JP4835136B2 - Solid-state imaging device having a function for generating a focus detection signal, and an electronic camera - Google Patents

Description

  The present invention relates to a solid-state imaging device having both an image signal generation function and a focus detection signal generation function.

Conventionally, a pupil division phase difference method is known as one of focus detection techniques. This method forms a pair of divided images by dividing the luminous flux passing through the photographing lens into pupils. The defocus amount of the photographing lens is detected by detecting the pattern shift between the pair of divided images.
Patent Documents 1 and 2 are known as solid-state imaging devices to which the principle of the pupil division phase difference method is applied. Patent Documents 1 and 2 disclose a configuration in which a pupil detection is performed by arranging two photoelectric conversion areas under one microlens to generate a focus detection signal. Patent Document 3 discloses a configuration in which an optical element array is inserted into the front surface of a solid-state imaging device during focus detection to perform pupil division and generate a focus detection signal.
A solid-state imaging device in which microlenses are formed in multiple layers is disclosed in Patent Document 4.
JP 2002-314062 A JP 2003-244712 A JP 2004-191893 A JP-A-6-163866

In Patent Documents 1 and 2 described above, the received light beam is collected by one microlens, and pupil division is performed by simply dividing the light collection range by two photoelectric conversion areas. In this pupil division, it is necessary to arrange two photoelectric conversion areas within a narrow condensing range, and it becomes difficult to increase the light receiving efficiency of each photoelectric conversion area. Therefore, there are problems that the signal level of the focus detection signal is low and the focus detection accuracy is poor.
On the other hand, in Patent Document 3, in order to accurately perform pupil division, it is necessary to position the optical element array with the accuracy of the pixel interval, which is very difficult to realize. In addition, a mechanism for inserting and removing the optical element array in and out of the front surface of the solid-state imaging device is required, and the configuration of the electronic camera is complicated.

  Therefore, an object of the present invention is to provide a technique for generating a high-quality focus detection signal using a solid-state imaging device.

<< 1 >> A solid-state imaging device of the present invention is a solid-state imaging device in which microlenses are formed in a multilayer on an imaging surface, and includes a pupil-forming microlens, a pupil-dividing microlens, and a photoelectric conversion region.
The pupil forming microlens condenses the received light beam to form a real image of the exit pupil of the photographing lens that is a focus detection target.
The pupil-dividing microlens is disposed in the vicinity of the image plane of the real image of the exit pupil, and separates a part of the light beam passing through the pupil-forming microlens to obtain a pupil-divided light beam.
The photoelectric conversion area generates a focus detection signal by photoelectrically converting the pupil-divided light beam.
<< 2 >> Preferably, an imaging pixel that performs photoelectric conversion on a pixel basis to generate an image signal is further provided. These imaging pixels are pixels having the same structure as the pupil-dividing microlens and the photoelectric conversion area.
<< 3 >> Preferably, the pupil-dividing microlens occupies a section corresponding to a plurality of imaging pixels.
<< 4 >> Preferably, a plurality of pupil-dividing microlenses are arranged for one pupil-forming microlens so that the real image of the exit pupil is divided symmetrically with respect to the image center.
<< 5 >> Preferably, a color filter is provided for each photoelectric conversion region by repeating a predetermined minimum color arrangement. Then, one pupil forming microlens is formed for each area of the minimum color arrangement.
<< 6 >> Preferably, four pupil-dividing microlenses are arranged radially with respect to one pupil-forming microlens. In this case, the pupil division direction can be changed by a combination of four photoelectric conversion areas.
<< 7 >> Preferably, the pupil-dividing microlens is an inner lens formed inside the intermediate layer of the pupil-forming microlens / photoelectric conversion area.
<< 8 >> The electronic camera of the present invention includes a solid-state imaging device, a focus calculation unit, and an imaging control unit.
The solid-state imaging device is the solid-state imaging device according to any one of the above << 7 >> and << 7 >>.
The focus calculation unit reads a focus detection signal from the solid-state imaging device, detects a pattern shift of the pupil division image extracted from the focus detection signal, and performs focus detection.
The imaging control unit reads the photoelectric conversion output from the solid-state imaging device and obtains an image signal.

  In the present invention, a pupil forming microlens and a pupil dividing microlens are formed in a multilayer on the imaging surface. For this reason, the positional relationship between the two microlenses is stable, and accurate pupil division can always be realized. Therefore, it is possible to generate a high-quality focus detection signal.

<< First Embodiment >>
[Description of electronic camera configuration]
FIG. 1 is a block diagram showing an electronic camera 10 of the present embodiment.
In FIG. 1, a photographing lens 12 is attached to the electronic camera 10. The photographing lens 12 is driven by a lens control unit 12a for focus and diaphragm. In the image space of the photographic lens 12, the imaging surface of the solid-state imaging device 11 is arranged. The solid-state imaging device 11 is driven by the imaging control unit 14. Image data output from the solid-state imaging device 11 is processed via the signal processing unit 15 and the A / D conversion unit 16 and then temporarily stored in the memory 17.
This memory 17 is connected to a bus 18. The bus 18 is also connected with a lens control unit 12a, an imaging control unit 14, a microprocessor 19, a focus calculation unit 20, a recording unit 22, an image compression unit 24, an image processing unit 25, and the like.
The microprocessor 19 is connected to an operation unit 19a such as a release button. A recording medium 22a is detachably attached to the recording unit 22.

[Description of pixel layout]
FIG. 2 is a diagram illustrating a focus detection area (arrangement area of the focus detection pixels 37) of the solid-state imaging device 11. Such focus detection areas are provided at a plurality of locations on the imaging surface.
FIG. 3 is a diagram illustrating a cross-section of the imaging surface of the solid-state imaging device 11.
Hereinafter, the pixel configuration of the solid-state imaging device 11 will be described with reference to FIGS. 2 and 3. First, a group of imaging pixels 31 is arranged on the imaging surface of the solid-state imaging device 11. Each imaging pixel 31 is provided with a photoelectric conversion area 32 that photoelectrically converts a received light beam in units of pixels. Above the photoelectric conversion region 32, a microlens 33 that collects the received light flux on the photoelectric conversion region 32 is provided via a planarization layer 38.

The group of imaging pixels 31 generates an image signal by photoelectrically converting a subject image projected onto the imaging surface via the imaging lens 12 in units of pixels.
On the other hand, in the focus detection area, focus detection pixels 37 are arranged so as to sew between groups of imaging pixels 31. The focus detection pixel 37 includes a pupil forming microlens 36 having a size corresponding to a plurality of sections of the imaging pixel 31. The pupil forming microlens 36 is formed in an upper layer than the microlens 33 through the flattening layer 39.

  The pupil forming microlens 36 condenses the received light beam from the photographing lens 12 to form a real image of the exit pupil of the photographing lens 12 on the image space side. By this image formation, the pupil forming microlens 36 collects a light beam incident from one half of the exit pupil (solid line light beam shown in FIG. 3) on one side of the real image and enters a light beam incident from the other half of the exit pupil (shown in FIG. 3). Collect the dotted beam) on the other side of the real image.

  A pupil-dividing microlens 35 is disposed in the vicinity of the real image surface of the exit pupil. The pupil-dividing microlens 35 generates a pupil-divided light beam by separating and extracting a part of the light beam passing through the pupil-forming microlens 36 near the image plane of the real image by the lens opening. This pupil-divided light beam is photoelectrically converted in the photoelectric conversion area 34 and converted into a focus detection signal. Here, the vicinity of the image plane means an allowable range that does not interfere with the separation of the pupil-divided light beam.

The structure of the lower layer (pupil division microlens 35 and photoelectric conversion region 34) of the focus detection pixel 37 is the same as the structure of the plurality of imaging pixels 31 (microlens 33 and photoelectric conversion region 32).
With the configuration described above, the focus detection pixel 37 separates and receives light beams (pupil-divided light beams) that have passed through different positions of the exit pupil of the photographing lens 12 among the light beams that have passed through the pupil-forming microlens 36. Become.

For example, the photoelectric conversion areas 34 arranged in the horizontal direction on the imaging surface receive pupil-divided light beams obtained by dividing the exit pupil in the horizontal direction.
Further, for example, the photoelectric conversion areas 34 arranged in the vertical direction of the imaging surface receive a pupil-divided light beam obtained by dividing the exit pupil in the vertical direction.
Further, with respect to the photoelectric conversion areas 34 arranged in the oblique direction on the imaging surface, a pupil-divided light beam obtained by dividing the exit pupil in the oblique direction is received.
On the imaging surface, these focus detection pixels 37 are arranged at predetermined pitches so as to be aligned in the pupil division direction. In FIG. 2, the arrangement of the focus detection pixels 37 is staggered so that the pixels 37 are not simply aligned.

[Circuit explanation]
FIG. 4 is a diagram illustrating an equivalent circuit and a semiconductor pattern of the solid-state imaging device 11.
The solid-state imaging device 11 is roughly configured by a vertical transfer circuit 3, a horizontal transfer circuit 4, a correlated double sampling circuit 5, and pixels.
Hereinafter, the configuration of this pixel will be described. The pixel is provided with a floating diffusion FD. A reset drain 138 is disposed adjacent to the floating diffusion FD via the gate 134 of the reset transistor QR. A transfer gate 133 of the transfer transistor QT is disposed between the floating diffusion FD and the photoelectric conversion areas 32 and 34. Such a voltage of the floating diffusion FD is applied to the gate 135 of the amplifying element QA through the wiring. The source 139 of the amplifying element QA is connected to the vertical read line 2 by turning on the gate 136 of the row selection transistor QS.

[Read operation of focus detection signal]
Next, a read operation of the focus detection signal by the electronic camera 10 will be described.
The microprocessor 19 in the electronic camera 10 drives the imaging control unit 14 in synchronization with the half-pressing operation of the release button, and starts a focus detection signal reading operation.
FIG. 5 is a timing chart for explaining the read operation of the focus detection signal.
First, the vertical transfer circuit 3 raises the control signal φRS (n) and the control signal φTG (n) in the n-th row where the focus detection pixels 37 exist. As a result, unnecessary charges in the n-th photoelectric conversion areas 32 and 34 are discharged to the reset drain 138 via the transfer transistor QT, the floating diffusion FD, and the reset transistor QR.
Thereafter, the vertical transfer circuit 3 falls the control signal φTG (n) in the n-th row and changes the transfer transistor QT to non-conduction. From this time, the photoelectric conversion areas 32 and 34 in the nth row start to accumulate signal charges.

  In this state, the vertical transfer circuit 3 sets the control signal φL (n) to a high level during the period T1, and turns on the row selection transistor QS of the nth row. In synchronization with this, the vertical transfer circuit 3 maintains the conduction state of the reset transistor QR in the n-th row only for the period T2. By maintaining this conduction state, the floating diffusion FD in the n-th row is reset to the potential of the reset drain 138.

After the period T2, when the reset transistor QR changes to non-conduction, the floating diffusion FD returns to the floating state. The voltage at the moment of switching (reset voltage) is held in the floating diffusion FD. The reset voltage in the n-th row is output as a source follower to the vertical readout line 2 via the amplifying element QA.
As described above, the reset voltage of the nth row is output from the vertical read line 2 in units of columns. These reset voltages are held in the correlated double sampling circuit 5 (capacitor group in the circuit) in synchronization with the falling timing of the control signal φSH (at the end of the period T3).

  Next, the vertical transfer circuit 3 uses the control signal φTG (n) to make the transfer transistor QT in the n-th row conductive for the period T4. By this conduction, the signal charges accumulated in the photoelectric conversion areas 32 and 34 in the nth row are transferred to the floating diffusion FD. Along with this transfer operation, the voltage of the floating diffusion FD changes relative to the reset voltage by the amount of signal charge transferred. The signal voltage of the nth row is output as a source follower to the vertical readout line 2 via the amplifying element QA.

Thus, the n-th row signal voltage output in units of columns via the vertical readout line 2 is applied to the correlated double sampling circuit 5. The correlated double sampling circuit 5 outputs a true signal voltage corresponding to the difference between the signal voltage and the reset voltage.
In this state, the horizontal transfer circuit 4 sequentially reads the true signal voltage of the photoelectric conversion area 34 from Vout using the control signals φH3, φH4 and the like of the column in which the focus detection pixels 37 are present.
By repeating the above operation only for the focus detection pixel 37, it is possible to read the focus detection signal in a short time without reading all the pixels.
The focus detection signal read out in this way is digitized via the signal processing unit 15 and the A / D conversion unit 16 and then temporarily stored in the memory 17.

[Operation of the focus calculation unit 20]
The focus calculation unit 20 in the electronic camera 10 performs a focus detection calculation using the focus detection signal stored in the memory 17. Hereinafter, the optical principle of the focus detection and the calculation process will be described with reference to FIG.
First, a received light beam incident on one pupil forming microlens 36 is a light beam that has passed through the exit pupil of the photographing lens 12. This received light beam is condensed through the pupil forming microlens 36 and forms a real image of the exit pupil in the air. The pupil division microlenses 35 are arranged side by side so as to separate the real image of the exit pupil. With such an arrangement, the light beams partially passing through the exit pupil of the photographing lens 12 are incident on the individual pupil-dividing microlenses 35. Each of the pupil-dividing microlenses 35 emits this light beam as a pupil-divided light beam (A and B shown in FIG. 3). The pupil split light beams A and B thus separated reach the corresponding photoelectric conversion area 34 and are individually photoelectrically converted.

  By the way, the light beam emitted from one point (including the close point) of the focused subject passes through different positions of the exit pupil of the photographing lens 12, and then converges again to form a point image on the imaging surface. Therefore, when in a focused state, the set of photoelectric conversion areas 34 receives pupil-divided light beams emitted from the same point on the subject. Therefore, a set of pupil-divided images obtained by photoelectric conversion has substantially the same image pattern and exhibits substantially no phase difference.

On the other hand, the light beam emitted from the subject in the front pin state passes through different portions of the exit pupil of the photographing lens 12 and then reaches a pixel position that intersects and deviates in front of the imaging surface. In this case, the pair of pupil division images shows a phase difference shifted in the pupil division direction.
On the other hand, the light beam emitted from the object in the rear pin state passes through different portions of the exit pupil of the photographing lens 12 and then reaches the pixel position where the imaging surface is shifted with insufficient focusing. In this case, a set of pupil-divided images shows a phase difference shifted in the opposite direction to the front pin state.

  As described above, the phase difference of the pupil-divided image changes according to the focusing state of the photographic lens 12. Therefore, the focus calculation unit 20 distributes the focus detection signal in the memory 17 to obtain an image pattern of a set of pupil division images. The focus calculation unit 20 performs a pattern matching process on these image patterns to detect a phase difference (image shift). The focus calculation unit 20 detects the in-focus state and the defocus amount of the photographing lens 12 based on this phase difference.

[Image signal readout operation]
The defocus amount detected by the focus calculation unit 20 is transmitted to the lens control unit 12a. The lens control unit 12a drives the photographing lens 12 based on the transmitted defocus amount, and focuses the photographing lens 12 on the subject.
Thereafter, the microprocessor 19 in the electronic camera 10 starts an image signal reading operation using the imaging control unit 14 in synchronization with the full pressing operation of the release button.

This image signal readout operation is performed by sequentially repeating the readout procedure similar to the focus detection signal described above for each imaging pixel 31.
It should be noted that image signals are missing at the locations where the focus detection pixels 37 are arranged. This missing image signal can be interpolated using surrounding image signals. Further, the image signal of the missing portion may be generated based on the signal of the photoelectric conversion area 34 of the focus detection pixel 37.

[Effects of First Embodiment]
In the first embodiment, as shown in FIG. 3, the pupil forming microlens 36 and the pupil dividing microlens 35 are formed in a multilayer on the imaging surface. Therefore, the positional relationship between the microlenses 35 and 36 is not deviated, and accurate pupil division can always be realized.

  Furthermore, in this multilayer formation, the optical axis position of the pupil-dividing microlens 35 is shifted from the optical axis position of the pupil-forming microlens 36. Due to the shifting action of the lens, the exit directions of the pupil-divided light beams A and B are separated from each other as shown in FIG. In this case, the photoelectric conversion area 34 that receives the pupil-divided light beams A and B can be separated to a normal pixel interval. Therefore, the set and photoelectric conversion area 34 are not unnaturally approached, and the design and manufacture of the solid-state imaging device 11 are facilitated.

  Furthermore, in the photoelectric conversion areas 34 arranged in the row direction, the photoelectric conversion periods can be matched. Therefore, it is possible to perform pupil division without time difference, and the degree of coincidence of the pupil divided images is not impaired even for a moving subject. As a result, accurate and reliable focus detection is possible.

  The focus detection pixel 37 has the same structure as the imaging pixel 31 except that the focus detection pixel 37 has a pupil forming microlens 36. Therefore, the lower layer portion of the focus detection pixel 37 can be manufactured in the same manner as the imaging pixel 31.

  In other words, it is possible to freely change the arrangement of the focus detection areas simply by changing the arrangement pattern of the pupil forming microlenses 36.

  The plurality of focus detection pixels 37 are staggered on the imaging surface along the pupil division direction. In this staggered arrangement, the imaging pixels 31 always exist on the top, bottom, left, and right of the individual focus detection pixels 37. For this reason, it is possible to interpolate an image signal lost by the focus detection pixel 37 with high quality using the surrounding imaging pixels 31.

Furthermore, in the electronic camera 10 according to the first embodiment, a mechanism for inserting and removing the optical element array is unnecessary as compared with Patent Document 3. As a result, the configuration of the electronic camera 10 can be simplified.
Next, another embodiment will be described.

<< Second Embodiment >>
FIG. 6 is a diagram illustrating a focus detection area (arrangement area of the focus detection pixels 37a) of the solid-state imaging device 11a. FIG. 7 is a diagram illustrating a semiconductor pattern of the solid-state imaging device 11a.
The configuration of the electronic camera, the signal reading procedure, and the like are the same as those in the first embodiment, and a description thereof is omitted here.

A feature of the second embodiment is that the focus detection pixel 37a is enlarged in a direction orthogonal to the pupil division direction.
As the size is increased, one section of the photoelectric conversion area 34a occupies the (2 × 1) section of the imaging pixel 31 as shown in FIG. The pupil-dividing microlens 35a has an elliptical size so as to cover the photoelectric conversion area 34a. Further, the pupil forming microlens 36a has an isotropic shape with an enlarged size so as to cover two pupil dividing microlenses 35a.

[Effects of Second Embodiment, etc.]
The pupil division microlens 35a expands in a direction orthogonal to the pupil division direction. Therefore, the light receiving efficiency of the photoelectric conversion area 34a can be further increased without degrading the pupil division performance. Therefore, the signal output level of the photoelectric conversion area 34a becomes high, and accurate focus detection is possible even in a low illuminance environment.

Further, the pupil forming microlens 36a has an isotropic shape. This facilitates the design and manufacture of the pupil forming microlens 36a.
In the second embodiment, the size of the focus detection pixel 37 a is made to match the size of a plurality of the imaging pixels 31. Therefore, even if the focus detection pixels 37a are arranged between the groups of the imaging pixels 31, no useless gap is generated, and the loss of received light amount is small.

  Further, in the photoelectric conversion areas 34a arranged in the row direction, the photoelectric conversion periods can be made to coincide with each other even though the size is increased in the column direction. Therefore, it is possible to perform pupil division without time difference, and the degree of coincidence of the pupil divided images is not impaired even for a moving subject. As a result, accurate and reliable focus detection is possible.

The plurality of focus detection pixels 37a are staggered on the imaging surface along the pupil division direction. In this staggered arrangement, the imaging pixels 31 always exist on the upper, lower, left, and right sides of the individual focus detection pixels 37a. For this reason, it is possible to interpolate an image signal lost by the focus detection pixel 37 a with high quality using the surrounding imaging pixels 31.
Next, another embodiment will be described.

<< Third Embodiment >>
FIG. 8 is a cross-sectional view of the solid-state imaging device 11b.
The feature of the third embodiment is that the pupil-dividing microlens 35 b is an inner lens in the intermediate layer between the pupil-forming microlens 36 b and the photoelectric conversion area 34. Since other configurations are the same as those of the first embodiment and the second embodiment, description thereof is omitted here.

  The pupil-dividing microlens 35b is formed by making the refractive indexes of the lens forming layer 38b and the planarizing layer 39b constituting the intermediate layer different. Note that, when the intermediate layer has a three-layer structure, as shown in the lower part of FIG. 8, the pupil-dividing microlens 35b can be formed as a double inner lens. The inner lens may be realized in the form of a diffraction grating lens.

[Effects of Third Embodiment]
Also in the third embodiment, it is possible to perform pupil division with a multilayer structure. Therefore, the same effect as the first embodiment and the second embodiment can be obtained.

  Furthermore, in the third embodiment, since the pupil-dividing microlens 35b is an inner lens, the structure of the imaging surface of the solid-state imaging device 11b can be simplified. As a result, it is possible to reduce the number of processes when manufacturing the element. In addition, it is possible to reduce the thickness of two microlenses, and it is possible to reduce adverse effects such as light incident on the imaging pixel 31b being scattered by the microlens of the focus detection pixel 37b.

In the third embodiment, two layers of microlenses 33b and 33c are also arranged for the imaging pixel 31b. As a result, the light receiving efficiency of the imaging pixel 31b can be increased at the same time by the two-layer microlens.
Next, another embodiment will be described.

<< 4th Embodiment >>
FIG. 9 is a diagram illustrating the solid-state imaging device 11c. The configuration of the electronic camera, the signal reading procedure, and the like are the same as those in the first embodiment, and a description thereof is omitted here.

  A feature of the fourth embodiment is that four pupil-dividing microlenses 35c are arranged radially (here, two vertical pixels × two horizontal pixels) with respect to one pupil forming microlens 36c. The center point of this radiation arrangement is preferably the lens center of the pupil forming microlens 36c or the image center of the real image of the exit pupil. That is, it is preferable that the four-pixel pupil-dividing microlens 35c and the photoelectric conversion area 34c are arranged at point-symmetrical positions with respect to the lens center of the pupil-forming microlens 36c.

On the other hand, the photoelectric conversion area 34c is provided for each of the pupil division microlenses 35c, and photoelectrically converts the pupil division light beams divided into four by the pupil division microlenses 35c.
Further, a Bayer array color filter 40c is provided for each photoelectric conversion region 34c on the imaging surface of the solid-state imaging device 11c. One pupil forming microlens 36c is formed for each minimum color array (R, Gr, Gb, B) of the Bayer array.
The pupil-dividing microlens 35c may be an inner lens formed in an intermediate layer between the pupil-forming microlens 36c and the photoelectric conversion area 34c.

[Focus Detection in Fourth Embodiment]
The electronic camera 10 reads out the photoelectric conversion output of the photoelectric conversion area 34c only in the focus detection area set in advance and obtains a focus detection signal.
The focus calculation unit 20 separates and extracts the photoelectric conversion output at the Gr position and the photoelectric conversion output at the Gb position from the focus detection signal, thereby obtaining a G-color divided image pattern that is pupil-divided in an oblique direction. it can.
The focus calculation unit 20 can detect the focus by shifting the G-color divided image pattern in an oblique direction and detecting a phase difference.

  In addition, the focus calculation unit 20 may add photoelectric conversion outputs radially divided into four to two vertical pixels and two horizontal pixels, respectively. By this processing, it is possible to simultaneously obtain a divided image pattern obtained by dividing the pupil in the vertical direction and a divided image pattern obtained by dividing the pupil in the horizontal direction.

  The focus calculation unit 20 detects the phase difference of the luminance distribution while shifting the divided image pattern obtained by dividing the pupil in the vertical direction in the vertical direction, thereby enabling accurate focus detection for a subject having a horizontal edge as a main pattern. . On the other hand, by detecting the phase difference of the luminance distribution while shifting the divided image pattern obtained by dividing the pupil in the horizontal direction in the horizontal direction, it is possible to accurately detect the focus on the subject whose main image is the vertical edge.

  It is also possible to select the one with higher reliability from the two focus detection results by comparing the vertical and horizontal phase difference detection errors (image matching errors).

[Reading Image Signal According to Fourth Embodiment]
The electronic camera 10 performs automatic focus adjustment based on the obtained focus detection result.
Thereafter, the microprocessor 19 in the electronic camera 10 starts an image signal reading operation in synchronization with the full pressing operation of the release button.
This image signal readout operation is performed by sequentially reading out the photoelectric conversion output of the photoelectric conversion region 34c for the entire effective pixel region.

[Effects of Fourth Embodiment, etc.]
In the fourth embodiment, one pupil forming microlens 36c is arranged for each minimum color arrangement. With this configuration, the pupil forming microlens 36c can perform the same function as an optical low-pass filter for preventing moire. Therefore, it is possible to omit the optical low-pass filter from the solid-state imaging device 11c. In addition, the optical low-pass filter can be thinned by reducing the blurring amount of the optical low-pass filter by the optical action of the pupil forming microlens 36c.

  Further, in the fourth embodiment, it is possible to change the pupil division direction instantly by adding four photoelectric conversion areas 34c arranged radially in the vertical and horizontal directions.

<< Additional items of embodiment >>
In the embodiment described above, the entrance surface side of the pupil forming microlens is formed in a convex shape. However, the embodiment is not limited to this. For example, the exit surface side of the pupil forming microlens may be convex, and the entrance surface side may be flattened or close to flat. With this shape, oblique incident light on adjacent pixels is less likely to be blocked by the pupil forming microlens, and the light receiving efficiency of the solid-state imaging device can be increased.

  In the first to third embodiments described above, a color filter may be arranged in the imaging pixel. In this case, it is preferable to increase the light receiving efficiency of the focus detection pixel by omitting the color filter for the focus detection pixel.

  In the first to third embodiments described above, focus detection pixels are arranged only in a predetermined focus detection area. However, the embodiment is not limited to this. For example, focus detection pixels may be arranged at a predetermined pitch over the entire imaging surface. With this configuration, a desired region can be flexibly selected, and a focus detection signal can be read from the region.

  In the first to third embodiments described above, two photoelectric conversion areas are provided in the section of the focus detection pixel. However, the embodiment is not limited to this. A plurality (three or more) of photoelectric conversion areas may be radially arranged in the focus detection pixel section. By separating these photoelectric conversion areas symmetrically with a center line having an appropriate inclination and combining them, the pupil division direction of the focus detection pixels can be changed in various ways. Conversely, one photoelectric conversion area may be provided in the focus detection pixel section. In this case, it is possible to generate a focus detection signal by performing pupil division by using adjacent focus detection pixels as a set.

  In the fourth embodiment described above, focus detection pixels are arranged over the entire imaging surface. However, the embodiment is not limited to this. Focus detection pixels may be arranged at intervals of a plurality of N pixels (N = 2, 4, 6,...), And pixels dedicated to imaging may be arranged at other pixel positions. Alternatively, focus detection pixels may be arranged in a checkered pattern, and pixels dedicated to imaging may be arranged at other pixel positions.

  In the above-described fourth embodiment, the case of the primary color Bayer arrangement has been described. However, the fourth embodiment is not limited to this. A minimum color arrangement may be determined according to an arbitrary color arrangement, and a pupil forming microlens may be arranged for each area of the minimum color arrangement.

  Further, in the above-described embodiment, the case of an XY address type (CMOS type, etc.) solid-state imaging device has been described. However, the embodiment is not limited to this. The present invention may be applied to a CCD type solid-state imaging device or the like.

  As described above, the present invention is a technique that can be used for a solid-state imaging device having a function of generating a focus detection signal.

1 is a block diagram showing an electronic camera 10. FIG. 3 is a diagram illustrating a focus detection area of the solid-state imaging device 11. FIG. 3 is a cross-sectional view of an imaging surface of the solid-state imaging device 11. FIG. It is a figure which shows the equivalent circuit and semiconductor pattern of the solid-state imaging device. 6 is a timing chart for explaining a focus detection signal read operation. It is a figure which shows the focus detection area of the solid-state imaging device 11a. It is a figure which shows the semiconductor pattern of the solid-state imaging device 11a. It is sectional drawing of the imaging surface of the solid-state imaging device 11b. It is a figure which shows the solid-state imaging device 11c.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Electronic camera, 11 ... Solid-state imaging device, 11a ... Solid-state imaging device, 11b ... Solid-state imaging device, 11c ... Solid-state imaging device, 12 ... Imaging lens, 12a ... Lens control part, 13 ... Solid-state imaging device, 14 ... Imaging control 15, signal processing unit, 16, A / D conversion unit, 17, memory, 18, bus, 19, microprocessor, 19 a, operation unit, 20, focus calculation unit, 22, recording unit, 22 a, recording medium, 24 ... Image compression unit, 25 ... Image processing unit, 31 ... Imaging pixel, 31b ... Imaging pixel, 32 ... Photoelectric conversion area, 33 ... Micro lens, 34 ... Photoelectric conversion area, 34a ... Photoelectric conversion area, 34c ... Photoelectric Conversion region, 35... Pupil division microlens, 35a. Pupil division microlens, 35b. Pupil division microlens, 35c. Pupil division microlens, 36. Pupil formation microlens. 6a ... pupil forming microlens, 36b ... pupil forming microlens, 36c ... pupil forming microlens, 37 ... focus detection pixel, 37a ... focus detection pixel, 38 ... flattening layer, 38b ... lens forming layer, 39 ... flattened layer, 39b ... flattened layer, 40c ... color filter

Claims (8)

A solid-state imaging device in which microlenses are formed in a multilayer on the imaging surface,
A pupil-forming microlens that collects the received light flux and forms a real image of the exit pupil of the photographing lens that is the focus detection target;
A pupil-dividing microlens that is arranged near the image plane of the real image of the exit pupil and separates a part of the light beam passing through the pupil-forming microlens to form a pupil-divided beam;
A solid-state imaging device comprising: a photoelectric conversion area that photoelectrically converts the pupil-divided light beam to generate a focus detection signal. The solid-state imaging device according to claim 1,
It further includes an imaging pixel that performs photoelectric conversion on a pixel basis to generate an image signal,
The imaging pixel has the same structure as the pupil-dividing microlens and the photoelectric conversion area. The solid-state imaging device according to claim 1,
It further includes an imaging pixel that performs photoelectric conversion on a pixel basis to generate an image signal,
The pupil-dividing microlens occupies a section corresponding to a plurality of the imaging pixels. The solid-state imaging device according to claim 1,
A solid-state imaging device, wherein a plurality of pupil-dividing microlenses are arranged for one pupil-forming microlens so as to symmetrically divide the real image of the exit pupil. The solid-state imaging device according to claim 4,
With a repetition of a predetermined minimum color arrangement, a color filter is provided for each photoelectric conversion area,
One solid-state imaging device, wherein one pupil forming microlens is formed for each area of the minimum color arrangement. In the solid-state imaging device according to claim 4 or 5,
Four pupil division microlenses are arranged radially with respect to one pupil forming microlens,
A solid-state imaging device characterized in that a pupil division direction can be changed by a combination of the four photoelectric conversion areas. The solid-state imaging device according to claim 1,
The pupil division microlens is an inner lens formed inside the pupil formation microlens / intermediate layer of the photoelectric conversion region. A solid-state imaging device according to any one of claims 1 to 7,
A focus calculation unit that reads out the focus detection signal from the solid-state imaging device, detects a pattern shift of a pupil-divided image extracted from the focus detection signal, and performs focus detection;
An electronic camera comprising: an imaging control unit that reads out photoelectric conversion output from the solid-state imaging device and obtains an image signal.

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