200811902 (1) 九、發明說明 【發明所屬之技術領域】 本發明’係有關於照射X光之X光管，特別是有關 於具備有適合將X光照射在寬廣之範圍的構造之X光管 ，以及使用有此之X光照射裝置者。 【先前技術】 Φ x光管，係在高真空之管中使用電子源而產生電子， 並藉由將該電子射入至標靶中，而產生X光的裝置。作爲 此種X光管，例如係有在下述之專利文獻1中所揭示之X 光裝置。在此X光裝置中，從平面狀陰極所放出之電子線 ，係與身爲標靶之平面狀陽極相衝突，並將從平面狀陽極 所產生之X光’透過被設置在真空容器之側面的窗而取出 至外部。 〔專利文獻1〕日本特開第2003 -2 8 8 8 5 3號公報 【發明內容】 〔發明所欲解決之課題〕 而，如上述一般之具有於筐體內將平面狀之電子源作 保持的構造之X光管，係可藉由將電子源以及標靶大面積 化，而容易地將X光照射範圍作大面積化。於此，爲了將 X光於廣範圍而照射至外部，因此伴隨於電子源之大型化 ，亦有必要將取出窗設爲更大。然而，若是將取出窗大型 化，則取出窗會變爲容易破損。 -5- 200811902 (2) 於此，爲了提昇取出窗之強度，雖亦可考慮將取出窗 分割而設置，但是，於此情況，會有容易在被照射於大面 積之被照射物的X光之強度中產生不均的問題。 於此，本發明，係爲有鑑於上述之課題而進行者，其 ' 目的，係在於提供一種：就算在將X光照射範圍擴張時， - 亦能維持裝置之強度，並實現均勻之X光照射的X光管 〔用以解決課題之手段〕 爲了解決上述課題，本發明之X光管，係爲在真空外 圍器內，設置有放射電子之電子源，以及因應於從前述電 子源而來之電子的射入而產生X光之標靶，同時，在前述 真空外圍器，設置有用以將從前述標靶所產生之X光取出 至外部的X光取出窗，其特徵爲：前述X光取出窗，係 爲將包含有被設置於前述真空外圍器的1以上之窗部的窗 Φ 單元，沿著特定之方向而以至少2列來作複數配列所構成 ，複數之前述窗單元，係在相鄰接之列間，沿著前述特定 之方向，而以成爲鋸齒狀配列之方式來配置。 若是藉由此種X光管，則經由從真空外圍器內之電子 源所放出的電子的射入標靶，而產生X光，並將此X光 ，透過被設置於真空外圍器之X光取出窗而取出至外部。 此X光取出窗，係經由在複數之窗部作分割，而就算是在 將X光取出窗全體作大型化時，亦可提昇其強度，同時， 經由將具備有1以上之窗部的窗單元沿著特定之方向而以 -6- 200811902 (3) 2列以上來作鋸齒狀配列，能夠將沿著與特定之方向相垂 直的方向之X光的照射強度，涵蓋X光照射區域全體而 設爲均勻。 窗部，較理想係具備有被形成於真空外圍器之貫通孔 ' ，與以覆蓋貫通孔之方式而被設置在真空外圍器之窗材， * 而窗材，係在窗單元所配列之列間而分割設置。若是具備 有此種X光取出窗，則由於可將每一窗材所密封之區域變 Φ 小，因此能夠防止覆蓋貫通孔之窗材的破損。 又，窗材，若是在特定之方向上於每一窗單元作分割 而設置，亦爲理想。此時，由於可將每一窗材所密封之區 域更進而變小，因此更能夠防止窗材的破損。 又，窗部，若是形成爲細縫狀，亦爲理想。若是藉由 此種構成，則能構將沿著特定方向之X光的照射強度變得 更爲均勻。 又，窗部，若是形成爲圓形狀，亦爲理想。如此一來 • ，由於真空密封區域之形狀係成爲圓形，因此能更進而防 止X光取出窗之破損。 進而，貫通孔，若是以朝向真空外圍器之外側而擴張 的方式而被形成，而前述窗材，係以從真空外圍器之內側 來覆蓋貫通孔的方式而被設置，標靶，係被設置於窗材之 內側，則亦爲理想。此時，在能將從標靶所產生之X光有 效地取出至外部的同時，藉由將窗材配置於貫通孔之內側 ，而能夠減低因與窗材等之接觸所致的X光取出窗之破損 的可能性。 -7- 200811902 (4) 又更進而’貫通孔’若是以朝向真空外圍器之外側而 變狹窄的方式而被形成，而窗材，係以從真空外圍器之外 側來覆蓋貫通孔的方式而被設置，標靶，係被設置於窗材 之內側，則亦爲理想。若是採用此種構成，則能更爲提昇 ' 電子之射入標靶的效率。 ' 又更進而，真空外圍器，若是被形成爲長尺狀，而複 數之窗單元，係沿著真空外圍器之長邊方向而被配列，則 φ 亦爲理想。藉由此種構成，而能以更大的寬幅來照射X光 〇 或者是，本發明之X光照射裝置，係具備有：上述之 X光管；和導引部，其係將X光管與被照射物，在X光取 出窗之前方，沿著相對於特定之方向而相交會之方向來作 相對移動。若藉由此種X光照射裝置，則對於具有大面積 之被照射物，能夠更均勻地照射X光。 • 〔發明之效果〕 若藉由本發明，則能夠提供一種：就算在將X光照射 範圍擴張時，亦能維持裝置之強度，並實現均勻之X光照 射的X光管。 【實施方式】 以下，一面參考圖面，——面針對本發明之X光管的合 適之實施形態作詳細說明。另外，在圖面之說明中，對相 同又或是相當之部分係附加相同符號，並省略重複之說明 -8- 200811902 (5) 。又，各圖面係爲了說明用而作成者，對於說明對象之部 位，係以特別強調的方式而描繪。因此，在圖面中之各構 件的尺寸比例，係並不一定會與實際的物品一致。 圖1，係爲本發明之合適的一種實施形態的X光管1 之平面圖，圖2，係爲展示將圖1之X光管1的上部面板 取下後之狀態的平面圖，圖3，係爲沿著圖1之瓜·瓜線的 剖面圖，而圖4，係爲沿著圖1之IV · IV線的剖面圖。 φ 如此些之圖所示，X光管1，係具備有真空外圍器5 ，其係由以長尺狀之平板玻璃等的絕緣構件所成之上部面 板以及下部面板3 ;和以玻璃等之絕緣構件所成的四角柱 狀之側壁4所構成。上部面板2、下部面板3、以及側壁4 ，係經由玻璃而被形成，上部面板2以及下部面板3，係 藉由以熔塊玻璃（frit glass )等而密封附著於側壁4之開 口端，而將真空外圍器5之內部保持爲氣密。 在構成此真空外圍器之一部分的下部面板3之內面3a • 上，係被配置有：由於表面分別被塗布有碳系電子放出材 料6a、6b、6c之帶狀的金屬膜7a、7b、7c所構成之電子 源8a、8b、8c (參考圖2以及圖4 )。在各別之電子源8a 、8b、8c中，涵蓋金屬膜7a、7b、7c之除了兩端部以外 的上面全體，而被塗布有碳系電子放出材料6a、6b、6c。 於金屬膜7a、7b、7c中，係分別被電性連接有外部連接 用銷9a、9b、9c，此些外部連接用銷9a、9b、29c，係爲 用以從外部來設定金屬膜7a、7b、7c之電壓的銷，並係 被設置爲從真空外圍器5而貫通至外部。 -9- 200811902 (6) 於此，碳系電子放出材料6 a、6 b、6 c，係以碳奈米管 、碳奈米牆、碳奈米纖維、鑽石、類鑽碳（diamond-like carbon )等爲代表，爲具備有經由電場之作用而將電子放 出至外界之性質的所謂電場放出型之電子放出材料。作爲 對金屬膜7 a、7 b、7 c之碳系電子放出材料的被覆方法， 係可使用C V D法、噴霧法、印刷法等之方法。 此些之電子源8a、8b、8c，係分別被配置在經由側壁 % 4與內面3a所形成之3個的直線狀之溝部16a、16b、16c 內（圖4 )。亦即是，在側壁4中，沿著下部面板3之長 度方向，係經由朝向下部面板3而貫通的相互平行之3個 的細縫與內面3 a，而被形成有溝部1 6 a、1 6 b、1 6 c，而金 屬膜7a、7b、7c，係分別沿著成爲溝部16a、16b、16c之 底面的內面3a而被成膜。 又，在側壁4中之包挾溝部16a、16b、16c的內面4a 上，係與電子源8a、8b、8c並列地而被鋪設有複數之身 • 爲帶狀金屬膜的拉出電極11。此拉出電極11，係以將各 電子源8a、8b、8c從兩側來包挾之方式而被分割配置， 、 且沿著電子源8a、8b、8c之長邊方向而更進而被作2分 、 割。進而，在拉出電極1 1中，於每一組之將電子源8a、 8b、8c包挾而設置的電極，係被連接有外部連接用銷12 〇 上部面板2，係經由在對向於電子源8a、8b、8c之位 置形成複數的細縫狀之貫通孔1 3 ’來作爲將X光取出至 外部之X光取出窗而起作用（圖Π 。貫通孔13，係以成 •10- 200811902 (7) 爲從上部面板2之真空側的內面開口起，朝向外面之開口 而逐漸變狹窄之方式，而打穿爲剖面梯形狀並形成（圖4 )° 此些之貫通孔13，係以對向於各電子源8a、8b、8c ，而沿著其長邊方向（特定之方向）成爲3列之方式，而 ' 在各列中於一直線上配置複數並以等間隔來配列而形成。 其結果，係被構成有由在配列方向上相鄰接之2個的貫通 φ 孔1 3所成之窗單元1 3 A，和由1個的貫通孔1 3所成之窗 單元13B。在對向於電子源8a、8c之兩端的列上，2個的 窗單元13A係以包挾1個的窗單元13B之方式而被配置， 而在對向於電子源8 b之中心的列上，2個的窗單元1 3 A 係相鄰接地被配置。窗單元1 3 A、1 3 B，係在相鄰接的列 間，以沿著電子源8a、8b、8c之長邊方向而成爲鋸齒狀 配列的方式，具體而言，在上部面板2之平面上，沿著電 子源8a、8b、8c之長邊方向，從垂直於窗單元13A、13B # 之配列方向的方向看去，在對應於特定之列上沿著電子源 8a、8b、8c之長邊方向而相鄰接的窗單元13A及13B (又 或是，窗單元1 3 A彼此之間）之邊界的位置，鄰接於特定 之列的列上之窗單元13A(又或是，窗單元13B)，係以 與特定之列的窗單元13A與13B (又或是，窗單元13A彼 此之間）的兩者相重疊之方式而被配置。亦即是，在特定 之列上的相鄰接之窗單元的邊界，係以不與在鄰接之列上 的連續之窗單元的邊界一致的方式，而相互交錯的配置。 又，在窗單元13A、13B上之貫通孔13，亦係以成爲與窗 -11 - 200811902 (8) 單元13A、13B相同之配置的方式而被形成。 又，在上部面板2之外側表面上，作爲在每一窗單元 1 3 A、1 3 B上被分割之窗材的矽薄膜1 4，係以覆蓋貫通孔 13之方式’經由陽極接合而被接合’並以砂薄膜14與貫 通孔1 3而構成使X光透過至外部之窗部。亦即是，此矽 薄膜1 4，係在以被配列有窗部之列間而被分割的同時，在 配列方向上亦被作分割設置。另外，作爲窗材，除了矽以 φ 外，亦可使用鈹等之其他的具有X光透過性之材料。藉由 此種矽薄膜1 4的存在，而實現真空外圍器5之內部的氣 密密封。 