JP4912743B2 - X-ray tube and X-ray irradiation apparatus using the same - Google Patents

X-ray tube and X-ray irradiation apparatus using the same Download PDF

Info

Publication number
JP4912743B2
JP4912743B2 JP2006139113A JP2006139113A JP4912743B2 JP 4912743 B2 JP4912743 B2 JP 4912743B2 JP 2006139113 A JP2006139113 A JP 2006139113A JP 2006139113 A JP2006139113 A JP 2006139113A JP 4912743 B2 JP4912743 B2 JP 4912743B2
Authority
JP
Japan
Prior art keywords
window
ray
ray tube
vacuum envelope
face plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006139113A
Other languages
Japanese (ja)
Other versions
JP2007311185A (en
Inventor
知幸 岡田
澄 藤田
徹 山本
竜弥 仲村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Original Assignee
Hamamatsu Photonics KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to JP2006139113A priority Critical patent/JP4912743B2/en
Priority to PCT/JP2007/057567 priority patent/WO2007135811A1/en
Priority to CN2007800180924A priority patent/CN101449353B/en
Priority to KR1020087023846A priority patent/KR101396026B1/en
Priority to TW096115392A priority patent/TWI416574B/en
Publication of JP2007311185A publication Critical patent/JP2007311185A/en
Application granted granted Critical
Publication of JP4912743B2 publication Critical patent/JP4912743B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H01J35/18—Windows
    • H01J35/186—Windows used as targets or X-ray converters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/062—Cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/06—Cathode assembly
    • H01J2235/068—Multi-cathode assembly
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/163—Vessels shaped for a particular application
    • H01J2235/164—Small cross-section, e.g. for entering in a body cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/18—Windows, e.g. for X-ray transmission

Landscapes

  • X-Ray Techniques (AREA)

Description

本発明は、Ｘ線を照射させるＸ線管に関し、特に、広範囲にＸ線を照射するのに適した構造を有するＸ線管、及びこれを用いたＸ線照射装置に関するものである。   The present invention relates to an X-ray tube for irradiating X-rays, and particularly to an X-ray tube having a structure suitable for irradiating X-rays over a wide range and an X-ray irradiation apparatus using the X-ray tube.

Ｘ線管は、高真空の管内において電子源を用いて電子を発生させ、その電子をターゲットに入射させることによってＸ線を発生する装置である。このようなＸ線管としては、例えば、下記特許文献１に示されたＸ線装置がある。このＸ線装置では、平面状陰極から放出された電子線がターゲットである平面状陽極に衝突し、平面状陽極から発生したＸ線が真空容器の側面に設けられた取り出し窓を通して外部に取り出される。
特開２００３−２８８８５３号公報 An X-ray tube is an apparatus that generates X-rays by generating electrons using an electron source in a high vacuum tube and causing the electrons to enter a target. An example of such an X-ray tube is an X-ray apparatus disclosed in Patent Document 1 below. In this X-ray apparatus, an electron beam emitted from a planar cathode collides with a planar anode as a target, and X-rays generated from the planar anode are extracted outside through an extraction window provided on the side surface of the vacuum vessel. .
JP 2003-288853 A

ところで、上述したように筐体内に平面状の電子源が保持された構造を有するＸ線管は、電子源及びターゲットを大型化することでＸ線照射範囲の大面積化が容易である。ここで、Ｘ線を広範囲に渡って外部に照射させるためには、電子源を大型化するのに伴って取り出し窓も大きくする必要がある。しかしながら、取り出し窓を大型化すると、取り出し窓が破損し易くなる。   Incidentally, as described above, an X-ray tube having a structure in which a planar electron source is held in a casing can easily increase the area of the X-ray irradiation range by increasing the size of the electron source and the target. Here, in order to irradiate the X-rays to the outside over a wide range, it is necessary to enlarge the extraction window as the electron source becomes larger. However, when the extraction window is enlarged, the extraction window is easily damaged.

そこで、取り出し窓の強度を上げるために、取り出し窓を分割して設けることも考えられるが、この場合は、大面積の被照射物に照射されるＸ線の強度にムラが生じ易いという問題がある。   In order to increase the strength of the extraction window, it may be possible to divide the extraction window. However, in this case, there is a problem that the intensity of X-rays irradiated to an irradiation object having a large area is likely to be uneven. is there.

そこで、本発明は、かかる課題に鑑みて為されたものであり、Ｘ線照射範囲を拡げた場合であっても装置の強度を維持することができ、均一なＸ線照射を実現するＸ線管を提供することを目的とする。   Therefore, the present invention has been made in view of such problems, and even when the X-ray irradiation range is expanded, the strength of the apparatus can be maintained, and X-ray that realizes uniform X-ray irradiation. The purpose is to provide a tube.

上記課題を解決するため、本発明のＸ線管は、電子を放射する電子源と、電子源からの電子の入射に応じてＸ線を発生するターゲットとが真空外囲器内に設けられるとともに、ターゲットから発生したＸ線を外部に取り出すためのＸ線取出窓が真空外囲器に設けられたＸ線管であって、Ｘ線取出窓は、真空外囲器に設けられた１以上の窓部を含む窓ユニットが、所定の方向に沿って少なくとも２列で複数配列されて構成され、複数の窓ユニットは、隣接する列間で所定の方向に沿って千鳥配列となるように配置されている。   In order to solve the above problems, an X-ray tube according to the present invention includes an electron source that emits electrons and a target that generates X-rays in response to the incidence of electrons from the electron source in a vacuum envelope. An X-ray extraction window for extracting X-rays generated from the target to the outside is an X-ray tube provided in the vacuum envelope, and the X-ray extraction window is one or more provided in the vacuum envelope. A plurality of window units including window portions are arranged in at least two rows along a predetermined direction, and the plurality of window units are arranged in a staggered manner along a predetermined direction between adjacent rows. ing.

このようなＸ線管によれば、真空外囲器内の電子源から放出された電子がターゲットに入射することによってＸ線が発生し、このＸ線は真空外囲器に設けられたＸ線取出窓を通じて外部に取り出される。このＸ線取出窓は、複数の窓部で分割することによって、Ｘ線取出窓全体を大型化してもその強度を向上させることができるとともに、１以上の窓部を有する窓ユニットが所定の方向に沿って２列以上で千鳥配列することによって、所定の方向と垂直な方向に沿ったＸ線の照射強度をＸ線照射領域全体に亘って均一にすることができる。   According to such an X-ray tube, X-rays are generated when electrons emitted from the electron source in the vacuum envelope enter the target, and these X-rays are X-rays provided in the vacuum envelope. It is taken out through the take-out window. By dividing the X-ray extraction window into a plurality of window portions, the strength of the X-ray extraction window can be improved even if the entire X-ray extraction window is enlarged, and a window unit having one or more window portions is in a predetermined direction. As a result, the irradiation intensity of X-rays along the direction perpendicular to the predetermined direction can be made uniform over the entire X-ray irradiation region.

窓部は、真空外囲器に形成された貫通孔と貫通孔を覆うように真空外囲器に設けられた窓材とを有し、窓材は、窓ユニットが配列された列間で分割して設けられていることが好ましい。かかるＸ線取出窓を備えれば、窓材毎が封止する領域を小さくすることができるので、貫通孔を覆う窓材の破損を防止することができる。   The window portion has a through hole formed in the vacuum envelope and a window material provided in the vacuum envelope so as to cover the through hole, and the window material is divided between the rows in which the window units are arranged. Are preferably provided. If such an X-ray extraction window is provided, the area sealed by each window material can be reduced, so that the window material covering the through hole can be prevented from being damaged.

また、窓材は、所定の方向において窓ユニット毎に分割して設けられていることも好ましい。この場合、窓材毎が封止する領域をさらに小さくすることができるので、窓材の破損をより防止することができる。   Moreover, it is also preferable that the window material is provided separately for each window unit in a predetermined direction. In this case, since the area | region which each window material seals can be made further smaller, damage to a window material can be prevented more.

また、窓部は、スリット状に形成されていることも好ましい。かかる構成とすれば、所定の方向に沿ったＸ線の照射強度をより均一にすることができる。   Moreover, it is also preferable that the window part is formed in slit shape. With this configuration, the irradiation intensity of X-rays along a predetermined direction can be made more uniform.

また、窓部は、円形状に形成されていることも好ましい。こうすれば、真空封止領域の形状が円形となるため、さらにＸ線取出窓の破損を防止することができる。   Moreover, it is also preferable that the window part is formed in circular shape. By doing so, the shape of the vacuum sealing region is circular, and further damage to the X-ray extraction window can be prevented.

さらに、貫通孔は、真空外囲器の外側に向かって広がるように形成され、窓材は、真空外囲器の内側から貫通孔を覆うように設けられ、ターゲットは、窓材の内側に設けられていることも好ましい。この場合、ターゲットから発生したＸ線を外部に効果的に取り出すことができるとともに、窓材を貫通孔の内側に配置することにより、窓材への接触等によるＸ線取出窓の破損の可能性を低減させることができる。   Furthermore, the through hole is formed so as to expand toward the outside of the vacuum envelope, the window material is provided so as to cover the through hole from the inside of the vacuum envelope, and the target is provided inside the window material. It is also preferred that In this case, X-rays generated from the target can be effectively extracted to the outside, and by arranging the window material inside the through hole, the X-ray extraction window may be damaged due to contact with the window material, etc. Can be reduced.

またさらに、貫通孔は、真空外囲器の外側に向かって狭くなるように形成され、窓材は、真空外囲器の外側から貫通孔を覆うように設けられ、ターゲットは、窓材の内側に設けられていることも好ましい。かかる構成を採れば、電子がターゲットへ入射する効率を上げることができる。   Furthermore, the through hole is formed so as to narrow toward the outside of the vacuum envelope, the window material is provided so as to cover the through hole from the outside of the vacuum envelope, and the target is disposed inside the window material. It is also preferable to be provided. By adopting such a configuration, the efficiency with which electrons enter the target can be increased.

さらにまた、真空外囲器は、長尺状に形成されており、複数の窓ユニットは、真空外囲器の長手方向に沿って配列されていることも好ましい。このような構成により、Ｘ線をより大きな幅で照射することができる。   Furthermore, it is also preferable that the vacuum envelope is formed in a long shape, and the plurality of window units are arranged along the longitudinal direction of the vacuum envelope. With such a configuration, X-rays can be irradiated with a larger width.

或いは、本発明のＸ線照射装置は、上述したＸ線管と、Ｘ線管と被照射物とを、Ｘ線取出窓の前方において所定の方向に対して交わる方向に沿って相対移動させるガイド部とを備える。このようなＸ線照射装置によれば、大面積を有する被照射物に対してより均一にＸ線を照射することができる。   Alternatively, the X-ray irradiation apparatus of the present invention is a guide for relatively moving the above-described X-ray tube, and the X-ray tube and the irradiated object along a direction intersecting a predetermined direction in front of the X-ray extraction window. A part. According to such an X-ray irradiation apparatus, X-rays can be irradiated more uniformly on an object having a large area.

本発明によれば、Ｘ線照射範囲を拡げた場合であっても装置の強度を維持することができ、均一なＸ線照射を実現するＸ線管を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, even if it is a case where the X-ray irradiation range is expanded, the intensity | strength of an apparatus can be maintained and the X-ray tube which implement | achieves uniform X-ray irradiation can be provided.

以下、図面を参照しつつ本発明に係るＸ線管の好適な実施形態について詳細に説明する。なお、図面の説明においては同一又は相当部分には同一符号を付し、重複する説明を省略する。また、各図面は説明用のために作成されたものであり、説明の対象部位を特に強調するように描かれている。そのため、図面における各部材の寸法比率は、必ずしも実際のものとは一致しない。   Hereinafter, preferred embodiments of an X-ray tube according to the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same or corresponding parts are denoted by the same reference numerals, and redundant description is omitted. Each drawing is made for the purpose of explanation, and is drawn so as to particularly emphasize the target portion of the explanation. Therefore, the dimensional ratio of each member in the drawings does not necessarily match the actual one.

図１は、本発明の好適な一実施形態であるＸ線管１の平面図、図２は、図１のＸ線管１の上部面板を取り除いた状態を示す平面図、図３は、図１のIII−III線に沿った断面図、図４は、図１のIV−IV線に沿った断面図である。   FIG. 1 is a plan view of an X-ray tube 1 according to a preferred embodiment of the present invention, FIG. 2 is a plan view showing a state in which an upper face plate of the X-ray tube 1 of FIG. 1 is removed, and FIG. 1 is a sectional view taken along line III-III, and FIG. 4 is a sectional view taken along line IV-IV in FIG.

これらの図に示すように、Ｘ線管１は、長尺状の平板ガラス等の絶縁部材からなる上部面板２及び下部面板３と、ガラス等の絶縁部材からなる四角柱状の側壁４とから構成される真空外囲器５を有している。上部面板２、下部面板３、及び側壁４は、ガラスによって形成され、上部面板２及び下部面板３がフリットガラス等により側壁４の開口端と封着されることにより真空外囲器５の内部が気密に保たれている。   As shown in these drawings, the X-ray tube 1 includes an upper face plate 2 and a lower face plate 3 made of an insulating member such as a long flat glass, and a square columnar side wall 4 made of an insulating member such as glass. The vacuum envelope 5 is provided. The upper face plate 2, the lower face plate 3, and the side wall 4 are formed of glass, and the upper face plate 2 and the lower face plate 3 are sealed with the opening end of the side wall 4 by frit glass or the like, whereby the inside of the vacuum envelope 5 is formed. It is kept airtight.

