JP2004202613A - Microchannel chip - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microchannel chip for efficiently mixing a supplied raw material fluid while securing a required miniaturization. <P>SOLUTION: This microchannel chip is constituted by joining a cover plate 1a, an intermediate plate 4 and a bottom plate 5. The cover plate 1a is provided with a recessed part being a shunt part of a plurality of supply ports 11, a takeout port 13 and a cover plate 1a side reaction passage; the bottom plate 5 is provided with a recessed part being a shunt part of the reaction passage so as to be opposed to the recessed part of the cover plate 1a; and the intermediate plate 4 is provided with a supply passage 31b and three recessed parts of a first confluent part 331, a second confluent part 333 and a third confluent part 335. A shunt part 332 is provided in the middle of the reaction passage 33b formed by joining three plate material. A high agitating effect can be provided by a combination of confluence and shunt. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a microchannel chip for mixing and reacting a small volume of fluid in a small channel.
[0002]
[Prior art]
In recent years, micro-machining technology, which has progressed remarkably, processes substrates such as silicon, glass, and plastic to produce devices with micro-channels (micro-channels). The micro-space is subjected to various reactions (mixing, synthesis, separation, Analysis) has been gaining attention. Such a device is called a micromixer or a microreactor depending on the purpose of use.
Usually, a micro space that is a reaction space, that is, a reaction channel, having an equivalent diameter of less than 500 μm is defined as a micro channel, and a chip having such a micro channel is a micro channel chip. is there. Some microchannel chips have only one microchannel, some microchannels have a plurality of microchannels, and some wafer channels have many microchannels.
[0003]
When the scale of the flow channel becomes smaller as in such a microchannel chip, the following features are obtained.
・ Since the Reynolds number becomes smaller, the flow is dominated by laminar flow.
・ The surface area per unit volume becomes very large.
・ The gradient of temperature, pressure, concentration, etc. increases.
Due to these characteristics, the efficiency of heat transfer, mass transfer such as diffusion, and the like are improved, and advantages such as shortening of the reaction time in the reaction system and improvement of the reaction speed are obtained. Furthermore, even in reactions in a small space, appropriate amount of synthesis and high reproducibility can be obtained, so it is possible to greatly reduce the amount of raw material fluid including chemicals, catalysts, reagents, etc. used in the reaction. As a result, economic benefits are great.
[0004]
Here, first, a general configuration of the microchannel chip will be described.
5A and 5B show parts of an example of a microchannel chip according to the prior art, wherein FIG. 5A is a perspective view of a cover plate 1, FIG. 5B is a perspective view of a substrate 2, and FIG. FIG. 2 is a cross-sectional view along a first supply channel 31 and a reaction channel 33 in a state where the microchannel chips 2 are integrated by bonding or bonding to form a microchannel chip.
The cover plate 1 is provided with two supply ports (first supply in FIG. 5) for supplying various raw material fluids (solutions, chemicals, reagents, etc., including liquids and gases containing fine solids) for reactions such as mixing. A port 11 and a second supply port 12), and a take-out port 13 for taking out a reaction result fluid such as a mixed fluid or a generated fluid sent out as a result of mixing are formed.
[0005]
The substrate 2 includes a first supply channel groove 21 and a second supply channel groove 22 serving as supply channels from the two supply ports 11 and 12, and a reaction channel groove 23 serving as a reaction channel. Is formed. Although the width of the reaction channel groove 23 is drawn wider than the widths of the two supply channel grooves 21 and 22 in FIG. 5B, the width is determined in consideration of the required reaction time in consideration of the length thereof. Is done.
When the cover plate 1 is joined to the substrate 2, a flow path 3 including a first supply flow path 31, a second supply flow path (not shown), and a reaction flow path 33 is formed as shown in FIG. .
The raw material fluids respectively supplied from the first supply port 11 and the second supply port 12 are guided to the reaction flow path 33 through the first supply flow path 31 and the second supply flow path, respectively, where they are mixed and synthesized. And the like, and is taken out from the outlet 13 as a reaction result fluid.
[0006]
The Reynolds number of a microchannel having an equivalent diameter of 500 μm or less is as small as about 10 to several hundreds. Therefore, the fluid flowing through the inside thereof is in a laminar flow dominant state as described above. Therefore, in the case of a microchannel having a channel configuration as shown in FIG. 5, each of the source fluids supplied from the two supply ports 11 and 12 has two laminar flows even in the reaction channel 33. The mixing of the two feed fluids supplied and fed is governed primarily by diffusion between the two laminar flows. For this reason, it takes a certain amount of time for the two fluids to reach a completely mixed state, even if they are microchannels.
In order to further shorten the mixing time and improve the efficiency, several attempts have been proposed to divide the flow into a number of parts to create a large number of laminar flows to shorten the diffusion time.
[0007]
FIG. 7 is a plan view showing the shape of an example of the substrate 2a. A cover plate similar to the cover plate 1 shown in FIG. Become. In FIG. 7, the flow channel groove is shown as a flow channel.
The first supply channel 31a and the second supply channel 32a connected to the two supply ports 11 and 12 of the lid plate are each branched in three stages, and are connected to a fine mesh-shaped multi-channel 33a that is a reaction channel. ing. The outlet side of the multi flow path 33a is gathered in a stepped manner opposite to the supply flow path side and is connected to the outlet 13. The supplied two types of raw material fluids are sufficiently mixed in the fine network-like multi-channel 33a.
[0008]
As a material for the substrate and cover plate of the microchannel chip as described above, a plate of silicon, glass, metal, plastic, or the like is usually used. From these materials, a material suitable for the purpose of use is selected, a micro channel is processed by a processing technology suitable for the material, and a micro channel chip is integrated by joining, bonding, O-ring fastening, etc. It becomes.
Conventional techniques relating to the structure and the like of this type of microchannel chip include a silicon substrate having a plurality of independent reaction chamber grooves formed on the surface by anisotropic etching, and a reaction substrate which is electrostatically bonded to the surface of the silicon substrate. 2. Description of the Related Art A flat plate for forming a chamber is known (see Patent Document 1).
[0009]
[Patent Document 1]
JP-A-10-337173
[Problems to be solved by the invention]
As described above, the fluid flowing in the microchannel formed on the same plane as shown in FIG. 6 and the like becomes a laminar flow unless a special state is given from the outside as described above. Mixing mainly depends on interdiffusion, and it takes a long time for its fineness to obtain a uniform mixed state. Therefore, in order to increase the mixing efficiency, it is necessary to divide the flow of the fluid into several flows to reduce the time required for diffusion, and a multi-channel as shown in FIG. 7 has been employed. However, in the multi-flow channel method, as the number of raw material fluids increases, the area of the substrate forming the flow channel must be increased, deviating from the demand for miniaturization.
[0011]
In a channel having the same channel cross-sectional area, the time required for two parallel flows to be mixed by mutual diffusion decreases as the contact area increases. Therefore, in the case of a microchannel chip in which the supply ports are arranged on the same side as in FIGS. 5 and 6, the fluid sent from the supply ports is a laminar flow arranged in the width direction in the reaction channel. Therefore, if a narrow and deep reaction channel is formed, the contact area between the laminar flows increases, and the mixing time can be shortened. However, such a reaction channel not only increases the processing time of the reaction channel groove, but also reduces the shape accuracy of the groove. Therefore, the shape of the reaction channel is desirably wider than the depth.
[0012]
An object of the present invention is to provide a microchannel chip capable of ensuring required miniaturization, having high shape accuracy of a reaction channel, and efficiently mixing a plurality of supplied material fluids.
[0013]
[Means for Solving the Problems]
According to the first aspect of the present invention, a plurality of supply ports for supplying a raw material fluid, an outlet for extracting a reaction result fluid sent out as a result of mixing the plurality of supplied raw material fluids, and a merging from each of the supply ports And a flow path comprising a reaction flow path from the merging section to the discharge port, and a plurality of plate members having recesses and through holes for forming the flow path are integrated. Wherein the reaction channel is constituted by a combination of a portion parallel to the main surface of the plate and a portion perpendicular to the main surface.
[0014]
If the reaction channel is parallel to the main surface of the plate, as described in the section of the related art, the flow of the fluid in the reaction channel is dominated by laminar flow, and the time required to mix a plurality of fluids is long. Become. However, when the reaction flow path is combined with a part perpendicular to the main surface of the plate, the fluid flow is sharply bent at this point, disturbing the laminar flow dominant state, and creating a turbulent flow state over the entire width of the reaction flow path. appear. As a result, the effect of stirring the raw material fluid in the reaction channel increases.
According to a second aspect of the present invention, in the first aspect of the present invention, the plurality of plate members include a lid plate, an intermediate plate, and a bottom plate. A plurality of through-holes serving as outlets, and a concave portion serving as a part of the reaction channel; a bottom plate having a part having the same shape as the concave portion at a position facing the concave portion of the lid plate; The intermediate plate has a supply passage communicating with a plurality of through-holes of the cover plate serving as a supply port, and the reaction passage communicates with the inlet of the recess of the cover plate and the recess of the bottom plate. When there are a plurality of through-holes, a plurality of recesses in the cover plate, and a plurality of recesses in the bottom plate, the through-holes which communicate with the outlets of the two recesses on the front stage and the inlets of the two recesses on the rear stage to become part of the reaction channel The reaction flow path communicates with the hole and the through-hole of the lid plate, which communicates with the outlets of both recesses in the final stage and also serves as an outlet. Comprising a through hole serving as a part of, a.
[0015]
The configuration of the present invention forms two symmetrical upper and lower branch flow paths in the middle of the reaction flow path, and in addition to sharply bending the flow of the fluid at the branch part, the fluid divided at the junction part Since they collide with each other, a large stirring effect can be obtained. It should be noted that the use of the intermediate plate only slightly increases the thickness, and does not obstruct the demand for miniaturization.
According to a third aspect of the present invention, in the first aspect of the present invention, the plurality of plate members include two plate members of a lid plate and a substrate, and the lid plate has the same number of through holes serving as the plurality of supply ports. A hole, a recess that communicates with the recess of the substrate and becomes a part of the reaction channel, and a through hole that communicates with the final end of the recess of the lid plate or the recess of the substrate that becomes the reaction channel and serves as the outlet, A concave portion that becomes a supply flow path that communicates with each of the plurality of through holes of the lid plate that is a supply port, and that communicates with the first-stage concave portion of the lid plate to become a part of the reaction flow path; And a recess that communicates with the recess of the plate and becomes a part of the reaction channel.
[0016]
The configuration of the present invention is the simplest configuration with two plate members. However, since the flow of the reaction channel can be rapidly changed, a stirring effect can be obtained. According to a fourth aspect of the present invention, in the first aspect of the present invention, the plurality of plate members include a lid plate, an intermediate plate, and a bottom plate. A plurality of through-holes for communicating with the concave portion of the bottom plate are provided, and the lid plate has the same number of through-holes serving as the plurality of supply ports, and communicates with the concave portion of the bottom plate to form a part of the reaction channel. A concave portion, a through hole communicating with the concave end of the lid plate or the final end of the bottom plate serving as a reaction channel, and a through hole serving as the outlet, wherein the bottom plate has a plurality of through holes of the lid plate serving as a supply port. A concave portion that becomes a supply flow channel that communicates with each of the first and second portions of the lid plate and becomes a part of the reaction channel, and a concave portion that communicates with the concave portion of the cover plate and becomes a part of the reaction channel, Is provided.
[0017]
According to the configuration of the present invention, the flow of the reaction channel is changed more rapidly by using the intermediate plate, and a larger stirring effect can be obtained. It should be noted that the use of the intermediate plate only slightly increases the thickness, and does not obstruct the demand for miniaturization.
[0018]
BEST MODE FOR CARRYING OUT THE INVENTION
A feature of the microchannel chip according to the present invention is that a plurality of source fluids supplied from a plurality of supply ports on the same side are efficiently mixed even when the width of the reaction channel is larger than the depth thereof. The reason is that the path is constituted by a combination of a portion parallel to the main surface of the plate and a portion perpendicular to the main surface of the plate material to rapidly change the flow of the fluid and generate a turbulent state to obtain a stirring effect.
Hereinafter, embodiments of the present invention will be described in more detail using examples. The parts having the same functions as those of the prior art are denoted by the same reference numerals.
[0019]
[First embodiment]
FIGS. 1A and 1B show the configuration of a first embodiment of a microchannel chip according to the present invention, wherein FIG. 1A is a perspective view showing an external appearance, and FIG. 1B is a sectional view taken along a reaction channel 33b. This corresponds to FIG. 2A and 2B show components of this embodiment. FIG. 2A is a plan view of the cover plate 1a, FIG. 2B is a plan view of the intermediate plate 4, and FIG. 2C is a plan view of the bottom plate 5.
In this embodiment, the cover plate 1a, the intermediate plate 4, and the bottom plate 5 are integrated by electrostatic bonding. A borosilicate glass plate was used for the cover plate 1a and the bottom plate 5, and a silicon wafer was used for the intermediate plate 4. The lid plate 1a and the bottom plate 5 may be silicon wafers, and the intermediate plate 4 may be a borosilicate glass plate.
[0020]
Two supply ports (a first supply port 11 and a second supply port 12) for supplying various kinds of raw material fluids for performing reactions such as mixing and chemical reaction are supplied to the cover plate 1a, and are sent out as a result of mixing. An outlet 13 for taking out a reaction result fluid that comes in is formed as a through hole, and a lower surface joined to the intermediate plate 4 has a first branch portion 332 on the side of the lid plate 1a, which is a part of the reaction channel, on the lower surface. In addition, two concave portions serving as the second branch portion 334, that is, the first concave portion 14 and the second concave portion 15 are formed.
The bottom plate 5 is provided with a first branch part 332 and a second branch part 334 on the bottom plate 5 side, which is a part of the reaction channel, at positions facing the first concave part 14 and the second concave part 15 of the lid plate 1a. Two concave portions, that is, a first concave portion 51 and a second concave portion 52 are formed.
[0021]
The intermediate plate 4 communicates the first supply channel 31b, the second supply channel (not shown), and the first penetration portion 41 serving as the first junction 331, and the first branch portion 332 and the second branch portion 334. A second penetration portion 42 serving as a second junction portion 333 and a third penetration portion 43 serving as a third junction portion 335 connecting the second branch portion 334 and the outlet 13 are formed.
For reference, an example of the thickness and processing shape of the plate material of this embodiment is as follows. The thickness of the cover plate 1a and the bottom plate 5 is 0.5 mm, the diameters of the supply ports 11 and 12 are 0.3 mm, and the diameter of the extraction port 13 is The thickness of the intermediate plate 4 is 0.5 mm, and the depth of the concave portion such as the first concave portion 14 is 0.1 mm. Sand blasting and wet etching with a mixed solution of hydrofluoric acid and nitric acid were used in combination for the processing of the through-holes, recesses and through-holes.
[0022]
The lid plate 1a and the bottom plate 5 are respectively joined to the upper and lower portions of the intermediate plate 4 by electrostatic bonding to form a flow path including a first supply flow path 31b, a second supply flow path (not shown), and a reaction flow path 33b. . The reaction channel 33b includes a first junction 331, a first junction 332 split into two upper and lower portions, a second junction 333, a second junction 334 split into two upper and lower portions, and a third junction 335 again.
For reference, an example of the condition of electrostatic bonding is shown below.The bottom plate 5, the intermediate plate 4, and the cover plate 1a are laminated in this order on a heater set at 500 ° C., and when these members reach 500 ° C., 450V is applied. Is applied between the glass member and the silicon member. Under these conditions, the components were completely integrated, and no leakage of liquid from the joint was observed.
[0023]
The raw material fluids respectively supplied from the first supply port 11 and the second supply port 12 are guided to the reaction flow path 33b through the first supply flow path 31b and the second supply flow path, respectively, where mixing and chemical reaction are performed. It reacts, etc., and is taken out of the outlet 13 as a reaction result fluid.
The source fluid flowing in the reaction channel 33b collides from the front at the junction of the first supply channel 31b and the second supply channel and merges, flows through the first junction 331, and flows through the first branch 332. At the inlet, the direction of the flow is suddenly changed, and the air flows into the upper and lower two flows while flowing through the first branch portion 332 with a turbulent state. The two flows of the first branching section 332 collide with each other from the front at the entrance of the second branching section 333, merge again, and flow through the second branching section 333. The flow in the second junction 333 changes into two upper and lower flows at the inlet of the second branch 334, as in the inlet of the first branch 332, while rapidly changing the direction of the flow and causing a turbulent state. It is split and flows through the second branch part 334. The two flows of the second branch part 334 collide with each other at the entrance of the third merge part 335 and collide with each other from the front, flow through the third merge part 335 and reach the outlet 13. In this way, the raw material fluids fed from the two supply ports 11 and 12 are sufficiently mixed in the reaction flow channel 33b by the merge and the turbulent split flow that collide from the front.
[0024]
Although this embodiment has two branching sections, the number of branching sections is not limited to two. Furthermore, by selecting not only the number of the flow dividing portions, but also the arrangement position, length, and the like, it is possible to realize an optimum mixing state that matches the cross-sectional shape of the reaction channel, the required mixing conditions, and the like.
[Second embodiment]
FIG. 3 is a cross-sectional view along the reaction channel 33c showing the configuration of the second embodiment.
In this embodiment, a cover plate 1b and a substrate 2c each having a recess serving as a reaction channel 33c are joined by electrostatic joining. A borosilicate glass plate was used for the lid plate 1b, and a silicon wafer was used for the substrate 2c. Note that the cover plate 1b may be a silicon wafer and the substrate 2c may be a borosilicate glass plate.
[0025]
The cover plate 1b has a first supply port 11 serving as a supply port for the raw material fluid, a through-hole serving as a second supply port (not shown), a through-hole serving as an outlet 13 for taking out a reaction result fluid, and a substrate 2c. Three concave portions that become the lid plate side reaction channel 336 are formed by joining, and the first supply channel 31c and the second supply channel (not shown) and the first stage substrate are joined to the substrate 2c by joining with the lid plate 1b. The side reaction channel 337 and three concave portions serving as the second-stage and third-stage substrate-side reaction channels 337 are formed. The recess on the cover plate side and the recess on the substrate side have a positional relationship such that when the cover plate 1b and the substrate 2c are joined, both ends communicate with each other to form one flow path. The through hole serving as the outlet 13 communicates with the final end of the concave portion serving as the lid-side reaction channel 336.
[0026]
When the lid plate 1b and the substrate 2c are joined to each other, as shown in FIG. 3, the substrate-side reaction channels 337 and the lid-plate-side reaction channels 336 are alternately communicated at the ends, and A reaction channel 33c is formed in a zigzag shape. The shapes of the supply flow path 31d and the like are the same as in the first embodiment.
Since the flow of the fluid in the reaction channel 33c of this embodiment generates a turbulent state each time it bends in a zigzag manner, the raw material fluid flowing inside is efficiently mixed by the stirring effect of the turbulent state.
[Third embodiment]
FIG. 4 is a cross-sectional view along the reaction channel showing the configuration of the third embodiment.
[0027]
In this embodiment, the bending of the reaction channel of the second embodiment is further increased, and an intermediate plate 4a is added for that purpose. In this embodiment, a member corresponding to the substrate 2c of the second embodiment is called a bottom plate 5a. A borosilicate glass plate was used for the lid plate 1c and the bottom plate 5a, and a silicon wafer was used for the intermediate plate 4a. Note that the lid plate 1c and the bottom plate 5a may be silicon wafers, and the intermediate plate 4a may be a borosilicate glass plate.
Since the lid plate 1c and the bottom plate 5a in this embodiment are the same as the lid plate 1b and the substrate 2c in the second embodiment, detailed description will be omitted, and only different points will be described.
There are two concave portions in the lid plate 1c that becomes the lid plate side reaction channel 338, and the positional relationship is such that the final end of the concave portion that becomes the bottom plate side reaction channel 340 in the bottom plate 5a communicates with the through hole that becomes the outlet 13. ing.
[0028]
In the intermediate plate 4a, a through hole 44 for a first supply port, a second supply port (not shown) for completing the reaction channel 33d by communicating the through hole and the concave portion of the lid plate 1c with the concave portion of the bottom plate 4a. And a through-hole 46 for take-out port, and four through-hole reaction channels 339 for communicating the end of the recess of the cover plate 1c with the end of the recess of the bottom plate 4a.
A lid plate 1c and a bottom plate 5a are joined above and below the intermediate plate 4a to form a first supply channel 31d, a second supply channel (not shown), and a reaction channel 33d having a large zigzag bend. To form
The flow of the fluid in the reaction channel 33d of this embodiment generates a more intense turbulent state due to the zigzag bend made larger in the intermediate plate 4a, so that the raw material fluid flowing inside is more efficiently mixed. You.
[0029]
In each of the three embodiments described above, the number of supply channels is two, but the number of supply channels is not limited to two.
[0030]
【The invention's effect】
According to the first aspect of the present invention, the reaction channel is constituted by a combination of a portion parallel to the main surface of the plate and a portion perpendicular to the main surface. If the reaction channel is parallel to the main surface of the plate, as described in the section of the related art, the flow of the fluid in the reaction channel is dominated by laminar flow, and the time required to mix a plurality of fluids is long. Become. However, when the reaction flow path is combined with a part perpendicular to the main surface of the plate, the fluid flow is sharply bent at this point, disturbing the laminar flow dominant state, and creating a turbulent flow state over the entire width of the reaction flow path. appear. As a result, the effect of stirring the raw material fluid in the reaction channel increases.
[0031]
Therefore, according to the present invention, it is possible to provide a microchannel chip capable of efficiently mixing a plurality of supplied raw material fluids while ensuring the required miniaturization while maintaining a high reaction channel shape accuracy.
In the invention according to claim 2, the plurality of plate members include a lid plate, an intermediate plate, and a bottom plate, and the lid plate has a plurality of through-holes serving as a plurality of supply ports and a discharge port, and a plurality of reaction holes. A concave portion that becomes a part of the flow path, and the bottom plate has a concave portion that is a part of the reaction channel in the same shape as the concave portion at a position facing the concave portion of the lid plate, and the intermediate plate has A supply hole communicating with each of the plurality of through-holes of the cover plate serving as a supply port and serving as a part of the reaction channel, and a through-hole serving as a part of the reaction channel and a recess of the cover plate and a recess of the bottom plate. And a through hole communicating with both. This configuration forms two symmetrical upper and lower branch flow paths in the middle of the reaction flow path.In addition to sharply bending the flow of the fluid at the branch part, the fluids diverted at the merge part are also connected. Because they collide, the stirring effect is further enhanced.
[0032]
Therefore, according to the present invention, it is possible to reliably provide a microchannel chip capable of efficiently mixing a plurality of supplied raw material fluids while ensuring the required miniaturization while ensuring high accuracy in the shape of the reaction channel. it can.
According to the third aspect of the present invention, two plate members, a lid plate and a substrate, are used as the plurality of plate members, and a concave portion that is a part of a reaction channel formed in the lid plate and one of the reaction channel formed in the substrate are provided. And the concave portion, which is a part, is communicated at each end to constitute a reaction channel, so that the end of the communicated concave portion functions as a reaction channel portion perpendicular to the main surface of the plate material. That is, the flow of the reaction channel is rapidly changed, and a turbulent state is generated over the entire width of the reaction channel. Since the present invention is composed of two plate members, the configuration is simple and the cost is low.
[0033]
According to the fourth aspect of the present invention, three plate members, a cover plate, an intermediate plate and a bottom plate, are used as the plurality of plate members, and a concave portion which is a part of a reaction channel formed in the cover plate, and a reaction flow formed in the bottom plate. The recess, which becomes a part of the passage, is communicated with a through hole formed in the intermediate plate to form a reaction channel, so that a portion perpendicular to the main surface of the plate material has a depth corresponding to the depth of the recess. The thickness is added to the thickness, and the flow of the reaction channel is changed more rapidly, and a more intense turbulent state is generated over the entire width of the reaction channel.
In the second and fourth aspects of the present invention, the intermediate plate is used. However, the use of the intermediate plate only slightly increases the thickness, and does not hinder the demand for miniaturization.
[Brief description of the drawings]
FIGS. 1A and 1B show the configuration of a first embodiment of a microchannel chip according to the present invention, wherein FIG. 1A is a perspective view showing an external appearance, and FIG. 1B is a sectional view taken along a reaction channel. FIG. 3A is a plan view of a cover plate, FIG. 3B is a plan view of an intermediate plate, and FIG. 3C is a plan view of a bottom plate. FIG. 3 is a reaction flow showing a configuration of a second embodiment. FIG. 4 is a cross-sectional view along a reaction channel showing the configuration of a third embodiment. FIG. 5 shows an example of a component of a microchannel chip according to a conventional technique. FIG. 6B is a perspective view of the substrate. FIG. 6 is a cross-sectional view of a conventional example using the components of FIG. 5. FIG. 7 is a plan view showing the shape of another example of the substrate of the micro-channel chip according to the prior art. Description】
1, 1a cover plate
11 1st supply port 12 2nd supply port
13 Outlet 14 First recess
15 Second recess 2, 2a, 2c Substrate 2b Piezoelectric substrate
21 First supply channel groove 22 Second supply channel groove
23 Reaction channel groove 23b Reaction channel recess
24 Inside common electrode 25 Outside electrode 3 Flow path
31, 31a, 31b, 31c, 31d First supply channel
32a Second supply channel
33, 33b, 33c, 33d Reaction channel 33a Multi channel
331 1st junction 332 1st junction
333 2nd junction 334 2nd junction
335 Third junction 336, 338 Lid plate side reaction channel
337 Substrate-side reaction channel 339 Through-hole reaction channel
340 Bottom plate side reaction channel 4, 4a Intermediate plate
41 1st penetration section 42 2nd penetration section
43 3rd penetration 44 through-hole for 1st supply port
46 Through hole 5, 5a for outlet bottom plate
51 1st recess 52 2nd recess

Claims (4)

A plurality of supply ports for supplying the raw material fluid, an outlet for taking out a reaction result fluid sent out as a result of mixing the supplied plurality of raw material fluids, and a respective supply from each supply port to the junction. A flow channel consisting of a flow channel and a reaction flow channel from the junction to the outlet, and a microchannel chip in which a plurality of plate members having concave portions and through holes for forming the flow channel are integrated. So,
The reaction channel is constituted by a combination of a portion parallel to the main surface of the plate and a portion perpendicular to the main surface,
A microchannel chip, characterized in that: As the plurality of plate members, a lid plate, an intermediate plate, and a bottom plate having three plate members,
The cover plate includes a plurality of through-holes serving as the plurality of supply ports and the outlet, and a recess serving as a part of a reaction channel,
The bottom plate is provided with a concave portion which is a part of the reaction channel in the same shape as the concave portion at a position facing the concave portion of the lid plate,
The intermediate plate has a supply passage communicating with the plurality of through-holes of the lid plate serving as a supply port, and a through-hole communicating with the inlets of the concave portion of the lid plate and the concave portion of the bottom plate to be a part of the reaction channel. And a plurality of recesses in the lid plate and the bottom plate, each having a plurality of recesses, and a through-hole that becomes a part of the reaction channel by communicating with an outlet of both recesses of the preceding stage and an inlet of both recesses of the subsequent stage. A through hole that communicates with the outlets of both recesses and communicates with a through hole of the lid plate that serves as an outlet and becomes a part of the reaction channel.
2. The microchannel chip according to claim 1, wherein: As the plurality of plate members, a lid plate and a substrate have two plate members,
The cover plate has the same number of through holes serving as the plurality of supply ports, a recess serving as a part of the reaction channel in communication with the recess of the substrate, and a recess of the lid plate or a recess of the substrate serving as the reaction channel. A through hole that communicates with the final end of
The substrate has a supply channel that communicates with the plurality of through holes of the cover plate that is a supply port, and a recess that communicates with the first-stage recess of the cover plate and becomes a part of the reaction channel, and a recess of the cover plate. And a recess that becomes part of the reaction channel in communication with the
2. The microchannel chip according to claim 1, wherein: As the plurality of plate members, a lid plate, an intermediate plate, and a bottom plate having three plate members,
The intermediate plate has a plurality of through holes for communicating the through hole and the concave portion of the lid plate with the concave portion of the bottom plate,
The cover plate has the same number of through holes serving as the plurality of supply ports, a recess serving as a part of the reaction channel in communication with the recess in the bottom plate, and a recess in the cover plate or a recess in the bottom plate serving as the reaction channel. A through hole that communicates with the final end of
The bottom plate has a supply passage communicating with the plurality of through-holes of the cover plate serving as a supply port, and a concave portion serving as a part of the reaction flow passage communicating with the recess at the first stage of the cover plate, and a concave portion of the cover plate. And a recess that becomes part of the reaction channel in communication with the
2. The microchannel chip according to claim 1, wherein:

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