JP4806777B2 - 流体制御デバイス - Google Patents
流体制御デバイス Download PDFInfo
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- JP4806777B2 JP4806777B2 JP2007525519A JP2007525519A JP4806777B2 JP 4806777 B2 JP4806777 B2 JP 4806777B2 JP 2007525519 A JP2007525519 A JP 2007525519A JP 2007525519 A JP2007525519 A JP 2007525519A JP 4806777 B2 JP4806777 B2 JP 4806777B2
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Description
前記可動部及び前記固定部の相対位置に関し、可動部回転時の作動位置と、光造形時の造形位置とが予め設定され、
前記固定部及び可動部は、造形後に前記可動部が前記固定部の案内で前記作動位置に移動可能であるように、前記造形位置において光造形法で造形されることを特徴とする流体制御デバイスの製造方法を提供する。
単一のレーザー光を複数の前記可動部に選択的に照射して光トラッピングし、レーザー光の集光点の移動によって前記可動部を回転させるとともに、各可動部を光トラッピングする時間を制御し、複数の前記可動部を回転させることを特徴とする流体制御デバイスの作動方法を提供する。
空間光変調素子を用いて複数の焦点を複数の前記可動部に夫々形成するようにレーザー光を前記可動部に照射し、レーザー光の集光点の移動によって複数の前記可動部を同時に独立駆動することを特徴とする流体制御デバイスの作動方法を提供する。
前記可動部及び前記固定部の相対位置に関し、可動部作動時の作動位置と、光造形時の造形位置とが予め設定され、
第1固定部及び第1可動部は、造形後に第1可動部が第1固定部の案内によって前記作動位置に移動可能であるように、前記造形位置において光造形法で造形され、
前記第1可動部と近接又は係合する第2可動部と、第2可動部を回転可能に支持する第2固定部とが、第1固定部及び第1可動部と実質的に同時に光造形法で造形されることを特徴とする微小構造体の製造方法を更に提供する。
前記可動部及び前記固定部の相対位置に関し、可動部作動時の作動位置と、光造形時の造形位置とが予め設定され、
第1固定部及び第1可動部は、造形後に第1可動部が第1固定部の案内によって前記作動位置に移動可能であるように、前記造形位置において光造形法で造形され、
前記第1可動部と近接又は係合する第2可動部と、第2可動部を回転可能に支持する第2固定部とが、第1固定部及び第1可動部と実質的に同時に光造形法で造形されることを特徴とする微小構造体の製造方法を更に提供する。
P(回転体12の間の間隔):0.7μm(局部的には0.2 〜0.3μm)
C(開口15と固定軸11の間の間隔):0.6μm
P(回転体12の間の間隔):0.7μm
C(開口15と固定軸11の間の間隔):0.6μm
H(固定軸11の軸部の長さ):12μm
h(固定軸11及び回転体12の面外クリアランス):2μm
2 ガラス基板
3 光重合体
4 マイクロチップ
6 マイクロセパレータ
7 マイクロピンセット
8 マイクロバルブ
10 マイクロポンプ
11 固定軸
12 回転体
21 流路壁
22 ポンプハウジング
23 流路
50 駆動システム
L レーザー光
S 集光スポット
h 距離(面外クリアランス)
Claims (15)
- 光駆動可能な可動部と、該可動部を回転可能に支持する固定部とを含む微小構造体を光重合性樹脂の光造形によって造形する微小構造体の製造方法において、
前記可動部及び前記固定部の相対位置に関し、可動部作動時の作動位置と、光造形時の造形位置とが予め設定され、
第1固定部及び第1可動部は、造形後に第1可動部が第1固定部の案内によって前記作動位置に移動可能であるように、前記造形位置において光造形法で造形され、
前記第1可動部と近接又は係合する第2可動部と、第2可動部を回転可能に支持する第2固定部とが、第1固定部及び第1可動部と実質的に同時に光造形法で造形されることを特徴とする微小構造体の製造方法。 - 前記固定部は、マイクロチップ又はバイオチップの流路を構成する流路壁又は基板に固定され、前記可動部は、各固定部に回転可能に夫々支承され、少なくとも一つの前記可動部は、レーザー光の照射による遠隔操作によって回転して前記流路内の流体を輸送するために、近接する前記可動部と協働して流路の容積変化又は変形を生じさせるように形成されることを特徴とする請求項1に記載の製造方法。
- マイクロチップ又はバイオチップの流路に配置され、光駆動可能な可動部と、該可動部を回転可能に支承する固定部とを有し、前記可動部及び固定部は、光造形法によって前記流路内に造形した光重合性樹脂の光重合体からなり、複数の前記固定部が、前記流路を構成する流路壁又は基板に固定され、複数の前記可動部が、各固定部に回転可能に夫々支承され、少なくとも一つの前記可動部は、レーザー光の照射による遠隔操作によって回転し、前記流路内の流体を輸送するように、近接する前記可動部と協働して流路の容積変化又は変形を生じさせる流体制御デバイスを製造する流体制御デバイスの製造方法において、
前記可動部及び前記固定部の相対位置に関し、可動部回転時の作動位置と、光造形時の造形位置とが予め設定され、
前記固定部及び可動部は、造形後に前記可動部が前記固定部の案内で前記作動位置に移動可能であるように、前記造形位置において光造形法で造形されることを特徴とする流体制御デバイスの製造方法。 - 前記固定部は、前記流路壁又は基板から流路内に突出する円形断面の固定軸からなり、前記可動部は、前記固定軸が貫通可能な円形開口を備えた回転体からなり、該回転体は、前記固定軸の中心軸線を中心に回転可能に該固定軸に支承され、マイクロポンプのロータを構成することを特徴とする請求項3に記載の製造方法。
- 前記回転体は、ローブ形輪郭を有することを特徴とする請求項4に記載の製造方法。
- 前記回転体の周囲の流路壁によって、該回転体を収容するマイクロポンプのポンプハウジングが形成されることを特徴とする請求項4又は5に記載の製造方法。
- 前記流路は、光重合性樹脂の光造形によって基板上に造形された光重合体からなることを特徴とする請求項3乃至6のいずれか1項に記載の製造方法。
- 前記回転体の最大直径は、100μm以下に設定されることを特徴とする請求項4乃至6のいずれか1項に記載の製造方法。
- 前記回転体と前記流路壁との間の間隔は、3μm以下に設定されることを特徴とする請求項4乃至6のいずれか1項に記載の製造方法。
- 前記回転体の相互間隔は、2μm以下に設定されることを特徴とする請求項4乃至6のいずれか1項に記載の製造方法。
- 前記可動部は、光トラッピングによって前記造形位置から前記作動位置に移動されることを特徴とする請求項3に記載の製造方法。
- 第1固定部及び第1可動部は、造形後に第1可動部が第1固定部の案内によって前記作動位置に移動可能であるように、前記造形位置において光造形法で造形され、
前記第2可動部及び第2固定部は、第1固定部及び第1可動部と実質的に同時に前記作動位置において光造形法で造形されることを特徴とする請求項3又は11に記載の製造方法。 - 前記第1可動部は、光トラッピングによって前記造形位置から前記作動位置に移動されることを特徴とする請求項1に記載の製造方法。
- 前記第2固定部及び第2可動部は、前記作動位置において造形されることを特徴とする請求項1又は13に記載の製造方法。
- 請求項1又は3に記載された製造方法に従って製造された流体制御デバイスの作動方法であって、
空間光変調素子を用いて複数の焦点を複数の前記可動部に夫々形成するようにレーザー光を前記可動部に照射し、レーザー光の集光点の移動によって複数の前記可動部を同時に独立駆動することを特徴とする流体制御デバイスの作動方法。
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