JPH07240357A - Production control method - Google Patents

Abstract

PURPOSE:To provide a production control method which decides precisely whether materials to be produced are batch-transferred or are individually transferred to a manufacturing device. CONSTITUTION:A production control method is a method which decides whether materials to be produced in a prescribed transfer unit are transferred by a batch transfer machine 8 or are transferred by an individual wafer transfer machine 9 by a host computer 2, the relation between each material to be produced and a continuous processing is examined on the basis of information on processing read out from a database and the computer 2 decides that in the case of a processing having a relation with all the materials to be produced in the transfer unit, the materials are transferred by the machine 8 and in the case of a processing having not even one relation with the materials in the transfer unit, the materials are transferred by the machine 9. In the case where the materials are inclined to batch-transfer by mistake, a warning is generated from the computer 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a production management method for deciding whether to collectively transfer or individually transfer a plurality of products of different types to a manufacturing apparatus.

[0002]

2. Description of the Related Art In manufacturing a product such as a semiconductor device, in recent years, so-called single-wafer management, in which materials such as wafers are individually managed in order to perform high-mix low-volume production, has become popular. It has become. In the single-wafer management, different processing contents can be set for each material such as a wafer, but it is considered that a plurality of materials are collectively transferred from the viewpoint of transfer efficiency.

For example, when manufacturing a semiconductor device, a predetermined number of wafers are set as one lot, and wafers having different processing conditions are collectively transported in lot units. Then, since the wafers transferred in lot units are individually processed, one wafer is transferred from the production management system to various manufacturing apparatuses.
The processing conditions for the sheets are transferred so that different processing can be performed.

In order to enable such transfer in lot units and individual processing for each wafer, the production management system is equipped with an ID recognition transfer machine for recognizing the wafer number, which corresponds to the wafer number. It has a database in which the slot positions of the transfer carriers and the processing conditions of the wafers are stored. After the wafers are transferred in lot units based on this database, the production management system gives instructions to the single wafer transfer machine that transfers the wafers individually, and then transfers the wafers individually from the transfer carrier to the manufacturing apparatus. The processing is performed in the manufacturing apparatus in which the wafers are transferred according to the predetermined conditions stored in the database.

[0005]

However, such a production control method has the following problems. In other words, in the above production management method, since the wafers are transferred in lot units and then individually transferred to the manufacturing apparatus via the single wafer transfer machine, for example, all wafers in the lot are processed. Even if the contents are the same, all the wafers are transferred one by one to the manufacturing apparatus that performs the processing. In such a case, one wafer in the lot
Transferring the sheets causes a decrease in production efficiency, which is a problem in managing the individual sheets. In particular, when the operator transfers the carrier for transportation to each transfer machine, it is necessary to judge for himself whether to use the batch transfer machine or the single-wafer transfer machine. In order to make this judgment, it is necessary to check the processing contents of all the wafers in the lot before transferring to the transfer machine, which requires a lot of labor and time, which causes a decrease in productivity. There is.

[0006]

The present invention is a production control method that has been made to solve such problems. That is, according to the production management method of the present invention, a plurality of different types of products are collectively transported in a predetermined transport unit, and the products of the transport unit are collectively transferred to the manufacturing apparatus or individually transferred. It is a method of determining whether to do in the host computer, first, read the processing information for each product of the transport unit from the information accumulated in the database, and based on the processing information each product and a series of processing Examine each of the relationships. Next, if there is a process that is related to all the products that form the transport unit, it is determined that the products are collectively transferred to the manufacturing apparatus that performs the process, and the products that form the transport unit are determined. When there is at least one process that is not related to the product, it is determined that the product is individually transferred to the manufacturing apparatus that performs the process.

If a batch transfer is erroneously attempted for a process that should be individually transferred after the judgment of batch transfer and individual transfer, a warning is issued from the host computer. It is also a production management method.

[0008]

In the production management method of the present invention, first, the processing information of each product in the transport unit stored in the database is read out and the relationship between each product and a series of processing is examined. This makes it possible to check how each product is related to a series of processes, that is, which product is associated with a process. After investigating the relationship between each product and a series of processes, if there are processes that are related to all the products that make up the transport unit, process all the products collectively. Therefore, it is determined that the products to be processed are collectively transferred to the manufacturing apparatus that performs the processing. Also, if there is at least one process that is not related to the products that make up the transport unit, it is necessary to individually process the products. Make a decision to transfer individually.

Further, according to the production management method of the present invention, after the batch transfer and the individual transfer are determined, if the batch transfer is erroneously attempted for the process to be individually transferred, the host Since the warning is generated from the computer, it becomes possible to prevent serious mistakes in production in advance.

[0010]

Embodiments of the production control method of the present invention will be described below with reference to the drawings. 1 is a schematic diagram illustrating a production management system used in the present invention, FIGS. 2 to 3 are flowcharts illustrating a production management method of the present invention, and FIG. 4 is a diagram illustrating lot processing information.

The production control method of the present invention is performed by a production control system as shown in FIG. For example,
When manufacturing a semiconductor device, a certain amount (for example, 25
Wafers, which are the product of one sheet, are transported in one transport unit (one lot).
I am trying to process it as In the following, production of semiconductor devices will be described as an example for easy understanding of the description. The production management system has a construction in which a workstation 1 and a host computer 2 are connected via a communication line 10, and a process parameter database 3, a lot / single-wafer management database 4 provided in the host computer 2 and The wafers are individually processed (individual management) based on information stored in various databases such as the history database 5.

Further, various kinds of information of the wafer to be processed can be inputted and outputted by the terminal 6 connected to the host computer 2 via the communication line 10, and for example, the manufacturing apparatus ( An apparatus operator who manages (not shown) reads out the information of the wafer to be processed using this terminal 6 and transfers the information of the wafer to be processed to the host computer 2.

Further, for example, a line manager who manages a manufacturing line uses the workstation 1 to store predetermined information in various databases of the host computer 2. That is, the process information 31 including data such as processing conditions for wafers is stored in the process parameter database 3 by the work of the line manager or the like, data relating to individual processing of wafers is stored in the lot / single wafer management database 4, and History information of processing for each wafer is stored in the history database 5.

The present invention is a method for determining whether wafers transferred for each lot are collectively transferred to a manufacturing apparatus (not shown) or individually transferred by using the information stored in these databases. On the terminal 6, for example, information is displayed, based on the determination, whether the transport carrier, which is a lot, is set to the individual transfer machine such as the ID recognition transfer machine 7 or the single-wafer transfer machine 9 or to the batch transfer machine 8. I am trying to let you.

A method of determining whether the lots are collectively transferred or individually transferred will be described below with reference to FIGS. Note that reference numerals not shown in FIGS. 2 to 4 refer to FIG. First, as shown in step 2a of FIG. 2, the line manager or the like registers the lot to be judged from the workstation 1. Lot registration consists of inputting a lot name, the number of wafers T1, presence / absence of each work, wafer setting, etc.
This is performed based on the process information 31 stored in the process parameter database 3 and the wafer processing information 41 stored in the lot / sheet management database.

The presence / absence of each work indicates the involvement of each wafer in the lot with respect to the work performed in a series of steps, and the presence / absence of each work is extracted based on the process information 31 and the wafer processing information 41 input in advance. I do. The relationship between this series of operations and each wafer in the lot is represented by the presence / absence of a “◯” mark in the column of each wafer for each operation name in the lot processing information 42 as shown in FIG.

For example, in the case of the lot processing information 42, the number T1 of wafers constituting one lot (usually one transport carrier) is 6 (wafer numbers 1 to 6),
The presence or absence of the relationship with each operation for each wafer is shown. As an example, it can be seen that the work 1-1 of the process 1 involves the wafer number 1 and the wafer numbers 3 to 6, and these wafers require the work 1-1. Further, for example, it is understood that the work 2-3 of the process 2 is related to all the wafers.