進而，在矽薄膜14之內側，亦即是從真空側面之貫 通孔1 3所露出之部位，係藉由蒸鍍等而被形成有鎢等之 標靶材1 5 (圖4 )。此標靶材1 5，係具備有因應於從電子 源8 a、8 b、8 c而來之電子的射入而使X光產生的性質。 另外，亦包含有貫通孔13之內壁，而在上部面板2之真 φ 空側亦蒸鍍有鎢等之導電性構件。由電子源8而來之電子 ，由於亦會射入至身爲絕緣構件之上部面板2，因此會有 上部面板2帶電，而對形成於真空外圍器5內之電場造成 影響的情形。因此，經由以導電性構件來覆蓋電子射入側 ，而防止帶電。另外，在本實施形態中，係與標靶材1 5 一體地被蒸鍍形成。又，對標靶材15之電壓供給，亦係 經由與從真空外圍器5貫通至外部而設置之外部連接用銷 1 7相接觸的導電性構件而進行。 在以上所說明之X光管1中，經由從真空外圍器5內 -12- (9) 200811902 之電子源8a、8b、8c所放出的電子之射入標靶4 產生X光，並將此X光，透過被設置於真空外圍 光取出窗而取出至外部。此X光取出窗，由於係 貫通孔1 3之窗單元1 3 A、1 3 B，沿著上部面板2 向的方向，而以2列以上來作鋸齒狀配列，因此 將窗全體作大型化的情況時，經由以貫通孔1 3 複數之區域，而能一面實質的保持X光取出窗全 ，一面增加在窗單元內之矽薄膜14的保持區域 ，能夠提昇以矽薄膜1 4所覆蓋的X光取出窗之 耐久度。 又，能涵蓋垂直於真空外圍器5之長邊方向 而將X光之照射強度在X光照射區域全體作均 時，經由將被照射物平行於X光取出窗之面，且 外圍器5之短邊方向來使其移動，在具備有大面 射物體中，能夠不產生照射之不均，而對全體均 X光。特別是，在使X光管接近被照射物而照射 況時，由於X光之指向性係提高，因此對於使用 所致之照射強度的均勻化之效果係爲大。 又，矽薄膜14，係以被配列有窗單元13A、 間而被分割設置，進而，在真空外圍器5之長邊 被分割設置。因此，由於能將每一個的矽薄膜1 之區域變小，故而被施加於矽薄膜1 4上之力亦 能夠防止在製造時或使用時之作爲覆蓋貫通孔1 而使用的矽薄膜14之破損。又，隨著矽薄膜14 才15，而 器5之X 將具備有 之長邊方 就算是在 來分割爲 體之面積 ，其結果 強度以及 的方向， 勻化，同 朝向真空 積之被照 勻地照射 X光的情 X光管1 1 3 B之列 方向上亦 4所密封 變小，而 3之窗材 之面積的 -13- 200811902 (10) 變大，會有難以得到全體係爲均質之矽薄膜1 4的傾向， 但是，若是藉由分割而將面積變小’則變爲容易得到全體 爲均質之砂薄膜14。亦即是’由於在從砂晶圓等來製作砂 薄膜1 4時之製造效率亦會提昇，因此能容易的製作X光 取出窗。 又，貫通孔1 3，由於係以成爲朝向真空外圍器5之外 側而變狹窄的方式而被形成，因此能使從電子源8a、8b、 φ 8 c所放出之電子有效率的射入至標靶材1 5，更加上，由 於矽薄膜1 4係被設置在上部面板2之外側表面上，因此 從矽薄膜1 4所取出之X光，係不會被上部面板2所吸收 ，而能作直接照射，因此能將X光有效的照射至外部。 接下來，針對身爲使用有X光管1之X光照射裝置 的靜電除電裝置1 〇 1之構成作說明。圖5，係爲展示靜電 除電裝置101之構成的立體圖。如同圖所示一般，靜電除 電裝置101，係具備有：身爲用以使帶狀之塑膠薄膜（被 # 照射物）110於長邊方向上前進的導引部之滾輪120、121 ;和以使X光取出窗對向於塑膠薄膜1 1 0之表面，並以使 ^ 塑膠薄膜110之前進方向成爲垂直於真空外圍器5之長邊 方向的方式而被配置之X光管1;和覆蓋X光管1以及塑 膠薄膜1 1 〇之X光照射部分，以防止X光漏出至外部的X 光遮蔽殻體140。在X光遮蔽殼體140之內部，係被充滿 有空氣又或是氣體。 在此種靜電除電裝置1 0 1中，經由從電源裝置1 5 〇之 給電’從X光管1所射出之X光，係被照射在經由滾輪 -14- 200811902 (11) 120、121之旋轉而前進的塑膠薄膜110之上面。經由χ 光之照射，接觸於塑膠薄膜110之上面的空氣等係被離子 化，而在塑膠薄膜110之上面，與帶電之電荷相結合。因 此，塑膠薄膜110之上面係被除電。到達塑膠薄膜110之 上面的X光，係透過塑膠薄膜1 1 0，而亦將接觸於塑膠薄 膜1 1 〇之背面的空氣離子化。經由離子化所產生之電荷， 係與在塑膠薄膜1 1 0之背面所帶電的電荷相結合，而亦將 塑膠薄膜110的背面作除電。於此，藉由以涵蓋塑膠薄膜 110所通過之範圍的方式來配置X光管1，在具備有大面 積之塑膠薄膜等的被照射物中，能夠不產生照射不均地來 均勻的照射X光，而能有效的除電。特別是，係以對於被 照射物之前進方向而使窗單元之列作垂直交會之方式，而 配置X光管1。乂光管1，由於係以使構成X光取出窗之 窗單元成爲鋸齒狀配列的方式而作配列，因此，在對被照 射物最先照射X光之窗單元的列中，對於連續之窗單元間 的邊界部分，係可確實地以接下來對被照射物照射光之列 的窗單元來作照射，因此，就算是大面積，亦可無所遺漏 的進行照射以及除電。 另外，本發明，係並不被前述之實施形態所限定。例 如’作爲被設置於X光管1之上部面板2的窗部之形狀， 係可採用各種之形狀。 圖6，係爲本發明之變形例的X光管2 1之平面圖， 圖7，係爲沿著圖6之χ光管2 1的w - W線之剖面圖。如 此些之圖所示，和X光管1相同的，包含有1個的貫通孔 -15- (12) (12)200811902 33之窗單元33A，與包含有2個的貫通孔33之窗單元 3 3B，係沿著上部面板2之長邊方向，而以3列來成爲鋸 齒狀配列之方式而被形成。此貫通孔3 3，係以成爲從上部 面板2之真空側的內面開口起，朝向外面之開口而逐漸擴 張之方式，而打穿爲剖面梯形狀並形成（圖7 )。身爲窗 材之矽薄膜34，係以將貫通孔33從內側（真空側）來覆 蓋的方式，沿著上部面板2之內面而被接合，在此矽薄膜 34之內面，亦即是，在與位於真空側之電子源8a、8b、 8c相對向之面，係幾乎於全面而被形成有標靶材3 5。 在此種X光管21中，由於係從上部面板2之外側表 面起直到深處爲止而被配置有矽薄膜34，因此在能防止因 接觸等之外部要因所致的矽薄膜34之破損等的同時，亦 能使矽薄膜3 4之與上部面板2的接合部分不會暴露在大 氣中，故而，因外部要因所致之接合部分的劣化係爲少。 又，作爲在X光取出窗之各個的窗單元中之貫通孔的 配置，係可作各種之配置。具體而言，亦可如圖8所示的 窗單元43 —般，將被形成爲圓形之複數的貫通孔以並列 成1列的方式而形成，並在窗單元43之相鄰接的列間， 將窗單元以及貫通孔作鋸齒狀的配置。此時，由於貫通孔 之邊緣部與窗材間之接觸係成爲圓形狀，因此在接觸部之 力的分散係容易變爲均勻，並使窗材難以破損。又，亦可 如圖9所示之窗單元5 3 —般，將被形成爲圓形之複數的 貫通孔配置爲2列，並將2列統合並將其作爲窗單元而視 爲1列。此時，在窗單元中，係成爲可將貫通孔與支持窗 -16- 200811902 (13) 材之部分間平衡性佳的作配置。又，亦可如圖1 〇所示之 窗單元63 —般，將貫通孔本身在窗單元63之中作鋸齒狀 配置。此時，在窗單元內，亦成爲可作均勻之X光照射。 更進而，亦可如圖11所示之窗單元73 —般，將被形成爲 ~ 細縫狀之貫通孔以2列並列之方式來配置，並將2列統合 ' 並將其作爲窗單元而視爲1列。此時，在窗單元中，係成 爲可將貫通孔與支持窗材之部分間平衡性佳的作配置，更 φ 進而，在細縫狀貫通孔之長邊方向中的X光照射的均勻性 亦爲高。。 又，亦可將每一個別的貫通孔作爲窗單元。 又，在X光照射裝置中，導引部係並不限定爲使被照 射物移動之手段，而亦可爲用以使X光管移動之手段。 又，構成真空外圍器5之構件，係並不限定爲絕緣材 料，例如，係可在上部面板2中，使用導電性構件。 又，作爲蒸鍍於上部面板2之真空側的導電性構件， • 係並不限定於與標靶材作一體形成的情況，亦可爲使用有 與標靶材爲相異之導電性材料者，例如，亦可爲由鋁或 ITO ( Indium Tin oxide)等所致之薄膜。 【圖式簡單說明】 [圖1]本發明之合適的一種實施形態的X光管之平面 圖。 [圖2]展示將圖1之X光管的上部面板取下後之狀態 的平面圖。 -17- 200811902 (14) [圖3 ]沿著圖1之χ光管的]π -皿線之剖面圖。 [圖4]沿著圖1之X光管的ϊγ - IV線之剖面圖。 [圖5]使用有圖1之X光管的靜電除電裝置之立體圖 〇 [圖6]本發明之變形例的X光管之平面圖。 [圖7]沿著圖6之X光管的ΥΠ -VII線之剖面圖。 [圖8]本發明之變形例中的上部面板之平面圖。 φ [圖9]本發明之變形例中的上部面板之平面圖。 [圖10]本發明之變形例中的上部面板之平面圖。 [圖1 1 ]本發明之變形例中的上部面板之平面圖。 【主要元件符號說明】 1、21 : X光管 5 :真空外圍器 8a、8b、8c :電子源 • 1 3、3 3 :貫通孔（窗部） 1 3 A、1 3 B、3 3 A、3 3 B、4 3、53、63、73:窗單元 14、34:矽薄膜（窗材） 1 5、3 5 :標靶材 1 〇 1 :靜電除電裝置（X光照射裝置） 1 1 0 :塑膠薄膜（被照射物） 120、121 :滾輪（導引部） -18-200811902 (1) Nine, the invention belongs to the technical field of the invention. The present invention relates to an X-ray tube that emits X-rays, and more particularly to an X-ray tube having a configuration suitable for irradiating X-rays over a wide range. And those who use this X-ray irradiation device. [Prior Art] A Φ x-ray tube is a device that generates electrons by using an electron source in a high-vacuum tube and generates X-rays by injecting the electrons into the target. As such an X-ray tube, for example, an X-ray device disclosed in Patent Document 1 below is used. In this X-ray device, the electron beam emitted from the planar cathode collides with the planar anode which is the target, and transmits the X-ray generated from the planar anode through the side of the vacuum vessel. The window is taken out to the outside. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-28 8 8 5 3 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] As described above, generally, a planar electron source is held in a casing. The X-ray tube of the structure can easily enlarge the X-ray irradiation range by increasing the area of the electron source and the target. Here, in order to irradiate the X-ray to the outside in a wide range, it is necessary to make the take-out window larger as the size of the electron source increases. However, if the take-out window is enlarged, the take-out window becomes easily broken. -5- 200811902 (2) Here, in order to increase the strength of the take-out window, it is also conceivable to divide the take-out window, but in this case, there is a possibility that X-rays that are easily irradiated to a large area of the object to be irradiated There is a problem of unevenness in the strength. Accordingly, the present invention has been made in view of the above problems, and an object thereof is to provide a method of maintaining the intensity of a device even when the X-ray irradiation range is expanded, and achieving uniform X-rays. X-ray tube to be irradiated [Means for Solving the Problem] In order to solve the above problems, the X-ray tube of the present invention is an electron source in which a radiation electron is provided in a vacuum enveloper, and in response to the electron source from the electron source. The X-ray target is generated by the injection of electrons, and the X-ray extraction window for extracting the X-rays generated from the target to the outside is provided in the vacuum peripheral, characterized in that the X-ray is The window is formed by arranging a window Φ unit including one or more window portions provided in the vacuum enveloper in at least two columns along a specific direction, and the plurality of window units are Between adjacent rows, they are arranged in a zigzag arrangement along the specific direction. According to such an X-ray tube, X-rays are generated via an injection target of electrons emitted from an electron source in the vacuum envelope, and the X-rays are transmitted through X-rays provided in a vacuum enveloper. Take out the window and take it out to the outside. The X-ray take-out window is divided into a plurality of window portions, and even when the entire X-ray take-out window is enlarged, the strength can be increased, and the window having the window portion having one or more windows can be used. The unit is arranged in a zigzag manner in a specific direction of -6-200811902 (3) 2 or more, and the irradiation intensity of the X-ray along the direction perpendicular to the specific direction can cover the entire X-ray irradiation area. Set to even. Preferably, the window portion is provided with a through hole formed in the vacuum envelope, and a window member provided in the vacuum envelope to cover the through hole, and the window member is arranged in the column of the window unit. Split the settings. If such an X-ray take-out window is provided, since the area where each window material is sealed can be made smaller by Φ, it is possible to prevent breakage of the window material covering the through-hole. Further, it is also preferable that the window material is provided for division in each window unit in a specific direction. At this time, since the area in which each window material is sealed can be further reduced, it is possible to prevent breakage of the window material. Further, it is also preferable that the window portion is formed in a slit shape. According to this configuration, it is possible to make the irradiation intensity of the X-rays in a specific direction more uniform. Further, it is also preferable that the window portion is formed in a circular shape. In this way, since the shape of the vacuum seal region is rounded, the damage of the X-ray take-out window can be further