JP4814973B2 - Ultrasonic cleaning equipment - Google Patents

Description

  In the present invention, the cleaning liquid is jetted in the form of a shower with ultrasonic waves to ultrasonically clean the object to be cleaned, or the object to be cleaned immersed in the cleaning liquid is cleaned by irradiating with ultrasonic waves through the transmission liquid The present invention relates to an ultrasonic cleaning apparatus.

2. Description of the Related Art Conventionally, for cleaning liquid crystal panels, semiconductor wafers, and the like, an ultrasonic cleaning apparatus that jets cleaning liquid together with ultrasonic waves in a shower shape and ultrasonically cleans these objects to be cleaned is known. As an example, there is an apparatus as shown in Patent Document 1.
This apparatus is provided with a case where the interior is first filled with the cleaning liquid supplied from the cleaning liquid supply port, the cleaning liquid filling the inside is ejected from the cleaning liquid ejection port, and the remainder is discharged from the overflow discharge port.
In addition, the surface of the case facing the cleaning liquid jet outlet is provided with an ultrasonic vibrator for sending ultrasonic waves into the case toward the cleaning liquid jet outlet, and facing the cleaning liquid supply port, A rectifying plate is arranged between the sound wave vibrators.

  Since the ultrasonic cleaning apparatus described in Patent Document 1 needs to store the cleaning liquid in the case, the entire apparatus becomes large, and the cleaning liquid jet nozzle is not a nozzle type. There was a point that it could not be cleaned effectively.

  Accordingly, a spot shower type ultrasonic cleaning apparatus as shown in Patent Document 2 has been proposed. This apparatus includes a nozzle device that faces an ultrasonic transducer and opens a discharge port at a position facing the transducer, and irradiates the flowing water introduced into the nozzle device with ultrasonic waves. The nozzle chamber is configured to discharge the sonic flowing water toward the object to be cleaned, and the nozzle device is surrounded by a tapered wall surface so as to converge the ultrasonic flowing water toward the discharge port, and the outer periphery of the nozzle chamber A flow channel that is formed so as to surround the nozzle chamber and that communicates with the nozzle chamber substantially uniformly over the entire circumference is provided at the end of the nozzle chamber on the ultrasonic transducer side.

  The ultrasonic cleaning apparatus as described above is radiated from an ultrasonic transducer as described in the section “Prior Art” of Patent Document 3 and as shown in the section “Problems to be Solved by the Invention”. Since the ultrasonic wave converges so as to focus at a predetermined position in front of the nozzle, it is possible to perform cleaning efficiently by placing an object to be cleaned at that position, but precisely adjusting the position, that is, the distance from the nozzle tip This is necessary and the work becomes complicated, and if the adjustment is not made precisely, the cleaning effect will vary.

In order to solve this problem, Patent Document 3 discloses an ultrasonic shower cleaning apparatus having the following configuration.
As shown in FIG. 19, the apparatus 100 includes a nozzle 102 attached to a front end portion of a casing 101, and a disk-shaped ultrasonic transducer 103 disposed to face the rear end portion of the nozzle 102. A cleaning liquid supply port 104 formed on a side surface of the casing, and the cleaning liquid supplied from the supply port and the ultrasonic wave radiated from the ultrasonic vibrator are ejected from the tip of the nozzle to forward the nozzle. An ultrasonic shower cleaning apparatus for cleaning an object 110 to be cleaned, wherein the discharge hole 102a of the nozzle 102 is formed in a linear round hole having a constant diameter, and the rear end surface 102b of the nozzle is formed. It is configured in a conical shape descending from the outer edge toward the discharge hole 102a at a predetermined inclination angle.

  According to this ultrasonic shower cleaning apparatus, since the ultrasonic wave radiated from the nozzle does not form a focal point, there is no need to strictly adjust the distance from the object to be cleaned to the nozzle tip, and work efficiency can be improved. . In addition, the cleaning liquid supplied from the supply port is rectified and ejected from the nozzle as a uniform water flow, and the ultrasonic waves are repeatedly reflected on the ultrasonic transducer surface and the rear end surface of the nozzle to increase the intensity and radiate. As a result, an excellent cleaning effect can be obtained.

Japanese Patent Laid-Open No. 06-046161 (see Claims, FIG. 2) Japanese Patent Laid-Open No. 08-229526 (see Claims, FIG. 2) Japanese Patent No. 3256198

  By the way, in the case of the conventional ultrasonic shower cleaning apparatus shown in Patent Document 3, it is necessary to shorten the distance t between the nozzle and the object to be cleaned and to set the position of the nozzle in the vicinity of the object to be cleaned. There was a problem that it was not so good. Further, since the space for installing this cleaning device is limited, it is difficult to install a plurality of devices together. Furthermore, since this ultrasonic shower cleaning device is a spot type, the ultrasonic irradiation area is one point, and in order to clean the entire surface of the object to be cleaned, a device that oscillates the nozzle is required, and the device is complicated. There was also a problem of becoming.

  It is an object of the present invention to provide not only a single ultrasonic irradiation area but also a linear shape (line shape), and it is possible to arrange a plurality of devices side by side, and it is not necessary to oscillate the nozzle. To provide cleaning equipment.

  In order to solve the above problems, an ultrasonic cleaning apparatus according to an aspect of the present invention includes a housing and a straight circular hole attached to a distal end portion of the housing and having a constant discharge hole diameter, and A nozzle formed in a conical shape with a rear end surface descending from the outer edge toward the discharge hole at a predetermined inclination angle, and a disk-shaped ultrasonic vibration disposed opposite the rear end portion of the nozzle In an ultrasonic cleaning apparatus including a child and a cleaning liquid supply port formed on a side surface of the casing, the cleaning liquid and ultrasonic waves ejected from the discharge hole are transmitted in a continuous manner to the discharge hole of the nozzle. For this purpose, an ultrasonic transmission tube is arranged.

  In this case, the tip of the ultrasonic transmission tube is opened to eject and irradiate the cleaning liquid and ultrasonic waves radiated from the ultrasonic vibrator to the object to be cleaned, or the ultrasonic transmission tube The tip of the nozzle may be closed, and the side surface may be provided with an ejection hole for ejecting and irradiating the object to be cleaned with the cleaning liquid and the ultrasonic wave emitted from the ultrasonic transducer.

  An ultrasonic cleaning apparatus according to an aspect of the present invention includes a housing, a straight circular hole attached to the front end portion of the housing and having a constant diameter of the discharge hole, and a rear end surface from an outer edge thereof. A nozzle formed in a conical shape descending at a predetermined inclination angle toward the discharge hole, a disk-shaped ultrasonic transducer disposed facing the rear end of the nozzle, and a side surface of the housing An ultrasonic cleaning apparatus having a transmission liquid supply port and a discharge port formed on the nozzle, connected to the discharge hole of the nozzle, and holding the transmission liquid supplied from the discharge hole and ultrasonic vibration An ultrasonic transmission tube is arranged to transmit and irradiate ultrasonic waves from the child to the object to be cleaned.

  In this case, the side surface of the ultrasonic transmission tube is formed with a thickness that does not transmit ultrasonic waves, and the distal end surface is formed with a thickness that transmits ultrasonic waves, or the distal end surface of the ultrasonic transmission tube is It may be formed to a thickness that does not transmit ultrasonic waves, and a part of the side surface may be formed to a thickness that transmits ultrasonic waves.

An ultrasonic cleaning apparatus according to an aspect of the present invention includes a housing, a straight circular hole attached to the front end portion of the housing and having a constant diameter of the discharge hole, and a rear end surface from an outer edge thereof. A nozzle formed in a conical shape descending at a predetermined inclination angle toward the discharge hole, a disk-shaped ultrasonic transducer disposed facing the rear end of the nozzle, and a side surface of the housing A first ultrasonic cleaning device comprising a transmission liquid supply port formed on
A case and a straight circular hole attached to the front end of the case and having a constant discharge hole diameter are formed, and the rear end surface descends from the outer edge toward the discharge hole at a predetermined inclination angle. A nozzle having a conical nozzle, a disk-shaped ultrasonic transducer disposed facing the rear end of the nozzle, and a transmission liquid discharge port formed on a side surface of the housing. 2 ultrasonic cleaning devices;
The transfer liquid supplied from the transfer liquid supply pipe is held between the discharge hole of the nozzle of the first ultrasonic cleaning device and the discharge hole of the nozzle of the second ultrasonic cleaning device. In order to transmit and irradiate ultrasonic waves from the ultrasonic vibrator to the object to be cleaned, the ultrasonic waves are communicated by an ultrasonic transmission tube.

  In this case, a part of the side surface of the central portion of the ultrasonic transmission tube may be formed to a thickness that allows ultrasonic waves to pass therethrough.

  In the ultrasonic cleaning apparatus according to one aspect of the present invention, the ultrasonic transmission tube may be made of a flexible material.

Furthermore, in the ultrasonic cleaning apparatus according to one embodiment of the present invention, it is preferable that the ultrasonic transmission tube is formed of high-purity quartz, high-purity SiC, high-purity Al ₂ O ₃ or a stainless material. When the ultrasonic transmission tube is made of a high-purity quartz tube, it is desirable to cover the outside with a metal material such as stainless steel.

According to the ultrasonic cleaning apparatus according to one aspect of the present invention, since the ultrasonic transmission tube can be manufactured with an arbitrary length, the distance between the casing of the ultrasonic cleaning device and the object to be cleaned is the ultrasonic transmission tube. It can be extended by the length of, and a large work space can be secured.
In addition, when the tip of the ultrasonic transmission tube is closed, and a jet hole is provided on the side surface to jet and irradiate the cleaning liquid and the ultrasonic wave emitted from the ultrasonic vibrator to the object to be cleaned, the conventional spot Since the object to be cleaned can be cleaned linearly (in a line) rather than in the shower form, if an ejection hole is provided for the width of the object to be cleaned, a device that swings the nozzle part of the ultrasonic cleaning device becomes unnecessary. The entire apparatus can be simplified.

According to the ultrasonic cleaning apparatus according to one aspect of the present invention, when cleaning an object to be cleaned while being immersed in a cleaning liquid, an ultrasonic transmission tube filled with the transmission liquid is immersed in the cleaning liquid, When ultrasonic waves are radiated from the ultrasonic transducer, the ultrasonic waves irradiate the object to be cleaned in the cleaning liquid from the tip surface or side surface of the ultrasonic transmission tube via the transmission liquid. In this case, since the cleaning liquid is not ejected through the ultrasonic transmission tube, the amount of the cleaning liquid can be reduced depending on the type of the object to be cleaned.
Further, since the ultrasonic transmission / non-transmission range of the side surface of the ultrasonic transmission tube can be freely formed, the ultrasonic irradiation region can be formed in accordance with the shape of the object to be cleaned.
Furthermore, since only the outside of the ultrasonic transmission tube is in contact with the cleaning liquid and the nozzle and internal parts of the ultrasonic cleaning apparatus are not in contact with the cleaning liquid, there is no need to worry about contamination from within the ultrasonic cleaning apparatus, and ultrasonic transmission If only the tube is kept clean, a clean cleaning effect can be easily obtained.

  In the case of the ultrasonic cleaning apparatus according to one embodiment of the present invention, the nozzles of a plurality of ultrasonic cleaning apparatuses can be simultaneously connected to the ultrasonic transmission tube, and the intensity of ultrasonic irradiation can be increased. In addition, since it is not necessary to secure a space on the object to be cleaned, a large work space can be obtained and work efficiency can be improved.

Further, when the ultrasonic transmission tube is made of a flexible material as in the ultrasonic cleaning apparatus according to one aspect of the present invention, it can be manufactured in an arbitrary bent shape, and thus the degree of freedom in installation layout can be increased. .
Furthermore, when the ultrasonic transmission tube is made of a material such as the ultrasonic cleaning apparatus according to one embodiment of the present invention, durability can be improved. When high purity quartz is used as the ultrasonic transmission tube, cracking of the quartz tube can be prevented by covering the outside with a metal material such as stainless steel.

It is a longitudinal section of an embodiment of an ultrasonic cleaning device concerning the present invention. It is explanatory drawing at the time of bending and using the ultrasonic transmission tube of the ultrasonic cleaning apparatus shown in FIG. It is a figure when the radiation | emission of the washing | cleaning liquid from an ultrasonic transmission pipe is made from the diagonal direction with respect to the to-be-cleaned object. It is a figure which shows the state which connected the some ultrasonic cleaning apparatus. It is explanatory drawing at the time of comprising an ultrasonic transmission tube with a flexible material, (a) is a figure explaining the bending state of a front-end | tip part, (b) is a figure corresponding to the washing | cleaning of the to-be-cleaned object of a complicated shape. . In this figure, the shape of the ultrasonic transmission tube is changed, and the cleaning liquid is ejected from the side surface. It is a figure which shows the various shapes of an ultrasonic transmission tube. It is a figure which shows the state which couple | bonded multiple units | sets by application of the ultrasonic cleaning apparatus shown in FIG. FIG. 5 is a view of the ultrasonic transmission tube forked so that the front and back surfaces of the object to be cleaned can be cleaned simultaneously. It is a figure at the time of making an ultrasonic transmission pipe into a closed loop shape. It is a figure which shows the case where it communicates with an ultrasonic transmission pipe | tube between two ultrasonic cleaning apparatuses, and it wash | cleans a to-be-cleaned object in cooperation with two ultrasonic cleaning apparatuses. Similarly, it is a figure which shows the case where two ultrasonic cleaning apparatuses are connected with an ultrasonic transmission tube so that cleaning can be performed in a wide range at once. It is sectional drawing of the position which opposes the to-be-cleaned object of an ultrasonic transmission pipe, and is a figure by which the several ultrasonic transmission pipe is arranged in parallel. It is a figure which shows other embodiment of the ultrasonic cleaning apparatus which concerns on this invention, (a) is a schematic whole figure, (b) is a figure which shows the example whose front-end | tip part of an ultrasonic transmission pipe is planar shape, (c). FIG. 4 is a diagram showing an example of a shape with a rounded tip. It is a figure of the ultrasonic cleaning apparatus provided with the mechanism which circulates the transmission liquid in an ultrasonic transmission pipe. It is a figure which shows the example which made the thickness which permeate | transmits an ultrasonic wave in the lower surface of the front-end | tip part vicinity of an ultrasonic transmission tube, (a) is a general view, (b) is an enlarged view of the front-end | tip part vicinity of an ultrasonic transmission tube. It is a figure in the case of using two ultrasonic cleaning apparatuses as an ultrasonic cleaning apparatus by communicating with an ultrasonic transmission pipe. It is sectional drawing of the ultrasonic transmission pipe | tube of the position facing a to-be-cleaned object, (a) is what was comprised by integral molding, (b) is what arranged multiple pieces in parallel. It is sectional drawing of the conventional ultrasonic cleaning apparatus.

Hereinafter, embodiments of an ultrasonic cleaning apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of an embodiment of an ultrasonic cleaning apparatus according to the present invention.
As shown in the figure, the ultrasonic cleaning apparatus 10 according to this embodiment has a substantially cylindrical case (housing) 11, and a nozzle 12 is attached to the tip of the case 11. . Further, a disk-shaped ultrasonic transducer 13 is disposed in the case 11 so as to face the rear end portion 12 b of the nozzle 12. The ultrasonic vibrator 13 has a disc-like diaphragm 13a by an integrated configuration, and the surface of the diaphragm 13a is opposed to the rear end portion 12b of the nozzle 12 as a vibration surface of the ultrasonic vibrator 13. Yes. A supply port 14 for supplying a cleaning liquid is formed on the side surface of the case 11. Reference numeral 15 denotes a bolt hole for bolting to other equipment when the ultrasonic cleaning apparatus 10 is used.

  The rear end portion 12b of the nozzle 12 is formed as a circular surface so as to face the diaphragm 13a of the ultrasonic transducer 13, and a discharge hole 12a having a linear round hole is provided at the center thereof. ing. The rear end 12b surface of the nozzle 12 is formed in a conical shape descending from the outer edge toward the discharge hole 12a at a predetermined inclination angle θ (not shown), and the inclination angle θ is 0.5 ° to 0.5 °. An arbitrary angle of 15 ° can be selected. Actually, an inclination angle of about 2.5 ° is adopted.

  A rectifying mechanism 12c is formed at the rear portion of the side surface of the nozzle 12, and the rectifying mechanism 12c is composed of two disk-shaped flanges 12c1 and 12c2 formed at a predetermined interval. Of the flanges 12c1 and 12c2, the flange 12c1 close to the ultrasonic transducer 13 has one surface forming the rear end 12b surface of the nozzle 12, and the thickness of the flange 12c1 is determined by the ultrasonic vibration. The thickness for efficiently reflecting the ultrasonic wave radiated from the child 13 is set to ¼ of the wavelength λ of the ultrasonic wave propagating in the flange portion 12c1 in this case. For this reason, the thickness varies depending on the frequency of the ultrasonic wave used.

  Further, as shown in the figure, an ultrasonic transmission tube 20 is arranged continuously with the discharge hole 12 a of the nozzle 12. In this case, the distal end portion 20a of the ultrasonic transmission tube 20 is opened in order to eject and irradiate the cleaning liquid and the ultrasonic wave radiated from the ultrasonic transducer to the object to be cleaned.

  Next, the actual use state is that the ultrasonic cleaning apparatus 10 is fixed to other equipment, for example, support equipment supporting the apparatus with bolts, and the cleaning liquid is supplied to the supply port 14 provided on the side surface of the case 11. And the ultrasonic power is supplied to the ultrasonic transducer 13.

  The cleaning liquid supplied from the cleaning liquid supply port 14 of the case 11 is rectified by the rectifying mechanism 12c formed on the side surface of the nozzle 12 and flows into the inlet of the discharge hole 12a as a uniform water flow, and the uniform water flow from the outlet of the discharge hole 12a. It erupts as a pillar. On the other hand, a part of the ultrasonic wave radiated from the ultrasonic transducer 13 is directly radiated from the tip of the nozzle 12 through the discharge hole 12a of the nozzle 12 as it is, and the other portion is a diaphragm 13a of the ultrasonic transducer 13. Between the nozzle 12 and the rear end surface (one surface of the flange 12c1) of the conical shape (downward angle 2.5 °) of the nozzle 12 and is repeatedly guided within the discharge hole 12a while being repeatedly reflected. While radiating from the tip exit.

  Of the ultrasonic waves radiated from the discharge holes 12 a of the nozzle 12, those that directly pass through the discharge holes 12 a from the ultrasonic vibrator 13 do not converge, and the surface of the diaphragm 13 a of the ultrasonic vibrator 13 and the nozzle 12 Since the discharge hole 12a is formed as a linear round hole having a constant diameter, the reflection is repeated between the rear end surface and guided into the discharge hole 12a. When it is done, it is difficult to converge to a certain point.

  In addition, since the ultrasonic transmission tube 20 is continuously arranged at the front end outlet of the nozzle 12, the cleaning liquid ejected from the front end outlet of the nozzle 12 and the ultrasonic wave to be irradiated are partially inside the ultrasonic transmission tube 20. Directly, the other portions are radiated from the tip 20a of the ultrasonic transmission tube 20 toward the object M to be cleaned while being repeatedly reflected.

  If comprised as mentioned above, since the ultrasonic transmission pipe | tube 20 can be manufactured by arbitrary length, the distance of the housing | casing 11 of the ultrasonic cleaning apparatus 10 and the to-be-cleaned object M is the length of the ultrasonic transmission pipe | tube 20. It can be extended by as much as the working space can be secured. At this time, since the cleaning liquid and the ultrasonic wave pass through the inside of the ultrasonic transmission tube 20, the cleaning power is hardly deteriorated.

  Further, in the case shown in FIG. 1, the ultrasonic transmission tube 20 is formed in a straight line (straight tube) shape, but as shown in FIG. Since the object can be shifted from right above the object to be cleaned M, the work space can be used effectively. The angle θ can be freely set in the range of 180 ° ≧ θ ≧ 0 °, but in some cases, the ultrasonic transmission tube 20 can be drawn in a circle having a predetermined radius. Reference numeral 19 in the figure denotes a connector connected to supply power to the ultrasonic transducer.

  Moreover, as shown in FIG. 3, the irradiation (spraying) angle of the ultrasonic wave and the cleaning liquid with respect to the object to be cleaned M can be made from an oblique direction shifted from the vertical direction. If it does in this way, depending on the to-be-cleaned object M, a cleaning effect may be able to be improved.

  Moreover, as shown in FIG. 4, the ultrasonic transmission tubes 20 of the plurality of ultrasonic cleaning apparatuses 10 can be combined at one place, and thus the cleaning power can be increased.

  Furthermore, if the ultrasonic transmission tube 20 is made of a flexible material, it can be freely deformed during use as shown in FIG. 5A, and the object to be cleaned M as shown in FIG. 5B. Even if it has a complicated shape, the ultrasonic transmission tube 20 can penetrate into the inside thereof and can be cleaned.

  Also, the tip 20a of the ultrasonic transmission tube 20 is closed, and a slit or a plurality of holes are formed on the side surface to eject and irradiate the cleaning liquid and the ultrasonic wave radiated from the ultrasonic vibrator onto the object to be cleaned. You may provide the ejection hole 20b which consists of. If comprised in this way, as shown in FIG. 6, since the to-be-cleaned object M can be wash | cleaned linearly (line shape), if the ejection hole 20b is provided by the width | variety of a to-be-cleaned object, the ultrasonic cleaning apparatus 10 of FIG. A device for swinging the nozzle portion is unnecessary, and the entire device can be simplified. In addition, the part shown with the oblique line in the figure has shown the washing | cleaning liquid which has ejected.

  FIG. 7 shows various shapes of the ultrasonic transmission tube 20, and as shown in FIG. 7 (a), slit-shaped ejection holes 20b having the same diameter may be formed as shown in FIG. 7 (b). May be provided with a plurality of ejection holes 20b. Moreover, as shown in (c), it may be an elliptical taper shape that narrows toward the tip, and as shown in (d), the diameter may be changed over several stages.

  In addition, as shown in FIG. 8, the ultrasonic transmission pipe | tube 20 of the several ultrasonic cleaning apparatus 10 can also be couple | bonded at one place, and if this is done, cleaning power can be increased.

  Further, as shown in FIG. 9, the vicinity of the tip of the ultrasonic transmission tube 20 is bifurcated to close the tip, and the ultrasonic waves radiated from the cleaning liquid and the ultrasonic transducer are respectively disposed on the respective opposing surfaces near the tip. In order to eject and irradiate the sound wave to the object to be cleaned, an ejection hole 20b having a slit shape or a plurality of holes may be provided. If it does in this way, the front and back of the to-be-cleaned object M can be wash | cleaned simultaneously.

  Further, as shown in FIG. 10, when the ultrasonic transmission tube 20 is formed in a closed loop shape and the transmission liquid in the tube is circulated, the ultrasonic wave also circulates along the ultrasonic transmission tube 20, so Therefore, ultrasonic waves can be efficiently supplied to the object M to be cleaned.

Furthermore, as shown in FIG. 11, two ultrasonic cleaning apparatuses 10 are used, and the discharge holes 12a of the nozzle 12 of one ultrasonic cleaning apparatus 10 and the discharge holes of the nozzle 12 of the other ultrasonic cleaning apparatus 10 are used. 12a is communicated with the ultrasonic transmission tube 20, and the cleaning liquid and the ultrasonic wave radiated from the ultrasonic vibrator are ejected to the object to be cleaned into the ultrasonic transmission tube 20 at a position facing the object M to be cleaned. -You may provide the ejection hole 20b which consists of slit shape or a some hole in order to irradiate. If comprised in this way, while being able to double a washing | cleaning effect, the stability of washing | cleaning can also be ensured.
In addition, as shown in FIG. 12, if the ultrasonic transmission tube 20 communicating between the nozzles 12 of the two ultrasonic cleaning apparatuses 10 is formed in a straight line and the ejection holes 20b are provided in a wide range, a large area is obtained. The cleaning object M can also be cleaned.

FIG. 13 is a cross-sectional view of the ultrasonic transmission tube 20 facing the object to be cleaned M, in which a plurality of ultrasonic cleaning devices 10 are arranged side by side, and the ultrasonic transmission tubes 20 are arranged, and the cleaning liquid is arranged on the lower side. And ejection holes 20b for ejecting and irradiating ultrasonic waves are arranged. Note that the ultrasonic cleaning apparatus 10 may be used as one unit, and the ultrasonic transmission tube 20 may be branched into a plurality of positions at a position facing the object to be cleaned M, or a tuna may be wound or reciprocated.
Further, when the lower surface (back surface) of the object to be cleaned is cleaned, the ejection hole 20b may be directed upward.

Next, an ultrasonic cleaning device having a shape slightly different from the above-described ultrasonic cleaning device will be described. In addition, the same code | symbol is attached | subjected to the part which is the same or it corresponds.
This ultrasonic cleaning apparatus 10 is an ultrasonic cleaning apparatus for cleaning an object to be cleaned that has passed through the cleaning liquid S or immersed in the cleaning liquid.
As shown in FIG. 14A, a transmission liquid supply port 17 and a discharge port 18 are provided on the side surface of the housing 11. In addition, an ultrasonic transmission tube 20 is arranged continuously to the discharge hole 12 a of the nozzle 12. The ultrasonic transmission tube 20 holds the transmission liquid supplied from the transmission liquid supply port 17 via the discharge hole 12a and puts the ultrasonic wave from the ultrasonic vibrator 13 in the cleaning liquid S via the transmission liquid. The object to be cleaned is transmitted and irradiated.

Specifically, as shown in FIG. 14B, the side surface of the ultrasonic transmission tube 20 is formed with a thickness t ₁ that does not transmit ultrasonic waves, and the distal end surface is formed with a thickness t ₂ that transmits ultrasonic waves. Has been. In addition, as shown in FIG.14 (c), you may round a front-end | tip part.

  In the case of this apparatus 10, only the outside of the ultrasonic transmission tube 20 is in contact with the cleaning liquid, and the nozzles and internal parts of the ultrasonic cleaning apparatus are not in contact with the cleaning liquid. Therefore, it is necessary to worry about contamination from within the ultrasonic cleaning apparatus. If only the ultrasonic transmission tube has a high degree of cleanliness, a clean cleaning effect can be easily obtained. In the case of this apparatus 10, the transmission liquid supply port 17 and the discharge port 18 are provided so as to circulate when it is necessary to cool the transmission liquid in the ultrasonic transmission tube 20. It is something that can be done.

  Further, as a method for circulating the transmission liquid, as shown in FIG. 15, a branch pipe 21 is provided in the middle of the ultrasonic transmission pipe 20 so that the transmission liquid can be discharged, and the branch pipe 21 and the ultrasonic cleaning device 10. The transmission liquid supply port 17 may be piped through a pump (not shown) to circulate the transmission liquid.

In addition to the above example, as shown in FIGS. 16A and 16B, the tip surface of the ultrasonic transmission tube 20 is formed with a thickness t ₁ that does not transmit ultrasonic waves, and a part of the lower surface of the side surface is ultrasonic. May be formed to a thickness t ₂ through which the light passes. If comprised in this way, the ultrasonic irradiation surface can be made wide and the ultrasonic irradiation area | region match | combined with the to-be-cleaned object can be formed. (B) is an enlarged view of a part of (a).

In addition, as shown in FIG. 17, two ultrasonic cleaning apparatuses 10 are used, and the discharge hole 12 a of the nozzle 12 of one ultrasonic cleaning apparatus 10 (first ultrasonic cleaning apparatus) and the other ultrasonic cleaning apparatus. The discharge holes 12 a of the nozzles 12 of the 10 (second ultrasonic cleaning device) are communicated with each other through the ultrasonic transmission tube 20. The ultrasonic transmission tube 20 is formed such that a part of the lower surface of the part immersed in the cleaning liquid has a thickness that allows ultrasonic waves to pass therethrough, and the other part has a thickness that does not transmit ultrasonic waves.
Then, the ultrasonic waves transmitted from both ultrasonic cleaning apparatuses 10 through the transmission liquid were immersed in the cleaning liquid by irradiating the ultrasonic waves into the cleaning liquid from the portion of the ultrasonic transmission tube 20 that can transmit the ultrasonic waves. The object to be cleaned is ultrasonically cleaned. Since ultrasonic waves are sent from both, the cleaning effect can be doubled.

18A and 18B are cross-sectional views of the ultrasonic transmission tube 20 facing the object to be cleaned M. FIG. 18A is a thickness at which the upper side does not transmit ultrasonic waves, and the lower side transmits ultrasonic waves. It is constructed by integral molding to a thickness that permeates. The ultrasonic cleaning apparatus 10 communicating with the ultrasonic transmission tube 20 may be one or plural.
Further, (b) is an arrangement of the ultrasonic transmission tubes 20, in which the lower side is formed to a thickness that transmits ultrasonic waves, and the upper side is formed to a thickness that does not transmit ultrasonic waves. Also in this case, the ultrasonic cleaning apparatus 10 is used as a single unit, and the ultrasonic transmission tube 20 is branched into a plurality of positions at a position facing the object to be cleaned M, or a tuna is wound or reciprocated. Alternatively, a plurality of ultrasonic cleaning devices 10 arranged in parallel may be used.
Further, in any of the types (a) and (b), when the lower surface of the object to be cleaned is cleaned, it is possible to deal with the surface that transmits ultrasonic waves upward.

The ultrasonic transmission tube 20 described above is desirably formed of high-purity quartz, high-purity SiC, high-purity Al ₂ O ₃ or a stainless material. When the ultrasonic transmission tube 20 is composed of a high-purity quartz tube, cracking and cracking due to impact can be prevented by covering the outside with a metal material such as stainless steel.

  The ultrasonic cleaning apparatus 20 can be effectively used for cleaning liquid crystal panels, semiconductor wafers, and the like.

10 Ultrasonic cleaning equipment 11 Case (housing)
12 nozzle 12a discharge hole 12b nozzle rear end 12c rectifying mechanism 12c1 collar 12c2 collar 13 ultrasonic transducer
13a Diaphragm 14 Cleaning liquid supply port 15 Bolt hole 17 Transmission liquid supply port 18 Transmission liquid discharge port 20 Ultrasonic transmission pipe 20a Tip 20b Ejection hole M Object to be cleaned S Cleaning liquid

Claims (10)

A housing, the diameter of the installed discharge hole to the tip of the housing is formed at a constant linear round hole, and the rear end surface is formed in a circular cone shape toward the discharge hole from the outer edge An ultrasonic cleaning apparatus comprising a nozzle, a disk-shaped ultrasonic transducer disposed opposite to the rear end of the nozzle, and a transmission liquid supply port and a discharge port formed on a side surface of the casing Because
And continuously to the discharge hole of the nozzle, and ultrasonic transmission tube that holds the transfer liquid supplied from said discharge Deana,
An object to be cleaned disposed opposite to the ultrasonic transmission tube;
A cleaning liquid disposed between the object to be cleaned and the ultrasonic transmission tube;
Comprising
An ultrasonic cleaning apparatus that irradiates the object to be cleaned with ultrasonic waves from the ultrasonic vibrator via the transmission liquid, the ultrasonic transmission tube, and the cleaning liquid . The side surface of the ultrasonic transmission tube is formed with a thickness that does not transmit ultrasonic waves, the distal end surface is formed with a thickness that transmits ultrasonic waves , the distal end surface is disposed to face the object to be cleaned, and The ultrasonic cleaning apparatus according to claim 1 , wherein the cleaning liquid is disposed between the cleaning object and the tip surface . The tip surface of the ultrasonic transmission tube is formed with a thickness that does not transmit ultrasonic waves, a part of the side surface is formed with a thickness that transmits ultrasonic waves, and a part of the side surface faces the object to be cleaned. The ultrasonic cleaning apparatus according to claim 1 , wherein the cleaning liquid is disposed between the object to be cleaned and a part of the side surface. The ultrasonic transmission tube is formed in a closed loop shape, a part of the side surface of the ultrasonic transmission tube is formed to a thickness that transmits ultrasonic waves, and a part of the side surface is disposed to face the object to be cleaned. The ultrasonic cleaning apparatus according to claim 1, wherein the cleaning liquid is disposed between the object to be cleaned and a part of the side surface. A branch pipe provided in the middle of the ultrasonic transmission pipe for discharging the transmission liquid;
The ultrasonic cleaning according to claim 1, further comprising: a pipe provided between the branch pipe and the transmission liquid supply port via a pump for circulating the transmission liquid. apparatus. A housing, the diameter of the installed discharge hole to the tip of the housing is formed at a constant linear round hole, and the rear end surface is formed in a circular cone shape toward the discharge hole from the outer edge 1st ultrasonic cleaning apparatus provided with the nozzle, the disk-shaped ultrasonic transducer | vibrator arrange | positioned facing the rear-end part of this nozzle, and the transmission liquid supply port formed in the side surface of the said housing | casing When,
A housing, the diameter of the installed discharge hole to the tip of the housing is formed at a constant linear round hole, and the rear end surface is formed in a circular cone shape toward the discharge hole from the outer edge A second ultrasonic cleaning device comprising a nozzle, a disk-shaped ultrasonic transducer disposed opposite to the rear end of the nozzle, and a transmission liquid discharge port formed on a side surface of the casing And having
The discharge hole of the nozzle of the first ultrasonic cleaning device and the discharge hole of the nozzle of the second ultrasonic cleaning device are communicated with each other , and the transmission liquid supplied from the transmission liquid supply port is held. an ultrasonic transmission tube that is passed through,
An object to be cleaned disposed opposite to the ultrasonic transmission tube;
A cleaning liquid disposed between the object to be cleaned and the ultrasonic transmission tube;
Comprising
An ultrasonic cleaning apparatus that irradiates the object to be cleaned with ultrasonic waves from the ultrasonic vibrator via the transmission liquid, the ultrasonic transmission tube, and the cleaning liquid . A part of the side surface of the central portion of the ultrasonic transmission tube is formed to a thickness that transmits ultrasonic waves, and a part of the side surface is disposed to face the object to be cleaned, and the object to be cleaned and the side surface The ultrasonic cleaning apparatus according to claim 6 , wherein the cleaning liquid is disposed between a part of the ultrasonic cleaning apparatus and the ultrasonic cleaning apparatus. The ultrasound transmission tube, ultrasonic cleaning device according to claim 1 to 7 or one of claims, characterized by being composed of a flexible material. The ultrasound transmission tube, high purity quartz, high purity SiC, ultrasonic cleaning according to any one of claims 1-7, characterized in that it is formed in a high purity Al ₂ O ₃ or stainless steel apparatus. The supersonic wave transmission tube according to any one of claims 1 to 7 , wherein the ultrasonic transmission tube has a structure in which an inner side is constituted by a high-purity quartz tube and an outer side is covered with a stainless steel material or another metal material. Sonic cleaning device.

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