JP4904000B2 - 垂直テーパ導波路 - Google Patents

垂直テーパ導波路 Download PDF

Info

Publication number
JP4904000B2
JP4904000B2 JP2004565218A JP2004565218A JP4904000B2 JP 4904000 B2 JP4904000 B2 JP 4904000B2 JP 2004565218 A JP2004565218 A JP 2004565218A JP 2004565218 A JP2004565218 A JP 2004565218A JP 4904000 B2 JP4904000 B2 JP 4904000B2
Authority
JP
Japan
Prior art keywords
section
thickness
optical waveguide
insertion loss
slab
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004565218A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006507542A (ja
JP2006507542A5 (enExample
Inventor
ダニエル ソー
チャン ホ ヨー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of JP2006507542A publication Critical patent/JP2006507542A/ja
Publication of JP2006507542A5 publication Critical patent/JP2006507542A5/ja
Application granted granted Critical
Publication of JP4904000B2 publication Critical patent/JP4904000B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2004565218A 2002-12-24 2003-12-05 垂直テーパ導波路 Expired - Fee Related JP4904000B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/328,478 2002-12-24
US10/328,478 US6973236B2 (en) 2002-12-24 2002-12-24 Vertical taper waveguide
PCT/US2003/038694 WO2004061498A1 (en) 2002-12-24 2003-12-05 Vertical taper waveguide

Publications (3)

Publication Number Publication Date
JP2006507542A JP2006507542A (ja) 2006-03-02
JP2006507542A5 JP2006507542A5 (enExample) 2010-05-13
JP4904000B2 true JP4904000B2 (ja) 2012-03-28

Family

ID=32594486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004565218A Expired - Fee Related JP4904000B2 (ja) 2002-12-24 2003-12-05 垂直テーパ導波路

Country Status (6)

Country Link
US (1) US6973236B2 (enExample)
EP (1) EP1579254B1 (enExample)
JP (1) JP4904000B2 (enExample)
AT (1) ATE542157T1 (enExample)
AU (1) AU2003298930A1 (enExample)
WO (1) WO2004061498A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003308714A (ja) * 2002-04-17 2003-10-31 Fuji Photo Film Co Ltd 導光フィルム
US7245803B2 (en) * 2003-02-11 2007-07-17 Luxtera, Inc. Optical waveguide grating coupler
US7006732B2 (en) * 2003-03-21 2006-02-28 Luxtera, Inc. Polarization splitting grating couplers
US7773836B2 (en) 2005-12-14 2010-08-10 Luxtera, Inc. Integrated transceiver with lightpipe coupler
JPWO2008066160A1 (ja) * 2006-12-01 2010-03-11 日本電気株式会社 光変換器およびその製造方法
US7862390B2 (en) * 2007-05-16 2011-01-04 Tyco Electronics Corporation Power utility connector with a plurality of conductor receiving channels
US7974504B2 (en) * 2008-03-28 2011-07-05 Infinera Corporation Reflection suppression in a photonic integrated circuit
US9335469B2 (en) * 2012-01-31 2016-05-10 Ignis Photonyx A/S Planar optical branching circuit
US9164238B2 (en) 2013-09-16 2015-10-20 Electronics And Telecommunications Research Institute Optical coupler having self-focusing region and arryed-waveguide grating structure including the same
JP6335676B2 (ja) * 2014-06-19 2018-05-30 株式会社フジクラ 基板型光導波路素子
KR102364302B1 (ko) * 2015-01-27 2022-02-21 한국전자통신연구원 평탄한 모드 발생 장치 및 이를 구비하는 배열 도파로 격자
CA2994832C (en) * 2015-08-05 2023-11-14 Playhard, Inc. Systems and methods for a stellate beam splitter

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2227854B (en) 1989-02-03 1993-05-12 Stc Plc Integrated optics asymmetric y-coupler
JPH08327836A (ja) * 1995-05-29 1996-12-13 Furukawa Electric Co Ltd:The Ｙ分岐光導波路回路
JPH0961652A (ja) * 1995-08-25 1997-03-07 Nippon Telegr & Teleph Corp <Ntt> 半導体光導波路およびその作製方法
US6049644A (en) * 1997-05-13 2000-04-11 Lucent Technologies Inc. Optical routing device having a substantially flat passband
US5889906A (en) 1997-05-28 1999-03-30 Lucent Technologies Inc. Signal router with coupling of multiple waveguide modes for provicing a shaped multi-channel radiation pattern
US6069990A (en) * 1997-11-27 2000-05-30 Hitachi Cable Ltd. Optical wavelength multiplexer/demultiplexer
DE69926844T2 (de) 1998-09-03 2006-06-29 Nippon Telegraph And Telephone Corp. Planare Lichtwellenschaltung
JP2000147283A (ja) 1998-09-03 2000-05-26 Nippon Telegr & Teleph Corp <Ntt> 光導波回路
JP2000206352A (ja) * 1999-01-14 2000-07-28 Hitachi Cable Ltd スポットサイズ変換コア構造を有する光導波路及びその製造方法
JP2002107681A (ja) * 2000-09-29 2002-04-10 Fujitsu Quantum Devices Ltd 光半導体装置
JP2002228867A (ja) * 2001-01-31 2002-08-14 Fujikura Ltd 光導波路の製造方法
US6697552B2 (en) * 2001-02-23 2004-02-24 Lightwave Microsystems Corporation Dendritic taper for an integrated optical wavelength router
JP3976514B2 (ja) * 2001-04-05 2007-09-19 日本電気株式会社 光導波路の製造方法
US20040114869A1 (en) * 2001-06-15 2004-06-17 Fike Eugene E. Mode converter including tapered waveguide for optically coupling photonic devices
US20030032285A1 (en) * 2001-08-13 2003-02-13 Beguin Alain M.J. Vertical taper fabrication process of a narrow band wavelength division multiplexer
US20030174956A1 (en) * 2002-03-13 2003-09-18 Jean-Francois Viens Polarization insensitive modal field transformer for high index contrast waveguide devices
US6873766B2 (en) * 2002-04-12 2005-03-29 Corrado P. Dragone Efficient waveguide arrays with nearly perfect element patterns
US6813432B2 (en) * 2002-05-31 2004-11-02 Intel Corporation Method for producing vertical tapers in optical waveguides by over polishing

Also Published As

Publication number Publication date
AU2003298930A1 (en) 2004-07-29
EP1579254A1 (en) 2005-09-28
ATE542157T1 (de) 2012-02-15
US20040120674A1 (en) 2004-06-24
EP1579254B1 (en) 2012-01-18
US6973236B2 (en) 2005-12-06
JP2006507542A (ja) 2006-03-02
WO2004061498A1 (en) 2004-07-22

Similar Documents

Publication Publication Date Title
US8363995B2 (en) Sub-micron planar lightwave devices formed on an SOI optical platform
EP2329303B1 (en) Method and apparatus for efficient coupling between silicon photonic chip and optical fiber
JP4904000B2 (ja) 垂直テーパ導波路
KR101121459B1 (ko) 광섬유 및 평면 광학 도파관을 치밀하게 결합하는 방법 및장치
CN102893191B (zh) 反射光学光栅台阶的扩展
EP1148358A2 (en) An arrayed waveguide grating type optical multiplexer/demultiplexer
WO2019034738A1 (en) BROADBAND STAR COUPLER
US6741772B2 (en) Optical multiplexer/demultiplexer and waveguide type optical coupler
CA2368945A1 (en) Optical waveguide device having low insertion loss
CN102804008B (zh) 减小反射光栅中的光学损耗
US20100008626A1 (en) Optical chip for arrayed waveguide grating type optical multiplexer/demultiplexer circuit, waveguide substrate, and method for fabricating optical chip for arrayed waveguide grating type optical multiplexer/demultiplexer circuit
US8021561B1 (en) Optical component having features extending different depths into a light transmitting medium
US6735363B1 (en) Waveguide-grating router with output tapers configured to provide a passband that is optimized for each channel individually
EP1406099A2 (en) Optical multi-demultiplexer
US7085446B2 (en) Optical multi/demultiplexer
EP4202510B1 (en) Integrated optical structure for multiplexing and/or demultiplexing
JP2005301301A (ja) 光結合器
KR20180046340A (ko) 파장분할 다중화 장치
GB2370128A (en) Arrayed waveguide grating with optical delay regions
EP1405115A2 (en) Arrayed waveguide grating with flat passband
GB2360098A (en) Optical waveguide array device
JP2009251176A (ja) 光信号処理回路
JP2005215263A (ja) 光合分波器

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080526

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20080603

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20080902

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20080909

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20081002

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20081009

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20081031

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090929

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20091225

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100107

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100128

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100204

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100225

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100304

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20100326

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110428

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111220

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120106

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees