JP2005228696A - Fixed anode x-ray tube - Google Patents

Fixed anode x-ray tube Download PDF

Info

Publication number
JP2005228696A
JP2005228696A JP2004038486A JP2004038486A JP2005228696A JP 2005228696 A JP2005228696 A JP 2005228696A JP 2004038486 A JP2004038486 A JP 2004038486A JP 2004038486 A JP2004038486 A JP 2004038486A JP 2005228696 A JP2005228696 A JP 2005228696A
Authority
JP
Japan
Prior art keywords
ray
tube
window
anode
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004038486A
Other languages
Japanese (ja)
Inventor
Hiroshi Otaka
博志 尾高
Makoto Otsuka
誠 大塚
Koji Akita
浩二 秋田
Mototatsu Doi
元達 土肥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Healthcare Manufacturing Ltd
Original Assignee
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Medical Corp filed Critical Hitachi Medical Corp
Priority to JP2004038486A priority Critical patent/JP2005228696A/en
Publication of JP2005228696A publication Critical patent/JP2005228696A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • X-Ray Techniques (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fixed anode X-ray tube having a wide-angle X-ray irradiation angle. <P>SOLUTION: An X-ray irradiation window part 36 disposed at a central part of an envelope 16 and made of a metal material is composed of a metal cylinder 42 surrounding a proximity of a focus 58 on a target 18 of an anode 14; an irradiation cylinder 44 wholly shaped like a corn; and an X-ray window 46 attached to a bottom part of the cylinder 44. A corn-like part 50 of the cylinder 44 is fitted into an approximately circular hole 42a opened in an X-ray irradiation direction 60 on a side face of the cylinder 42 and an outer circumference of the corn-like part 50 is connected to the hole 42a. An opening angle, by which an inner circumference of the cylinder 44 is anticipated in the direction 60 from the focus 58, is set greater than a prescribed X-ray irradiation angle, for example, greater than 80 degrees. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は広角度X線放射の可能な固定陽極X線管に係り、特にX線放射窓部の構造の改良に関する。   The present invention relates to a fixed anode X-ray tube capable of wide-angle X-ray emission, and more particularly to an improvement in the structure of an X-ray emission window portion.

手荷物X線検査や食物異物X線検査などに使用されるX線装置には、X線放射窓にベリリウムなどのX線透過性の良い金属材料を用いた固定陽極X線管が使用されている。このような固定陽極X線管では、金属のX線放射窓を用いているため、通常外囲器の中央部が金属で構成されている。このタイプの固定陽極X線管の一例の構造図を図5に示す。図5において、固定陽極X線管（以下、X線管と略称する）100は電子ビームを発生する陰極102と、電子ビームが衝突してX線を発生するターゲットを有する陽極104と、陰極102と陽極104とを真空気密に内包する外囲器106とから構成される。陰極102と陽極104はX線管100の中心軸（以下、管軸と略称する）108に沿って対向して配置され、陽極104の傾斜している対向面110にターゲット112が埋設されている。   X-ray devices used for baggage X-ray inspection and food foreign matter X-ray inspection use fixed anode X-ray tubes that use X-ray radiation windows and metal materials with good X-ray permeability such as beryllium. . Since such a fixed anode X-ray tube uses a metal X-ray radiation window, the central portion of the envelope is usually made of metal. A structural diagram of an example of this type of fixed anode X-ray tube is shown in FIG. In FIG. 5, a fixed anode X-ray tube (hereinafter abbreviated as X-ray tube) 100 includes a cathode 102 that generates an electron beam, an anode 104 that has a target that generates an X-ray when the electron beam collides, and a cathode 102. And an anode 106 that encloses the anode 104 in a vacuum-tight manner. The cathode 102 and the anode 104 are disposed so as to face each other along a central axis (hereinafter, abbreviated as a tube axis) 108 of the X-ray tube 100, and a target 112 is embedded in an inclined facing surface 110 of the anode 104. .

陰極102は熱電子を発生するフィラメント114と、熱電子を細い電子ビームに集束するための集束電極116と、集束電極116を支持する支持体118と、支持体を絶縁支持するステム120などで構成される。陽極104は陰極102からの電子ビームが衝突してX線を発生するターゲット112と、ターゲット112を埋設した陽極母材122などから構成される。ターゲット112にはタングステンなどの高融点で高原子番号の金属が用いられ、陽極母材122には高熱伝導率の銅などの金属が用いられている。   The cathode 102 includes a filament 114 that generates thermoelectrons, a focusing electrode 116 that focuses the thermoelectrons into a thin electron beam, a support 118 that supports the focusing electrode 116, and a stem 120 that supports and supports the support. Is done. The anode 104 includes a target 112 that generates X-rays when an electron beam from the cathode 102 collides, an anode base material 122 in which the target 112 is embedded, and the like. A metal having a high melting point and a high atomic number such as tungsten is used for the target 112, and a metal such as copper having a high thermal conductivity is used for the anode base material 122.

外囲器106は、ガラス外囲器124とX線放射窓126とから構成される。ガラス外囲器124は耐熱性ガラスなどの絶縁物から成り、陽極側では、陽極104の端部に接続され、陰極側では陰極102のステム120に接続されている。ガラス外囲器124の中央部の、陽極104のターゲット112に近接する位置にX線放射窓部126が取り付けられている。   The envelope 106 includes a glass envelope 124 and an X-ray emission window 126. The glass envelope 124 is made of an insulating material such as heat-resistant glass, and is connected to the end of the anode 104 on the anode side and to the stem 120 of the cathode 102 on the cathode side. An X-ray emission window 126 is attached to the center of the glass envelope 124 at a position close to the target 112 of the anode 104.

X線管100のX線取り出し方向127は管軸108と直交する方向であり、この方向にX線放射窓部126が取り付けられている。X線放射窓部126はX線管100をX線発生装置などに取り付けるためのフランジ部128と、ベリリウムなどのX線透過性の良い金属板から成るX線窓130と、X線窓130を支持する窓枠部132と、フランジ部128とガラス外囲器124を接続するガラス封入部134などから構成される。フランジ部128は円板状をしており、中央部には窓枠部132およびガラス封入部134と接続するための円形の穴136が設けられている。窓枠部132は底付きの肉薄の円筒形状をしており、底の部分に穴をあけてX線窓130が取り付けられている。窓枠部132の円筒の開口側はフランジ部128の穴136に溶接されている。ガラス封入部134は肉薄のテーパーの付いた筒状体で、一端はガラス外囲器124の中央部の側面に設けた円形穴に接続され、他端はフランジ部128の穴136に溶接されている。   The X-ray extraction direction 127 of the X-ray tube 100 is a direction orthogonal to the tube axis 108, and the X-ray emission window 126 is attached in this direction. The X-ray emission window portion 126 includes a flange portion 128 for attaching the X-ray tube 100 to an X-ray generator, an X-ray window 130 made of a metal plate having good X-ray permeability such as beryllium, and an X-ray window 130. The window frame part 132 to support, the glass enclosure part 134 which connects the flange part 128 and the glass envelope 124, etc. are comprised. The flange portion 128 has a disk shape, and a circular hole 136 for connecting to the window frame portion 132 and the glass enclosing portion 134 is provided in the center portion. The window frame portion 132 has a thin cylindrical shape with a bottom, and an X-ray window 130 is attached by making a hole in the bottom portion. The cylindrical opening side of the window frame portion 132 is welded to the hole 136 of the flange portion 128. The glass encapsulating part 134 is a thin tapered cylindrical body, one end is connected to a circular hole provided in the side surface of the central part of the glass envelope 124, and the other end is welded to the hole 136 of the flange part 128. Yes.

X線管100の陽極104のターゲット112の面は、図示の如くX線取り出し方向127に開くように傾斜している。このターゲット112の傾斜面110とX線取り出し方向127とが作る角度は通常ターゲット角度と呼ばれており、図示の例では約20度である。X線管のX線放射角度はこのターゲット角度やX線放射窓部126の構造によって決定されるが、図示の例では約40度となっている。
特開2002−367550号公報 The surface of the target 112 of the anode 104 of the X-ray tube 100 is inclined so as to open in the X-ray extraction direction 127 as shown. The angle formed by the inclined surface 110 of the target 112 and the X-ray extraction direction 127 is generally called a target angle, and is about 20 degrees in the illustrated example. The X-ray emission angle of the X-ray tube is determined by the target angle and the structure of the X-ray emission window 126, but is about 40 degrees in the illustrated example.
JP 2002-367550 A

最近の手荷物X線検査や食物異物X線検査などの分野においては、大きな被検体の検査や検査時間の短縮などのニーズがある。このニーズに対するX線管の側での対応策としては、X線放射角度を広げること、照射X線強度を強くすることなどがあげられる。以下では、X線放射角度を広げることを重点的に考えて行くことにする。   In recent fields such as baggage X-ray inspection and food foreign matter X-ray inspection, there is a need for inspection of large subjects and reduction of inspection time. Measures on the X-ray tube side to meet this need include widening the X-ray emission angle and increasing the intensity of irradiated X-rays. In the following, we will focus on expanding the X-ray radiation angle.

従来の金属のX線放射窓部を備えた固定陽極X線管では、X線放射角度は通常約40度程度に制限されている。このX線放射角度を制限する主な要素はターゲット角度とX線放射窓部の構造である。ターゲット角度に関しては、ターゲット角度を決める陽極のターゲットを埋設している傾斜面の傾斜角度を大きくすることにより、従来の2倍程度の角度までは比較的容易に大きくすることができる。   In a fixed anode X-ray tube having a conventional metal X-ray emission window, the X-ray emission angle is usually limited to about 40 degrees. The main factors that limit the X-ray emission angle are the target angle and the structure of the X-ray emission window. With respect to the target angle, it is relatively easy to increase the angle to about twice the conventional angle by increasing the inclination angle of the inclined surface in which the anode target that determines the target angle is embedded.

X線放射窓部の構造に関しては、図5においてX線窓130やフランジ部128の中心穴136の内径やガラス封入部134の内径などを大きくすることにより、X線放射角度の若干の増加は可能であるが、1.5倍以上に増加することは困難である。特に、ガラス封入部134の内径の増大が問題である。これは、ガラス封入部134がガラス外囲器124の中央部に接続されていることに起因し、ガラス封入部134の直径を大きくしようとするとガラス外囲器124の中央部の外径も大きくしなければならず、ガラス外囲器124の中央部の外径を大きくすると、それに伴いガラス封入部134自体がターゲット112上のX線源から離れることになるため、X線放射角度はガラス封入部134で制限されることになり、ガラス封入部134の内径やフランジ部128の中心穴136の内径などを大きくしなければならない。従って、従来のX線放射窓部の構造では、X線放射角度の増大には限界がある。   Regarding the structure of the X-ray radiation window part, the X-ray radiation angle slightly increases by increasing the inner diameter of the center hole 136 of the X-ray window 130 and the flange part 128 and the inner diameter of the glass enclosure part 134 in FIG. It is possible, but it is difficult to increase it by more than 1.5 times. In particular, an increase in the inner diameter of the glass enclosure 134 is a problem. This is because the glass enclosure part 134 is connected to the central part of the glass envelope 124, and when the diameter of the glass enclosure part 134 is increased, the outer diameter of the central part of the glass envelope 124 is also increased. If the outer diameter of the central portion of the glass envelope 124 is increased, the glass enclosure 134 itself is separated from the X-ray source on the target 112, so the X-ray radiation angle is the glass enclosure. Therefore, the inner diameter of the glass sealing portion 134, the inner diameter of the center hole 136 of the flange portion 128, and the like must be increased. Therefore, the conventional X-ray radiation window structure has a limit in increasing the X-ray radiation angle.

以上のことから、本発明では外囲器のX線放射窓部の構造を改良し、X線放射角度が従来の約2倍程度またはそれ以上となる広角のX線放射角度を有する固定陽極X線管を提供することを目的とする。   From the above, in the present invention, the structure of the X-ray radiation window portion of the envelope is improved, and the fixed anode X having a wide-angle X-ray radiation angle in which the X-ray radiation angle is about twice or more than the conventional one. The purpose is to provide a tube.

上記目的を達成するため、本発明の固定陽極X線管は、電子ビームを発生する陰極と、陰極からの電子ビームが衝突してX線を発生するターゲットを有し、全体として大略棒状体である陽極と、陰極と陽極とを対向させて絶縁支持し、真空気密に内包して、ターゲットで発生したX線をX線管の中心軸とほぼ直交する方向（以下、X線放射方向という）に引き出すために設けられた全体として金属材料から成るX線放射窓部を有する外囲器とを備えた固定陽極X線管において、X線放射窓部は陽極のターゲットの周辺を囲む円筒形状の金属筒と、ターゲット上のX線発生源（以下、焦点という）に近接して配設され、X線透過性の良い金属材料から成る板状体のX線窓と、X線窓を支持する窓取付部、X線管装置などに取り付けるための大略リング状をしているフランジ部、および窓取付部とフランジ部を接続し大略筒形状をしている筒状部を有する放射筒とから構成され、金属筒は長さ方向中央部の側面のX線放射方向に大略円形の穴を有し、放射筒の筒状部の内周の直径は窓取付部における値よりもフランジ部における値の方が大きくなっており、金属筒の穴に放射筒の筒状部が嵌合され、金属筒の穴と放射筒の筒状部の外周との接線で結合されている（請求項1）。   In order to achieve the above object, the fixed anode X-ray tube of the present invention has a cathode that generates an electron beam and a target that generates an X-ray by collision of the electron beam from the cathode, and is generally a rod-like body as a whole. A certain anode, the cathode and the anode are opposed to each other, insulated and supported in a vacuum-tight manner, and the X-rays generated at the target are substantially perpendicular to the central axis of the X-ray tube (hereinafter referred to as the X-ray radiation direction). In a fixed anode X-ray tube provided with an envelope having an X-ray emission window portion made of a metal material as a whole provided to be drawn out, the X-ray emission window portion has a cylindrical shape surrounding the periphery of the anode target. A metal cylinder, a plate-shaped X-ray window made of a metal material having good X-ray transparency, and an X-ray window, which is disposed in the vicinity of an X-ray generation source (hereinafter referred to as a focal point) on the target. It is generally ring-shaped for mounting on window mounting parts, X-ray tube devices, etc. The metal tube is composed of a flange portion, and a radiation tube having a cylindrical portion that connects the window mounting portion and the flange portion to form a generally cylindrical shape, and the metal tube is generally circular in the X-ray radiation direction of the side surface of the central portion in the length direction. The diameter of the inner circumference of the cylindrical portion of the radiating cylinder is larger at the flange portion than at the window mounting portion, and the cylindrical portion of the radiating tube is fitted into the hole of the metal tube. And are joined by a tangent line between the hole of the metal tube and the outer periphery of the cylindrical portion of the radiation tube (claim 1).

また、本発明の固定陽極X線管では、更に陽極のターゲットの面とX線放射方向とが作る角度（ターゲット角度）を35度以上とし、ターゲット上の焦点からX線放射窓部の放射筒の内周をX線放射方向に見込んだ角度を70度以上としたものである。   In the fixed anode X-ray tube of the present invention, the angle formed between the target surface of the anode and the X-ray radiation direction (target angle) is set to 35 degrees or more, and the radiation tube of the X-ray radiation window portion from the focal point on the target. The angle of the inner circumference of the X-rays in the X-ray radiation direction is set to 70 degrees or more.

また、本発明の固定陽極X線管は、電子ビームを発生する陰極と、陰極からの電子ビームが衝突してX線を発生するターゲットを有し、全体として大略棒状体である陽極と、陰極と陽極とを対向させて絶縁支持し、真空気密に内包して、ターゲットで発生したX線をX線放射方向に引き出すために設けられた全体として金属材料から成るX線放射窓部を有する外囲器とを備えた固定陽極X線管において、X線放射窓部は陽極のターゲットの周辺を囲む円筒形状の金属筒と、ターゲット上の焦点に近接して配設され、X線透過性の良い金属材料から成る板状体のX線窓と、X線窓を支持する窓取付部、X線管装置などに取り付けるためのリング状をしているフランジ部、および窓取付部とフランジ部を接続し大略筒形状をしている筒状部を有する放射筒とから構成され、金属筒は長さ方向中央部の側面のX線放射方向に大略円形の穴を有し、この金属筒の穴に放射筒の筒状部が嵌合され、金属筒の穴と放射筒の筒状部の外周との接線で結合されており、ターゲット上の焦点から放射筒の筒状部の内周をX線放射方向に見込んだ角度が70度以上であり、ターゲット角度は35度以上である。   The fixed anode X-ray tube of the present invention includes a cathode that generates an electron beam, a target that generates X-rays when the electron beam from the cathode collides, and an anode that is generally a rod-like body as a whole; And an anode are opposed to each other, are insulated and supported in a vacuum-tight manner, and have an X-ray emission window portion made of a metal material as a whole provided to draw out X-rays generated at the target in the X-ray emission direction. In a fixed anode X-ray tube equipped with an envelope, an X-ray emission window portion is disposed in the vicinity of the focus on the target and a cylindrical metal tube surrounding the periphery of the anode target, and is X-ray transparent. A plate-shaped X-ray window made of a good metal material, a window mounting section that supports the X-ray window, a ring-shaped flange section for mounting to an X-ray tube device, etc., and a window mounting section and a flange section A radiation tube having a cylindrical portion connected and having a generally cylindrical shape; The metal tube has a substantially circular hole in the X-ray radiation direction on the side surface of the central portion in the length direction, and the tubular portion of the radiation tube is fitted into the hole of the metal tube, and the metal tube has a hole and a radiation. It is connected at the tangent to the outer periphery of the cylindrical part of the cylinder, the angle of the inner periphery of the cylindrical part of the radiation cylinder from the focal point on the target in the X-ray radiation direction is 70 degrees or more, and the target angle is 35 More than degrees.

また、本発明の固定陽極X線管では、更にX線放射窓部の放射筒のフランジ部は、その上面が平坦である円形リング状をしており、その上面に装置取付時にシール用部品を収容するためのシール溝を有する。   Further, in the fixed anode X-ray tube of the present invention, the flange portion of the radiation tube of the X-ray radiation window portion has a circular ring shape whose upper surface is flat, and a sealing part is attached to the upper surface when the apparatus is mounted. It has a seal groove for accommodating.

また、本発明の固定陽極X線管では、更にX線放射窓部の放射筒のフランジ部は円形リング状をしており、その外周に装置取付時にシール用部品を収容するためのシール溝を有する（請求項２）。   Further, in the fixed anode X-ray tube of the present invention, the flange portion of the radiation tube of the X-ray radiation window portion has a circular ring shape, and a seal groove for accommodating a sealing component when the device is mounted on the outer periphery thereof. (Claim 2).

また、本発明の固定陽極X線管では、更にX線放射窓部の放射筒のフランジ部の上面および外周を覆う第二のフランジ部を有し、第二のフランジ部はその上面が平坦である円形リング状をしており、その上面に装置取付時にシール用部品を収容するためのシール溝を有し、その裏面側にはX線放射窓部のフランジ部の外周に嵌合し、少なくとも外周のシール溝を覆う内周面を有し、X線放射窓部のフランジ部の外周のシール溝にシール用部品を挿入して、X線放射窓部のフランジ部に第二のフランジ部を結合したものである。   The fixed anode X-ray tube of the present invention further includes a second flange portion covering the upper surface and the outer periphery of the flange portion of the radiation tube of the X-ray radiation window portion, and the upper surface of the second flange portion is flat. It has a circular ring shape and has a seal groove on its upper surface for accommodating sealing parts when the device is mounted, and on the back side thereof is fitted to the outer periphery of the flange portion of the X-ray radiation window portion, at least It has an inner peripheral surface that covers the outer peripheral seal groove, and a sealing part is inserted into the outer peripheral seal groove of the flange portion of the X-ray radiation window portion, and the second flange portion is attached to the flange portion of the X-ray radiation window portion. It is a combination.

本発明の固定陽極X線管は、外囲器のX線放射窓部が金属筒と放射筒とX線窓から成り、金属筒の側面に設けた穴に放射筒の筒状部を嵌合させて、金属筒の穴と筒状部の外周とをろう付けなどにより結合しているので、放射筒の筒状部の底に取り付けられているX線窓や筒状部の端部に接続されるフランジ部がターゲット上の焦点に近接して配置されることになるため、放射筒の筒状部の内周の直径を大きくしなくてもX線放射窓部のフランジ部の上面までの距離が従来品より短くなるので、焦点と被検体との距離を短くしてX線撮影などを行うことが可能となり、X線管への負荷入力をし、小さくすることが可能となる（請求項1）。   In the fixed anode X-ray tube of the present invention, the X-ray radiation window portion of the envelope is composed of a metal tube, a radiation tube, and an X-ray window, and the tubular portion of the radiation tube is fitted into a hole provided on the side surface of the metal tube. Since the hole of the metal cylinder and the outer periphery of the cylindrical part are joined by brazing etc., it is connected to the X-ray window or the end part of the cylindrical part attached to the bottom of the cylindrical part of the radiation cylinder Since the flange portion to be operated is arranged close to the focal point on the target, it is possible to reach the top surface of the flange portion of the X-ray radiation window portion without increasing the inner diameter of the cylindrical portion of the radiation tube. Since the distance is shorter than the conventional product, it is possible to perform X-ray imaging etc. by shortening the distance between the focal point and the subject, and it is possible to reduce the load input to the X-ray tube. Item 1).

また、本発明の固定陽極X線管では、ターゲット角度を35度以上とし、X線放射窓部の放射筒の内周をX線放射方向に見込んだ角度を70度以上としているので、X線放射方向におけるX線放射角度は70度以上となり、従来のX線管（X線放射角度約40度）に比べて、X線放射角度が格段に大きくなり、広いX線照射野を得ることができる。本発明のX線管を使用してX線検査を行う場合、従来と同じ距離での検査では、従来品より大きい被検体の検査が可能となり、また同じ大きさの被検体の検査では、従来品より近接して検査ができるので、X線管への負荷入力を従来品より小さくすることも可能であり、あるいはX線管への同じ負荷入力で検査時間を従来品より短くすることも可能である。   Further, in the fixed anode X-ray tube of the present invention, the target angle is set to 35 degrees or more, and the angle when the inner circumference of the radiation tube of the X-ray emission window portion is expected to be in the X-ray radiation direction is set to 70 degrees or more. The X-ray radiation angle in the radiation direction is 70 degrees or more, and the X-ray radiation angle is much larger than that of the conventional X-ray tube (X-ray radiation angle of about 40 degrees), and a wide X-ray field can be obtained. it can. When performing an X-ray inspection using the X-ray tube of the present invention, it is possible to inspect a subject larger than the conventional product in the inspection at the same distance as the conventional one, and in the inspection of a subject of the same size, the conventional Since the inspection can be performed closer to the product, the load input to the X-ray tube can be made smaller than that of the conventional product, or the inspection time can be made shorter than that of the conventional product with the same load input to the X-ray tube. It is.

また、本発明の固定陽極X線管は、外囲器のX線放射窓部が金属筒と放射筒とX線窓から成り、金属筒の側面に設けた穴に放射筒の筒状部を嵌合させて、金属筒の穴と筒状部の外周とをろう付けなどにより結合しており、ターゲット上の焦点から放射筒の筒状部の内周をX線放射方向に見込む角度を70度以上とし、ターゲット角度を35度以上としているので、X線放射窓部からX線放射方向に放射されるX線の放射角度は70度以上が確保されるので、従来品に比べ格段に広いX線照射野が得られる。その結果、このX線管を使用したX線検査において、大きい被検体の検査、X線管への負荷入力の低減、検査時間の短縮などが可能となる。   Further, in the fixed anode X-ray tube of the present invention, the X-ray radiation window portion of the envelope is composed of a metal tube, a radiation tube and an X-ray window, and the tubular portion of the radiation tube is formed in a hole provided on the side surface of the metal tube. The hole of the metal cylinder and the outer periphery of the cylindrical part are joined by brazing etc., and the angle at which the inner periphery of the cylindrical part of the radiation cylinder is seen in the X-ray radiation direction from the focal point on the target is 70. Since the target angle is 35 degrees or more, the X-ray radiation angle emitted from the X-ray radiation window in the X-ray radiation direction is ensured to be 70 degrees or more, so it is much wider than conventional products. X-ray field is obtained. As a result, in the X-ray inspection using this X-ray tube, it becomes possible to inspect a large subject, reduce the load input to the X-ray tube, shorten the inspection time, and the like.

また、本発明の固定陽極X線管では、X線放射窓部の放射筒のフランジ部の上面に、装置取付時に絶縁媒体をシールするために用いられるOリングなどを収容するシール溝が設けられているので、X線管のX線放射窓部をそのフランジ部を介し、装置の板状壁面に容易に取り付けることができ、また、絶縁媒体のシールも容易に行うことができる。   Further, in the fixed anode X-ray tube of the present invention, a seal groove is provided on the upper surface of the flange portion of the radiation tube of the X-ray radiation window portion to accommodate an O-ring used to seal the insulating medium when the device is mounted. Therefore, the X-ray emission window portion of the X-ray tube can be easily attached to the plate-like wall surface of the apparatus via the flange portion, and the insulating medium can be easily sealed.

また、本発明の固定陽極X線管では、X線放射窓部の放射筒のフランジ部の外周に、装置取付時に絶縁媒体をシールするために用いられるOリングなどを収容するシール溝が設けられているので、そのフランジ部を介して装置に容易に取り付けることができる。また、この構成のX線管では、X線放射窓部の金属筒の穴と放射筒の筒状部の外周とをろう付けなどにより直接結合しているため、この結合時の熱的歪みにより放射筒のフランジ部に微小な寸法変化が生じるが、その寸法変化については構造上フランジ部の外周面での値がフランジ部の上面でのものに比べて約１/2以下になるので、この寸法変化の小さいフランジ部の外周面にシール溝を設けて、絶縁媒体のシールを行うことは非常に有効である（請求項2）。   Further, in the fixed anode X-ray tube of the present invention, a sealing groove is provided on the outer periphery of the flange portion of the radiation tube of the X-ray radiation window portion to accommodate an O-ring used to seal the insulating medium when the device is mounted. Therefore, it can be easily attached to the apparatus via the flange portion. In addition, in the X-ray tube with this configuration, the hole of the metal tube of the X-ray radiation window portion and the outer periphery of the cylindrical portion of the radiation tube are directly coupled by brazing or the like, so that due to thermal distortion during this coupling A slight dimensional change occurs in the flange part of the radiation tube, but the value of the dimensional change on the outer peripheral surface of the flange part is about 1/2 or less than that on the upper surface of the flange part. It is very effective to provide a sealing groove on the outer peripheral surface of the flange portion with small dimensional change to seal the insulating medium (Claim 2).

また、本発明の固定陽極X線管では、X線管のX線放射窓部のフランジ部に、上面にシール溝を有する第二のフランジ部が結合されているので、従来例と同様に、装置の板状壁面に取り付ける作業を容易に行うことができる。   Further, in the fixed anode X-ray tube of the present invention, since the second flange portion having the seal groove on the upper surface is coupled to the flange portion of the X-ray emission window portion of the X-ray tube, as in the conventional example, The operation of attaching to the plate-like wall surface of the apparatus can be easily performed.

以下、本発明の実施例を添付図面に基づいて説明する。なお、発明の実施例を説明するための全図において、同一機能を有するものは同一符号をつけ、その繰り返しの説明は省略する。   Embodiments of the present invention will be described below with reference to the accompanying drawings. In all the drawings for explaining the embodiments of the invention, those having the same function are given the same reference numerals, and repeated explanation thereof is omitted.

図１は、本発明に係る固定陽極X線管の第１の実施例の全体構造図である。本実施例の固定陽極X線管（以下、X線管と略称する）では、従来品に対し、X線放射角度が大きくなるため、特に陽極と外囲器の構造が相違する。図１において、X線管10は、電子ビームを発生する陰極12と、陰極12からの電子ビームが衝突してX線を発生するターゲット18を備えた陽極14と、陰極12と陽極14とを対向させて絶縁支持し、真空気密に内包する外囲器16などから構成される。   FIG. 1 is an overall structural view of a first embodiment of a fixed anode X-ray tube according to the present invention. In the fixed anode X-ray tube (hereinafter abbreviated as X-ray tube) of the present embodiment, the X-ray radiation angle is larger than that of the conventional product, and therefore the structure of the anode and the envelope are particularly different. In FIG. 1, an X-ray tube 10 includes a cathode 12 that generates an electron beam, an anode 14 that includes a target 18 that generates an X-ray when the electron beam from the cathode 12 collides, and the cathode 12 and the anode 14. It is composed of an envelope 16 and the like that are opposed to each other and insulated and enclosed in a vacuum-tight manner.

陰極12は、熱電子を放射するフィラメント20と、熱電子を集束して陽極14への電子ビームを形成するための集束電極22と、集束電極22を支持するステム24などから構成される。フィラメント20はタングステン線などをコイル状に巻いたもので、集束電極22の集束溝内に絶縁支持される。集束電極22は鉄やステンレス鋼などの金属材料から成り、陽極14のターゲット18と対向して配置され、そのターゲット18と対向する面側に集束溝が設けられている。この集束溝の形状、寸法は、陰極12と陽極14との間に高電圧が印加されたときに、フィラメント20の周辺にフィラメント20から放射された熱電子を集束するための集束電界が作られるように設計されている。ステム24は耐熱性ガラスなどの絶縁物から成り、大略円筒形状をしており、その内側にリード線封入部を有し、複数本のリード線26を真空気密に封入している。このリード線26は陰極電位およびフィラメント加熱電圧の供給と、集束電極22の支持などに用いられている。   The cathode 12 includes a filament 20 that emits thermoelectrons, a focusing electrode 22 that focuses the thermoelectrons to form an electron beam to the anode 14, a stem 24 that supports the focusing electrode 22, and the like. The filament 20 is a tungsten wire or the like wound in a coil shape and is insulated and supported in the focusing groove of the focusing electrode 22. The focusing electrode 22 is made of a metal material such as iron or stainless steel, and is disposed to face the target 18 of the anode 14, and a focusing groove is provided on the surface side facing the target 18. The shape and size of the focusing groove is such that when a high voltage is applied between the cathode 12 and the anode 14, a focusing electric field for focusing the thermoelectrons emitted from the filament 20 around the filament 20 is created. Designed to be The stem 24 is made of an insulating material such as heat-resistant glass and has a substantially cylindrical shape. The stem 24 has a lead wire enclosing portion on the inside thereof, and a plurality of lead wires 26 are sealed in a vacuum-tight manner. The lead wire 26 is used for supplying a cathode potential and a filament heating voltage, supporting the focusing electrode 22, and the like.

陽極14はターゲット18とこれを埋設する陽極母材30とから構成される。ターゲット18はタングステンなどの高融点で高原子番号の材料から成り、長方形、または円形の板状体である。陽極母材30は銅などの高熱伝導率の金属材料から成り、大略円柱状の棒状体である。陽極母材30の陰極12に対向する面は傾斜しており、この傾斜面32にターゲット18が埋設されている。ターゲット18の陽極母材30への埋設は鋳造などによって行われる。陽極母材30の傾斜面32と反対側の端部（以下、陽極端という）34は傾斜面32側より少し細目の円柱状に加工されており、X線管外に露出され、この陽極端34に陽極電位が供給される。   The anode 14 includes a target 18 and an anode base material 30 in which the target 18 is embedded. The target 18 is made of a material having a high melting point and a high atomic number, such as tungsten, and is a rectangular or circular plate. The anode base material 30 is made of a metal material with high thermal conductivity such as copper, and is a substantially cylindrical rod-like body. A surface of the anode base material 30 facing the cathode 12 is inclined, and the target 18 is embedded in the inclined surface 32. The target 18 is embedded in the anode base material 30 by casting or the like. An end portion (hereinafter referred to as anode end) 34 opposite to the inclined surface 32 of the anode base material 30 is processed into a slightly narrower cylindrical shape than the inclined surface 32 side, and is exposed outside the X-ray tube. An anode potential is supplied to 34.

外囲器16は、中央部のX線放射窓部36と、陰極絶縁部38と、陽極絶縁部40などから構成される。X線放射窓部36は金属部品から成り、陰極絶縁部38と陽極絶縁部40は耐熱性ガラスやセラミックなどの絶縁物から成る。X線放射窓部36は、円筒形状の金属筒42と、金属筒42の側面に結合されたコーン状の放射筒44と、放射筒44の底面に結合された円板状のX線窓46などから構成される。   The envelope 16 includes an X-ray emission window portion 36 at the center, a cathode insulating portion 38, an anode insulating portion 40, and the like. The X-ray emission window portion 36 is made of a metal part, and the cathode insulating portion 38 and the anode insulating portion 40 are made of an insulating material such as heat resistant glass or ceramic. The X-ray radiation window 36 includes a cylindrical metal tube 42, a cone-shaped radiation tube 44 coupled to the side surface of the metal tube 42, and a disk-shaped X-ray window 46 coupled to the bottom surface of the radiation tube 44. Etc.

金属筒42はステンレス鋼や銅などから成り、円筒の中央部の側面に放射筒44を結合するための大略円形の穴42aが開けられている。放射筒44はステンレス鋼などの鉄鋼材料から成り、大略円形リング状をした部分の中心部にコーン形状をした部分が結合されたような形状をしている。コーン形状をした部分の内周は、ターゲット18に近い側の底面の直径が小さく、ターゲット18から離れるにつれて直径が大きくなるようになっている。この放射筒44は、コーンの底面に相当する窓取付部48と、コーン形状をしているコーン状部50と、最も直径が大きく、装置（X線管装置やX線装置など）に取り付けるために用いられるフランジ部52の三つの部分に分けられる。窓取付部48には大きな穴48aが開けられており、その穴48aにX線窓46が結合されている。コーン状部50は、金属筒42の側面の穴42aに嵌め込まれて、その穴42aに接する外周面のほぼ中央部において、ろう付けなどによって金属筒42と結合されている。フランジ部52は大略円形リング状をしており、その平坦な上面には装置に取り付ける際の固定用のねじ穴52aや油密用（または気密用）Oリングを挿入するためのシール溝52bなどが設けられている。   The metal cylinder 42 is made of stainless steel, copper, or the like, and a substantially circular hole 42a for coupling the radiation cylinder 44 is formed on the side surface of the central portion of the cylinder. The radiation tube 44 is made of a steel material such as stainless steel, and has a shape in which a cone-shaped portion is coupled to a central portion of a substantially circular ring-shaped portion. The inner circumference of the cone-shaped portion has a small diameter on the bottom surface near the target 18 and increases in diameter as the distance from the target 18 increases. This radiation tube 44 has the largest diameter and is attached to a device (an X-ray tube device, an X-ray device, etc.) having a window mounting portion 48 corresponding to the bottom of the cone and a cone-shaped portion 50 having a cone shape. It is divided into three portions of the flange portion 52 used in the above. A large hole 48a is formed in the window mounting portion 48, and the X-ray window 46 is coupled to the hole 48a. The cone-shaped portion 50 is fitted into the hole 42a on the side surface of the metal tube 42, and is joined to the metal tube 42 by brazing or the like at the substantially central portion of the outer peripheral surface in contact with the hole 42a. The flange 52 has a generally circular ring shape, and the flat top surface has a screw hole 52a for fixing when attaching to the apparatus, a seal groove 52b for inserting an oil-tight (or air-tight) O-ring, etc. Is provided.

X線窓46はベリリウムなどのX線透過性のよい金属材料から成り、放射筒44の窓取付部48に結合されている。X線窓46と窓取付部48との結合にあたっては、通常X線窓46を鉄やステンレス鋼などから成る窓枠にろう付けしておき、その窓枠と窓取付部48とを溶接する方法がとられている。また、X線窓46を窓取付部48に直接ろう付けする場合もある。   The X-ray window 46 is made of a metal material having good X-ray transparency, such as beryllium, and is coupled to the window mounting portion 48 of the radiation tube 44. In joining the X-ray window 46 and the window mounting portion 48, the X-ray window 46 is usually brazed to a window frame made of iron or stainless steel, and the window frame and the window mounting portion 48 are welded. Has been taken. Further, the X-ray window 46 may be brazed directly to the window mounting portion 48.

X線放射窓部36と陰極絶縁部38および陽極絶縁部40とは、X線放射窓部36の金属筒42の両端において、それぞれを突き合わせる形で結合されるが、両者の間には陰極絶縁部38や陽極絶縁部40を構成する絶縁材料となじみのよい金属材料から成る円筒54を介在させて結合されている。また、陰極絶縁部38の陰極側端部は陰極12のステム24と結合され、陽極絶縁部40の陽極側端部は陽極14の陽極端34の付け根に結合されている。陽極絶縁部40と陽極端34の付け根との間にも陽極絶縁部40の絶縁材料となじみのよい金属材料から成る円筒56が挿入されている。   The X-ray emission window part 36, the cathode insulation part 38, and the anode insulation part 40 are coupled to each other at both ends of the metal tube 42 of the X-ray emission window part 36, but the cathode is interposed between the two. The insulating material constituting the insulating portion 38 and the anode insulating portion 40 is coupled via a cylinder 54 made of a metal material that is compatible with the insulating material. Further, the cathode-side end portion of the cathode insulating portion 38 is coupled to the stem 24 of the cathode 12, and the anode-side end portion of the anode insulating portion 40 is coupled to the root of the anode end 34 of the anode 14. A cylinder 56 made of a metal material that is compatible with the insulating material of the anode insulating portion 40 is also inserted between the anode insulating portion 40 and the base of the anode end 34.

X線管10の使用時には、陰極12と陽極14との間に高電圧が印加され、陰極12のフィラメント加熱電圧が印加されることにより、フィラメント20から熱電子が放出され、この熱電子は集束電極22で集束されて電子ビームを形成し、陽極14のターゲット18に衝突し、ターゲット18からX線を発生させる。ターゲット18のX線発生源（以下、焦点という）58から放出されたX線は外囲器16のX線放射窓部36のX線窓46を通して外部のX線放射方向（X線管軸方向と直交する方向）60に取り出される。   When the X-ray tube 10 is used, a high voltage is applied between the cathode 12 and the anode 14, and the filament heating voltage of the cathode 12 is applied, whereby thermoelectrons are emitted from the filament 20, and these thermoelectrons are focused. An electron beam is focused by the electrode 22, collides with the target 18 of the anode 14, and X-rays are generated from the target 18. X-rays emitted from an X-ray generation source (hereinafter referred to as a focal point) 58 of the target 18 pass through the X-ray window 46 of the X-ray emission window portion 36 of the envelope 16 to the external X-ray emission direction (X-ray tube axial direction). (Direction orthogonal to) 60).

本実施例のX線管10では、X線放射窓部36はその構成要素である金属筒42と放射筒44とを結合するのに、金属筒42の穴42aに放射筒44のコーン状部50を嵌合させる形で結合させているため、放射筒44の窓取付部48に支持されるX線窓46および放射筒44のフランジ部52をターゲット18上の焦点58の位置に、非常に近接させて配設させることができる。この結果、ターゲット18上の焦点58からX線放射窓部36を通してX線放射方向60に放射されるX線の広がり（以下、X線照射野という）を、従来品に比べ格段に大きくすることができるようになった。   In the X-ray tube 10 of the present embodiment, the X-ray radiation window portion 36 connects the metal tube 42 and the radiation tube 44, which are the components thereof, to the conical portion of the radiation tube 44 in the hole 42a of the metal tube 42. 50, so that the X-ray window 46 supported by the window mounting portion 48 of the radiation tube 44 and the flange portion 52 of the radiation tube 44 are located at the position of the focal point 58 on the target 18. They can be arranged close to each other. As a result, the spread of X-rays radiated in the X-ray emission direction 60 from the focal point 58 on the target 18 through the X-ray emission window 36 (hereinafter referred to as X-ray irradiation field) should be greatly increased compared to the conventional product. Can now.

X線照射野の増大に関連するが、本発明では、X線放射角度について、従来品の約40度に対し、2倍以上の約80度以上にすることを目標としている。しかし、このX線放射角度は従来品より少しでも大きくなれば、X線検査には種々の点で有効である。このため、本実施例のX線管では、X線放射角度の実用的な範囲を下限側に余裕を見て、約70度以上とした。X線放射角度を約70度とした場合、X線照射野の直径は従来品に対し約2倍となる。   Although related to the increase in the X-ray irradiation field, the present invention aims to set the X-ray radiation angle to about 80 degrees or more, which is twice or more of the conventional product of about 40 degrees. However, if this X-ray radiation angle is a little larger than the conventional product, it is effective for X-ray inspection in various ways. For this reason, in the X-ray tube of this example, the practical range of the X-ray radiation angle is set to about 70 degrees or more with a margin on the lower limit side. When the X-ray radiation angle is about 70 degrees, the diameter of the X-ray irradiation field is about twice that of the conventional product.

これを実現するために、本実施例のX線管10では、先ず第一に、陽極14のターゲット18を埋設した傾斜面32のX線放射方向60に対する傾斜角度（ターゲット角度）αを約35度以上にしている。第二に、外囲器16のX線放射窓部36において、放射筒44の内周側の焦点58を中心とする開き角度が約70度以上確保できるように、放射筒44の位置を焦点58に近づけると共に、放射筒44の内周の口径を大きくしている。特に、放射筒44を焦点58に近接させるために、放射筒44の外周を金属筒42の側面に設けた穴42aに直接結合している。   In order to realize this, in the X-ray tube 10 of the present embodiment, firstly, the inclination angle (target angle) α of the inclined surface 32 in which the target 18 of the anode 14 is embedded with respect to the X-ray radiation direction 60 is about 35. Over the degree. Second, the X-ray radiation window 36 of the envelope 16 focuses the position of the radiation tube 44 so that an opening angle of about 70 degrees or more around the focal point 58 on the inner peripheral side of the radiation tube 44 can be secured. While being close to 58, the inner diameter of the radiation tube 44 is increased. Particularly, in order to bring the radiation tube 44 close to the focal point 58, the outer periphery of the radiation tube 44 is directly coupled to a hole 42a provided on the side surface of the metal tube 42.

また、上記のX線放射角度を従来品の約40度の2倍以上である約80度以上とするためには、上記のターゲット角度αを約40度とし、外囲器16のX線放射窓部36における放射筒44の内周の焦点58を中心とする開き角度が約80度以上確保できるように、放射筒44の内周の口径を大きくすればよい。   In addition, in order to set the above X-ray radiation angle to about 80 degrees or more, which is twice or more of about 40 degrees of the conventional product, the above target angle α is set to about 40 degrees, and the X-ray radiation of the envelope 16 is set. The aperture of the inner periphery of the radiation tube 44 may be increased so that the opening angle of the window 36 around the focal point 58 of the inner periphery of the radiation tube 44 is about 80 degrees or more.

図1において、X線放射窓部36の放射筒44のコーン状部50の形状については、図示ではコーン形状としたが、これに限定されず、筒形状のものであってもよい。また、コーン状部50の肉厚については、図示では直線的に変化するものとなっているが、一様なものでもよく、場所によって大きく変化するものであってもよい。しかし、このコーン状部50の内周の直径はX線放射窓部36を通して放射されるX線の放射角度を制限する要素となっているので、本実施例では、X線放射角度を所定の値、例えば80度に設定した場合、コーン状部50の長さ方向のそれぞれの位置での内周の直径、並びにフランジ部52の内周の直径は、焦点58からX線放射方向60に所定の値、例えば80度のX線放射角度で広がる円錐のそれぞれの位置で断面の直径より大きくなるように設定している。   In FIG. 1, the shape of the cone-shaped portion 50 of the radiation tube 44 of the X-ray radiation window portion 36 is a cone shape in the drawing, but is not limited thereto, and may be a cylindrical shape. In addition, the thickness of the cone-shaped portion 50 varies linearly in the drawing, but may be uniform or may vary greatly depending on the location. However, since the diameter of the inner periphery of the cone-shaped portion 50 is an element that limits the radiation angle of the X-rays emitted through the X-ray radiation window 36, in this embodiment, the X-ray radiation angle is set to a predetermined value. When set to a value, for example, 80 degrees, the diameter of the inner circumference at each position in the length direction of the cone-shaped portion 50 and the diameter of the inner circumference of the flange portion 52 are predetermined in the X-ray radiation direction 60 from the focal point 58. For example, it is set to be larger than the diameter of the cross section at each position of the cone that spreads at an X-ray radiation angle of 80 degrees.

図2は、本実施例のX線管と従来品のX線放射角度およびX線照射野の比較を示したものである。図2において、62は従来品のX線照射野であり、63は本実施例のX線照射野である。本実施例のX線管では、X線放射角度を約80度としており、従来品の約40度に対して約2倍になっている。焦点58から被検体までの距離を同じ値l０とした場合、X線照射野の大きさは従来品の値S0に対し、本実施例では約5.3倍の値S１（＝5.3S０）となる。また、従来品と同じ値S０のX線照射野は従来品の半分以下の距離l１（＝0.43l０）で得ることができる。 FIG. 2 shows a comparison of the X-ray emission angle and X-ray irradiation field of the X-ray tube of the present example and the conventional product. In FIG. 2, 62 is a conventional X-ray irradiation field, and 63 is an X-ray irradiation field of this embodiment. In the X-ray tube of this embodiment, the X-ray radiation angle is about 80 degrees, which is about twice that of the conventional product of about 40 degrees. When the distance from the focal point 58 to the subject is the same value l 0 , the size of the X-ray field is about 5.3 times the value S 1 (= 5.3S 0) in the present example compared to the value S 0 of the conventional product. ) Further, the X-ray irradiation field having the same value S 0 as that of the conventional product can be obtained at a distance l 1 (= 0.43l 0 ) which is half or less of that of the conventional product.

これらの結果から、本実施例のX線管を使用したX線検査においては、従来品に比べてより大きな被検体、例えば5倍以上の大きさの被検体の検査が可能となる。また、同じ大きさの被検体の検査を行う場合には、従来品より近接してX線検査ができるので、X線管への負荷入力を、従来品に対し例えば約1/5まで低減することができる。また、同じ大きさの被検体を、同じX線管への負荷入力で検査する場合には、従来品より短い時間、例えば約1/５の時間で検査することが可能となる。   From these results, in the X-ray inspection using the X-ray tube of the present embodiment, it is possible to inspect a subject larger than the conventional product, for example, a subject having a size five times or more. In addition, when examining a subject of the same size, X-ray inspection can be performed closer to the conventional product, so the load input to the X-ray tube is reduced to, for example, about 1/5 of the conventional product. be able to. Further, in the case of inspecting a subject having the same size with a load input to the same X-ray tube, it is possible to inspect in a shorter time than the conventional product, for example, about 1/5.

図３には、本発明に係る固定陽極X線管の第２の実施例の全体構造図を示す。本実施例は、第１の実施例に対し、外囲器のX線放射窓部の構造が異なるもので、他の部分は第１の実施例と同じである。図３において、本実施例のX線管64では、外囲器66のX線放射窓部68は第1の実施例と同様に、金属筒42と、放射筒70と、X線窓46とから構成されるが、放射筒70の構造が第1の実施例のものとは異なる。すなわち、放射筒70を構成するフランジ部72の構造が第1の実施例のフランジ部52と異なり、装置への取付時の油密用（または気密用）Oリングを挿入するためのシール部をフランジ部72の円形の外周部に設けている。   FIG. 3 shows an overall structural view of a second embodiment of the fixed anode X-ray tube according to the present invention. This embodiment is different from the first embodiment in the structure of the X-ray radiation window portion of the envelope, and the other parts are the same as those of the first embodiment. In FIG. 3, in the X-ray tube 64 of the present embodiment, the X-ray radiation window portion 68 of the envelope 66 is similar to the first embodiment in that the metal tube 42, the radiation tube 70, the X-ray window 46, However, the structure of the radiation tube 70 is different from that of the first embodiment. That is, the structure of the flange portion 72 constituting the radiation tube 70 is different from the flange portion 52 of the first embodiment, and there is a seal portion for inserting an oil-tight (or air-tight) O-ring at the time of mounting to the apparatus. The flange portion 72 is provided on the circular outer peripheral portion.

図3において、X線放射窓部68の放射筒68は、第1の実施例と同様に、窓取付部48と、コーン状部50と、フランジ部72とから構成されるが、フランジ部72はその外周部に装置取付時の油密（または気密）のためシール部72aを有し、その上面に固定用のねじ穴72bが複数個設けられている。シール部72aは図示ではL字形の凹みとなっており、このL字形の凹みにOリングが嵌め合わされて、油密（または気密）構造となる。また、このシール部72aは溝形状にしてもよい。   In FIG. 3, the radiation tube 68 of the X-ray radiation window portion 68 includes a window mounting portion 48, a cone-shaped portion 50, and a flange portion 72, as in the first embodiment. Has a seal portion 72a for oil-tightness (or air-tightness) when the device is mounted on its outer peripheral portion, and a plurality of fixing screw holes 72b are provided on the upper surface thereof. The seal portion 72a is an L-shaped recess in the drawing, and an O-ring is fitted into the L-shaped recess to form an oil-tight (or air-tight) structure. Further, the seal portion 72a may have a groove shape.

本発明に係るX線管では、外囲器のX線放射窓部のX線放射方向の長さを短くするために、金属筒と放射筒とを直接ろう付けする方法を採用している。このため、金属筒や放射筒の材質、大きさ、厚さなどの組合せによっては、ろう付け時の熱的歪みにより、放射筒のフランジ部に、変形が生ずる場合がある。発明者の調査結果では、フランジ部の変形による寸法変化はフランジ部の寸法が大きい程大きく、また部位ではフランジ部の上面で大きく、外周面では小さくなり、上面での値の1/２以下になることが判った。このため、第2の実施例ではフランジ部72の外周部にシール部72aを設けることにより、装置取付時の油密（または気密）性を第1の実施例よりも向上させている。   In the X-ray tube according to the present invention, a method of directly brazing the metal tube and the radiation tube is adopted in order to shorten the length of the X-ray radiation window portion of the envelope in the X-ray radiation direction. For this reason, depending on the combination of the material, size, thickness, etc. of the metal tube or the radiation tube, the flange part of the radiation tube may be deformed due to thermal distortion during brazing. According to the results of the inventor's investigation, the dimensional change due to the deformation of the flange portion increases as the size of the flange portion increases. I found out that For this reason, in the second embodiment, by providing the seal portion 72a on the outer peripheral portion of the flange portion 72, the oil tightness (or air tightness) at the time of mounting the device is improved as compared with the first embodiment.

図4は、本発明に係る固定陽極X線管の第3の実施例の構造図を示す。本実施例は第2の実施例に別のフランジ部を取り付けたものである。図4(a)は全体構造図、図4(b)は図4(a)の円A部の拡大図である。図4において、本実施例では、第2の実施例のX線管64の外囲器66のX線放射窓部68のフランジ部72に第二のフランジ部74が取り付けられている。この第二のフランジ部74は、第1の実施例のX線管10のX線放射窓部36のフランジ部52とほぼ同じ構造をしており、その上面において装置に取り付けられるようになっている。図4(b)において、第二のフランジ部74は、上面にOリングを挿入するためのシール溝74aと装置取付用のねじ穴74bを有し、裏面側にはX線管64本体のフランジ部72の外周72cと嵌合するシール面74cが設けられている。更に、その内周側には第二のフランジ部74をX線管64本体のフランジ部72に固定するためのねじ78を通す穴74dが複数個、フランジ部72のねじ穴72bの位置にあわせて開けられている。   FIG. 4 shows a structural diagram of a third embodiment of the fixed anode X-ray tube according to the present invention. In this embodiment, another flange portion is attached to the second embodiment. FIG. 4 (a) is an overall structural view, and FIG. 4 (b) is an enlarged view of a circle A portion in FIG. 4 (a). In FIG. 4, in this embodiment, a second flange portion 74 is attached to the flange portion 72 of the X-ray radiation window portion 68 of the envelope 66 of the X-ray tube 64 of the second embodiment. The second flange portion 74 has substantially the same structure as the flange portion 52 of the X-ray emission window portion 36 of the X-ray tube 10 of the first embodiment, and is attached to the apparatus on the upper surface thereof. Yes. In FIG. 4 (b), the second flange portion 74 has a seal groove 74a for inserting an O-ring on the upper surface and a screw hole 74b for mounting the device, and the flange of the X-ray tube 64 main body on the back surface side. A seal surface 74c that fits with the outer periphery 72c of the portion 72 is provided. Furthermore, a plurality of holes 74d through which screws 78 for fixing the second flange portion 74 to the flange portion 72 of the main body of the X-ray tube 64 are provided on the inner peripheral side thereof are aligned with the positions of the screw holes 72b of the flange portion 72. Open.

X線管64への第二のフランジ部74の取付に際しては、先ずX線放射窓部68のフランジ部72の外周部に設けられたシール部72aにOリング76を装着し、次にフランジ部72を覆うように第二のフランジ部74を上方からかぶせ、フランジ部72の外周72cと第二のフランジ部74のシール面74cとを一致させて押し込む。このとき、第二のフランジ部74の穴74dの位置をフランジ部72のねじ穴72bの位置に合わせておく。次に、ねじ78をフランジ部72のねじ穴72bにねじ込み、第二のフランジ部74の押え面74cがフランジ部72の上面72dに接するまで、ねじ78を締め付ける。   When attaching the second flange portion 74 to the X-ray tube 64, the O-ring 76 is first attached to the seal portion 72a provided on the outer peripheral portion of the flange portion 72 of the X-ray emission window portion 68, and then the flange portion. The second flange portion 74 is covered from above so as to cover 72, and the outer periphery 72c of the flange portion 72 and the seal surface 74c of the second flange portion 74 are pressed in alignment. At this time, the position of the hole 74d of the second flange portion 74 is matched with the position of the screw hole 72b of the flange portion 72. Next, the screw 78 is screwed into the screw hole 72b of the flange portion 72, and the screw 78 is tightened until the holding surface 74c of the second flange portion 74 contacts the upper surface 72d of the flange portion 72.

本実施例の場合、X線管64本体のフランジ部72の上に、上面にシール溝74aを有する第二のフランジ部74がかぶせるような形で取り付けられているので、X線管の装置取付部であるX線放射窓部のフランジ部の構造が第1の実施例のX線管とほぼ同じになるため、第1の実施例のX線管や従来例と同様に、装置の板状壁面に取り付ける作業を容易に行うことができる。   In the case of the present embodiment, since the second flange portion 74 having the seal groove 74a on the upper surface is mounted on the flange portion 72 of the main body of the X-ray tube 64, the device is attached to the X-ray tube. Since the structure of the flange part of the X-ray radiation window part which is the part is almost the same as the X-ray tube of the first embodiment, like the X-ray tube of the first embodiment and the conventional example, the plate shape of the apparatus The work of attaching to the wall surface can be easily performed.

本発明に係る固定陽極X線管の第1の実施例の全体構造図。1 is an overall structural diagram of a first embodiment of a fixed anode X-ray tube according to the present invention. 第1の実施例と従来品のX線放射角度およびX線照射野の比較を示した図。The figure which showed the comparison of the X-ray radiation angle and X-ray irradiation field of a 1st Example and a conventional product. 本発明に係る固定陽極X線管の第2の実施例の全体構造図。FIG. 3 is an overall structural view of a second embodiment of a fixed anode X-ray tube according to the present invention. 本発明に係る固定陽極X線管の第3の実施例の構造図。FIG. 6 is a structural diagram of a third embodiment of a fixed anode X-ray tube according to the present invention. 従来の金属のX線放射窓部を用いた固定陽極X線管の一例の構造図。FIG. 5 is a structural diagram of an example of a fixed anode X-ray tube using a conventional metal X-ray emission window.

符号の説明Explanation of symbols

10、64・・・固定陽極X線管（X線管）
12・・・陰極
14・・・陽極
16、66・・・外囲器
18・・・ターゲット
20・・・フィラメント
22・・・集束電極
24・・・ステム
30・・・陽極母材
32・・・傾斜面
36、68・・・X線放射窓部
38・・・陰極絶縁部
40・・・陽極絶縁部
42・・・金属筒
42a、48a、74d・・・穴
44、70・・・放射筒
46・・・X線窓
48・・・窓取付部
50・・・コーン状部
52、72・・・フランジ部
52b、74a・・・シール溝
58・・・焦点（X線発生源）
60・・・X線放射方向
72a・・・シール部
74・・・第二のフランジ部
74c・・・シール面
76・・・Oリング
10, 64 ... Fixed anode X-ray tube (X-ray tube)
12 ... Cathode
14 ... Anode
16, 66 ... Envelope
18 ... Target
20 ... Filament
22 ... Focusing electrode
24 ... Stem
30 ... Anode base material
32 ... Inclined surface
36, 68 ... X-ray emission window
38 ・ ・ ・ Cathode insulation
40 ... Anode insulation
42 ... Metal cylinder
42a, 48a, 74d ... Hole
44, 70 ... Radiation tube
46 ... X-ray window
48 ・ ・ ・ Window mounting part
50 ・ ・ ・ Cone
52, 72 ... Flange
52b, 74a ・ ・ ・ Seal groove
58 ・ ・ ・ Focus (X-ray source)
60 ・ ・ ・ X-ray emission direction
72a ・ ・ ・ Seal part
74 ... Second flange
74c ・ ・ ・ Seal surface
76 ... O-ring

Claims (2)