prevented. Further, the through hole is formed to expand toward the outer side of the vacuum envelope, and the window member is provided so as to cover the through hole from the inside of the vacuum envelope, and the target is set. It is also ideal on the inside of the window. In this case, the X-rays taken out from the target can be effectively taken out to the outside, and the window material can be disposed inside the through-holes, thereby reducing X-ray removal due to contact with the window material or the like. The possibility of damage to the window. -7- 200811902 (4) Further, the 'through hole' is formed so as to be narrow toward the outer side of the vacuum envelope, and the window material is formed by covering the through hole from the outer side of the vacuum envelope. It is also ideal if the target is set to the inside of the window. If this configuration is adopted, the efficiency of the electron injection target can be further improved. Further, if the vacuum envelope is formed into a long shape and the plurality of window units are arranged along the longitudinal direction of the vacuum enveloper, φ is also desirable. According to this configuration, the X-ray irradiation device can be irradiated with a larger width. The X-ray irradiation device of the present invention includes: the X-ray tube described above; and the guiding portion, which is to emit X-rays. The tube and the object to be irradiated move relative to each other in a direction intersecting with a specific direction before the X-ray take-out window. According to such an X-ray irradiation apparatus, it is possible to more uniformly irradiate X-rays to an object to be irradiated having a large area. [Effects of the Invention] According to the present invention, it is possible to provide an X-ray tube capable of maintaining the intensity of the apparatus and achieving uniform X-ray irradiation even when the X-ray irradiation range is expanded. [Embodiment] Hereinafter, a preferred embodiment of the X-ray tube of the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same reference numerals are attached to the same or equivalent parts, and the overlapping description is omitted -8- 200811902 (5). Further, each drawing is made for the purpose of explanation, and the parts to be described are drawn with particular emphasis. Therefore, the size ratio of each component in the drawing does not necessarily coincide with the actual article. 1 is a plan view of an X-ray tube 1 according to a preferred embodiment of the present invention, and FIG. 2 is a plan view showing a state in which an upper panel of the X-ray tube 1 of FIG. 1 is removed. FIG. FIG. 4 is a cross-sectional view taken along line IV · IV of FIG. 1 . φ As shown in the figure, the X-ray tube 1 is provided with a vacuum envelope 5 which is formed by an insulating member such as a long-sized flat glass or the like, and is formed by an upper panel and a lower panel 3; The four-corner columnar side wall 4 formed by the insulating member is formed. The upper panel 2, the lower panel 3, and the side wall 4 are formed by glass, and the upper panel 2 and the lower panel 3 are sealed and attached to the open end of the side wall 4 by frit glass or the like. The inside of the vacuum envelope 5 is kept airtight. The inner surface 3a of the lower panel 3 constituting one of the vacuum envelopes is provided with strip-shaped metal films 7a and 7b which are coated with carbon-based electron emission materials 6a, 6b, and 6c, respectively. The electron sources 8a, 8b, and 8c constituted by 7c (refer to Figs. 2 and 4). The respective electron sources 8a, 8b, and 8c cover the entire upper surface of the metal films 7a, 7b, and 7c except for both end portions, and are coated with the carbon-based electron emission materials 6a, 6b, and 6c. In the metal films 7a, 7b, and 7c, external connection pins 9a, 9b, and 9c are electrically connected, and the external connection pins 9a, 9b, and 29c are used to set the metal film 7a from the outside. The pins of the voltages of 7b and 7c are arranged to pass through from the vacuum envelope 5 to the outside. -9- 200811902 (6) Here, the carbon-based electron emission materials 6 a, 6 b, and 6 c are made of carbon nanotubes, carbon nanowalls, carbon nanofibers, diamonds, diamond-like carbon (diamond-like Carbon and the