JP4796888B2 - Group management system, process information management apparatus and program - Google Patents

Description

  The present invention relates to, for example, a group management system including two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the control device. It is.

  2. Description of the Related Art Conventionally, there is a group management system that controls a plurality of processing apparatuses for processing a substrate to be processed such as a semiconductor wafer under unified management, and improves the maintainability of the entire manufacturing system (see Patent Document 1). . This group management system performs analysis processing of all process data obtained from each processing device, including centralized management of recipes (process condition values) for each processing device and process control of each processing device based on the recipe. This system connects an AGC (advanced group controller) that performs centralized monitoring processing of analysis results and process data, and further processing of reflecting analysis / statistic results in a recipe. In this group management system, all process data obtained from each processing device and the analysis result thereof can be monitored, so that the abnormality and deterioration state of the processing device can be discovered in more detail and at an early stage.

In addition, the process information management device of a commercially available group management system has a function of synchronizing and holding recipes of semiconductor manufacturing devices (including control devices) to be managed. This synchronization is performed via a network between the process information management apparatus and the semiconductor manufacturing apparatus. In addition, this function makes it possible to refer to and update the recipe of the semiconductor manufacturing apparatus from the process information management apparatus.
Japanese Patent Laid-Open No. 11-16797 (first page, FIG. 1 etc.)

  However, in the conventional group management system, when the process information management apparatus and the semiconductor manufacturing apparatus are in an off-line state, the recipe of the semiconductor manufacturing apparatus cannot be referred to or copied. Therefore, there is a problem that a recipe between an offline semiconductor manufacturing apparatus and another semiconductor manufacturing apparatus cannot be compared and a recipe copy of the offline semiconductor manufacturing apparatus cannot be laterally expanded to another semiconductor manufacturing apparatus. That is, in the conventional group management system, the recipe cannot be used for reference or copying while ensuring consistency of the recipe between the process information management apparatus and the semiconductor manufacturing apparatus.

  In order to solve this problem, the present invention enables only the recipe of the online semiconductor manufacturing apparatus to be edited and referred to by the process information management apparatus, and allows the recipe of the offline semiconductor manufacturing apparatus to be referred to only by the process information management apparatus. With the goal.

  The group management system of the first invention includes two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the two or more control devices. The control device includes a control device side recipe storage unit storing a recipe used for controlling the processing device, and a recipe stored in the control device side recipe storage unit. And a control unit that controls the processing apparatus and executes a predetermined process on the substrate to be processed. The process information management apparatus includes two or more recipes held by the two or more control apparatuses. Management device side recipe storage unit stored in association with each of the two or more control devices, and management device side change for receiving a change instruction to change the recipe in the management device side recipe storage unit An attachment unit, a management device-side output receiving unit that receives an output instruction for outputting a recipe in the management device-side recipe storage unit, a control device corresponding to a recipe for the change instruction or / and the output instruction, and a process information management device A determination unit that determines whether or not communication is possible; a management device-side recipe change unit that changes a recipe in the management device-side recipe storage unit according to a change instruction received by the management device-side change reception unit; In response to the output instruction received by the management device side output reception unit, the output unit outputs an recipe of the management device side recipe storage unit, and when the determination unit determines that communication is not possible, It is a group management system that can output, but cannot change the recipe.

  With this configuration, only the recipe of the online control device can be edited and referenced by the process information management device, and the recipe of the offline control device can only be referenced by the process information management device. As a result, the recipe can be effectively used while ensuring consistency of the recipe between the control device and the process information management device.

  Further, in the group management system of the second aspect of the present invention, in contrast to the first aspect of the invention, the control device includes a control device side change receiving unit that receives a recipe change instruction in the control device side recipe storage unit, and the control In response to the change instruction received by the device-side change accepting unit, when the control device-side recipe changing unit that changes the recipe in the control device-side recipe storage unit and the control device-side recipe changing unit changes the recipe, The control device side recipe transmitting unit that transmits the changed recipe to the process information management device, the control device side recipe receiving unit that receives the recipe from the process information management device, and the recipe received by the control device side recipe receiving unit. The apparatus further includes a control device-side recipe storage unit that accumulates in the control device-side recipe storage unit, and the process information management device is configured such that the management device-side recipe change unit changes the recipe. The management device side recipe transmission unit that transmits the changed recipe to the control device corresponding to the recipe, the management device side recipe reception unit that receives the recipe from the control device, and the management device side recipe reception unit. Is a group management system further comprising a management device-side recipe storage unit that stores the received recipe in the management device-side recipe storage unit.

  With this configuration, only the recipe of the online control device can be edited and referenced by the process information management device, and the recipe of the offline control device can only be referenced by the process information management device. Furthermore, the consistency of the recipe can be strictly guaranteed by transmitting and receiving the recipes changed by the control device or the process information management device.

  The group management system according to the third aspect of the invention determines that the determination unit is not communicable with respect to either the first or second aspect of the invention, and the management device side output reception unit has received an output instruction. In this case, the output unit is a group management system that outputs information indicating that the control device corresponding to the recipe and the process information management device cannot communicate with each other.

  With this configuration, the user can easily determine that the control device is offline, and as a result, the user can refer to the recipe while assuming that consistency between the control device and the recipe may not be ensured.

  The group management system according to the fourth aspect of the present invention is the process information management device according to any one of the first to third aspects, wherein the management device-side recipe change unit is configured by the recipe stored in the management device-side recipe storage unit. A history management unit that accumulates information about the recipe before the change of the recipe, and the output unit outputs the latest recipe among the corresponding recipes according to the output instruction. It is a management system.

  With this configuration, the latest recipe can be referred to after managing the history of the recipe.

  According to the group management system of the present invention, the recipe of the offline control device can also be referred to by the process information management device.

Hereinafter, embodiments of a group management system and the like will be described with reference to the drawings. In addition, since the component which attached | subjected the same code | symbol in embodiment performs the same operation | movement, description may be abbreviate | omitted again.
(Embodiment)

  FIG. 1 is a conceptual diagram of a group management system in the present embodiment. The group management system is a system that controls a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. In addition, the group management system includes one or more processing devices 11 (processing device 11 (1) to processing device 11 (n)) and one or more control devices 12 (control device 12 (1) to control device 12 (n)). And a process information management device 13 and a client device 14.

  The processing apparatus 11 is an apparatus that performs a predetermined process on a substrate to be processed. More specifically, the processing apparatus 11 is a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. The processing apparatus 11 performs various processes on the substrate to be processed such as a film forming process, an etching process, and a thermal oxidation process. The processing apparatus 11 is, for example, a composite process type semiconductor wafer manufacturing apparatus. An example of this semiconductor wafer manufacturing apparatus is shown in FIG. As shown in FIG. 2, the semiconductor wafer manufacturing apparatus includes a plurality of (for example, three) process chambers 1 that perform various processes, such as a film forming process, an etching process, and a thermal oxidation process, on a semiconductor wafer. 2, 3, between cassette chambers 4, 5 that accommodate cassettes C 1, C 2 that can accommodate a large number (for example, 50) of wafers W, and between process chambers 1, 2, 3 and cassette chambers 4, 5 And a transfer chamber 6 for transferring the wafer W. The chambers are connected via a gate valve G so as to be freely opened and closed. In the transfer chamber 6, for example, an articulated transfer arm 7 capable of bending and extending and rotating is provided, and the transfer arm 7 transfers the wafer W between the chambers. The cassettes C1 and C2 are turned 90 degrees when taken into the cassette chambers 4 and 5, and the wafer insertion / removal ports of the cassettes C1 and C2 are rotated so as to face the center in the transfer chamber 6, thereby transferring the transfer arms 7 Is installed in a posture in which the wafer W can be taken in and out.

  The control device 12 is a device that controls the processing device 11 and is usually provided corresponding to the processing device 11. The control device 12 stores a recipe (usually a set of process condition values) that is information relating to a predetermined process for the substrate to be processed, and controls the processing device 11 using the recipe. The control device 12 includes, for example, an ECC control unit that is a higher-level control system of each processing device 11 and an MC (machine controller) that is a lower-level control system of each processing device 11. In such a case, the ECC control unit has, for example, a RAP (Remote Agent Process) that is a logical interface unit with the process information management apparatus 13, and various data are exchanged with the process information management apparatus 13 by this RAP. Transmission / reception is performed. The processing device 11 and the control device 12 may be integrated or separated.

  The process information management device 13 is, for example, a server device that constitutes a so-called group management system.

  In addition, the client device 14 issues various requests to the process information management device 13 and receives the processing results in the process information management device 13.

  FIG. 3 is a block diagram of the group management system in the present embodiment. The group management system includes a processing device 11, a control device 12, a process information management device 13, and a client device 14. In FIG. 3, there are a plurality of sets of processing devices 11 and control devices 12.

  The control device 12 includes a control device side recipe storage unit 1201, a control unit 1202, a control device side change receiving unit 1203, a control device side recipe changing unit 1204, a control device side recipe sending unit 1205, a control device side recipe receiving unit 1206, a control An apparatus-side recipe storage unit 1207 is provided.

  The process information management device 13 includes a management device-side recipe storage unit 1301, a management device-side change reception unit 1302, a management device-side output reception unit 1303, a management device-side recipe change unit 1304, a management device-side recipe transmission unit 1305, and a management device side. A recipe receiving unit 1306, a management apparatus-side recipe storage unit 1307, a determination unit 1308, an output unit 1309, and a history management unit 1310 are provided.

  The client device 14 includes an instruction input receiving unit 141, an instruction sending unit 142, an information receiving unit 143, and an information display unit 144.

  The control device-side recipe storage unit 1201 stores a recipe used to control the processing device 11 connected to the control device 12. The control device-side recipe storage unit 1201 is preferably a nonvolatile recording medium, but can also be realized by a volatile recording medium.

  The control unit 1202 reads the recipe in the control device-side recipe storage unit 1201 and uses the recipe to control the processing apparatus 11 to execute a predetermined process on the substrate to be processed. The control unit 1202 can usually be realized by an MPU, a memory, or the like. The processing procedure of the control unit 1202 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The control device side change acceptance unit 1203 accepts a recipe change instruction in the control device side recipe storage unit 1201. The change instruction usually includes an instruction for instructing the change and the content of the change. The change instruction input means may be anything such as a numeric keypad, a keyboard, a mouse, or a menu screen. The control device side change accepting unit 1203 can be realized by a device driver of an input unit such as a numeric keypad or a keyboard, control software for a menu screen, or the like.

  The control device-side recipe changing unit 1204 changes the recipe in the control device-side recipe storage unit 1201 in accordance with the change instruction received by the control device-side change receiving unit 1203. Note that the content of the change included in the change instruction does not matter. The control device-side recipe changing unit 1204 can usually be realized by an MPU, a memory, or the like. The processing procedure of the control device-side recipe changing unit 1204 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  When the control device side recipe changing unit 1204 changes the recipe, the control device side recipe transmitting unit 1205 transmits the changed recipe to the process information management device 13. The reason why the control device-side recipe transmission unit 1205 transmits the changed recipe to the process information management device 13 is to ensure consistency between the recipe of the control device 12 and the recipe of the process information management device 13. Note that the control device-side recipe transmission unit 1205 may read the recipe in the control device-side recipe storage unit 1201 and transmit it to the process information management device 13 when communication with the process information management device 13 becomes possible for the first time. The control device-side recipe transmission unit 1205 can be realized by a wireless or wired communication unit or the like.

  The control device-side recipe receiving unit 1206 receives a recipe from the process information management device 13. The control device-side recipe receiving unit 1206 normally receives the changed recipe when the recipe is changed by the process information management device 13. The control device-side recipe receiving unit 1206 can be realized by a wireless or wired communication unit or the like.

  The control device side recipe storage unit 1207 stores the recipe received by the control device side recipe receiving unit 1206 in the control device side recipe storage unit 1201. By this accumulation process, consistency between the recipe of the control device 12 and the recipe of the process information management device 13 is ensured. The control device-side recipe storage unit 1207 can be usually realized by an MPU, a memory, or the like. The processing procedure of the control device-side recipe storage unit 1207 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The management device-side recipe storage unit 1301 stores two or more recipes held by two or more control devices 12 in association with two or more control devices 12, respectively. The management device-side recipe storage unit 1301 has, for example, a control device ID for identifying the control device 12, information that associates an IP address with a recipe name, and stores a recipe. The management device-side recipe storage unit 1301 is preferably a nonvolatile recording medium, but can also be realized by a volatile recording medium.

  The management apparatus side change accepting unit 1302 accepts a recipe change instruction in the management apparatus side recipe storage unit 1301. Here, accepting is, for example, receiving a change instruction from the client device 14. Further, the acceptance may be acceptance of a change instruction from the user using a numeric keypad, a keyboard, a mouse, or a menu screen. The management apparatus side change accepting unit 1302 can be realized by a wireless or wired receiving unit, a device driver of an input unit such as a numeric keypad or a keyboard, a menu screen control software, or the like.

  The management apparatus side output receiving unit 1303 receives an output instruction for outputting a recipe. The reception here is also reception from the client device 14, input reception from the user through a keyboard or a menu screen, and the like, similar to the reception in the management device side change reception unit 1302. The management apparatus side output receiving unit 1303 can be realized by a wireless or wired receiving unit, a device driver of an input unit such as a numeric keypad or a keyboard, control software for a menu screen, and the like. Needless to say, the management device side change receiving unit 1302 and the management device side output receiving unit 1303 may be realized by a single physical means.

  The management device side recipe change unit 1304 changes the recipe in the management device side recipe storage unit 1301 in accordance with the change instruction received by the management device side change reception unit 1302. When the determination unit 1308 determines that the control device corresponding to the recipe corresponding to the change instruction or / and the output instruction and the process information management device can communicate with each other, the management device-side recipe change unit 1304 Changes the recipe stored in the management device-side recipe storage unit 1301 in accordance with the change instruction received. Normally, the change instruction has a recipe identifier for identifying the recipe to be changed and information on the contents of the change. Note that the management apparatus-side change receiving unit 1302 does not need to receive the recipe identifier for identifying the recipe to be changed and the information on the content of the change at the same time. The management device-side recipe change unit 1304 cannot change the recipe when the determination unit 1308 determines that the control device corresponding to the recipe corresponding to the change instruction or / and the output instruction cannot communicate with the process information management device. The management apparatus-side recipe changing unit 1304 can be usually realized by an MPU, a memory, or the like. The processing procedure of the management apparatus-side recipe changing unit 1304 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  When the management device-side recipe change unit 1304 changes the recipe, the management device-side recipe transmission unit 1305 transmits the changed recipe to the control device 12 corresponding to the recipe. The order of the recipe transmission process by the management apparatus-side recipe transmission unit 1305 and the recipe change process by the management apparatus-side recipe change unit 1304 are not limited. The management apparatus-side recipe transmission unit 1305 can be realized by a wireless or wired communication unit or the like.

  The management device side recipe receiving unit 1306 receives a recipe from the control device 12. The management device-side recipe receiving unit 1306 can be realized by a wireless or wired communication unit or the like.

  The management device-side recipe storage unit 1307 stores the recipe received by the management device-side recipe reception unit 1306 in the management device-side recipe storage unit 1301. When the management device-side recipe storage unit 1307 receives the management device-side recipe reception unit 1306, the management device-side recipe storage unit 1307 does not simply store the received recipe, but stores the recipe history management processing as performed by the history management unit 1310 described later. It is preferable to carry out. The history management process is a process for making it possible to acquire both the pre-update recipe and the updated recipe, and may be a process (difference management) in which information on the updated part is added, or an updated recipe. It is also possible to add all the information of the above, or to store all of the updated recipe information and the difference information between the updated and updated recipes. The management apparatus-side recipe storage unit 1307 can be normally realized by an MPU, a memory, or the like. The processing procedure of the management apparatus-side recipe storage unit 1307 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The determination unit 1308 determines whether or not the control device 12 and the process information management device 13 corresponding to the recipe for the change instruction or / and the output instruction can communicate with each other. The case where communication is not possible is, for example, a case where the control device 12 is not connected to a network or a case where the control device 12 is shut down. The control device 12 corresponding to the recipe for the change instruction or / and the output instruction is, for example, the control apparatus 12 that stores a recipe identified by the recipe name of the instruction (change instruction or output instruction). For example, the determination unit 1308 searches for information on a pair of the recipe name and the IP address of the control device 12 stored in the management device-side recipe storage unit 1301 using the recipe name included in the instruction as a key, and acquires the IP address. , The instruction “ping IP address” is executed to obtain information about whether or not the control device 12 and the process information management device 13 can communicate. A means (not shown) constantly monitors the communication state with the control device 12 and records the communication state information in a predetermined buffer. The determination unit 1308, for example, stores the predetermined buffer. Referring to the communication state with the control device 12 (whether or not communication is possible) may be acquired. In addition, the determination method of the communication state in the determination part 1308 is not ask | required. The determination unit 1308 can usually be realized by an MPU, a memory, or the like. The processing procedure of the determination unit 1308 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  When the management apparatus side output receiving unit 1303 receives an output instruction, the output unit 1309 outputs a recipe according to the output instruction. When the determination unit 1308 determines that the control device 12 corresponding to the recipe and the process information management device 13 cannot communicate with each other, the output unit 1309 outputs that fact and the recipe. The output unit 1309 outputs the latest recipe among the corresponding recipes according to the output instruction. The output of the recipe may be an output of the contents of the recipe (including steps and process parameters constituting the recipe), or an output of a recipe attribute value such as a recipe name and an update date. Further, the output of the recipe may be an output of both the content of the recipe and the attribute value. The output indicating that communication is not possible may be output of an icon that clearly indicates that communication is not possible (an icon different from the icon when communication is possible), or the menu item for changing the recipe may be grayed out and output. good. Further, the output unit 1309 may output only that the control device 12 corresponding to the recipe corresponding to the change instruction and the process information management device 13 cannot communicate without outputting the recipe. In such a case, when the user copies and pastes the recipe information in order to copy the recipe from a recording medium (not shown), the output unit 1309 indicates that the copied and pasted recipe cannot be changed. You may show by outputting the symbol of "x" mark. Here, the output is a concept including display on a display, printing on a printer, transmission to an external device, storage on a recording medium, and the like. The latest recipe may be a recipe with the largest version number or a recipe with the latest update date and time. The output unit 1309 may be considered as including or not including an output device such as a display or a speaker. The output unit 1309 may be realized by output device driver software, or output device driver software and an output device.

  When the management device-side recipe change unit 1304 changes the recipe in the management device-side recipe storage unit 1301, the history management unit 1310 accumulates information about the recipe before the change of the recipe. Here, “accumulating information about the recipe before the change of the recipe” means that both the pre-update recipe and the post-update recipe exist in the management apparatus-side recipe storage unit 1301. In addition, it is preferable that the history management unit 1310 manages only the difference in the recipe update history (only the change) for each control device 12. The history management unit 1310 can usually be realized by an MPU, a memory, or the like. The processing procedure of the history management unit 1310 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The instruction input receiving unit 141 receives a change instruction, an output instruction, and the like from the user. The change instruction is an instruction for prompting a recipe change. The output instruction is an instruction for prompting the output of the recipe. The instruction input receiving unit 141 may be any input means such as a change instruction or an output instruction, such as a numeric keypad, a keyboard, a mouse, or a menu screen. The instruction input receiving unit 141 can be realized by a device driver of input means such as a numeric keypad or a keyboard, menu screen control software, or the like.

  The instruction sending unit 142 sends the instruction received by the instruction input receiving unit 141 to the process information management apparatus 13. The sending here is usually sending using communication means. The instruction sending unit 142 can be realized by a wireless or wired communication unit or the like.

  The information receiving unit 143 receives information such as a recipe from the process information management device 13. The acceptance here is usually reception using communication means. The information receiving unit 143 can be realized by a wireless or wired communication unit or the like.

  The information display unit 144 displays information such as a recipe received by the information receiving unit 143 on the display. The information display unit 144 may be considered to include or not include a display. The information display unit 144 can be realized by display driver software or display driver software and a display.

  Next, the operation of the group management system will be described. First, operation | movement of the control apparatus 12 is demonstrated using the flowchart of FIG.

  (Step S401) The control device side change receiving unit 1203 determines whether or not a change instruction has been received. If a change instruction is accepted, the process proceeds to step S402, and if a change instruction is not accepted, the process proceeds to step S404.

  (Step S402) The control device-side recipe changing unit 1204 changes the recipe in accordance with the change instruction received in step S401, and accumulates the changed recipe in the control device-side recipe storage unit 1201.

  (Step S403) The control device-side recipe transmission unit 1205 transmits the recipe changed in step S402 to the process information management device 13. Normally, information for identifying the control device 12 (name, ID, IP address, etc. of the control device 12) is given to the recipe to be transmitted. That is, the control device-side recipe transmission unit 1205 reads information for identifying the control device 12 stored in advance, assigns it to the changed recipe (for example, assigns it as an attribute value), and transmits it to the process information management device 13. . The process returns to step S401.

  (Step S <b> 404) The control device-side recipe receiving unit 1206 determines whether or not a recipe has been received from the process information management device 13. If a recipe is received, the process goes to step S405, and if no recipe is received, the process goes to step S406.

  (Step S405) The control device-side recipe storage unit 1207 stores the recipe received in step S404. Here, the control device-side recipe accumulation unit 1207 may overwrite the received recipe, or may newly accumulate in the control device-side recipe storage unit 1201 separately. In such a case, it is preferable that the control device-side recipe storage unit 1207 also stores version information. The data structure of the received recipe may be different from the data structure of the stored recipe. In such a case, the control device-side recipe accumulation unit 1207 accumulates the recipe after performing data conversion. The process returns to step S401.

  (Step S406) The control unit 1202 determines whether or not an instruction to control the processing apparatus 11 has been received. If an instruction to control the processing device 11 is accepted, the process goes to step S407, and if no instruction is accepted, the process returns to step S401.

  (Step S407) The control unit 1202 reads a recipe from the control device-side recipe storage unit 1201.

  (Step S408) The control unit 1202 executes the recipe according to the recipe read out in step S407, and controls the processing apparatus 11. The process returns to step S401.

  In the flowchart of FIG. 4, the processing of the control unit 1202 is a well-known technique, and a description thereof is omitted.

  Further, in the flowchart of FIG. 4, when the received recipe is accumulated, an output for prompting the user's judgment is output, the user's instruction (instruction for allowing the recipe to be accumulated) is accepted, and the recipe received according to the instruction is accumulated. Also good.

  In the flowchart of FIG. 4, the process ends when the power is turned off or the process ends.

  Next, the operation of the process information management apparatus 13 will be described using the flowchart of FIG.

  (Step S501) The management apparatus side output receiving unit 1303 determines whether an output instruction has been received. If an output instruction is accepted, the process goes to step S502, and if no output instruction is accepted, the process returns to step S507.

  (Step S502) The determination unit 1308 acquires the communication information of the control device 12 corresponding to the recipe identifier included in the output instruction. Here, the communication information is information for communicating with the control device 12 or information for determining whether communication is possible. The communication information is, for example, the IP address of the control device 12 (regardless of versions such as Ver4.0 and Ver6.0), the MAC address, and the telephone number. The communication information is stored, for example, in the management device side recipe storage unit 1301 as a pair with the recipe. Furthermore, the recipe identifier is information for identifying a recipe, such as a recipe name or a recipe ID.

  (Step S503) The determination unit 1308 acquires information indicating whether or not communication with the control device 12 is possible using the communication information acquired in step S502. For example, the determination unit 1308 configures and executes an instruction “ping IP address (obtained in step S502)” to obtain an execution result.

  (Step S504) The output unit 1309 reads the recipe identified by the recipe identifier included in the output instruction from the management device-side recipe storage unit 1301.

  (Step S505) The output unit 1309 configures information to be output using the recipe read in step S504 and the communication availability information acquired in step S503. When the information indicating whether communication is possible or not acquired in step S503 is information indicating that communication is not possible, the information to be output includes information indicating that the control device 12 and the process information management device 13 cannot communicate.

  (Step S506) The output unit 1309 outputs the information configured in step S505 to the client device 14. The process returns to step S501.

  (Step S507) The management apparatus side change receiving unit 1302 determines whether or not a recipe change instruction has been received. If a recipe change instruction is accepted, the process proceeds to step S508. If a recipe change instruction is not accepted, the process proceeds to step S516.

  (Step S508) The determination unit 1308 acquires the communication information of the control device 12 corresponding to the recipe identifier included in the change instruction.

  (Step S509) The determination unit 1308 acquires information on whether or not communication with the control device 12 is possible using the communication information acquired in step S508.

  (Step S510) The management apparatus-side recipe change unit 1304 determines whether or not the information acquired in step S509 is information indicating that communication is possible. If communication is possible, go to step S511, and if communication is not possible, go to step S515.

  (Step S511) The management device-side recipe change unit 1304 acquires the changed recipe according to the change instruction received in step S507, and accumulates the recipe in the management device-side recipe storage unit 1301.

  (Step S512) The history management unit 1310 stores the recipe (old recipe) before being changed in Step S511 in the management device-side recipe storage unit 1301. It is assumed that the recipe before being changed in step S511 is stored in the memory.

  (Step S513) The management apparatus side recipe transmission part 1305 transmits the recipe changed by step S511 to the control apparatus 12 corresponding to the said recipe.

  (Step S514) The output unit 1309 outputs the processing result to the client device 14. The result of the processing is information indicating that the recipe has been updated or information indicating that the recipe has not been updated. The process returns to step S501.

  (Step S515) The output unit 1309 configures information indicating that the recipe cannot be changed. Go to step S514.

  (Step S516) The management device-side recipe receiving unit 1306 determines whether or not a recipe has been received from the control device 12. If a recipe is received, the process goes to step S517, and if no recipe is received, the process returns to step S501.

  (Step S517) The management device-side recipe storage unit 1307 stores the recipe received in step S516 in the management device-side recipe storage unit 1301. The process returns to step S501.

  In the flowchart of FIG. 5, after the determination unit 1308 determines whether communication with the control device 12 is possible, the change instruction may be accepted only when communication is possible. That is, if the determination unit 1308 determines that communication with the control device 12 is not possible, the recipe can be output, but any configuration that does not allow the recipe to be changed may be used. Further, when the determination unit 1308 determines that communication with the control device 12 is not possible and outputs a recipe, it is preferable that the control device 12 and the process information management device 13 cannot communicate and that the recipe is output.

  In the flowchart of FIG. 5, the process ends when the power is turned off or the process ends.

  Next, the operation of the client device 14 will be described. When the instruction input receiving unit 141 of the client device 14 receives a change instruction from the user, the instruction sending unit 142 sends the change instruction to the process information management device 13 and receives the processing result in the process information management device 13 as information. The part 143 receives the information and the information display part 144 displays it. When the instruction input receiving unit 141 of the client device 14 receives an output instruction from the user, the instruction sending unit 142 sends the output instruction to the process information management device 13, and the information receiving unit 143 from the process information management device 13. Receives information, and the information display unit 144 displays the information. As a result, a recipe or the like is displayed on the client device 14.

  Hereinafter, a specific operation of the group management system in the present embodiment will be described. A conceptual diagram of the group management system is shown in FIG. In FIG. 6, the group management system includes a process information management device 13, a client device 14, control devices (E1, E2, E3, E4, E5, E6), and processing devices (P1 to P6) corresponding to the control devices. It has. In this group management system, the control device E3 is not currently connected to the network and cannot communicate with the process information management device 13. It is assumed that other control devices can communicate with the process information management device 13.

  Further, the management device-side recipe storage unit 1301 of the process information management device 13 holds a recipe management table shown in FIG. The recipe management table has attributes such as “ID”, “recipe identifier”, “control device information”, “recipe group”, “editor”, “update date / time”, and “version”. “ID” is information for identifying a record and exists for record management in the table. “Recipe identifier” is a recipe name. “Control device information” is the name of the control device in which the recipe is used. One recipe is specified by “recipe identifier” and “control device information”. “Recipe group” is an attribute value of a recipe and indicates a group. “Editor” indicates information for identifying the person who last edited the recipe, “Update date / time” indicates the date / time when the recipe was last updated, and “Version” indicates the version number of the recipe. Although not shown, the management device recipe storage unit 1301 stores the substance of the recipe specified by the “recipe identifier” and the “control device information”. Also, a recipe usually consists of one or more steps. In FIG. 7, the recipe is identified by the attribute values of “recipe identifier” and “control device information”. The reason why there are a plurality of recipe records identified by the attribute values of “recipe identifier” and “control device information” is because recipe version management is performed. That is, the records of “ID = 2” and “ID = 9” in FIG. 7 have the same recipe but different versions. The holding of the entity in the version management of the recipe may be all data or only the difference.

  FIG. 8 is a communication information management table stored in the management device-side recipe storage unit 1301. In FIG. 5, the communication information management table has attributes such as “ID”, “device name”, “node name”, and “IP address”. “ID” is information for identifying a record and exists for record management in the table. “Device name” is the name of the control device. “Node name” is the name of the node corresponding to the control device. “IP address” is an IP address assigned to the control device. Also, the communication information management table has communication information “IP address”.

  In addition, at least the latest recipe is stored in the control device-side recipe storage unit 1201 of each control device (E1 to E6).

  In this situation, first, it is assumed that the user of the client device 14 has input a recipe list output instruction from the keyboard.

  Next, the instruction input receiving unit 141 of the client device 14 receives “recipe list output instruction”. Then, the instruction sending unit 142 sends “recipe list output instruction” to the process information management apparatus 13.

  Next, the process information management apparatus 13 receives “recipe list output instruction”. The “recipe list output instruction” is received by means not shown. Then, the process information management device 13 selects the record with the latest version from the recipe record specified by the “recipe identifier” and “control device information” from the recipe management table of the management device-side recipe storage unit 1301. To obtain the table of FIG. In the table of FIG. 9, the items are sorted in descending order by “recipe identifier” and “control device information”. Then, the process information management device 13 transmits the table of FIG. 9 to the client device 14.

  Next, the information reception unit 143 of the client device 14 receives the information in the table of FIG. 9, and the information display unit 144 displays a recipe list as shown in FIG. In FIG. 10, an “output” button, a “change” button, and an “end button” are displayed. When the “output” button is pressed, a recipe output instruction is issued. When the “change” button is pressed, a recipe change instruction is issued. When the “end button” is pressed, an end instruction is issued. The end instruction is an instruction to end the process.

  Next, it is assumed that the user presses the “output” button in a state where the record of “recipe identifier = RCP1” and “control device information = E3” is focused.

  Then, the instruction input receiving unit 141 receives the output instruction “output RCP1, E3”. Next, the instruction sending unit 142 transmits an output instruction “output RCP1, E3” to the process information management apparatus 13.

  Next, the management apparatus side output receiving unit 1303 of the process information management apparatus 13 receives the output instruction “output RCP1, E3”. Then, the determination unit 1308 obtains the IP address “49.1699.12.3”, which is communication information of the control device E3 corresponding to the recipe identifier “RCP1, E3” included in the output instruction, from the communication information management table of FIG. Get from.

  Next, the determination unit 1308 configures and executes the command “ping 49.1699.12.3” using the acquired communication information “49.1699.12.32.3”. Then, the return value is obtained. As a result, the determination unit 1308 acquires information indicating that communication with the control device E3 is not possible.

  Next, the output unit 1309 reads the recipe identified by the recipe identifier “RCP1, E3” included in the output instruction from the management device-side recipe storage unit 1301. Then, information indicating that communication with the read recipe is not possible is transmitted to the client device 14.

  Next, the information receiving unit 143 of the client device 14 receives the recipe and information indicating that communication is not possible. Then, the information display unit 144 displays the recipe and information indicating that communication is not possible. FIG. 11 shows a display example in the information display unit 144. In FIG. 11, a recipe identifier “RCP1, E3” for identifying a recipe and information (character string and icon) indicating that communication is not possible are displayed. In addition, the contents of the recipe are displayed. The content of the recipe is a plurality of steps, and each step has information (including process parameters) of a plurality of items. In this state, the user cannot change the recipe.

  Next, it is assumed that the user presses the “change” button in a state where the record of “recipe identifier = RCP1” and “control device information = E3” is focused (see FIG. 12).

  Then, the instruction input receiving unit 141 receives the output instruction “change RCP1, E3”. Next, the instruction sending unit 142 sends the output instruction “change RCP1, E3” to the process information management apparatus 13.

  Next, the management apparatus side change receiving unit 1302 of the process information management apparatus 13 receives the change instruction “change RCP1, E3”. Then, the determination unit 1308 obtains the IP address “49.1699.12.3”, which is communication information of the control device E3 corresponding to the recipe identifier “RCP1, E3” included in the change instruction, in the communication information management table of FIG. Get from.

  Next, the determination unit 1308 configures and executes the command “ping 49.1699.12.3” using the acquired communication information “49.1699.12.32.3”. Then, the return value is obtained. As a result, the determination unit 1308 acquires information indicating that communication with the control device E3 is not possible.

  Then, the output unit 1309 configures information “the recipe RCP1 of the control device E3 cannot be changed” indicating that the recipe cannot be changed. Then, the output unit 1309 transmits information “Recipe RCP1 of the control device E3 cannot be changed” to the client device 14.

  Next, the information receiving unit 143 of the client device 14 receives the information “Recipe RCP1 of the control device E3 cannot be changed”, and the information display unit 144 displays the information. An example of such display is shown in FIG.

  With the above processing, the recipe corresponding to the control device 12 that cannot communicate can be browsed but cannot be edited. In the process information management device 13, the displayed recipe is compared with a recipe of another control device, copied as a recipe of another control device, transmitted to another control device, and copied to another control device. It can be done. Since such comparison display and copy processing are known techniques, detailed description thereof will be omitted.

  Next, as shown in FIG. 14, the user presses the “output” button in a state where the records of “recipe identifier = RCP1” and “control device information = E1” are focused.

  Then, the instruction input receiving unit 141 receives the output instruction “output RCP1, E1”. Next, the instruction sending unit 142 transmits an output instruction “output RCP1, E1” to the process information management apparatus 13.

  Next, the management apparatus side output receiving unit 1303 of the process information management apparatus 13 receives the output instruction “output RCP1, E1”. Then, the determination unit 1308 obtains the IP address “198.166.102.1”, which is communication information of the control device E1 corresponding to the recipe identifier “RCP1, E1” included in the output instruction, from the communication information management table of FIG. Get from.

  Next, the determination unit 1308 configures and executes the instruction “ping 198.166.102.1” using the acquired communication information “198.166.102.1”. Then, the return value is obtained. As a result, the determination unit 1308 acquires information indicating that communication with the control device E1 is possible.

  Next, the output unit 1309 reads the recipe identified by the recipe identifier “RCP1, E1” included in the output instruction from the management device-side recipe storage unit 1301. Then, the read recipe and information indicating that communication is possible (including an icon) are transmitted to the client device 14.

  Next, the information reception unit 143 of the client device 14 receives information indicating that communication with the recipe is possible. Then, the information display unit 144 displays information indicating that communication with the recipe is possible. FIG. 15 shows a display example in the information display unit 144. In FIG. 15, a recipe identifier “RCP1, E1” for identifying a recipe and information (a character string and an icon) indicating that communication is possible are displayed.

  Next, it is assumed that the user presses the “change” button in a state where the record of “recipe identifier = RCP1” and “control device information = E1” is focused.

  Then, the instruction input receiving unit 141 receives the output instruction “change RCP1, E1”. Next, the instruction sending unit 142 sends an output instruction “change RCP1, E1” to the process information management apparatus 13.

  Next, the management apparatus side change receiving unit 1302 of the process information management apparatus 13 receives the change instruction “change RCP1, E1”. Then, the determination unit 1308 obtains the IP address “198.166.102.1”, which is communication information of the control device E1 corresponding to the recipe identifier “RCP1, E1” included in the change instruction, in the communication information management table of FIG. Get from.

  Next, the determination unit 1308 configures and executes the instruction “ping 198.166.102.1” using the acquired communication information “198.166.102.1”. Then, the return value is obtained. As a result, the determination unit 1308 acquires information indicating that communication with the control device E1 is possible.

  Then, the output unit 1309 reflects the recipe change transmitted from the client device 14 in the old recipe and accumulates it in the management device-side recipe storage unit 1301. The stored recipe version is incremented by one.

  Next, the history management unit 1310 stores the recipe (old recipe) before being changed in the management device-side recipe storage unit 1301.

  And the management apparatus side recipe transmission part 1305 transmits the changed recipe (new recipe) using the communication information "198.166.102.1" to the control apparatus E1 corresponding to the said recipe.

  Next, the output unit 1309 outputs the processing result (information indicating that the change has been completed) to the client device 14.

  The client device 14 displays the processing result (information indicating that the change has been completed).

  As described above, according to the present embodiment, it is also possible to display a recipe for a control device that cannot communicate. As a result, the recipe of the control device that cannot communicate can be compared with the recipe of another device or copied to another device. In addition, according to the present embodiment, the recipe of the control device that is not communicable can be output, but the recipe cannot be changed, so the recipe is used while ensuring the consistency of the recipe of the control device and the process information management device. (Comparison display, copy, etc.) For example, in a case where device adjustment is frequently performed, such as when a new production line is started up, the control device that holds the recipe to be a master is frequently off-line, and the effect of this function is exhibited.

  In the present embodiment, the output mode of the recipe and communication availability is not limited.

  Further, according to the present embodiment, the recipe history management method in the history management unit is not limited. All data of all versions may be stored, or only changed difference data may be stored.

  In the present embodiment, the recipe modified by the process information management apparatus is reflected on the control apparatus by communication. In the present embodiment, the recipe corrected by the control device is reflected in the process information management device by communication. However, in the present embodiment, only recipes corrected by the process information management apparatus may be reflected in the control apparatus by communication. Moreover, the recipe corrected by the process information management apparatus may be reflected by communication only for some control apparatuses. That is, the means for ensuring the consistency between the recipe of the process information management device and the recipe of the control device corresponding to the recipe is not limited to transmission / reception of a recipe between the process information management device and the control device. Using a portable recording medium, the recipe may be copied to the recording medium to ensure consistency of the recipes between the process information management apparatus and the control apparatus.

  Further, in the present embodiment, it has been described that the recipe of the control device (offline device) that cannot communicate can be referred to but cannot be edited. There is no limitation on the method of informing the user that such editing is impossible. For example, the recipe may not be selected from a menu for editing a recipe by grayout or the like, or when a recipe icon that is an icon corresponding to the recipe is double-clicked, a message indicating that communication is not possible is displayed. After the display, the recipe may be displayed in the reference mode. Further, it is possible to prevent overwriting of the recipe of the offline device by drag and drop operation. Note that the recipe of the control device (online device) capable of communication may be overwritten by a drag-and-drop operation.

  Furthermore, the processing in the present embodiment may be realized by software. Then, this software may be distributed by software download or the like. Further, this software may be recorded and distributed on a recording medium such as a CD-ROM. The software that realizes the process information management apparatus in the present embodiment is the following program. That is, the program includes a management device side change acceptance step for accepting a change instruction for changing a stored recipe in the computer, a management device side output acceptance step for accepting an output instruction for outputting the stored recipe, In response to the change instruction received in the management apparatus side change reception step, and a determination step for determining whether the control apparatus corresponding to the recipe for the change instruction or / and the output instruction can communicate with the process information management apparatus A program for executing the output step of outputting the recipe in response to the output instruction received in the management device-side recipe changing step and the management device-side output receiving step of changing the recipe, the determining step If it is determined that communication is not possible, the recipe can be output. So as not to change the a program, for causing the process to the computer.

  In addition, when the recipe is changed in the management device-side recipe change step, the program is transmitted from the control device to the management device-side recipe transmission step of transmitting the changed recipe to the control device corresponding to the recipe. It is preferable that the program is a program for further executing a management device-side recipe receiving step for receiving a recipe and a management device-side recipe storing step for storing the recipe received in the management device-side recipe receiving step.

  When the program determines that communication is not possible in the determination step and receives an output instruction in the management device-side output reception step, the control device and the process information management device corresponding to the recipe in the output step It is preferable that the communication is not possible and the program outputs the recipe.

  In addition, when the program changes the recipe in the management device-side recipe change step, the program further executes a history management step for storing information about the recipe before the change of the recipe, and in the output step, It is preferable that the program outputs the latest recipe among the corresponding recipes in accordance with the output instruction.

  Moreover, the software which implement | achieves the control apparatus in this Embodiment is the following programs. That is, this program reads a stored recipe into a computer, uses the recipe to control the processing apparatus, and executes a predetermined process for the substrate to be processed, and a recipe change instruction. In response to the control device side change acceptance step that is accepted, and the change instruction accepted in the control device side change acceptance step, the recipe is changed in the control device side recipe change step that changes the recipe, and the control device side recipe change step. A control device side recipe transmission step for transmitting the changed recipe to the process information management device, a control device side recipe reception step for receiving a recipe from the process information management device, and a control device side recipe reception step. To execute the recipe accumulation step on the controller side that accumulates the received recipe Of the program, it is.

  In each of the above embodiments, each process (each function) may be realized by centralized processing by a single device (system), or by distributed processing by a plurality of devices. May be.

  In the above program, in a transmission step for transmitting information, a reception step for receiving information, etc., processing performed by hardware, for example, processing performed by a modem or an interface card in the transmission step (only performed by hardware). Not included) is not included.

  Further, the computer that executes the program may be singular or plural. That is, centralized processing may be performed, or distributed processing may be performed.

  Further, in each of the above embodiments, it goes without saying that two or more communication means (such as an information transmission unit) existing in one apparatus may be physically realized by one medium.

  The present invention is not limited to the above-described embodiments, and various modifications are possible, and it goes without saying that these are also included in the scope of the present invention.

  As described above, the group management system according to the present invention has an effect that a recipe of an off-line control device can be referred to by the process information management device. For example, two or more performing a predetermined process on a substrate to be processed It is useful as a group management system including two or more control devices that respectively control processing devices and a process information management device connected to the control devices.

Conceptual diagram of group management system in an embodiment The figure which shows the example of the same semiconductor wafer manufacturing equipment Block diagram of the group management system Flow chart for explaining the operation of the control device A flowchart for explaining the operation of the process information management apparatus Conceptual diagram of the group management system The figure which shows the same recipe management table Figure showing the communication information management table The figure which shows the recipe information which the process information management apparatus acquires on memory in the middle of processing The figure which shows the example of a display of the recipe list The figure which shows the example of a display in the same information display part The figure which shows the example of input screen of the same change instruction Figure showing a display example of the same error output The figure which shows the input screen example of the same output instruction The figure which shows the example of a display in the same information display part

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Processing apparatus 12 Control apparatus 13 Process information management apparatus 14 Client apparatus 141 Instruction input reception part 142 Instruction sending part 143 Information reception part 144 Information display part 1201 Control apparatus side recipe storage part 1202 Control part 1203 Control apparatus side change reception part 1204 Control Device side recipe change unit 1205 Control device side recipe transmission unit 1206 Control device side recipe reception unit 1207 Control device side recipe storage unit 1301 Management device side recipe storage unit 1302 Management device side change reception unit 1303 Management device side output reception unit 1304 Management device Side recipe change unit 1305 Management device side recipe transmission unit 1306 Management device side recipe reception unit 1307 Management device side recipe storage unit 1308 Judgment unit 1309 Output unit 1310 History management unit

Claims (12)

A group management system comprising two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the two or more control devices,
The controller is
A control device side recipe storage unit storing a recipe used to control the processing device;
Using the recipe in the control device side recipe storage unit, the processing device is controlled, and a control unit for executing a predetermined process on the substrate to be processed is provided.
The process information management device includes:
A management device-side recipe storage unit in which two or more recipes held by the two or more control devices are stored in association with the two or more control devices, respectively;
A management device-side change receiving unit that receives a change instruction to change the recipe in the management device-side recipe storage unit;
A management device-side output receiving unit that receives an output instruction to output a recipe in the management device-side recipe storage unit;
A determination unit that determines whether or not the control apparatus and the process information management apparatus corresponding to the recipe for the change instruction or / and the output instruction can communicate with each other;
In response to the change instruction received by the management device-side change receiving unit, the management device-side recipe changing unit that changes the recipe in the management device-side recipe storage unit;
In response to the output instruction received by the management device side output receiving unit, comprising an output unit that outputs the recipe of the management device side recipe storage unit,
A group management system in which, when the determination unit determines that communication is not possible, the recipe in the management device side recipe storage unit can be output, but the recipe in the management device side recipe storage unit cannot be changed. The controller is
A control device side change accepting unit for accepting a recipe change instruction in the control device side recipe storage unit;
In response to a change instruction received by the control device side change receiving unit, a control device side recipe changing unit that changes the recipe of the control device side recipe storage unit;
When the control device-side recipe change unit changes the recipe, the control device-side recipe transmission unit that transmits the changed recipe to the process information management device;
A control device-side recipe receiving unit that receives a recipe from the process information management device;
A control device side recipe storage unit that stores the recipe received by the control device side recipe receiving unit in the control device side recipe storage unit;
The process information management device includes:
When the management device-side recipe change unit changes the recipe, the management device-side recipe transmission unit that transmits the changed recipe to the control device corresponding to the recipe;
A management device-side recipe receiving unit that receives a recipe from the control device;
The group management system according to claim 1, further comprising a management device-side recipe storage unit that stores the recipe received by the management device-side recipe receiving unit in the management device-side recipe storage unit. When the management device side output reception unit receives an output instruction and the determination unit determines that communication is not possible,
The output unit is
The group management system according to claim 1 or 2, wherein the control device and the process information management device corresponding to the recipe cannot communicate with each other, and the recipe is output. The process information management device includes:
When the management device-side recipe change unit changes the recipe of the management device-side recipe storage unit, the management device-side recipe change unit further includes a history management unit that accumulates information about the recipe before the change of the recipe,
The group management system according to claim 1, wherein the output unit outputs the latest recipe among corresponding recipes according to the output instruction. Two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed; and a process information management device connected to the two or more control devices,
A management device-side recipe storage unit in which two or more recipes held by the two or more control devices are stored in association with the two or more control devices, respectively;
A management device-side change receiving unit that receives a change instruction to change the recipe in the management device-side recipe storage unit;
A management device-side output receiving unit that receives an output instruction to output a recipe in the management device-side recipe storage unit;
A determination unit that determines whether or not the control apparatus and the process information management apparatus corresponding to the recipe for the change instruction or / and the output instruction can communicate with each other;
In response to the change instruction received by the management device-side change receiving unit, the management device-side recipe changing unit that changes the recipe in the management device-side recipe storage unit;
In response to the output instruction received by the management device side output receiving unit, comprising an output unit that outputs the recipe of the management device side recipe storage unit,
A process information management device that can output a recipe in the management device-side recipe storage unit but cannot change a recipe in the management device-side recipe storage unit when the determination unit determines that communication is not possible. When the management device-side recipe change unit changes the recipe, the management device-side recipe transmission unit that transmits the changed recipe to the control device corresponding to the recipe;
A management device-side recipe receiving unit that receives a recipe from the control device;
The process information management device according to claim 5, further comprising a management device-side recipe storage unit that stores the recipe received by the management device-side recipe reception unit in the management device-side recipe storage unit. When the management device side output reception unit receives an output instruction and the determination unit determines that communication is not possible,
The output unit is
The process information management device according to claim 5 or 6, wherein the control device and the process information management device corresponding to the recipe cannot communicate with each other, and the recipe is output. When the management device-side recipe change unit changes the recipe of the management device-side recipe storage unit, the management device-side recipe change unit further includes a history management unit that accumulates information about the recipe before the change of the recipe,
The process information management device according to claim 6, wherein the output unit outputs a latest recipe among corresponding recipes according to the output instruction. Process information constituting a group management system comprising two or more control devices that respectively control two or more processing devices that perform a predetermined process on a substrate to be processed, and a process information management device connected to the two or more control devices. A program for realizing an operation in a management device,
On the computer,
A management device-side output receiving step for receiving an output instruction for outputting a stored recipe;
A management device-side change acceptance step for accepting a change instruction to change a stored recipe;
A determination step of determining whether or not the control device and the process information management device corresponding to the recipe for the change instruction or / and the output instruction are communicable;
In response to the output instruction received in the management device side output receiving step, an output step of outputting the recipe;
In accordance with the change instruction received in the management device side change acceptance step, a program for causing the management device side recipe change step to change the recipe,
Wherein when it is judged not to be capable of communicating at decision step, although it is output recipe that the storage, so as not to change the recipe that the stored program to be processed in a computer. On the computer,
When the recipe is changed in the management device-side recipe change step, the management device-side recipe transmission step of transmitting the changed recipe to the control device corresponding to the recipe;
A management device-side recipe receiving step for receiving a recipe from the control device;
The program according to claim 9, further causing a management device-side recipe storage step for storing the recipe received in the management device-side recipe reception step. When receiving an output instruction in the management device side output receiving step and determining that communication is not possible in the determining step,
In the output step,
The program according to claim 9 or 10, wherein the control device and the process information management device corresponding to the recipe cannot communicate, and the recipe is output. On the computer,
When changing the recipe in the management device side recipe change step, further execute a history management step of storing information about the recipe before the change of the recipe,
The program according to any one of claims 9 to 11, wherein in the output step, the latest recipe among the corresponding recipes is output in accordance with the output instruction.