JP4919026B2 - Cutting device for green sheet laminate and method for cutting green sheet laminate - Google Patents

Description

  The present invention relates to a green sheet laminate cutting apparatus and a method for cutting a green sheet laminate for cutting a green sheet laminate that is laminated and pressure-bonded.

  Conventionally, a cutting method for cutting a green sheet laminate by applying a pressing force in a thickness direction of the green sheet laminate to a plate-like cutting blade is known.

  A conventional method for manufacturing a ceramic electronic component will be described with reference to FIG. FIG. 9 is a perspective view showing a cutting step in a conventional method for manufacturing a ceramic electronic component. A laminated body 715 obtained by laminating the green sheet 753 and the internal electrode 751 and pressing is fixed on the pedestal 723, and the laminated body 715 is cut into a desired shape by the cutting blade 703. And the cut | disconnected laminated body 715 is baked and a ceramic electronic component is produced.

  In the cutting step in the method of manufacturing a ceramic electronic component, the end portion 715a of the green sheet laminate 715 is cut to expose the internal electrode 751. Then, the computer connected to the optical lens 755 captures the image data of the end portion 715a and identifies the internal electrode 751. After the position of the internal electrode 751 is detected, the green sheet laminate 715 is cut by the cutting blade 703 using a position that does not interfere with the internal electrode 751 as a cutting position (see Patent Document 1).

JP 2002-184646 A (FIG. 1 etc.)

  However, in the cutting step in the method for manufacturing a ceramic electronic component described above, the internal electrode 751 exposed at the end 715a of the green sheet laminate 715 is identified on the assumption that a plurality of internal electrodes are arranged in a straight line. Then, a cutting position is determined between adjacent internal electrodes of the green sheet laminate 715, and cutting is performed with a linear cutting blade 703.

  By the way, the inventors have found that due to the load applied when the green sheet laminate 715 is crimped, the line extends from the center of the green sheet laminate outward and the line passing through the center of the internal electrode is curved as shown in FIG. Got. When the dimensions of ceramic electronic components are relatively large as in the past, there was no effect, but the internal electrodes should be placed closer to each other in terms of miniaturization of ceramic electronic components and effective use of materials. Is desired. In such a situation, when the green sheet laminate is cut using the linear cutting blade 703, the internal electrodes 751 may be damaged or cut when the adjacent internal electrodes are cut.

  Therefore, the present invention is a case where the external dimensions of the ceramic electronic component are miniaturized and the internal electrodes are arranged closer to each other, and even when the center line passing through the plurality of green sheet laminates is curved, An object of the present invention is to provide a cutting device and a cutting method for a green sheet laminate that can cut the green sheet laminate without breaking or damaging it.

  A first aspect of a green sheet laminate cutting apparatus according to the present invention for solving the above problems is a green sheet laminate cutting apparatus in which a plurality of internal electrodes are arranged, wherein the plurality of internal electrodes are arranged. A stage on which the green sheet laminate is placed, a cutting blade for cutting the green sheet laminate placed on the stage, and a thickness of the green sheet laminate placed on the stage A cutting blade driving means for moving the cutting blade in a direction, and the cutting blade is curved in a plane parallel to a surface on which the green sheet laminate extends, along an arrangement of the plurality of internal electrodes. Cutting blade bending means.

  According to the second aspect of the green sheet laminate cutting apparatus of the present invention, the cutting blade bending means comprises a cutting blade holder for holding the cutting blade, and a holder pressing means for pressing the cutting blade holder, By pressing the cutting blade holder by the holder pressing means, the cutting blade is curved in a plane parallel to the surface on which the green sheet laminate extends through the holder.

  According to the third aspect of the cutting apparatus for a green sheet laminate of the present invention, the cutting blade bending means further includes a guide member that abuts in the vicinity of the edge of the cutting edge of the cutting blade, and a guide pressing means that presses the guide member. The cutting blade is curved in a plane parallel to the surface on which the green sheet laminate extends through the guide portion by pressing the guide member by the guide pressing means.

  According to the fourth aspect of the green sheet laminate cutting apparatus of the present invention, the cutting blade bending means includes a guide member that contacts the vicinity of the edge of the cutting edge of the cutting blade, and a guide pressing means that presses the guide member. The cutting blade is curved in a plane parallel to the surface on which the green sheet laminate extends through the guide portion by pressing the guide member by the guide pressing means.

  In addition, a first aspect of the method for cutting a green sheet laminate of the present invention for solving the above problems is a method for cutting a green sheet laminate that cuts a green sheet laminate in which a plurality of internal electrodes are arranged. Preparing a green sheet laminate in which the plurality of internal electrodes are arranged, detecting the arrangement of the plurality of internal electrodes, and cutting the cutting blade along the arrangement of the plurality of internal electrodes. A step of bending a cutting blade in a plane parallel to a surface on which the green sheet laminate extends, and a step of cutting along the predetermined cutting position of the green sheet by the curved cutting blade.