like represent a so-called electric field emission type electron emission material having a property of emitting electrons to the outside through the action of an electric field. As a method of coating the carbon-based electron emission material of the metal films 7a, 7b, and 7c, a method such as a C V D method, a spray method, or a printing method can be used. The electron sources 8a, 8b, and 8c are disposed in the three linear grooves 16a, 16b, and 16c formed by the side wall % 4 and the inner surface 3a (Fig. 4). In other words, the side wall 4 is formed with the groove portion 16 a along the longitudinal direction of the lower panel 3 via the three parallel slits and the inner surface 3 a penetrating toward the lower panel 3 . 1 6 b and 1 6 c, and the metal films 7a, 7b, and 7c are formed along the inner surface 3a which is the bottom surface of the groove portions 16a, 16b, and 16c, respectively. Further, on the inner surface 4a of the wrap grooves 16a, 16b, and 16c in the side wall 4, a plurality of bodies are laid in parallel with the electron sources 8a, 8b, and 8c. The pull-out electrode 11 is a strip-shaped metal film. . The pull-out electrode 11 is divided so as to surround each of the electron sources 8a, 8b, and 8c from both sides, and is further formed along the longitudinal direction of the electron sources 8a, 8b, and 8c. 2 points, cut. Further, in the pull-out electrode 1 1 , the electrode provided in each of the sets of the electron sources 8 a , 8 b , and 8 c is connected to the external connection pin 12 〇 the upper panel 2 via the opposite direction The positions of the electron sources 8a, 8b, and 8c form a plurality of slit-like through holes 13' to function as an X-ray take-out window for taking out X-rays to the outside (Fig. 贯通. Through-holes 13, which are made up to 10) - 200811902 (7) In order to gradually narrow the opening toward the outer surface from the inner surface opening of the vacuum side of the upper panel 2, it is formed into a sectional trapezoidal shape and formed (Fig. 4). In the case where the electron sources 8a, 8b, and 8c are opposed to each other, the longitudinal direction (specific direction) is three columns, and 'there are a plurality of columns arranged on the straight line in each column and arranged at equal intervals. As a result, the window unit 1 3 A formed by the two through holes φ adjacent to each other in the arrangement direction and the window unit formed by the one through hole 13 are formed. 13B. On the column opposite to both ends of the electron sources 8a, 8c, the two window units 13A are surrounded by one window unit 13B. Arranged in the formula, on the column opposite to the center of the electron source 8 b, two window units 13 3 A are arranged adjacent to each other. The window units 1 3 A, 1 3 B are adjacent The columns are arranged in a zigzag manner along the longitudinal direction of the electron sources 8a, 8b, and 8c, specifically, along the long sides of the electron sources 8a, 8b, and 8c on the plane of the upper panel 2. The direction, from the direction perpendicular to the arrangement direction of the window units 13A, 13B # , the window units 13A and 13B adjacent to each other along the longitudinal direction of the electron sources 8a, 8b, 8c (in the specific column) Or, the position of the boundary between the window elements 1 3 A, adjacent to the window unit 13A (or the window unit 13B) on the column of the particular column, is associated with the window unit 13A of the specific column. Arranged in such a manner as to overlap with both of 13B (or alternatively, window elements 13A). That is, the boundaries of adjacent window elements on a particular column are not adjacent to each other. The alignment of the continuous window elements on the column is consistent with each other, and the interlaced arrangement is on the window units 13A, 13B, It is also formed in the same manner as the windows 11 - 200811902 (8) units 13A, 13B. Also, on the outer side surface of the upper panel 2, as in each window unit 1 3 A, 1 3 B The tantalum film 14 of the divided window material is "joined by anodic bonding" so as to cover the through hole 13, and the sand film 14 and the through hole 13 constitute a window portion through which X light is transmitted to the outside. That is, the tantalum film 14 is divided between the columns arranged in the window portion, and is also divided in the arrangement direction. Further, as the window material, in addition to φ, other materials having X-ray transmittance such as ruthenium may be used. The hermetic sealing of the inside of the vacuum envelope 5 is achieved by the presence of such a tantalum film 14. Further, inside the tantalum film 14, that is, a portion exposed from the through hole 13 of the vacuum side surface, a target material 15 such as tungsten (Fig. 4) is formed by vapor deposition or the like. The target material 15 has a property of generating X-rays in response to the injection of electrons from the electron sources 8a, 8b, and 8c. Further, the inner wall of the through hole 13 is also included, and a conductive member such as tungsten is vapor-deposited on the true φ side of the upper panel 2. Since the electrons from the electron source 8 are also incident on the upper panel 2 as the insulating member, the upper panel 2 is charged and the electric field formed in the vacuum envelope 5 is affected. Therefore, charging is prevented by covering the electron injection side with a conductive member. Further, in the present embodiment, it is formed by vapor deposition integrally with the target material 15 . Further, the voltage supply to the target material 15 is also performed by a conductive member that comes into contact with the external connection pin 17 provided from the vacuum envelope 5 to the outside. In the X-ray tube 1 described above, X-rays are generated via the injection target 4 of electrons emitted from the electron sources 8a, 8b, 8c of the -12-(9) 200811902 in the vacuum envelope 5, and this is The X-ray is taken out to the outside through a light extraction window provided outside the vacuum. Since the X-ray extraction window is arranged in a zigzag manner in two or more rows in the direction in which the upper panel 2 is oriented, the window units 1 3 A and 1 3 B of the through-holes 1 are enlarged. In the case of the plurality of through-holes 1, the entire area of the X-ray extraction window can be substantially maintained, and the holding area of the ruthenium film 14 in the window unit can be increased, and the ruthenium film 14 can be covered. The durability of the X-ray removal window. Further, it is possible to cover the longitudinal direction of the vacuum envelope 5 and to irradiate the X-ray irradiation intensity to the entire X-ray irradiation area, and to expose the object to be irradiated parallel to the X-ray extraction window, and the peripheral 5 In the short-side direction, it is possible to move, and in the case of a large-surface object, it is possible to generate X-rays for the entire surface without unevenness of illumination. In particular, when the X-ray tube is brought close to the object to be irradiated, the directivity of the X-ray is improved, so that the effect of uniformizing the irradiation intensity due to use is large. Further, the tantalum film 14 is divided and arranged so as to be arranged with the window unit 13A, and further divided by the long side of the vacuum envelope 5. Therefore, since the area of each of the tantalum film 1 can be made small, the force applied to the tantalum film 14 can prevent the breakage of the tantalum film 14 used as the cover through hole 1 at the time of manufacture or use. . Moreover, as the film 14 is only 15 and the X of the device 5 will have the long side, even if it is divided into the area of the body, the intensity and direction of the result are homogenized, and the same toward the vacuum product is illuminated. X-ray X-ray tube X 1 tube 3 1 B direction is also sealed in the direction of 4, and the area of 3 window material - 13- 200811902 (10) becomes larger, it will be difficult to obtain the whole system as homogeneous Although the film 14 tends to be smaller, if the area is made smaller by the division, it becomes easy to obtain the homogeneous sand film 14 as a whole. That is, since the manufacturing efficiency is also improved when the sand film 14 is produced from a sand wafer or the like, the X-ray take-out window can be easily produced. Further, since the through hole 13 is formed to be narrow toward the outside of the vacuum envelope 5, the electrons emitted from the electron sources 8a, 8b, and φ 8 c can