicating the sensor type is provided in the header of the packet data, and when the slave unit receives the determination signal, it writes its own sensor type in the flag and returns it as a response signal. In step S5, the parent device determines whether or not there is a reply from the nth sensor device. That is, the slave unit waits for a response signal to the determination signal, and if a response signal is returned, the process proceeds to step S6 to determine the nth sensor device. That is, the slave unit returns the response including the sensor type in the response signal, and the master unit determines the sensor type of the slave unit from the response signal and records it in the memory unit 242. Furthermore, it returns to step S2 and repeats a process until all the sensor apparatuses of a connection destination are decided.

If there is no response from the sensor device in step S5, that is, if all the connected sensor devices have been confirmed or no sensor device is connected, the process proceeds to step S7, where the number of connected sensor devices (n−1) ). In step S8, it is determined whether n is 1. If n = 1, the number of connected devices is 0, that is, the parent device is used alone, so the process proceeds to step S9, where the parent device is set to the single operation mode and the process is terminated. If n = 1 is not determined in step S8, it is determined that a plurality of sensor devices are connected. Therefore, the process proceeds to step S10, and whether the sensor type of the connected sensor device is different from the parent device. Determine. In the case of different types, the process proceeds to step S11 to set the heterogeneous calculation mode. On the other hand, in the case of the same type, the process proceeds to step S12 to set the same type calculation mode and ends. In this way, the sensor device set as the parent device can grasp the number and sensor types of other sensor devices connected to itself, and can automatically set the operation mode according to this. In other words, it eliminates the need for the user to manually enter the type and number of sensor devices to be connected to each other, and it is possible to automatically perform an appropriate backer according to the connection status, making it extremely easy and possible to make a setting error. A sensor system can be constructed without
(Example of sensor system construction)

  Hereinafter, a specific example of a sensor system constituted by such a sensor device will be described with reference to FIGS. FIG. 8 shows an example in which a sensor system in which the pressure sensor A and the flow rate sensor B are combined is constructed and the fluid state in the pipe H is monitored. In this example, the pressure sensor A is used as a master unit, and the flow rate measured by the flow rate sensor B is transmitted to the pressure sensor A. In this configuration, it is possible to detect the normal state of the fluid flowing in the pipe H by providing appropriate setting values and threshold values for the flow rate and pressure, which are different detection amounts. For example, when the flow rate is an appropriate value and the pressure is an appropriate value, it can be determined that the inside of the pipe H is in a normal state. On the other hand, if the flow rate is detected as inappropriate, the cause of the abnormal flow rate, for example, It can be determined that there is a possibility of abnormality in the piping pump. If the pressure is detected as inappropriate, it can be determined that there is an abnormality such as clogging of the pipe or leakage of the pipe. In this way, more advanced control can be realized by a sensor system that combines a plurality of parameters.

  As another example, as shown in FIG. 9, a temperature sensor C can be added to the flow rate sensor B, and a sensor system for monitoring cooling water for cooling the mold K can be constructed. In this example, the flow rate sensor B is used as a base unit, and the temperature measured by the temperature sensor C is sent to the flow rate sensor B. In this configuration, it is possible to detect a normal state in the pipe H by providing appropriate setting values and threshold values for the measured values of the temperature sensor C and the flow rate sensor B, respectively. For example, if the flow rate is an appropriate value and the cooling water is at an appropriate temperature, it can be determined that the cooling water is in a normal state. On the other hand, if the flow rate is detected as inappropriate, it can be determined that the cooling function may be impaired, and if the temperature is detected as inappropriate, it may be determined that cooling may not be possible. In this case, the cause of the abnormality can be estimated to some extent.

  In this way, a sensor system in which multiple sensors are connected is constructed, multiple physical quantities are monitored, and abnormalities are judged and predicted. In addition, a controller capable of controlling physical quantities is added, resulting in an abnormal state. In such a case, it is possible to perform control to return to a predetermined normal state. In the example shown in FIG. 10, a pressure sensor A and a pressure controller D are connected to construct a sensor system that performs automatic pressure control in the pipe H. Here, the pressure detected by the pressure sensor A can be transmitted to the pressure controller D by using the pressure controller D as a master unit. In this way, a control system can be flexibly constructed by combining devices that detect and control physical quantities, such as the pressure sensor A and the pressure controller D for different applications. Furthermore, in the example of FIG. 10, if a temperature sensor C and a flow rate sensor B are additionally provided in addition to the pressure sensor A, it is possible to perform more sophisticated control that interweaves measured values of temperature and flow rate.

  In this specification, the sensor system is not only a system configured by only a sensor device, but also a system including a controller capable of controlling a physical quantity in addition to a sensor apparatus that detects a physical quantity is also called a sensor system. .

As described above, measurement and control using different types of measurement values is possible, and a more advanced control system can be constructed than a conventional sensor system constructed with the same type of sensor device. In addition, without building an expensive and complicated system using PLC, a sensor system can be easily constructed by simply connecting sensor devices, and the master unit can automatically recognize the connected slave unit. An easy and extremely convenient sensor system can be constructed.
(Capacitive electromagnetic flow meter)

  Hereinafter, a capacitive electromagnetic flow meter will be described with reference to FIGS. 11 to 29 as an example of a sensor device that can be used in the present invention. However, it is needless to say that the present invention is not limited to this and can be applied to other sensor devices including a wetted electromagnetic flow meter.

In these drawings, FIG. 11 is a block diagram showing the configuration of the capacitive electromagnetic flow meter 100, FIG. 12 is a cross-sectional view of the main body case, and FIG. 13 is a more detailed block diagram of the circuit configuration of the capacitive electromagnetic flow meter 100. 14 is a perspective view of a capacitive electromagnetic flow meter, FIG. 15 is an exploded perspective view of the capacitive electromagnetic flow meter of FIG. 14 with the display unit removed, and FIG. 16 is an exploded perspective view of the main body case of FIG. 17 is an exploded perspective view of the state in which the side cover is fixed by the main body cover, FIG. 18 is a sectional view of the state in which the housing is held by the main body cover, and FIG. 19 is a perspective view of the measuring tube and an exploded perspective view with the electrodes removed. 20 is an exploded perspective view of the main body case of FIG. 16, FIG. 21 is an exploded perspective view of the preamplifier module, FIG. 22 is a perspective view of the excitation module, FIG. 23 is a perspective view of the excitation plate, and FIG. FIG. 25 is an exploded perspective view of the integrated display unit, FIG. 26 is a perspective view showing how the display unit is fixed to the main body case, and FIG. 27 is a perspective view of a capacitive electromagnetic flow meter using a separate display unit. FIG. 28 is a block diagram of the electromagnetic flow meter, and FIG. 29 is an exploded perspective view of the separation type display unit.
(Block Diagram)

  As shown in the block diagram of FIG. 11 and the main body case cross-sectional view of FIG. 12, the capacitive electromagnetic flow meter 100 is wound around the measurement tube 10 and the pole piece 178 that allow the fluid to be detected to pass through. An excitation coil 22 for applying a magnetic field to the fluid to be detected from outside, an excitation circuit 24 for generating an alternating magnetic field by the excitation coil 22, and a fluid to be detected passing through the magnetic field generated by the excitation coil 22 The electrode 30 for detecting the electromotive force generated, the detection circuit 34 for detecting the electromotive force via the electrode 30, the excitation circuit 24 and the detection circuit 34 are driven and controlled, and the flow rate is calculated from the detected signal. And a display unit 51 that displays the flow rate calculated by the control unit 40. The control unit 40 functions as a flow rate calculation unit capable of calculating the integrated flow rate based on the flow rate of the fluid to be detected detected by the main body case 110 constituting the flow rate detection means. If necessary, an output unit 60 for outputting an output signal, an input unit 70 for inputting various input signals such as an external reset signal, a setting unit 80 for performing various settings, and the like are provided. Also good. The control unit 40, the display unit 51, the output unit 60, the input unit 70, the setting unit 80, and the like are configured as a unit that is a separate member from the main body case 110 as the display unit 50.

  A more detailed block diagram of the circuit configuration of the capacitive electromagnetic flow meter 100 is shown in FIG. In this figure, each of the main body case 110 and the display unit 50 constituting the capacitive electromagnetic flow meter 100 shows the members constituting them. First, a pair of electrodes 30 and preamplifiers 163 are arranged on the measurement tube on the main body case 110 side. A differential amplifier 35, an amplifier 36, and a periodic reset circuit 37 are provided as a detection circuit 34 that detects an electromotive force at these electrodes 30. In the example of FIG. 13, the output of the preamplifier 163 is input to the differential amplifier 35 to detect the electromotive force generated between the electrodes 30. The output of the differential amplifier 35 is further amplified by the amplifier 36, A / D converted by the A / D converter 38 via the periodic reset circuit 37, and input to the control unit 40. The periodic reset circuit 37 is a circuit for receiving a reset signal periodically transmitted from the control unit 40 and resetting the detected voltage.

  On the other hand, as an excitation circuit 24 for generating a magnetic field in the measurement tube by the excitation coil 22, an excitation power source 25 for excitation, an excitation polarity switching circuit 28 that is interposed between the excitation coil 22 and the excitation power source 25 and switches the polarity of excitation. And a constant current circuit 29 for supplying a predetermined constant current to the exciting coil 22. In the excitation circuit 24, the excitation polarity switching circuit 28 switches the power supplied from the excitation power supply 25 and supplies an alternating current to the excitation coil 22 to generate an alternating magnetic field. In the example of FIG. 13, two excitation power sources 26 and an excitation continuation power source 27 are provided as the excitation power source 25, and these are used by switching. That is, since a high voltage is required when the exciting coil 22 is started up, the initial exciting power source 26 that can obtain a higher output is used. When the excitation is stabilized, the voltage necessary for continuing the excitation becomes low, and the excitation continuous power supply 27 is switched. As a result, in order to supply a high voltage at start-up and a constant voltage at stable operation, a dedicated power supply can be prepared, so that an increase in power supply or an increase in power loss can be avoided. Prevents heat generation.

  Further, the output of the excitation polarity switching circuit 28 is input to the control unit 40 on the display unit 50 side. The display unit 50 includes an A / D converter 38, a control unit 40, a display unit 51, a setting unit 80, an input unit 70, and an output unit 60. The control unit 40 is constituted by a microcomputer or the like, and drives and controls the excitation circuit 24 and the detection circuit 34 in synchronization. The setting unit 80 is a switch or console for performing various settings and operations. The display unit 51 includes a 7-segment display and the like, and switches or simultaneously displays the detected instantaneous flow rate, integrated flow rate, or set value. The input unit 70 is an input circuit that inputs an external signal. The output unit 60 includes an external output circuit 61 and an analog current output circuit 62 for outputting a control signal and the like.

  It should be noted that the classification of the display unit, the main body case, the excitation circuit, the detection circuit, and the like is an example, and it goes without saying that the same function can be realized by appropriately changing the unit or circuit to which each constituent member belongs. Moreover, as long as a function is implement | achieved, it is also possible to integrate arbitrary members.

The operation principle of the capacitive electromagnetic flow meter 100 will be described with reference to FIG. The measurement tube 10 that guides the fluid to be detected is generated by a pair of exciting coils 22 disposed on the left and right sides of the measurement tube 10 and is disposed so as to be orthogonal to the substantially parallel magnetic field guided to the pole piece 178. The pair of electrodes 30 arranged to face the upper and lower surfaces of the measuring tube 10 are arranged so as to detect the electromotive force generated in the direction perpendicular to the magnetic field generated by the exciting coil 22 and the direction of passage of the fluid to be detected. Has been. In this configuration, when the fluid to be detected flows in the measuring tube 10, that is, when the conductive fluid moves in a direction orthogonal to the magnetic field, the moving speed (flow velocity) of the fluid to be detected is increased according to Faraday's law of electromagnetic induction. Proportional electromotive force is generated. At this time, the electromotive force is proportional to the product of the magnetic flux density, the flow velocity, and the measurement tube diameter according to Faraday's law. The electrode 30 faces the fluid to be detected through the tube wall of the measuring tube 10 made of a derivative and is capacitively coupled, and functions to electrically extract an electromotive force generated in the fluid. The extracted electromotive force is transmitted to the control unit 40, converted into a flow rate signal, displayed on the display unit 51, or output as an electrical signal.
(Main body case 110)

  Next, details of each member of the capacitive electromagnetic flow meter will be described with reference to the drawings. A capacitive electromagnetic flow meter 100 shown in FIGS. 14 and 15 includes a main body case 110 constituting a capacitive electromagnetic flow meter main body and a display unit 50. This capacitive electromagnetic flow meter allows the fluid to be detected to pass through the flow passage openings 111 opened at both end faces of the main body case 110, detects the flow rate, and displays it on the display unit 50.

  PPS resin or the like can be used for the main body case 110. In particular, by forming the main body case 110 from a resin instead of a metal, it is possible to obtain an advantage that the weight can be reduced and a complicated shape can be easily formed and the structure can be made at low cost. As shown in FIG. 15, the display unit 50 is fixed to the upper surface of the main body case 110. Further, as shown in FIG. 16, side covers 130 are fixed to the side surfaces of the main body case 110 before and after the housing 120 that houses the measurement tube 10. Each side cover 130 is provided with a channel port 111 through which the fluid to be detected flows in and out.

  Further, the upper surface of the side cover 130 is closed with a yoke lid 140 and the lower surface is closed with a reinforcing plate 142. Furthermore, the reinforcing plate 142 is covered with a body cover 150 having a U-shaped cross section, and the side cover 130 is fixed and reinforced at both ends of the body cover 150. A state in which the main body case 110 is covered with the main body cover 150 and the side covers 130 are fixed to each other with the main body cover 150 is shown in FIG. As shown in this figure, a step is formed so that the side plate 155 of the main body cover 150 can be inserted in a state where the side cover 130 is fixed before and after the housing 120. Further, with the main body cover 150 covering the main body case 110, screws are inserted into screw holes 156 opened in the side plate 155, and the side covers 130 are screwed and fixed at both ends of the main body cover 150. Furthermore, the screw hole 156 can also be used for the connection between the housing 120 and the side cover 130, thereby improving the assembly work efficiency.

  The main body cover 150 is made of a rigid member such as a sheet metal, and the casing of the capacitive electromagnetic flowmeter is given strength by being screwed with the side cover 130 and screws at both ends. Thereby, when piping a capacity type electromagnetic flow meter, even if stress is applied to the piping fixing mechanism provided on both sides of the capacity type electromagnetic flow meter, it is possible to give strength that can sufficiently resist. For example, when the screw groove 112 provided on the inner surface of the flow path port 111 is screwed, torque in the opposite direction is applied from both ends. However, the main body cover 150 reinforces the main body case 110 from being damaged by such twisting stress.

  In addition, the entire casing of the capacitive electromagnetic flow meter is not made of metal, but the weight can be reduced by using the main body case 110 as a resin member. Although the main body cover 150 is made of a metal but relatively light metal plate, the overall weight can be reduced. Furthermore, even if the main body case 110 has a complicated shape, it can be formed at a lower cost than the case of metal, which is advantageous in terms of cost. In particular, metal parts can be made inexpensive by using a simple sheet metal shape. Furthermore, by covering the surface of the main body case 110 of the capacitive electromagnetic flow meter with a main body cover 150 such as a sheet metal, an effect of protecting the housing surface can be obtained. In addition, by connecting the side covers 130 at both ends with the metal main body cover 150, a secondary effect that the both end surfaces are made conductive and the ground potential can be made common can be obtained. On the other hand, the main body case 110 is provided with a liquid earth terminal 144, and the potential of the fluid to be detected is set to the ground potential of the side cover 130.

In the above example, the main body cover 150 is configured to cover the entire housing 120 with a single U-shaped main body cover 150 as shown in FIG. In particular, the bending strength can be further increased by bending the sheet metal into a U-shaped cross section. Further, since the side covers 130 can be connected to each other with a single body cover 150, the number of parts can be minimized and the assembly workability is excellent. However, the main body cover is not limited to the above configuration, and may be configured by a plurality of sheets. For example, as shown in FIG. 18 (b), two main body covers 151, each having a U-shaped cross section, may be configured so as to cover them from above and below the housing 120. Alternatively, as shown in FIG. 18C, a body cover 152 having an L-shaped cross section may be used, and these may be sandwiched from the diagonal direction of the housing 120. Further, as shown in FIG. 18 (d), two flat main body covers 153 may be used to bridge the side covers.
(Side cover 130)

The side cover 130 opens the flow path port 111. The channel port 111 constitutes a channel with the measurement tube 10 built in the main body case 110. The diameter of the flow path is set to substantially the same diameter from one end to the other end of the flow path port 111 to reduce loss when the detected fluid flows in one direction in the flow path. A thread groove 112 is formed on the inner surface of the channel port 111 at the channel port 111 as a piping fixing mechanism for connecting to an external piping (not shown) of a factory or the like where a capacitive electromagnetic flow meter is installed. . In order to ensure mechanical strength when piping by screwing, the side cover 130 is preferably formed integrally with metal. As another connection method between the external pipe and the flow path, a bolt is planted on the open end face of the main body case, and on the other hand, a flange is provided at the end of the external pipe, and the nut is passed through the bolt through the flange insertion hole. The main body case and the external pipe may be connected by screwing.
(Measurement tube 10)

  The measurement tube 10 is an insulating lining that allows a fluid to be detected to pass through the inside of the tube. The measuring tube 10 is required to have excellent chemical resistance as a pipe through which a fluid to be detected passes and electrical characteristics for constituting a capacitor. From the viewpoint of mechanical characteristics, the measuring tube 10 is a strength matrix that bears the force of tension or compression based on the expansion and contraction of the pipe due to pressure and temperature changes of the fluid to be detected, and the required inner diameter, thickness, and length to withstand it. A rigid structural member having On the other hand, from the viewpoint of electrical characteristics, the measuring tube 10 is desirably a dielectric material as a nonmagnetic insulating member. In particular, the electrode 30 is made of a material having a high dielectric constant in order to enhance the capacitive coupling between the electrode 30 attached around the measuring tube 10 and the fluid to be detected and to improve the S / N ratio. Ceramics, plastics, etc. can be used as such materials. In general, ceramics are used. However, when a protrusion 12 and a step 14 for positioning, which will be described later, are integrally formed on the outer peripheral surface of the measuring tube, the positioning accuracy is reduced due to thermal shrinkage during molding, or post-processing is performed. If such protrusions and steps are formed, the cost may increase. For this reason, in the present embodiment, a PPS resin mixed with ceramics that has relatively high strength and can ensure molding accuracy and high dielectric property is employed. PPS resin is excellent in oil resistance and chemical resistance. In the present embodiment, Flexis (registered trademark) manufactured by Polyplastics Co., Ltd. was used. A lining is applied to the inner surface of the measuring tube 10 as necessary.

  The fluid to be detected is water or a non-corrosive liquid, and is a liquid having a predetermined conductivity. Unlike the liquid contact type electromagnetic flow meter, the capacity type electromagnetic flow meter does not directly contact the electrode 30 with the fluid to be detected. Therefore, even a liquid that corrodes an electrode that could not be used conventionally can be measured. Moreover, it can respond to various to-be-detected fluids by selecting the material of the measuring tube 10. FIG. In particular, the material of the measuring tube 10 can be selected according to the dielectric constant required in accordance with the measurement accuracy and the resistance to the fluid to be detected. In particular, since the capacitive electromagnetic flow meter according to the present embodiment uses the measurement tube 10 as a separate member from the main body case 110, only the measurement tube 10 is changed, and other component parts are used in common, so that the capacitance type has various specifications. An electromagnetic flow meter can be configured, which is advantageous for product preparation.

  Further, the measurement tube 10 is provided with a rotation blocking mechanism for blocking the rotation of the columnar measurement tube 10. That is, since it is necessary to make the electrode 30 and the exciting coil 22 orthogonal to each other around the measurement tube 10, if the cylindrical measurement tube 10 is rotated and misaligned, accurate detection may be hindered. . For this reason, as shown in FIG. 19A, the protrusion 12 is provided on the outer periphery of the measuring tube 10. By forming a hole for supporting the protrusion 12 in the preamplifier module 160, the main body case 110, and the like, the measuring tube 10 is positioned in a predetermined posture and rotation is prevented.

The measurement tube 10 is a separate member from the main body case 110. Thereby, the material suitable for a capacitor | condenser can be selected for the member which comprises the measurement pipe | tube 10. FIG. On the other hand, a resin that can be easily molded into a complicated shape can be used for the main body case 110. Thus, by making the measuring tube 10 a separate member from the main body case 110, it can be configured by a member suitable for each. In particular, since the high dielectric material constituting the measuring tube is generally expensive, only necessary portions are made of expensive members, and the other members can be made of less expensive materials to reduce the overall cost. Moreover, the measuring tube 10 made of an appropriate material can be selected according to the accuracy required for the capacity type electromagnetic flow meter. Furthermore, it can be replaced with a measuring tube having a different diameter. Thus, a measuring tube made of an appropriate material can be selected according to the detection purpose and application of the capacity type electromagnetic flow meter, the required specifications and cost. In addition, by making it possible to set a plurality of measurement tubes in one capacity type electromagnetic flow meter, the members of various types of capacity type electromagnetic flow meters can be shared and provided at low cost.
(Electrode 30)

  An electrode 30 is disposed around the measurement tube 10. As the electrode 30, an insulating tape such as polyimide coated with a copper foil can be used. As shown in FIG. 19B, the electrode 30 is a planar conductor that is curved along the outer periphery of the cylindrical measurement tube 10, and the pair of electrodes 30 are opposed to each other with the measurement tube 10 interposed therebetween. Arrange to do. Thus, by electrostatic coupling between the pair of electrodes 30 and the fluid to be detected, the electromotive force generated in the fluid can be taken out from the measuring tube 10 and the flow rate can be detected. Each electrode 30 is affixed to the outer periphery of the measuring tube 10 without a gap. Tape or adhesive can be used for pasting. The electrode 30 is preferably made of a flexible member and can be fixed to the outer surface of the measuring tube 10 without a gap.

  In order to prevent conduction between the pair of electrodes due to corrosion or condensation of the electrode which is a planar conductor, the conductor is preferably covered with an insulating layer. In the example of FIG. 19, formation and adhesion of the insulating layer are realized at the same time by adhering to the outer periphery of the measuring tube 10 via an insulating adhesive such as silicone resin. As another configuration, a polyimide resin tape may be used as the insulating layer, and an electrode 30 in which a copper foil planar conductor is previously provided on the polyimide resin tape may be disposed on the measuring tube 10. Around the measurement tube 10, a step 14 is formed at the position and size where the electrode 30 is disposed, and the positioning of the electrode 30 is realized. The step 14 is formed by reducing the thickness of the outer circumference of the measuring tube 10.

  Further, the electrode 30 is provided with leads for electrical connection with the preamplifier module 160. In the example of FIG. 19, a part of a copper foil sheet conductor is cut into lead pieces 32, which are drawn out. This configuration eliminates the need for lead wiring or the like, and enables wiring of the electrode 30 to be performed very inexpensively and easily.

Although a pair of electrodes is used in this example, two or more sets of electrodes can be used. When a plurality of sets of electrodes are used, the positions of the electrodes are adjusted so that the electric field detected by each electrode is orthogonal to the magnetic field.
(Housing 120)

Next, members housed in the housing 120 will be described based on an exploded perspective view of FIG. As shown in this figure, the housing 120 includes a measuring tube 10, a pair of preamplifiers, and an excitation module 170. A through-hole 121 is opened before and after the housing 120, and the measuring tube 10 is inserted therein. Preamplifiers are arranged above and below the measurement tube 10 held inside the housing 120. As shown in FIG. 21, the preamplifier module 160 holds the electrode 30 from above and below with the electrode 30 attached.
(Preamplifier)

The preamplifier module 160 constitutes a preamplifier for signal amplification. In the capacitive electromagnetic flow meter, since the capacitive coupling between the electrode 30 and the fluid to be detected is generally as small as several tens of pF, the impedance of the resistance when providing a filter for passing an electrical signal is extremely high. . For this reason, a preamplifier is connected to each electrode 30 as a detection circuit 34 to lower the impedance. The preamplifier shown in FIG. 20 is electrically connected to a pair of electrodes 30 arranged in the measurement tube 10, amplifies the detected electrical signal, and sends it to the control unit 40. In this preamplifier, the preamplifier module 160 is housed in a shield case 161 and is further closed by a shield cover 162, so that the preamplifier including the electrode 30 is reliably shielded to protect the electrical signal from noise.
(Preamplifier module 160)

An appearance of the preamplifier module 160 is shown in FIG. 21A is a perspective view of a pair of preamplifier modules 160, and FIG. 21B is an exploded perspective view of the preamplifier module 160. Each preamplifier module 160 includes a preamplifier substrate 164, a preamplifier substrate holder 165, and an electrode protection sheet 166, as shown in FIG. The preamplifier substrate 164 is mounted with an electronic component for amplifying the electric signal detected by the electrode 30. The preamplifier substrate 164 is held by a preamplifier substrate holder 165. The preamplifier substrate holder 165 shown in FIG. 21B has an opening for holding the preamplifier substrate 164 on the upper surface. The preamplifier substrate holder 165 has a lower surface curved in an arch shape along the side surface of the measurement tube 10, and the electrode protection sheet 166 is fixed to the curved surface. The electrode protection sheet 166 is made of an elastic body such as rubber and is pressed by the curved surface of the preamplifier substrate holder 165 to press the electrode 30 around the measuring tube 10 without a gap. In particular, in order to increase the capacitive coupling by the electrode 30, it is necessary to fix the electrode 30 and the measuring tube 10 so that no gap is generated. By using the electrode protection sheet 166 for this work, when the preamplifier module 160 is set on the measurement tube 10, the electrode 30 can be reliably pressed around the measurement tube 10 and fixed without any gap, thereby improving reliability. At the same time, the configuration is simplified to improve the work efficiency.
(Excitation module 170)

  Furthermore, the excitation module 170 is arrange | positioned so that the housing 120 shown in FIG. The excitation module 170 includes an excitation coil 22 and applies a magnetic field from the left and right of the measurement tube 10. Therefore, the arrangement positions of the excitation module 170 and the preamplifier are set so that the electric field and magnetic field detected by the electrode 30 are orthogonal to each other.

A perspective view of the excitation module 170 is shown in FIG. FIG. 22A shows a perspective view of the excitation module 170 as viewed obliquely from above, and FIG. 22B shows a perspective view of the excitation module 170 as viewed from obliquely below. The excitation module 170 shown in this figure includes a coil case 172 that holds the excitation coil 22, an excitation plate 174 that fixes the coil case 172 as a pair so as to face each other, and a relay substrate 176.
(Excitation plate 174)

  A perspective view of the excitation plate 174 is shown in FIGS. The excitation plate 174 holds the pair of coil cases 172 apart from each other, and generates a magnetic field between the pole pieces 178 of the coil case 172. The excitation plate 174 is formed in a substantially U-shaped cross-section in which opposed pieces 174a that are separated from each other in parallel are connected at both ends of the connecting piece 174b. And keep them apart. Further, yoke pieces 174c for fixing the yoke lid are formed at both ends of the upper surface of the excitation plate 174, respectively.

The excitation plate 174 is made of a ferromagnetic material because it forms a magnetic circuit with the magnetic field generated by the excitation coil 22. The excitation plate 174 is integrally formed of metal or the like. In other words, the magnetic flux generated from the pole piece 178 reduces the leakage magnetic flux toward the downward connecting piece 174b so that the magnetic field is efficiently generated between the opposing pole pieces 178. Is partially open. In particular, a magnetic circuit is prevented from being short-circuited by forming an opening 174d by greatly opening a joint portion between the connecting piece 174b and the opposing piece 174a. By using the excitation plate 174 having such a shape, the leakage magnetic field can be reduced and the efficiency of the magnetic circuit can be increased.
(Relay board 176)

Further, as shown in FIG. 22B, a relay substrate 176 is fixed to the back surface of the coupling piece 174b of the excitation plate 174. The relay substrate 176 constitutes an initial excitation power supply 26, an excitation continuation power supply 27, an excitation polarity switching circuit 28, and a constant current circuit 29 shown in FIG. 13 as the excitation circuit 24 for exciting the excitation coil 22. A necessary electric circuit is mounted on the relay substrate 176 so that the exciting circuit 24 generates an alternating magnetic field between the pole pieces 178. The excitation module 170 generates an alternating magnetic field at a frequency different from the commercial frequency. Preferably, the excitation frequency is higher than the commercial frequency, for example, 75 kHz. Thereby, the noise which arises in a commercial frequency can be avoided.
(Coil case 172)

The coil case 172 has a configuration in which a core is inserted and the exciting coil 22 is wound around the core. An exploded perspective view of the coil case 172 is shown in FIG. As shown in this figure, the coil case 172 has a shape in which flat plates 172a and 172b are connected by a hollow shaft, and a coil winding space 172c for winding the exciting coil 22 is formed between the flat plates 172a and 172b. One flat plate 172a has a pole piece insertion opening 172d into which a pole piece 178 is inserted as a core. The pole piece insertion port 172d has a hollow shaft shape and penetrates the coil winding space 172c. Further, the other flat plate 172b has a rectangular shape and is fixed to the opposing piece 174a of the excitation plate 174 as shown in FIG.
(Pole piece 178)

  The exciting coil 22 is wound around the pole piece core 178a. The pole piece 178 has a rectangular flat plate 178b fixed to one end of an iron core forming the pole piece core 178a, and magnetic flux enters and exits through the flat plate 178b. A conductive magnetic material such as a laminated iron core can be suitably used for the pole piece core 178a. Moreover, it is good also as a structure which reduces the magnetic circuit delay which arises in this part, without using a pole piece core.

  In this excitation module 170, a pair of built-in excitation coils 22 are arranged apart from each other, and the excitation coil 22 is excited by the relay substrate 176 to generate a magnetic field between the pole pieces 178. As a result, when a liquid having conductivity as the fluid to be detected flows through the measuring tube 10 installed between the pole pieces 178, an electromotive force is generated in a direction orthogonal to the moving direction of the liquid.

  In the example of FIG. 11, two exciting coils 22 are used and are provided on the left and right of the measuring tube 10. However, the number of coils may be one. For example, as shown in FIG. 30, if the measurement tube 10B is sandwiched between both ends of the core 178B, the exciting coil 22B wound around the core 178B can be integrated. Similarly to FIG. 11 and the like, the capacitive electromagnetic flow meter shown in this figure excites the exciting coil 22B with the exciting circuit 24B, and the detection circuit 34B detects the electromotive force generated by the detected fluid passing through the measuring tube 10B with the electrode 30B. It is detected, sent to the control unit 40B, and displayed on the display unit 51B.

Further, returning to FIG. 15, the capacitive electromagnetic flow meter has the display unit 50 fixed to the upper surface of the main body case 110. Screw holes 122 for fixing the display unit 50 are formed at the four corners of the housing 120 on the upper surface of the main body case 110. In addition, a recessed step space is formed at the upper end of the side cover 130 so as to be flush with the surface of the display unit 50 fixed to the upper surface of the main body case 110. This step space is formed to be approximately equal to or slightly larger than the outer shape and size of the display unit 50.
(Display unit 50)

  The display unit 50 is a member for displaying information such as the flow rate of the fluid to be detected, and includes a display screen 52 as the display unit 51 as shown in FIG. In the example of FIG. 14, a 7-segment display is used as a numerical display area for displaying numerical values on the display screen 52, and the flow rate and the like are displayed numerically. The 7-segment display displays numerical values such as instantaneous flow rate and integrated flow rate for the detected flow rate. The display screen 52 shown in this figure has two stages of 7-segment display (52a, 52b), and can display the integrated flow rate and the set value simultaneously. However, it is needless to say that the display of the integrated flow rate, the instantaneous flow rate, the set value, etc. can be switched by providing only one screen with a 7-segment display.

The display screen 52 includes an indicator lamp 53 that indicates the flow velocity and the flow direction of the fluid to be detected. The indicator lamp 53 is composed of LEDs arranged in a linear bar shape. The indicator lamp 53 can turn on and off the LEDs sequentially in the flow direction at a speed corresponding to the flow rate, for example, and can express the flow velocity and the flow direction sensuously. Moreover, instead of the bar-shaped LED, an arrow-shaped indicator lamp or the like can be used. Furthermore, instead of the segment-type display screen 52 using LEDs or the like, a display screen using liquid crystal or organic EL can be used. In this way, the display screen 52 can display not only numerical values such as flow rate but also figures and images such as arrows or alternatively, and can easily display the detected flow rate information to the user. Can be displayed.
(Setting unit 80)

  The display unit 50 includes an operation panel 54 as a setting unit 80 for performing various settings. The operation panel 54 includes keys and buttons for performing various settings. In the example of FIG. 14 and the like, a 4-digit 7-segment display is arranged in two stages on the display screen 52, an operation panel 54 is provided in the lower right, and keys are arranged in the cross direction. The setting unit 80 functions as a reset setting unit for setting an initial value of an integrated flow rate, which will be described later, or a predetermined reset value.

In this example, the display circuit that displays the display screen 52 incorporates a control unit 40 that is connected to the detection circuit 34 and the excitation circuit 24 and controls them. However, it goes without saying that the control circuit can be formed of individual members and incorporated in the main body case 110. It is also possible to integrate a control circuit, a detection circuit, an excitation circuit, and the like.
(Output unit 60)

  The display unit 50 includes an output unit 60. In this example, the output unit 60 includes a control output, an analog output, and a timeout output, and includes an external output terminal corresponding to each output. The control output can be used as an ON / OFF output for directly controlling the ON / OFF operation of an external device with a capacitive electromagnetic flow meter. In this case, it functions as a switch that outputs in two states of HIGH / LOW so that the ON / OFF output is switched when the detected instantaneous flow rate reaches a predetermined value. The switch function may be either normally open or normally closed. Alternatively, a pulse voltage corresponding to the detected integrated flow rate can be output as the control output. In this case, the external voltage input device can be used for controlling the integrated flow rate. Further, a reset signal input terminal for resetting the integrated flow rate may be provided.

  On the other hand, the analog output can output an analog current according to the measured instantaneous flow rate or integrated flow rate. In this example, when the instantaneous flow rate changes in the range of 0 to the rated value, an analog current is output in the range of 4 to 20 mA. For this reason, the output unit 60 includes an analog current output circuit 62. The analog current has better noise immunity than the voltage signal, and can be used for data recording and analysis by outputting it to the outside. Further, the timeout output outputs a timeout signal at the time of timeout as will be described later.

Thus, the output unit 60 can function as an integrated value output unit or an instantaneous value output unit. Note that the output unit may omit any of the control output, analog output, and timeout output, or may include another output terminal. Furthermore, you may provide the output indicator lamp which shows the output state of each output terminal.
(Threshold setting unit)

Furthermore, the setting unit 80 functions as a threshold setting unit for setting a predetermined threshold for the flow rate of the fluid to be detected detected by the fluid detection unit. In other words, the detected flow rate is compared with a threshold value set in advance by the threshold setting unit, and when it exceeds (or falls below), it can operate as a sensor that outputs an output signal from the output unit.
(Input unit 70)

Further, the display unit 50 can include an input unit 70. The input unit 70 is an interface for inputting an input signal from an external device such as a temperature sensor, a reset signal for resetting the integrated value, and various setting information. As the input unit, a communication unit capable of data communication, an I / O terminal, a memory card, or the like can be used.
(Display unit 50)

On the other hand, as the display unit 50, an integrated display unit 50 in which the display unit 50 is provided in the main body case 110 and a separate display unit 50B in which the display unit is disposed at a position different from the main body case 110 can be used. FIG. 25 is an exploded perspective view of the integrated display unit 50.
(Integrated display unit 50)

The integrated display unit 50 shown in this figure includes a front case 55, a power cable 56, a display substrate 57, and a power substrate 58. The front case 55 is a housing of the display unit 50 and holds the display substrate 57 inside, and is positioned so that a 7-segment display provided on the display substrate 57 is exposed to the outside through an opening window. And fix. Further, a power supply substrate 58 is disposed on the back surface of the display substrate 57 so as to be separated. The power cable 56 is connected to an external power source for driving the capacitive electromagnetic flow meter, and supplies power to the capacitive electromagnetic flow meter. The display board 57 is mounted with a drive circuit for a display element such as a LED constituting a 7-segment display and various indicators, an electronic component including a switch of the operation panel 54, and a control component such as a CPU. Further, a power supply board 58 is prepared separately from the display board 57, and power supply circuit components are mounted on the power supply board 58. By separating the display substrate 57 on which the display drive circuit is mounted from the power supply substrate 58 on which the power supply circuit is mounted, the heat generated in the power supply circuit can be separated from the electronic components of the display circuit.
(Alternative fixing mechanism)

  The display unit 50 can change the mounting direction of the display unit 50 so that the user can easily view the display screen 52 according to the mounting position and posture of the capacitive electromagnetic flow meter. FIG. 26 shows how the display unit 50 is fixed to the main body case 110 of the capacitive electromagnetic flow meter. 26A shows a separated display unit 50B, FIG. 26B shows a state in which the integrated display unit 50 is fixed, a state in which the integrated display unit 50 is fixed horizontally with the flow direction of the non-detection fluid, and FIG. The state where the same integrated display unit 50 as in (b) is fixed in a posture perpendicular to the flow direction of the non-detection fluid is shown.

  Specifically, the step space on the upper surface of the display unit 50 and the main body case 110 is substantially square, and the display unit 50 can be fixed even when the attachment angle of the display unit 50 is rotated by 90 °. For this reason, the screw holes 122 for fixing the display unit 50 to the upper surface of the main body case 110 are precisely drilled at the four corners. Accordingly, the display unit 50 can be fixed to the main body case 110 even when the display unit 50 is rotated by 90 °, and the display direction of the display screen 52 can be changed. That is, while the measuring tube 10 is fixed in a posture along the flow direction (for example, up and down or left and right) of the fluid to be detected, the posture of the display unit 50 fixed to the capacitive electromagnetic flow meter is determined by the user viewing the display screen 52. Can be fixed in an easy direction.

  Conventionally, when a capacitive electromagnetic flow meter is fixed to a pipe or the like, the capacitive electromagnetic flow meter is sometimes fixed not only in a horizontal posture but also in a vertical posture. In this case, since the display device is arranged in the vertical direction, there is a problem that it is difficult to read numerical values displayed in horizontal writing. On the other hand, as shown in Patent Document 2 described above, there has been a flow meter provided with a mechanism for rotating the display unit 50 with the main body case 110 so that the display screen 52 can be visually recognized in both the vertical and horizontal directions, but a rotation mechanism is necessary. As a result, the structure is complicated, and there are problems such as an increase in cost and an increase in size. On the other hand, the above configuration is an extremely simple configuration in which the mounting posture is changed and screwed, so that the number of parts is not increased and the display screen 52 is made horizontal while achieving downsizing. In other words, it can be fixed to a posture that the user can see from an upright posture, and the visibility is improved.

  Needless to say, it is not always necessary for the user to see and fix it in a horizontal position, and it can be fixed in an appropriate posture according to the installation position, the user's viewing direction, and the like. In this way, the structure of rotating the display unit with respect to the main body case is not necessary, and the installation direction of the capacitive electromagnetic flow meter is selected because of the method of selecting and fixing either the vertical or horizontal orientation in 90 ° units. Accordingly, the display unit can be fixed in an easy-to-see direction, the structure for changing the fixing position can be simplified, and the apparatus can be reduced in size.

  Note that the method of fixing the display unit 50 is not limited to screwing at the four corners. For example, a screw hole may be drilled in the middle of each side of the square, or engagement or fitting with a hook or the like.

  In addition, it is not necessarily limited to the configuration in which the mounting angle of one display unit is changed. For example, a display unit for horizontal display and a display unit for vertical display are prepared separately, and an appropriate display unit is selected according to the application. And may be configured to be fixed. This configuration eliminates the need for a 90 ° rotatable configuration, so there is no need to make the upper surface of the main body case substantially square, and the main body case can have various shapes such as a rectangular shape. Is obtained.

Furthermore, the display unit 50 fixed to the main body case 110 can be replaced. As a result, the main body case 110 can be used in common for both the integral type and the separated type display unit 50, and the advantage that the members can be shared is obtained.
(Separate display unit 50B)

  FIG. 26A shows an example of a separate display unit 50B. As shown in FIG. 27, the separation type display unit 50B separates the display screen 52 from the main body case 110, arranges the display panel 50C in the main body case 110, and exchanges electric signals with a cable or the like to exchange the main body case 110. Information such as the flow rate is displayed on the display screen 52 at a position distant from. The display panel 50C can have the same configuration as the integrated display unit 50 described above.

  FIG. 28 shows a block diagram of an electromagnetic flow meter 200 using a separate display unit. The electromagnetic flow meter 200 shown in this figure can use the same main body case as the main body case 110 of the electromagnetic flow meter using the integrated display unit according to FIG. 13 described above, and a detailed description thereof will be omitted. 28, the display unit 50B includes an A / D converter 38B, a control unit 40C, an operation display screen 52B as a display unit, an analog current output circuit 62B as an output unit, and serial communication as a communication interface 3. A circuit 63 is provided. The serial communication circuit 63 performs data communication with the display panel 50C and transmits necessary data to be displayed on the display panel 50C.

  In the example of FIG. 26A, an indicator 53B indicating the passage of the fluid to be detected is provided as an operation display screen 52B on the upper surface of the main body case 110 in place of the 7-segment display. The operation display screen 52B can indicate the movement direction of the fluid to be detected in addition to the operation state of the capacitive electromagnetic flow meter, such as detecting the flow rate. In the example of FIG. 26A, as the indicator 53B, four arrow-shaped indicator lamps are arranged horizontally along the detection direction of the measuring tube 10, and the indicator lamps are turned on by LEDs or the like. The indicator 53B visually displays the flow direction by blinking the indicator 53B in the direction of passage of the fluid to be detected and lighting it so as to move the light.

  For example, when the fluid to be detected is flowing along the detection direction, the indicator lamp is lit in blue, while when the fluid to be detected is flowing in the reverse direction, it is displayed in red. Further, by dynamically changing the blinking pattern of the indicator lamp to display the movement direction of the fluid to be detected, the movement of the fluid can be more easily recognized visually.

  FIG. 29 shows an exploded perspective view of the operation display screen 52B constituting the separation type display unit 50B. The separation type display unit 50B shown in this figure includes a front case 55B, a display substrate 57B, a power supply substrate 58B, a power supply cable 56B, and a temperature sensor cable 59B. The front case 55B is insert-molded with the indicator 53B. The display board 57B and the power supply board 58B can be configured by mounting the same components as the integrated display unit 50 described above. Further, in this example, an input signal from a temperature sensor that detects the temperature of the fluid to be detected is input to the input unit 70 via the temperature sensor cable 59B, and the temperature of the fluid to be detected is arranged on the side of the display panel 50C that is spaced apart. Can be sent to and displayed.

  In addition, omitting the indicator from the operation display screen on the top surface of the main body case, or conversely providing a display screen for displaying the flow rate etc. on the main body case side even if it is a separate display unit. Needless to say, it can also be provided at two positions.

  In addition, although the example applied to the capacity | capacitance type electromagnetic flowmeter was demonstrated above, this invention is not restricted to this, The electromagnetic flowmeter provided with a liquid contact type electromagnetic flowmeter and other flow rate detection means, for example, a turbine type, a Karman vortex type Various known sensors such as a diaphragm type, a paddle type, and an ultrasonic type can be appropriately employed. Furthermore, the present invention can be applied to a flow rate sensor that detects the flow rate of gas without being limited to liquid. Furthermore, the present invention is not limited to the flow rate sensor, and can be applied to various sensor devices such as a photoelectric sensor, a proximity sensor, a pressure sensor, a displacement sensor, a temperature sensor, and an image sensor.

  The sensor device, the sensor system, and the sensor device connection method capable of detecting different physical quantities according to the present invention can be suitably applied as a capacitive electromagnetic flow meter for detecting the flow rate of a conductive liquid.

It is a perspective view which shows the state which connected flow sensors. It is a block diagram of the sensor apparatus which concerns on Embodiment 1 of this invention. It is a block diagram of the sensor apparatus which concerns on Embodiment 2 of this invention. It is a block diagram of the sensor apparatus which concerns on Embodiment 3 of this invention. It is a block diagram of the sensor apparatus which concerns on Embodiment 4 of this invention. It is a timing chart which shows a mode that a sensor apparatus performs automatic recognition of a connecting point apparatus. It is a flowchart which shows the procedure in which a sensor apparatus performs automatic recognition of a connecting point apparatus. It is a schematic diagram which shows an example of a sensor system. It is a schematic diagram which shows the other example of a sensor system. It is a schematic diagram which shows the further another example of a sensor system. It is a block diagram which shows the structure of an electromagnetic flowmeter. It is sectional drawing of a main body case. It is a detailed block diagram of a capacitive electromagnetic flow meter. It is a perspective view which shows the electromagnetic flowmeter which concerns on one embodiment of this invention. It is the disassembled perspective view which removed the display unit of the electromagnetic flowmeter shown in FIG. It is a disassembled perspective view which removed the nozzle | cap | die and the reinforcement board from the main body case of FIG. It is a disassembled perspective view which shows the state which fixes a side cover with a main body cover. It is sectional drawing which shows the state holding a housing with a main body cover. The It is the perspective view of a measurement tube, and the exploded perspective view which removed the electrode. It is a disassembled perspective view of the main body case of FIG. It is a disassembled perspective view of a preamplifier module. It is a perspective view of an excitation module. It is a perspective view of an excitation plate. It is a disassembled perspective view of an exciting coil. It is a disassembled perspective view of an integrated display unit. It is a perspective view which shows a mode that a display unit is fixed to the main body case of an electromagnetic flowmeter. It is a perspective view which shows the electromagnetic flowmeter which uses a separation type display unit. It is a block diagram which shows the electromagnetic flowmeter which uses a separation type display unit. It is a disassembled perspective view of a separation type display unit. It is a block diagram which shows the other structure of an electromagnetic flowmeter.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100, 200 ... Electromagnetic flowmeter; 300 ... Sensor apparatus; 400 ... Flow sensor 1 ... Detection block; 2 ... Calculation block; 3, 3D ... Communication interface 4 ... Connection part; 5, 5B ... Head connection interface 10, 10B ... Measurement 12 ... protrusion; 14 ... steps 22, 22B ... excitation coil; 24, 24B ... excitation circuit; 25 ... excitation power supply 26 ... initial excitation power supply; 27 ... excitation continuing power supply; 28 ... excitation polarity switching circuit; 29 ... constant current Circuits 30, 30B ... Electrodes; 32 ... Lead pieces; 34, 34B ... Detection circuits 35 ... Differential amplifiers; 36 ... Amplifiers; 37 ... Periodic reset circuits 38, 38B ... A / D converters 40, 40B, 40C ... Control Part: 42 ... memory part 50 ... display unit; 50B ... separation type display unit; 50C ... display panel 51, 51B ... display part; 52 ... display screen 52a ... upper stage 7-segment display; 52b ... lower 7-segment display 52B ... operation display screen 53 ... indicator lamp; 53B ... indicator 54 ... operation panel 55, 55B ... front case; 56, 56B ... power cable 57, 57B ... display 58, 58B ... power supply board; 59B ... temperature sensor cable 60 ... output unit; 61 ... external output circuit; 62, 62B ... analog current output circuit 63 ... serial communication circuit 70 ... input unit 80 ... setting unit 110 ... main body case 111 ... Flow path opening; 112 ... Screw groove 120 ... Housing; 121 ... Through hole; 122 ... Screw hole 130 ... Side cover 140 ... Yoke lid; 142 ... Reinforcing plate; 144 ... Liquid earth terminals 150, 151, 152, 153 ... Body cover; 155 ... side plate; 156 ... screw hole 160 ... preamplifier module; 161 ... shield 162 ... Shield cover 163 ... Preamplifier; 164 ... Preamplifier substrate; 165 ... Preamplifier substrate holder 166 ... Electrode protection sheet 170 ... Excitation module 172 ... Coil case 172a, 172b ... Flat plate; 172c ... Coil winding space; 172d ... Pole piece 174b ... connecting piece; 174c ... yoke piece; 174d ... opening part 176 ... relay substrate; 178 ... pole piece 178a ... pole piece core; 178b ... flat plate 178B ... core 202 ... sensor part 204, 204B ... sensor drive circuit; 206 ... amplifier circuit 208 ... power supply circuit; 209 ... power supply circuit 210, 210B, 210C, 210D ... main body case; 211, 211C ... head case 234 ... detection circuit; 234B ... sensor measurement circuit; 237 ... Set circuit 240 ... Control unit; 242 ... Memory unit 251 ... Display unit; 251a ... 7-segment display 260 ... Output unit; 260A ... Overcurrent detection circuit 270 ... Input unit 280 ... Setting unit A ... Pressure sensor; Sensor; C ... Temperature sensor; D ... Pressure controller H ... Piping; K ... Mold

Claims (7)

A sensor device capable of detecting any physical quantity,
Detection means for detecting the first physical quantity;
Arithmetic means for performing a predetermined process based on the detection amount detected by the detection means;
A communication interface capable of being electrically connected to another sensor device capable of detecting a second physical quantity different from the physical quantity detected by the detection means, and performing data communication with the other sensor device;
Type determination means capable of determining the presence or absence of another sensor device connected to the communication interface and the type of the second physical quantity detected by the other sensor device connected via the communication interface;
With
The calculation means is capable of calculating based on a detection amount related to the first physical quantity detected by the detection means and a detection quantity related to the second physical quantity detected by another sensor device. apparatus. The sensor device according to claim 1, further comprising:
A threshold value setting unit for setting a predetermined threshold value for the detection amount detected by the detection means;
An output unit capable of outputting a predetermined output based on a comparison result by comparing a detection amount detected by the detection unit with a threshold set by the threshold setting unit;
A sensor device comprising: The sensor device according to claim 1 or 2 ,
The type determination means can generate a determination signal for determining the type of the second physical quantity detected by another sensor device,
The determination signal is transmitted from the communication interface to another sensor device when the sensor device is activated, and the calculation means is connected to the sensor device based on a response signal from the other sensor device to the determination signal. A sensor system configured to be able to determine the number of other sensor devices and the type of each sensor device. The sensor device according to any one of claims 1 to 3 , further comprising:
A body case containing the computing means;
A head case containing the detection means;
With
A sensor device, wherein the head case is configured to be separable from the main body case. The sensor device according to claim 4 ,
The main body case is configured to be connectable with a plurality of head cases each incorporating detection means capable of detecting different physical quantities,
The sensor device according to claim 1, wherein the calculation means of the main body case is configured to execute a predetermined calculation based on different detection amounts detected by the detection means of each of the plurality of head cases. The sensor device according to any one of claims 1 to 5 , further comprising:
A display unit capable of displaying a detection amount detected by the detection unit;
The sensor device, wherein the display unit is configured to be separable from the main body case. A sensor system in which a plurality of sensor devices capable of detecting different physical quantities are connected,
Detection means for detecting the first physical quantity;
A communication interface capable of being electrically connected to another sensor device capable of detecting a second physical quantity different from the physical quantity detected by the detection means, and performing data communication with the other sensor device;
A plurality of sensor devices comprising:
An arithmetic communication interface that is electrically connectable to the sensor device and performs data communication with the sensor device;
Arithmetic side type determination means capable of determining the presence / absence of another sensor device connected to the arithmetic side communication interface and the type of the second physical quantity detected by the other sensor device connected via the communication interface When,
Calculation-side calculation means for performing predetermined processing based on detection amounts respectively transmitted from the plurality of sensor devices connected to the calculation-side communication interface;
An arithmetic unit comprising:
A sensor system comprising:

Images