  In addition, the green sheet laminated body in this specification means what was formed as the intermediate body in the manufacture process of various laminated type electronic components. More specifically, it is composed of powders such as ferrite and glass-based ceramics, a binder, a plasticizer, a solvent, etc., and forms an insulating region in an electronic component, and a conductive region represented by an internal electrode in the electronic component. The sheet-like member obtained by laminating | stacking the green sheet etc. which have this. Moreover, the sheet-like member may have a sheet-like support (base material) that supports them.

  According to the present invention, the cutting blade is curved even when the internal electrodes whose outer dimensions of the ceramic electronic component are miniaturized are arranged closer to each other and the center line passing through the plurality of internal electrodes is curved. Therefore, it is possible to cut the green sheet laminate without damaging or damaging the internal electrode, and as a result, it is possible to provide a cutting device and a cutting method for a green sheet laminate that can reduce material waste and manufacturing cost. it can.

  Hereinafter, an embodiment of a cutting device for a green sheet laminate in the present invention will be described with reference to the drawings. Note that the same reference numerals are given to the same components throughout the following embodiments.

  First, a method for manufacturing an electronic component composed of a green sheet laminate will be briefly described. In the sheet forming step (step 1), a green sheet, that is, a ceramic sheet, which is formed (casted) to a thickness of several μm to several tens of μm is obtained. Next, in the internal conductor printing drying step (step 2), internal electrodes (Ag-based, Ag-Pd-based) are formed by screen printing. Thereafter, a plurality of green sheet layers in which the internal electrodes are patterned in the green sheet press-bonding step (step 3) are stacked on the substrate to produce a green sheet laminate block, and the green sheet laminate cutting step (step 4). ) To cut into individual pieces (chips).

  Furthermore, in order to give a desired roundness (R) to the end face of the cut piece, barrel polishing is performed together with the media ball in the water barrel polishing process (Step 6), and after the separation, washing and drying, the firing process (Step In 7), the ceramic layer and the inner conductor are fired simultaneously. After separation, washing, and drying, set on a jig (pallet) to which the terminal electrode is applied in the terminal electrode coating process (step 8), apply and dry the Ag-Pd-based electrode, and then in the firing process (step 9) Bake. Furthermore, in order to ensure electrical connection at the time of mounting, after plating of Ni, Sn, etc. in the plating process (step 10), the characteristic inspection is finally performed in the characteristic inspection process (step 11). Ships. A green sheet laminated body electronic component is manufactured by the above processes.

  The embodiment of the cutting device of the present invention relates to the cutting process (step 4) in the above manufacturing process.

  Below, embodiment of the cutting device of the green sheet laminated body which concerns on this invention used at the process of cut | disconnecting the crimped green sheet laminated body is described. FIG. 1 is a block diagram of an electronic component manufacturing apparatus including a cutting device. FIG. 2 is a view showing a state in which the inside of the green sheet laminate is photographed using the X-ray inspection apparatus. Dashed lines Y1 and Y2 in FIG. 2 are lines passing through the centers of the internal electrodes.

  As shown in FIG. 1, the cutting apparatus 1 mainly includes a stage 23 on which a green sheet laminate 15 in which a plurality of internal electrodes 51 are arranged, and a green sheet laminate 15 placed on the stage 23. A cutting blade 3 for cutting, an upper / lower actuator 25 of a cutting blade which is a cutting blade driving means for moving the cutting blade 3 in the thickness direction of the green sheet laminate 15 placed on the stage, and a plurality of internal electrodes A cutting blade pressing member that is a cutting blade bending means 85 that curves the cutting blade 3 in a plane parallel to the surface on which the green sheet laminate 15 extends along the arrangement of 51. .

  Furthermore, although not essential components of the present invention, the present embodiment has the following components. In the figure, reference numeral 77 denotes a control unit (CPU) that controls each element of the cutting device 1, and reference numeral 79 denotes a data storage unit. The data storage unit 79 is a member that stores a program for driving a stage negative pressure supply unit, an actuator, and a detection device, which will be described later, data of the detection device, and the like.

  Reference numeral 81 denotes a stage negative pressure supply unit. The stage negative pressure supply unit 81 is a member for applying a negative pressure to a suction hole (not shown) penetrating the stage 23 and fixing the green sheet laminate 15 on the stage 23 (see FIGS. 4A and B). . Reference numeral 83 denotes a stage drive actuator. The stage 23 is moved in the x-axis direction (left and right direction in FIG. 4A), y-axis direction (front and back direction in FIG. 4A), and θ direction (in the plane configured by the x-axis and y-axis). It is a member for driving in the angle direction. As the detection device 65 for detecting the internal electrode of the green sheet laminate 15, a conventionally known X-ray detection device is used. Further, by driving the stage drive actuator 83, the edge of the cutting edge 3 is positioned at the predetermined cutting position of the green sheet laminate. The cutting blade 3 is lowered by the cutting blade up / down actuator 25 and enters the green sheet laminate 15.

  The cutting blade up / down actuator 25, the stage negative pressure supply unit 81, the stage drive actuator 83, and the cutting blade bending actuator 85 are known configurations that are driven by a conventionally known electric motor, electromagnetic valve, pump, or the like. It is.

  As shown in FIG. 2, the green sheet laminate 15 to be cut has a plurality of internal electrodes 51 arranged in a plurality of rows in the vertical direction in the drawing. Moreover, it turns out that the green sheet laminated body 15 is extended outside as it leaves | separates from the center of the green sheet laminated body 15 to the left-right both ends in the figure. Thus, at the time of lamination | stacking, after the green sheet laminated body 15 is crimped | bonded, the arrangement | sequence of the some internal electrode 51 arrange | positioned linearly in the up-down direction curves.

  The green sheet laminate 15 is cut between a pair of adjacent internal electrodes in the arrangement of the plurality of internal electrodes 51 detected by the X-ray inspection apparatus as described above. For example, each of the central points of the internal electrodes through which Y1 has a curvature radius that is the average value of the curvature radii of the lines Y1 and Y2 connecting the centers of the internal electrodes arranged in a row, or the distance from that point is the minimum Consider the center point of the internal electrode through which Y2 passes, and have the same radius of curvature as the curved line Z (one-dot chain line) connecting the midpoints of these two centers along the direction in which Y1 and Y2 extend. Curve the cutting blade and cut.

  The method for cutting the green sheet laminate in the apparatus configured as described above includes a step of preparing the green sheet laminate 15 in which the plurality of internal electrodes 51 are arranged, and a step of detecting the arrangement of the plurality of internal electrodes 51 by the detection device 65. A step of bending the cutting blade 3 in a plane parallel to the surface on which the green sheet laminate 15 extends along the arrangement of the plurality of internal electrodes 51, and driving the cutting blade up / down actuator 25; And a step of cutting along a predetermined cutting position of the green sheet laminate 15 with the curved cutting blade 3.

  In this way, by bending the cutting blade 3 in a plane parallel to the surface on which the green sheet laminate 15 extends, even if the internal electrode 51 is misaligned, the internal electrode is damaged. And can be prevented from being damaged.

  Next, a green sheet laminate cutting apparatus for cutting a green sheet according to an embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a block diagram of the manufacturing apparatus according to the embodiment. 4A is a front view of the cutting device, and FIG. 4B is a cross-sectional view taken along line IVB-IVB in FIG. 4A.

  A green sheet laminate cutting apparatus 401 (hereinafter referred to as a cutting apparatus 401) according to the present embodiment mainly includes a stage 23 on which a green sheet laminate 15 in which a plurality of internal electrodes 51 are arranged, and a stage 23. A cutting blade 3 for cutting the green sheet laminate 15 placed on the cutting blade, and a cutting blade driving means for moving the cutting blade 3 in the thickness direction of the green sheet laminate 15 placed on the stage The blade vertical actuator 25 and a cutting blade bending means are provided. Here, the cutting blade bending means includes a cutting blade holder 27 that holds the cutting blade 3, and a holder pressing means that presses the cutting blade holder 27, that is, a cutting blade holder bending actuator 93. Then, the cutting blade holder 27 is pressed by the cutting blade holder bending actuator 93 to bend the cutting blade 3 in a plane parallel to the surface on which the green sheet laminate 15 extends via the cutting blade holder. Since not only the cutting blade 3 but also the cutting blade holder 27 itself is curved, the cutting blade 3 is cut by the influence of external disturbance from the cutting device 401 (for example, impact during cutting) when the cutting blade 3 is kept in a curved state. It is possible to suppress the curved state of the blade 3 from being disturbed. Note that the cutting blade holder bending actuator 93 is connected to the control unit 477, and the cutting blade holder bending actuator 93 is driven by a drive signal from the control unit. The data storage unit 479 stores a program for driving the cutting blade holder bending actuator 93 in addition to a program for driving the stage negative pressure supply unit, the actuator, the detection device, and the like. The other ancillary components shown in FIG. 3 are the same as those in FIG. 1 and will not be described in detail.

  Details of each element of the cutting device 401 will be described below with reference to FIGS. 4A and 4B. The main frame member 17 which is a base body of the cutting device 401 has a substantially inverted U shape when viewed from the front, and is arranged such that both linear portions of the inverted U shape are juxtaposed in the vertical direction. A cutting blade up / down actuator 25 for moving the cutting blade 3 in the up / down direction is mounted at a substantially upper center of the U-shaped horizontal portion of the main frame member 17. The cutting blade vertical actuator 25 has an actuator rod 25a that penetrates the main frame member 17 and extends downward. The rod 25a is expanded and contracted in the extending direction by the cutting blade vertical actuator 25. Further, the main frame member 17 has guide rails 17c arranged on both linear portions of a substantially inverted U shape.

  The sub-frame member 19 has a substantially rectangular shape, and is arranged so as to be in the same direction inside the substantially inverted U-shape of the main frame member 17. The upper horizontal portion 19b extending in the horizontal direction of the subframe member 19 faces the U-shaped horizontal portion of the main frame member 17 and is coupled to the end of the actuator rod 25a. A slider 19a is fixed to a portion of the two linear portions extending in the vertical direction from the upper horizontal portion 19b of the subframe member 19 at a portion facing both the linear portions of the main frame member 17. The slider 19a is slidably engaged with the guide rail 17c of the main frame member 17. Therefore, the sub-frame member 19 can move in the vertical direction with respect to the main frame member 17 by operating the vertical actuator 25 of the cutting blade.

  As can be easily understood from FIG. 4B, the cutting blade holder 27 that holds the cutting blade 3 extends in the horizontal direction of the substantially rectangular subframe member 19 and has a lower horizontal portion 19d that faces the upper horizontal portion 19b. It is connected to the lower end. The cutting blade holder 27 is a rectangular frame member that is disposed substantially parallel to the lower horizontal portion 19 d of the subframe member 19.

  Further, the cutting blade holder will be described with reference to FIGS. 4C to 4E. FIG. 4C is an enlarged view of the IVC portion of FIG. 4B. FIG. 4D is a view of FIG. 4C as viewed from above. FIG. 4E is a top view showing only the cutting blade holder.

  The cutting blade 3 is attached to the cutting blade holder 27 via a pressing member 27a. The cutting edge ridge line portion of the cutting blade 3 extends in parallel with the placement surface 23a of the stage 23, and faces the stage 23 disposed below the main frame member 17 (in the direction of the open portion in the substantially inverted U shape). Is arranged.

  Further, a bending pin holder 89 is connected to the cutting blade holder 27 via a pin member 87. The pin holder 89 is connected to an actuator 93 (see FIG. 4B) for cutting blade bending, which will be described later, so that the pin holder 89 moves in the left-right direction in FIG. 4C.

  As shown in FIG. 4E, the wall 27b that forms one side of the frame-shaped cutting blade holder 27 is provided with a rectangular pin receiving portion 27d that protrudes in the direction of the opposing wall. A connecting portion 27e between the pin receiving portion 27d and the wall portion 27b is dimensioned to be narrower than the width of the pin receiving portion 27d and has a constricted shape. In addition, a pin receiving hole 27f that penetrates in the thickness direction (the front and back direction in the drawing) is provided substantially at the center of the connection portion 27e.

  A pin 87 is inserted into the pin receiving hole 27f, and one end of the pin is inserted into the pin holder 89, and the other end is inserted into the pin receiving hole 27f. Further, the cutting blade 3 is fixed by clamping the cutting blade 3 between the outer surface 27c and the pressing member 27a by screwing the pressing member 27a to the wall portion 27b of the cutting blade holder 27.

  A configuration around the cutting blade holder 27 will be described with reference to FIG. 4B. An L-shaped bracket 95 is provided at substantially the center of the lower horizontal portion 19 d of the subframe member 19. The L-shaped bracket 95 includes a bracket body 95a that extends horizontally from the side surface of the lower horizontal portion 19d of the subframe member 19, and an actuator fixing portion 95b that extends downward in the vertical direction from one end of the bracket body 95a. . A cutting blade holder bending actuator 93 for pressing the wall portion 27a of the cutting blade holder 27 is attached to the actuator fixing portion 95b. The cutting blade holder bending actuator 93 includes a rod 97 having one end accommodated in the cutting blade holder bending actuator 93, the other end fixed to the pin holder 89, and penetrating the actuator fixing portion 95b in the thickness direction. Since the pin holder 89 is connected to the pin receiving portion 27b via the pin 87, the pressing force of the cutting blade holder bending actuator 93 is transmitted to the pin receiving portion 27d.

Further, a rod-shaped guide rail 19 c is provided on the lower surface of the subframe member 19. A slider 91 is provided at a position facing the guide rail 19 c on the upper surface of the pin holder 89, and the guide rail 19 c is slidably mounted in a recess of the slider 91. That is, the slider 91 functions as a guide when the rod 97 reciprocates in the left-right direction in FIG. 4B.
In addition, in this embodiment, although the sub-frame member 19 and the cutting blade holder 27 were comprised from the different member, these are good also as an integral member.

  Furthermore, the stage 23 has a horizontal placement surface 23a on which the green sheet laminate 15 can be placed. The stage 23 is driven by a stage drive actuator 83 (not shown), and can move intermittently in the x, y, and θ directions (the direction perpendicular to the paper surface of FIG. 4A, the horizontal direction of the drawing, and the angle direction on the x, y plane). It is.

  Next, using the cutting device 1 according to the present embodiment, a step of calculating a radius of curvature that actually curves the cutting blade of the green sheet laminate 15, a step of bending the cutting blade holder, and a step of determining a cutting position, The operation of the cutting process will be described.

  First, a step of calculating a radius of curvature for bending the cutting blade is performed. The arrangement of the internal electrodes of the green sheet laminate 15 is detected by the detection device 65. The already known X-ray apparatus, which is the detection device 65, is disposed below the X-ray irradiation apparatus, an X-ray irradiation apparatus that irradiates the green sheet laminate 15 positioned on the stage with X-rays, and an X-ray irradiation apparatus. An imaging unit such as an X-ray imaging tube that converts a line image into an electrical signal is provided. The image signals of the internal electrodes of the green sheet laminate imaged by the imaging means are converted into array data indicating the array of internal electrodes, and then stored in the data storage unit 79. Based on the array data, the degree of bending of the array of internal electrodes is calculated and grasped. More specifically, among the internal electrodes 15 arranged in a plurality of rows shown in FIG. 2, the internal electrodes 15 in a row of a pair of adjacent internal electrodes 15 existing so as to sandwich a position to be cut (planned cutting site). The curvature radii of two curves (Y1, Y2) connecting the centers of the two are calculated and stored in the data storage unit 79. When there are a plurality of positions to be cut, the curvature radius is calculated for each column of a pair of adjacent internal electrodes 15 so as to sandwich the position to be cut, and is stored in the data storage unit 79 in association with the position to be cut. Keep it.

  Next, a step of bending the cutting blade holder is performed. A drive signal necessary for bending the cutting blade 3 with a curvature radius that is an average value of the two calculated curvature radii is supplied from the control unit 77 to the cutting blade holder bending actuator 93. Then, the rod 97 is protruded (or retracted), the rod fixing portion 27d is pressed (or pulled), and the wall portion 27b is pressed leftward (or pulled rightward). In this way, the cutting blade 3 is convex or concave and curves to the aforementioned radius of curvature.

  Next, in the cutting position determination step, the cutting edge 3 of the curved cutting blade 3 is obtained by the X-ray apparatus and stored in the data storage unit 79. A position that does not interfere is determined by the control unit 77 as cutting position data. The cutting position data is stored in the data storage unit 79.

  Next, a cutting process is performed. First, by moving the stage drive actuator 83, the stage 23 on which the green sheet laminate 15 is placed is moved to the processing area of the cutting apparatus 1. Further, the cutting blade up / down actuator 25 is actuated to raise the cutting blade 3 and move it from the mounting surface 23 a of the stage 23 to a position that is separated from the green sheet laminate 15 by a larger distance. Further, the cutting blade 3 and the green sheet are moved by moving the stage drive actuator 83 by a drive signal from the control unit 77 so that the cutting position data stored in the data storage unit 79 and the cutting edge ridge line part of the cutting blade 3 are aligned. The relative positioning of the laminate is performed.

  Furthermore, the cutting blade vertical actuator 25 is operated to lower the subframe member 19. Along with this, the cutting blade support member 27 also descends.

  As the cutting blade holder 27 continues to descend, the cutting blade 3 enters the green sheet laminate 15. The operation of the cutting blade up / down actuator 25 is continued until the cutting edge ridge line portion of the cutting blade 3 cuts the base material (not shown) of the green sheet laminate 15. With the above operation, the cutting process of the planned cutting site in the green sheet laminate 15 is completed. After the end of cutting, the sub-frame member 19 is raised by the cutting blade vertical actuator 25. Thereby, each member operate | moves in the reverse order at the time of a cutting | disconnection, and each structure is arrange | positioned in the state before a cutting | disconnection.

  The process of bending the cutting blade holder, the step of determining the cutting position, the relative positioning operation of the cutting blade 3 in the cutting step, and the lowering and raising operations of the cutting blade 3 are performed in the planned cutting site in the green sheet laminate 15. And the cut surface is formed on the entire surface of the green sheet laminate 15, and then the stage 23 rotates 90 ° about an axis perpendicular to the placement surface 23 a. After the rotation, the planned cutting site in the rotated direction of the green sheet laminate 15 is positioned directly below the cutting blade 3, and the above-described cutting operation is repeated again. Thereby, a plurality of members having a substantially rectangular chip shape can be obtained simultaneously.

  The cutting position in the cutting step matches the cutting position data in which the cutting edge ridge line portion of the cutting blade 3 determined in the cutting position determination step does not interfere with the internal electrode 15, so that the cutting step is performed while preventing the internal electrode from being lost or broken. It can be performed.

(Variation 1 of the cutting blade holder)
While the first embodiment has a configuration including the single pin receiving portion 27d, the first modification has a configuration including a plurality of pin receiving portions. The configuration will be described below with reference to FIG. FIG. 5 is a top view of Modification 1 of the holding holder of the cutting blade. Similarly to the cutting blade holder 27 of FIG. 4E, the cutting blade holder 227 is mounted with a cutting blade 3 (not shown) via a pressing member 227a.

  Further, three pin holders (corresponding to 89 in FIG. 4C) are connected to the cutting blade holder 227 via three pin members (corresponding to 87 in FIG. 4C).

  The wall portion 227b that constitutes one side of the frame-shaped cutting blade holder 227 is provided with rectangular pin receiving portions 227d, 227h, and 227i that protrude in the direction of the opposing wall portion at three locations in the longitudinal direction. Yes. And the connection part (for example, 227e) of each pin receiving part 227d, 227h, 227i and wall part 227b is dimensioned narrower than the width | variety of pin receiving part 227d, 227h, 227i, and exhibits a constricted shape. In addition, a pin receiving hole (for example, 227g) penetrating in the thickness direction (the front and back direction in the drawing) is provided at substantially the center of each pin receiving portion 227d, 227h, 227i.

  By providing a plurality of pressing points for bending the cutting blade as in the above configuration, the curvature radius to be reproduced can be reproduced more accurately. That is, the cutting blade can be bent more accurately with respect to the degree of bending of the arrangement of the internal electrodes.

  In addition, in order to drive each pin receiving part 227d, 227h, 227i, a plurality of cutting blade holder bending actuators are provided so that they can be driven independently, and one cutting blade holder bending actuator is provided for each of the three pin holders (see FIG. 4B 93) or a single cutting blade holder bending actuator (corresponding to 93 in FIG. 4B) may be provided to drive all three pin receiving portions.

(Variation 2 of the cutting blade holder)
Modified example 2 is configured to include a plurality of pin receiving portions in the same manner as modified example 1, but the pressing force by other pin receiving portions is applied to one region to which the pressing force by one pin receiving portion is applied. It has a structure that does not extend to other areas that it joins. Hereinafter, the configuration of Modification 2 will be described with reference to FIG.

  FIG. 6 is a top view of Modification 2 of the cutting blade holder. Similarly to the cutting blade holder 227 of FIG. 5, a cutting blade (not shown) is mounted on the cutting blade holder 327 via a pressing member 327a. In addition, although the cutting blade holder 327 of the modification 2 is dimensioned largely compared with the modification 1 both in the longitudinal direction and the transversal direction, it cannot be overemphasized that it can change suitably. The cutting blade 3 (not shown) and the pressing member 327a are the same as those in the first modification.

  Although not shown, three pin holders (corresponding to 89 in FIG. 4C) are connected to the cutting blade holder 327 via three pin members (corresponding to 87 in FIG. 4C).

  The wall portion 327b constituting one side of the frame-shaped cutting blade holder 327 is provided with three substantially rectangular pin receiving portions 327d, 327h, and 327i that project in the direction of the opposing wall portion 327j in the longitudinal direction. It has been. Further, between the adjacent pin receiving portions 327d, 327i and 327d, 327h, bridging portions 327k, 327l for connecting the wall portion 327b and the opposite wall portion 327j are provided.

  Therefore, the regions A, B, and C in the longitudinal direction of the wall portion 327a can be bent independently through the pin receiving portions 327d, 327h, and 327i. For example, when the pin receiving portion 327d is pressed downward in the figure, only the region B of the wall portion 327a is bent, and the regions A and C of the wall portion 327a are not bent or slightly bent to a negligible level. . Therefore, cutting can be performed in a state where the cutting blade is flexibly curved even with respect to irregular positional deviation of the internal electrode of the green sheet laminate to be cut. Since the other structure of the cutting blade holder of the modification 2 is the same as that of the modification 1, details are omitted.

  Next, Example 2 of the green sheet laminate cutting apparatus of the present invention will be described. The cutting device of the first embodiment described above is configured to include the cutting blade holder bending actuator that bends the cutting blade holder, but the cutting device of the second embodiment is a guide means for further bending the cutting blade. It is a structure provided with a cutting blade guide. Hereinafter, a cutting apparatus according to Embodiment 2 will be described with reference to FIGS. 7, 8 </ b> A, and 8 </ b> B. FIG. 7 is a block diagram of a manufacturing apparatus including a green sheet laminate cutting apparatus. 8A is a front view of the cutting device, and FIG. 8B is a cross-sectional view taken along line VIIIB-VIIIB of FIG. 8A.

  Many of the components of the green sheet laminate cutting apparatus 501 of the second embodiment (hereinafter referred to as the cutting apparatus 501) are common to the configuration of the cutting apparatus of the first embodiment. Therefore, a different part is demonstrated. In addition to the cutting blade holder and the cutting blade bending actuator of the first embodiment, the cutting blade bending means presses the guide members 599a and 599b and the guide members 599a and 599b arranged with the cutting blade 3 interposed therebetween, thereby guiding the guide member 599a. 599b is a guide pressing means 593, that is, first and second guide bending actuators 594a1 to 594a3 and 594b1 to 594b3 having a substantially rectangular cross section. As shown in FIG. 7, the guide bending actuator 594 is connected to the control unit 577, and the guide member bending actuator 594 is operated by a drive signal from the control unit 577. The data storage unit 579 stores a program for driving the guide pressing unit 593 in addition to a program for driving the stage negative pressure supply unit, the actuator, the detection device, and the like. Since other configurations are the same as those in FIG. 3, the description thereof is omitted.

  A pair of first bracket 605a and second bracket 605b that are separated from each other and extend substantially in parallel are fixed below the substantially straight U-shaped straight portions of the main frame member 517. In addition, first guide bending actuators 594a1 to 594a3 and second guide bending actuators 594b1 to 594b3 are attached to the first and second brackets 605a and 605b, respectively, at equal intervals. The first guide bending actuators 594a1 to 594a3 and the second guide bending actuators 594ba1 to 594b3 accommodate one ends of the rods 607a1 to 607a3 and 607b1 to 607b3, and the other ends of the rods 607a1 to 607a and 607b1 to 607b3 are mutually connected. Oppositely arranged so as to contact and separate (in the left-right direction in FIG. 8B). The other ends of the rods 607a1 to 607a3 and 607b1 to 607b3 are connected to guide members 599a and 599b having a rectangular cross section. Accordingly, when the first and second first guide bending actuators 594a1 to 594a3, 594b1 to 594b3 receive the drive signal from the control unit 577, the guide portions 599a and 599b move so as to come into contact with and separate from each other. Furthermore, the guide members 599a and 599b are disposed at such a height that they abut against the side surface of the cutting edge ridge line portion. Accordingly, the guide members 599a and 599b are configured to be in contact with both side surfaces of the cutting blade near the cutting edge ridge line portion of the cutting blade 3. In the initial state, the guide members 599a and 599b are arranged apart from each other by a distance slightly larger than the width dimension of the cutting blade 3 in the vicinity of the edge of the cutting edge 3 of the cutting blade 3.

  In the second embodiment, three first guide bending actuators 594a1 to 594a3 and three second guide bending actuators 594b1 to 594b3 are provided along the longitudinal direction of the first and second brackets 605a and 605b. However, it goes without saying that the positions and number of the first and second actuators can be changed as appropriate.

  Further, the first and second guide bending actuators 594a1 to 594a3, 594b1 to 594b3, the rods 607a1 to 607a, 607b1 to 607b3, the guide members 599a and 599b are the green sheet laminate and the cutting blade holder to be cut. It is fixed at a position where it does not interfere.

  A process of actually bending the guide of the green sheet laminate 15 using the cutting device 501 having the above configuration will be described. Note that the steps of calculating the radius of curvature for bending the cutting blade, the step of bending the cutting blade guide, the step of determining the cutting position, and the step of cutting are the same operations as in the first embodiment and will not be described.

  First, in the step of bending the guide member, as in the first embodiment, the curvature radius that curves the cutting blade 3 obtained in the step of calculating the curvature radius that curves the cutting blade is used as a reference value, and the value itself is the guide member. Curvature for bending the guide members 599a and 599b is calculated by setting a radius of curvature for bending 599a and 599b or by adding (or subtracting) a value that is half the thickness of the cutting blade 3 to the reference value. The data is stored in the data storage unit 479 as a radius. At this time, it is not prevented that a different radius of curvature is calculated for each of the guide members 599a and 599b. A drive signal is supplied from the controller 577 to the first and second cutting blade guide bending actuators 594a1 to 594a3 and 594b1 to 594b3 so as to form the obtained curvature radius. Then, the rods 607a1 to 607a3 and 607b1 to 607b3 are extended (or contracted), and the guide members 599a and 599b are bent. Needless to say, in this embodiment, each guide member is bent by three rods, and the cutting blade is bent as a result. For example, in order to curve the cutting blade convexly toward the left in FIG. 8B, the rod 607a2 of the actuator 594a2 that presses substantially the middle in the longitudinal direction of the guide member 599a is extended, and the rods 607a1, 607a3 of the actuators 594a1, 594a3 are extended. On the other hand, regarding the guide member 599b, the rod 607b2 of the actuator 594b2 that presses the middle of the guide member 599b is contracted, and the rods 607b1 and 607b3 of the actuators 594b1 and 594b3 that press to both ends of the guide member 599b are extended. In this way, by bending the guide members 599a and 599b with the above-described curvature radii, the vicinity of the edge of the cutting edge 3 of the cutting blade 3 with which the guide members 599a and 599b abut is obtained in the step of calculating the curvature radius that curves the cutting blade 3. Can be curved to a radius of curvature.

  Further, the step of bending the cutting blade holder in the present embodiment is performed in the same manner as in the first embodiment. Therefore, the base of the cutting blade fixed to the cutting blade holder (the portion facing the edge of the cutting edge) is curved, and the cutting blade is cut through the guide member with a predetermined radius of curvature near the edge of the cutting edge. The blade is bent. As a result, the cutting blade can be more accurately set to a predetermined radius of curvature.

  In the next cutting position determination step, based on the internal electrode position data obtained by the X-ray apparatus, a position that does not interfere with the internal electrodes arranged in parallel is determined as the cutting position.

  Furthermore, a cutting process is performed. In order to move the edge of the cutting edge 3 above the cutting position, the stage drive actuator 83 is moved until the relative positioning of the cutting blade 3 and the green sheet laminate is performed. .

  Furthermore, the cutting blade vertical actuator 25 is operated to lower the subframe member 19. Along with this, the cutting blade support member 27 also descends.

  When the subframe member 519 is lowered from this state, the cutting blade holder 527 continues to descend, both side surfaces near the cutting edge of the cutting blade 3 come into contact with the guides 599a and 599b, and the vicinity of the cutting edge ridge line portion has a predetermined curvature. Can be curved to radius. Further, as the cutting blade holder 27 continues to descend, the cutting blade 3 enters the green sheet laminate 515. The operation of the cutting blade up / down actuator 525 is continued until the cutting edge ridge line portion of the cutting blade 3 cuts the base material (not shown) of the green sheet laminate 515. With the above operation, the cutting process of the planned cutting site in the green sheet laminate 515 is completed. After the end of cutting, the sub-frame member 519 is raised by the vertical movement actuator 525. Thereby, each member operate | moves in the reverse order at the time of a cutting | disconnection, and each structure is arrange | positioned in the state before a cutting | disconnection.

  The above-described steps of bending the guide member, bending the cutting blade holder, determining the cutting position, and the cutting step are sequentially repeated to form a substantially rectangular chip shape as in the first embodiment. Are obtained.

  Guide members 599a and 599b are provided so as to sandwich the cutting blade 3 at a position in the vicinity of the edge of the cutting edge 3 of the cutting blade 3, and the guide members 599a and 599b are curved to a curvature radius calculated with reference to a curvature radius that curves the cutting blade. Thus, it can be ensured that the curvature radius of the edge portion of the cutting edge 3 of the cutting blade 3 becomes a value calculated in advance on the sheet surface. As a result, due to the miniaturization of the green sheet laminate, even when adjacent internal electrodes are very close to each other, compared to the configuration in which the cutting blade is curved only with the cutting blade holder, the internal electrode is missing, Cutting can be performed while preventing breakage and the like with higher accuracy.

  Moreover, although the cutting device 501 of the present Example 2 was set as the structure provided with the cutting blade holder shown to FIG. 4B and 4E, it is set as the structure provided with the modification 1 and the modification 2 of the cutting blade holder shown in FIG.5 and FIG.6. Needless to say, you can.

  Furthermore, in the second embodiment, the cutting blade holder and the cutting blade guide are curved, but only the cutting blade guide may be provided without bending the cutting blade holder.

  In the above embodiment and examples, an X-ray apparatus is used to identify the arrangement of internal electrodes, but the present invention is not limited to this. That is, it goes without saying that other methods may be used as long as the arrangement of the internal electrodes can be recognized over the entire plane in which the green sheet extends.

  Furthermore, the present invention is not limited to the specific configuration of the above-described embodiment or example. For example, the arrangement and driving direction of each component are all defined on the assumption that the green sheet laminate is supported horizontally, but these may be defined in different directions.

  The present invention can be embodied in many forms without departing from its essential characteristics. Therefore, it is needless to say that the above-described embodiment is exclusively for description and does not limit the present invention.

It is a block diagram of an electronic component manufacturing apparatus. It is a figure which shows the state which image | photographed the inside of the green sheet laminated body using the X-ray inspection apparatus. It is a block diagram of the manufacturing apparatus which concerns on an Example. It is a front view of a cutting device. It is sectional drawing along line VIB-VIB of FIG. 4A. It is an enlarged view of the IVC part of FIG. 4B. It is the figure which looked at Drawing 4C from the upper part. It is a top view which shows only a cutting blade holder. It is a top view of the modification 1 of the holding holder of a cutting blade. It is a top view of the modification 2 of the holding holder of a cutting blade. It is a block diagram of the manufacturing apparatus containing a cutting device. It is a front view of a cutting device. It is sectional drawing along line VIIIB-VIIIB of FIG. 8A. It is a perspective view which shows the cutting process in the manufacturing method of the conventional electronic component.

Explanation of symbols

3: Cutting blade, 15: Green sheet laminate, 27, 227, 327: Cutting blade holder, 51: Internal electrode, 93: Cutting blade bending actuator, 493: Cutting blade guide bending actuator, 494a, 494b: Guide Pressing means, 499a, 499b: cutting blade guide member

Claims (5)

A cutting device for a green sheet laminate in which a plurality of internal electrodes are arranged,
A stage on which the green sheet laminate in which the plurality of internal electrodes are arranged;
A cutting blade for cutting the green sheet laminate placed on the stage;
Cutting blade driving means for moving the cutting blade in the thickness direction of the green sheet laminate placed on the stage;
Cutting the green sheet laminate including cutting blade bending means for bending the cutting blade in a plane parallel to a surface on which the green sheet laminate extends along the array of the plurality of internal electrodes. apparatus.   The cutting blade bending means includes a cutting blade holder that holds the cutting blade, and a holder pressing means that presses the cutting blade holder, and presses the cutting blade holder by the holder pressing means via the holder. The cutting apparatus of the green sheet laminated body of Claim 1 which curves the said cutting blade in the surface parallel to the surface where the said green sheet laminated body extends.   The cutting blade bending means further includes a guide member that abuts in the vicinity of the edge of the cutting edge of the cutting blade, and a guide pressing means that presses the guide member, and the guide pressing means presses the guide member. The cutting apparatus of the green sheet laminated body of Claim 2 which curves the said cutting blade in the surface parallel to the surface where the said green sheet laminated body extends through the said guide part.   The cutting blade bending means has a guide member that abuts near the edge of the cutting edge of the cutting blade and a guide pressing means that presses the guide member, and the guide pressing means presses the guide member. The cutting apparatus of the green sheet laminated body of Claim 1 which curves the said cutting blade in the surface parallel to the surface where the said green sheet laminated body extends through the said guide part. A cutting method of a green sheet laminate, which cuts a green sheet laminate in which a plurality of internal electrodes are arranged,
Preparing a green sheet laminate in which the plurality of internal electrodes are arranged;
Detecting an array of the plurality of internal electrodes;
Along the arrangement of the plurality of internal electrodes, the step of bending the cutting blade in a plane parallel to the surface on which the green sheet laminate extends, and
Cutting along a predetermined cutting position of the green sheet by the curved cutting blade;
A method for cutting a green sheet laminate comprising:

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