be efficiently injected into The target material 15 is further provided, since the tantalum film 14 is disposed on the outer surface of the upper panel 2, the X-rays taken out from the tantalum film 14 are not absorbed by the upper panel 2, but can be Direct irradiation is performed, so that X-rays can be efficiently irradiated to the outside. Next, the configuration of the static electricity removing device 1 〇 1 which is an X-ray irradiation apparatus using the X-ray tube 1 will be described. Fig. 5 is a perspective view showing the configuration of the static electricity removing device 101. As shown in the figure, the static electricity discharge device 101 is provided with rollers 120 and 121 which are guide portions for advancing the strip-shaped plastic film (the irradiated object 110) in the longitudinal direction; Having the X-ray take-up window facing the surface of the plastic film 110, and arranging the X-ray tube 1 so that the forward direction of the plastic film 110 is perpendicular to the longitudinal direction of the vacuum envelope 5; The X-ray tube 1 and the X-ray irradiated portion of the plastic film 1 1 are prevented from leaking X-rays to the external X-ray shielding case 140. Inside the X-ray shielding housing 140, it is filled with air or gas. In the electrostatic discharge device 1 0 1 , the X-rays emitted from the X-ray tube 1 via the power supply device 15 are irradiated with the rotation via the rollers 14-200811902 (11) 120, 121. And on the top of the advancing plastic film 110. The light or the like contacting the upper surface of the plastic film 110 is ionized by the irradiation of the phosphor, and is combined with the charged electric charge on the plastic film 110. Therefore, the upper surface of the plastic film 110 is neutralized. The X-ray that reaches the top of the plastic film 110 passes through the plastic film 110, and ionizes the air that contacts the back surface of the plastic film 1 1 . The charge generated by ionization is combined with the charge charged on the back side of the plastic film 110, and the back side of the plastic film 110 is also neutralized. Here, by arranging the X-ray tube 1 so as to cover the range in which the plastic film 110 is passed, it is possible to uniformly irradiate the X-rays having a large-area plastic film or the like without uneven irradiation. Light, but can effectively remove electricity. In particular, the X-ray tube 1 is disposed in such a manner that the columns of the window elements are vertically intersected with respect to the direction in which the object to be irradiated is advanced. Since the calender tube 1 is arranged so that the window elements constituting the X-ray take-out window are arranged in a zigzag manner, in the column in which the window unit of the X-ray is irradiated first to the object to be irradiated, the continuous window is The boundary portion between the cells can be surely irradiated with the window unit that sequentially illuminates the object to be irradiated with light, so that even a large area can be irradiated and removed without any omission. Further, the present invention is not limited to the above embodiments. For example, as the shape of the window portion provided on the upper panel 2 of the X-ray tube 1, various shapes can be employed. Fig. 6 is a plan view showing an X-ray tube 2 1 according to a modification of the present invention, and Fig. 7 is a cross-sectional view taken along line w - W of the calender tube 2 1 of Fig. 6. As shown in the figure, the same as the X-ray tube 1, there is one through hole -15-(12) (12) 200811902 33 window unit 33A, and a window unit including two through holes 33 3 3B is formed in a zigzag arrangement in three rows along the longitudinal direction of the upper panel 2. The through hole 3 3 is formed so as to gradually expand from the opening on the vacuum side of the upper panel 2 toward the opening of the outer surface, and is formed into a cross-sectional trap shape (Fig. 7). The film 34 as a window material is joined along the inner surface of the upper panel 2 so that the through hole 33 is covered from the inner side (vacuum side), and the inner surface of the enamel film 34 is The target material 35 is formed almost perpendicularly to the surface of the electron source 8a, 8b, 8c located on the vacuum side. In the X-ray tube 21, since the ruthenium film 34 is disposed from the outer surface of the upper panel 2 to the deep side, it is possible to prevent breakage of the ruthenium film 34 due to external factors such as contact. At the same time, the joint portion of the tantalum film 34 and the upper panel 2 can be prevented from being exposed to the atmosphere, so that the deterioration of the joint portion due to external factors is small. Further, the arrangement of the through holes in the window unit of each of the X-ray take-out windows can be variously arranged. Specifically, as in the window unit 43 shown in FIG. 8, the plurality of through holes formed in a circular shape may be formed in a line in parallel, and adjacent columns of the window unit 43 may be formed. The window unit and the through hole are arranged in a zigzag manner. At this time, since the contact between the edge portion of the through hole and the window member is rounded, the dispersion of the force at the contact portion is likely to be uniform, and the window member is hard to be broken. Further, as in the window unit 53 shown in Fig. 9, the plurality of through holes formed in a plurality of circles may be arranged in two rows, and the two columns may be combined and regarded as a window unit as one column. At this time, in the window unit, it is possible to arrange the through hole and the portion of the support window -16-200811902 (13). Further, the through hole itself may be arranged in a zigzag manner in the window unit 63 as in the case of the window unit 63 shown in Fig. 1 . At this time, in the window unit, it is also possible to perform uniform X-ray irradiation. Further, as in the window unit 73 shown in FIG. 11, the through holes formed in the shape of a slit can be arranged in two rows in parallel, and the two columns can be integrated and used as a window unit. Treated as 1 column. In this case, in the window unit, it is possible to arrange the balance between the through hole and the portion of the support window member, and further, φ and further uniformity of X-ray irradiation in the longitudinal direction of the slit-like through hole. It is also high. . Further, each individual through hole may be used as a window unit. Further, in the X-ray irradiation apparatus, the guiding portion is not limited to a means for moving the object to be irradiated, and may be a means for moving the X-ray tube. Further, the member constituting the vacuum envelope 5 is not limited to an insulating material. For example, a conductive member can be used in the upper panel 2. Further, the conductive member to be vapor-deposited on the vacuum side of the upper panel 2 is not limited to being integrally formed with the target material, and may be a conductive material different from the target material. For example, it may be a film made of aluminum or ITO (Indium Tin Oxide) or the like. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A plan view of an X-ray tube of a suitable embodiment of the present invention. Fig. 2 is a plan view showing a state in which the upper panel of the X-ray tube of Fig. 1 is removed. -17- 200811902 (14) [Fig. 3] A cross-sectional view of the [pi] dish along the tube of Fig. 1. Fig. 4 is a cross-sectional view taken along line ϊ γ - IV of the X-ray tube of Fig. 1. Fig. 5 is a perspective view of an electrostatic discharge device using the X-ray tube of Fig. 1. Fig. 6 is a plan view showing an X-ray tube according to a modification of the present invention. Fig. 7 is a cross-sectional view taken along line ΥΠ-VII of the X-ray tube of Fig. 6. Fig. 8 is a plan view of an upper panel in a modified example of the present invention. φ [Fig. 9] A plan view of an upper panel in a modified example of the present invention. Fig. 10 is a plan view of an upper panel in a modified example of the present invention. [Fig. 1 1] A plan view of an upper panel in a modification of the present invention. [Description of main component symbols] 1, 21: X-ray tube 5: Vacuum peripherals 8a, 8b, 8c: Electron source • 1 3, 3 3 : Through-hole (window) 1 3 A, 1 3 B, 3 3 A , 3 3 B, 4 3, 53, 63, 73: window unit 14, 34: 矽 film (window) 1 5, 3 5 : target 1 〇 1 : electrostatic discharge device (X-ray irradiation device) 1 1 0: plastic film (irradiated material) 120, 121: roller (guide) -18-