電子ビームを発生する陰極と、陰極からの電子ビームが衝突してX線を発生するターゲットを有し、全体として大略棒状体である陽極と、陰極と陽極とを対向させて絶縁支持し、真空気密に内包して、ターゲットで発生したX線をX線管の中心軸とほぼ直交する方向（以下、X線放射方向という）に引き出すために設けられた全体として金属材料から成るX線放射窓部を有する外囲器とを備えた固定陽極X線管において、X線放射窓部は陽極のターゲットの周辺を囲む円筒形状の金属筒と、ターゲット上のX線発生源（以下、焦点という）に近接して配設され、X線透過性の良い金属材料から成る板状体のX線窓と、X線窓を支持する窓取付部、X線管装置などに取り付けるための大略リング状をしているフランジ部、および窓取付部とフランジ部を接続し大略筒形状をしている筒状部を有する放射筒とから構成され、金属筒は長さ方向中央部の側面のX線放射方向に大略円形の穴を有し、放射筒の筒状部の内周の直径は窓取付部における値よりもフランジ部における値の方が大きくなっており、金属筒の穴に放射筒の筒状部が嵌合され、金属筒の穴と放射筒の筒状部の外周との接線で結合されていることを特徴とする固定陽極X線管。   It has a cathode that generates an electron beam and a target that generates X-rays when the electron beam from the cathode collides. The anode, which is generally a rod-like body as a whole, and the cathode and the anode are opposed to each other and insulated and supported. An X-ray emission window made of a metal material as a whole, provided to hermetically enclose and extract X-rays generated at the target in a direction substantially perpendicular to the central axis of the X-ray tube (hereinafter referred to as the X-ray emission direction). In a fixed anode X-ray tube having an envelope having a portion, an X-ray emission window portion is a cylindrical metal tube surrounding the anode target and an X-ray generation source (hereinafter referred to as a focal point) on the target. A plate-shaped X-ray window made of a metal material with good X-ray permeability, a window mounting part that supports the X-ray window, and a generally ring shape for mounting to an X-ray tube device, etc. Connect the flange part and window mounting part to the flange part. The metal cylinder has a substantially circular hole in the X-ray radiation direction on the side surface of the central portion in the length direction, and the inside of the cylindrical portion of the radiation cylinder. The diameter of the circumference is larger in the flange portion than in the window mounting portion, the cylindrical portion of the radiating tube is fitted into the hole of the metal tube, and the cylindrical portion of the radial tube and the radial tube A fixed anode X-ray tube characterized by being connected by a tangent to the outer periphery of the tube. 請求項1記載の固定陽極X線管において、X線放射窓部の放射筒のフランジ部は円形リング状をしており、その外周に装置取付時にシール用部品を収容するためのシール溝を有することを特徴とする固定陽極X線管。
2. The fixed anode X-ray tube according to claim 1, wherein the flange portion of the radiation tube of the X-ray radiation window portion has a circular ring shape, and has a seal groove on the outer periphery thereof for accommodating a seal component when the device is mounted. This is a fixed anode X-ray tube.
JP2004038486A 2004-02-16 2004-02-16 Fixed anode x-ray tube Pending JP2005228696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004038486A JP2005228696A (en) 2004-02-16 2004-02-16 Fixed anode x-ray tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004038486A JP2005228696A (en) 2004-02-16 2004-02-16 Fixed anode x-ray tube

Publications (1)

Publication Number Publication Date
JP2005228696A true JP2005228696A (en) 2005-08-25

Family

ID=35003220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004038486A Pending JP2005228696A (en) 2004-02-16 2004-02-16 Fixed anode x-ray tube

Country Status (1)

Country Link
JP (1) JP2005228696A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311185A (en) * 2006-05-18 2007-11-29 Hamamatsu Photonics Kk X-ray tube, and x-ray irradiation device using the same
WO2009091044A1 (en) * 2008-01-17 2009-07-23 Kabushiki Kaisha Toshiba X-ray tube
WO2013130525A1 (en) * 2012-02-28 2013-09-06 X-Ray Optical Systems, Inc. X-ray analyzer having multiple excitation energy bands produced using multi-material x-ray tube anodes and monochromating optics
WO2017026140A1 (en) * 2015-08-10 2017-02-16 東芝電子管デバイス株式会社 X-ray tube, x-ray tube device, and method for manufacturing x-ray tube
CN110112047A (en) * 2019-04-28 2019-08-09 温州市康源电子有限公司 A kind of industrial detection X-ray tube
KR20200116337A (en) * 2019-04-01 2020-10-12 주식회사 디알텍 Apparatus for generating radiation
US10804065B2 (en) 2018-03-07 2020-10-13 Canon Electron Tubes & Devices Co., Ltd. X-ray tube

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101396026B1 (en) 2006-05-18 2014-05-16 하마마츠 포토닉스 가부시키가이샤 X-ray tube and x-ray irradiator employing it
WO2007135811A1 (en) * 2006-05-18 2007-11-29 Hamamatsu Photonics K.K. X-ray tube and x-ray irradiator employing it
JP2007311185A (en) * 2006-05-18 2007-11-29 Hamamatsu Photonics Kk X-ray tube, and x-ray irradiation device using the same
TWI416574B (en) * 2006-05-18 2013-11-21 Hamamatsu Photonics Kk X-ray tube and the use of this X-ray irradiation device
WO2009091044A1 (en) * 2008-01-17 2009-07-23 Kabushiki Kaisha Toshiba X-ray tube
JP2009170305A (en) * 2008-01-17 2009-07-30 Toshiba Corp X-ray tube
US8031839B2 (en) 2008-01-17 2011-10-04 Kabushik Kaisha Toshiba X-ray tube
CN101911244B (en) * 2008-01-17 2012-06-27 株式会社东芝 X-ray tube
US9449780B2 (en) 2012-02-28 2016-09-20 X-Ray Optical Systems, Inc. X-ray analyzer having multiple excitation energy bands produced using multi-material x-ray tube anodes and monochromating optics
CN104272424A (en) * 2012-02-28 2015-01-07 X射线光学系统公司 X-ray analyzer having multiple excitation energy bands produced using multi-material x-ray tube anodes and monochromating optics
WO2013130525A1 (en) * 2012-02-28 2013-09-06 X-Ray Optical Systems, Inc. X-ray analyzer having multiple excitation energy bands produced using multi-material x-ray tube anodes and monochromating optics
WO2017026140A1 (en) * 2015-08-10 2017-02-16 東芝電子管デバイス株式会社 X-ray tube, x-ray tube device, and method for manufacturing x-ray tube
CN108028159A (en) * 2015-08-10 2018-05-11 东芝电子管器件株式会社 The manufacture method of X-ray tube, X-ray pipe device and X-ray pipe device
US10636613B2 (en) 2015-08-10 2020-04-28 Canon Electron Tubes & Devices Co., Ltd. X-ray tube, X-ray tube device, and method of manufacturing X-ray tube device
CN108028159B (en) * 2015-08-10 2020-11-03 佳能电子管器件株式会社 X-ray tube, X-ray tube device, and method for manufacturing X-ray tube device
US10804065B2 (en) 2018-03-07 2020-10-13 Canon Electron Tubes & Devices Co., Ltd. X-ray tube
KR20200116337A (en) * 2019-04-01 2020-10-12 주식회사 디알텍 Apparatus for generating radiation
KR102269004B1 (en) 2019-04-01 2021-06-24 주식회사 디알텍 Apparatus for generating radiation
CN110112047A (en) * 2019-04-28 2019-08-09 温州市康源电子有限公司 A kind of industrial detection X-ray tube
CN110112047B (en) * 2019-04-28 2021-06-15 温州市康源电子有限公司 Industrial detection X-ray tube

Similar Documents

Publication Publication Date Title
US9508524B2 (en) Radiation generating apparatus and radiation imaging apparatus
JP6039282B2 (en) Radiation generator and radiation imaging apparatus
KR101515049B1 (en) Radiation generating apparatus and radiation imaging apparatus
US9831060B2 (en) X-ray generating apparatus and radiography system using the same
JP6327802B2 (en) Radiation generating tube, radiation generating apparatus and radiation imaging system using the same
US9117621B2 (en) Radiation generating tube, radiation generating unit, and radiation image taking system
JP6316019B2 (en) X-ray generating tube, X-ray generating apparatus and X-ray imaging system provided with the X-ray generating tube
US10181390B2 (en) X-ray tube including support for latitude supply wires
KR101923837B1 (en) Anode, and x-ray generating tube, x-ray generating apparatus, and radiography system using the same
JP2014179281A (en) X-ray tube equipped with field emission type electron gun and x-ray inspection device
US5751784A (en) X-ray tube
WO2021015036A1 (en) X-ray tube
WO2006009053A1 (en) Fixed anode x-ray tube, x-ray inspection device using the same, and x-ray irradiation device
JP2016143602A (en) Anode, x-ray generation tube using the same, x-ray generator and x-ray image-capturing system
JP2019186095A (en) X-ray tube
JP2005228696A (en) Fixed anode x-ray tube
JP4919956B2 (en) X-ray tube, X-ray tube apparatus and method for manufacturing X-ray tube
JP4526113B2 (en) Microfocus X-ray tube and X-ray apparatus using the same
JP4781156B2 (en) Transmission X-ray tube
JP2015076213A (en) Radiation tube, radiation generating device and radiographic system
JP6611495B2 (en) X-ray generator tube, X-ray generator and X-ray imaging system
CN109216139B (en) Housing for a multi-focus X-ray tube and multi-focus X-ray tube
CN114551192A (en) Cold cathode X-ray tube and X-ray generator
JP2019133872A (en) X-ray tube