JP4828030B2 - 高温計測用半導体式圧力センサ - Google Patents
高温計測用半導体式圧力センサ Download PDFInfo
- Publication number
- JP4828030B2 JP4828030B2 JP2001051893A JP2001051893A JP4828030B2 JP 4828030 B2 JP4828030 B2 JP 4828030B2 JP 2001051893 A JP2001051893 A JP 2001051893A JP 2001051893 A JP2001051893 A JP 2001051893A JP 4828030 B2 JP4828030 B2 JP 4828030B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- sapphire layer
- temperature measurement
- crystalline sapphire
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009529 body temperature measurement Methods 0.000 title claims description 32
- 239000004065 semiconductor Substances 0.000 title claims description 32
- 229910052594 sapphire Inorganic materials 0.000 claims description 47
- 239000010980 sapphire Substances 0.000 claims description 47
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 15
- 238000005304 joining Methods 0.000 claims description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 238000010030 laminating Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 description 17
- 239000013043 chemical agent Substances 0.000 description 14
- 239000012530 fluid Substances 0.000 description 14
- 239000007788 liquid Substances 0.000 description 11
- 238000001514 detection method Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 230000002378 acidificating effect Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001051893A JP4828030B2 (ja) | 2001-02-27 | 2001-02-27 | 高温計測用半導体式圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001051893A JP4828030B2 (ja) | 2001-02-27 | 2001-02-27 | 高温計測用半導体式圧力センサ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002257659A JP2002257659A (ja) | 2002-09-11 |
| JP2002257659A5 JP2002257659A5 (https=) | 2009-01-08 |
| JP4828030B2 true JP4828030B2 (ja) | 2011-11-30 |
Family
ID=18912608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001051893A Expired - Lifetime JP4828030B2 (ja) | 2001-02-27 | 2001-02-27 | 高温計測用半導体式圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4828030B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015111649A (ja) * | 2013-10-30 | 2015-06-18 | 京セラ株式会社 | 金属体付きサファイア構造体、金属体付きサファイア構造体の製造方法、電子機器、および外装体 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5039951B1 (https=) * | 1969-11-15 | 1975-12-20 | ||
| JPS633234A (ja) * | 1986-06-24 | 1988-01-08 | Nippon Soken Inc | 圧力検出器 |
| JPS6391531A (ja) * | 1986-10-06 | 1988-04-22 | Yamatake Honeywell Co Ltd | ダイアフラム固定構造 |
| EP0516579B1 (de) * | 1991-05-26 | 1994-06-22 | Endress + Hauser Gmbh + Co. | Durchkontaktierung eines Isolierstoffteils |
| EP0723143B1 (de) * | 1995-01-12 | 1998-05-13 | Endress + Hauser Gmbh + Co. | Keramischer Drucksensor mit Behälteranschlusselement und Doppeldichtung |
| DE59914223D1 (de) * | 1999-07-01 | 2007-04-12 | Endress & Hauser Gmbh & Co Kg | Relativdrucksensor |
-
2001
- 2001-02-27 JP JP2001051893A patent/JP4828030B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002257659A (ja) | 2002-09-11 |
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