JP4848896B2 - Microchip - Google Patents

Description

  The present invention relates to a microchip having a fine channel that is formed of a glass substrate, a resin substrate, a silicon substrate, and the like and performs a chemical reaction of an inflowed liquid. Particularly, the present invention relates to blocking a catalyst in the channel with a simple configuration. It relates to a microchip that can be made possible.

  Prior art documents related to a microchip having a fine channel for conducting a chemical reaction of a conventional liquid include the following.

WO2004 / 086055 K. Sato M. Tokeshi T. Odake H. Kimura T. Ooi M. Nakao T. Kitamori, Integration of an Immunosorbent Assay System: Analysis of Secretory Human Immunoglobulin A on Polystyrene Beads in a Microchip, Analytical Chemistry. 72, 1144-1147 (2000)

  FIGS. 14 and 15 are a plan view and a cross-sectional view showing an example of a conventional microchip, which are described in “Non-Patent Document 1”. FIG. 15 is a cross-sectional view taken along the line AA in FIG.

  14 and 15, 1 is a substrate on which an inlet and an outlet are formed, 2 is a catalyst in which a microbead to which a solid is fixed or a metal catalyst is formed in a spherical shape, and 3 is a substrate 1 having a protrusion at the center. And a substrate on which a groove constituting a microchannel is formed.

  For example, an inlet and an outlet shown as “IP100” and “EP100” in FIG. 14 are formed in the substrate 1 by etching or the like. At this time, the inlet diameter indicated by “IP100” in FIG. 14 is formed to be larger than the diameter of the catalyst 2.

  On the other hand, the formation process of the groove | channel of the board | substrate 3 is demonstrated using FIG. FIG. 16 is an explanatory view for explaining the process of forming a groove in the substrate, and 3 is given the same reference numerals as those in FIGS.

  For example, the portions indicated by “A01” and “A02” in FIG. 16 are removed by etching or the like in the substrate 3, and the portion indicated by A03 in FIG. A groove having a protrusion indicated by “PP100” in FIG. 16 is formed at the center.

  Then, the substrate 1 on which the inlet and the outlet are formed is connected to the substrate 3 so that the inlets and outlets indicated by “IP100” and “EP100” in FIG. 14 are positioned at both ends of the groove formed on the substrate 3. Bonded by bonding or the like. By such bonding, the opening portion of the groove formed in the substrate 3 is covered with the substrate 1 to form a micro flow path indicated by “MF100” in FIGS.

  Further, a plurality of catalysts 2 are inserted from the inflow port indicated by “IP100” in FIG. 14 formed on the substrate 1, and filled in the micro flow path indicated by “MF100” in FIGS. However, in the protrusion of the groove of the substrate 3 indicated by “PP100” in FIG. 16, the distance between the tip of the protrusion of the groove of the substrate 3 indicated by “CL100” in FIG. Is also formed small.

  Here, a conventional example shown in FIG. 14 and the like will be described. The liquid for performing the chemical reaction is injected from the inlet indicated by “IP100” in FIGS. 14 and 15, and flows through the micro flow path indicated by “MF100” in FIGS.

  At this time, the liquid causes a chemical reaction by the plurality of catalysts 2 filled in the micro flow path indicated by “MF100” in FIGS. 14 and 15, and the liquid that has caused the chemical reaction is “EP100” in FIGS. It is discharged from the outlet shown in "".

  Further, the gap between the tip of the protrusion of the groove of the substrate 3 indicated by “CL100” in FIG. 15 and the substrate 1 is set to “PP100” in FIG. 16 of the groove of the substrate 3 so as to be smaller than the diameter of the catalyst 2. Since the protrusions shown are formed, the plurality of catalysts 2 are blocked by the protrusions indicated by “PP100” in FIG. 16 in the groove of the substrate 3 and remain in the minute flow path.

  As a result, it is possible to dam a plurality of catalysts in the micro flow path by providing the protrusion in the center of the micro flow path constituted by the two substrates.

However, in the conventional example shown in FIG. 14 and the like, in order to configure the fine flow path indicated by “MF100” in FIGS. 14 and 15, when processing the substrate 3, it is indicated by “A01” and “A02” in FIG. There has been a problem that a plurality of operations such as an etching process such as removing the portion and further removing the portion indicated by “A03” in FIG.
Therefore, the problem to be solved by the present invention is to realize a microchip that can dam the catalyst in the flow path with a simple configuration.

To achieve the above problems, the invention according to claim 1 of the present invention,
In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
A first substrate on which a catalyst filled in a microchannel, a liquid inlet and a liquid outlet having a smaller diameter than the minimum diameter of the catalyst are formed, and the inlet and the outlet are located at both ends. In this way, it is possible to dam the catalyst in the flow path with a simple configuration by providing the second substrate which is bonded to the first substrate and formed with the grooves constituting the micro flow path. It becomes.

The invention according to claim 2
In the microchip which is the invention according to claim 1 ,
Since the diameter of the inlet is larger than the maximum diameter of the catalyst, it is possible to dam the catalyst in the flow path with a simple configuration.

The invention described in claim 3
In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
The first and second catalysts filled in the first and second filling flow paths, the liquid inlets, and the first and second liquids having smaller diameters than the minimum diameters of the first and second catalysts, respectively. A first substrate on which a second outlet is formed; and the inflow channel bonded to the first substrate and connected to one end of the inflow channel to one end of the first and second filling channels , Constituting the first and second filling flow paths, the inlet at the other end of the inflow flow path, and the first and second flow paths at the other end of the first and second filling flow paths. By providing the second substrate on which the grooves each having the outlet are formed, it is possible to dam the catalyst in the flow path with a simple configuration.

The invention according to claim 4
In the microchip which is the invention according to claim 3 ,
By providing the first and second catalyst filling ports whose diameters are larger than the maximum diameters of the first and second catalysts, respectively, it becomes possible to dam the catalyst in the flow path with a simple configuration. .

The invention according to claim 5
In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
A first substrate on which a catalyst filled in a filling channel, a liquid first and second inflow ports, and a liquid outflow port having a smaller diameter than a minimum diameter of the catalyst are formed; and the first substrate. To form one of the first and second inflow channels and the filling channel in which one end of the filling channel is connected to one end of the first and second inflow channels. The first and second inflow ports at the other end of the two inflow channels, and a second substrate having grooves at which the outflow ports are respectively positioned at the other end of the filling channel. It becomes possible to dam the catalyst in the flow path with a simple configuration.

The invention described in claim 6
In the microchip which is the invention according to claim 5 ,
Since the diameters of the first and second inlets are larger than the maximum diameter of the catalyst, it is possible to dam the catalyst in the flow path with a simple configuration.

The present invention has the following effects.
According to invention of Claim 1 and Claim 2 ,
A first substrate on which a liquid inflow port and a liquid outflow port having a smaller diameter than the minimum diameter of the catalyst are formed, and a groove that is bonded to the first substrate to form the microchannel is formed. By providing the two substrates, a microchip that can dam the catalyst in the flow path with a simple configuration is realized.

According to the third and fourth aspects of the present invention, the first substrate on which the first and second liquid outlets each having a smaller diameter than the minimum diameter of the liquid inlet and the catalyst are formed, and the first substrate. And a second substrate on which grooves forming the inflow passage and the first and second filling passages are formed, and the catalyst is dammed in the passage with a simple configuration. A microchip that realizes this is realized.

According to the fifth and sixth aspects of the invention, the first substrate on which the first and second inflow ports and the liquid outflow port having a smaller diameter than the minimum diameter of the catalyst are formed, and the first substrate. And the second substrate on which grooves forming the first and second inflow channels and the filling channel are formed, the catalyst can be dammed in the channel with a simple configuration. To realize a microchip.

  Hereinafter, the present invention will be described in detail with reference to the drawings. 1 and 2 are a plan view and a cross-sectional view showing an embodiment of a microchip according to the present invention. 2 is a cross-sectional view taken along the line AA in FIG.

  1 and 2, 4 is a substrate on which an inlet and an outlet are formed, 5 is a microbead to which an antibody is fixed, or a catalyst in which a metal catalyst is formed in a spherical shape, and 6 is bonded to the substrate 4 to be a microchannel. Is a substrate on which grooves are formed.

  For example, an inlet and an outlet indicated by “IP110” and “EP110” in FIG. At this time, the inlet diameter indicated by “IP110” in FIG. 1 is formed larger than the diameter of the catalyst 5, and the outlet diameter indicated by “EP110” in FIG. 1 is formed smaller than the diameter of the catalyst 5.

  On the other hand, the formation process of the groove | channel of the board | substrate 6 is demonstrated using FIG. FIG. 3 is an explanatory diagram for explaining a process of forming a groove in the substrate, and 6 is denoted by the same reference numerals as those in FIGS.

  For example, in the substrate 6, a portion indicated by “A 04” in FIG. 3 is removed by etching or the like to form a groove.

  The substrate 4 on which the inflow port and the outflow port are formed is connected to the substrate 6 so that the inflow port and the outflow port indicated by “IP110” and “EP110” in FIG. 1 are located at both ends of the groove formed in the substrate 6. Bonded by bonding or the like. By such bonding, the opening portion of the groove formed in the substrate 6 is covered with the substrate 4 to form a micro flow path indicated by “MF110” in FIGS.

  Further, a plurality of catalysts 5 are inserted from the inflow port indicated by “IP110” in FIG. 1 formed on the substrate 4 and filled in the micro flow path indicated by “MF110” in FIGS.

  Here, a conventional example shown in FIG. A liquid for causing a chemical reaction is injected from the inlet indicated by “IP110” in FIGS. 1 and 2, and flows through a microchannel indicated by “MF110” in FIGS.

  At this time, the liquid undergoes a chemical reaction by the plurality of catalysts 5 filled in the microchannels indicated by “MF110” in FIGS. 1 and 2, and the liquid that has caused the chemical reaction is “EP110” in FIGS. It is discharged from the outlet shown in "".

  Further, since the diameter of the outlet indicated by “EP110” in FIG. 1 is smaller than the diameter of the catalyst 5, the plurality of catalysts 5 are blocked by the outlet indicated by “EP110” in FIG. You will stay in the street.

  As a result, by providing an outlet having a smaller diameter than the diameter of the catalyst at one end of the micro-channel constituted by two substrates, it becomes possible to dam up a plurality of catalysts in the channel with a simple configuration. .

  4 and 5 are a plan view and a cross-sectional view showing an example of a conventional microchip. FIG. 5 is a cross-sectional view taken along the line AA in FIG.

  4 and 5, 7 is a substrate on which an inlet, a catalyst filling port, and an outlet are formed, 8 and 9 are spherically formed microbeads or metal catalysts to which antibodies are fixed, and 10 is a substrate 7. It is a substrate on which grooves that are bonded together to form an inflow channel and a filling channel are formed. Catalysts 8 and 9 are different types of catalysts.

  For example, the substrate 7 is etched with an inlet indicated by “IP120” in FIG. 4, a catalyst filling port indicated by “IP121” and “IP122” in FIG. 4, and an outlet indicated by “EP120” and “EP121” in FIG. Etc., respectively.

  At this time, the diameters of the catalyst filling ports indicated by “IP121” and “IP122” in FIG. 4 are formed larger than the diameters of the catalysts 8 and 9, and the outlet diameters indicated by “EP120” and “EP121” in FIG. It is formed smaller than the diameter of the catalysts 8 and 9.

  On the other hand, the formation process of the groove | channel of the board | substrate 10 is demonstrated using FIG. FIG. 6 is an explanatory view for explaining a process of forming a groove in the substrate. Reference numeral 10 denotes the same reference numerals as those in FIG.

  For example, in the substrate 10, a portion indicated by “A05” in FIG. 6 is removed by etching or the like, and a groove having a tuning fork shape that branches off in the middle is formed.

  Then, the substrate 7 on which the inlet, the catalyst filling port, and the outlet are formed is bonded to the substrate 10 by adhesion or the like, and the opening portion of the groove formed in the substrate 10 is covered with the substrate 7, and “IF120” in FIG. The inflow passage shown by “and the filling passage shown by“ FP120 ”and“ FP121 ”in FIG. 4 are formed.

  Also, one end of the inflow channel indicated by “IF120” in FIG. 4 is connected to one end of the filling channel indicated by “FP120” and “FP121” in FIG.

  At this time, the inflow port indicated by “IP120” in FIG. 4 formed on the substrate 7 is filled with the catalyst indicated by “IP121” and “IP122” in FIG. 4 at the other end of the inflow channel indicated by “IF120” in FIG. The outlet is shown in “FP120” and “FP121” in FIG. 4 and the outlet shown in “EP120” and “EP121” in FIG. 4 is the filling channel shown in “FP120” and “FP121” in FIG. The arrangement of the substrate 7 and the substrate 10 is adjusted so as to be located at the other end.

  A plurality of catalysts 8 and 9 are respectively inserted from the catalyst filling ports indicated by “IP121” and “IP122” in FIG. 4 formed on the substrate 7, and the filling flow paths indicated by “FP120” and “FP121” in FIG. Filled in.

  Here, the embodiment shown in FIG. 4 and the like will be described. The liquid for causing the chemical reaction is injected from the inlet indicated by “IP120” in FIGS. 4 and 5, and flows through the inflow channel indicated by “IF120” in FIG.

  Further, the liquid is branched at one end of the inflow channel indicated by “IF120” in FIG. 4 and flows through the filling channels indicated by “FP120” and “FP121” in FIG.

  At this time, the liquid undergoes a chemical reaction by the plurality of catalysts 8 and 9 filled in the filling flow paths indicated by “FP120” and “FP121” in FIG. 4, and the liquid that has caused the chemical reaction is “in FIG. It is discharged from the outlet shown in EP120 "and" EP121 ", respectively.

  Further, since the diameters of the outlets indicated by “EP120” and “EP121” in FIG. 4 are formed smaller than the diameters of the catalysts 8 and 9, respectively, the plurality of catalysts 8 and 9 are represented by “EP120” and “EP120” in FIG. Each of the outlets shown in “EP121” is blocked and stays in the microchannel.

  As a result, a plurality of catalysts can be dammed in the flow path with a simple configuration by providing an outlet having a diameter smaller than the diameter of the catalyst at one end of the two filling flow paths composed of two substrates. Is possible.

  Further, by forming two filling channels filled with different types of catalysts, it is possible to select a catalyst that promotes a chemical reaction.

  7 and 8 are a plan view and a cross-sectional view showing an embodiment of a microchip according to the present invention. 8 is a cross-sectional view taken along the line AA in FIG.

  7 and 8, 11 is a substrate on which an inlet and an outlet are formed, 12 is a microbead to which an antibody is fixed, or a catalyst in which a metal catalyst is formed in a spherical shape, and 13 is bonded to the substrate 11 to be an inflow channel. And a substrate on which grooves constituting the filling channel are formed.

  For example, the substrate 11 is formed with an inflow port indicated by “IP130” and “IP131” in FIG. 7 and an outflow port indicated by “EP130” in FIG. At this time, the inlet diameters indicated by “IP130” and “IP131” in FIG. 7 are formed larger than the diameter of the catalyst 12, and the outlet diameter indicated by “EP130” in FIG. It is formed small.

  On the other hand, the formation process of the groove | channel of the board | substrate 13 is demonstrated using FIG. FIG. 9 is an explanatory view for explaining the process of forming the groove of the substrate, and 13 is given the same reference numeral as FIG.

  For example, in the substrate 13, a portion indicated by “A06” in FIG. 9 is removed by etching or the like, and a groove having a tuning fork shape that joins in the middle is formed.

  Then, the substrate 11 on which the inflow port and the outflow port are formed is bonded to the substrate 13 by adhesion or the like, and the opening portion of the groove formed in the substrate 13 is covered with the substrate 11, and “IF130” and “ An inflow channel indicated by “IF131” and a filling channel indicated by “FP130” in FIG. 7 are formed.

  Further, one end of the inflow channel indicated by “IF130” and “IF131” in FIG. 7 is connected to one end of the filling channel indicated by “FP130” in FIG.

  At this time, the inflow port indicated by “IP130” and “IP131” in FIG. 7 formed on the substrate 11 is connected to the other end of the inflow channel indicated by “IF130” and “IF131” in FIG. 7, and “EP130” in FIG. The arrangement of the substrate 11 and the substrate 13 is adjusted so that the outlet shown in FIG. 7 is located at the other end of the filling flow path indicated by “FP130” in FIG.

  Further, a plurality of catalysts 12 are inserted from the inlets indicated by “IP130” and “IP131” in FIG. 7 formed on the substrate 11 and filled in the filling flow path indicated by “FP130” in FIG.

  Here, the embodiment shown in FIG. 7 and the like will be described. The first and second liquids causing the chemical reaction are injected from the inlets indicated by “IP130” and “IP131” in FIGS. 7 and 8, respectively, and inflow passages indicated by “IF130” and “IF131” in FIG. Each flowing.

  Further, the first and second liquids merge at the other ends of the inflow passages indicated by “IF130” and “IF131” in FIG. 7, respectively, and flow through the filling passage indicated by “FP130” in FIG.

  At this time, the first and second liquids cause a chemical reaction by the plurality of catalysts 12 filled in the filling flow path indicated by “FP130” in FIG. 7, and the liquid that has caused the chemical reaction is shown in FIG. 7 “EP130”. It is discharged from the outlet shown in.

  Further, since the diameter of the outlet indicated by “EP130” in FIG. 7 is smaller than the diameter of the catalyst 12, the plurality of catalysts 12 are blocked by the outlet indicated by “EP130” in FIG. You will stay in the street.

  As a result, by providing an outlet having a smaller diameter than the diameter of the catalyst at one end of the filling channel constituted by two substrates, it becomes possible to dam up a plurality of catalysts in the channel with a simple configuration. .

  In addition, when the first and second liquids merge and flow through the filling flow path, it is possible to cause a chemical reaction of the liquid in which different types of liquids are mixed.

  10 and 11 are a plan view and a cross-sectional view showing an embodiment of a microchip according to the present invention. 11 is a cross-sectional view taken along line AA in FIG. FIG. 12 is a plan view of each substrate showing another embodiment of the microchip according to the present invention. 12A is a plan view of the substrate 14, FIG. 12B is a plan view of the substrate 17, and FIG. 12C is a plan view of the substrate 18.

  10 and 11, reference numeral 14 denotes a substrate on which an inflow port and an outflow port are formed, 15 and 16 are microbeads on which antibodies are fixed, or a catalyst in which a metal catalyst is formed in a spherical shape, and 17 is bonded to the substrate 14 and is minute. A substrate on which grooves constituting the flow path are formed, and 18 is a substrate bonded with the substrate 17 and formed with grooves constituting the micro flow path.

  For example, the substrate 14 is etched with the inlets indicated by “IP140” and “IP143” in FIG. 10, the catalyst filling ports indicated by “IP141” and “IP142” in FIG. 10, and the outlets indicated by “EP140” and “EP141”. Each is formed by processing or the like.

  At this time, the diameters of the catalyst filling ports indicated by “IP141” and “IP142” in FIG. 10 are formed larger than the diameters of the catalysts 15 and 16, respectively, and the outlet diameters indicated by “EP140” and “EP141” in FIG. Are formed smaller than the diameters of the catalysts 15 and 16, respectively.

  On the other hand, a process of forming grooves in the substrates 17 and 18 will be described with reference to FIG. FIGS. 13A and 13B are explanatory views for explaining a process of forming a groove in the substrate. FIG. 13A is a perspective view of the substrate 17 and FIG. Reference numerals 17 and 18 are the same as those in FIG.

  For example, in the substrate 17, a portion indicated by “A07” in FIG. 13 is removed by etching or the like, and grooves that are branched and branched in the middle are formed so as to join the other two grooves.

  Further, in the substrate 18, a portion indicated by “A08” in FIG. 13 is removed by etching or the like, and a groove having a tuning fork shape that branches off in the middle is formed.

  Then, the substrate 14 on which the inflow port, the catalyst filling port, and the outflow port are formed is bonded to the substrate 17 by adhesion or the like, and the opening portion of the groove formed in the substrate 17 is covered with the substrate 14, and “IF140” in FIG. 10 is an inflow channel shown in FIG. 10, a channel shown in “FC140”, “FC141”, “FC142” and “FC143” in FIG. 10, and a filling channel shown in “FP140” and “FP141” in FIG. 10 constitutes a fine flow path indicated by “MF140”.

  Further, one end of the inflow channel indicated by “IF140” in FIG. 10 is connected to one end of the channel indicated by “FC140” and “FC141” in FIG. 10, and “FC140”, “FC141”, “FC142” in FIG. The other end of the flow path indicated by “FC143” is connected to one end of a filling flow path indicated by “FP140” and “FP141” in FIG.

  At this time, the inflow port indicated by “IP140” in FIG. 10 formed in the substrate 14 is filled with the catalyst indicated by “IP141” and “IP142” in FIG. 10 at the other end of the inflow channel indicated by “IF140” in FIG. 10 is on the filling passage shown in “FP140” and “FP141” in FIG. 10, and the outlet shown in “EP140” and “EP141” in FIG. 10 is the filling passage shown in “FP140” and “FP141” in FIG. The arrangement of the substrate 14 and the substrate 17 is adjusted so as to be located at the other end.

  Further, the substrate 17 bonded to the substrate 14 is bonded to the substrate 18 by adhesion or the like, and the opening portion of the groove formed in the substrate 18 is covered with the substrate 17, and an inflow channel indicated by “IF 141” in FIG. The fine flow path indicated by “MF141” in FIG. 10 is constituted by the flow paths indicated by “FC144” and “FC145” in FIG.

  Also, one end of the inflow channel indicated by “IF141” in FIG. 10 is connected to one end of the channel indicated by “FC144” and “FC145” in FIG.

  At this time, the inflow port indicated by “IP143” in FIG. 10 formed in the substrate 17 is positioned at one end of the inflow channel indicated by “IF141” in FIG. 10, and “FC142” in FIG. The arrangement of the substrate 14 and the substrate 17 is adjusted so that one end of the flow path indicated by “FC143” is connected to the other end of the flow path indicated by “FC144” and “FC145” in FIG.

  That is, one end of the flow path indicated by “FC142” and “FC143” in FIG. 10 is connected to the other end of the flow path indicated by “FC144” and “FC145” in FIG. And the fine flow path indicated by “MF141” in FIG. 10 are connected to each other.

  Further, a plurality of catalysts 15 and 16 are respectively inserted from catalyst filling ports indicated by “IP141” and “IP142” in FIG. 10 formed on the substrate 14, and filling indicated by “FP140” and “FP141” in FIG. The flow path is filled.

  Here, the embodiment shown in FIG. 10 and the like will be described. The first and second liquids causing the chemical reaction are respectively injected from the inlets indicated by “IP140” and “IP143” in FIG. 10, and flow through the inflow passages indicated by “IF140” and “IF141” in FIG. .

  The first liquid branches at the other end of the inflow channel indicated by “IF140” in FIG. 10 and flows through the channels indicated by “FC140” in FIG. 10 and “FC141” in FIG. 10, respectively. 10 branches at the other end of the inflow channel indicated by “IF141” in FIG. 10 and flows through the channels indicated by “FC144” in FIG. 10 and “FC145” in FIG.

  Further, the second liquid flows from the flow path indicated by “FC144” in FIG. 10 and “FC145” in FIG. 10 to the flow path indicated by “FC142” in FIG. 10 and “FC143” in FIG.

  The first and second liquids merge at the other ends of the flow paths indicated by “FC140” and “FC141” in FIG. 10 and at the other ends of the flow paths indicated by “FC142” and “FC143” in FIG. Then, it flows through the filling flow paths indicated by “FP140” in FIG. 10 and “FP141” in FIG.

  At this time, the first and second liquids cause a chemical reaction by the plurality of catalysts 15 and 16 filled in the filling flow path indicated by “FP140” in FIG. 10 and “FP141” in FIG. The generated liquid is discharged from the outlets indicated by “EP140” and “EP141” in FIG.

  Further, since the diameters of the outlets indicated by “EP140” and “EP141” in FIG. 10 are smaller than the diameters of the catalysts 15 and 16, the plurality of catalysts 15 and 16 are “EP140” and “EP141” in FIG. It will be dammed at the outlet indicated by "" and will remain in the filling channel.

  As a result, by providing an outlet with a smaller diameter than the diameter of the catalyst at one end of the two filling channels composed of three substrates, it is possible to block a plurality of catalysts in the channel with a simple configuration. become.

  Moreover, the catalyst which accelerates | stimulates a chemical reaction can be selected by filling the two filling flow paths with the first and second liquids and the different types of catalysts 15 and 16.

  In the embodiment shown in FIG. 4 and the like, the types of the catalyst 8 and the catalyst 9 are different from each other. However, the type is not particularly limited, and the catalyst 8 and the catalyst 9 may be the same. . As a result, since the catalyst 8 and the catalyst 9 are the same, a large amount of synthesis is possible.

  Further, in the embodiment shown in FIG. 4 and the like, a configuration is illustrated in which the inflow passage shown by “IF120” in FIG. 4 is branched to the filling passage shown by “FP120” and “FP121” in FIG. It is not limited to this in particular, The structure branched to three or more filling flow paths may be sufficient.

  Further, in the embodiment shown in FIG. 7 and the like, the other end of the inflow passage shown by “IF130” in FIG. 7 and “IF131” in FIG. 7 is connected to the other end of the filling passage shown by “FP130” in FIG. However, the present invention is not particularly limited thereto, and the other end of the filling channel may be connected to one end of three or more inflow channels.

  Further, in the embodiment shown in FIG. 1 and the like, the outlet shown as “EP110” in FIG. 1 is formed to have a smaller diameter than the diameter of the catalyst. May be formed smaller than the minimum diameter or the minimum cross-sectional area of the catalyst.

  In the embodiment shown in FIG. 3 and the like, the catalyst filling port indicated by “IP121” in FIG. 3 is formed to have a diameter larger than the diameter of the catalyst. The diameter may be larger than the maximum diameter or the maximum cross-sectional area of the catalyst.

  Further, in the embodiment shown in FIG. 10 and the like, a configuration in which the other end of the flow path indicated by “FC140” and “FC142” in FIG. 10 is connected to the other end of the filling flow path indicated by “FP140” in FIG. However, the present invention is not particularly limited to this, and the other end of the flow path indicated by “FC140” in FIG. 10 and “FC142” in FIG. 10 is branched into two or more flow paths. One end of each may be connected to one end of the filling channel.

  Further, in the embodiment shown in FIG. 10 and the like, it is assumed that different types of liquids flow in the fine flow paths indicated by “MF140” and “MF141” in FIG. 10, but the present invention is not particularly limited thereto. The same liquid may flow. As a result, the same liquid flows into the fine flow channels indicated by “MF140” and “MF141” in FIG.

It is a top view which shows one Example of the microchip based on this invention. It is sectional drawing which shows one Example of the microchip based on this invention. It is explanatory drawing explaining the formation process of the groove | channel of the board | substrate in one Example of the microchip based on this invention. It is a top view which shows the other Example of the microchip based on this invention. It is sectional drawing which shows the other Example of the microchip based on this invention. It is explanatory drawing explaining the formation process of the groove | channel of the board | substrate in the other Example of the microchip based on this invention. It is a top view which shows the other Example of the microchip based on this invention. It is sectional drawing which shows the other Example of the microchip based on this invention. It is explanatory drawing explaining the formation process of the groove | channel of the board | substrate in the other Example of the microchip based on this invention. It is a top view which shows the other Example of the microchip based on this invention. It is sectional drawing of each board | substrate in the other Example of the microchip based on this invention. It is a top view of each board | substrate which shows the other Example of the microchip based on this invention. It is explanatory drawing explaining the formation process of the groove | channel of the board | substrate in the other Example of the microchip based on this invention. It is a top view which shows an example of the conventional microchip. It is sectional drawing which shows an example of the conventional microchip. It is explanatory drawing explaining the formation process of the groove | channel of the board | substrate in an example of the conventional microchip.

Explanation of symbols

1, 3, 4, 6, 7, 10, 11, 13, 14, 17, 18 Substrate 2, 5, 8, 9, 12, 15, 16 Catalyst

Claims (6)

In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
A catalyst filled in a microchannel;
A first substrate on which a liquid inlet and a liquid outlet having a diameter smaller than the minimum diameter of the catalyst are formed;
A second substrate formed with grooves forming the microchannel by being bonded to the first substrate so that the inlet and the outlet are located at both ends;
A microchip comprising: The inlet diameter is
The microchip according to claim 1, wherein the microchip is larger than a maximum diameter of the catalyst . In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
First and second catalysts filled in the first and second filling channels;
A first substrate on which a liquid inlet and a liquid first and second outlet having a diameter smaller than the minimum diameter of each of the first and second catalysts are formed;
The inflow channel, which is bonded to the first substrate and one end of the first and second filling channels is connected to one end of the inflow channel, configure the first and second filling channels, A second substrate in which the inlet is formed at the other end of the inflow channel, and a groove in which the first and second outlets are positioned at the other end of the first and second filling channels;
A microchip characterized by comprising The first and second catalyst filling ports each having a larger diameter than the maximum diameters of the first and second catalysts are provided.
The microchip according to claim 3. In a microchip having a micro flow channel for performing a chemical reaction of an inflowed liquid,
A catalyst filled in the filling channel;
A first substrate on which liquid first and second inlets and a liquid outlet having a diameter smaller than the minimum diameter of the catalyst are formed;
The first and second inflow channels and the filling channel are configured such that one end of the filling channel is connected to one end of the first and second inflow channels bonded to the first substrate, A second substrate on which the first and second inflow ports are formed at the other end of the first and second inflow channels, and a groove in which the outflow port is positioned at the other end of the filling channel;
A microchip characterized by comprising The diameters of the first and second inlets are
Each of which is larger than the maximum diameter of the catalyst.
The microchip according to claim 5.

Images