JP2003266034A - Jet type ultrasonic washing apparatus - Google Patents
Jet type ultrasonic washing apparatusInfo
- Publication number
- JP2003266034A JP2003266034A JP2002070072A JP2002070072A JP2003266034A JP 2003266034 A JP2003266034 A JP 2003266034A JP 2002070072 A JP2002070072 A JP 2002070072A JP 2002070072 A JP2002070072 A JP 2002070072A JP 2003266034 A JP2003266034 A JP 2003266034A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- ultrasonic
- liquid reservoir
- washing liquid
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、超音波洗浄装置に
関し、特に、超音波振動を加えた洗浄液を被洗浄物に吹
き付けて洗浄を行う噴射形超音波洗浄装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device, and more particularly to an injection type ultrasonic cleaning device for cleaning an object to be cleaned by spraying a cleaning liquid to which ultrasonic vibration is applied.
【０００２】[0002]
【従来の技術】半導体シリコンウェハー，液晶用のガラ
ス，ハードディスク等の微細加工品の精密洗浄には、高
周波の超音波洗浄装置が用いられており、特に、汚れの
再付着の少ない噴射形超音波洗浄装置が用いられてい
る。2. Description of the Related Art A high-frequency ultrasonic cleaning device is used for precision cleaning of semiconductor silicon wafers, glass for liquid crystals, hard disks, etc. Cleaning equipment is used.
【０００３】従来の噴射形超音波洗浄装置の構造を図１
２に示す。給液口から入った洗浄液２は管体１１内に入
る。管体１１の一端には振動板６が取り付けられてお
り、管体１１の内部に満たされた洗浄液２に超音波７が
伝達され、他端の噴出口４より噴射される。このような
従来の構造では、超音波振動板６より発生した超音波７
は、噴出口４付近で収束するように、ノズル状の管路の
形状は計算され、決められた円錐台状または外側に湾曲
した形状となっている。The structure of a conventional jet type ultrasonic cleaning device is shown in FIG.
2 shows. The cleaning liquid 2 entered from the liquid supply port enters the pipe body 11. A vibrating plate 6 is attached to one end of the pipe body 11, and ultrasonic waves 7 are transmitted to the cleaning liquid 2 filled in the pipe body 11 and ejected from a jet port 4 at the other end. In such a conventional structure, the ultrasonic wave 7 generated from the ultrasonic diaphragm 6
Is calculated to have a shape of a nozzle-like conduit so that it converges in the vicinity of the ejection port 4, and has a predetermined truncated cone shape or an outwardly curved shape.
【０００４】[0004]
【発明が解決しようとする課題】超音波は波動である。
管体１１内における洗浄液２の通路となるノズル状の管
路１０内で反射した超音波は、反射する位置によって、
行程が違うため、幾何学的に収束する位置では、位相が
まちまちとなり、半波長ずれた超音波同士で打ち消し合
う現象も生ずるので、強勢な超音波を得ることは困難で
ある。また、設計上、超音波を収束させることが第一優
先となるため、管路１０の形状はほぼ限られてしまい、
例えば、「水流を考慮した設計がしにくい」、「デザイ
ンに自由が効かない」といった弊害がある。Ultrasonic waves are waves.
The ultrasonic waves reflected in the nozzle-shaped pipe 10 serving as the passage of the cleaning liquid 2 in the pipe 11 are changed depending on the position of reflection.
Since the strokes are different, the phases are varied at the positions where they are geometrically converged, and there is a phenomenon in which ultrasonic waves that are shifted by a half wavelength cancel each other, so that it is difficult to obtain a strong ultrasonic wave. In addition, since the first priority is to converge the ultrasonic waves in the design, the shape of the conduit 10 is almost limited,
For example, there are problems such as "it is difficult to design in consideration of water flow" and "freedom in design".
【０００５】本発明は、このような従来技術の欠点を解
消して、効率よく超音波を洗浄液に伝達することがで
き、比較的形状が自由に設計できる噴射形超音波洗浄装
置を提供することを目的とする。The present invention solves the above-mentioned drawbacks of the prior art and provides an injection type ultrasonic cleaning apparatus capable of efficiently transmitting ultrasonic waves to a cleaning liquid and having a relatively free shape design. With the goal.
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明による噴射形超音波洗浄装置は、洗浄液を溜
めて該洗浄液を噴出させる噴出口を有する洗浄液溜と、
該洗浄液溜に該洗浄液を供給するための洗浄液供給装置
と、該洗浄液溜内に溜められた前記洗浄液中に超音波を
発出するための振動板と、該振動板を超音波駆動する超
音波振動素子とを備え、前記洗浄液溜内の該洗浄液中で
該超音波が集束された洗浄液を前記噴出口から噴出させ
るために、前記超音波振動素子の直径を（２ｄ）、前記
振動板から前記噴射口までの距離を（Ｌ）、該洗浄液中
を伝搬する超音波の波長を（λ）としたとき、Ｌ＝０．
１×（ｄ2 ／λ）〜２．０×（ｄ2 ／λ）なる範囲に設
定されていることを特徴とする構成を有している。前記
洗浄液溜は円筒管状であるように構成することができ
る。また、前記洗浄液溜は内側に湾曲した円錐状である
ように構成することができる。さらに、前記洗浄液溜の
内壁面で反射する前記超音波の分散成分が、拡散・減衰
され、前記噴射口から噴出された洗浄液内の超音波音圧
の低下が軽減されるように、前記洗浄液溜の内壁面を凹
凸のある面に構成することができる。In order to achieve this object, an injection type ultrasonic cleaning apparatus according to the present invention comprises a cleaning liquid reservoir having an ejection port for accumulating the cleaning liquid and ejecting the cleaning liquid,
A cleaning liquid supply device for supplying the cleaning liquid to the cleaning liquid reservoir, a vibration plate for emitting ultrasonic waves into the cleaning liquid stored in the cleaning liquid reservoir, and ultrasonic vibration for ultrasonically driving the vibration plate. An element, the diameter of the ultrasonic vibrating element is (2d), and the ultrasonic wave is ejected from the vibrating plate in order to eject the cleaning liquid in which the ultrasonic waves are focused in the cleaning liquid in the cleaning liquid reservoir from the ejection port. When the distance to the mouth is (L) and the wavelength of the ultrasonic wave propagating in the cleaning liquid is (λ), L = 0.
Has a configuration which is characterized in that it is set to 1 × (d 2 /λ)~2.0×(d 2 / λ) becomes range. The cleaning liquid reservoir may be configured to have a cylindrical tubular shape. Further, the cleaning liquid reservoir may be configured to have a conical shape that is curved inward. Further, the dispersion component of the ultrasonic waves reflected on the inner wall surface of the cleaning liquid reservoir is diffused / attenuated so that the decrease in the ultrasonic sound pressure in the cleaning liquid ejected from the ejection port is reduced, It is possible to form the inner wall surface of the above into an uneven surface.
【０００７】[0007]
【発明の実施の形態】図１は本発明装置の実施例を示す
ものであり、１は給液口３から供給される洗浄液２を溜
める洗浄液溜であり、その底面の中央部には洗浄液２を
噴出させる噴出口４が設けられている。洗浄液２の上表
面に配置された振動板５内には振動素子６が配置されて
おり、振動素子６は所望の周波数で超音波駆動され、洗
浄液２中に超音波７を発生する。従って、噴出口４から
は超音波７が与えられた洗浄液２が噴出して被洗浄物８
に吹き付けられ、効果的にその洗浄を行うことができ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an embodiment of the device of the present invention, in which 1 is a cleaning liquid reservoir for accumulating a cleaning liquid 2 supplied from a liquid supply port 3, and a cleaning liquid 2 is provided at the center of the bottom surface thereof. A jet port 4 for jetting the is provided. A vibrating element 6 is arranged in a vibrating plate 5 arranged on the upper surface of the cleaning liquid 2, and the vibrating element 6 is ultrasonically driven at a desired frequency to generate ultrasonic waves 7 in the cleaning liquid 2. Therefore, the cleaning liquid 2 to which the ultrasonic waves 7 are applied is ejected from the ejection port 4 and the cleaning object 8 is ejected.
It can be sprayed on and effectively cleaned.
【０００８】超音波７を発生させるための超音波振動素
子６は円形である。この円の直径を（２ｄ）、洗浄液２
中の超音波７の波長を（λ）、振動板５から噴出口４ま
での距離を（Ｌ）としたとき、Ｌ＝０．１×（ｄ2 ／
λ）〜２．０×（ｄ2 ／λ）の範囲、すなわち図２に示
す近距離音場Ｓ１の範囲において、周期的に超音波７の
集束が行われる。The ultrasonic vibration element 6 for generating the ultrasonic wave 7 is circular. The diameter of this circle is (2d), the cleaning liquid 2
When the wavelength of the ultrasonic wave 7 therein is (λ) and the distance from the diaphragm 5 to the ejection port 4 is (L), L = 0.1 × (d 2 /
The ultrasonic waves 7 are periodically focused in the range of λ) to 2.0 × (d 2 / λ), that is, in the range of the near field S1 shown in FIG.
【０００９】すなわち、図３は円形超音波振動素子によ
る軸上音圧分布を示す特性図であり、横軸は（ｄ2 ／
λ）の係数、縦軸は音圧である。この特性図から（ｄ2
／λ）の係数が０．１〜２．０である近距離音場Ｓ１に
おいては、高い軸上音圧が得られることがわかる。That is, FIG. 3 is a characteristic diagram showing an axial sound pressure distribution by a circular ultrasonic vibration element, and the horizontal axis is (d 2 /
λ) coefficient, and the vertical axis represents sound pressure. From this characteristic diagram, (d 2
It is understood that a high axial sound pressure can be obtained in the near field S1 in which the coefficient of / λ) is 0.1 to 2.0.
【００１０】超音波７を収束させるためには、超音波振
動素子６の直径（２ｄ）と、洗浄液２中の超音波７の波
長（λ）が決まれば、図４に示すように振動板５と噴出
口４との間の距離（Ｌ）は、（ｄ2 ／λ）の係数を０．
１〜２．０の間から適当な値を選べば良い。このよう
に、設計した管路１０を形成することにより、超音波７
を噴射口４付近までの洗浄溜１内で集束させることがで
きる。In order to converge the ultrasonic wave 7, if the diameter (2d) of the ultrasonic vibration element 6 and the wavelength (λ) of the ultrasonic wave 7 in the cleaning liquid 2 are determined, the vibration plate 5 as shown in FIG. The distance (L) between the nozzle and the jet port 4 has a coefficient of (d 2 / λ) of 0.
A suitable value may be selected from the range of 1 to 2.0. By forming the designed conduit 10 in this manner, the ultrasonic wave 7
Can be focused in the cleaning reservoir 1 up to the vicinity of the injection port 4.
【００１１】洗浄液管路１０の形状によっては、管路１
０を形成する管体１１の内壁面での超音波７の反射によ
り、集束した超音波７を乱す場合がある。このとき、そ
の反射波を拡散，減衰させることができれば、洗浄液２
に超音波７を効率よく伝達することができる。このため
に、後述のように管路１０を形成する洗浄液溜すなわち
管体１１の内壁面を凹凸を有する面とする構成が挙げら
れる。この内壁面に衝突した超音波７は拡散あるいは吸
収されて減衰する。Depending on the shape of the cleaning liquid pipeline 10, the pipeline 1
The focused ultrasonic wave 7 may be disturbed by the reflection of the ultrasonic wave 7 on the inner wall surface of the tube body 11 forming 0. At this time, if the reflected wave can be diffused and attenuated, the cleaning liquid 2
Therefore, the ultrasonic wave 7 can be efficiently transmitted. For this purpose, a configuration in which the cleaning fluid reservoir forming the conduit 10, that is, the inner wall surface of the pipe body 11 has a surface having irregularities, as will be described later, can be mentioned. The ultrasonic waves 7 colliding with the inner wall surface are diffused or absorbed and attenuated.
【００１２】以下、本発明装置の具体的実施例について
説明する。
（例１）図５は管路１０をほぼ同一の横断面を有するス
トレート形状に形成したものである。A specific embodiment of the device of the present invention will be described below. (Example 1) FIG. 5 shows a pipe 10 formed in a straight shape having substantially the same cross section.
【００１３】（例２）図６は管路１０を形成する管体１
１の内壁面が内側に湾曲したものである。(Example 2) FIG. 6 shows a pipe body 1 forming a pipe line 10.
The inner wall surface of No. 1 is curved inward.
【００１４】（例３）図７は管路１０を形成する管体１
１の内壁面を数段に亘って絞ったものである。(Example 3) FIG. 7 shows a tubular body 1 forming a duct 10.
The inner wall surface of No. 1 is squeezed over several steps.
【００１５】（例４）図８は管路１０を形成するノズル
状の管体１１の内壁面に円周方向に横溝１２を付けたも
のである。この溝１２は、前述の反射波を拡散、減衰さ
せる目的で付けたものである。横溝１２は水流が乱れな
いように、また、横溝１２の中にゴミが溜まり難いよう
に、横溝１２の幅や深さを決めている。噴射形超音波洗
浄装置では、メガヘルツ帯が多く用いられ、水中での波
長はおよそ１ｍｍ以下となる。例えば、その横溝１２の
深さが０．５ｍｍ程度であっても十分な効果がある。(Example 4) FIG. 8 shows a lateral wall 12 formed in the circumferential direction on the inner wall surface of a nozzle-shaped tubular body 11 forming a tubular passage 10. The groove 12 is provided for the purpose of diffusing and attenuating the above-mentioned reflected wave. The width and depth of the lateral groove 12 are determined so that the water flow is not disturbed and dust is unlikely to collect in the lateral groove 12. In the jet ultrasonic cleaning device, the megahertz band is often used, and the wavelength in water is about 1 mm or less. For example, even if the depth of the lateral groove 12 is about 0.5 mm, a sufficient effect is obtained.
【００１６】（例５）図９は管路１０を形成するノズル
状の管体１１の内壁面に軸方向に縦溝１３を付けたもの
である。(Example 5) FIG. 9 shows a nozzle-shaped tube body 11 forming a tube passage 10 with a vertical groove 13 formed on the inner wall surface in the axial direction.
【００１７】ここで、一般に横溝１２，縦溝１３の幅及
び深さは、液中での超音波の波長の１／１０〜１０倍で
効果が認められる。また、これらの溝の形状は、実施例
の形状に限定されるものではなく、例えば、その断面形
状が正弦波形状もしくは三角形状等でも同様の効果が得
られる。さらに、管路１０を形成するノズル状の管体１
１の内壁面に螺旋状に設けられた溝によっても、同様の
効果を実現することができる。Here, generally, the width and depth of the lateral groove 12 and the vertical groove 13 are effective when they are 1/10 to 10 times the wavelength of the ultrasonic wave in the liquid. Further, the shape of these grooves is not limited to the shape of the embodiment, and the same effect can be obtained even if the cross-sectional shape is sinusoidal or triangular. Further, a nozzle-shaped tubular body 1 forming the pipeline 10.
The same effect can be realized by the groove provided in the inner wall surface of No. 1 in a spiral shape.
【００１８】本発明による噴射形超音波洗浄装置では、
重要な要素は、超音波振動素子６の直径（２ｄ）、洗浄
液２中の超音波の波長（λ）、振動面と噴射口４の距離
（Ｌ）だけであり、それ以外は自由に設計することがで
きる。そのため、管路１０の形状は、例えば、生産効率
を考えて加工のしやすい構造、洗浄液が乱れずスムーズ
に流れる構造とすればよい。In the jet type ultrasonic cleaning device according to the present invention,
The only important factors are the diameter (2d) of the ultrasonic vibration element 6, the wavelength (λ) of the ultrasonic wave in the cleaning liquid 2, and the distance (L) between the vibrating surface and the injection port 4, and other elements can be freely designed. be able to. Therefore, the shape of the conduit 10 may be, for example, a structure that is easy to process in consideration of production efficiency, or a structure in which the cleaning liquid flows smoothly without being disturbed.
【００１９】洗浄液２の噴射口４からの距離と音圧を測
定した。これを図１１に示す。図１２の従来の構造と図
８の本発明による構造の２つの超音波洗浄装置を、図１
０で示される構成によりそれぞれ音圧を測定し、比較し
たものである。ここで、１４は本発明による噴出形超音
波洗浄装置、１５は本発明装置１４内に供給される給
水、１６は本発明装置１４から噴出される水中を伝搬す
る超音波の音圧を測定する超音波音圧センサーである。
この例では本発明による構造により、従来の構造に比較
して平均３５％程度の音圧の上昇が確認された。超音波
の強い弱いは、超音波の音圧によって決まる。洗浄効果
は超音波が強い方がよい。The distance from the injection port 4 of the cleaning liquid 2 and the sound pressure were measured. This is shown in FIG. Two ultrasonic cleaning devices having the conventional structure shown in FIG. 12 and the structure according to the present invention shown in FIG. 8 are shown in FIG.
The sound pressures were measured and compared for each of the configurations indicated by 0. Here, 14 is a jet ultrasonic cleaning apparatus according to the present invention, 15 is water supply supplied into the apparatus 14 of the present invention, and 16 is a sound pressure of ultrasonic waves propagating in water ejected from the apparatus 14 of the present invention. It is an ultrasonic sound pressure sensor.
In this example, it was confirmed that the structure according to the present invention increased the sound pressure by an average of about 35% as compared with the conventional structure. The strength of ultrasonic waves is determined by the sound pressure of ultrasonic waves. The ultrasonic effect is better for the cleaning effect.
【００２０】[0020]
【発明の効果】以上詳細に説明したように、本発明を実
施することにより、従来の構造に比較して、効率よく、
安定して、超音波を集束し、洗浄液に伝達させることが
できる。また、従来の構造例のように、液溜め側面での
超音波の反射による効果を利用しないので、液溜の形状
を自由に設定し得るという特殊の効果がある。As described in detail above, by carrying out the present invention, it is possible to improve the efficiency more efficiently as compared with the conventional structure.
The ultrasonic waves can be stably focused and transmitted to the cleaning liquid. Further, unlike the conventional structure example, since the effect of reflection of ultrasonic waves on the side surface of the liquid reservoir is not used, there is a special effect that the shape of the liquid reservoir can be freely set.
【図１】本発明装置の構造例を示す縦断面図である。FIG. 1 is a vertical sectional view showing a structural example of a device of the present invention.
【図２】本発明装置における円筒形管路内の超音波集束
原理を説明するための縦断面図である。FIG. 2 is a vertical cross-sectional view for explaining the principle of ultrasonic focusing in a cylindrical pipe in the device of the present invention.
【図３】本発明装置に用いるられる円形超音波振動子か
らの超音波の集束状態を示す特性図である。FIG. 3 is a characteristic diagram showing a focused state of ultrasonic waves from a circular ultrasonic transducer used in the device of the present invention.
【図４】本発明装置における円筒集束の概要を説明する
ための縦断面図である。FIG. 4 is a vertical cross-sectional view for explaining the outline of cylindrical focusing in the device of the present invention.
【図５】本発明装置の１実施例を示す縦断面図である。FIG. 5 is a vertical sectional view showing an embodiment of the device of the present invention.
【図６】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 6 is a vertical sectional view showing another embodiment of the device of the present invention.
【図７】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 7 is a vertical sectional view showing another embodiment of the device of the present invention.
【図８】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 8 is a vertical sectional view showing another embodiment of the device of the present invention.
【図９】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 9 is a vertical sectional view showing another embodiment of the device of the present invention.
【図１０】本発明装置における音圧測定に用いられた装
置の構成を示す外観図である。FIG. 10 is an external view showing a configuration of an apparatus used for measuring sound pressure in the apparatus of the present invention.
【図１１】本発明装置における音圧測定例を示す音圧特
性図である。FIG. 11 is a sound pressure characteristic diagram showing an example of sound pressure measurement in the device of the present invention.
１ 洗浄液溜 ２ 洗浄液 ３ 給液口 ４ 噴出口 ５ 振動板 ６ 振動素子 ７ 超音波 ８ 被洗浄物 １０ 管路 １１ 管体 １２ 横溝 １３ 縦溝 １４ 噴射形超音波洗浄装置 １５ 超音波音圧センサー １６ 給水 Ｓ１ 近距離音場 Ｓ２ 遠距離音場 1 Washing liquid reservoir 2 cleaning liquid 3 liquid supply port 4 spouts 5 diaphragm 6 Vibration element 7 ultrasonic waves 8 Items to be cleaned 10 pipelines 11 tube 12 lateral grooves 13 vertical groove 14 Jet type ultrasonic cleaning device 15 Ultrasonic sound pressure sensor 16 Water supply S1 near field S2 far field
【手続補正書】[Procedure amendment]
【提出日】平成１４年１１月２０日（２００２．１１．
２０）[Submission Date] November 20, 2002 (2002.11.
20)
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】図面の簡単な説明[Name of item to be corrected] Brief description of the drawing
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明装置の構造例を示す縦断面図である。FIG. 1 is a vertical sectional view showing a structural example of a device of the present invention.
【図２】本発明装置における円筒形管路内の超音波集束
原理を説明するための縦断面図である。FIG. 2 is a vertical cross-sectional view for explaining the principle of ultrasonic focusing in a cylindrical pipe in the device of the present invention.
【図３】本発明装置に用いるられる円形超音波振動子か
らの超音波の集束状態を示す特性図である。FIG. 3 is a characteristic diagram showing a focused state of ultrasonic waves from a circular ultrasonic transducer used in the device of the present invention.
【図４】本発明装置における円筒集束の概要を説明する
ための縦断面図である。FIG. 4 is a vertical cross-sectional view for explaining the outline of cylindrical focusing in the device of the present invention.
【図５】本発明装置の１実施例を示す縦断面図である。FIG. 5 is a vertical sectional view showing an embodiment of the device of the present invention.
【図６】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 6 is a vertical sectional view showing another embodiment of the device of the present invention.
【図７】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 7 is a vertical sectional view showing another embodiment of the device of the present invention.
【図８】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 8 is a vertical sectional view showing another embodiment of the device of the present invention.
【図９】本発明装置の他の実施例を示す縦断面図であ
る。FIG. 9 is a vertical sectional view showing another embodiment of the device of the present invention.
【図１０】本発明装置における音圧測定に用いられた装
置の構成を示す外観図である。FIG. 10 is an external view showing a configuration of an apparatus used for measuring sound pressure in the apparatus of the present invention.
【図１１】本発明装置における音圧測定例を示す音圧特
性図である。 FIG. 11 is a sound pressure characteristic diagram showing an example of sound pressure measurement in the device of the present invention.
【図１２】従来の噴射形超音波洗浄装置の構造例を示すFIG. 12 shows a structural example of a conventional jet ultrasonic cleaning device.
縦断面図である。FIG.
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】図面[Document name to be corrected] Drawing
【補正対象項目名】図１２[Name of item to be corrected] Fig. 12
【補正方法】追加[Correction method] Added
【補正内容】[Correction content]
【図１２】
─────────────────────────────────────────────────────
[Fig. 12] ─────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１４年１１月２１日（２００２．１１．
２１）[Submission date] November 21, 2002 (2002.11.
21)
【手続補正１】[Procedure Amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】特許請求の範囲[Name of item to be amended] Claims
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【特許請求の範囲】[Claims]
【手続補正２】[Procedure Amendment 2]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００４[Correction target item name] 0004
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００４】[0004]
【発明が解決しようとする課題】超音波は波動である。
管体１１内における洗浄液２の通路となるノズル状の管
路１０内で反射した超音波は、反射する位置によって行
程が違うため、幾何学的に収束させようとする位置で位
相がまちまちとなり、半波長ずれた超音波同士で打ち消
し合う現象も生ずるので、常に強勢な超音波を得ること
は困難である。また、設計上、超音波を収束させること
が第一優先となるため、管路１０の形状はほぼ限られて
しまい、例えば、「水流を考慮した設計がしにくい」、
「デザインに自由が効かない」といった弊害がある。Ultrasonic waves are waves.
Ultrasonic waves reflected in the nozzle-like conduit 10 as a passage of the cleaning liquid 2 in the tube 11, since the row <br/> degree is different depending on a position to reflect, to try to geometrically convergent It is difficult to always obtain a strong ultrasonic wave, because the phases vary from position to position , and the ultrasonic waves with half-wavelength shifts cancel each other out. Further, in designing, the first priority is to converge the ultrasonic waves, so the shape of the conduit 10 is almost limited, and for example, "it is difficult to design considering the water flow",
There is an adverse effect such as "freedom in design".
【手続補正３】[Procedure 3]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００６[Correction target item name] 0006
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００６】[0006]
【課題を解決するための手段】この目的を達成するため
に、本発明による噴射形超音波洗浄装置は、洗浄液を溜
めて該洗浄液を噴出させる噴出口を有する洗浄液溜と、
該洗浄液溜に該洗浄液を供給するための洗浄液供給装置
と、該洗浄液溜内に溜められた前記洗浄液中に超音波を
発出するための振動板と、該振動板を超音波駆動する超
音波振動素子とを備え、前記洗浄液溜内の該洗浄液中で
該超音波が集束された洗浄液を前記噴出口から噴出させ
るために、前記超音波振動素子の直径を（２ｄ）、前記
振動板から前記噴射口までの距離を（Ｌ）、該洗浄液中
を伝搬する超音波の波長を（λ）としたとき、Ｌ＝０．
１×（ｄ2 ／λ）〜２．０×（ｄ2 ／λ）なる範囲に設
定されていることを特徴とする構成を有している。前記
洗浄液溜は円筒管状であるように構成することができ
る。また、前記洗浄液溜は内側に湾曲した円錐状である
ように構成することができる。さらに、前記洗浄液溜の
内壁面で反射する前記超音波の分散成分が、拡散・減衰
され、前記噴射口から噴出された洗浄液内の超音波音圧
の低下が軽減されるように、前記洗浄液溜の内壁面を凹
凸のある面に構成することができる。また、前記洗浄液
溜を円錐形状とし、前記洗浄液溜の内壁面で反射する前
記超音波の分散成分が、拡散・減衰され、前記噴射口か
ら噴出された洗浄液内の超音波音圧の低下が軽減される
ように、前記洗浄液溜の内壁面を凹凸のある面に構成す
ることができる。 In order to achieve this object, an injection type ultrasonic cleaning apparatus according to the present invention comprises a cleaning liquid reservoir having an ejection port for accumulating the cleaning liquid and ejecting the cleaning liquid,
A cleaning liquid supply device for supplying the cleaning liquid to the cleaning liquid reservoir, a vibration plate for emitting ultrasonic waves into the cleaning liquid stored in the cleaning liquid reservoir, and ultrasonic vibration for ultrasonically driving the vibration plate. An element, the diameter of the ultrasonic vibrating element is (2d), and the ultrasonic wave is ejected from the vibrating plate in order to eject the cleaning liquid in which the ultrasonic waves are focused in the cleaning liquid in the cleaning liquid reservoir from the ejection port. When the distance to the mouth is (L) and the wavelength of the ultrasonic wave propagating in the cleaning liquid is (λ), L = 0.
Has a configuration which is characterized in that it is set to 1 × (d 2 /λ)~2.0×(d 2 / λ) becomes range. The cleaning liquid reservoir may be configured to have a cylindrical tubular shape. Further, the cleaning liquid reservoir may be configured to have a conical shape that is curved inward. Further, the dispersion component of the ultrasonic waves reflected on the inner wall surface of the cleaning liquid reservoir is diffused / attenuated so that the decrease in the ultrasonic sound pressure in the cleaning liquid ejected from the ejection port is reduced, It is possible to form the inner wall surface of the above into an uneven surface. Also, the cleaning liquid
Before the reflection on the inner wall surface of the cleaning liquid reservoir
Dispersion component of ultrasonic wave is diffused and attenuated,
The reduction in ultrasonic sound pressure in the cleaning liquid ejected from
As described above, the inner wall surface of the cleaning liquid reservoir is configured to have an uneven surface.
You can
【手続補正４】[Procedure amendment 4]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】０００８[Correction target item name] 0008
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【０００８】超音波７を発生させるための超音波振動素
子６は円形である。この円の直径を（２ｄ）、洗浄液２
中の超音波７の波長を（λ）、振動板５から噴出口４ま
での距離を（Ｌ）としたとき、Ｌ＝０．１×（ｄ2 ／
λ）〜２．０×（ｄ2 ／λ）の範囲、すなわち図２に示
す近距離音場Ｓ１の範囲において、超音波７の集束が行
われる。The ultrasonic vibration element 6 for generating the ultrasonic wave 7 is circular. The diameter of this circle is (2d), the cleaning liquid 2
When the wavelength of the ultrasonic wave 7 therein is (λ) and the distance from the diaphragm 5 to the ejection port 4 is (L), L = 0.1 × (d 2 /
lambda) to 2.0 range × (d 2 / λ), i.e. in the range of near field S1 shown in FIG. 2, it focused ultrasound 7 is performed.
【手続補正５】[Procedure Amendment 5]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１１[Correction target item name] 0011
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１１】洗浄液管路１０の形状によっては、管路１
０を形成する管体１１の内壁面での超音波７の反射によ
る分散成分により、集束した超音波７を乱す場合があ
る。このとき、その反射波を拡散，減衰させることがで
きれば、洗浄液２に超音波７を効率よく伝達することが
できる。このために、後述のように管路１０を形成する
洗浄液溜すなわち管体１１の内壁面を凹凸を有する面と
する構成が挙げられる。この内壁面に衝突した超音波７
の分散成分は拡散あるいは吸収されて減衰する。Depending on the shape of the cleaning liquid pipeline 10, the pipeline 1
By the reflection of the ultrasonic wave 7 on the inner wall surface of the tube body 11 forming 0,
The focused ultrasonic wave 7 may be disturbed by the dispersed component . At this time, if the reflected wave can be diffused and attenuated, the ultrasonic wave 7 can be efficiently transmitted to the cleaning liquid 2. For this purpose, a configuration in which the cleaning fluid reservoir forming the conduit 10, that is, the inner wall surface of the pipe body 11 has a surface having irregularities, as will be described later, can be mentioned. Ultrasonic waves 7 colliding with this inner wall surface
The dispersed component of is diffused or absorbed and attenuated.
【手続補正６】[Procedure correction 6]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１５[Name of item to be corrected] 0015
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１５】（例４）図８は管路１０を形成するノズル
状の管体１１の内壁面に円周方向に横溝１２を付けたも
のである。この溝１２は、前述の反射波を拡散、減衰さ
せる目的で付けたものである。横溝１２は水流が乱れな
いように、また、横溝１２の中にゴミが溜まり難いよう
に、横溝１２の幅や深さを決めている。噴射形超音波洗
浄装置では、メガヘルツ帯が多く用いられ、水中での波
長はおよそ１ｍｍ以下となる。例えば、その横溝１２の
深さが０．５ｍｍ程度であっても十分な効果がある。図
８には、管路１０を形成するノズル状の管体１１の内壁
面が円錐形状である場合を示している。 (Example 4) FIG. 8 shows a lateral wall 12 formed in the circumferential direction on the inner wall surface of a nozzle-shaped tubular body 11 forming a tubular passage 10. The groove 12 is provided for the purpose of diffusing and attenuating the above-mentioned reflected wave. The width and depth of the lateral groove 12 are determined so that the water flow is not disturbed and dust is unlikely to collect in the lateral groove 12. In the jet ultrasonic cleaning device, the megahertz band is often used, and the wavelength in water is about 1 mm or less. For example, even if the depth of the lateral groove 12 is about 0.5 mm, a sufficient effect is obtained. Figure
8 is an inner wall of a nozzle-shaped tubular body 11 that forms a pipeline 10.
The case where the surface is conical is shown.
【手続補正７】[Procedure Amendment 7]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１６[Correction target item name] 0016
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１６】（例５）図９は管路１０を形成するノズル
状の管体１１の内壁面に軸方向に縦溝１３を付けたもの
である。図９には、管路１０を形成するノズル状の管体
１１の内壁面が円錐形状である場合を示している。 (Example 5) FIG. 9 shows a nozzle-shaped tube body 11 forming a tube passage 10 with a vertical groove 13 formed on the inner wall surface in the axial direction. FIG. 9 shows a nozzle-shaped tubular body forming the pipeline 10.
The case where the inner wall surface of 11 has a conical shape is shown.
【手続補正８】[Procedure Amendment 8]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】００１９[Correction target item name] 0019
【補正方法】変更[Correction method] Change
【補正内容】[Correction content]
【００１９】洗浄液２の噴射口４からの距離と音圧を測
定した。これを図１１に示す。図１２の従来、即ち、管
体１１の内壁面に溝を付けていない構造と図８の本発
明、即ち、管体１１の内壁面に円周方向に横溝１２を付
けた構造の２つの超音波洗浄装置を、図１０で示される
構成によりそれぞれ音圧を測定し、比較したものであ
る。ここで、１４は本発明による噴出形超音波洗浄装
置、１５は本発明装置１４内に供給される給水、１６は
本発明装置１４から噴出される水中を伝搬する超音波の
音圧を測定する超音波音圧センサーである。この例では
本発明による構造により、従来の構造に比較して平均３
５％程度の音圧の上昇が確認された。超音波の強い弱い
は、超音波の音圧によって決まる。洗浄効果は超音波が
強い方がよい。The distance from the injection port 4 of the cleaning liquid 2 and the sound pressure were measured. This is shown in FIG. 12 conventional , ie tube
The structure of FIG. 8 in which the inner wall surface of the body 11 is not grooved, and the inner wall surface of the tube body 11 is provided with the lateral groove 12 in the circumferential direction.
FIG. 11 is a diagram in which sound pressures of two ultrasonic cleaning devices having a beam structure are measured and compared by the configuration shown in FIG. 10. Here, 14 is a jet ultrasonic cleaning apparatus according to the present invention, 15 is water supply supplied into the apparatus 14 of the present invention, and 16 is a sound pressure of ultrasonic waves propagating in water ejected from the apparatus 14 of the present invention. It is an ultrasonic sound pressure sensor. In this example, the structure according to the present invention has an average of 3 compared to the conventional structure.
It was confirmed that the sound pressure increased by about 5%. The strength of ultrasonic waves is determined by the sound pressure of ultrasonic waves. The ultrasonic effect is better for the cleaning effect.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 羽田野 甫 神奈川県藤沢市鵠沼松が岡５−11−16 Ｆターム(参考） 3B201 AA46 BB24 BB85 BB92 4D074 AA09 BB03 DD02 DD32 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor, Hadano 5-11-16 Kugenumamatsugaoka, Fujisawa City, Kanagawa Prefecture F term (reference) 3B201 AA46 BB24 BB85 BB92 4D074 AA09 BB03 DD02 DD32
Claims (4)
口を有する洗浄液溜と、該洗浄液溜に該洗浄液を供給す
るための洗浄液供給装置と、該洗浄液溜内に溜められた
前記洗浄液中に超音波を発出するための振動板と、該振
動板を超音波駆動する超音波振動素子とを備え、前記洗
浄液溜内の該洗浄液中で該超音波が集束された洗浄液を
前記噴出口から噴出させるために、前記超音波振動素子
の直径を（２ｄ）、前記振動板から前記噴射口までの距
離を（Ｌ）、該洗浄液中を伝搬する超音波の波長を
（λ）としたとき、Ｌ＝０．１×（ｄ2 ／λ）〜２．０
×（ｄ2 ／λ）なる範囲に設定されていることを特徴と
する超音波洗浄装置。1. A cleaning liquid reservoir having a jet port for accumulating the cleaning liquid and ejecting the cleaning liquid, a cleaning liquid supply device for supplying the cleaning liquid to the cleaning liquid reservoir, and a cleaning liquid superfilled in the cleaning liquid reservoir. A vibrating plate for emitting a sound wave and an ultrasonic vibrating element for ultrasonically driving the vibrating plate are provided, and the cleaning liquid in which the ultrasonic waves are focused in the cleaning liquid in the cleaning liquid reservoir is ejected from the ejection port. Therefore, when the diameter of the ultrasonic vibration element is (2d), the distance from the vibration plate to the ejection port is (L), and the wavelength of the ultrasonic wave propagating in the cleaning liquid is (λ), L = 0.1 × (d 2 / λ) to 2.0
An ultrasonic cleaning device characterized by being set in a range of x (d 2 / λ).
徴とする請求項１に記載の超音波洗浄装置。2. The ultrasonic cleaning apparatus according to claim 1, wherein the cleaning liquid reservoir has a cylindrical tubular shape.
あることを特徴とする請求項１に記載の超音波洗浄装
置。3. The ultrasonic cleaning device according to claim 1, wherein the cleaning liquid reservoir has a conical shape that is curved inward.
音波の分散成分が、拡散・減衰され、前記噴射口から噴
出された洗浄液内の超音波音圧の低下が軽減されるよう
に、前記洗浄液溜の内壁面が凹凸を有する面に構成され
ていることを特徴とする請求項１乃至請求項３のいずれ
かに記載の超音波洗浄装置。4. The dispersion component of the ultrasonic wave reflected by the inner wall surface of the cleaning liquid reservoir is diffused / attenuated so that a decrease in the ultrasonic sound pressure in the cleaning liquid ejected from the injection port is reduced. The ultrasonic cleaning device according to any one of claims 1 to 3, wherein the inner wall surface of the cleaning liquid reservoir is formed into a surface having irregularities.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002070072A JP2003266034A (en) | 2002-03-14 | 2002-03-14 | Jet type ultrasonic washing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002070072A JP2003266034A (en) | 2002-03-14 | 2002-03-14 | Jet type ultrasonic washing apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2003266034A true JP2003266034A (en) | 2003-09-24 |
Family
ID=29200742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002070072A Pending JP2003266034A (en) | 2002-03-14 | 2002-03-14 | Jet type ultrasonic washing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003266034A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7934703B2 (en) | 2005-03-11 | 2011-05-03 | Akira Tomono | Mist generator and mist emission rendering apparatus |
| JP2014508633A (en) * | 2010-12-08 | 2014-04-10 | コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ | Method and apparatus for generating droplets over a variable spectrum of particle size |
| CN103831733A (en) * | 2014-02-21 | 2014-06-04 | 山东大学 | Supersonic vibration assisted fluidifying fine grinding material feeding device |
| JP7088461B1 (en) * | 2021-04-16 | 2022-06-21 | 守 笹川 | Ultrasonic cleaner |
-
2002
- 2002-03-14 JP JP2002070072A patent/JP2003266034A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7934703B2 (en) | 2005-03-11 | 2011-05-03 | Akira Tomono | Mist generator and mist emission rendering apparatus |
| JP2014508633A (en) * | 2010-12-08 | 2014-04-10 | コミシリア ア レネルジ アトミック エ オ エナジーズ オルタネティヴズ | Method and apparatus for generating droplets over a variable spectrum of particle size |
| US9943874B2 (en) | 2010-12-08 | 2018-04-17 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method and device for generating droplets over a variable spectrum of particle sizes |
| CN103831733A (en) * | 2014-02-21 | 2014-06-04 | 山东大学 | Supersonic vibration assisted fluidifying fine grinding material feeding device |
| JP7088461B1 (en) * | 2021-04-16 | 2022-06-21 | 守 笹川 | Ultrasonic cleaner |
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