JP4836873B2 - 地震性の振動に対してより有効な能動振動絶縁システム - Google Patents
地震性の振動に対してより有効な能動振動絶縁システム Download PDFInfo
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- JP4836873B2 JP4836873B2 JP2007152206A JP2007152206A JP4836873B2 JP 4836873 B2 JP4836873 B2 JP 4836873B2 JP 2007152206 A JP2007152206 A JP 2007152206A JP 2007152206 A JP2007152206 A JP 2007152206A JP 4836873 B2 JP4836873 B2 JP 4836873B2
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- vibration isolation
- isolation system
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D19/00—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase
- G05D19/02—Control of mechanical oscillations, e.g. of amplitude, of frequency, of phase characterised by the use of electric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Vibration Prevention Devices (AREA)
- Buildings Adapted To Withstand Abnormal External Influences (AREA)
Description
本発明の好ましい実施形態および拡張については、個々の従属請求項に明記されている。
補償信号は、能動制御のための他の補償信号に追加されることが好ましい。
Claims (1)
- 絶縁すべき荷重に作用する少なくとも1つのアクチュエータと、前記少なくとも1つのアクチュエータに接続された少なくとも1つの制御デバイスとを備えた能動振動絶縁システムであって、
前記振動絶縁システムが配置されている地面の振動を検出するための少なくとも1つのセンサが提供され、
前記少なくとも1つのセンサを使用して、少なくとも1自由度で運動が検出され、
前記少なくとも1つのセンサが前記制御デバイスに接続され、
前記制御デバイスが、前記センサからの信号から少なくとも2自由度で補償信号を計算する手段を有し、
前記制御デバイスが、少なくとも6自由度で補償信号を計算する手段を有し、
3並進自由度で作用するセンサおよび/またはアクチュエータが提供され、
3回転自由度で作用するセンサおよび/またはアクチュエータが提供され、
前記制御デバイスが、変換行列を記憶するための少なくとも1つの記憶装置を有し、
前記制御デバイスが、刺激に対する前記絶縁すべき荷重の反応を表す特性および/または特性のファミリーを記憶するための少なくとも1つの記憶装置を有し、
前記振動絶縁システムが、前記絶縁すべき荷重の振動を検出するための少なくとも1つの別のセンサを有し、
前記補償信号を計算する手段が、前記3並進自由度で作用するセンサおよび前記3回転自由度で作用するセンサからの信号を使用して、前記変換行列に基づき、少なくとも6自由度で補償信号を計算し、
前記補償信号が能動制御のための他の補償信号に追加されることを特徴とする能動振動絶縁システム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06011993.0A EP1865220B1 (de) | 2006-06-10 | 2006-06-10 | Aktives Schwingungsisolationssystem mit verbesserter Wirkung gegen seismische Schwingungen |
EP06011993.0 | 2006-06-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008057768A JP2008057768A (ja) | 2008-03-13 |
JP4836873B2 true JP4836873B2 (ja) | 2011-12-14 |
Family
ID=37081541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007152206A Active JP4836873B2 (ja) | 2006-06-10 | 2007-06-08 | 地震性の振動に対してより有効な能動振動絶縁システム |
Country Status (3)
Country | Link |
---|---|
US (1) | US8281911B2 (ja) |
EP (1) | EP1865220B1 (ja) |
JP (1) | JP4836873B2 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8170225B2 (en) * | 2007-02-14 | 2012-05-01 | Integrated Dynamics Engineering Gmbh | Method for adapting a vibration isolation system |
EP2119938A1 (en) * | 2008-05-15 | 2009-11-18 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | A vibration sensor and a system to isolate vibrations. |
US8800736B2 (en) * | 2008-05-30 | 2014-08-12 | Design, Imaging & Control, Inc. | Adjustable tuned mass damper systems |
DE102009009562A1 (de) * | 2009-02-19 | 2010-09-09 | Integrated Dynamics Engineering Gmbh | Kombinierter Bewegungssensor zum Einsatz in Feedback-Regelsystemen zur Schwingungsisolation |
CN102162500B (zh) * | 2011-03-11 | 2012-05-23 | 华中科技大学 | 一种精密主动减振装置 |
KR102373075B1 (ko) | 2012-11-30 | 2022-03-11 | 가부시키가이샤 니콘 | 반송 시스템, 노광 장치, 반송 방법, 노광 방법 및 디바이스 제조방법, 및 흡인 장치 |
US9139972B2 (en) | 2012-12-17 | 2015-09-22 | University Of Houston | Periodic material-based seismic isolation system |
EP2759735B1 (de) * | 2013-01-29 | 2016-06-15 | Integrated Dynamics Engineering GmbH | Stationäres Schwingungsisolationssystem sowie Verfahren zur Regelung eines Schwingungsisolationssystems |
JP6198556B2 (ja) * | 2013-10-09 | 2017-09-20 | 倉敷化工株式会社 | アクティブ除振装置 |
US9689453B2 (en) * | 2014-02-06 | 2017-06-27 | Asm Technology Singapore Pte. Ltd. | Active vibration absorber |
WO2018085949A1 (en) * | 2016-11-14 | 2018-05-17 | Symroc Business And Project Management Ltd. | Vibration-analysis system and method therefor |
DE102019202709A1 (de) * | 2019-02-28 | 2020-09-03 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur Schwingungsisolierung einer Positioniereinrichtung |
DE102019218305B4 (de) * | 2019-11-26 | 2022-02-24 | Carl Zeiss Smt Gmbh | Verfahren zur Kompensation von Anregungen bei der Lagerung eines Bauelements einer Projektionsbelichtungsanlage |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2700728B2 (ja) | 1991-07-05 | 1998-01-21 | 特許機器株式会社 | 除振台のフィードフォワード制御方法 |
JPH0599271A (ja) * | 1991-10-01 | 1993-04-20 | Tokkyo Kiki Kk | 除振台のアクテイブ制御方法 |
JPH05263868A (ja) * | 1992-03-18 | 1993-10-12 | Tokkyo Kiki Kk | 除振台の地動外乱制御方法 |
US5899443A (en) * | 1996-10-22 | 1999-05-04 | The United States Of America As Represented By The Secretary Of The Navy | Passive-active vibration isolation |
JP3541586B2 (ja) * | 1996-10-24 | 2004-07-14 | 三菱電機株式会社 | 指向制御装置用振動制御機構 |
KR100522886B1 (ko) | 1997-07-22 | 2005-10-19 | 에이에스엠엘 네델란즈 비.브이. | 가스베어링을 구비한 지지장치 |
US6059274A (en) * | 1998-05-04 | 2000-05-09 | Gte Internetworking Incorporated | Vibration reduction system using impedance regulated active mounts and method for reducing vibration |
JP4272750B2 (ja) | 1998-06-23 | 2009-06-03 | キヤノン株式会社 | 露光装置及び除振装置、システム同定装置及びその方法 |
JP2002031187A (ja) * | 2000-07-13 | 2002-01-31 | Ebara Corp | 磁気浮上装置を用いた除振装置 |
JP2004100953A (ja) * | 2002-08-23 | 2004-04-02 | Nikon Corp | 制振装置及び露光装置 |
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2006
- 2006-06-10 EP EP06011993.0A patent/EP1865220B1/de active Active
-
2007
- 2007-06-05 US US11/758,413 patent/US8281911B2/en active Active
- 2007-06-08 JP JP2007152206A patent/JP4836873B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
EP1865220B1 (de) | 2014-03-19 |
EP1865220A1 (de) | 2007-12-12 |
US20070284794A1 (en) | 2007-12-13 |
JP2008057768A (ja) | 2008-03-13 |
US8281911B2 (en) | 2012-10-09 |
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