Next, as shown in step 2b of FIG. 2, the host computer 2 or the workstation 1 performs a process of calculating the number T2 of processed wafers in each work. That is, the lot processing information 42 shown in FIG. 4 indicates whether or not a series of work is related to each wafer, and based on this, the number of wafers T2 related to each work T2.
To calculate. For example, in work 1-1, the number of "○" marks is 5
Since it is an individual piece, there are five wafers that are related. Similarly, in work 1-2, 6 sheets are involved, and in work 1-4, 4 sheets are involved.
Becomes

Next, as shown in step 2c of FIG. 2, it is determined whether or not the number T1 and the number T2 described above are equal. The number T1 is the number of constituents of the registered lot, and the number T2 is the number of processed wafers in each work. If the number T1 is equal to the number T2, the determination in step 2c is Yes and the process proceeds to step 2d. If they are different, the process proceeds to step 2e.

When the number of sheets T1 is equal to the number of sheets T2,
It is shown that the work is related to all the wafers that make up the lot, and it can be seen that batch processing is possible in the work. Therefore, in step 2d, a process of inputting the "x" mark in the field for single-wafer processing determination of the lot processing information 42 shown in FIG. 4 is performed (the "x" mark does not require single-wafer processing, that is, batch processing). Means to do).

Further, the case where the number T1 and the number T2 are different is a case where even one of the wafers forming the lot in the operation is not involved, and it is necessary to perform the single-wafer processing in the operation. It indicates that there is.
Therefore, in step 2e, lot processing information 4 shown in FIG.
A process of inputting a "⊚" mark in the field of the single-wafer processing determination 2 is performed (the "⊚" mark means performing a single-wafer process). Such a determination is performed for a series of operations, and a "⊚" mark or a "x" mark is input in the single-wafer processing determination field of the lot processing information 42. Next, as shown in step 2f of FIG. 2, the completed lot processing information 42 is stored in the production management system lot.
It is stored in the single-wafer management database 4.

In this way, the lot processing information 42 is created and stored in the lot / sheet management database 4.
When actually performing the lot work, step 3 in FIG.
First, as shown in a, the operator or the like inputs the number of the lot to be input from the terminal 6. Then, as shown in step 3b, the lot processing information 42 (see FIG. 4) corresponding to the entered lot number is read from the lot / sheet management database 4.

At this time, the data consistency between the input lot number and the lot processing information 42 stored in the lot / sheet management database 4 is determined by the lot number attached to the product and the wafer carrier. The ID, the ID of the box in which the product is stored, and so on. Further, in order to transfer the lot number information to the host computer 2, either a bar code may be used or an operator of the device may manually input the information from the terminal 6.

Next, after the lot processing information 42 corresponding to the number of the lot to be input is read, whether or not the single wafer processing determination in the predetermined work of the lot processing information 42 is "⊚" as shown in step 3c. To judge. If the result in step 3c is Yes, it is determined that the wafers that form the lot are processed separately in the work,
For example, a display indicating that the wafers of the lot are individually transferred is displayed on the terminal 6 (step 3d). Also, in step 3c, N
When the result is “o”, it is determined that the wafers forming the lot are collectively processed in the work, and, for example, a message indicating that the wafers of the lot are collectively transferred is displayed on the terminal 6 (step 3e).

For example, in the case where the operator himself puts the lot into the manufacturing apparatus, referring to the display on the terminal 6,
It is determined whether the lot (conveyance carrier) is set in the individual transfer machines such as the ID recognition transfer machine 7 and the single-wafer transfer machine 9 or the batch transfer machine 8 is set in the lot (transfer carrier).
Further, when a lot is loaded into the manufacturing apparatus by the transfer robot or the like, the transfer robot or the like receives the determination result of step 3c from the host computer 2 and, based on the result, which lot (transfer carrier) ) Is decided.

In general, a thermal diffusion apparatus used in the manufacture of semiconductor devices can process wafers in a batch in many cases, so that lots are set on the batch transfer machine 8 in many cases. It is not always batch processed. Even in such a case, for example, the operator refers to the display of the terminal 6 (indication of whether wafers are collectively transferred or individually transferred) to set the batch transfer machine 8 or the individual transfer machine. It will be possible to make a reliable decision as to whether or not to implement. That is, it is possible to make an accurate determination of collective transfer or individual transfer according to the processing content of each wafer forming a lot, not the type of manufacturing apparatus.

Next, when the lot is set on the individual transfer machine, the individual transfer is started and its history is transferred to the host computer 2 via the communication line 10 as shown in step 3f. Then, as shown in step 3g, the wafer number of the wafer to be transferred is transmitted from the host computer 2 to the individual transfer machine in which the lot is set via the communication line 10, and the transfer of the wafer is started. After the wafer transfer is completed, the history is transferred to the host computer 2 and stored in the history database 5 as shown in step 3h.

When a lot is set on the batch transfer machine 8, batch transfer is started and its history is transferred to the host computer 2 via the communication line 10 as shown in step 3i. After the batch transfer of wafers is completed, the history is transferred to the host computer 2 and stored in the history database 5. Whether the lot to be set is individually transferred by performing the processing explained above,
It is possible to easily determine whether or not the batch transfer is to be performed, and it is possible to perform efficient production.

Next, a case will be described in which after the individual transfer or batch transfer of the lot to be set is judged, the batch to be individually transferred is mistakenly set to the batch transfer machine 8. FIG. 5 is a flow chart for explaining the processing when online. That is, the processing method shown here is for a so-called online state in which the host computer 2, the ID recognition transfer machine 7, the batch transfer machine 8 and the single-wafer transfer machine 9 are connected via the communication line 10. This is a workaround.

First, when a lot is set on the batch transfer machine 8, the lot number is read and the lot number to be input is sent to the host computer 2 (step 5).
a). Reading the lot number is the same as described above.
The ID may be associated with the ID attached to the wafer carrier or the ID of the box for storing the product. To transfer the information corresponding to the lot number to the host computer 2, a bar code may be used or the terminal 6 may be used. It may be manually entered by the operator of the device. Next, it is judged from the lot processing information 42 corresponding to this lot number whether the lot to be processed is for batch transfer (step 5b). If the batch transfer is performed here, the result is Yes and the batch transfer machine 8 directly performs the transfer process as shown in step 5c.

If the result of the determination in step 5b is No, the process proceeds to step 5d, where the host computer 2 gives a warning to the terminal 6 or the terminal attached to the batch transfer machine 8 and the lot is transferred individually. The fact that it is a thing is displayed on the terminal 6. Next, in step 5e, the host computer 2 locks the batch transfer machine 8 on the system (so-called system lock) so that transfer processing cannot be performed at all. This makes it possible to completely prevent the batches to be individually transferred from being collectively transferred by mistake. When releasing the system lock, the host computer 2 side confirms when the carrier for transport is removed from the batch transfer machine 8 or when the reset button (not shown) of the batch transfer machine 8 is pressed. It can be considered that a button (not shown) is pressed.

Next, the processing in the case of the so-called offline state in which the host computer 2 and the batch transfer machine 8 are not connected via the communication line 10 will be described based on the flowchart of FIG. In this case, first, when a lot is set up on the batch transfer machine 8, the device operator or the like operates the terminal 6
Is switched to the screen for operating the transfer machine (step 6a). In the off-line state, the terminal 6 manages a plurality of manufacturing apparatuses (not shown) and transfer machines. In step 6a, the operation screen of the target transfer machine is switched to.

Next, the set lot number is read in as shown in step 6b. The lot number can be read in the same way as described above by the ID given to the wafer carrier.
Or the ID of the box in which the product is stored, or the like. To transfer the information corresponding to the lot number to the host computer 2, a bar code may be used, or the terminal 6 may be used by an operator or the like. You can enter it manually.

Next, as shown in step 6c, it is judged whether or not the lot to be processed is batch transfer, and if Yes, the batch transfer machine 8 performs the transfer process as it is. If No in step 6c, it is judged that the lot set in the batch transfer machine 8 should be transferred individually, and as shown in step 6d, from the host computer 2 to the terminal 6
A warning is given to the terminal 6 and the terminal 6 displays that the lot is individually transferred.

In the case of the off-line state, an operator or the like is alerted by this warning and the display, and the transfer processing by the batch transfer machine 8 is interrupted. This allows
It becomes possible to prevent the batches that are to be individually transferred from being mistakenly collectively transferred. In the above, the case where the batch to be individually transferred was mistakenly set on the batch transfer machine was explained, but on the contrary, the same applies when the batch to be batch transferred is set on the individual transfer machine. Warnings, etc. may be given, which makes it possible to reliably prevent a transfer error.

In this embodiment, an example in which the ID recognition transfer machine 7 and the single-wafer transfer machine 9 are used in combination as individual transfer machines has been shown, but it is always possible to correspond to each manufacturing apparatus. Then, the ID recognition transfer machine 7 may not be provided. For example, the ID recognition transfer machine 7 is provided for every one of a plurality of manufacturing apparatuses, and once the slot position of the carrier is associated with the wafer number, the single wafer transfer machine 9 is used thereafter. Transfer processing can be performed only by itself. Further, in the present embodiment, the production of the semiconductor device has been described as an example, but the present invention is not limited to this.

[0037]

As described above, the production control method of the present invention has the following effects. That is, in the case of single-wafer management and carrying in a predetermined carrying unit, the process information of each product, that is, whether the product transfer for a certain process is batch transfer or individual transfer, that is, It becomes possible to make an easy and accurate determination based on the relationship between the processing and the products constituting the transport unit. For this reason, the product to be produced can be transferred to the manufacturing apparatus accurately, and the productivity can be improved. Further, in the unlikely event that a warning is issued from the host computer in the event that an attempt is made to collectively transfer wafers that should be individually transferred, a serious mistake in production can be prevented in advance. In particular, when the operator decides whether to perform the batch transfer or the individual transfer, the labor in the judgment can be significantly reduced and the error in the judgment can be reduced, so that the reliability of the production can be improved. It will be possible.

[Brief description of drawings]

FIG. 1 is a schematic diagram illustrating a production management system.

FIG. 2 is a flowchart (No. 1) for explaining the present invention.

FIG. 3 is a flowchart (part 2) explaining the present invention.

FIG. 4 is a diagram illustrating lot processing information.

FIG. 5 is a flowchart illustrating processing when online.

FIG. 6 is a flowchart illustrating processing in the case of offline.

[Explanation of symbols]

 1 workstation 2 host computer 3 process parameter database 4 lot / sheet management database 5 history database 6 terminal 7 ID recognition transfer machine 8 batch transfer machine 9 single wafer transfer machine 10 communication line 31 process information 41 wafer processing information 42 Lot processing information

Claims (2)

[Claims] 1. A host computer which transports a plurality of different types of products in a predetermined transport unit and transfers the products of the transport unit to a manufacturing apparatus collectively or individually. In the production management method, the processing information for each product in the transport unit is read from the information stored in the database, and each product and a series of processes are read based on the processing information. After checking each of the relations between the products, if there is a process that is related to all the products that form the transport unit, it is determined that the products are collectively transferred to the manufacturing apparatus that performs the process. However, when there is at least one process that is not related to the product constituting the transport unit, it is determined that the product is individually transferred to the manufacturing apparatus that performs the process. Production control method. 2. The host computer issues a warning when the batch transfer is mistakenly attempted to be collectively transferred for a process to be individually transferred after the judgment of the batch transfer and the individual transfer. The production management method according to claim 1, wherein: