JP4808949B2 - Method for manufacturing a heating element having an embedded heater - Google Patents

Method for manufacturing a heating element having an embedded heater Download PDF

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JP4808949B2
JP4808949B2 JP2004297356A JP2004297356A JP4808949B2 JP 4808949 B2 JP4808949 B2 JP 4808949B2 JP 2004297356 A JP2004297356 A JP 2004297356A JP 2004297356 A JP2004297356 A JP 2004297356A JP 4808949 B2 JP4808949 B2 JP 4808949B2
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groove
heater
sealing
sealing member
heating element
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JP2006114230A (en
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修一 添田
雅広 滑川
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Sukegawa Electric Co Ltd
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本発明は、半導体製造プロセスにおける半導体ウエハの熱処理、液晶ディスプレイやプラズマディスプレイ等の透明基板の板熱処理等に使用される発熱体であって、例えば金属板等の熱拡散用の基材の表面に設けた溝に長尺なヒータを嵌め込み、この溝を封止材により封止した埋込ヒータを有する発熱体を製造する方法に関する。 The present invention is a heating element used for heat treatment of a semiconductor wafer in a semiconductor manufacturing process, plate heat treatment of a transparent substrate such as a liquid crystal display or a plasma display, and the like, for example, on the surface of a base material for heat diffusion such as a metal plate. The present invention relates to a method of manufacturing a heating element having an embedded heater in which a long heater is fitted into a provided groove and the groove is sealed with a sealing material.

半導体製造プロセスにおける半導体ウエハの熱処理、液晶ディスプレイやプラズマディスプレイ等の透明基板の板熱処理等には、前記のような発熱面が或る程度の面積を有する平面となった板状の発熱体が使用される。この種の発熱体は、アルミニウム板等の熱伝導良好な熱拡散用の板材の表面に、所望のパターンで溝を設け、この溝内に長尺なシーズヒータを嵌め込み、その上を別の部材で封止している。   For heat treatment of semiconductor wafers in semiconductor manufacturing processes, plate heat treatment of transparent substrates such as liquid crystal displays and plasma displays, etc., a plate-shaped heating element having a flat surface with a certain heating area as described above is used. Is done. In this type of heating element, a groove is formed in a desired pattern on the surface of a thermal diffusion plate material such as an aluminum plate, and a long sheathed heater is fitted in the groove, and another member is placed thereon. It is sealed with.

このような板状の発熱体としては、例えば、特開２００１−１７６６４５号公報に開示されたものがある。この板状の発熱体は、金属製の板材と、この板材の表面にヒーターパターンを形成する溝と、この溝内に沿って埋設されるシーズヒータ等のフレキシブルヒータと、このフレキシブルヒータを嵌入した溝を覆うように嵌め込まれ、板材に溶着された蓋体とを有するものである。蓋体は予め板材の溝に沿って形成され、この蓋体をフレキシブルヒータを嵌め込んだ溝の開口部に嵌め込み、この蓋体を溝の開口部に電子溶接やビーム溶接等の手段で融着している。   An example of such a plate-like heating element is disclosed in Japanese Patent Application Laid-Open No. 2001-176645. The plate-like heating element is formed by inserting a metal plate material, a groove for forming a heater pattern on the surface of the plate material, a flexible heater such as a sheathed heater embedded in the groove, and the flexible heater. The lid body is fitted so as to cover the groove and welded to the plate material. The lid is formed in advance along the groove of the plate material. The lid is fitted into the opening of the groove into which the flexible heater is fitted, and the lid is fused to the opening of the groove by means such as electron welding or beam welding. is doing.

図５は、このような板状の発熱体の要部断面を示している。板材３１の表面に形成した溝３３にシーズヒータ等からなる長尺なヒータ３２が嵌め込まれ、この状態で溝３３の開口部に蓋体３４が施され、この蓋体３４の縁が板材３１の表面に溶接されている。符号３５は溶接部を示し、この溶接部３５は、溝３３に沿ってその両側に設けられる。   FIG. 5 shows a cross section of the main part of such a plate-like heating element. A long heater 32 made of a sheathed heater or the like is fitted into a groove 33 formed on the surface of the plate material 31, and a lid 34 is applied to the opening of the groove 33 in this state, and the edge of the lid 34 is the edge of the plate material 31. Welded to the surface. Reference numeral 35 denotes a welded portion, and the welded portion 35 is provided along both sides of the groove 33.

前記のような従来の発熱体では、次のような課題があった。第一に、蓋体３４により封止される溝３３の内部に空間が出来、ヒータ３２と板材３１との間に間隙が生じるため、ヒータ３２から板材３１への伝熱効率が悪くなる。第２に、蓋体３４を溝３３の形状に従って板材からレーザカット等の手段により予め切り出さなければならず、部材の歩留まりが悪く、製造に手数もかかる。第三に、蓋体３４をその両側縁で板材３１の溝３３の両側に溶接しなければならず、細いヒータ３２を使用したものでは、細かい溶接作業となり、製造に手数がかかる。第四に、蓋体３４の封止性が悪いため、溝３３の内部に空気等のガスや湿気を保有しやすく、真空中で使用する場合に減圧の障害となることがある。
特開２００１−１７６６４５号公報 特開２００２−３５９０６２号公報 特開平１１−２０４２３９号公報 The conventional heating element as described above has the following problems. First, since a space is formed inside the groove 33 sealed by the lid 34 and a gap is generated between the heater 32 and the plate material 31, the heat transfer efficiency from the heater 32 to the plate material 31 is deteriorated. Secondly, the lid 34 must be cut in advance from the plate material by means of laser cutting or the like according to the shape of the groove 33, resulting in poor member yield and increased manufacturing. Thirdly, the lid body 34 must be welded to both sides of the groove 33 of the plate material 31 at both side edges, and if the thin heater 32 is used, a fine welding operation is required, and manufacturing is troublesome. Fourthly, since the sealing property of the lid 34 is poor, gas such as air and moisture are easily held inside the groove 33, which may cause an obstacle to decompression when used in a vacuum.
JP 2001-176645 A JP 2002-359062 A JP-A-11-204239

本発明は、前記従来の発熱体の製造方法における課題に鑑み、ヒータを基材の表面の溝に密着して埋め込むことが出来ると共に、溝の封止性も良好で、且つ製造も容易な埋込ヒータを有する発熱体の製造方法を提供することを目的とする。 In view of the problems in the conventional method of manufacturing a heating element , the present invention can embed a heater in close contact with a groove on the surface of a base material, has a good groove sealing property, and is easy to manufacture. It aims at providing the manufacturing method of the heat generating body which has a built-in heater.

本発明では、前記の目的を達成するため、長尺なヒータ２を嵌め込んだ溝３の開口部を封止する部材として、可撓性の棒状或いは線状の金属材料を使用し、この部材を摩擦攪拌作用により溶融化し、その後硬化させて固体封止材６として溝３に充填し、封止するようにしたものである。   In the present invention, in order to achieve the above object, a flexible rod-like or linear metal material is used as a member for sealing the opening of the groove 3 into which the long heater 2 is fitted, and this member is used. Is melted by friction stir action and then cured to fill the groove 3 as a solid sealing material 6 and seal it.

すなわち、本発明による埋込ヒータを有する発熱体を製造する方法は、金属素材からなる基材１の表面に溝３を形成し、この溝３に長尺なヒータ２を嵌め込み、溝３の開口部を封止部材で覆うに当たり、底面がほぼ半円筒形であり、幅がヒータ２の径と同じか僅かに広く形成された溝３にヒータ２を嵌め込む工程と、ヒータ２を嵌め込んだ溝３に長尺な金属製の封止用部材４を嵌め込む工程と、この封止用部材４を摩擦しながら攪拌することにより溶融化すると共に、基材１の溝３の両側部分を一部溶融化する工程と、その後溶融した部材を硬化させて固体封止材６として溝３を封止する工程とを有する。 That is, in the method of manufacturing a heating element having an embedded heater according to the present invention, a groove 3 is formed on the surface of a base material 1 made of a metal material, and a long heater 2 is fitted into the groove 3 to open the groove 3. When the portion is covered with the sealing member, the step of fitting the heater 2 into the groove 3 having a substantially semi-cylindrical bottom surface and the width being the same as or slightly wider than the diameter of the heater 2, and the heater 2 was fitted A step of fitting a long metal sealing member 4 into the groove 3 and melting by stirring the sealing member 4 while rubbing, and the both side portions of the groove 3 of the substrate 1 are A step of partially melting, and a step of sealing the groove 3 as the solid sealing material 6 by curing the melted member.

長尺な金属製の封止用部材４が可撓性を有する断面ほぼ円形の長尺な金属部材からなるものを使用する。 封止用部材４を摩擦しながら攪拌する接合ツール７に前後して押えピン８により前記封止用部材４を溝３の中に押えながら封止用部材４を摩擦攪拌しながら攪拌することにより溶融化して溝３に充填した後、硬化させて固体封止材６とする。   The long metal sealing member 4 is made of a long metal member having a substantially circular cross section having flexibility. By agitating the sealing member 4 while frictionally stirring the pressing member 8 while pressing the sealing member 4 into the groove 3 before and after the joining tool 7 which stirs the sealing member 4 while rubbing. After being melted and filled in the groove 3, the solid sealing material 6 is obtained by curing.

このような埋込ヒータを有する発熱体とその製造方法では、ヒータ２を収納した溝３に嵌め込んだ長尺な金属製の封止用部材４を摩擦しながら攪拌することにより溶融化するため、封止用部材４は溝３の断面形状に従って溶融変形し、充填される。このため、硬化した後の固体封止材６は、溝３の形状に倣ったものとなり、溝３の開口部が完全に封止される。   In the heating element having such an embedded heater and its manufacturing method, the long metal sealing member 4 fitted in the groove 3 in which the heater 2 is accommodated is melted by being stirred while being frictioned. The sealing member 4 is melted and deformed according to the cross-sectional shape of the groove 3 and filled. For this reason, the solid encapsulant 6 after being cured follows the shape of the groove 3 and the opening of the groove 3 is completely sealed.

摩擦攪拌接合技術は、通常ピンのような回転する接合ツール７により部材を攪拌し、溶融させながら長尺な部位を移動して加工する技術のため、溝３に嵌め込んだ長尺な封止用部材４を溶融し、溝３に充填するのに最適である。この場合、摩擦攪拌作用により基材１の溝３の両側部分も一部溶融化されるため、その溝３の中に封止用部材４がより容易に充填できる。従って、こうして固体封止材６による封止された溝３の中にヒータ２が隙間無く埋め込まれることになり、ヒータ２から基材１への熱伝達が効率よく行われる。また、溝３の内部に空気等のガスが残留することも無い。   The friction stir welding technique is a technique in which a member is usually stirred by a rotating welding tool 7 such as a pin, and a long part is moved while being melted. Therefore, a long seal fitted in the groove 3 is used. It is optimal for melting the working member 4 and filling the groove 3. In this case, since both side portions of the groove 3 of the base material 1 are partially melted by the friction stirring action, the sealing member 4 can be more easily filled in the groove 3. Therefore, the heater 2 is thus embedded in the groove 3 sealed with the solid sealing material 6 without any gap, and heat transfer from the heater 2 to the base material 1 is efficiently performed. Further, no gas such as air remains in the groove 3.

さらに、摩擦攪拌接合技術を適用することにより、可撓性を有する断面ほぼ円形の長尺な金属部材、すなわち棒状或いは線状の部材を封止用部材４として使用出来るため、板材から封止用部材を切り出す必要も無くなる。このような 封止用部材４を摩擦しながら攪拌する接合ツール７に前後して押えピン８により前記封止用部材４を溝３の中に押えながら封止用部材４を摩擦しながら攪拌して溶融化することにより、封止用部材４を確実に溝３に充填し、固体封止材６を形成することが出来る。   Further, by applying the friction stir welding technique, a long metal member having a substantially circular cross section having flexibility, that is, a rod-like or wire-like member can be used as the sealing member 4. There is no need to cut out the member. The sealing member 4 is agitated while rubbing the sealing member 4 while pressing the sealing member 4 into the groove 3 by pressing the pressing pin 8 before and after the joining tool 7 which stirs the sealing member 4 while rubbing. By being melted, the sealing member 4 can be reliably filled in the groove 3 and the solid sealing material 6 can be formed.

このように、本発明による埋込ヒータを有する発熱体の製造方法では、ヒータ２を基材１の表面の溝３に密着して埋め込むことが出来、溝３の中に空隙が生じない。このため、ヒータ２から基材１への伝熱性が良好となる。また、溝３の封止性も良好である。さらに、板材から封止用部材を切り出す必要も無く、接合ツール７で封止用部材４に沿って加工していくだけでヒータ２を収納した溝３の封止が可能であるため、製造も容易である。 As described above, in the method of manufacturing a heating element having an embedded heater according to the present invention, the heater 2 can be embedded in close contact with the groove 3 on the surface of the substrate 1, and no void is generated in the groove 3. For this reason, the heat transfer from the heater 2 to the base material 1 is good. Moreover, the sealing property of the groove 3 is also good. Furthermore, it is not necessary to cut out a sealing member from the plate material, and the groove 3 containing the heater 2 can be sealed simply by processing the sealing member 4 along the sealing member 4 with the joining tool 7, so that the manufacture is also easy. It is.

本発明では、可撓性の棒状或いは線状の金属材料を使用し、この部材を摩擦攪拌作用により溶融化し、その硬化させて固体封止材６として溝３に充填することにより、ヒータ２を収納した機材１の溝３を封止するようにし、前記の目的を達成するものである。
以下、このような本発明の実施例について、図面を参照しながら具体例を挙げて詳細に説明する。 In the present invention, a flexible rod-shaped or linear metal material is used, and this member is melted by a friction stir action, cured, and filled into the groove 3 as a solid sealing material 6. The groove 3 of the stored equipment 1 is sealed to achieve the above object.
Hereinafter, examples of the present invention will be described in detail with specific examples with reference to the drawings.

先ず図４に示すような基材１を用意する。図４に示す基材１は板状であり、アルミニウム、銅、ステンレス等の熱伝導良好な金属からなるものである。
この基材１の表面にヒータ２を埋め込むための溝３を形成する。この溝３は、基材１にヒータ２を配置しようとするパターンに従って形成することは言うまでもない。溝３の底面はほぼ半円筒形であり、その溝３の幅はヒータ２の径と同じか僅かに広くする。 First, a substrate 1 as shown in FIG. 4 is prepared. The substrate 1 shown in FIG. 4 has a plate shape and is made of a metal having good thermal conductivity such as aluminum, copper, and stainless steel.
A groove 3 for embedding the heater 2 is formed on the surface of the substrate 1. Needless to say, the groove 3 is formed in accordance with a pattern in which the heater 2 is to be disposed on the substrate 1. The bottom surface of the groove 3 is substantially semi-cylindrical, and the width of the groove 3 is the same as or slightly wider than the diameter of the heater 2.

ヒータ２としては、シースヒータを使用する。シースヒータは、ステンレス等からなる長尺なチューブ状のシースの中にヒータ線を収納し、ヒータ線とシースとの間にマグネシア粉末等の熱的、化学的に安定した無機絶縁粉末を充填したものである。シースの中にヒータ線を１本だけ収納した単芯ヒータ、シースの中にヒータ線を２本以上収納した複芯ヒータ、その何れも適用することが出来る。このヒータ２は、図４に示すように、それを基材１に配置するパターン、すなわち前記溝３と同じパターンで予め曲げておく。   A sheath heater is used as the heater 2. The sheath heater is a long tube-shaped sheath made of stainless steel, etc., in which the heater wire is stored, and between the heater wire and the sheath, a thermally and chemically stable inorganic insulating powder such as magnesia powder is filled. It is. A single-core heater in which only one heater wire is accommodated in the sheath, and a multi-core heater in which two or more heater wires are accommodated in the sheath can be applied. As shown in FIG. 4, the heater 2 is bent in advance in a pattern in which the heater 2 is arranged on the substrate 1, that is, the same pattern as the groove 3.

封止用部材４は、長尺な金属材料を使用し、基本的には基材１と同じ材料、すなわちアルミニウム、銅、ステンレス等からなるものである。この封止用部材４の断面形状は特に限定されないが、一般的には断面がほぼ円形の棒状または線状のものを使用する。こうすることにより、一般的な棒材や線材を使用することが可能である。封止用部材４の径は、前記ヒータ２と同程度が一般的であるが、溝３の深さにより適宜の径のものを使用する。この封止用部材４もまた、図４に示すように、ヒータ２を基材１に配置するパターン、すなわち前記溝３と同じパターンで予め曲げておく。   The sealing member 4 uses a long metal material, and is basically made of the same material as that of the base material 1, that is, aluminum, copper, stainless steel or the like. The cross-sectional shape of the sealing member 4 is not particularly limited, but generally a rod-like or linear shape having a substantially circular cross-section is used. By doing so, it is possible to use a general bar or wire. The diameter of the sealing member 4 is generally the same as that of the heater 2, but an appropriate diameter is used depending on the depth of the groove 3. As shown in FIG. 4, the sealing member 4 is also bent in advance in a pattern in which the heater 2 is arranged on the substrate 1, that is, in the same pattern as the groove 3.

次に、図２及び図３に示すように、基材１の溝３の中にヒータ２を嵌め込んで収納する。ヒータ２は、溝３の底いっぱいに嵌め込む。さらに、この溝３の中に収めたヒータ２の上に載せるようにして溝３の中に封止用部材４を嵌め込んで収納する。
その後、摩擦攪拌接合により、封止用部材４と基材１の溝３の開口部とを接合する。「摩擦攪拌接合」とは、被加工物を溶融せずに固相で接合する方法の一つであり、被加工物より硬い材質で作られた接合ツールを、二つの被加工物の接合部に回転させながら圧入し、接合方向に沿って移動させて、接合ツールの回転によって生ずる摩擦攪拌現象を利用して接合する方法である。 Next, as shown in FIGS. 2 and 3, the heater 2 is fitted into the groove 3 of the substrate 1 and stored. The heater 2 is fitted to the entire bottom of the groove 3. Further, the sealing member 4 is fitted and accommodated in the groove 3 so as to be placed on the heater 2 accommodated in the groove 3.
Thereafter, the sealing member 4 and the opening of the groove 3 of the substrate 1 are joined by friction stir welding. “Friction stir welding” is a method of joining workpieces in a solid phase without melting them. Joining tools made of materials harder than the workpieces are used to join the two workpieces. In this method, press-fitting is performed while rotating, and the workpiece is moved along the joining direction, and joining is performed using a friction stir phenomenon caused by rotation of the joining tool.

摩擦攪拌接合機の接合ヘッド５に設けた接合ツール７で封止用部材４と基材１の溝３の開口部とを摩擦攪拌しながら攪拌して溶融化することにより、同封止用部材４を溝３に充填し、溝３を封止する。接合ツール７は、高速回転するピン状のツールであり、この接合ツール７を封止用部材４に沿って移動させながら、封止用部材４と基材１の溝３の開口部とを摩擦攪拌しながら溝３の封止を行う。   The sealing member 4 and the opening of the groove 3 of the base material 1 are stirred and melted with the welding tool 7 provided on the bonding head 5 of the friction stir welding machine while being frictionally stirred. Is filled in the groove 3 to seal the groove 3. The joining tool 7 is a pin-shaped tool that rotates at a high speed. While the joining tool 7 is moved along the sealing member 4, the sealing member 4 and the opening of the groove 3 of the substrate 1 are rubbed. The groove 3 is sealed while stirring.

この場合は、図２に示すように、接合ツール７と前後して押えピン８により前記封止用部材４を溝３の中に押えながら封止用部材４と基材１の溝３の開口部とを摩擦しながら攪拌することにより、封止用部材４を溝３に充填する。押えピン８の役目からして、押えピン８は、接合ツール７のごく手前で先行する如く封止用部材４をトレースして押さえるようにするのが適当である。   In this case, as shown in FIG. 2, the opening of the sealing member 4 and the groove 3 of the base material 1 while pressing the sealing member 4 into the groove 3 by the pressing pin 8 before and after the joining tool 7. The groove 3 is filled with the sealing member 4 by stirring while rubbing against the part. In view of the role of the presser pin 8, it is appropriate that the presser pin 8 traces and holds the sealing member 4 so as to precede the joining tool 7.

図１は、摩擦攪拌接合により基材１の溝３が固体封止材６で封止された状態である。この状態では、基材１の溝３の開口部が一部溶融して広がると共に、断面円形であった封止用部材４は溶融して溝３の開口部を閉じる格好で溝３内に充填される。図１では、基材１と固体封止材６との間に界面があり、別個の部材の如く示されているが、実際は、基材１と固体封止材６とが同じ材料であるため、混然と一体化し、固相接合されることになる。また、基材１と固体封止材６とが別の材料であっても同様である。   FIG. 1 shows a state in which the groove 3 of the substrate 1 is sealed with a solid sealing material 6 by friction stir welding. In this state, the opening of the groove 3 of the base material 1 is partially melted and spreads, and the sealing member 4 having a circular cross section is melted and filled in the groove 3 so as to close the opening of the groove 3. Is done. In FIG. 1, there is an interface between the base material 1 and the solid sealing material 6, and it is shown as a separate member. However, actually, the base material 1 and the solid sealing material 6 are the same material. , It will be mixed together and solid-phase bonded. The same applies even if the base material 1 and the solid sealing material 6 are different materials.

この図１に示されたように、摩擦攪拌接合により基材１の溝３が固体封止材６で封止された状態では、ヒータ２が基材１の溝３の底部に密着して固定されると共に、固体封止材６が基材１の溝３のヒータ２の上に部分、すなわち溝３の開口部を隙間無く覆う。従って、溝３の中には空隙は形成されない。   As shown in FIG. 1, in a state where the groove 3 of the base material 1 is sealed with the solid sealing material 6 by friction stir welding, the heater 2 is fixed in close contact with the bottom of the groove 3 of the base material 1. At the same time, the solid sealing material 6 covers a portion on the heater 2 of the groove 3 of the substrate 1, that is, the opening of the groove 3 without a gap. Accordingly, no gap is formed in the groove 3.

本発明による埋込ヒータを有する発熱体の一実施例を溝と直交する方向に断面して示した要部断面図である。It is principal part sectional drawing which carried out the cross section of one Example of the heat generating body which has the embedded heater by this invention in the direction orthogonal to a groove | channel. 本発明による埋込ヒータを有する発熱体の製造方法の一実施例を溝に沿って断面して示した要部断面図である。It is principal part sectional drawing which carried out the cross-section and showed one Example of the manufacturing method of the heat generating body which has the embedded heater by this invention. 本発明による埋込ヒータを有する発熱体の製造方法の一実施例を溝と直交する方向に断面して示した要部断面図である。It is principal part sectional drawing which carried out the cross section in the direction orthogonal to a groove | channel, and showed one Example of the manufacturing method of the heat generating body which has the embedded heater by this invention. 本発明による埋込ヒータを有する発熱体の一実施例の構成部材を示した分解斜視図である。It is the disassembled perspective view which showed the structural member of one Example of the heat generating body which has the embedded heater by this invention. 従来の埋込ヒータを有する発熱体の一例を溝と直交する方向に断面して示した要部断面図である。It is principal part sectional drawing which cut and showed an example of the heat generating body which has the conventional embedded heater in the direction orthogonal to a groove | channel.

符号の説明Explanation of symbols

１ 基材
２ ヒータ
３ 基材の溝
４ 封止用部材
５ 摩擦攪拌接合機の接合ヘッド
６ 固体封止材
７ 摩擦攪拌接合機の接合ツール
８ 摩擦攪拌接合機の押えピン DESCRIPTION OF SYMBOLS 1 Base material 2 Heater 3 Base material groove | channel 4 Sealing member 5 Joining head 6 of friction stir welding machine Solid sealing material 7 Joining tool 8 of friction stir welding machine Pressing pin of friction stir welding machine

Claims (2)

金属素材からなる基材（１）の表面に溝（３）を形成し、この溝（３）に長尺なヒータ（２）を嵌め込み、溝（３）の開口部を封止材で覆うことにより埋込ヒータを有する発熱体を製造する方法において、底面がほぼ半円筒形であり、幅がヒータ（２）の径と同じか僅かに広く形成された溝（３）にヒータ（２）を嵌め込む工程と、ヒータ（２）を嵌め込んだ溝（３）に可撓性を有する断面ほぼ円形の長尺な金属部材からなる封止用部材（４）を嵌め込む工程と、この封止用部材（４）を摩擦しながら攪拌することにより溶融化すると共に、基材（１）の溝（３）の両側部分を一部溶融化する工程と、その後溶融した部材を硬化させて固体封止材（６）として溝（３）を封止する工程とを有することを特徴とする埋込ヒータを有する発熱体の製造方法。 A groove (3) is formed on the surface of the base material (1) made of a metal material, a long heater (2) is fitted into the groove (3), and the opening of the groove (3) is covered with a sealing material. In the method of manufacturing a heating element having an embedded heater, the heater (2) is formed in a groove (3) having a substantially semi-cylindrical bottom surface and a width that is the same as or slightly wider than the diameter of the heater (2). A step of fitting, a step of fitting a sealing member (4) made of a long metal member having a substantially circular cross section having flexibility into the groove (3) in which the heater (2) is fitted, and this sealing while it melted by stirring while rubbing the use member (4), cured and a step of partially melting the side portions of the groove (3) of the substrate (1), then melted member solid sealing A heating element having an embedded heater, characterized by having a step of sealing the groove (3) as a stopper (6) Production method. 封止用部材（４）を摩擦しながら攪拌する接合ツール（７）に前後して押えピン（８）により封止用部材（４）を溝（３）の中に押えながら封止用部材（４）を摩擦攪拌することを特徴とする請求項１に記載の埋込ヒータを有する発熱体の製造方法。 Before and after the joining tool (7) that stirs the sealing member (4) while rubbing the sealing member (4), the sealing member (4) is pressed into the groove (3) by the presser pin (8). The method for producing a heating element having an embedded heater according to claim 1 , wherein 4) is frictionally stirred.
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US20070090516A1 (en) * 2005-10-18 2007-04-26 Applied Materials, Inc. Heated substrate support and method of fabricating same
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JP5590206B2 (en) * 2013-09-20 2014-09-17 日本軽金属株式会社 Manufacturing method of heat transfer plate
JP5772920B2 (en) * 2013-10-24 2015-09-02 日本軽金属株式会社 Manufacturing method of heat transfer plate
JP5857081B2 (en) * 2014-02-17 2016-02-10 助川電気工業株式会社 Manufacturing method of substrate heating plate heater

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5947995U (en) * 1982-09-22 1984-03-30 株式会社岡崎製作所 High temperature/uniform block heater
JPH11104860A (en) * 1997-10-01 1999-04-20 Showa Alum Corp Method for friction stirring joining and device therefor
JPH11204239A (en) * 1998-01-12 1999-07-30 Fuji Electric Corp Res & Dev Ltd Plate type heater, its manufacture and thin film manufacturing device
JP2000113967A (en) * 1998-10-05 2000-04-21 Sakaguchi Dennetsu Kk Plate heater
JP2001176645A (en) * 1999-12-21 2001-06-29 Keihin Sokki Kk Heater plate and its manufacturing method
JP4385533B2 (en) * 2001-03-02 2009-12-16 日本軽金属株式会社 Manufacturing method of heat plate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150056717A (en) * 2013-11-15 2015-05-27 재단법인 포항산업과학연구원 Device for manufacturing welded heating cintainer
KR102109557B1 (en) * 2013-11-15 2020-05-13 재단법인 포항산업과학연구원 Device for manufacturing welded heating cintainer

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