JP4840284B2 - Joining layer-containing member and manufacturing method thereof - Google Patents

Joining layer-containing member and manufacturing method thereof Download PDF

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JP4840284B2
JP4840284B2 JP2007204111A JP2007204111A JP4840284B2 JP 4840284 B2 JP4840284 B2 JP 4840284B2 JP 2007204111 A JP2007204111 A JP 2007204111A JP 2007204111 A JP2007204111 A JP 2007204111A JP 4840284 B2 JP4840284 B2 JP 4840284B2
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containing member
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郁朗 中川
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Toyota Motor Corp
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Description

本発明は接合層含有部材とその製造方法に関し、限定されないが、熱膨張差のある2つの部材を接合層としてはんだやろう材を用いて接合一体化した接合層含有部材とその製造方法に関する。   The present invention relates to a joining layer-containing member and a method for producing the same, and although not limited thereto, the present invention relates to a joining layer-containing member obtained by joining and integrating two members having a difference in thermal expansion using solder or brazing material as a joining layer.

広い面積を持つ2つの部材を、接合面となる領域にはんだやろう材のような接合材料を塗布して接合層とし、両者を接合一体化した接合層含有部材は知られている。一例として、半導体素子をはじめとする各種素子を実装するために放熱性基板に接合した回路基板などが挙げられる。また、HV車用のインバータもその一例であり、大面積である半導体素子と絶縁材と放熱材の3つの部材がはんだやろう材等の接合材で接合一体化することで形成されている。このような製品において、通常の場合、接合する各部材の熱膨張率は異なっており、繰り返して熱応力が加わると熱履歴により接合層に亀裂(クラック)が入ることがある。   A bonding layer-containing member is known in which two members having a wide area are coated with a bonding material such as solder or brazing material in a region to be a bonding surface to form a bonding layer, and the two are bonded and integrated. As an example, a circuit board joined to a heat dissipation board for mounting various elements including a semiconductor element can be cited. An inverter for an HV vehicle is one example, and is formed by joining and integrating three members, a semiconductor element having a large area, an insulating material, and a heat radiating material, with a joining material such as solder or brazing material. In such a product, the thermal expansion coefficient of each member to be joined is usually different, and when thermal stress is repeatedly applied, a crack (crack) may occur in the joining layer due to thermal history.

図4は、それを模式的に示しており、図4(a)は試験前の状態、図4(b)は試験後の状態である。広い面積を持ちかつ熱膨張率の異なる部品1(例えば絶縁材や放熱材)と部品2(例えば半導体素子)とを、部品2の面積にほぼ相当する領域に接合材料(例えばはんだ)を塗布して接合層3を形成し、両者を接合一体化して製品5とする。その製品5に繰り返し熱応力を反復して加えると、熱履歴に起因して、図4(b)に示すように、接合層3の周縁部から内側に向けての領域に、図に6で示すように、クラックが発生するのを観察できる。このようなクラックが発生すると、設計時の接合強度や電気伝導性あるいは熱伝導性を維持できなくなる恐れがある。   FIG. 4 schematically shows this, in which FIG. 4 (a) shows the state before the test, and FIG. 4 (b) shows the state after the test. Apply a bonding material (for example, solder) to a part 1 (for example, an insulating material or a heat dissipation material) and a part 2 (for example, a semiconductor element) having a large area and having different thermal expansion coefficients in a region substantially corresponding to the area of the part 2. Thus, the bonding layer 3 is formed, and both are bonded and integrated to obtain a product 5. When repeated thermal stress is repeatedly applied to the product 5, due to the thermal history, as shown in FIG. As shown, the occurrence of cracks can be observed. When such a crack occurs, there is a possibility that the bonding strength, electrical conductivity, or thermal conductivity at the time of design cannot be maintained.

熱履歴に対する信頼性を向上させる一つの解決策として、特許文献1には、セラミックス基板と金属回路板とを接合層(ろう材)を介して接合したセラミックス回路基板において、接合層の外周部を金属回路板のパターンに沿って波形形状とすることが記載されている。波形の外周形状として接合層の外周長を見かけ上で長くすることにより、セラミックス基板と金属回路板との接合端への応力集中を緩和でき、熱応力や熱サイクルに起因してセラミックス基板にクラックが発生するのを防止できる旨、記載されている。   As one solution for improving the reliability against thermal history, Patent Document 1 discloses a ceramic circuit board in which a ceramic substrate and a metal circuit board are bonded via a bonding layer (brazing material). It is described that the corrugated shape is formed along the pattern of the metal circuit board. By making the outer circumference of the bonding layer apparently longer as the corrugated outer shape, the stress concentration at the joint edge between the ceramic substrate and the metal circuit board can be relaxed, and cracks in the ceramic substrate due to thermal stress and thermal cycle It is described that it can be prevented from occurring.

特開2005−93803号公報JP-A-2005-93803

前記したように、2つの部材を接合層を介して一体化した接合層含有部材において、熱履歴により接合層の外側領域にクラックが発生する場合があり、例えば、接合層含有部材が回路基板のような場合には、クラックの発生によって設計時の電気伝導性あるいは熱伝導性を維持できなくなり、製品の劣化を早めるので、回避することが望まれる。   As described above, in the bonding layer-containing member in which the two members are integrated via the bonding layer, a crack may occur in the outer region of the bonding layer due to the thermal history. In such a case, the occurrence of cracks makes it impossible to maintain the electrical conductivity or thermal conductivity at the time of design and accelerates the deterioration of the product.

従って、本発明は、2つの部材が接合層を介して一体化した接合層含有部材において、熱履歴によって接合層にクラックが発生するのを回避できるようにした接合層含有部材を提供することを課題とする。   Therefore, the present invention provides a bonding layer-containing member in which, in a bonding layer-containing member in which two members are integrated via a bonding layer, the occurrence of cracks in the bonding layer due to thermal history can be avoided. Let it be an issue.

本発明者は、従来の接合層含有部材において、熱履歴に起因して接合層の周縁部から内側に向けてクラックが発生するのは、温度変化に伴う熱応力が、接合層の中央部では小さく外周部に行くほど大きくなること、また、接合面積が大きいほど端部(周縁部)に発生する熱応力は大きくこと、によると考えた。そして、接合層を多数の接合区画に分割し、各接合区画の1つ当たりの大きさを中心から外周に向かって次第に小さくなるようにして接合面に配置することにより、熱応力によるクラックの発生を抑制できることを実験により確認した。   In the conventional bonding layer-containing member, the present inventor cracks inward from the peripheral edge of the bonding layer due to thermal history, because the thermal stress accompanying the temperature change occurs in the central portion of the bonding layer. It was thought that the smaller the outer peripheral portion, the larger the thermal stress generated at the end portion (peripheral edge portion), the larger the bonding area. Then, the bonding layer is divided into a large number of bonding sections, and the size of each bonding section is gradually reduced from the center toward the outer periphery so that cracks due to thermal stress occur. It was confirmed by experiments that it can be suppressed.

特許文献1に記載のように、接合層の外周部を金属回路板のパターンに沿って波形形状とし、接合層の外周長を見かけ上長くすることで、セラミックス基板と金属回路板との接合端への応力集中を緩和することができても、接合層が大きな面積を有している以上、外周縁にクラックが発生するのを完全は抑制することは困難である。   As described in Patent Document 1, the outer peripheral portion of the bonding layer has a corrugated shape along the pattern of the metal circuit board, and the outer peripheral length of the bonding layer is apparently increased, so that the bonding end between the ceramic substrate and the metal circuit board is obtained. Even if the stress concentration on the surface can be alleviated, it is difficult to completely suppress the occurrence of cracks on the outer periphery as long as the bonding layer has a large area.

本発明は上記の知見に基づきなされたものであり、本発明による接合層含有部材は、第1の部材に接合材料からなる接合層を介して第2の部材を接合した接合層含有部材であって、前記接合層は複数の接合区画が隙間をおいて配置された形状であり、かつ前記接合層はその外周域である外側領域と該外側領域より内側に位置する内側領域に区分けされており、接合区画1つ当たりの面積は、前記外側領域で最も小さく、内側領域ではより大きくされていることを特徴とする。   The present invention has been made based on the above knowledge, and the bonding layer-containing member according to the present invention is a bonding layer-containing member in which the second member is bonded to the first member via the bonding layer made of the bonding material. The bonding layer has a shape in which a plurality of bonding sections are arranged with a gap, and the bonding layer is divided into an outer region which is an outer peripheral region thereof and an inner region which is located on the inner side of the outer region. The area per bonding section is the smallest in the outer region and larger in the inner region.

本発明による接合層含有部材において、接合層の内側領域は、同じ面積を持つ複数個の接合区画の集合として形成されていてもよいが、好ましくは、接合区画1つ当たりの面積が外側から内側に向けて次第に大きくされた複数個の接合区画の集合として形成されるのが好ましい。   In the joining layer-containing member according to the present invention, the inner region of the joining layer may be formed as a set of a plurality of joining sections having the same area, but preferably the area per joining section is from the outside to the inside. Preferably, it is formed as a set of a plurality of joint sections that are gradually enlarged toward the end.

本発明による接合層含有部材では、全体としては外周部に行くほど熱応力が大きくなり歪みが大きくなっても、外周側に行くほど接合区画1つ当たりの面積が小さくなっているので、接合区画1つ当たりに加わる歪みは小さく、発生する応力も小さくなる。そのために、接合層の外側領域においてクラックが発生するのを抑制することができ、結果として当該接合層含有部材の製品寿命を長くすることができる。   In the joining layer-containing member according to the present invention, since the thermal stress increases and the distortion increases toward the outer peripheral portion as a whole, the area per joining section decreases toward the outer peripheral side. The strain applied per piece is small, and the generated stress is small. Therefore, it can suppress that a crack generate | occur | produces in the outer side area | region of a joining layer, As a result, the product life of the said joining layer containing member can be lengthened.

本発明は、上記の接合層含有部材を製造する第1の方法として、前記複数の接合区画の配置パターンに応じて作成したマスクを用いて前記第1の部材およびまたは第2の部材の接合面に接合材料を塗布する工程と、マスクを除去する工程と、前記第1の部材と第2の部材とを接合する工程と、を含むことを特徴とする接合層含有部材の製造方法をも開示する。   In the present invention, as a first method for manufacturing the bonding layer-containing member, the bonding surface of the first member and / or the second member using a mask created according to the arrangement pattern of the plurality of bonding sections. Also disclosed is a method for manufacturing a bonding layer-containing member, comprising: a step of applying a bonding material to the substrate, a step of removing the mask, and a step of bonding the first member and the second member. To do.

さらに第2の製造方法として、前記第1の部材およびまたは第2の部材の接合面における、前記複数の接合区画が形成されるべき場所には接合材料が濡れやすい材料を配置し、前記隙間が形成されるべき場所には接合材料が濡れにくい材料を配置する工程と、前記接合層となるべき領域の全面に接合材料を塗布する工程と、前記第1の部材と第2の部材とを接合する工程と、を含むことを特徴とする接合層含有部材の製造方法をも開示する。   Further, as a second manufacturing method, a material that easily wets the bonding material is disposed at a position where the plurality of bonding sections are to be formed on the bonding surface of the first member and / or the second member, and the gap is not formed. The step of disposing a material that is difficult to wet the bonding material at a place to be formed, the step of applying the bonding material to the entire surface of the region to be the bonding layer, and bonding the first member and the second member The manufacturing method of the joining layer containing member characterized by including this process is also disclosed.

上記の製造方法を採用することにより、接合面に容易に、複数の接合区画の所望の配置パターンを形成することができる。第2の方法において、接合材料としてはんだを用いる場合、濡れやすい材料としては、Ni,Cu等を例として挙げることができ、濡れにくい材料としては、Al,AlN,Si,SiC,Al等を例として挙げることができる。全面に塗布されたはんだは、濡れにくい材料上のはんだが、濡れやすい材料が配置されている領域に移動することにより、所期どおりの接合区画の配置パターンを得ることができる。 By employing the above manufacturing method, a desired arrangement pattern of a plurality of joining sections can be easily formed on the joining surface. In the second method, when solder is used as the joining material, Ni, Cu, etc. can be cited as examples of materials that are easily wetted, and Al, AlN, Si 3 N 4 , SiC, Al can be used as materials that are difficult to wet. 2 O 3 etc. can be mentioned as an example. The solder applied on the entire surface moves to a region where the material that is difficult to wet moves to the region where the material that easily wets is arranged.

本発明による接合層含有部材において、前記第1の部材と第2の部材は、熱膨張率が同じものであってもよく、異なったものでもよい。熱膨張率が異なる2つの部材の場合、熱膨張係数差によって、中心から外周に向かって大きくなるような分布の熱応力が、接合材料に加わるが、前記のように接合区画1つ当たりの面積を調整することにより、クラックの発生を効果的に抑制することができる。   In the bonding layer-containing member according to the present invention, the first member and the second member may have the same or a different coefficient of thermal expansion. In the case of two members having different thermal expansion coefficients, a thermal stress having a distribution that increases from the center toward the outer periphery due to the difference in thermal expansion coefficient is applied to the bonding material, but as described above, the area per bonding section By adjusting, the occurrence of cracks can be effectively suppressed.

本発明による接合層含有部材において、接合層における前記隙間が接合層の全面積に占める割合は、接合強度、電気伝導性あるいは熱伝導性等の観点から、小さい方が望ましい。しかし、小さすぎると、接合区画同士が接合してしまい、所期の目的が達成されないことが起こる。得ようとする接合層含有部材に求められる諸物性値を考慮して、最適値を設定する。本発明による接合層含有部材において、接合層が前記隙間を有する分だけ、接合層の全面が接合材料で覆われている従来の製品と比較して、接合強度、電気伝導性あるいは熱伝導性等において性能低下する。しかし、その低下は僅かであり、かつクラック発生を抑制でき設計時の諸性能を長期のわたり維持できるので、トータルとして本発明による接合層含有部材は、高い優位性を持つ。   In the bonding layer-containing member according to the present invention, the ratio of the gap in the bonding layer to the total area of the bonding layer is preferably small from the viewpoint of bonding strength, electrical conductivity, thermal conductivity, and the like. However, if it is too small, the joining sections are joined together, and the intended purpose may not be achieved. The optimum value is set in consideration of various physical property values required for the bonding layer-containing member to be obtained. In the bonding layer-containing member according to the present invention, the bonding strength, electrical conductivity, thermal conductivity, etc. compared to the conventional product in which the entire surface of the bonding layer is covered with the bonding material by the amount of the gap. The performance is degraded. However, the decrease is slight, and the occurrence of cracks can be suppressed and the performance at the time of design can be maintained over a long period of time. Therefore, the bonding layer-containing member according to the present invention has a high advantage as a whole.

本発明によれば、2つの部材が接合層を介して一体化した接合層含有部材において、熱履歴によって接合層にクラックが発生するのを回避できるようにした接合層含有部材が提供される。   ADVANTAGE OF THE INVENTION According to this invention, in the joining layer containing member which two members integrated through the joining layer, the joining layer containing member which made it possible to avoid that a crack generate | occur | produces in a joining layer by a heat history is provided.

以下、本発明を実施の形態により説明する。図1は本発明による接合層含有部材の一例を示す。   Hereinafter, the present invention will be described with reference to embodiments. FIG. 1 shows an example of a bonding layer-containing member according to the present invention.

この例で、接合層含有部材10は、熱膨張率aである第1の部材11と熱膨張率bである第2の部材12が、第2の部材12とほぼ等しい面積に塗布された接合材料(はんだ等)からなる接合層13により、接合一体化している。なお、実際の接合層含有部材10において、接合層13は第1の部材11と第2の部材12との間に存在しており、実際には目視できないが、説明の都合上、図では、見える状態に描いている。   In this example, the bonding layer-containing member 10 is a bonding in which a first member 11 having a thermal expansion coefficient a and a second member 12 having a thermal expansion coefficient b are applied to an area approximately equal to the second member 12. The joining layer 13 made of a material (solder or the like) is joined and integrated. In the actual bonding layer-containing member 10, the bonding layer 13 exists between the first member 11 and the second member 12 and is not actually visible, but for convenience of explanation, in the figure, It is drawn so that it can be seen.

接合層13は、複数の接合区画14,15,16が隙間17をおいて配置された形状であり、この例では、一つ当たりの面積が最も小さい第1接合区画14と、2番面に大きい第2接合区画15と、3番面に大きい第3接合区画16と、で形成されている。面積が最も小さい第1接合区画14からなる群が本発明でいう接合領域の外側領域を形成し、第2接合区画15からなる群および第3接合区画16からなる群が内側領域を形成する。内側領域において、第2接合区画15からなる群が外側に位置し、第3接合区画16からなる群がその内側に位置している。   The bonding layer 13 has a shape in which a plurality of bonding sections 14, 15, 16 are arranged with a gap 17. In this example, the first bonding section 14 having the smallest area per area and the second surface It is formed of a large second joint section 15 and a third joint section 16 that is large on the third surface. The group consisting of the first joining sections 14 having the smallest area forms the outer area of the joining area referred to in the present invention, and the group consisting of the second joining sections 15 and the group consisting of the third joining sections 16 form the inner area. In the inner region, the group consisting of the second joining sections 15 is located outside, and the group consisting of the third joining sections 16 is located inside thereof.

従って、接合層13全体では、隙間をおいて配置された複数の接合区画14,15,16が、接合層13の外周域では1つ当たりの接合面積が最も小さく、以下、内側(中心部)に向けて次第に大きくなるようにして配されている。なお、図示の例では、第1接合区画14からなる領域が2周にわたって配置され、その内側に、第2接合区画15からなる領域が2周にわたって配置されて、さらに最も内側には、最も大きな接合面積である第3の接合区画16が2列×5行の形態で配置されているが、この配置形態はあくまでも例示であって、接合領域の最外側領域で最も小さく、内側に行くに従って連続的にまたは階段状的に次第に大きくなるような配列であれば、すべて所期の目的を達することができる。   Therefore, in the entire bonding layer 13, the bonding sections 14, 15, 16 arranged with gaps have the smallest bonding area in the outer peripheral region of the bonding layer 13, and hereinafter, the inner side (center portion). It is arranged to become gradually larger toward In the illustrated example, the region composed of the first joint section 14 is arranged over two laps, the region composed of the second joint section 15 is arranged over two laps inside, and the innermost is the largest. The third bonding section 16 which is the bonding area is arranged in a form of 2 columns × 5 rows, but this arrangement form is merely an example, and is the smallest in the outermost region of the bonding region, and is continuous toward the inner side. If the arrangement gradually increases in size, stepwise or stepwise, all of the intended purposes can be achieved.

上記のような複数の接合区画14,15,16の配置パターンを形成する方法は任意であるが、1つの方法として、図示しないが、配置パターンに応じて作成したマスクを用い、第1の部材11およびまたは第2の部材12の接合面にマスクを置いて、その上から接合材料を塗布した後、マスクを除去し、第1の部材11と第2の部材12とを接合する方法がある。   Although the method for forming the arrangement pattern of the plurality of joining sections 14, 15, 16 as described above is arbitrary, as one method, although not shown, a first member is formed using a mask created according to the arrangement pattern. 11 and / or a method in which a mask is placed on the bonding surface of the second member 12, a bonding material is applied thereon, the mask is removed, and the first member 11 and the second member 12 are bonded to each other. .

また、他の方法として、複数の接合区画14,15,16が形成されるべき場所には、Ni,Cuのような接合材料が濡れやすい材料を、また、前記隙間17が形成されるべき場所には、AlN,Siのような接合材料が濡れにくい材料を予めパターニングしておき、その上から、接合層13となるべき領域の全面に接合材料を塗布する方法がある。この方法では、濡れにくい材料上のはんだが、濡れやすい材料が配置されている領域に移動していくことによって、所期どおりの配置パターンを備えた接合層13が形成される。 As another method, a material where the joining material such as Ni and Cu is easily wetted is used in a place where the plurality of joining sections 14, 15 and 16 are to be formed, and a place where the gap 17 is to be formed. There is a method in which a bonding material such as AlN or Si 3 N 4 that is difficult to wet is patterned in advance, and then the bonding material is applied to the entire surface of the region to be the bonding layer 13. In this method, the bonding layer 13 having an intended arrangement pattern is formed by the solder on the material that is difficult to wet move to the region where the material that easily wets is arranged.

本発明による接合層含有部材10は、上記のように、中央部では1つ当たりの接合面積が大きな接合区画が隙間を置いて配置され、接合領域の外周に向かって次第に接合面積が小さい接合区画がやはり隙間を置いて配置され、最外周では1つ当たりの接合面積が最も小さい接合区画が隙間をおいて配置されることから、加熱により接合層含有部材10の全体としては、外周部に行くほど大きくなる熱応力と歪みが作用しても、接合区画1つ当たりに加わる熱応力および歪みは小さくなる。そのために、接合層13の外側領域においてクラックが発生するのを効果的に抑制することができ、接合層含有部材10の製品寿命を長くすることができる。   In the bonding layer-containing member 10 according to the present invention, as described above, the bonding section having a large bonding area per one is disposed with a gap at the center, and the bonding area gradually decreases toward the outer periphery of the bonding area. Are disposed with a gap between them, and the bonding section having the smallest bonding area per one is disposed with a gap at the outermost periphery, so that the bonding layer-containing member 10 as a whole goes to the outer peripheral portion by heating. Even if thermal stress and strain that become larger are applied, the thermal stress and strain applied to each joint section are reduced. Therefore, it can suppress effectively that a crack generate | occur | produces in the outer side area | region of the joining layer 13, and the product life of the joining layer containing member 10 can be lengthened.

以下、実施例と比較例により本発明の有用性を説明する。   Hereinafter, the usefulness of the present invention will be described with reference to Examples and Comparative Examples.

[実施例1]
図2(a)に示すように、第1の部材11としてのCuMo放熱板(110mm×110mm×3mm)と、第2の部材12としてのAl電極付窒化アルミ絶縁板(102mm×102mm×1.5mm)とを、はんだ材料SnAg0.5Cu(鉛フリー)による接合層13により接合一体化した。マスク(不図示)を用いて、図示されるパターンで前記はんだを印刷後、窒素雰囲気中、ピーク温度280℃でリフローした。接合区画1つ当たりの面積は、最も外側の接合区画14の大きさを10mm×10mm=100mm、中間の接合区画15の大きさを12mm×12mm=144mm、中央の接合区画16の大きさを24mm×24mm=576mm、とした。各接合区画はほぼ等しい隙間を置いて配置した。接合層13の全接合材面積は、7408mmである。
[Example 1]
As shown in FIG. 2A, a CuMo heat sink (110 mm × 110 mm × 3 mm) as the first member 11 and an aluminum nitride insulating plate with an Al electrode (102 mm × 102 mm × 1. 5 mm) was integrated with the bonding layer 13 made of the solder material Sn 3 Ag0.5Cu (lead-free). Using a mask (not shown), the solder was printed in the pattern shown, and then reflowed at a peak temperature of 280 ° C. in a nitrogen atmosphere. Area per one joint compartment, the size of most 10mm × 10mm = 100mm 2 The size of the outer joint sections 14, 12mm × 12mm = 144mm 2 The size of the middle joint section 15, the center of the joint section 16 Was 24 mm × 24 mm = 576 mm 2 . Each joining section was arranged with approximately equal gaps. The total bonding material area of the bonding layer 13 is 7408 mm 2 .

[比較例]
図2(b)に示すように、100mm×100mmの領域のすべてにはんだ材料SnAg0.5Cu(鉛フリー)による接合層13を形成した以外は、実施例1と同様にして接合層含有部材を作った。接合層13の全接合材面積は、10000mmである。
[Comparative example]
As shown in FIG. 2B, a joining layer-containing member is formed in the same manner as in Example 1 except that the joining layer 13 made of the solder material Sn 3 Ag0.5Cu (lead-free) is formed in the entire region of 100 mm × 100 mm. made. The total bonding material area of the bonding layer 13 is 10,000 mm 2 .

[試験]
実施例品、比較例品に対して、気相冷熱サイクル試験(−40℃〜105℃、最大2000サイクル)を行った。試験の途中で、試験体を抜き取り、超音波探傷装置を用いて、発生したクラック面積を測定した。その結果を図3のグラフに示した。
[test]
A vapor-phase cooling / heating cycle test (−40 ° C. to 105 ° C., maximum 2000 cycles) was performed on the example product and the comparative product. In the middle of the test, the specimen was taken out and the generated crack area was measured using an ultrasonic flaw detector. The results are shown in the graph of FIG.

[評価]
図3のグラフが示すように、実施例のものはクラックの発生が大幅に減少しており、本発明品の有用性が評価できる。
[Evaluation]
As shown in the graph of FIG. 3, the occurrence of cracks in the example is greatly reduced, and the usefulness of the product of the present invention can be evaluated.

本発明による接合層含有部材の一例を示す図。The figure which shows an example of the joining layer containing member by this invention. 実施例の接合層含有部材(図2(a))と比較例の接合層含有部材(図2(b))を示す図。The figure which shows the joining layer containing member (FIG.2 (a)) of an Example, and the joining layer containing member (FIG.2 (b)) of a comparative example. 実施例と比較例のクラック発生面積を示すグラフ。The graph which shows the crack generation area of an Example and a comparative example. 熱履歴により接合層含有部材の接合層に亀裂(クラック)が入ることを試験したときの模式図あり、図4(a)は試験前の状態、図4(b)は試験後の状態である。It is a schematic diagram when it tests that a crack (crack) enters into a joining layer of a joining layer content member by thermal history, Drawing 4 (a) is a state before a test, and Drawing 4 (b) is a state after a test. .

符号の説明Explanation of symbols

10…接合層含有部材、11…第1の部材、12…第2の部材、13…接合層、14,15,16…複数の接合区画、17…隙間   DESCRIPTION OF SYMBOLS 10 ... Joining layer containing member, 11 ... 1st member, 12 ... 2nd member, 13 ... Joining layer, 14, 15, 16 ... Multiple joining division, 17 ... Gap

Claims (5)

熱膨張率に差がある第1の部材と第2の部材とが接合材料からなる接合層を介して接合しておりかつ熱履歴が反覆して課せられる場所で使用される接合層含有部材であって、
前記接合層は複数の接合区画が隙間をおいて配置された形状であり、かつ前記接合層はその外周域である外側領域と該外側領域より内側に位置する内側領域に区分けされており、接合区画1つ当たりの面積は、前記外側領域で最も小さく、内側領域ではより大きくされていることを特徴とする接合層含有部材。
A joining layer-containing member used in a place where the first member and the second member having a difference in thermal expansion coefficient are joined via a joining layer made of a joining material and the thermal history is repetitively imposed. There,
The bonding layer has a shape in which a plurality of bonding sections are arranged with a gap, and the bonding layer is divided into an outer region which is an outer peripheral region thereof and an inner region which is located on the inner side of the outer region. The bonding layer-containing member is characterized in that an area per section is the smallest in the outer region and larger in the inner region.
前記内側領域において、前記接合区画1つ当たりの面積が外側から内側に向けて次第に大きくなっていることを特徴とする請求項1に記載の接合層含有部材。   2. The joining layer-containing member according to claim 1, wherein in the inner region, an area per joining section gradually increases from the outside toward the inside. 接合材料が鉛フリーはんだであることを特徴とする請求項1または2に記載の接合層含有部材。   The joining layer-containing member according to claim 1 or 2, wherein the joining material is lead-free solder. 請求項1〜3のいずれかに記載の接合層含有部材の製造方法であって、前記複数の接合区画の配置パターンに応じて作成したマスクを用いて前記第1の部材およびまたは第2の部材の接合面に接合材料を塗布する工程と、マスクを除去する工程と、前記第1の部材と第2の部材とを接合する工程と、を含むことを特徴とする接合層含有部材の製造方法。   It is a manufacturing method of the joining layer content member according to any one of claims 1 to 3, Comprising: The 1st member and / or the 2nd member using the mask created according to the arrangement pattern of the plurality of joined sections. A method for producing a bonding layer-containing member, comprising: a step of applying a bonding material to the bonding surface, a step of removing a mask, and a step of bonding the first member and the second member. . 請求項1〜3のいずれか記載の接合層含有部材の製造方法であって、前記第1の部材およびまたは第2の部材の接合面における、前記複数の接合区画が形成されるべき場所には接合材料が濡れやすい材料を配置し、前記隙間が形成されるべき場所には接合材料が濡れにくい材料を配置する工程と、前記接合層となるべき領域の全面に接合材料を塗布する工程と、前記第1の部材と第2の部材とを接合する工程と、を含むことを特徴とする接合層含有部材の製造方法。   It is a manufacturing method of the joining layer content member according to any one of claims 1 to 3, and in the joint surface of said 1st member and / or the 2nd member, in said place where a plurality of joined divisions should be formed. Placing a material that is easily wetted by the bonding material, placing a material that is difficult to wet the bonding material in a place where the gap is to be formed, and applying a bonding material to the entire surface of the bonding layer; A step of bonding the first member and the second member.
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