この真空外囲器５の一部を構成する下部面板３の内面３ａ上には、表面に炭素系電子放出材料６ａ，６ｂ，６ｃがそれぞれ塗布された帯状の金属膜７ａ，７ｂ，７ｃによって構成される電子源８ａ，８ｂ，８ｃが配置されている（図２及び図４参照）。それぞれの電子源８ａ，８ｂ，８ｃにおいては、金属膜７ａ，７ｂ，７ｃの両端部を除く上面の全体に渡って炭素系電子放出材料６ａ，６ｂ，６ｃが塗布されている。金属膜７ａ，７ｂ，７ｃには、それぞれ、外部から金属膜７ａ，７ｂ，７ｃの電圧を設定するためピンであって、真空外囲器５から外部に貫通して設けられた外部接続用ピン９ａ，９ｂ，９ｃが電気的に接続されている。   On the inner surface 3a of the lower face plate 3 constituting a part of the vacuum envelope 5, it is constituted by strip-shaped metal films 7a, 7b, 7c having carbon-based electron emission materials 6a, 6b, 6c applied on the surface, respectively. The electron sources 8a, 8b and 8c to be used are arranged (see FIGS. 2 and 4). In each of the electron sources 8a, 8b, and 8c, carbon-based electron emission materials 6a, 6b, and 6c are applied over the entire upper surface excluding both ends of the metal films 7a, 7b, and 7c. The metal films 7a, 7b, and 7c are pins for setting the voltages of the metal films 7a, 7b, and 7c from the outside, and are external connection pins that are provided through the vacuum envelope 5 to the outside. 9a, 9b, 9c are electrically connected.

ここで、炭素系電子放出材料６ａ，６ｂ，６ｃは、カーボンナノチューブ、カーボンナノウォール、カーボンナノファイバ、ダイヤモンド、ダイヤモンドライクカーボン等に代表され、電界の作用によって電子を外部に放出する性質を有するいわゆる電界放出型の電子放出材料である。金属膜７ａ，７ｂ，７ｃへの炭素系電子放出材料の被覆方法としては、ＣＶＤ法、スプレー法、印刷法等の方法を用いることができる。   Here, the carbon-based electron emission materials 6a, 6b, and 6c are represented by carbon nanotubes, carbon nanowalls, carbon nanofibers, diamond, diamond-like carbon, and the like, and have a property of emitting electrons to the outside by the action of an electric field. It is a field emission type electron emission material. As a method for coating the metal film 7a, 7b, 7c with the carbon-based electron emission material, a CVD method, a spray method, a printing method, or the like can be used.

これらの電子源８ａ，８ｂ，８ｃは、側壁４と内面３ａとによって形成される３つの直線状の溝部１６ａ，１６ｂ，１６ｃ内にそれぞれ配置される（図４）。すなわち、側壁４においては下部面板３に向けて貫通する互いに平行な３つのスリットと内面３ａによって溝部１６ａ，１６ｂ，１６ｃが下部面板３の長手方向に沿って形成され、金属膜７ａ，７ｂ，７ｃは、それぞれ、溝部１６ａ，１６ｂ，１６ｃの底面となる内面３ａに沿って成膜されている。   These electron sources 8a, 8b and 8c are respectively disposed in three linear grooves 16a, 16b and 16c formed by the side wall 4 and the inner surface 3a (FIG. 4). That is, in the side wall 4, groove portions 16a, 16b, and 16c are formed along the longitudinal direction of the lower face plate 3 by three parallel slits penetrating toward the lower face plate 3 and the inner face 3a, and the metal films 7a, 7b, and 7c. Are formed along the inner surface 3a which is the bottom surface of the groove portions 16a, 16b and 16c.

また、側壁４における溝部１６ａ，１６ｂ，１６ｃを挟む内面４ａ上には、電子源８ａ，８ｂ，８ｃと並列に帯状の金属膜である引出電極１１が複数布設されている。この引出電極１１は、各電子源８ａ，８ｂ，８ｃを両側から挟むように分割して配置され、電子源８ａ，８ｂ，８ｃの長手方向に沿ってさらに２分割されている。さらに、引出電極１１には、電子源８ａ，８ｂ，８ｃを挟んで設けられた１組の電極毎に外部接続用ピン１２が接続されている。   On the inner surface 4a sandwiching the grooves 16a, 16b, and 16c in the side wall 4, a plurality of extraction electrodes 11 that are band-like metal films are provided in parallel with the electron sources 8a, 8b, and 8c. The extraction electrode 11 is divided and arranged so as to sandwich the electron sources 8a, 8b, and 8c from both sides, and is further divided into two along the longitudinal direction of the electron sources 8a, 8b, and 8c. Furthermore, external connection pins 12 are connected to the extraction electrode 11 for each set of electrodes provided with the electron sources 8a, 8b, and 8c interposed therebetween.

上部面板２は、電子源８ａ，８ｂ，８ｃに対向する位置に複数のスリット状の貫通孔１３が形成されることによって、Ｘ線を外部に取り出すためのＸ線取出窓として機能する（図１）。貫通孔１３は、上部面板２の真空側の内面の開口から外面の開口に向かって狭くなるように、断面台形状に穿たれて形成されている（図４）。   The upper face plate 2 functions as an X-ray extraction window for extracting X-rays to the outside by forming a plurality of slit-like through holes 13 at positions facing the electron sources 8a, 8b, and 8c (FIG. 1). ). The through-hole 13 is formed in a trapezoidal cross section so as to become narrower from the opening on the inner surface on the vacuum side of the upper face plate 2 toward the opening on the outer surface (FIG. 4).

これらの貫通孔１３は、それぞれの電子源８ａ，８ｂ，８ｃに対向して、その長手方向（所定の方向）に沿って３列になるように、各列で一直線上に複数、等間隔で配列されて形成されている。その結果、配列方向において隣接する２つの貫通孔１３からなる窓ユニット１３Ａと、１つの貫通孔１３からなる窓ユニット１３Ｂとが構成されている。電子源８ａ，８ｃに対向する両端の列においては、２つの窓ユニット１３Ａが１つの窓ユニット１３Ｂを挟むように配置され、電子源８ｂに対向する中心の列においては、２つの窓ユニット１３Ａが隣接して配置されている。窓ユニット１３Ａ，１３Ｂは、隣接する列間で電子源８ａ，８ｂ，８ｃの長手方向に沿って千鳥配列となるように、具体的には、上部面板２の平面上における、電子源８ａ，８ｂ，８ｃの長手方向に沿った窓ユニット１３Ａ，１３Ｂの配列方向に垂直な方向から見て、所定の列で電子源８ａ，８ｂ，８ｃの長手方向に沿って隣接した窓ユニット１３Ａと１３Ｂ（又は、窓ユニット１３Ａ同士）の境界に対応する位置に、所定の列に隣接した列の窓ユニット１３Ａ（又は、窓ユニット１３Ｂ）が、所定の列の窓ユニット１３Ａと１３Ｂ（又は、窓ユニット１３Ａ同士）の両方に重なるように配置されている。つまり、所定の列における連続する窓ユニットの境界が、隣接する列における連続する窓ユニットの境界と一致しないように、互い違いに配置されている。また、窓ユニット１３Ａ，１３Ｂにおける貫通孔１３も、窓ユニット１３Ａ，１３Ｂと同様の配置になるように形成されている。   These through holes 13 face each electron source 8a, 8b, 8c and are arranged in a plurality of lines at equal intervals in a straight line in each row so as to form three rows along the longitudinal direction (predetermined direction). It is arranged and formed. As a result, a window unit 13A composed of two through holes 13 adjacent in the arrangement direction and a window unit 13B composed of one through hole 13 are configured. Two window units 13A are arranged so as to sandwich one window unit 13B in the columns at both ends facing the electron sources 8a and 8c, and two window units 13A are arranged in the center column facing the electron sources 8b. Adjacent to each other. Specifically, the window units 13A, 13B are arranged in a staggered arrangement along the longitudinal direction of the electron sources 8a, 8b, 8c between adjacent columns, specifically, the electron sources 8a, 8b on the plane of the upper face plate 2. , 8c along the longitudinal direction of the electron sources 8a, 8b, 8c in a predetermined row as viewed from a direction perpendicular to the arrangement direction of the window units 13A, 13B along the longitudinal direction of the window units 13A, 13B (or Window units 13A (or window units 13B) adjacent to a predetermined column at positions corresponding to the boundary between the window units 13A and 13B (or between the window units 13A). ) Are arranged so as to overlap both. That is, the boundary of the continuous window unit in a predetermined row is alternately arranged so as not to coincide with the boundary of the continuous window unit in the adjacent row. Further, the through holes 13 in the window units 13A and 13B are also formed to have the same arrangement as the window units 13A and 13B.

また、上部面板２の外側表面には、窓ユニット１３Ａ，１３Ｂ毎に分割された窓材としてのシリコン薄膜１４が、貫通孔１３を覆うように陽極接合によって接合されており、シリコン薄膜１４と貫通孔１３とでＸ線を外部に透過させる窓部が構成される。つまり、このシリコン薄膜１４は、窓部が配列された列間で分割されると同時に、配列方向においても分割されて設けられている。なお、窓材としては、シリコン以外にベリリウム等の他のＸ線透過性を有する材料を用いてもよい。このようなシリコン薄膜１４の存在により、真空外囲器５の内部の気密封止が実現される。   Further, a silicon thin film 14 as a window material divided for each of the window units 13A and 13B is joined to the outer surface of the upper face plate 2 by anodic bonding so as to cover the through holes 13, and penetrates the silicon thin film 14 and the silicon thin film 14. The hole 13 constitutes a window portion that transmits X-rays to the outside. That is, the silicon thin film 14 is divided between the rows in which the window portions are arranged, and is also divided in the arrangement direction. As the window material, other materials having X-ray transparency such as beryllium in addition to silicon may be used. The presence of the silicon thin film 14 realizes hermetic sealing inside the vacuum envelope 5.

さらに、シリコン薄膜１４の内側、つまり真空側面の貫通孔１３から露出する部位には、タングステン等のターゲット材１５が蒸着により形成されている（図４）。このターゲット材１５は、電子源８ａ，８ｂ，８ｃからの電子の入射に応じてＸ線を発生させる性質を有する。なお、貫通孔１３の内壁も含めて、上部面板２の真空側にもタングステン等の導電性部材が蒸着されている。電子源８からの電子は、絶縁部材である上部面板２にも入射するため、上部面板２が帯電し、真空容器５内に形成される電界に影響を与えてしまう場合がある。そのため、導電性部材で電子入射側を覆うことによって、帯電を防止している。なお、本実施形態においては、ターゲット材１５と一体に蒸着形成されている。また、ターゲット材１５への電圧供給も、真空外囲器５から外部に貫通して設けられた外部接続用ピン１７と接触する導電性部材を介して行われる。   Further, a target material 15 such as tungsten is formed by vapor deposition inside the silicon thin film 14, that is, in a portion exposed from the through hole 13 on the vacuum side surface (FIG. 4). This target material 15 has the property of generating X-rays in response to the incidence of electrons from the electron sources 8a, 8b, 8c. A conductive member such as tungsten is deposited on the vacuum side of the upper face plate 2 including the inner wall of the through hole 13. Since electrons from the electron source 8 are also incident on the upper face plate 2 which is an insulating member, the upper face plate 2 may be charged and affect the electric field formed in the vacuum vessel 5 in some cases. Therefore, charging is prevented by covering the electron incident side with a conductive member. In the present embodiment, vapor deposition is formed integrally with the target material 15. In addition, the voltage supply to the target material 15 is also performed through a conductive member that comes into contact with the external connection pins 17 provided so as to penetrate from the vacuum envelope 5 to the outside.

以上説明したＸ線管１においては、真空外囲器５内の電子源８ａ，８ｂ，８ｃから放出された電子がターゲット材１５に入射することによってＸ線が発生し、このＸ線は真空外囲器５に設けられたＸ線取出窓を通じて外部に取り出される。このＸ線取出窓は、貫通孔１３を有する窓ユニット１３Ａ，１３Ｂが上部面板２の長手方向の方向に沿って２列以上で千鳥配列されたものであるので、Ｘ線取出窓全体を大型化した場合であっても、貫通孔１３で複数の領域に分割することによって実質的にＸ線取出窓全体の面積を保ちながらも窓ユニット内におけるシリコン薄膜１４の保持領域を増やすことができる結果、シリコン薄膜１４で覆われたＸ線取出窓の強度及び耐久度を向上させることができる。   In the X-ray tube 1 described above, X-rays are generated when electrons emitted from the electron sources 8a, 8b, and 8c in the vacuum envelope 5 are incident on the target material 15, and the X-rays are out of vacuum. It is taken out to the outside through an X-ray extraction window provided in the envelope 5. In this X-ray extraction window, since the window units 13A and 13B having the through holes 13 are arranged in a staggered manner in two or more rows along the longitudinal direction of the upper face plate 2, the entire X-ray extraction window is enlarged. Even if it is the case, it is possible to increase the holding region of the silicon thin film 14 in the window unit while substantially maintaining the entire area of the X-ray extraction window by dividing into a plurality of regions by the through hole 13, The strength and durability of the X-ray extraction window covered with the silicon thin film 14 can be improved.

また、真空外囲器５の長手方向と垂直な方向に亘るＸ線の照射強度をＸ線照射領域全体で均一にすることができ、被照射物をＸ線取出窓の面に平行に、かつ真空外囲器５の短手方向に向けて移動させることによって、大面積を有する被照射物において照射ムラを生じさせることなく全体に均一にＸ線を照射することができる。特に、Ｘ線管に被照射物を近接させてＸ線を照射する場合にはＸ線の指向性が高くなるので、Ｘ線管１を用いることによる照射強度の均一化の効果が大きい。   Further, the X-ray irradiation intensity in the direction perpendicular to the longitudinal direction of the vacuum envelope 5 can be made uniform over the entire X-ray irradiation region, the object to be irradiated is parallel to the surface of the X-ray extraction window, and By moving the vacuum envelope 5 in the short direction, it is possible to uniformly irradiate the whole object with X-rays without causing irradiation unevenness in the irradiated object having a large area. In particular, when an X-ray tube is irradiated with an object to be irradiated in proximity to the X-ray tube, the directivity of the X-ray is increased, so that the effect of making the irradiation intensity uniform by using the X-ray tube 1 is great.

また、シリコン薄膜１４が、窓ユニット１３Ａ，１３Ｂが配列された列間で分割して設けられており、さらに、真空外囲器５の長手方向においても分割して設けられている。そのため、１つのシリコン薄膜１４毎が封止する領域を小さくすることができるので、シリコン薄膜１４にかかる力も小さくなり、製造時や使用時における貫通孔１３を覆う窓材１４の破損を防止することができる。また、シリコン薄膜１４の面積が大きくなるに従って、全体に均質なシリコン薄膜１４を得るのが難しくなる傾向があるが、分割により面積を小さくすれば、全体に均質なシリコン薄膜１４を得やすくなる。つまり、シリコン薄膜１４をシリコンウェハ等から作製する際の製造効率も上がるので、容易にＸ線取出窓を作製することができる。   Further, the silicon thin film 14 is divided and provided between the rows in which the window units 13 </ b> A and 13 </ b> B are arranged, and is further provided in the longitudinal direction of the vacuum envelope 5. Therefore, since the area | region which one silicon thin film 14 seals can be made small, the force concerning the silicon thin film 14 also becomes small, and the failure | damage of the window material 14 which covers the through-hole 13 at the time of manufacture and use is prevented. Can do. Further, as the area of the silicon thin film 14 increases, it tends to be difficult to obtain a uniform silicon thin film 14 as a whole. However, if the area is reduced by division, it becomes easier to obtain a uniform silicon thin film 14 as a whole. That is, since the manufacturing efficiency when the silicon thin film 14 is manufactured from a silicon wafer or the like is increased, the X-ray extraction window can be easily manufactured.

また、貫通孔１３は、真空外囲器５の外側に向かって狭くなるように形成されているので、電子源８ａ，８ｂ，８ｃから放射された電子を効率よくターゲット材１５へ入射することができるのに加え、シリコン薄膜１４が上部面板２の外側表面に設けられているために、シリコン薄膜１４から取り出されたＸ線が上部面板２に吸収されることなく直接照射することができるので、外部に効果的にＸ線を照射させることができる。   Further, since the through-hole 13 is formed so as to become narrower toward the outside of the vacuum envelope 5, the electrons emitted from the electron sources 8a, 8b, and 8c can be efficiently incident on the target material 15. In addition, since the silicon thin film 14 is provided on the outer surface of the upper face plate 2, X-rays extracted from the silicon thin film 14 can be directly irradiated without being absorbed by the upper face plate 2. X-rays can be effectively irradiated to the outside.

次に、Ｘ線管１を用いたＸ線照射装置である静電気除電装置１０１の構成について説明する。図５は、静電気除電装置１０１の構成を示す斜視図である。同図に示すように、静電気除電装置１０１は、帯状のビニールフィルム（被照射物）１１０を長手方向に進行させるガイド部であるローラ１２０，１２１と、ビニールフィルム１１０の表面にＸ線取出窓を対面させて、ビニールフィルム１１０の進行方向が真空外囲器５の長手方向に垂直な方向になるように配置されたＸ線管１と、Ｘ線管１及びビニールフィルム１１０のＸ線照射部分を覆い外部へのＸ線の漏れを防止するＸ線遮蔽キャビネット１４０とを備えている。Ｘ線遮蔽キャビネット１４０の内部には空気またはガスが充満されている。   Next, the structure of the static electricity removal apparatus 101 which is an X-ray irradiation apparatus using the X-ray tube 1 will be described. FIG. 5 is a perspective view showing a configuration of the static electricity eliminating apparatus 101. As shown in the figure, the static electricity eliminating apparatus 101 includes rollers 120 and 121 which are guide portions for causing a belt-shaped vinyl film (object to be irradiated) 110 to advance in the longitudinal direction, and an X-ray extraction window on the surface of the vinyl film 110. The X-ray tube 1 that is disposed so that the traveling direction of the vinyl film 110 is perpendicular to the longitudinal direction of the vacuum envelope 5 and the X-ray irradiated portions of the X-ray tube 1 and the vinyl film 110 are arranged. An X-ray shielding cabinet 140 that prevents X-ray leakage to the outside of the cover is provided. The X-ray shielding cabinet 140 is filled with air or gas.

このような静電気除電装置１０１においては、電源装置１５０からの給電によってＸ線管１から出射したＸ線は、ローラ１２０，１２１の回転によって進行するビニールフィルム１１０の上面に照射される。Ｘ線の照射によってビニールフィルム１１０の上面に接する空気等がイオン化され、ビニールフィルム１１０の上面に帯電した電荷と結合する。このため、ビニールフィルム１１０の上面が除電される。ビニールフィルム１１０の上面に到達したＸ線は、ビニールフィルム１１０を透過して、ビニールフィルム１１０の裏面に接する空気等もイオン化する。イオン化によって生じた電荷は、ビニールフィルム１１０の裏面に帯電した電荷と結合し、ビニールフィルム１１０の裏面も除電される。ここで、ビニールフィルム１１０が通過する範囲をカバーするようにＸ線管１を配置することで、大面積を有するビニールフィルム等の被照射物において照射ムラなくより均一にＸ線を照射することができ、効果的に除電することができる。特に、被照射物の進行方向に対して、窓ユニットの列が垂直に交わるようにＸ線管１を配置している。Ｘ線管１は、Ｘ線取出窓を構成する窓ユニットが千鳥配列となるように配列されているため、被照射物に最初にＸ線を照射する窓ユニットの列における、連続した窓ユニット間の境界部分に対しては、次いで被照射物にＸ線を照射する列の窓ユニットが確実に照射することができ、大面積であっても、もれなく照射及び除電することができる。   In such an electrostatic charge eliminating device 101, X-rays emitted from the X-ray tube 1 by the power supply from the power supply device 150 are applied to the upper surface of the vinyl film 110 that travels as the rollers 120 and 121 rotate. Air or the like in contact with the upper surface of the vinyl film 110 is ionized by irradiation with X-rays, and is combined with the electric charge charged on the upper surface of the vinyl film 110. For this reason, the upper surface of the vinyl film 110 is neutralized. The X-rays that have reached the top surface of the vinyl film 110 pass through the vinyl film 110 and ionize air that contacts the back surface of the vinyl film 110. The charge generated by the ionization is combined with the charge charged on the back surface of the vinyl film 110, and the back surface of the vinyl film 110 is also discharged. Here, by arranging the X-ray tube 1 so as to cover the range through which the vinyl film 110 passes, it is possible to irradiate X-rays more uniformly without irradiation unevenness on an irradiated object such as a vinyl film having a large area. Can be effectively eliminated. In particular, the X-ray tube 1 is arranged such that the rows of window units intersect perpendicularly with the traveling direction of the irradiated object. Since the X-ray tubes 1 are arranged so that the window units constituting the X-ray extraction window are in a staggered arrangement, the X-ray tubes 1 are arranged between successive window units in a row of window units that first irradiate the irradiated object with X-rays. Next, the window unit in the row that irradiates the irradiated object with X-rays can surely irradiate the boundary portion, and even if it has a large area, it can be irradiated and discharged without any leakage.

なお、本発明は、前述した実施形態に限定されるものではない。例えば、Ｘ線管１の上部面板２に設けられた窓部の形状としては様々な形状を採ることができる。   In addition, this invention is not limited to embodiment mentioned above. For example, various shapes can be adopted as the shape of the window provided on the upper face plate 2 of the X-ray tube 1.

図６は、本発明の変形例であるＸ線管２１の平面図、図７は、図６のＸ線管２１のVII−VII線に沿った断面図である。これらの図に示すように、Ｘ線管１と同様に、１つ貫通孔３３を含む窓ユニット３３Ａと２つの貫通孔３３を含む窓ユニット３３Ｂとが、上部面板２の長手方向に沿って３列で千鳥配列となるように形成されている。この貫通孔３３は、上部面板２の真空側の内面の開口から外面の開口に向かって広がるように、断面台形状に穿たれて形成されている（図７）。窓材であるシリコン薄膜３４は、貫通孔３３を内側（真空側）から覆うように上部面板２の内面に沿って接合されており、このシリコン薄膜３４の内面、すなわち、真空側にある電子源８ａ，８ｂ，８ｃと向かい合う面には、ほぼ全面にターゲット材３５が形成されている。   FIG. 6 is a plan view of an X-ray tube 21 which is a modification of the present invention, and FIG. 7 is a cross-sectional view taken along the line VII-VII of the X-ray tube 21 of FIG. As shown in these drawings, similarly to the X-ray tube 1, a window unit 33 A including one through hole 33 and a window unit 33 B including two through holes 33 are arranged along the longitudinal direction of the upper face plate 2. It is formed in a staggered arrangement in rows. The through-hole 33 is formed by being drilled in a trapezoidal cross section so as to spread from the opening on the inner surface on the vacuum side of the upper face plate 2 toward the opening on the outer surface (FIG. 7). A silicon thin film 34 as a window material is bonded along the inner surface of the upper face plate 2 so as to cover the through-hole 33 from the inner side (vacuum side), and an electron source on the inner surface of the silicon thin film 34, that is, on the vacuum side. A target material 35 is formed on almost the entire surface facing the surfaces 8a, 8b and 8c.

このようなＸ線管２１では、上部面板２の外側表面から奥まってシリコン薄膜３４が配置されているので、接触等の外部要因によるシリコン薄膜３４の破損等を防止することができるとともに、シリコン薄膜３４の上部面板２との接合部分が大気中にさらされないために、外部要因による接合部分の劣化が少ない。   In such an X-ray tube 21, since the silicon thin film 34 is disposed so as to be recessed from the outer surface of the upper face plate 2, damage to the silicon thin film 34 due to external factors such as contact can be prevented, and the silicon thin film 34 is not exposed to the atmosphere, and therefore the deterioration of the joint due to external factors is small.

また、Ｘ線取出窓の個々の窓ユニットにおける貫通孔の配置としては、様々な配置をとることが可能である。具体的には、図８に示す窓ユニット４３のように、円形に形成された複数の貫通孔が１列に並ぶように形成され、窓ユニット４３の隣接する列間で窓ユニット及び貫通孔が千鳥配列にされていてもよい。この場合、貫通孔の縁部と窓材との接触が円形状になっているので、接触部における力の分散が均一になりやすく、窓材が破損しにくい。また、図９に示す窓ユニット５３のように、円形に形成された複数の貫通孔を２列で配置し、２列をまとめて窓ユニットとしての１列としてもよい。この場合、窓ユニット中において、貫通孔と窓材を支持する部分とをバランスよく配置することが可能となる。また、図１０に示す窓ユニット６３のように、貫通孔自体が窓ユニット６３の中で千鳥配列にされていてもよい。この場合、窓ユニット内においても、均一なＸ線照射が可能となる。さらには、図１１に示す窓ユニット７３のように、スリット状に形成された貫通孔を２列で並ぶように形成し、２列をまとめて窓ユニットとしての１列としてもよい。この場合、窓ユニット中において、貫通孔と窓材を支持する部分とをバランスよく配置することが可能となるのに加え、スリット状貫通孔の長手方向におけるＸ線照射の均一性も高い。   Various arrangements can be adopted as the arrangement of the through holes in the individual window units of the X-ray extraction window. Specifically, like the window unit 43 shown in FIG. 8, a plurality of circularly formed through holes are formed so as to be arranged in one row, and the window units and the through holes are arranged between adjacent rows of the window units 43. It may be a staggered arrangement. In this case, since the contact between the edge of the through hole and the window material is circular, the force distribution at the contact portion is likely to be uniform, and the window material is not easily damaged. Further, like the window unit 53 shown in FIG. 9, a plurality of circular through holes may be arranged in two rows, and the two rows may be combined into one row as a window unit. In this case, in the window unit, it is possible to arrange the through hole and the portion supporting the window material in a balanced manner. Further, like the window unit 63 shown in FIG. 10, the through holes themselves may be arranged in a staggered arrangement in the window unit 63. In this case, uniform X-ray irradiation can be performed even in the window unit. Furthermore, like the window unit 73 shown in FIG. 11, the through-holes formed in a slit shape may be formed in two rows, and the two rows may be combined into one row as a window unit. In this case, in the window unit, in addition to being able to arrange the through hole and the portion supporting the window material in a balanced manner, the uniformity of X-ray irradiation in the longitudinal direction of the slit-like through hole is also high.

また、個々の貫通孔毎を窓ユニットとしてもよい。   Further, each through hole may be a window unit.

また、Ｘ線照射装置においては、ガイド部は被照射物を移動させる手段に限らず、Ｘ線管の方を移動させるための手段でも良い。   Further, in the X-ray irradiation apparatus, the guide unit is not limited to the means for moving the irradiation object, but may be a means for moving the X-ray tube.

また、真空外囲器５を構成する部材は絶縁材料に限らず、例えば上部面板３に導電性部材を用いても良い。   Moreover, the member which comprises the vacuum envelope 5 is not restricted to an insulating material, For example, you may use a conductive member for the upper surface board 3. FIG.

また、上部面板２の真空側に蒸着された導電性部材としては、ターゲット材と一体に形成される場合に限らず、ターゲット材とは異なる導電性材料を用いたもの、例えばアルミニウムや、ＩＴＯ(Indium Tin Oxide)等による薄膜でもよい。   In addition, the conductive member deposited on the vacuum side of the upper face plate 2 is not limited to being formed integrally with the target material, but is made of a conductive material different from the target material, such as aluminum or ITO ( A thin film such as Indium Tin Oxide may be used.

本発明の好適な一実施形態であるＸ線管の平面図である。1 is a plan view of an X-ray tube which is a preferred embodiment of the present invention. 図１のＸ線管の上部面板を取り除いた状態を示す平面図である。It is a top view which shows the state which removed the upper surface board of the X-ray tube of FIG. 図１のＸ線管のIII−III線に沿った断面図である。It is sectional drawing along the III-III line of the X-ray tube of FIG. 図１のＸ線管のIV−IV線に沿った断面図である。It is sectional drawing along the IV-IV line of the X-ray tube of FIG. 図１のＸ線管を用いた静電気除電装置の斜視図である。FIG. 2 is a perspective view of an electrostatic charge removal apparatus using the X-ray tube of FIG. 1. 本発明の変形例であるＸ線管の平面図である。It is a top view of the X-ray tube which is a modification of this invention. 図６のＸ線管のVII−VII線に沿った断面図である。It is sectional drawing along the VII-VII line of the X-ray tube of FIG. 本発明の変形例における上部面板の平面図である。It is a top view of the upper face board in the modification of the present invention. 本発明の変形例における上部面板の平面図である。It is a top view of the upper face board in the modification of the present invention. 本発明の変形例における上部面板の平面図である。It is a top view of the upper face board in the modification of the present invention. 本発明の変形例における上部面板の平面図である。It is a top view of the upper face board in the modification of the present invention.

符号の説明Explanation of symbols

１，２１…Ｘ線管、５…真空外囲器、８ａ，８ｂ，８ｃ…電子源、１３，３３…貫通孔（窓部）、１３Ａ，１３Ｂ，３３Ａ，３３Ｂ，４３，５３，６３，７３…窓ユニット、１４，３４…シリコン薄膜（窓材）、１５，３５…ターゲット材、１０１…静電気除電装置（Ｘ線照射装置）、１１０…ビニールフィルム（被照射物）、１２０，１２１…ローラ（ガイド部）。   DESCRIPTION OF SYMBOLS 1,21 ... X-ray tube, 5 ... Vacuum envelope, 8a, 8b, 8c ... Electron source, 13, 33 ... Through-hole (window part), 13A, 13B, 33A, 33B, 43, 53, 63, 73 ... Window unit, 14, 34 ... Silicon thin film (window material), 15, 35 ... Target material, 101 ... Static neutralization device (X-ray irradiation device), 110 ... Vinyl film (object to be irradiated), 120, 121 ... Roller ( Guide part).

Claims (8)

電子を放射する電子源と、前記電子源からの電子の入射に応じてＸ線を発生するターゲットとが真空外囲器内に設けられるとともに、前記ターゲットから発生したＸ線を外部に取り出すためのＸ線取出窓が前記真空外囲器に設けられたＸ線管であって、
前記真空外囲器は、第１の面板、第２の面板、及び側壁を有し、前記第１及び第２の面板に沿った長尺状をなしており、
前記電子源は、前記第２の面板上において前記真空外囲器の長手方向に沿って延びるように長尺状に配置され、
前記Ｘ線取出窓は、前記第１の面板に前記真空外囲器の長手方向に沿って千鳥配列されて形成され、
前記ターゲットは、前記第１の面板の前記Ｘ線取出窓に対応する部位の真空側に形成され、
前記第１の面板の真空側面に前記ターゲットと一体形成された導電性部材と、
前記電子源に接続され、前記側壁から外部に貫通する外部接続用ピンと、
を備える
ことを特徴とするＸ線管。 An electron source that emits electrons and a target that generates X-rays in response to the incidence of electrons from the electron source are provided in a vacuum envelope, and for extracting X-rays generated from the target to the outside An X-ray extraction window is an X-ray tube provided in the vacuum envelope,
The vacuum envelope has a first face plate, a second face plate, and a side wall, and has a long shape along the first and second face plates,
The electron source is arranged in a long shape so as to extend along the longitudinal direction of the vacuum envelope on the second face plate,
The X-ray extraction windows are formed in a staggered manner along the longitudinal direction of the vacuum envelope on the first face plate,
The target is formed on the vacuum side of the portion corresponding to the X-ray extraction window of the first face plate,
A conductive member integrally formed with the target on the vacuum side surface of the first face plate;
An external connection pin connected to the electron source and penetrating from the side wall to the outside;
An X-ray tube comprising: 前記Ｘ線取出窓は、前記真空外囲器に形成された複数の貫通孔と前記複数の貫通孔を覆うように前記真空外囲器に設けられた窓材とを有し、
前記窓材は、前記貫通孔が配列された列間で分割して設けられている、
ことを特徴とする請求項１記載のＸ線管。 The X-ray extraction window has a plurality of through holes formed in the vacuum envelope and a window material provided in the vacuum envelope so as to cover the plurality of through holes,
The window material is provided by being divided between rows in which the through holes are arranged,
The X-ray tube according to claim 1. 前記窓材は、前記長手方向において分割して設けられている、
ことを特徴とする請求項２記載のＸ線管。 The window material is divided and provided in the longitudinal direction.
The X-ray tube according to claim 2. 前記貫通孔は、スリット状に形成されている、
ことを特徴とする請求項２又は３に記載のＸ線管。 The through hole is formed in a slit shape,
The X-ray tube according to claim 2 or 3 , wherein 前記貫通孔は、円形状に形成されている、
ことを特徴とする請求項２又は３に記載のＸ線管。 The through hole is formed in a circular shape,
The X-ray tube according to claim 2 or 3 , wherein 前記貫通孔は、前記真空外囲器の外側に向かって広がるように形成され、
前記窓材は、前記真空外囲器の内側から前記貫通孔を覆うように設けられ、
前記ターゲットは、前記窓材の内側に設けられている、
ことを特徴とする請求項２〜５のいずれか一項にＸ線管。 The through hole is formed to expand toward the outside of the vacuum envelope,
The window material is provided so as to cover the through hole from the inside of the vacuum envelope,
The target is provided inside the window material,
An X-ray tube according to any one of claims 2 to 5, characterized in that: 前記貫通孔は、前記真空外囲器の外側に向かって狭くなるように形成され、
前記窓材は、前記真空外囲器の外側から前記貫通孔を覆うように設けられ、
前記ターゲットは、前記窓材の内側に設けられている、
ことを特徴とする請求項２〜５のいずれか一項にＸ線管。 The through hole is formed so as to narrow toward the outside of the vacuum envelope,
The window material is provided so as to cover the through hole from the outside of the vacuum envelope,
The target is provided inside the window material,
An X-ray tube according to any one of claims 2 to 5, characterized in that: 請求項１〜７のいずれか１項に記載のＸ線管と、
前記Ｘ線管と被照射物とを、前記Ｘ線取出窓の前方において前記長手方向に対して交わる方向に沿って相対移動させるガイド部と、
を備えることを特徴とするＸ線照射装置。 The X-ray tube according to any one of claims 1 to 7,
A guide unit that relatively moves the X-ray tube and the object to be irradiated along a direction intersecting the longitudinal direction in front of the X-ray extraction window;
An X-ray irradiation apparatus comprising:
JP2006139113A 2006-05-18 2006-05-18 X-ray tube and X-ray irradiation apparatus using the same Expired - Fee Related JP4912743B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006139113A JP4912743B2 (en) 2006-05-18 2006-05-18 X-ray tube and X-ray irradiation apparatus using the same
PCT/JP2007/057567 WO2007135811A1 (en) 2006-05-18 2007-04-04 X-ray tube and x-ray irradiator employing it
CN2007800180924A CN101449353B (en) 2006-05-18 2007-04-04 X-ray tube and x-ray irradiator employing it
KR1020087023846A KR101396026B1 (en) 2006-05-18 2007-04-04 X-ray tube and x-ray irradiator employing it
TW096115392A TWI416574B (en) 2006-05-18 2007-04-30 X-ray tube and the use of this X-ray irradiation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006139113A JP4912743B2 (en) 2006-05-18 2006-05-18 X-ray tube and X-ray irradiation apparatus using the same

Publications (2)

Publication Number Publication Date
JP2007311185A JP2007311185A (en) 2007-11-29
JP4912743B2 true JP4912743B2 (en) 2012-04-11

Family

ID=38723123

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006139113A Expired - Fee Related JP4912743B2 (en) 2006-05-18 2006-05-18 X-ray tube and X-ray irradiation apparatus using the same

Country Status (5)

Country Link
JP (1) JP4912743B2 (en)
KR (1) KR101396026B1 (en)
CN (1) CN101449353B (en)
TW (1) TWI416574B (en)
WO (1) WO2007135811A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
JP5461515B2 (en) * 2011-12-28 2014-04-02 株式会社堀場製作所 Exhaust gas analyzer and drain separator
KR101417604B1 (en) * 2013-03-04 2014-07-08 한국원자력연구원 A highly efficient laser induced X-ray generating target with complex structure
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
EP3168856B1 (en) * 2013-09-19 2019-07-03 Sigray Inc. X-ray sources using linear accumulation
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US9390881B2 (en) 2013-09-19 2016-07-12 Sigray, Inc. X-ray sources using linear accumulation
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10989822B2 (en) 2018-06-04 2021-04-27 Sigray, Inc. Wavelength dispersive x-ray spectrometer
JP7117452B2 (en) 2018-07-26 2022-08-12 シグレイ、インコーポレイテッド High brightness reflection type X-ray source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
DE112019004478T5 (en) 2018-09-07 2021-07-08 Sigray, Inc. SYSTEM AND PROCEDURE FOR X-RAY ANALYSIS WITH SELECTABLE DEPTH
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
CN112512196A (en) * 2019-09-16 2021-03-16 清华大学 Array type X-ray source and X-ray imaging equipment
JP2022139731A (en) * 2021-03-12 2022-09-26 日本電子株式会社 X-ray detector and method for manufacturing window part

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208601A (en) * 1989-02-08 1990-08-20 Seiko Instr Inc Optical window member and its manufacture
GB9407073D0 (en) * 1994-04-09 1994-06-01 Atomic Energy Authority Uk X-Ray windows
US6535575B2 (en) * 2001-04-12 2003-03-18 Jordan Valley Applied Radiation Ltd. Pulsed X-ray reflectometer
US20030063707A1 (en) * 2001-10-01 2003-04-03 Mulhollan Gregory Anthony Compact multispectral X-ray source
JP2003288853A (en) * 2002-03-27 2003-10-10 Toshiba Corp X-ray device
JP3922067B2 (en) * 2002-03-29 2007-05-30 株式会社Ｎｈｖコーポレーション Electron beam irradiation device
JP2004212100A (en) * 2002-12-27 2004-07-29 Toyo Ink Mfg Co Ltd Device and method for applying electron beam and object to be irradiated with it
JP4234546B2 (en) * 2003-09-16 2009-03-04 浜松ホトニクス株式会社 Vacuum sealed container and manufacturing method thereof
JP2005228696A (en) * 2004-02-16 2005-08-25 Hitachi Medical Corp Fixed anode x-ray tube

Also Published As

Publication number Publication date
KR20090009789A (en) 2009-01-23
CN101449353B (en) 2010-12-15
TWI416574B (en) 2013-11-21
CN101449353A (en) 2009-06-03
JP2007311185A (en) 2007-11-29
KR101396026B1 (en) 2014-05-16
TW200811902A (en) 2008-03-01
WO2007135811A1 (en) 2007-11-29

Similar Documents

Publication Publication Date Title
JP4912743B2 (en) X-ray tube and X-ray irradiation apparatus using the same
WO2007135812A1 (en) X-ray tube
KR20140106291A (en) X-ray imaging system having flat panel type X-ray generator, and X-ray generator, and electron emission device
KR20060095317A (en) Electron emission device
JP2007311186A (en) X-ray tube
US7564179B2 (en) Flat panel display, gate electrode structure, and gate electrode structure manufacturing method
US6365902B1 (en) Radiation detector, an apparatus for use in radiography and a method for detecting ionizing radiation
SE0103101D0 (en) Gaseous-based radiation detector
US10734180B2 (en) Field emission cathode structure for a field emission arrangement
KR101173859B1 (en) Spacer and electron emission display device having the same
KR100869792B1 (en) Field emission display device
KR20060123640A (en) Image display
JP2006324127A (en) Flat surface display
KR100869790B1 (en) Field emission display device
US7468577B2 (en) Electron emission display having a spacer with inner electrode inserted therein
KR101072998B1 (en) Electron emission display device
KR20070042648A (en) Electron emission display device
RU2524207C1 (en) Assembly of electrovacuum instrument with field-emission cathode
KR100903611B1 (en) Field emission display device
KR101028715B1 (en) Large-Area Electron Beam Irradiator Having Triode-structure
KR20060092514A (en) Electron emission display
KR20070014622A (en) Electron emission device
KR20050096530A (en) Anode plate for electron emission display and electron emission display using the same
JP2007250533A (en) Field emission electron source device
KR20060001506A (en) Electron emission device having grid electrode

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090511

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111006

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111101

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111216

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120117

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120118

R150 Certificate of patent or registration of utility model

Ref document number: 4912743

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150127

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees