JP4865382B2 - ビームホモジナイザ及びレーザ照射装置 - Google Patents
ビームホモジナイザ及びレーザ照射装置 Download PDFInfo
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- JP4865382B2 JP4865382B2 JP2006094224A JP2006094224A JP4865382B2 JP 4865382 B2 JP4865382 B2 JP 4865382B2 JP 2006094224 A JP2006094224 A JP 2006094224A JP 2006094224 A JP2006094224 A JP 2006094224A JP 4865382 B2 JP4865382 B2 JP 4865382B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006094224A JP4865382B2 (ja) | 2005-04-01 | 2006-03-30 | ビームホモジナイザ及びレーザ照射装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005106392 | 2005-04-01 | ||
| JP2005106392 | 2005-04-01 | ||
| JP2006094224A JP4865382B2 (ja) | 2005-04-01 | 2006-03-30 | ビームホモジナイザ及びレーザ照射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006309207A JP2006309207A (ja) | 2006-11-09 |
| JP2006309207A5 JP2006309207A5 (enExample) | 2009-04-23 |
| JP4865382B2 true JP4865382B2 (ja) | 2012-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006094224A Expired - Fee Related JP4865382B2 (ja) | 2005-04-01 | 2006-03-30 | ビームホモジナイザ及びレーザ照射装置 |
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| Country | Link |
|---|---|
| JP (1) | JP4865382B2 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008124149A (ja) * | 2006-11-09 | 2008-05-29 | Advanced Lcd Technologies Development Center Co Ltd | 光学装置および結晶化装置 |
| JP4818958B2 (ja) * | 2007-03-02 | 2011-11-16 | 住友重機械工業株式会社 | ビーム照射装置、及び、ビーム照射方法 |
| EP2128694B1 (en) | 2007-03-19 | 2014-02-26 | Panasonic Corporation | Laser illuminating device and image display device |
| DE102007057868B4 (de) * | 2007-11-29 | 2020-02-20 | LIMO GmbH | Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung |
| DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
| US8946594B2 (en) | 2011-11-04 | 2015-02-03 | Applied Materials, Inc. | Optical design for line generation using microlens array |
| DE102013102553B4 (de) | 2013-03-13 | 2020-12-03 | LIMO GmbH | Vorrichtung zur Homogenisierung von Laserstrahlung |
| CN103499882A (zh) * | 2013-10-10 | 2014-01-08 | 山东神戎电子股份有限公司 | 利用光锥的矩形光斑整形装置 |
| KR101913654B1 (ko) * | 2017-05-30 | 2018-12-28 | 학교법인 한동대학교 | 주밍기구가 포함된 빔 균질기 |
| JP2020177132A (ja) * | 2019-04-18 | 2020-10-29 | 株式会社ブイ・テクノロジー | レンズユニット及びこのレンズユニットを備える光照射装置 |
| JP7417874B2 (ja) * | 2019-06-28 | 2024-01-19 | 大日本印刷株式会社 | 照明装置及び照明方法 |
| KR102324610B1 (ko) * | 2019-12-26 | 2021-11-09 | 세메스 주식회사 | 기판 가열 유닛, 기판 처리 장치 및 기판 처리 방법 |
| CN113182533B (zh) * | 2021-03-19 | 2023-09-29 | 中国科学院福建物质结构研究所 | 一种激光加热3d打印系统及其控制方法 |
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2006
- 2006-03-30 JP JP2006094224A patent/JP4865382B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
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| JP2006309207A (ja) | 2006-11-09 |
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