JP4855078B2 - 振動検出器 - Google Patents
振動検出器 Download PDFInfo
- Publication number
- JP4855078B2 JP4855078B2 JP2006004370A JP2006004370A JP4855078B2 JP 4855078 B2 JP4855078 B2 JP 4855078B2 JP 2006004370 A JP2006004370 A JP 2006004370A JP 2006004370 A JP2006004370 A JP 2006004370A JP 4855078 B2 JP4855078 B2 JP 4855078B2
- Authority
- JP
- Japan
- Prior art keywords
- vibrator
- vibration detector
- fixed electrode
- central portion
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Description
2…シリコン基盤
12、32…固定電極
12c、21c、32c…中央部
21h…貫通孔
21…振動子
22…弾性部
Claims (3)
- 弾性部によって変位自在に支持された振動子と、該振動子と対面する位置に固定された固定電極とを備え、前記振動子と固定電極とで形成されるキャパシタの静電容量に基づいて被測定体の変位、速度、加速度の何れかを検出する振動検出器において、
前記固定電極の中央部に、該固定電極中央部と前記振動子とのギャップを周辺部より大とするための凹部を設けたことを特徴とする振動検出器。 - 前記振動子の中央部に凹部を設けたことを特徴とする請求項1に記載の振動検出器。
- 前記振動子の中央部に貫通孔を設けたことを特徴とする請求項1に記載の振動検出器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006004370A JP4855078B2 (ja) | 2006-01-12 | 2006-01-12 | 振動検出器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006004370A JP4855078B2 (ja) | 2006-01-12 | 2006-01-12 | 振動検出器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007187494A JP2007187494A (ja) | 2007-07-26 |
JP4855078B2 true JP4855078B2 (ja) | 2012-01-18 |
Family
ID=38342769
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006004370A Expired - Fee Related JP4855078B2 (ja) | 2006-01-12 | 2006-01-12 | 振動検出器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4855078B2 (ja) |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2728807B2 (ja) * | 1991-07-24 | 1998-03-18 | 株式会社日立製作所 | 静電容量式加速度センサ |
JPH06163936A (ja) * | 1992-11-19 | 1994-06-10 | Hitachi Ltd | 半導体式力学量センサ |
JP3269269B2 (ja) * | 1994-07-15 | 2002-03-25 | オムロン株式会社 | 振動検知センサ |
JP3805577B2 (ja) * | 1999-09-14 | 2006-08-02 | 松下電器産業株式会社 | 振動変換器およびこの振動変換器を備えた加速度センサ |
JP4138372B2 (ja) * | 2002-06-07 | 2008-08-27 | 弘明 新妻 | 物理量検出器及び物理量検出器の製造方法 |
JP2005326310A (ja) * | 2004-05-14 | 2005-11-24 | Hosiden Corp | 振動センサ |
-
2006
- 2006-01-12 JP JP2006004370A patent/JP4855078B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007187494A (ja) | 2007-07-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9279822B2 (en) | Micromechanical structure and method for manufacturing a micromechanical structure | |
US20060237806A1 (en) | Micromachined microphone and multisensor and method for producing same | |
US8089828B2 (en) | Acoustic sensor element | |
ITTO20130237A1 (it) | Struttura microelettromeccanica di rilevamento ad asse z ad elevata sensibilita', in particolare per un accelerometro mems | |
JP2010127763A (ja) | 半導体力学量検出センサ及びそれを用いた制御装置 | |
JP2006084327A (ja) | 容量式力学量センサ装置 | |
JP4134853B2 (ja) | 容量式力学量センサ装置 | |
WO2013172010A1 (ja) | センサ装置 | |
JP5215871B2 (ja) | コンデンサマイクロホン振動板の支持装置 | |
JP2012163507A (ja) | 加速度センサ | |
US10899603B2 (en) | Micromechanical z-inertial sensor | |
US9631952B2 (en) | Capacitive microelectronic and/or nanoelectronic device with increased compactness | |
JP2008275325A (ja) | センサ装置 | |
KR20050022368A (ko) | 정전용량형 역학량 센서 | |
US8353213B2 (en) | Sensor element for sensing accelerations in three spatial directions | |
US10544037B2 (en) | Integrated semiconductor device and manufacturing method | |
JP4855078B2 (ja) | 振動検出器 | |
KR100464309B1 (ko) | 면적변화정전용량형마이크로가속도계및그제조방법 | |
US20190271717A1 (en) | Accelerometer sensor | |
KR101516069B1 (ko) | 관성센서 | |
JP2012247204A (ja) | 加速度センサおよび加速度の測定方法 | |
WO2014030492A1 (ja) | 慣性力センサ | |
JP2006153482A (ja) | 半導体力学量センサ | |
JP2006162354A (ja) | 慣性素子およびその製造方法 | |
CN117769843A (zh) | Mems换能器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081210 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110512 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110524 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110624 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20111025 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20111026 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20141104 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4855078 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |